<?xml version="1.0" encoding="UTF-8"?>
<IO_DEFINE xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <VersionID Name="V2.2.3.0" />
  <Dig_In>
    <Block Index="0">
      <DI_ITEM Index="0" Name="DI_LoadDoorClosed" BufferOffset="0" Addr="0" Description="" />
      <DI_ITEM Index="1" Name="DI_LoadDoorOpened" BufferOffset="1" Addr="1" Description="" />
      <DI_ITEM Index="2" Name="DI_UnloadStationDoorClosed" BufferOffset="2" Addr="2" Description="" Visible="false"/>
      <DI_ITEM Index="3" Name="DI_UnloadStationDoorOpened" BufferOffset="3" Addr="3" Description="" Visible="false"/>
      <DI_ITEM Index="4" Name="DI_ReactorADoorClosed" BufferOffset="4" Addr="4" Description="" />
      <DI_ITEM Index="5" Name="DI_ReactorADoorOpened" BufferOffset="5" Addr="5" Description="" />
      <DI_ITEM Index="6" Name="DI_ReactorBDoorClosed" BufferOffset="6" Addr="6" Description="" Visible="false"/>
      <DI_ITEM Index="7" Name="DI_ReactorBDoorOpened" BufferOffset="7" Addr="7" Description="" Visible="false"/>
      <DI_ITEM Index="8" Name="DI_UnloadSubStationDoorClosed" BufferOffset="8" Addr="8" Description=""  Visible="false"/>
      <DI_ITEM Index="9" Name="DI_UnloadSubStationDoorOpened" BufferOffset="9" Addr="9" Description=""  Visible="false"/>
      <DI_ITEM Index="10" Name="DI_BufferStationDoorClosed" BufferOffset="10" Addr="10" Description="" Visible="false"/>
      <DI_ITEM Index="11" Name="DI_BufferStationDoorOpened" BufferOffset="11" Addr="11" Description="" Visible="false"/>
      <DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description="" />
      <DI_ITEM Index="13" Name="DI_LoadLidClosed" BufferOffset="13" Addr="13" Description="" />
      <DI_ITEM Index="14" Name="DI_UnloadStationLidClosed" BufferOffset="14" Addr="14" Description=""  Visible="false"/>
      <DI_ITEM Index="15" Name="DI_BufferStationLidClosed" BufferOffset="15" Addr="15" Description="" />

      <DI_ITEM Index="20" Name="DI_CDAPressureSWReady" BufferOffset="20" Addr="20" Description="" />
      <DI_ITEM Index="21" Name="DI_WaterFlowSWReady" BufferOffset="21" Addr="21" Description="" />
      <DI_ITEM Index="22" Name="DI_LoadLockGateClosed" BufferOffset="22" Addr="22" Description="" />
      <DI_ITEM Index="24" Name="DI_LoadLSideDoorClosed" BufferOffset="24" Addr="24" Description="" />
      <DI_ITEM Index="25" Name="DI_LoadLSideDoorOpened" BufferOffset="25" Addr="25" Description="" />
      <DI_ITEM Index="26" Name="DI_LoadRSideDoorClosed" BufferOffset="26" Addr="26" Description="" Visible="false"/>
      <DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/>
      <DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" />
      <DI_ITEM Index="32" Name="DI_LoadTrayPresence" BufferOffset="32" Addr="32" Description="" />
      <DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" />
      <DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" />
      <DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" />
      <DI_ITEM Index="36" Name="DI_LoaderTraySensor" BufferOffset="36" Addr="36" Description="" />
      <DI_ITEM Index="37" Name="DI_BufferStationOptSensorHigh" BufferOffset="37" Addr="37" Description="" />
      <DI_ITEM Index="38" Name="DI_BufferStationOptSensorMid" BufferOffset="38" Addr="38" Description="" />
      <DI_ITEM Index="39" Name="DI_BufferStationOptSensorLow" BufferOffset="39" Addr="39" Description="" Visible="false"/>
      <DI_ITEM Index="40" Name="DI_UnloadStationWaferPresence" BufferOffset="40" Addr="40" Description="" Visible="false"/>
      <DI_ITEM Index="41" Name="DI_UnloadStationGateINTK" BufferOffset="41" Addr="41" Description="" Visible="false"/>
      <DI_ITEM Index="43" Name="DI_TMDryPump1Alarm" BufferOffset="43" Addr="43" Description="" />
      <DI_ITEM Index="44" Name="DI_TMDryPump1Warning" BufferOffset="44" Addr="44" Description="" />
      <DI_ITEM Index="47" Name="DI_BufferStationBLidClosed" BufferOffset="47" Addr="47" Description="" />
      <DI_ITEM Index="49" Name="DI_TMDryPump1Running" BufferOffset="49" Addr="49" Description="" />
      <DI_ITEM Index="50" Name="DI_GloveBoxLoadwaferReady" BufferOffset="50" Addr="50" Description="" />
      <DI_ITEM Index="51" Name="DI_GloveBoxLoadwaferFinished" BufferOffset="51" Addr="51" Description="" />
      <DI_ITEM Index="52" Name="DI_GloveBoxUnLoadwaferReady" BufferOffset="52" Addr="52" Description="" />
      <DI_ITEM Index="53" Name="DI_GloveBoxUnLoadwaferFinished" BufferOffset="53" Addr="53" Description="" />
      <DI_ITEM Index="54" Name="DI_GloveBoxReady" BufferOffset="54" Addr="54" Description="" />
      <DI_ITEM Index="55" Name="DI_GloveBoxSpare01" BufferOffset="55" Addr="55" Description="" />
      <DI_ITEM Index="56" Name="DI_GloveBoxSpare02" BufferOffset="56" Addr="56" Description="" />
      <DI_ITEM Index="57" Name="DI_GloveBoxSpare03" BufferOffset="57" Addr="57" Description="" />

      <DI_ITEM Index="62" Name="DI_LoadLidLockedR" BufferOffset="62" Addr="62" Description="" Visible=""/>
      <DI_ITEM Index="63" Name="DI_LoadLidUnlockedR" BufferOffset="63" Addr="63" Description="" Visible=""/>
      <DI_ITEM Index="64" Name="DI_LoaderLifterCYUp" BufferOffset="64" Addr="64" Description="" Visible=""/>
      <DI_ITEM Index="65" Name="DI_LoaderLifterCYDown" BufferOffset="65" Addr="65" Description=""  Visible=""/>
      <DI_ITEM Index="66" Name="DI_LoadWaferCYClamped" BufferOffset="66" Addr="66" Description="" Visible=""/>
      <DI_ITEM Index="67" Name="DI_LoadWafeCYOpened" BufferOffset="67" Addr="67" Description="" Visible=""/>
      <DI_ITEM Index="68" Name="DI_LoadTrayCYClamped" BufferOffset="68" Addr="68" Description="" Visible=""/>
      <DI_ITEM Index="69" Name="DI_LoadTrayCYOpend" BufferOffset="69" Addr="69" Description="" Visible=""/>
      <DI_ITEM Index="72" Name="DI_UnloadStationWaferCYClamped" BufferOffset="72" Addr="72" Description="" Visible="false"/>
      <DI_ITEM Index="73" Name="DI_UnloadStationWaferCYOpened" BufferOffset="73" Addr="73" Description="" Visible="false"/>
      <DI_ITEM Index="74" Name="DI_UnloadStationLifterCYUp" BufferOffset="74" Addr="74" Description="" Visible="false"/>
      <DI_ITEM Index="75" Name="DI_UnloadStationLifterCYDown" BufferOffset="75" Addr="75" Description="" Visible="false"/>


      <DI_ITEM Index="88" Name="DI_TMPressure1ATM" BufferOffset="88" Addr="88" Description="" />
      <DI_ITEM Index="89" Name="DI_TMPressure1VAC" BufferOffset="89" Addr="89" Description="" />
      <DI_ITEM Index="90" Name="DI_LoadPressureATM" BufferOffset="90" Addr="90" Description="" />
      <DI_ITEM Index="91" Name="DI_LoadPressureVAC" BufferOffset="91" Addr="91" Description="" />
      <DI_ITEM Index="92" Name="DI_TMPressure2ATM" BufferOffset="92" Addr="92" Description="" />
      <DI_ITEM Index="93" Name="DI_TMPressure2VAC" BufferOffset="93" Addr="93" Description="" />
      <DI_ITEM Index="94" Name="DI_UnloadPressureATM" BufferOffset="94" Addr="94" Description="" Visible="false"/>
      <DI_ITEM Index="95" Name="DI_UnloadPressureVAC" BufferOffset="95" Addr="95" Description="" Visible="false"/>
      <DI_ITEM Index="96" Name="DI_LoadSlowPumpFB" BufferOffset="96" Addr="96" Description="V84" />
      <DI_ITEM Index="97" Name="DI_LoadFastPumpFB" BufferOffset="97" Addr="97" Description="V83" />
      <DI_ITEM Index="98" Name="DI_TMSlowPumpFB" BufferOffset="98" Addr="98" Description="V82" />
      <DI_ITEM Index="99" Name="DI_TMFastPumpFB" BufferOffset="99" Addr="99" Description="V81" />
      <DI_ITEM Index="100" Name="DI_BufferVentFB" BufferOffset="100" Addr="100" Description="V80"  Visible="false"/>
      <DI_ITEM Index="101" Name="DI_LoadVentFB" BufferOffset="101" Addr="101" Description="V79" />
      <DI_ITEM Index="102" Name="DI_TMVentFB" BufferOffset="102" Addr="102" Description="V77" />
      <DI_ITEM Index="103" Name="DI_UnloadVentFB" BufferOffset="103" Addr="103" Description="V78" Visible="false"/>
      <DI_ITEM Index="104" Name="DI_TMLoadBanlanceFB" BufferOffset="104" Addr="104" Description="V85" />
      <DI_ITEM Index="105" Name="DI_LoadDoorCloseFB" BufferOffset="105" Addr="105" Description="" />
      <DI_ITEM Index="106" Name="DI_LoadDoorOpenFB" BufferOffset="106" Addr="106" Description="" />
      <DI_ITEM Index="107" Name="DI_UnloadStationDoorCloseFB" BufferOffset="107" Addr="107" Description=""  Visible="false"/>
      <DI_ITEM Index="108" Name="DI_UnloadStationDoorOpenFB" BufferOffset="108" Addr="108" Description=""  Visible="false"/>
      <DI_ITEM Index="109" Name="DI_RectorADoorCloseFB" BufferOffset="109" Addr="109" Description="" />
      <DI_ITEM Index="110" Name="DI_RectorADoorOpenFB" BufferOffset="110" Addr="110" Description="" />
      <DI_ITEM Index="111" Name="DI_RectorBDoorCloseFB" BufferOffset="111" Addr="111" Description=""  Visible="false"/>
      <DI_ITEM Index="112" Name="DI_RectorBDoorOpenFB" BufferOffset="112" Addr="112" Description=""  Visible="false"/>
      <DI_ITEM Index="113" Name="DI_TMToUnloadBanlanceFB" BufferOffset="113" Addr="113" Description="V124" Visible="false"/>
      <DI_ITEM Index="114" Name="DI_VacRobotEstopFB" BufferOffset="114" Addr="114" Description="" />
      <DI_ITEM Index="115" Name="DI_VacRobotExtenLoadEnableFB" BufferOffset="115" Addr="115" Description="" />
      <DI_ITEM Index="116" Name="DI_VacRobotExtendUnloadEnableFB" BufferOffset="116" Addr="116" Description="" />
      <DI_ITEM Index="117" Name="DI_VacRobotExtendPMAEnableFB" BufferOffset="117" Addr="117" Description="" />
      <DI_ITEM Index="118" Name="DI_VacRobotExtendPMBEnableFB" BufferOffset="118" Addr="118" Description="" />
      <DI_ITEM Index="119" Name="DI_VacRobotExtendBufferEnableFB" BufferOffset="119" Addr="119" Description="" />
      <DI_ITEM Index="120" Name="DI_ATMRobotExtendUnloadEnableFB" BufferOffset="120" Addr="120" Description="" Visible=""/>
      <DI_ITEM Index="121" Name="DI_ATMRobotExtendLoadLSideEnableFB" BufferOffset="121" Addr="121" Description="" Visible=""/>
      <DI_ITEM Index="122" Name="DI_ATMRobotExtendLoadRSideEnableFB" BufferOffset="122" Addr="122" Description="" Visible=""/>
      <DI_ITEM Index="123" Name="DI_LoadLSideDoorCloseFB" BufferOffset="123" Addr="123" Description="" Visible=""/>
      <DI_ITEM Index="124" Name="DI_LoadLSideDoorOpenFB" BufferOffset="124" Addr="124" Description="" Visible=""/>
      <DI_ITEM Index="125" Name="DI_LoadLockWaferCYUPFB" BufferOffset="125" Addr="125" Description="" />
      <DI_ITEM Index="126" Name="DI_LoadLockWaferCYDownFB" BufferOffset="126" Addr="126" Description="" />
      <DI_ITEM Index="127" Name="DI_UnloadSubStationDoorCloseFB" BufferOffset="127" Addr="127" Description="" Visible="false"/>
      <DI_ITEM Index="128" Name="DI_UnloadSubStationDoorOpenFB" BufferOffset="128" Addr="128" Description="" Visible="false"/>
      <DI_ITEM Index="129" Name="DI_BufferStationDoorCloseFB" BufferOffset="129" Addr="129" Description=""  Visible="false"/>
      <DI_ITEM Index="130" Name="DI_BufferStationDoorOpenFB" BufferOffset="130" Addr="130" Description=""  Visible="false"/>
      <DI_ITEM Index="131" Name="DI_GloveBoxLoadwaferFB" BufferOffset="131" Addr="131" Description="" />
      <DI_ITEM Index="132" Name="DI_GloveBoxUnLoadwaferFB" BufferOffset="132" Addr="132" Description="" />

      <DI_ITEM Index="139" Name="DI_UnloadStationWaferCYClampFB" BufferOffset="139" Addr="139" Description="" Visible="false"/>
      <DI_ITEM Index="140" Name="DI_UnloadStationWaferCYOpenFB" BufferOffset="140" Addr="140" Description="" Visible="false"/>
      <DI_ITEM Index="141" Name="DI_UnloadStationLifterCYUpFB" BufferOffset="141" Addr="141" Description="" Visible="false"/>
      <DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" Visible="false"/>
      <DI_ITEM Index="143" Name="DI_TMToPMABanlanceFB" BufferOffset="143" Addr="143" Description="" />
      <DI_ITEM Index="144" Name="DI_TMToPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" />

      <DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122" Visible="false"/>
      <DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123" Visible="false"/>
      <DI_ITEM Index="160" Name="DI_ReactorAATMTransferReadyFB" BufferOffset="160" Addr="160" Description="" />
      <DI_ITEM Index="161" Name="DI_ReactorAProcessTransferReadyFB" BufferOffset="161" Addr="161" Description="" />
      <DI_ITEM Index="162" Name="DI_ReactorBATMTransferReadyFB" BufferOffset="162" Addr="162" Description="" />
      <DI_ITEM Index="163" Name="DI_ReactorBProcessTransferReadyFB" BufferOffset="163" Addr="163" Description="" />
      <DI_ITEM Index="164" Name="DI_PreheatATMTransferReadyFB" BufferOffset="164" Addr="164" Description="" />
      <DI_ITEM Index="165" Name="DI_PreheatProcessTransferReadyFB" BufferOffset="165" Addr="165" Description="" />
      <DI_ITEM Index="167" Name="DI_TMWaferPresenceLLFB" BufferOffset="167" Addr="167" Description="" />
      <DI_ITEM Index="168" Name="DI_TMWaferPresenceAFB" BufferOffset="168" Addr="168" Description="" />
      <DI_ITEM Index="169" Name="DI_TMWaferPresenceBFB" BufferOffset="169" Addr="169" Description="" />
      <DI_ITEM Index="170" Name="DI_TMWaferPresenceBufFB" BufferOffset="170" Addr="170" Description="" />
      <DI_ITEM Index="171" Name="DI_TMWaferPresenceUnloadFB" BufferOffset="171" Addr="171" Description="" />
      <DI_ITEM Index="174" Name="DI_ForelineBasePressureReadyFB" BufferOffset="174" Addr="174" Description="" />
      <DI_ITEM Index="175" Name="DI_TMatATMFB" BufferOffset="175" Addr="175" Description="" />
      <DI_ITEM Index="176" Name="DI_LoadAtATMFB" BufferOffset="176" Addr="176" Description="" />
      <DI_ITEM Index="177" Name="DI_TMUnderVacFB" BufferOffset="177" Addr="177" Description="" />
      <DI_ITEM Index="178" Name="DI_LoadUnderVACFB" BufferOffset="178" Addr="178" Description="" />
      <DI_ITEM Index="179" Name="DI_TMAtProcessPressFB" BufferOffset="179" Addr="179" Description="" />
      <DI_ITEM Index="180" Name="DI_LLAtProcessPressFB" BufferOffset="180" Addr="180" Description="" />
      <DI_ITEM Index="181" Name="DI_LoadTempReadyFB" BufferOffset="181" Addr="181" Description="" />
      <DI_ITEM Index="182" Name="DI_BufferTempReadyFB" BufferOffset="182" Addr="182" Description="" />
      <DI_ITEM Index="185" Name="DI_TMCyclePurgeRoutineRunningFB" BufferOffset="185" Addr="185" Description="" />
      <DI_ITEM Index="186" Name="DI_TMLeakCheckRoutineRunningFB" BufferOffset="186" Addr="186" Description="" />
      <DI_ITEM Index="187" Name="DI_TMPumpDownRoutineRunningFB" BufferOffset="187" Addr="187" Description="" />
      <DI_ITEM Index="188" Name="DI_TMServoPressRoutineRunningFB" BufferOffset="188" Addr="188" Description="" />
      <DI_ITEM Index="189" Name="DI_TMVentUpRoutineRunningFB" BufferOffset="189" Addr="189" Description="" />
      <DI_ITEM Index="190" Name="DI_LLCyclePurgeRoutineRunningFB" BufferOffset="190" Addr="190" Description="" />

      <DI_ITEM Index="191" Name="DI_LLLeakCheckRoutineRunningFB" BufferOffset="191" Addr="191" Description="" Visible=""/>
      <DI_ITEM Index="192" Name="DI_LLPumpDownRoutineRunningFB" BufferOffset="192" Addr="192" Description="" Visible=""/>
      <DI_ITEM Index="193" Name="DI_LLVentUpRoutineRunningFB" BufferOffset="193" Addr="193" Description="" Visible=""/>



      <DI_ITEM Index="208" Name="DI_LdRotationServoOn" BufferOffset="208" Addr="208" Description="" Visible=""/>
      <DI_ITEM Index="209" Name="DI_LdRotationBusy" BufferOffset="209" Addr="209" Description="" Visible=""/>
      <DI_ITEM Index="210" Name="DI_LdRotationServoError" BufferOffset="210" Addr="210" Description="" Visible=""/>
      <DI_ITEM Index="211" Name="DI_LdRotationMoveDone" BufferOffset="211" Addr="211" Description="" Visible=""/>
      <DI_ITEM Index="212" Name="DI_LdRotationRelativeHomeDone" BufferOffset="212" Addr="212" Description="" Visible=""/>
      <DI_ITEM Index="213" Name="DI_LdRotationOneCircleDone" BufferOffset="213" Addr="213" Description="" Visible=""/>
      <DI_ITEM Index="214" Name="DI_LdRotationCCD1PosDone" BufferOffset="214" Addr="214" Description="" Visible=""/>
      <DI_ITEM Index="215" Name="DI_LdRotationCCD2PosDone" BufferOffset="215" Addr="215" Description="" Visible=""/>


      <!--存放垃圾IO数据-->
      <DI_ITEM Index="220" Name="DI_WaferCassetLeftInch6" BufferOffset="220" Addr="220" Description="" Visible="false"/>
      <DI_ITEM Index="220" Name="DI_WaferCassetRightInch6" BufferOffset="220" Addr="220" Description="" Visible="false"/>
      <DI_ITEM Index="220" Name="DI_WaferCassetLeftConvexSensor" BufferOffset="220" Addr="220" Description="" Visible="false"/>
      <DI_ITEM Index="220" Name="DI_WaferCassetRightConvexSensor" BufferOffset="220" Addr="220" Description="" Visible="false"/>
      <DI_ITEM Index="220" Name="DI_TrayCassetInch6" BufferOffset="220" Addr="220" Description="" Visible="false"/>
      <DI_ITEM Index="220" Name="DI_TrayCassetConvexSensor" BufferOffset="220" Addr="220" Description="" Visible="false"/>

      <DI_ITEM Index="220" Name="DI_LoadWaferCYClampFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
      <DI_ITEM Index="220" Name="DI_LoadWaferCYOpenFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
      <DI_ITEM Index="220" Name="DI_LoadTrayCYClampFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
      <DI_ITEM Index="220" Name="DI_LoadTrayCYOpenFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>

      <DI_ITEM Index="220" Name="DI_LoadRSideDoorCloseFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
      <DI_ITEM Index="220" Name="DI_LoadRSideDoorOpenFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
      <!--存放垃圾IO数据-->

      <DI_ITEM Index="221" Name="DI_TMPMAS7ComErr" BufferOffset="221" Addr="221" Description="" />
      <DI_ITEM Index="222" Name="DI_TMPMATCPComErr" BufferOffset="222" Addr="222" Description="" />
      <DI_ITEM Index="223" Name="DI_TMPMBS7ComErr" BufferOffset="223" Addr="223" Description="" />
    </Block>
  </Dig_In>
  <Dig_Out>
    <Block Index="0">
      <DO_ITEM Index="0" Name="DO_LoadSlowPump" BufferOffset="0" Addr="0" Description="V84" />
      <DO_ITEM Index="1" Name="DO_LoadFastPump" BufferOffset="1" Addr="1" Description="V83" />
      <DO_ITEM Index="2" Name="DO_TMSlowPump" BufferOffset="2" Addr="2" Description="V82" />
      <DO_ITEM Index="3" Name="DO_TMFastPump" BufferOffset="3" Addr="3" Description="V81" />
      <DO_ITEM Index="4" Name="DO_BufferVent" BufferOffset="4" Addr="4" Description="V80" Visible="false"/>
      <DO_ITEM Index="5" Name="DO_LoadVent" BufferOffset="5" Addr="5" Description="V79" />
      <DO_ITEM Index="6" Name="DO_TMVent" BufferOffset="6" Addr="6" Description="V77" />
      <DO_ITEM Index="7" Name="DO_UnloadVent" BufferOffset="7" Addr="7" Description="V78" />
      <DO_ITEM Index="8" Name="DO_TMLoadBanlance" BufferOffset="8" Addr="8" Description="V85" />
      <DO_ITEM Index="9" Name="DO_LoadDoorClose" BufferOffset="9" Addr="9" Description="" />
      <DO_ITEM Index="10" Name="DO_LoadDoorOpen" BufferOffset="10" Addr="10" Description="" />
      <DO_ITEM Index="11" Name="DO_UnloadStationDoorClose" BufferOffset="11" Addr="11" Description="" Visible="false"/>
      <DO_ITEM Index="12" Name="DO_UnloadStationDoorOpen" BufferOffset="12" Addr="12" Description="" Visible="false"/>
      <DO_ITEM Index="13" Name="DO_RectorADoorClose" BufferOffset="13" Addr="13" Description="" />
      <DO_ITEM Index="14" Name="DO_RectorADoorOpen" BufferOffset="14" Addr="14" Description="" />
      <DO_ITEM Index="15" Name="DO_RectorBDoorClose" BufferOffset="15" Addr="15" Description="" Visible="false"/>
      <DO_ITEM Index="16" Name="DO_RectorBDoorOpen" BufferOffset="16" Addr="16" Description="" Visible="false"/>
      <DO_ITEM Index="17" Name="DO_TMToUnloadBanlance" BufferOffset="17" Addr="17" Description="V124" Visible="false"/>
      <DO_ITEM Index="18" Name="DO_VacRobotEstop" BufferOffset="18" Addr="18" Description="" />
      <DO_ITEM Index="19" Name="DO_VacRobotExtenLoadEnable" BufferOffset="19" Addr="19" Description="" />
      <DO_ITEM Index="20" Name="DO_VacRobotExtendUnloadEnable" BufferOffset="20" Addr="20" Description="" />
      <DO_ITEM Index="21" Name="DO_VacRobotExtendPMAEnable" BufferOffset="21" Addr="21" Description="" />
      <DO_ITEM Index="22" Name="DO_VacRobotExtendPMBEnable" BufferOffset="22" Addr="22" Description="" />
      <DO_ITEM Index="23" Name="DO_VacRobotExtendBufferEnable" BufferOffset="23" Addr="23" Description="" />
      <DO_ITEM Index="24" Name="DO_ATMRobotExtendUnloadEnable" BufferOffset="24" Addr="24" Description="" />
      <DO_ITEM Index="25" Name="DO_ATMRobotExtendLoaLSideEnable" BufferOffset="25" Addr="25" Description="" />
      <DO_ITEM Index="26" Name="DO_ATMRobotExtendLoaRSideEnable" BufferOffset="26" Addr="26" Description="" />
      <DO_ITEM Index="27" Name="DO_LoadLSideDoorClose" BufferOffset="27" Addr="27" Description=""/>
      <DO_ITEM Index="28" Name="DO_LoadLSideDoorOpen" BufferOffset="28" Addr="28" Description="" />
      <DO_ITEM Index="29" Name="DO_LoadLockWaferCYUP" BufferOffset="29" Addr="29" Description="" />
      <DO_ITEM Index="30" Name="DO_LoadLockWaferCYDown" BufferOffset="30" Addr="30" Description="" />
      <DO_ITEM Index="31" Name="DO_UnloadSubStationDoorClose" BufferOffset="31" Addr="31" Description="" Visible="false"/>
      <DO_ITEM Index="32" Name="DO_UnloadSubStationDoorOpen" BufferOffset="32" Addr="32" Description="" Visible="false"/>
      <DO_ITEM Index="33" Name="DO_BufferStationDoorClose" BufferOffset="33" Addr="33" Description="" Visible="false"/>
      <DO_ITEM Index="34" Name="DO_BufferStationDoorOpen" BufferOffset="34" Addr="34" Description="" Visible="false"/>
      <DO_ITEM Index="35" Name="DO_GloveBoxLoadwafer" BufferOffset="35" Addr="35" Description="" />
      <DO_ITEM Index="36" Name="DO_GloveBoxUnLoadwafer" BufferOffset="36" Addr="36" Description="" />
      <DO_ITEM Index="37" Name="DO_GloveBoxSpare01" BufferOffset="37" Addr="37" Description="" />
      <DO_ITEM Index="38" Name="DO_GloveBoxSpare02" BufferOffset="38" Addr="38" Description="" />
      <DO_ITEM Index="39" Name="DO_GloveBoxSpare03" BufferOffset="39" Addr="39" Description="" />
      <DO_ITEM Index="40" Name="DO_GloveBoxSpare04" BufferOffset="40" Addr="40" Description="" />
      <DO_ITEM Index="41" Name="DO_GloveBoxSpare05" BufferOffset="41" Addr="41" Description="" />
      <DO_ITEM Index="42" Name="DO_GloveBoxSpare06" BufferOffset="42" Addr="42" Description="" />
      <DO_ITEM Index="43" Name="DO_UnloadStationWaferCYClamp" BufferOffset="43" Addr="43" Description="" Visible="false"/>
      <DO_ITEM Index="44" Name="DO_UnloadStationWaferCYOpen" BufferOffset="44" Addr="44" Description="" Visible="false"/>
      <DO_ITEM Index="45" Name="DO_UnloadStationLifterCYUp" BufferOffset="45" Addr="45" Description="" Visible="false"/>
      <DO_ITEM Index="46" Name="DO_UnloadStationLifterCYDown" BufferOffset="46" Addr="46" Description="" Visible="false"/>
      <DO_ITEM Index="47" Name="DO_TMToPMABanlance(V70-1)" BufferOffset="47" Addr="47" Description="" />
      <DO_ITEM Index="48" Name="DO_TMToPMBBanlance(V70-2)" BufferOffset="48" Addr="48" Description="" />

      <DO_ITEM Index="55" Name="DO_TowerGreen" BufferOffset="55" Addr="55" Description="" />
      <DO_ITEM Index="56" Name="DO_TowerYellow" BufferOffset="56" Addr="56" Description="" />
      <DO_ITEM Index="57" Name="DO_TowerRed" BufferOffset="57" Addr="57" Description="" />
      <DO_ITEM Index="58" Name="DO_Buzzer" BufferOffset="58" Addr="58" Description="" />

      <DO_ITEM Index="61" Name="DO_UnloadFastPump" BufferOffset="61" Addr="61" Description="V122" Visible="false"/>
      <DO_ITEM Index="62" Name="DO_UnloadSlowPump" BufferOffset="62" Addr="62" Description="V123" Visible="false"/>
      <DO_ITEM Index="64" Name="DO_ReactorAATMTransferReady" BufferOffset="64" Addr="64" Description="" />
      <DO_ITEM Index="65" Name="DO_ReactorAProcessTransferReady" BufferOffset="65" Addr="65" Description="" />
      <DO_ITEM Index="66" Name="DO_ReactorBATMTransferReady" BufferOffset="66" Addr="66" Description="" />
      <DO_ITEM Index="67" Name="DO_ReactorBProcessTransferReady" BufferOffset="67" Addr="67" Description="" />
      <DO_ITEM Index="68" Name="DO_PreheatATMTransferReady" BufferOffset="68" Addr="68" Description="" />
      <DO_ITEM Index="69" Name="DO_PreheatProcessTransferReady" BufferOffset="69" Addr="69" Description="" />
      <DO_ITEM Index="71" Name="DO_TMWaferPresenceLL" BufferOffset="71" Addr="71" Description="" />
      <DO_ITEM Index="72" Name="DO_TMWaferPresenceA" BufferOffset="72" Addr="72" Description="" />
      <DO_ITEM Index="73" Name="DO_TMWaferPresenceB" BufferOffset="73" Addr="73" Description="" />
      <DO_ITEM Index="74" Name="DO_TMWaferPresenceBuf" BufferOffset="74" Addr="74" Description="" />
      <DO_ITEM Index="75" Name="DO_TMWaferPresencePreheat" BufferOffset="75" Addr="75" Description="" />
      <DO_ITEM Index="78" Name="DO_ForelineBasePressureReady" BufferOffset="78" Addr="78" Description="" />
      <DO_ITEM Index="79" Name="DO_TMatATM" BufferOffset="79" Addr="79" Description="" />
      <DO_ITEM Index="80" Name="DO_LoadAtATM" BufferOffset="80" Addr="80" Description="" />
      <DO_ITEM Index="81" Name="DO_TMUnderVac" BufferOffset="81" Addr="81" Description="" />
      <DO_ITEM Index="82" Name="DO_LoadUnderVAC" BufferOffset="82" Addr="82" Description="" />
      <DO_ITEM Index="83" Name="DO_TMAtProcessPress" BufferOffset="83" Addr="83" Description="" />
      <DO_ITEM Index="84" Name="DO_LoadAtProcessPress" BufferOffset="84" Addr="84" Description="" />
      <DO_ITEM Index="85" Name="DO_LoadTempReady" BufferOffset="85" Addr="85" Description="" />
      <DO_ITEM Index="86" Name="DO_BufferTempReady" BufferOffset="86" Addr="86" Description="" />
      <DO_ITEM Index="88" Name="DO_TMCyclePurgeRoutineSuccessed" BufferOffset="88" Addr="88" Description="" />
      <DO_ITEM Index="89" Name="DO_TMCyclePurgeRoutineRunning" BufferOffset="89" Addr="89" Description="" />
      <DO_ITEM Index="90" Name="DO_TMLeakCheckRoutineRunning" BufferOffset="90" Addr="90" Description="" />
      <DO_ITEM Index="91" Name="DO_TMPumpDownRoutineRunning" BufferOffset="91" Addr="91" Description="" />
      <DO_ITEM Index="92" Name="DO_TMServoPressRoutineRunning" BufferOffset="92" Addr="92" Description="" />
      <DO_ITEM Index="93" Name="DO_TMVentUpRoutineRunning" BufferOffset="93" Addr="93" Description="" />
      <DO_ITEM Index="94" Name="DO_LoadCyclePurgeRoutineRunning" BufferOffset="94" Addr="94" Description="" />
      <DO_ITEM Index="95" Name="DO_LoadLeakCheckRoutineRunning" BufferOffset="95" Addr="95" Description="" />
      <DO_ITEM Index="96" Name="DO_LoadPumpDownRoutineRunning" BufferOffset="96" Addr="96" Description="" />
      <DO_ITEM Index="97" Name="DO_LoadVentUpRoutineRunning" BufferOffset="97" Addr="97" Description="" />
      <DO_ITEM Index="98" Name="DO_UnLoadCyclePurgeRoutineRunning" BufferOffset="98" Addr="98" Description="" Visible="false"/>
      <DO_ITEM Index="99" Name="DO_UnLoadLeakCheckRoutineRunning" BufferOffset="99" Addr="99" Description="" Visible="false"/>
      <DO_ITEM Index="100" Name="DO_UnLoadPumpDownRoutineRunning" BufferOffset="100" Addr="100" Description="" Visible="false"/>
      <DO_ITEM Index="101" Name="DO_UnLoadVentUpRoutineRunning" BufferOffset="101" Addr="101" Description="" Visible="false"/>

      <DO_ITEM Index="144" Name="DO_LdRotationServoOn" BufferOffset="144" Addr="144" Description="" Visible="false"/>
      <DO_ITEM Index="145" Name="DO_LdRotationReset" BufferOffset="145" Addr="145" Description="" Visible="false"/>
      <DO_ITEM Index="146" Name="DO_LdRotationJogCW" BufferOffset="146" Addr="146" Description="" Visible="false"/>
      <DO_ITEM Index="147" Name="DO_LdRotationJogCCW" BufferOffset="147" Addr="147" Description="" Visible="false"/>
      <DO_ITEM Index="148" Name="DO_LdRotationStop" BufferOffset="148" Addr="148" Description="" Visible="false"/>
      <DO_ITEM Index="149" Name="DO_LdRotationCCD1Teah" BufferOffset="149" Addr="149" Description="" Visible="false"/>
      <DO_ITEM Index="150" Name="DO_LdRotationCCD2Teah" BufferOffset="150" Addr="150" Description="" Visible="false"/>
      <DO_ITEM Index="151" Name="DO_LdRotationMoveRelativeHome" BufferOffset="151" Addr="151" Description="" Visible="false"/>
      <DO_ITEM Index="152" Name="DO_LdRotationMoveOneCircle" BufferOffset="152" Addr="152" Description="" Visible="false"/>
      <DO_ITEM Index="153" Name="DO_LdRotationMoveCCD1Pos" BufferOffset="153" Addr="153" Description="" Visible="false"/>
      <DO_ITEM Index="154" Name="DO_LdRotationMoveCCD2Pos" BufferOffset="154" Addr="154" Description="" Visible="false"/>

      <!--垃圾IO数据-->
      <DO_ITEM Index="158" Name="DO_LoadLidLock" BufferOffset="158" Addr="158" Description="" Visible="false"/>
      <DO_ITEM Index="158" Name="DO_LoadLidUnlock" BufferOffset="158" Addr="158" Description="" Visible="false"/>
      <DO_ITEM Index="158" Name="DO_LoadWaferCYClamp" BufferOffset="158" Addr="158" Description="" Visible="false"/>
      <DO_ITEM Index="158" Name="DO_LoadWaferCYOpen" BufferOffset="158" Addr="158" Description="" Visible="false"/>
      <DO_ITEM Index="158" Name="DO_LoadTrayCYClamp" BufferOffset="158" Addr="158" Description="" Visible="false"/>
      <DO_ITEM Index="158" Name="DO_LoadTrayCYOpen" BufferOffset="158" Addr="158" Description="" Visible="false"/>
      <DO_ITEM Index="158" Name="DO_LoadRSideDoorClose" BufferOffset="158" Addr="158" Description="" Visible="false"/>
      <DO_ITEM Index="158" Name="DO_LoadRSideDoorOpen" BufferOffset="158" Addr="158" Description="" Visible="false"/>
      <!--垃圾IO数据-->
    </Block>
  </Dig_Out>
  <Ana_In>
    <Block Index="0">
      <AI_ITEM Index="0" Name="AI_TMPressure1" BufferOffset="0" Addr="0" Description="" />
      <AI_ITEM Index="1" Name="AI_LoadPressure" BufferOffset="1" Addr="1" Description="" />
      <AI_ITEM Index="2" Name="AI_PM1Pressure2" BufferOffset="2" Addr="2" Description="" />
      <AI_ITEM Index="3" Name="AI_PM2Pressure2" BufferOffset="3" Addr="3" Description="" Visible="false"/>
      <AI_ITEM Index="4" Name="AI_UnloadPressure" BufferOffset="4" Addr="4" Description="" Visible="false"/>
      <AI_ITEM Index="5" Name="AI_UnloadTemp" BufferOffset="5" Addr="5" Description="" Visible="false"/>
      <AI_ITEM Index="6" Name="AI_LoadLockTemp" BufferOffset="6" Addr="6" Description="" />
      <AI_ITEM Index="7" Name="AI_BufferTemp" BufferOffset="7" Addr="7" Description="" />
      <AI_ITEM Index="8" Name="AI_M60FlowRead" BufferOffset="8" Addr="8" Description="" />
      <AI_ITEM Index="13" Name="AI_LdRotationRelativeDegree" BufferOffset="13" Addr="13" Description="" />
      <AI_ITEM Index="14" Name="AI_LdRotationCCD1Degree" BufferOffset="14" Addr="14" Description="" />
      <AI_ITEM Index="15" Name="AI_LdRotationCCD2Degree" BufferOffset="15" Addr="15" Description="" />
      <AI_ITEM Index="16" Name="AI_HeartBeat" BufferOffset="16" Addr="16" Description="" />
    </Block>
  </Ana_In>
  <Ana_Out>
    <Block Index="0">
      <AO_ITEM Index="8" Name="AO_M60FlowSetpoint" BufferOffset="8" Addr="8" Description="" />
      <AO_ITEM Index="10" Name="AO_LdRotationHomeOffset" BufferOffset="10" Addr="10" Description=""  Visible="false"/>
      <AO_ITEM Index="11" Name="AO_HomeOffsetDegreeLU" BufferOffset="11" Addr="11" Description="" />
      <AO_ITEM Index="12" Name="AO_LdRotationCCD1Degree" BufferOffset="12" Addr="12" Description="" />
      <AO_ITEM Index="13" Name="AO_LdRotationSpeed" BufferOffset="13" Addr="13" Description="" />
      <AO_ITEM Index="14" Name="AO_LdRotationPosSpeed" BufferOffset="14" Addr="14" Description="" />
      <AO_ITEM Index="15" Name="AO_LdRotationCCD2Degree" BufferOffset="15" Addr="15" Description="" />
      <AO_ITEM Index="16" Name="AO_HeartBeat" BufferOffset="16" Addr="16" Description="" />
    </Block>
  </Ana_Out>
</IO_DEFINE>