<?xml version="1.0" encoding="utf-8"?>
<root>
  <!-- 
    Microsoft ResX Schema 
    
    Version 2.0
    
    The primary goals of this format is to allow a simple XML format 
    that is mostly human readable. The generation and parsing of the 
    various data types are done through the TypeConverter classes 
    associated with the data types.
    
    Example:
    
    ... ado.net/XML headers & schema ...
    <resheader name="resmimetype">text/microsoft-resx</resheader>
    <resheader name="version">2.0</resheader>
    <resheader name="reader">System.Resources.ResXResourceReader, System.Windows.Forms, ...</resheader>
    <resheader name="writer">System.Resources.ResXResourceWriter, System.Windows.Forms, ...</resheader>
    <data name="Name1"><value>this is my long string</value><comment>this is a comment</comment></data>
    <data name="Color1" type="System.Drawing.Color, System.Drawing">Blue</data>
    <data name="Bitmap1" mimetype="application/x-microsoft.net.object.binary.base64">
        <value>[base64 mime encoded serialized .NET Framework object]</value>
    </data>
    <data name="Icon1" type="System.Drawing.Icon, System.Drawing" mimetype="application/x-microsoft.net.object.bytearray.base64">
        <value>[base64 mime encoded string representing a byte array form of the .NET Framework object]</value>
        <comment>This is a comment</comment>
    </data>
                
    There are any number of "resheader" rows that contain simple 
    name/value pairs.
    
    Each data row contains a name, and value. The row also contains a 
    type or mimetype. Type corresponds to a .NET class that support 
    text/value conversion through the TypeConverter architecture. 
    Classes that don't support this are serialized and stored with the 
    mimetype set.
    
    The mimetype is used for serialized objects, and tells the 
    ResXResourceReader how to depersist the object. This is currently not 
    extensible. For a given mimetype the value must be set accordingly:
    
    Note - application/x-microsoft.net.object.binary.base64 is the format 
    that the ResXResourceWriter will generate, however the reader can 
    read any of the formats listed below.
    
    mimetype: application/x-microsoft.net.object.binary.base64
    value   : The object must be serialized with 
            : System.Runtime.Serialization.Formatters.Binary.BinaryFormatter
            : and then encoded with base64 encoding.
    
    mimetype: application/x-microsoft.net.object.soap.base64
    value   : The object must be serialized with 
            : System.Runtime.Serialization.Formatters.Soap.SoapFormatter
            : and then encoded with base64 encoding.

    mimetype: application/x-microsoft.net.object.bytearray.base64
    value   : The object must be serialized into a byte array 
            : using a System.ComponentModel.TypeConverter
            : and then encoded with base64 encoding.
    -->
  <xsd:schema id="root" xmlns="" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:msdata="urn:schemas-microsoft-com:xml-msdata">
    <xsd:import namespace="http://www.w3.org/XML/1998/namespace" />
    <xsd:element name="root" msdata:IsDataSet="true">
      <xsd:complexType>
        <xsd:choice maxOccurs="unbounded">
          <xsd:element name="metadata">
            <xsd:complexType>
              <xsd:sequence>
                <xsd:element name="value" type="xsd:string" minOccurs="0" />
              </xsd:sequence>
              <xsd:attribute name="name" use="required" type="xsd:string" />
              <xsd:attribute name="type" type="xsd:string" />
              <xsd:attribute name="mimetype" type="xsd:string" />
              <xsd:attribute ref="xml:space" />
            </xsd:complexType>
          </xsd:element>
          <xsd:element name="assembly">
            <xsd:complexType>
              <xsd:attribute name="alias" type="xsd:string" />
              <xsd:attribute name="name" type="xsd:string" />
            </xsd:complexType>
          </xsd:element>
          <xsd:element name="data">
            <xsd:complexType>
              <xsd:sequence>
                <xsd:element name="value" type="xsd:string" minOccurs="0" msdata:Ordinal="1" />
                <xsd:element name="comment" type="xsd:string" minOccurs="0" msdata:Ordinal="2" />
              </xsd:sequence>
              <xsd:attribute name="name" type="xsd:string" use="required" msdata:Ordinal="1" />
              <xsd:attribute name="type" type="xsd:string" msdata:Ordinal="3" />
              <xsd:attribute name="mimetype" type="xsd:string" msdata:Ordinal="4" />
              <xsd:attribute ref="xml:space" />
            </xsd:complexType>
          </xsd:element>
          <xsd:element name="resheader">
            <xsd:complexType>
              <xsd:sequence>
                <xsd:element name="value" type="xsd:string" minOccurs="0" msdata:Ordinal="1" />
              </xsd:sequence>
              <xsd:attribute name="name" type="xsd:string" use="required" />
            </xsd:complexType>
          </xsd:element>
        </xsd:choice>
      </xsd:complexType>
    </xsd:element>
  </xsd:schema>
  <resheader name="resmimetype">
    <value>text/microsoft-resx</value>
  </resheader>
  <resheader name="version">
    <value>2.0</value>
  </resheader>
  <resheader name="reader">
    <value>System.Resources.ResXResourceReader, System.Windows.Forms, Version=4.0.0.0, Culture=neutral, PublicKeyToken=b77a5c561934e089</value>
  </resheader>
  <resheader name="writer">
    <value>System.Resources.ResXResourceWriter, System.Windows.Forms, Version=4.0.0.0, Culture=neutral, PublicKeyToken=b77a5c561934e089</value>
  </resheader>
  <data name="ID_BTN_Init_Content" xml:space="preserve">
    <value>初始化</value>
  </data>
  <data name="ID_BTN_Init_ToolTip" xml:space="preserve">
    <value>初始化系统</value>
  </data>
  <data name="ID_BTN_Abort_Content" xml:space="preserve">
    <value>终止</value>
  </data>
  <data name="ID_BTN_Abort_ToolTip" xml:space="preserve">
    <value>立即终止当前任务</value>
  </data>
  <data name="ID_BTN_Monitor_Content" xml:space="preserve">
    <value>工艺监视器</value>
  </data>
  <data name="ID_BTN_Monitor_ToolTip" xml:space="preserve">
    <value>打开工艺实时数据监视器</value>
  </data>
  <data name="ID_BTN_ReturnAll_Content" xml:space="preserve">
    <value>清料</value>
  </data>
  <data name="ID_BTN_ReturnAll_ToolTip" xml:space="preserve">
    <value>将设备内的所有晶圆传送回晶圆盒</value>
  </data>
  <data name="ID_TXT_Operation" xml:space="preserve">
	  <value>操作</value>
  </data>
  <data name="ID_TXT_Tray" xml:space="preserve">
	  <value>托盘</value>
  </data>
  <data name="ID_TXT_RemainTime" xml:space="preserve">
	  <value>剩余时间</value>
  </data>
  <data name="ID_TXT_BufferInfo" xml:space="preserve">
	  <value>Buffer信息</value>
  </data>
  <data name="ID_TXT_RunningMode" xml:space="preserve">
	  <value>运行模式</value>
  </data>
  <data name="ID_BTN_RunningModeAuto_Content" xml:space="preserve">
	  <value>自动</value>
  </data>
  <data name="ID_BTN_RunningModeAuto_ToolTip" xml:space="preserve">
	  <value>切换到自动运行模式</value>
  </data>
  <data name="ID_BTN_RunningModeManual_Content" xml:space="preserve">
	  <value>手动</value>
  </data>
  <data name="ID_BTN_RunningModeManual_ToolTip" xml:space="preserve">
	  <value>切换到手动运行模式</value>
  </data>
  <data name="ID_TXT_LoadInfo" xml:space="preserve">
	  <value>Load腔信息</value>
  </data>
  <data name="ID_TXT_PM1Info" xml:space="preserve">
	  <value>PM1腔信息</value>
  </data>
  <data name="ID_TXT_PM2Info" xml:space="preserve">
	  <value>PM2腔信息</value>
  </data>
  <data name="ID_TXT_UnLoadInfo" xml:space="preserve">
	  <value>UnLoad腔信息</value>
  </data>
  <data name="ID_TXT_WaferCassette" xml:space="preserve">
	  <value>晶圆盒</value>
  </data>
  <data name="ID_BTN_CreateWafer_Content" xml:space="preserve">
    <value>新建</value>
  </data>
  <data name="ID_BTN_CreateWafer_ToolTip" xml:space="preserve">
    <value>在晶圆盒中创建晶圆信息</value>
  </data>
  <data name="ID_BTN_CreateTray_Content" xml:space="preserve">
    <value>创建</value>
  </data>
  <data name="ID_BTN_CreateTray_ToolTip" xml:space="preserve">
    <value>在卡匣中创建托盘信息</value>
  </data>
  <data name="ID_BTN_DeleteTray_Content" xml:space="preserve">
    <value>清除</value>
  </data>
  <data name="ID_BTN_DeleteWafer_Content" xml:space="preserve">
    <value>清除</value>
  </data>
  <data name="ID_BTN_DeleteTray_ToolTip" xml:space="preserve">
    <value>清除卡匣中的托盘信息</value>
  </data>
  <data name="ID_BTN_DeleteWafer_ToolTip" xml:space="preserve">
    <value>清除晶圆盒中的晶圆信息</value>
  </data>
  <data name="ID_BTN_MapWafer_Content" xml:space="preserve">
    <value>扫描</value>
  </data>
  <data name="ID_BTN_MapWafer_ToolTip" xml:space="preserve">
    <value>扫描晶圆盒</value>
  </data>
  <data name="ID_BTN_MapTray_Content" xml:space="preserve">
    <value>扫描</value>
  </data>
  <data name="ID_BTN_MapTray_ToolTip" xml:space="preserve">
    <value>扫描托盘卡匣</value>
  </data>
  <data name="ID_TXT_Status" xml:space="preserve">
    <value>状态</value>
  </data>
  <data name="ID_TXT_RecipeName" xml:space="preserve">
    <value>配方</value>
  </data>
  <data name="ID_TXT_ElapseTime" xml:space="preserve">
    <value>工艺时长(秒)</value>
  </data>
  <data name="ID_TXT_TotalTime" xml:space="preserve">
    <value>总时长(秒)</value>
  </data>
  <data name="ID_TXT_Pressure" xml:space="preserve">
    <value>压力(mbar)</value>
  </data>
  <data name="ID_TXT_Confinement" xml:space="preserve">
    <value>隔热罩</value>
  </data>
  <data name="ID_TXT_WaferLiftStatus" xml:space="preserve">
    <value>晶圆举升</value>
  </data>
  <data name="ID_TXT_WaferClawStatus" xml:space="preserve">
    <value>晶圆夹持</value>
  </data>
  <data name="ID_TXT_CoolingTime" xml:space="preserve">
    <value>冷却时间(秒)</value>
  </data>
  <data name="ID_TXT_Temperature" xml:space="preserve">
    <value>温度(℃)</value>
  </data>
  <data name="ID_TXT_WaferState_Idle_NoJob" xml:space="preserve">
    <value>空闲(无Job)</value>
  </data>
  <data name="ID_TXT_WaferState_Idle_WithJob" xml:space="preserve">
    <value>空闲(分配Job)</value>
  </data>
  <data name="ID_TXT_WaferState_InProcess" xml:space="preserve">
    <value>正在工艺</value>
  </data>
  <data name="ID_TXT_WaferState_ProcessComplete" xml:space="preserve">
    <value>工艺完成</value>
  </data>
  <data name="ID_TXT_WaferState_Error" xml:space="preserve">
    <value>故障</value>
  </data>
  <data name="ID_TXT_WaferState_Warning" xml:space="preserve">
    <value>警告</value>
  </data>
  <data name="ID_TXT_TrayClawStatus" xml:space="preserve">
    <value>托盘夹持</value>
  </data>
  <data name="ID_TXT_JobAssign_LotID" xml:space="preserve">
    <value>批次号</value>
  </data>
  <data name="ID_TXT_JobAssign_Sequence" xml:space="preserve">
    <value>作业程序</value>
  </data>
  <data name="ID_TXT_JobAssign_Name" xml:space="preserve">
    <value>作业名</value>
  </data>
  <data name="ID_TXT_JobAssign_Status" xml:space="preserve">
    <value>作业状态</value>
  </data>
  <data name="ID_BTN_JobAssign_SelectSequence_Content" xml:space="preserve">
    <value>选择</value>
  </data>
  <data name="ID_BTN_JobAssign_SelectSequence_ToolTip" xml:space="preserve">
    <value>选择程序</value>
  </data>
  <data name="ID_BTN_JobAssign_SetAll_Content" xml:space="preserve">
    <value>全部分配</value>
  </data>
  <data name="ID_BTN_JobAssign_SetAll_ToolTip" xml:space="preserve">
    <value>将选择的作业程序分配到到所有晶圆</value>
  </data>
  <data name="ID_BTN_JobAssign_ResetAll_Content" xml:space="preserve">
    <value>全部重置</value>
  </data>
  <data name="ID_BTN_JobAssign_ResetAll_ToolTip" xml:space="preserve">
    <value>重置所有晶圆的作业程序</value>
  </data>
  <data name="ID_BTN_JobAssign_Create_Content" xml:space="preserve">
    <value>创建</value>
  </data>
  <data name="ID_BTN_JobAssign_Create_ToolTip" xml:space="preserve">
    <value>创建作业</value>
  </data>
  <data name="ID_BTN_JobAssign_Abort_Content" xml:space="preserve">
    <value>终止</value>
  </data>
  <data name="ID_BTN_JobAssign_Abort_ToolTip" xml:space="preserve">
    <value>终止正在执行的作业</value>
  </data>
  <data name="ID_BTN_JobAssign_Start_Content" xml:space="preserve">
    <value>启动</value>
  </data>
  <data name="ID_BTN_JobAssign_Start_ToolTip" xml:space="preserve">
    <value>启动作业</value>
  </data>
  <data name="ID_BTN_JobAssign_Pause_Content" xml:space="preserve">
    <value>暂停</value>
  </data>
  <data name="ID_BTN_JobAssign_Pause_ToolTip" xml:space="preserve">
    <value>暂停正在执行的作业</value>
  </data>
  <data name="ID_BTN_JobAssign_Resume_Content" xml:space="preserve">
    <value>恢复</value>
  </data>
  <data name="ID_BTN_JobAssign_Resume_ToolTip" xml:space="preserve">
    <value>恢复暂停的作业</value>
  </data>
  <data name="ID_BTN_JobAssign_Stop_Content" xml:space="preserve">
    <value>停止</value>
  </data>
  <data name="ID_BTN_JobAssign_Stop_ToolTip" xml:space="preserve">
    <value>停止当前正在执行的作业</value>
  </data>
  <data name="ID_BTN_JobAssign_Set_Content" xml:space="preserve">
    <value>分配</value>
  </data>
  <data name="ID_BTN_JobAssign_Set_ToolTip" xml:space="preserve">
    <value>将选择的作业程序分配到当前晶圆</value>
  </data>
  <data name="ID_BTN_JobAssign_Remove_Content" xml:space="preserve">
    <value>移除</value>
  </data>
  <data name="ID_BTN_JobAssign_Remove_ToolTip" xml:space="preserve">
    <value>移除当前晶圆的作业程序</value>
  </data>
  <data name="ID_RAD_Monocycle_Content" xml:space="preserve">
    <value>单环记录</value>
  </data>
  <data name="ID_RAD_Monocycle_ToolTip" xml:space="preserve">
    <value>单环记录查询</value>
  </data>
  <data name="ID_RAD_Entirety_Content" xml:space="preserve">
    <value>整体记录</value>
  </data>
  <data name="ID_RAD_Entirety_ToolTip" xml:space="preserve">
    <value>整体记录查询</value>
  </data>
  <data name="ID_TXT_Index" xml:space="preserve">
    <value>序号</value>
  </data>
  <data name="ID_TXT_Caption" xml:space="preserve">
    <value>标签</value>
  </data>
  <data name="ID_TXT_Name" xml:space="preserve">
    <value>名称</value>
  </data>
  <data name="ID_TXT_Max" xml:space="preserve">
    <value>上限(um)</value>
  </data>
  <data name="ID_TXT_Current" xml:space="preserve">
    <value>当前值(um)</value>
  </data>
  <data name="ID_TXT_PM_ID" xml:space="preserve">
    <value>PM腔体</value>
  </data>
  <data name="ID_TXT_Creat_Time" xml:space="preserve">
    <value>创建时间</value>
  </data>
  <data name="ID_TXT_Tray_Coating_History_Data" xml:space="preserve">
    <value>托盘膜厚历史数据</value>
  </data>
  <data name="ID_TXT_PM_Coating_History_Data" xml:space="preserve">
    <value>腔体膜厚历史数据</value>
  </data>
  <data name="ID_TXT_JobAssign" xml:space="preserve">
    <value>作业分配</value>
  </data>
  <data name="ID_TXT_JobList" xml:space="preserve">
    <value>作业列表</value>
  </data>
</root>