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      <MaintainerItem UID="63" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="64" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="65" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="66" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="67" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="68" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="69" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="70" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="71" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="72" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="73" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="74" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="75" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="76" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="77" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="78" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="79" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
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      <MaintainerItem UID="82" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="83" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
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      <MaintainerItem UID="85" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="86" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
    </Maintainer>
    <Maintainer Type="CoatingMaintainer" Name="Schedule" Description="Test周期维护（监控生长膜厚）&#xD;&#xA;Schedule Preventive Maintenance" Index="4" Module="PM1" Enable="False" StartDate="2024/3/1 12:00:00" Threshold="2" TimeDisplayUnit="Hours">
      <MaintainerItem UID="1" MaintainedDateLatest="2020/1/1 0:00:00" Enable="True" />
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      <MaintainerItem UID="6" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
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      <MaintainerItem UID="8" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="9" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="10" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="11" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="12" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="13" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="14" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="15" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="16" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="17" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="18" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="19" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="20" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="21" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="22" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="23" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="24" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="25" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="26" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="27" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="28" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="29" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="30" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="31" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="32" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="33" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="34" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="35" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="36" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="37" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="38" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="39" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="40" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="41" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="42" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="43" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="44" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="45" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="46" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="47" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="48" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="49" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="50" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="51" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="52" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="53" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="54" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="55" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="56" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="57" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="58" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="59" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="60" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="61" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="62" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="63" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="64" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="65" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="66" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="67" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="68" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="69" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="70" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="71" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="72" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="73" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="74" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="75" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="76" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="77" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="78" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="79" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="80" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="81" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="82" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="83" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="84" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="85" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
      <MaintainerItem UID="86" MaintainedDateLatest="2020/1/1 0:00:00" Enable="False" />
    </Maintainer>
  </MaintenanceGroup>
  <AllMaintainerItemConfigs>
    <MaintainerItemConfig UID="1" ParentName="冷却水系统" Name="厂务进水压力" Index="1" Description="进水压力：0.35Mpa" DefaultRecord="进水压力=" FilePath="" />
    <MaintainerItemConfig UID="2" ParentName="冷却水系统" Name="厂务进水温度" Index="2" Description="冷却水常温：20-25℃&#xD;&#xA;工艺时：&lt;35℃" DefaultRecord="冷却水常温=&#xD;&#xA;工艺时=" FilePath="" />
    <MaintainerItemConfig UID="3" ParentName="冷却水系统" Name="冷却水流量" Index="3" Description="参照附件1" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="4" ParentName="冷却水系统" Name="冷却水流量报警设置" Index="4" Description="参照附件1" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="5" ParentName="冷却水系统" Name="冷却水温度报警设置" Index="5" Description="水温上限设定：45℃(UI→Configuration→PM→CoolingWater)" DefaultRecord="水温设定=" FilePath="" />
    <MaintainerItemConfig UID="6" ParentName="PM模块" Name="Middle层维护" Index="6" Description="参照《SiC CVD 设备维护作业标准》" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="7" ParentName="PM模块" Name="Show Head层维护" Index="7" Description="参照《SiC CVD 设备维护作业标准》" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="8" ParentName="PM模块" Name="旋转机构" Index="8" Description="600转时电流&lt;2.5A" DefaultRecord="600转时电流=" FilePath="" />
    <MaintainerItemConfig UID="9" ParentName="PM模块" Name="旋转机构" Index="9" Description="加减速度为3rpm/s" DefaultRecord="加减速度=" FilePath="" />
    <MaintainerItemConfig UID="10" ParentName="PM模块" Name="旋转机构" Index="10" Description="噪音情况:无异常声音" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="11" ParentName="PM模块" Name="旋转机构" Index="11" Description="Wobble测试：Wobble 结果小于 0.2 mm" DefaultRecord="Wobble 结果=" FilePath="" />
    <MaintainerItemConfig UID="12" ParentName="PM模块" Name="升降机构" Index="12" Description="上下运动顺畅" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="13" ParentName="PM模块" Name="升降机构" Index="13" Description="皮带无磨损、变形、错位" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="14" ParentName="PM模块" Name="升降机构" Index="14" Description="位置确认：&#xD;&#xA;Chamber Body 平面—Up Position=52mm&#xD;&#xA;Up Position—Down Position=30mm" DefaultRecord="Up Position=&#xD;&#xA;Down Position=" FilePath="" />
    <MaintainerItemConfig UID="15" ParentName="PM模块" Name="升降机构" Index="15" Description="驱动电机表面温度低于60度" DefaultRecord="表面温度=" FilePath="" />
    <MaintainerItemConfig UID="16" ParentName="PM模块" Name="腔体内部检查" Index="16" Description="检查GasRingPurge通道接触情况（密封接触、无错位）" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="17" ParentName="PM模块" Name="腔体内部检查" Index="17" Description="密封Oring（腔体密封、GasConnector密封）安装正常，无漏装、变形、磨损" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="18" ParentName="PM模块" Name="腔体内部检查" Index="18" Description="腔体Parts无破损、Parts居中安装" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="19" ParentName="PM模块" Name="模块检漏（自检）" Index="19" Description="模块自检结果&lt;0.5mbar/min" DefaultRecord="模块自检结果=" FilePath="" />
    <MaintainerItemConfig UID="20" ParentName="PM模块" Name="模块检漏（氦检）" Index="20" Description="模块氦检漏率&lt;1.0*E-9mbar*L/s" DefaultRecord="模块氦检漏率=" FilePath="" />
    <MaintainerItemConfig UID="21" ParentName="PM模块" Name="H2侦测器" Index="21" Description="H2 Detector 校准" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="22" ParentName="PM模块" Name="HCL侦测器" Index="22" Description="HCL Detector校准" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="23" ParentName="TM模块" Name="腔体外观" Index="23" Description="腔体外观无破损、视窗玻璃无破损" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="24" ParentName="TM模块" Name="清洁腔体" Index="24" Description="腔体内表面没有肉眼可见颗粒" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="25" ParentName="TM模块" Name="模块检漏（自检）" Index="25" Description="自检结果&lt;0.5mbar/min" DefaultRecord="自检结果=" FilePath="" />
    <MaintainerItemConfig UID="26" ParentName="TM模块" Name="模块检漏（氦检）" Index="26" Description="漏率&lt;2.0*E-9mbar*L/s" DefaultRecord="漏率=" FilePath="" />
    <MaintainerItemConfig UID="27" ParentName="Load模块" Name="腔体外观" Index="27" Description="腔体外观无破损、视窗玻璃无破损" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="28" ParentName="Load模块" Name="清洁腔体" Index="28" Description="腔体内表面没有肉眼可见颗粒" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="29" ParentName="Load模块" Name="模块检漏（自检）" Index="29" Description="自检结果&lt;0.5mbar/min" DefaultRecord="自检结果=" FilePath="" />
    <MaintainerItemConfig UID="30" ParentName="Load模块" Name="模块检漏（氦检）" Index="30" Description="漏率&lt;2.0*E-9mbar*L/s" DefaultRecord="漏率=" FilePath="" />
    <MaintainerItemConfig UID="31" ParentName="Unload模块" Name="清洁腔体" Index="31" Description="腔体内表面没有肉眼可见颗粒" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="32" ParentName="Unload模块" Name="腔体外观" Index="32" Description="腔体外观无破损、视窗玻璃无破损" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="33" ParentName="Unload模块" Name="模块检漏（自检）" Index="33" Description="自检结果&lt;0.5mbar/min" DefaultRecord="自检结果=" FilePath="" />
    <MaintainerItemConfig UID="34" ParentName="Unload模块" Name="模块检漏（氦检）" Index="34" Description="漏率&lt;2.0*E-9mbar*L/s" DefaultRecord="漏率=" FilePath="" />
    <MaintainerItemConfig UID="35" ParentName="EFFM模块" Name="模块清洁" Index="35" Description="EFFM四壁表面没有肉眼可见颗粒" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="36" ParentName="EFFM模块" Name="FFU检查" Index="36" Description="风向向下；分力适中" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="37" ParentName="温控系统" Name="测温硬件" Index="37" Description="硬件正常显示" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="38" ParentName="温控系统" Name="测温硬件" Index="38" Description="光纤无破损" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="39" ParentName="温控系统" Name="测温硬件" Index="39" Description="测温探头无松动" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="40" ParentName="温控系统" Name="测温硬件" Index="40" Description="探头内部清洁" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="41" ParentName="温控系统" Name="控温硬件" Index="41" Description="硬件正常显示" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="42" ParentName="温控系统" Name="温控能力" Index="42" Description="控温精度在±1℃" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="43" ParentName="温控系统" Name="温度校准" Index="43" Description="1200℃进行温度校准&#xD;&#xA;参照《光学测温系统参数设置作业标准》" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="44" ParentName="真空系统" Name="PM真空泵" Index="44" Description="BP电流：2-3A&#xD;&#xA;BP温度：&lt;65℃&#xD;&#xA;MP电流：6-8A&#xD;&#xA;MP温度：&lt;75℃&#xD;&#xA;N2 Flow：17-81 Pam3/s&#xD;&#xA;Water Flow：3.5-8L/min&quot;" DefaultRecord="BP电流=&#xD;&#xA;BP温度=&#xD;&#xA;MP电流=&#xD;&#xA;MP温度=&#xD;&#xA;N2 Flow=&#xD;&#xA;Water Flow=" FilePath="" />
    <MaintainerItemConfig UID="45" ParentName="真空系统" Name="TM真空泵" Index="45" Description="MP：0.4-0.8KW&#xD;&#xA;N2 Flow：17-20 Pam3/s&#xD;&#xA;Water Flow：1.5 - 3.0 L/min" DefaultRecord="MP=&#xD;&#xA;N2 Flow=&#xD;&#xA;Water Flow=" FilePath="" />
    <MaintainerItemConfig UID="46" ParentName="真空系统" Name="控压能力" Index="46" Description="蝶阀控压能力：控压精度&lt;±1 mbar" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="47" ParentName="真空系统" Name="控压能力" Index="47" Description="清洁蝶阀阀片" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="48" ParentName="真空系统" Name="安全泄压" Index="48" Description="PM ATM Idle可维持在1050-1090mbar之间&#xD;&#xA;当腔体压力&gt;1095mbar时，设备自动关闭Final Valve" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="49" ParentName="Gas Box" Name="特气压力设定" Index="49" Description="H2：50；   Ar（PM）：45； Ar（TM）：45；&#xD;&#xA;C2H4：30； SiH4：30；     HCL：30；&#xD;&#xA;PN2：30；  GN2：100 （单位Psi）" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="50" ParentName="Gas Box" Name="MFC功能校准" Index="50" Description="设定值与实际值相符；ROR结果&lt;3%&#xD;&#xA;参考《MFC 安装调试作业标准》" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="51" ParentName="Gas Box" Name="PC功能校准" Index="51" Description="参考《PC校准作业标准》" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="52" ParentName="Gas Box" Name="加热带温度" Index="52" Description="设备侧温度设定：60℃&#xD;&#xA;TCS厂务侧温度设定：50℃&#xD;&#xA;温差范围：±1℃" DefaultRecord="设备侧温度设定=&#xD;&#xA;TCS厂务侧温度设定=" FilePath="" />
    <MaintainerItemConfig UID="53" ParentName="Gas Box" Name="H2侦测器" Index="53" Description="H2 Detector 校准" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="54" ParentName="Gas Box" Name="HCL侦测器" Index="54" Description="HCL Detector校准" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="55" ParentName="液体源" Name="TCS鼓泡器" Index="55" Description="TCS液位：8L或10L" DefaultRecord="TCS液位=" FilePath="" />
    <MaintainerItemConfig UID="56" ParentName="液体源" Name="TCS鼓泡器" Index="56" Description="水浴温度：19℃" DefaultRecord="水浴温度=" FilePath="" />
    <MaintainerItemConfig UID="57" ParentName="液体源" Name="TCS鼓泡器" Index="57" Description="检查自动补液功能" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="58" ParentName="液体源" Name="TCS鼓泡器" Index="58" Description="检查报警功能" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="59" ParentName="传送系统" Name="真空机械手" Index="59" Description="清洁外观及手指" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="60" ParentName="传送系统" Name="真空机械手" Index="60" Description="检查机械及电子组件，无松脱及损伤" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="61" ParentName="传送系统" Name="真空机械手" Index="61" Description="检查传盘流程动作，无碰撞、无错位" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="62" ParentName="传送系统" Name="晶圆机械手" Index="62" Description="清洁外观及手指" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="63" ParentName="传送系统" Name="晶圆机械手" Index="63" Description="检查机械及电子组件，无松脱及损伤" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="64" ParentName="传送系统" Name="晶圆机械手" Index="64" Description="检查传盘流程动作，无碰撞、无错位" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="65" ParentName="传送系统" Name="托盘机械手" Index="65" Description="清洁外观及手指" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="66" ParentName="传送系统" Name="托盘机械手" Index="66" Description="检查机械及电子组件，无松脱及损伤" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="67" ParentName="传送系统" Name="托盘机械手" Index="67" Description="检查传盘流程动作，无碰撞、无错位" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="68" ParentName="传送系统" Name="寻边器" Index="68" Description="清洁寻边器外观及载盘" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="69" ParentName="传送系统" Name="寻边器" Index="69" Description="检查机械及电子组件，无松脱及损伤" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="70" ParentName="传送系统" Name="寻边器" Index="70" Description="检查寻边流程，无掉片，寻边正常" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="71" ParentName="强电系统" Name="电气接线" Index="71" Description="检查接线，无凌乱现象" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="72" ParentName="强电系统" Name="EMO功能" Index="72" Description="功能正常&#xD;&#xA;参考《Final Test Record》" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="73" ParentName="强电系统" Name="漏电保护功能" Index="73" Description="功能正常&#xD;&#xA;参考《Final Test Record》" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="74" ParentName="弱电系统" Name="电气接线" Index="74" Description="检查接线，无凌乱现象" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="75" ParentName="弱电系统" Name="UPS保护功能" Index="75" Description="设备异常断电时可以立即切换到UPS供电" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="76" ParentName="弱电系统" Name="PLC硬件检查" Index="76" Description="硬件无报错" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="77" ParentName="弱电系统" Name="PLC硬件检查" Index="77" Description="表面清洁、排线整齐" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="78" ParentName="尾排系统" Name="过滤器" Index="78" Description="过滤器维护&#xD;&#xA;参照《SiC CVD 设备维护作业标准》" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="79" ParentName="尾排系统" Name="厂务负压" Index="79" Description="厂务排查处于负压状态" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="80" ParentName="尾排系统" Name="尾排管道" Index="80" Description="清洁尾排管道" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="81" ParentName="尾排系统" Name="尾排管道" Index="81" Description="氦检：漏率&lt;2.0*E-9mbar*L/s" DefaultRecord="漏率=" FilePath="" />
    <MaintainerItemConfig UID="82" ParentName="排风系统" Name="排风能力" Index="82" Description="排风管道与设备空间之间的压差：&gt;0.2mbar" DefaultRecord="压差=" FilePath="" />
    <MaintainerItemConfig UID="83" ParentName="排风系统" Name="排风管口" Index="83" Description="打开状态，风向向外" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="84" ParentName="IPC" Name="设备备份" Index="84" Description="重要文件（SIC文件）备份" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="85" ParentName="IPC" Name="设备备份" Index="85" Description="数据库备份" DefaultRecord="" FilePath="" />
    <MaintainerItemConfig UID="86" ParentName="IPC" Name="设备重启" Index="86" Description="设备重启" DefaultRecord="" FilePath="" />
  </AllMaintainerItemConfigs>
</root>