<?xml version="1.0" encoding="utf-8"?>
<Interlock>
  <Action do="PM2.DO_H2InletCutOff(V31)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-1">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_O2CarrierSource(V37)" value="false" tip="" tip.zh-CN="" tip.en-US="DO-7" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_N2InletCutOff(V32)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
  </Action>
  <Action do="PM2.DO_SHH2ArSupply(V33)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_SHPurgeN2(V67)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-38">
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
  </Action>
  <Action do="PM2.DO_PMPurgeN2(V68)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-39">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_SHPurgeH2(V66)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-37">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_PushGasSupply(V35)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-5">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_RunVentGasSupply(V36)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-6">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_MoCO6RunVent(V39)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-9">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_MoResrvRunVent(V40)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-10">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_WCO6Run(V41)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-11">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_CS2RunVent(V53)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-23">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_H2SRunVent(V54)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-24">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_H2SeRun(V55)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-25">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_O2RunVent(V47)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-17">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_SO2RunVent(V59)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-29">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_WCO6Carrier(V43)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_CS2Carrier(V48)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-18">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_MoResrvCarrierOutlet(V21)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-33">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_MoCO6CarrierOutlet(V18)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-30">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_WCO6Bypass(V45)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
  </Action>
  <Action do="PM2.DO_CS2Bypass(V49)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
  </Action>
  <Action do="PM2.DO_MoResrvBypass(V22)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-34">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
  </Action>
  <Action do="PM2.DO_MoCO6Bypass(V19)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-31">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
  </Action>
  <Action do="PM2.DO_WCO6InLeakTest(V46)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-16">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_CS2InOutLeakTest(V50)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-20">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_MoResrvInoutLeakTest(V23)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-35">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_MoCO6InOutLeakTest(V20)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-32">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_O2CarrierSource(V37)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-7">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_H2SSourceCarrier(V51)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-21">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_H2SeSourceCarrier(V52)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-22">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_SO2SourceCarrier(V58)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-28">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_SrcLeakTestPreFilter(V69)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-42">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_VentGasDump(V72)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-45">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_SrcLeakTestPrePump(V73)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-46">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_GasboxLeakTest(V74)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-47">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_DORVacuum(V75)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-48">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_DORPressureRelief(V76)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-49">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_EPV2" value="true" tip="" tip.zh-CN="" tip.en-US="DO-122">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_HeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-56">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
  </Action>
  <Action do="PM2.DO_InnerHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-57">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_MiddleHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-58">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_OuterHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-59">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_SCR1Enable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-134">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_SCR2Enable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-135">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_SCR3Enable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-136">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-64">
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9" />
    <Limit di="PM2.DI_SusceptorAtSafeSpeed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-65">
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9" />
    <Limit di="PM2.DI_SusceptorAtSafeSpeed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_ChamMoveBodyUpAirBrake" value="true" tip="" tip.zh-CN="" tip.en-US="DO-66">
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_ChamMoveBodyForward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-67">
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_ChamMoveBodyBackward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-68">
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-69">
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_SHGasConnectorTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-70">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-71">
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_SHLidTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-72">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_SHLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-73">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_SHLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-74">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_ChamMoveBodyBrakerForward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-75">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_ChamMoveBodyBrakerBackward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-76">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-83">
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_MiddleLidTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-84">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_MiddleLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-85">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_MiddleLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-86">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_FinalSHPurge(V87)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-40">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_FinalOuterGas(V88)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-41">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_FinalCarryGas(V97)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-54">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_FinalInnerGas(V89)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-112">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_FinalMiddleGas(V90)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-113">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_FinalOpticPurge(V91)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-114">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_FinalGasRing(V92)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-115">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_FinalChamberPurge(V93)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-116">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_FinalRotationPurge(V94)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-117">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_FinalShutterPurge(V95)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-118">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_FinalHeaterWFPurge(V96)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-119">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_PurgeValve" value="true" tip="" tip.zh-CN="" tip.en-US="DO-111">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_ConfinementRingJogDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-163">
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11" />
  </Action>
  <Action do="PM2.DO_ConfinementRingMoveDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-169">
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11" />
  </Action>
  <Action do="PM2.DO_ServoEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-128">
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
  </Action>
  <Action do="PM2.DO_TVEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-140">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_CyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-176">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_ExchangeMoRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-177">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_CleanRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-178">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_PurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-179">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_PumpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-180">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_VentRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-181">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_ProcessIdleRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-185">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_ProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-174">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_ChamCabDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-3" />
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_VACTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-182">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_ATMTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-183">
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
  <Action do="PM2.DO_PreprocessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-175">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15" />
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16" />
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17" />
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18" />
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19" />
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20" />
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23" />
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25" />
    <Limit di="PM2.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26" />
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27" />
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_GBSO2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32" />
    <Limit di="PM2.DI_ChamCabDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-3" />
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33" />
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39" />
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_GBH2SDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56" />
    <Limit di="PM2.DI_GBH2SeDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78" />
    <Limit di="PM2.DI_UPS1Bypass" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83" />
    <Limit di="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195" />
    <Limit di="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196" />
    <Limit di="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197" />
    <Limit di="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198" />
    <Limit di="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199" />
    <Limit di="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200" />
    <Limit di="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201" />
    <Limit di="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202" />
    <Limit di="PM2.DO_Foreline2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203" />
    <Limit di="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204" />
    <Limit di="PM2.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205" />
    <Limit di="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220" />
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320" />
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321" />
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322" />
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323" />
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324" />
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325" />
  </Action>
  <Action do="PM2.DO_PostProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-184">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PM2.DO_PM1SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152" />
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4" />
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10" />
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12" />
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30" />
    <Limit di="PM2.DI_PMSO2Detector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52" />
    <Limit di="PM2.DI_PMH2SDetector1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8" />
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31" />
    <Limit di="PM2.DI_GBExhaustDPLowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-34" />
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59" />
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-63" />
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36" />
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65" />
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38" />
    <Limit di="PM2.DI_ChamCabDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-3" />
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33" />
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41" />
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42" />
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45" />
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55" />
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70" />
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76" />
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81" />
    <Limit di="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192" />
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84" />
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85" />
  </Action>
</Interlock>