<?xml version="1.0" encoding="utf-8"?>
<root>
  <!-- 
    Microsoft ResX Schema 
    
    Version 2.0
    
    The primary goals of this format is to allow a simple XML format 
    that is mostly human readable. The generation and parsing of the 
    various data types are done through the TypeConverter classes 
    associated with the data types.
    
    Example:
    
    ... ado.net/XML headers & schema ...
    <resheader name="resmimetype">text/microsoft-resx</resheader>
    <resheader name="version">2.0</resheader>
    <resheader name="reader">System.Resources.ResXResourceReader, System.Windows.Forms, ...</resheader>
    <resheader name="writer">System.Resources.ResXResourceWriter, System.Windows.Forms, ...</resheader>
    <data name="Name1"><value>this is my long string</value><comment>this is a comment</comment></data>
    <data name="Color1" type="System.Drawing.Color, System.Drawing">Blue</data>
    <data name="Bitmap1" mimetype="application/x-microsoft.net.object.binary.base64">
        <value>[base64 mime encoded serialized .NET Framework object]</value>
    </data>
    <data name="Icon1" type="System.Drawing.Icon, System.Drawing" mimetype="application/x-microsoft.net.object.bytearray.base64">
        <value>[base64 mime encoded string representing a byte array form of the .NET Framework object]</value>
        <comment>This is a comment</comment>
    </data>
                
    There are any number of "resheader" rows that contain simple 
    name/value pairs.
    
    Each data row contains a name, and value. The row also contains a 
    type or mimetype. Type corresponds to a .NET class that support 
    text/value conversion through the TypeConverter architecture. 
    Classes that don't support this are serialized and stored with the 
    mimetype set.
    
    The mimetype is used for serialized objects, and tells the 
    ResXResourceReader how to depersist the object. This is currently not 
    extensible. For a given mimetype the value must be set accordingly:
    
    Note - application/x-microsoft.net.object.binary.base64 is the format 
    that the ResXResourceWriter will generate, however the reader can 
    read any of the formats listed below.
    
    mimetype: application/x-microsoft.net.object.binary.base64
    value   : The object must be serialized with 
            : System.Runtime.Serialization.Formatters.Binary.BinaryFormatter
            : and then encoded with base64 encoding.
    
    mimetype: application/x-microsoft.net.object.soap.base64
    value   : The object must be serialized with 
            : System.Runtime.Serialization.Formatters.Soap.SoapFormatter
            : and then encoded with base64 encoding.

    mimetype: application/x-microsoft.net.object.bytearray.base64
    value   : The object must be serialized into a byte array 
            : using a System.ComponentModel.TypeConverter
            : and then encoded with base64 encoding.
    -->
  <xsd:schema id="root" xmlns="" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:msdata="urn:schemas-microsoft-com:xml-msdata">
    <xsd:import namespace="http://www.w3.org/XML/1998/namespace" />
    <xsd:element name="root" msdata:IsDataSet="true">
      <xsd:complexType>
        <xsd:choice maxOccurs="unbounded">
          <xsd:element name="metadata">
            <xsd:complexType>
              <xsd:sequence>
                <xsd:element name="value" type="xsd:string" minOccurs="0" />
              </xsd:sequence>
              <xsd:attribute name="name" use="required" type="xsd:string" />
              <xsd:attribute name="type" type="xsd:string" />
              <xsd:attribute name="mimetype" type="xsd:string" />
              <xsd:attribute ref="xml:space" />
            </xsd:complexType>
          </xsd:element>
          <xsd:element name="assembly">
            <xsd:complexType>
              <xsd:attribute name="alias" type="xsd:string" />
              <xsd:attribute name="name" type="xsd:string" />
            </xsd:complexType>
          </xsd:element>
          <xsd:element name="data">
            <xsd:complexType>
              <xsd:sequence>
                <xsd:element name="value" type="xsd:string" minOccurs="0" msdata:Ordinal="1" />
                <xsd:element name="comment" type="xsd:string" minOccurs="0" msdata:Ordinal="2" />
              </xsd:sequence>
              <xsd:attribute name="name" type="xsd:string" use="required" msdata:Ordinal="1" />
              <xsd:attribute name="type" type="xsd:string" msdata:Ordinal="3" />
              <xsd:attribute name="mimetype" type="xsd:string" msdata:Ordinal="4" />
              <xsd:attribute ref="xml:space" />
            </xsd:complexType>
          </xsd:element>
          <xsd:element name="resheader">
            <xsd:complexType>
              <xsd:sequence>
                <xsd:element name="value" type="xsd:string" minOccurs="0" msdata:Ordinal="1" />
              </xsd:sequence>
              <xsd:attribute name="name" type="xsd:string" use="required" />
            </xsd:complexType>
          </xsd:element>
        </xsd:choice>
      </xsd:complexType>
    </xsd:element>
  </xsd:schema>
  <resheader name="resmimetype">
    <value>text/microsoft-resx</value>
  </resheader>
  <resheader name="version">
    <value>2.0</value>
  </resheader>
  <resheader name="reader">
    <value>System.Resources.ResXResourceReader, System.Windows.Forms, Version=4.0.0.0, Culture=neutral, PublicKeyToken=b77a5c561934e089</value>
  </resheader>
  <resheader name="writer">
    <value>System.Resources.ResXResourceWriter, System.Windows.Forms, Version=4.0.0.0, Culture=neutral, PublicKeyToken=b77a5c561934e089</value>
  </resheader>
  <data name="ID_BTN_ProcessStart_Content" xml:space="preserve">
    <value>启动</value>
  </data>
  <data name="ID_BTN_ProcessStart_ToolTip" xml:space="preserve">
    <value>启动工艺</value>
  </data>
  <data name="ID_BTN_ProcessSkip_Content" xml:space="preserve">
    <value>跳步</value>
  </data>
  <data name="ID_BTN_ProcessSkip_ToolTip" xml:space="preserve">
    <value>跳过当前步骤</value>
  </data>
  <data name="ID_BTN_ProcessPause_ToolTip" xml:space="preserve">
    <value>当前步骤结束后暂停工艺</value>
  </data>
  <data name="ID_BTN_ProcessPause_Content" xml:space="preserve">
    <value>暂停</value>
  </data>
  <data name="ID_BTN_ProcessContinue_Content" xml:space="preserve">
    <value>继续</value>
  </data>
  <data name="ID_BTN_ProcessContinue_ToolTip" xml:space="preserve">
    <value>继续工艺</value>
  </data>
  <data name="ID_BTN_ProcessAbort_Content" xml:space="preserve">
    <value>终止</value>
  </data>
  <data name="ID_BTN_ProcessAbort_ToolTip" xml:space="preserve">
    <value>终止工艺</value>
  </data>
  <data name="ID_BTN_ProcessMonitor_Content" xml:space="preserve">
    <value>监视器</value>
  </data>
  <data name="ID_BTN_ProcessMonitor_ToolTip" xml:space="preserve">
    <value>打开试试工艺数据监视器</value>
  </data>
  <data name="ID_BTN_SelectRecipe_Content" xml:space="preserve">
    <value>选择</value>
  </data>
  <data name="ID_BTN_SelectRecipe_ToolTip" xml:space="preserve">
    <value>选择配方</value>
  </data>
  <data name="ID_TXT_Recipe" xml:space="preserve">
    <value>配方</value>
  </data>
  <data name="ID_TXT_RecipeName" xml:space="preserve">
    <value>配方</value>
  </data>
  <data name="ID_TXT_RecipeStepTime" xml:space="preserve">
    <value>步骤时长(秒)</value>
  </data>
  <data name="ID_TXT_RecipeStepName" xml:space="preserve">
    <value>步骤名称</value>
  </data>
  <data name="ID_TXT_RecipeTime" xml:space="preserve">
    <value>配方时长(秒)</value>
  </data>
  <data name="ID_TXT_GasMol" xml:space="preserve">
    <value>摩尔</value>
  </data>
  <data name="ID_TXT_GasFlow" xml:space="preserve">
    <value>流量</value>
  </data>
  <data name="ID_TXT_GasSource" xml:space="preserve">
    <value>气源</value>
  </data>
  <data name="ID_TXT_RecipeStepNo" xml:space="preserve">
    <value>步骤</value>
  </data>
  <data name="ID_BTN_LockRecipe_Content" xml:space="preserve">
    <value>锁定</value>
  </data>
  <data name="ID_BTN_LockRecipe_ToolTip" xml:space="preserve">
    <value>锁定配方</value>
  </data>
  <data name="ID_BTN_UpdateRecipeInProcess_Content" xml:space="preserve">
    <value>在线更新</value>
  </data>
  <data name="ID_BTN_UpdateRecipeInProcess_ToolTip" xml:space="preserve">
    <value>立即更新正在工艺的配方</value>
  </data>
  <data name="ID_TXT_GasFlowStat" xml:space="preserve">
    <value>气体流量统计</value>
  </data>
  <data name="ID_TXT_GasFlowHistorySearch" xml:space="preserve">
    <value>气体流量历史查询</value>
  </data>
  <data name="ID_TXT_GasName" xml:space="preserve">
    <value>名称</value>
  </data>
  <data name="ID_TXT_RunVolume" xml:space="preserve">
    <value>沉积(m³)</value>
  </data>
  <data name="ID_TXT_VentVolume" xml:space="preserve">
    <value>充气(m³)</value>
  </data>
  <data name="ID_TXT_TotalVolume" xml:space="preserve">
    <value>总计(m³)</value>
  </data>
  <data name="ID_TXT_Duration" xml:space="preserve">
    <value>时间范围</value>
  </data>
  <data name="ID_TXT_PowerKWH" xml:space="preserve">
    <value>功率(kWh)</value>
  </data>
  <data name="ID_BTN_OP_AtmIdle_Content" xml:space="preserve">
    <value>大气空闲</value>
  </data>
  <data name="ID_BTN_OP_AtmIdle_ToolTip" xml:space="preserve">
    <value>切换到空闲状态并保持在大气压下</value>
  </data>
  <data name="ID_BTN_OP_VacIdle_Content" xml:space="preserve">
    <value>真空空闲</value>
  </data>
  <data name="ID_BTN_OP_VacIdle_ToolTip" xml:space="preserve">
    <value>切换到空闲状态并保持在真空下</value>
  </data>
  <data name="ID_BTN_OP_ProcessIdle_Content" xml:space="preserve">
    <value>工艺空闲</value>
  </data>
  <data name="ID_BTN_OP_ProcessIdle_ToolTip" xml:space="preserve">
    <value>切换到空闲模式并准备好运行工艺</value>
  </data>
  <data name="ID_BTN_Exchange_TCS_Content" xml:space="preserve">
    <value>更换TCS</value>
  </data>
  <data name="ID_BTN_Exchange_TCS_ToolTip" xml:space="preserve">
    <value>更换到TCS</value>
  </data>
  <data name="ID_BTN_Exchange_TMA_Content" xml:space="preserve">
    <value>更换TMA</value>
  </data>
  <data name="ID_BTN_Exchange_TMA_ToolTip" xml:space="preserve">
    <value>更换到TMA</value>
  </data>
  <data name="ID_BTN_Isolation_Content" xml:space="preserve">
    <value>腔体隔离</value>
  </data>
  <data name="ID_BTN_Isolation_ToolTip" xml:space="preserve">
    <value>腔体隔离</value>
  </data>
  <data name="ID_BTN_LeakCheck_Content" xml:space="preserve">
    <value>设备检漏</value>
  </data>
  <data name="ID_BTN_LeakCheck_ToolTip" xml:space="preserve">
    <value>腔体漏气检查</value>
  </data>
  <data name="ID_TXT_Reactor_Status" xml:space="preserve">
    <value>腔体状态</value>
  </data>
  <data name="ID_TXT_Reactor_Service" xml:space="preserve">
    <value>腔体服务</value>
  </data>
  <data name="ID_TXT_Sensor" xml:space="preserve">
    <value>感应器</value>
  </data>
  <data name="ID_TXT_Cooling_Water" xml:space="preserve">
    <value>水冷系统</value>
  </data>
  <data name="ID_TXT_Resistance" xml:space="preserve">
    <value>加热丝监控</value>
  </data>
  <data name="ID_TXT_Cham_Lid_Closed" xml:space="preserve">
    <value>腔体盖子关闭</value>
  </data>
  <data name="ID_TXT_Cham_Cab_Door_Closed" xml:space="preserve">
    <value>反应腔模块门关闭</value>
  </data>
  <data name="ID_TXT_GB_Door_Closed" xml:space="preserve">
    <value>气柜门关闭</value>
  </data>
  <data name="ID_TXT_GB_Water_Leak" xml:space="preserve">
    <value>气柜漏水</value>
  </data>
  <data name="ID_TXT_PR_Water_Leak" xml:space="preserve">
    <value>电柜漏水</value>
  </data>
  <data name="ID_TXT_Reactor_Water_Leak" xml:space="preserve">
    <value>腔体漏水</value>
  </data>
  <data name="ID_TXT_Cham_Press_Above_ATM" xml:space="preserve">
    <value>腔体超压</value>
  </data>
  <data name="ID_TXT_DOR_Press_VAC" xml:space="preserve">
    <value>双密封圈内真空</value>
  </data>
  <data name="ID_TXT_Water1" xml:space="preserve">
    <value>水温1</value>
  </data>
  <data name="ID_TXT_Water2" xml:space="preserve">
    <value>水温2</value>
  </data>
  <data name="ID_TXT_R" xml:space="preserve">
    <value>电阻 (Ω)</value>
  </data>
  <data name="ID_TXT_PSU1_Resistance" xml:space="preserve">
    <value>内部电阻1  (Ω)</value>
  </data>
  <data name="ID_TXT_PSU2_Resistance" xml:space="preserve">
    <value>中部电阻2  (Ω)</value>
  </data>
  <data name="ID_TXT_PSU3_Resistance" xml:space="preserve">
    <value>外部电阻3  (Ω)</value>
  </data>
  <data name="ID_TXT_SCR1_Resistance" xml:space="preserve">
    <value>上部电阻1 (Ω)</value>
  </data>
  <data name="ID_TXT_SCR2_Resistance" xml:space="preserve">
    <value>中部电阻2 (Ω)</value>
  </data>
  <data name="ID_TXT_SCR3_Resistance" xml:space="preserve">
    <value>下部电阻3 (Ω)</value>
  </data>
  <data name="ID_TXT_MFC_Set" xml:space="preserve">
    <value>MFC设置</value>
  </data>
  <data name="ID_TXT_Reactor_Pressure" xml:space="preserve">
    <value>腔体压力(mbar)</value>
  </data>
  <data name="ID_TXT_Flow" xml:space="preserve">
    <value>流量(sccm)</value>
  </data>
  <data name="ID_TXT_Ramp_Time" xml:space="preserve">
    <value>渐变时间(s)</value>
  </data>
  <data name="ID_TXT_Standard_MFC" xml:space="preserve">
    <value>基准MFC</value>
  </data>
  <data name="ID_TXT_Differential_Pressure" xml:space="preserve">
    <value>腔体压差</value>
  </data>
  <data name="ID_TXT_Pressure1" xml:space="preserve">
    <value>压力1(mbar)</value>
  </data>
  <data name="ID_TXT_Pressure2" xml:space="preserve">
    <value>压力2(mbar)</value>
  </data>
  <data name="ID_TXT_Pressure3" xml:space="preserve">
    <value>压力3(mbar)</value>
  </data>
  <data name="ID_TXT_Pressure4" xml:space="preserve">
    <value>压力4(mbar)</value>
  </data>
  <data name="ID_TXT_Mean_Pressure_Difference" xml:space="preserve">
    <value>腔体平均压差(mbar)</value>
  </data>
  <data name="ID_TXT_MFC_Actual_Flow" xml:space="preserve">
    <value>MFC实际流量(sccm)</value>
  </data>
  <data name="ID_TXT_MFC_Set_Flow" xml:space="preserve">
    <value>MFC设定流量(sccm)</value>
  </data>
  <data name="ID_TXT_Set_Flow" xml:space="preserve">
    <value>设定流量 (sccm)</value>
  </data>
  <data name="ID_TXT_Reactor_Temp" xml:space="preserve">
    <value>反应腔温度</value>
  </data>
  <data name="ID_TXT_Reactor_Volume" xml:space="preserve">
    <value>腔体体积</value>
  </data>
  <data name="ID_TXT_Pressure_Recording_Interval" xml:space="preserve">
    <value>压力记录时间间隔 (s)</value>
  </data>
  <data name="ID_TXT_Pressure" xml:space="preserve">
    <value>压力 (mbar)</value>
  </data>
  <data name="ID_TXT_Set_Standard_MFC" xml:space="preserve">
    <value>设定为标准MFC</value>
  </data>
  <data name="ID_TXT_MFC_Range" xml:space="preserve">
    <value>MFC量程 (sccm)</value>
  </data>
  <data name="ID_TXT_Deviation" xml:space="preserve">
    <value>偏差</value>
  </data>
  <data name="ID_TXT_ROR_Test_Result" xml:space="preserve">
    <value>ROR测试结果</value>
  </data>
  <data name="ID_BTN_Restore_Content" xml:space="preserve">
    <value>重载</value>
  </data>
  <data name="ID_BTN_Restore_ToolTip" xml:space="preserve">
    <value>放弃更改并恢复到修改前的基准配方</value>
  </data>
  <data name="ID_TXT_To_Baseline_Recipe" xml:space="preserve">
    <value>基准配方</value>
  </data>
  <data name="ID_BTN_Save_Content" xml:space="preserve">
    <value>保存</value>
  </data>
  <data name="ID_BTN_Save_ToolTip" xml:space="preserve">
    <value>保存对基准配方的更改</value>
  </data>
  <data name="ID_TXT_Accumulated_Gas_Flow_Statistic" xml:space="preserve">
    <value>累计气体流量统计 (sccm)</value>
  </data>
  <data name="ID_TXT_Differ_With_Source" xml:space="preserve">
    <value>未处理变更</value>
  </data>
  <data name="ID_TXT_Recipe_Operation" xml:space="preserve">
    <value>配方操作</value>
  </data>
  <data name="ID_TXT_SaveToLocal" xml:space="preserve">
    <value>保存到本地配方</value>
  </data>
</root>