<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <AETemps classType="MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Temps.AETemp" assembly="MECF.Framework.RT.EquipmentLibrary">
    <AETemp id="AETemp"  module="" display="AETemp" scBasePath="TempSensors" MaxChannels="4" MinimalTemp="600"/>
  </AETemps>

  <AKunTemps classType="MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Temps.AKunTemp" assembly="MECF.Framework.RT.EquipmentLibrary">
    <AKunTemp id="AKunTemp"  module="" display="AKunTemp" scBasePath="TempSensors" MaxChannels="4" MinimalTemp="600"/>
  </AKunTemps>

  <AKunTemps classType="MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Temps.AKunTriggerTemp" assembly="MECF.Framework.RT.EquipmentLibrary">
    <AKunTemp id="AKunTriggerTemp"  module="PM1" display="AKunTriggerTemp" scBasePath="TempSensors" MaxChannels="1" WaferNum="1" TrayNum="1" MinimalTemp="500"/>
  </AKunTemps>

  <SensorTemps classType="MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Temps.SensorTemp" assembly="MECF.Framework.RT.EquipmentLibrary">
    <SensorTemp id="SensorTemp1"  module="" display="SensorTemp1" scBasePath="TempSensors.Sensor" MaxChannels="1" MinimalTemp="600"/>
    <SensorTemp id="SensorTemp2"  module="" display="SensorTemp2" scBasePath="TempSensors.Sensor" MaxChannels="1" MinimalTemp="600"/>
    <SensorTemp id="SensorTemp3"  module="" display="SensorTemp3" scBasePath="TempSensors.Sensor" MaxChannels="1" MinimalTemp="600"/>
    <SensorTemp id="SensorTemp4"  module="" display="SensorTemp4" scBasePath="TempSensors.Sensor" MaxChannels="1" MinimalTemp="600"/>
  </SensorTemps>

  <StrongTemps classType="MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Temps.StrongTemp" assembly="MECF.Framework.RT.EquipmentLibrary">
    <StrongTemp id="StrongTemp1"  module="" display="StrongTemp1" scBasePath="TempSensors.Strong"/>
    <StrongTemp id="StrongTemp2"  module="" display="StrongTemp2" scBasePath="TempSensors.Strong"/>
    <StrongTemp id="StrongTemp3"  module="" display="StrongTemp3" scBasePath="TempSensors.Strong"/>
    <StrongTemp id="StrongTemp4"  module="" display="StrongTemp4" scBasePath="TempSensors.Strong"/>
  </StrongTemps>

</DeviceModelDefine>