<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <IoTCs classType="Aitex.Core.RT.Device.Devices.IoTC" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoTC id="TC1" display="TC1" schematicId="TC1" isDBSaveTemp="true" aioType="float" aiL1WorkingOPFeedBack="AI_PSUInnerWorkingOP" aiL2WorkingOPFeedBack="AI_PSUMiddleWorkingOP" aiL3WorkingOPFeedBack="AI_PSUOuterWorkingOP" aiL1PVFeedBack="AI_PSUInnerPV" aiL2PVFeedBack="AI_PSUMiddlePV" aiL3PVFeedBack="AI_PSUOuterPV" diL1TempHighAlarmFeedBack="DI_PSUInnerTempHAlarm" diL2TempHighAlarmFeedBack="DI_PSUMiddleTempHAlarm" diL3TempHighAlarmFeedBack="DI_PSUOuterTempHAlarm" diL1TempLowAlarmFeedBack="DI_PSUInnerTempLAlarm" diL2TempLowAlarmFeedBack="DI_PSUMiddleTempLAlarm" diL3TempLowAlarmFeedBack="DI_PSUOuterTempLAlarm" aoHeaterModeSetPoint="AO_PSUHeaterMode" aoPowerRefSetPoint="AO_PSUPowerRef" aoL1RatioSetPoint="AO_PSUInnerRatio" aoL2RatioSetPoint="AO_PSUMiddleRatio" aoL3RatioSetPoint="AO_PSUOuterRatio" aoL1RatedSetPoint="AO_PSUInnerRatedValue" aoL2RatedSetPoint="AO_PSUMiddleRatedValue" aoL3RatedSetPoint="AO_PSUOuterRatedValue" aoL1LoopModeSetPoint="AO_PSUInnerLoopMode" aoL2LoopModeSetPoint="AO_PSUMiddleLoopMode" aoL3LoopModeSetPoint="AO_PSUOuterLoopMode" aoL1TargetSPSetPoint="AO_PSUInnerTargetSP" aoL2TargetSPSetPoint="AO_PSUMiddleTargetSP" aoL3TargetSPSetPoint="AO_PSUOuterTargetSP" aoL1TargetOPSetPoint="AO_PSUInnerTargetOP" aoL2TargetOPSetPoint="AO_PSUMiddleTargetOP" aoL3TargetOPSetPoint="AO_PSUOuterTargetOP" aoPIDLimitLower="AO_PIDLimitLower" aoPIDLimitUpper="AO_PIDLimitUpper" aoPIDRateLimit="AO_PIDRateLimit" aoL1InputTempSetPoint="AO_PSUInnerTargetSP" aoL2InputTempSetPoint="AO_PSUMiddleTargetSP" aoL3InputTempSetPoint="AO_PSUOuterTargetSP" aoTCPyroModeSetPoint="AO_PSUTCPyroMode" aoL1VoltageLimited="AO_PSUInnerVoltageLimited" aoL2VoltageLimited="AO_PSUMiddleVoltageLimited" aoL3VoltageLimited="AO_PSUOuterVoltageLimited" aoL1TempHighLimitSetPoint="AO_PSUInnerTempHighLimit" aoL2TempHighLimitSetPoint="AO_PSUMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_PSUOuterTempHighLimit" aoL1TempLowLimitSetPoint="AO_PSUInnerTempLowLimit" aoL2TempLowLimitSetPoint="AO_PSUMiddleTempLowLimit" aoL3TempLowLimitSetPoint="AO_PSUOuterTempLowLimit" aiTtempCtrlTCIN="AI_PSUTC" aoPSU1Y="AO_PSU1Y" aoPSU2Y="AO_PSU2Y" aoPSU3Y="AO_PSU3Y"
      diPSUInnerHeaterEnable="DI_InnerHeaterEnableFB"
      diPSUMiddleHeaterEnable="DI_MiddleHeaterEnableFB"
      diPSUOuterHeaterEnable="DI_OuterHeaterEnableFB"
      diSCRUpHeaterEnable="DI_SCR1Status"
      diSCRMiddleHeaterEnable="DI_SCR2Status"
      diSCRDownHeaterEnable="DI_SCR3Status"
      aoPLCTargetOPLowLimit="AO_PLCTargetOPLowLimit"   aoPLCTargetOPUpLimit="AO_PLCTargetOPUpLimit"
		  doPLCTempFilterEN="DO_PLCTempFilterEN" doPLCTargetOPCtrlEN="DO_PLCTargetOPCtrlEN" />

    <IoTC id="TC2" display="TC2" schematicId="TC2" isDBSaveTemp="false" aioType="float" aiL1WorkingOPFeedBack="AI_SCRUpperWorkingOP" aiL2WorkingOPFeedBack="AI_SCRMiddleWorkingOP" aiL3WorkingOPFeedBack="AI_SCRLowerWorkingOP" aiL1PVFeedBack="AI_SCRUpperPV" aiL2PVFeedBack="AI_SCRMiddlePV" aiL3PVFeedBack="AI_SCRLowerPV" diL1TempHighAlarmFeedBack="DI_SCRUpperTempHAlarm" diL2TempHighAlarmFeedBack="DI_SCRMiddleTempHAlarm" diL3TempHighAlarmFeedBack="DI_SCRLowerTempHAlarm" diL1TempLowAlarmFeedBack="DI_SCRUpperTempLAlarm" diL2TempLowAlarmFeedBack="DI_SCRMiddleTempLAlarm" diL3TempLowAlarmFeedBack="DI_SCRLowerTempLAlarm" aoHeaterModeSetPoint="AO_SCRHeaterMode" aoPowerRefSetPoint="AO_SCRPowerRef" aoL1RatioSetPoint="AO_SCRUpperRatio" aoL2RatioSetPoint="AO_SCRMiddleRatio" aoL3RatioSetPoint="AO_SCRLowerRatio" aoL1RatedSetPoint="AO_SCRUpperRatedValue" aoL2RatedSetPoint="AO_SCRMiddleRatedValue" aoL3RatedSetPoint="AO_SCRLowerRatedValue" aoL1LoopModeSetPoint="AO_SCRUpperLoopMode" aoL2LoopModeSetPoint="AO_SCRMiddleLoopMode" aoL3LoopModeSetPoint="AO_SCRLowerLoopMode" aoL1TargetSPSetPoint="AO_SCRUpperTargetSP" aoL2TargetSPSetPoint="AO_SCRMiddleTargetSP" aoL3TargetSPSetPoint="AO_SCRLowerTargetSP" aoL1TargetOPSetPoint="AO_SCRUpperTargetOP" aoL2TargetOPSetPoint="AO_SCRMiddleTargetOP" aoL3TargetOPSetPoint="AO_SCRLowerTargetOP" aoPIDLimitLower="AO_SCRUpperRecipeValue" aoPIDLimitUpper="AO_SCRMiddleRecipeValue" aoPIDRateLimit="AO_SCRLowerRecipeValue" aoL1InputTempSetPoint="AO_SCRUpperTargetSP" aoL2InputTempSetPoint="AO_SCRMiddleTargetSP" aoL3InputTempSetPoint="AO_SCRLowerTargetSP" aoTCPyroModeSetPoint="AO_SCRTCPyroMode" aoL1VoltageLimited="AO_SCRUpperVoltageLimited" aoL2VoltageLimited="AO_SCRMiddleVoltageLimited2" aoL3VoltageLimited="AO_SCRLowerVoltageLimited" aoL1TempHighLimitSetPoint="AO_SCRUpperTempHighLimit" aoL2TempHighLimitSetPoint="AO_SCRMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_SCRLowerTempHighLimit" aoL1TempLowLimitSetPoint="AO_SCRUpperTempLowLimit" aoL2TempLowLimitSetPoint="AO_SCRMiddleTempLowLimit" aoL3TempLowLimitSetPoint="AO_SCRLowerTempLowLimit" aiTtempCtrlTCIN="AI_SCRTC"
      diPSUInnerHeaterEnable="DI_InnerHeaterEnableFB"
      diPSUMiddleHeaterEnable="DI_MiddleHeaterEnableFB"
      diPSUOuterHeaterEnable="DI_OuterHeaterEnableFB"
      diSCRUpHeaterEnable="DI_SCR1Status"
      diSCRMiddleHeaterEnable="DI_SCR2Status"
      diSCRDownHeaterEnable="DI_SCR3Status"/>
  </IoTCs>

  <IoOmronTemps classType="Aitex.Core.RT.Device.Devices.IoOmronTemp" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoTC id="OmronTemp" display="OmronTemp" schematicId="OmronTemp" aioType="float" aoCH1="" aoCH2="" aoCH3="" aoCH4="" aoCH5="" aoCH6="" aoCH7="" aoCH8="" aoCH9="" aoCH10="" aoCH11="" aoCH12="" doLineHeaterEnable="DO_LineHeaterEnable" />
  </IoOmronTemps>
  <IoPSUs classType="Aitex.Core.RT.Device.Devices.IoPSU" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPSU id="PSU1" display="PSU1" schematicId="PSU1" aioType="float"
           scBasePath="PM.{module}.Heater" scResLimitMax="PSU1ResistanceMax"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiOutputVoltage="AI_PSU1OutputVoltage" aiOutputArms="AI_PSU1OutputArms" aiOutputPower="AI_PSU1OutputPower" aiSimVoltage="AI_PSU1SimVoltage" aiSimArms="AI_PSU1SimArms" doStatus="DO_PSU1Enable" doReset="DO_PSU1Reset" aoConstant="AO_PSU1Constant" diStatus="DI_InnerHeaterEnableFB" diAlarm="DI_PSU1Alarm" AlarmText="Alarm66  PSU1 Alarm[DI-320]" diCommunicationError="DI_PSU1dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_InnerHeaterEnable" />
    <IoPSU id="PSU2" display="PSU2" schematicId="PSU2" aioType="float"
           scBasePath="PM.{module}.Heater" scResLimitMax="PSU2ResistanceMax"
           aoOutputLimitHigh="AO_PSU2OutputLimitHigh"
           aoOutputLimitLow="AO_PSU2OutputLimitLow"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiOutputVoltage="AI_PSU2OutputVoltage" aiOutputArms="AI_PSU2OutputArms" aiOutputPower="AI_PSU2OutputPower" aiSimVoltage="AI_PSU2SimVoltage" aiSimArms="AI_PSU2SimArms" doStatus="DO_PSU2Enable" doReset="DO_PSU2Reset" aoConstant="AO_PSU2Constant" diStatus="DI_MiddleHeaterEnableFB" diAlarm="DI_PSU2Alarm" AlarmText="Alarm67  PSU2 Alarm[DI-321]" diCommunicationError="DI_PSU2dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_MiddleHeaterEnable" />
    <IoPSU id="PSU3" display="PSU3" schematicId="PSU3" aioType="float"
           scBasePath="PM.{module}.Heater" scResLimitMax="PSU3ResistanceMax"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiOutputVoltage="AI_PSU3OutputVoltage" aiOutputArms="AI_PSU3OutputArms" aiOutputPower="AI_PSU3OutputPower" iSimVoltage="AI_PSU3SimVoltage" aiSimArms="AI_PSU3SimArms" doStatus="DO_PSU3Enable" doReset="DO_PSU3Reset" aoConstant="AO_PSU3Constant" diStatus="DI_OuterHeaterEnableFB" diAlarm="DI_PSU3Alarm" AlarmText="Alarm68  PSU3 Alarm[DI-322]" diCommunicationError="DI_PSU3dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_OuterHeaterEnable" />
  </IoPSUs>
  <IoSCRs classType="Aitex.Core.RT.Device.Devices.IoSCR" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoSCR id="SCR1" display="SCR1" schematicId="SCR1" aioType="float"
           scBasePath="PM.{module}.Heater" scResLimitMax="SCR1ResistanceMax"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiVoltage="AI_SCR1Voltage" aiArms="AI_SCR1Arms" aiPower="AI_SCR1Power" diStatus="DI_SCR1Status" doReset="DO_SCR1Reset" doStatus="DO_SCR1Enable" diAlarm="DI_SCR1Alarm" AlarmText="" />
    <IoSCR id="SCR2" display="SCR2" schematicId="SCR2" aioType="float"
           scBasePath="PM.{module}.Heater" scResLimitMax="SCR2ResistanceMax"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiVoltage="AI_SCR2Voltage" aiArms="AI_SCR2Arms" aiPower="AI_SCR2Power" diStatus="DI_SCR2Status" doReset="DO_SCR2Reset" doStatus="DO_SCR2Enable" diAlarm="DI_SCR2Alarm" AlarmText="" />
    <IoSCR id="SCR3" display="SCR3" schematicId="SCR3" aioType="float"
           scBasePath="PM.{module}.Heater" scResLimitMax="SCR3ResistanceMax"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiVoltage="AI_SCR3Voltage" aiArms="AI_SCR3Arms" aiPower="AI_SCR3Power" diStatus="DI_SCR3Status" doReset="DO_SCR3Reset" doStatus="DO_SCR3Enable" diAlarm="DI_SCR3Alarm" AlarmText="" />
  </IoSCRs>

  <IoPSUPowers classType="Aitex.Core.RT.Device.Devices.PSUPowerDetection" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPSUPower id="PSU1Power" display="PSU1Power" schematicId="PSU1Power" aioType="float" aiPower="AI_PSU1OutputPower" scBasePath="PM.{module}.PowerDetection"/>
    <IoPSUPower id="PSU2Power" display="PSU2Power" schematicId="PSU2Power" aioType="float" aiPower="AI_PSU2OutputPower" scBasePath="PM.{module}.PowerDetection"/>
    <IoPSUPower id="PSU3Power" display="PSU3Power" schematicId="PSU3Power" aioType="float" aiPower="AI_PSU3OutputPower" scBasePath="PM.{module}.PowerDetection"/>
    <IoPSUPower id="SCR1Power" display="SCR1Power" schematicId="SCR1Power" aioType="float" aiPower="AI_SCR1Power" scBasePath="PM.{module}.PowerDetection"/>
    <IoPSUPower id="SCR2Power" display="SCR2Power" schematicId="SCR2Power" aioType="float" aiPower="AI_SCR2Power" scBasePath="PM.{module}.PowerDetection"/>
    <IoPSUPower id="SCR3Power" display="SCR3Power" schematicId="SCR3Power" aioType="float" aiPower="AI_SCR3Power" scBasePath="PM.{module}.PowerDetection"/>
  </IoPSUPowers>

  <IoPlcProcessAborts classType="Aitex.Core.RT.Device.Devices.IoPlcProcessAbort" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPlcProcessAbort module="" id="IoPlcProcessAbort" display="IoPlcProcessAbort" schematicId="IoPlcProcessAbort" diAbortProcessRun="DI_AbortProcessRunning" doAbortProcessInterrupt="DO_AbortProcessInterrupt" doAbortProcessBuzzerOFF="DO_AbortProcessBuzzerOFF"/>
  </IoPlcProcessAborts>

  <IoHeats classType="Aitex.Core.RT.Device.Devices.IoHeat" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoHeat module="" id="PMHeatEnable" display="HeatEnable" schematicId="HeatEnable" diEnable="DI_PSUEnableFB" doEnable="DO_HeaterEnable" />
  </IoHeats>

  <IoThrottleValves classType="Aitex.Core.RT.Device.Devices.IoThrottleValve2" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoThrottleValve id="TV" display="TV" schematicId="TV" unit="mbar" scBasePath="PM.{module}" modeValuePressure="5" modeValuePosition="2" modeValueClose="3" modeValueOpen="4" aioType="float" aiStatus="AI_ValveMode" aiPositionFeedback="AI_ActualPositon" aiPressureFeedback="AI_ActualPressure" aoPressureMode="AO_ValveModeSetpoint" aoPositionSetPoint="AO_SetpointPositon" aoPressureSetPoint="AO_SetpointPressure" doTVValveEnable="DO_TVEnable" doTVReset="DO_TVReset" diTVValveEnable="" />
  </IoThrottleValves>

  <IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoValve id="V18"  display="V18"  schematicId="V18"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_MoCO6CarrierOutlet(V18)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V18s" display="V18s" schematicId="V18s" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_MoCO6CarrierOutlet(V18)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V19"  display="V19"  schematicId="V19"  unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_MoCO6BypassFB(V19)" doOpen="DO_MoCO6Bypass(V19)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V20"  display="V20"  schematicId="V20"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)" doOpen="DO_MoCO6InOutLeakTest(V20)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V20s" display="V20s" schematicId="V20s" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)" doOpen="DO_MoCO6InOutLeakTest(V20)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V21"  display="V21"  schematicId="V21"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)" doOpen="DO_MoResrvCarrierOutlet(V21)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V21s" display="V21s" schematicId="V21s" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)" doOpen="DO_MoResrvCarrierOutlet(V21)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V22"  display="V22"  schematicId="V22"  unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_MoResrvBypassFB(V22)" doOpen="DO_MoResrvBypass(V22)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V25"  display="V25"  schematicId="V25"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_SideLeakIsolateFB(V25)" doOpen="DO_SideLeakIsolate(V25)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V27"  display="V27"  schematicId="V27"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_PMLeakTestIsolateFB(V27)" doOpen="DO_PMLeakTestIsolate(V27)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V23"  display="V23"  schematicId="V23"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)" doOpen="DO_MoResrvInoutLeakTest(V23)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V23s" display="V23s" schematicId="V23s" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)" doOpen="DO_MoResrvInoutLeakTest(V23)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V31"  display="V31"  schematicId="V31"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_H2InletCutOffFB(V31)" doOpen="DO_H2InletCutOff(V31)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V32"  display="V32"  schematicId="V32"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_N2InletCutOffFB(V32)" doOpen="DO_N2InletCutOff(V32)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V33"  display="V33"  schematicId="V33"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V33s" display="V33s" schematicId="V33s" unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V35"  display="V35"  schematicId="V35"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_PushGasSupplyFB(V35)" doOpen="DO_PushGasSupply(V35)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V36"  display="V36"  schematicId="V36"  unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_RunVentGasSupplyFB(V36)" doOpen="DO_RunVentGasSupply(V36)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V37"  display="V37"  schematicId="V37"  unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V37s" display="V37s" schematicId="V37s" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V39"  display="V39"  schematicId="V39"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V39s" display="V39s" schematicId="V39s" unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V40"  display="V40"  schematicId="V40"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V40s" display="V40s" schematicId="V40s" unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V41"  display="V41"  schematicId="V41"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_WCO6RunFB(V41)" doOpen="DO_WCO6Run(V41)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V42"  display="V42"  schematicId="V42"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_WCO6VentFB(V42)" doOpen="DO_WCO6Vent(V42)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V43"  display="V43"  schematicId="V43"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V43s" display="V43s" schematicId="V43s" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V45"  display="V45"  schematicId="V45"  unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_WCO6BypassFB(V45)" doOpen="DO_WCO6Bypass(V45)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V46"  display="V46"  schematicId="V46"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V46s" display="V46s" schematicId="V46s" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V47"  display="V47"  schematicId="V47"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V47s" display="V47s" schematicId="V47s" unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V48"  display="V48"  schematicId="V48"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V48s" display="V48s" schematicId="V48s" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V49"  display="V49"  schematicId="V49"  unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_CS2BypassFB(V49)" doOpen="DO_CS2Bypass(V49)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V50"  display="V50"  schematicId="V50"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V50s" display="V50s" schematicId="V50s" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V51"  display="V51"  schematicId="V51"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V51s" display="V51s" schematicId="V51s" unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V52"  display="V52"  schematicId="V52"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V52s" display="V52s" schematicId="V52s" unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V53"  display="V53"  schematicId="V53"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_CS2RunVentFB(V53)" doOpen="DO_CS2RunVent(V53)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V53s" display="V53s" schematicId="V53s" unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_CS2RunVentFB(V53)" doOpen="DO_CS2RunVent(V53)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V54"  display="V54"  schematicId="V54"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V54s" display="V54s" schematicId="V54s" unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V55"  display="V55"  schematicId="V55"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_H2SeRunFB(V55)" doOpen="DO_H2SeRun(V55)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V56"  display="V56"  schematicId="V56"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_H2SeVentFB(V56)" doOpen="DO_H2SeVent(V56)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V58"  display="V58"  schematicId="V58"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V58s" display="V58s" schematicId="V58s" unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V59"  display="V59"  schematicId="V59"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V59s" display="V59s" schematicId="V59s" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />

    <IoValve id="V60" display="V60" schematicId="V60" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SO2VentFB(V60)"   doOpen="DO_SO2Vent(V60)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V61" display="V61" schematicId="V61" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_Run1MoWFB(V61)"   doOpen="DO_Run1MoW(V61)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V62" display="V62" schematicId="V62" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_Run2SSeFB(V62)"   doOpen="DO_Run2SSe(V62)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V63" display="V63" schematicId="V63" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_Run3O2SO2FB(V63)" doOpen="DO_Run3O2SO2(V63)" diCloseSensor="" diOpenSensor="" />

    <IoValve id="V66"  display="V66"  schematicId="V66"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_SHPurgeH2FB(V66)" doOpen="DO_SHPurgeH2(V66)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V67"  display="V67"  schematicId="V67"  unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_SHPurgeN2FB(V67)" doOpen="DO_SHPurgeN2(V67)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V68"  display="V68"  schematicId="V68"  unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_PMPurgeN2FB(V68)" doOpen="DO_PMPurgeN2(V68)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V69"  display="V69"  schematicId="V69"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_SrcLeakTestPreFilterFB(V69)" doOpen="DO_SrcLeakTestPreFilter(V69)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V70"  display="V70"  schematicId="V70"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_PMTMBalanceFB(V70)" doOpen="DO_PMTMBalance(V70)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V72"  display="V72"  schematicId="V72"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_VentGasDumpFB(V72)" doOpen="DO_VentGasDump(V72)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V73"  display="V73"  schematicId="V73"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_SrcLeakTestPrePumpFB(V73)" doOpen="DO_SrcLeakTestPrePump(V73)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V74"  display="V74"  schematicId="V74"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_GasboxLeakTestFB(V74)" doOpen="DO_GasboxLeakTest(V74)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V75"  display="V75"  schematicId="V75"  unit="" isNc="false" isDefaultOpen="true"  diOpen="DI_DORVacuumFB(V75)" doOpen="DO_DORVacuum(V75)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V76"  display="V76"  schematicId="V76"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_DORPressureReliefFB(V76)" doOpen="DO_DORPressureRelief(V76)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V87"  display="V87"  schematicId="V87"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_FinalSHPurgeFB(V87)" doOpen="DO_FinalSHPurge(V87)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V88"  display="V88"  schematicId="V88"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_FinalOuterGasFB(V88)" doOpen="DO_FinalOuterGas(V88)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V89"  display="V89"  schematicId="V89"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_FinalInnerGasFB(V89)" doOpen="DO_FinalInnerGas(V89)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V90"  display="V90"  schematicId="V90"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_FinalMiddleGasFB(V90)" doOpen="DO_FinalMiddleGas(V90)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V91"  display="V91"  schematicId="V91"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_FinalOpticPurgeFB(V91)" doOpen="DO_FinalOpticPurge(V91)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V92"  display="V92"  schematicId="V92"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_FinalGasRingFB(V92)" doOpen="DO_FinalGasRing(V92)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V93"  display="V93"  schematicId="V93"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_FinalChamberPurgeFB(V93)" doOpen="DO_FinalChamberPurge(V93)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V94"  display="V94"  schematicId="V94"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_FinalRotationPurgeFB(V94)" doOpen="DO_FinalRotationPurge(V94)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V95"  display="V95"  schematicId="V95"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_FinalShutterPurgeFB(V95)" doOpen="DO_FinalShutterPurge(V95)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V96"  display="V96"  schematicId="V96"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_FinalHeaterWFPurgeFB(V96)" doOpen="DO_FinalHeaterWFPurge(V96)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V97"  display="V97"  schematicId="V97"  unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_FinalCarryGasFB(V97)" doOpen="DO_FinalCarryGas(V97)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="EPV1" display="EPV1" schematicId="EPV1" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_EPV1FB" doOpen="DO_EPV1" diCloseSensor="" diOpenSensor="" />
    <IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true"  isDefaultOpen="false" diOpen="DI_EPV2FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
  </IoValves>

  <IoMfcs classType="Aitex.Core.RT.Device.Devices.IoMFC" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoMfc id="Mfc1"  display="Mfc1"  schematicId="Mfc1"  unit="sccm" aiActMode="AI_M1ActMode"  aoSetMode="AO_M1CtrlMode"  aiFlow="AI_M1"  aoFlow="AO_M1"  scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC01Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm101  MFC01 Offline[DI-351]" />
    <IoMfc id="Mfc3"  display="Mfc3"  schematicId="Mfc3"  unit="sccm" aiActMode="AI_M3ActMode"  aoSetMode="AO_M3CtrlMode"  aiFlow="AI_M3"  aoFlow="AO_M3"  scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC03Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm103  MFC03 Offline[DI-353]" />
    <IoMfc id="Mfc4"  display="Mfc4"  schematicId="Mfc4"  unit="sccm" aiActMode="AI_M4ActMode"  aoSetMode="AO_M4CtrlMode"  aiFlow="AI_M4"  aoFlow="AO_M4"  scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC04Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm104  MFC04 Offline[DI-354]" />
    <IoMfc id="Mfc6"  display="Mfc6"  schematicId="Mfc6"  unit="sccm" aiActMode="AI_M6ActMode"  aoSetMode="AO_M6CtrlMode"  aiFlow="AI_M6"  aoFlow="AO_M6"  scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC06Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm106  MFC06 Offline[DI-356]" />
    <IoMfc id="Mfc7"  display="Mfc7"  schematicId="Mfc7"  unit="sccm" aiActMode="AI_M7ActMode"  aoSetMode="AO_M7CtrlMode"  aiFlow="AI_M7"  aoFlow="AO_M7"  scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC07Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm107  MFC07 Offline[DI-357]" />
    <IoMfc id="Mfc8"  display="Mfc8"  schematicId="Mfc8"  unit="sccm" aiActMode="AI_M8ActMode"  aoSetMode="AO_M8CtrlMode"  aiFlow="AI_M8"  aoFlow="AO_M8"  scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC08Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm108  MFC08 Offline[DI-358]" />
    <IoMfc id="Mfc9"  display="Mfc9"  schematicId="Mfc9"  unit="sccm" aiActMode="AI_M9ActMode"  aoSetMode="AO_M9CtrlMode"  aiFlow="AI_M9"  aoFlow="AO_M9"  scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC09Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm109  MFC09 Offline[DI-359]" />
    <IoMfc id="Mfc10" display="Mfc10" schematicId="Mfc10" unit="sccm" aiActMode="AI_M10ActMode" aoSetMode="AO_M10CtrlMode" aiFlow="AI_M10" aoFlow="AO_M10" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC10Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm110  MFC10 Offline[DI-360]" />
    <IoMfc id="Mfc11" display="Mfc11" schematicId="Mfc11" unit="sccm" aiActMode="AI_M11ActMode" aoSetMode="AO_M11CtrlMode" aiFlow="AI_M11" aoFlow="AO_M11" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC11Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm111  MFC11 Offline[DI-361]" />
    <IoMfc id="Mfc12" display="Mfc12" schematicId="Mfc12" unit="sccm" aiActMode="AI_M12ActMode" aoSetMode="AO_M12CtrlMode" aiFlow="AI_M12" aoFlow="AO_M12" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC12Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm112  MFC12 Offline[DI-362]" />
    <IoMfc id="Mfc13" display="Mfc13" schematicId="Mfc13" unit="sccm" aiActMode="AI_M13ActMode" aoSetMode="AO_M13CtrlMode" aiFlow="AI_M13" aoFlow="AO_M13" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC13Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm113  MFC13 Offline[DI-363]" />
    <IoMfc id="Mfc14" display="Mfc14" schematicId="Mfc14" unit="sccm" aiActMode="AI_M14ActMode" aoSetMode="AO_M14CtrlMode" aiFlow="AI_M14" aoFlow="AO_M14" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC14Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm114  MFC14 Offline[DI-364]" />
    <IoMfc id="Mfc15" display="Mfc15" schematicId="Mfc15" unit="sccm" aiActMode="AI_M15ActMode" aoSetMode="AO_M15CtrlMode" aiFlow="AI_M15" aoFlow="AO_M15" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC15Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm115  MFC15 Offline[DI-365]" />
    <IoMfc id="Mfc16" display="Mfc16" schematicId="Mfc16" unit="sccm" aiActMode="AI_M16ActMode" aoSetMode="AO_M16CtrlMode" aiFlow="AI_M16" aoFlow="AO_M16" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC16Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm116  MFC16 Offline[DI-366]" />
    <IoMfc id="Mfc17" display="Mfc17" schematicId="Mfc17" unit="sccm" aiActMode="AI_M17ActMode" aoSetMode="AO_M17CtrlMode" aiFlow="AI_M17" aoFlow="AO_M17" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC17Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm117  MFC17 Offline[DI-367]" />
    <IoMfc id="Mfc18" display="Mfc18" schematicId="Mfc18" unit="sccm" aiActMode="AI_M18ActMode" aoSetMode="AO_M18CtrlMode" aiFlow="AI_M18" aoFlow="AO_M18" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC18Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm118  MFC18 Offline[DI-368]" />
    <IoMfc id="Mfc19" display="Mfc19" schematicId="Mfc19" unit="sccm" aiActMode="AI_M19ActMode" aoSetMode="AO_M19CtrlMode" aiFlow="AI_M19" aoFlow="AO_M19" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC19Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm119  MFC19 Offline[DI-369]" />
    <IoMfc id="Mfc20" display="Mfc20" schematicId="Mfc20" unit="sccm" aiActMode="AI_M20ActMode" aoSetMode="AO_M20CtrlMode" aiFlow="AI_M20" aoFlow="AO_M20" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC20Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm120  MFC20 Offline[DI-370]" />
    <IoMfc id="Mfc21" display="Mfc21" schematicId="Mfc21" unit="sccm" aiActMode="AI_M21ActMode" aoSetMode="AO_M21CtrlMode" aiFlow="AI_M21" aoFlow="AO_M21" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC21Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm121  MFC21 Offline[DI-371]" />
    <IoMfc id="Mfc22" display="Mfc22" schematicId="Mfc22" unit="sccm" aiActMode="AI_M22ActMode" aoSetMode="AO_M22CtrlMode" aiFlow="AI_M22" aoFlow="AO_M22" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC22Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm122  MFC22 Offline[DI-372]" />
    <IoMfc id="Mfc23" display="Mfc23" schematicId="Mfc23" unit="sccm" aiActMode="AI_M23ActMode" aoSetMode="AO_M23CtrlMode" aiFlow="AI_M23" aoFlow="AO_M23" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC23Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm123  MFC23 Offline[DI-373]" />
    <IoMfc id="Mfc24" display="Mfc24" schematicId="Mfc24" unit="sccm" aiActMode="AI_M24ActMode" aoSetMode="AO_M24CtrlMode" aiFlow="AI_M24" aoFlow="AO_M24" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC24Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm124  MFC24 Offline[DI-374]" />
    <IoMfc id="Mfc25" display="Mfc25" schematicId="Mfc25" unit="sccm" aiActMode="AI_M25ActMode" aoSetMode="AO_M25CtrlMode" aiFlow="AI_M25" aoFlow="AO_M25" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC25Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm125  MFC25 Offline[DI-375]" />
    <IoMfc id="Mfc26" display="Mfc26" schematicId="Mfc26" unit="sccm" aiActMode="AI_M26ActMode" aoSetMode="AO_M26CtrlMode" aiFlow="AI_M26" aoFlow="AO_M26" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC26Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm126  MFC26 Offline[DI-376]" />
    <IoMfc id="Mfc27" display="Mfc27" schematicId="Mfc27" unit="sccm" aiActMode="AI_M27ActMode" aoSetMode="AO_M27CtrlMode" aiFlow="AI_M27" aoFlow="AO_M27" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC27Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm127  MFC27 Offline[DI-377]" />
    <IoMfc id="Mfc28" display="Mfc28" schematicId="Mfc28" unit="sccm" aiActMode="AI_M28ActMode" aoSetMode="AO_M28CtrlMode" aiFlow="AI_M28" aoFlow="AO_M28" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC28Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm128  MFC28 Offline[DI-378]" />
    <IoMfc id="Mfc29" display="Mfc29" schematicId="Mfc29" unit="sccm" aiActMode="AI_M29ActMode" aoSetMode="AO_M29CtrlMode" aiFlow="AI_M29" aoFlow="AO_M29" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC29Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm129  MFC29 Offline[DI-379]" />
    <IoMfc id="Mfc31" display="Mfc31" schematicId="Mfc31" unit="sccm" aiActMode="AI_M31ActMode" aoSetMode="AO_M31CtrlMode" aiFlow="AI_M31" aoFlow="AO_M31" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC31Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm131  MFC31 Offline[DI-381]" />
    <IoMfc id="Mfc32" display="Mfc32" schematicId="Mfc32" unit="sccm" aiActMode="AI_M32ActMode" aoSetMode="AO_M32CtrlMode" aiFlow="AI_M32" aoFlow="AO_M32" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC32Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm132  MFC32 Offline[DI-382]" />
    <IoMfc id="Mfc33" display="Mfc33" schematicId="Mfc33" unit="sccm" aiActMode="AI_M33ActMode" aoSetMode="AO_M33CtrlMode" aiFlow="AI_M33" aoFlow="AO_M33" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC33Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm133  MFC33 Offline[DI-383]" />
    <IoMfc id="Mfc35" display="Mfc35" schematicId="Mfc35" unit="sccm" aiActMode="AI_M35ActMode" aoSetMode="AO_M35CtrlMode" aiFlow="AI_M35" aoFlow="AO_M35" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC35Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm135  MFC35 Offline[DI-385]" />
    <IoMfc id="Mfc36" display="Mfc36" schematicId="Mfc36" unit="sccm" aiActMode="AI_M36ActMode" aoSetMode="AO_M36CtrlMode" aiFlow="AI_M36" aoFlow="AO_M36" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC36Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm136  MFC36 Offline[DI-386]" />
    <IoMfc id="Mfc37" display="Mfc37" schematicId="Mfc37" unit="sccm" aiActMode="AI_M37ActMode" aoSetMode="AO_M37CtrlMode" aiFlow="AI_M37" aoFlow="AO_M37" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC37Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm137  MFC37 Offline[DI-387]" />
    <IoMfc id="Mfc38" display="Mfc38" schematicId="Mfc38" unit="sccm" aiActMode="AI_M38ActMode" aoSetMode="AO_M38CtrlMode" aiFlow="AI_M38" aoFlow="AO_M38" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC38Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm138  MFC38 Offline[DI-388]" />
    <IoMfc id="Mfc40" display="Mfc40" schematicId="Mfc40" unit="sccm" aiActMode="AI_M40ActMode" aoSetMode="AO_M40CtrlMode" aiFlow="AI_M40" aoFlow="AO_M40" scBasePath="PM.PM2.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC40Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm140  MFC40 Offline[DI-390]" />
  </IoMfcs>

  <IoPressures classType="Aitex.Core.RT.Device.Devices.IoPressure" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPressure id="PC1"  display="PC1"  schematicId="PC1"  scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC1Valve"  aiActMode="AI_PC1ActMode"  aoSetMode="AO_PC1CtrlMode"  aiValue="AI_PressCtrl1"  aoValue="AO_PressCtrl1"  formatString="0.0" diAlarm="DI_PC1Offline"	 AlarmText="Alarm141  PC1 Offline[DI-391]" />
    <IoPressure id="PC2"  display="PC2"  schematicId="PC2"  scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC2Valve"  aiActMode="AI_PC2ActMode"  aoSetMode="AO_PC2CtrlMode"  aiValue="AI_PressCtrl2"  aoValue="AO_PressCtrl2"  formatString="0.0" diAlarm="DI_PC2Offline"	 AlarmText="Alarm142  PC2 Offline[DI-392]" />
    <IoPressure id="PC3"  display="PC3"  schematicId="PC3"  scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC3Valve"  aiActMode="AI_PC3ActMode"  aoSetMode="AO_PC3CtrlMode"  aiValue="AI_PressCtrl3"  aoValue="AO_PressCtrl3"  formatString="0.0" diAlarm="DI_PC3Offline"	 AlarmText="Alarm143  PC3 Offline[DI-393]" />
    <IoPressure id="PC4"  display="PC4"  schematicId="PC4"  scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC4Valve"  aiActMode="AI_PC4ActMode"  aoSetMode="AO_PC4CtrlMode"  aiValue="AI_PressCtrl4"  aoValue="AO_PressCtrl4"  formatString="0.0" diAlarm="DI_PC4Offline"	 AlarmText="Alarm144  PC4 Offline[DI-394]" />
    <IoPressure id="PC5"  display="PC5"  schematicId="PC5"  scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC5Valve"  aiActMode="AI_PC5ActMode"  aoSetMode="AO_PC5CtrlMode"  aiValue="AI_PressCtrl5"  aoValue="AO_PressCtrl5"  formatString="0.0" diAlarm="DI_PC5Offline"	 AlarmText="Alarm145  PC5 Offline[DI-395]" />
    <IoPressure id="PC6"  display="PC6"  schematicId="PC6"  scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC6Valve"  aiActMode="AI_PC6ActMode"  aoSetMode="AO_PC6CtrlMode"  aiValue="AI_PressCtrl6"  aoValue="AO_PressCtrl6"  formatString="0.0" diAlarm="DI_PC6Offline"	 AlarmText="Alarm146  PC6 Offline[DI-396]" />
    <IoPressure id="PC7"  display="PC7"  schematicId="PC7"  scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC7Valve"  aiActMode="AI_PC7ActMode"  aoSetMode="AO_PC7CtrlMode"  aiValue="AI_PressCtrl7"  aoValue="AO_PressCtrl7"  formatString="0.0" diAlarm="DI_PC7Offline"	 AlarmText="Alarm147  PC7 Offline[DI-397]" />
    <IoPressure id="PC8"  display="PC8"  schematicId="PC8"  scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC8Valve"  aiActMode="AI_PC8ActMode"  aoSetMode="AO_PC8CtrlMode"  aiValue="AI_PressCtrl8"  aoValue="AO_PressCtrl8"  formatString="0.0" diAlarm="DI_PC8Offline"	 AlarmText="Alarm141  PC8 Offline[DI-391]" />
    <IoPressure id="PC9"  display="PC9"  schematicId="PC9"  scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC9Valve"  aiActMode="AI_PC9ActMode"  aoSetMode="AO_PC9CtrlMode"  aiValue="AI_PressCtrl9"  aoValue="AO_PressCtrl9"  formatString="0.0" diAlarm="DI_PC9Offline"	 AlarmText="Alarm142  PC9 Offline[DI-392]" />

  </IoPressures>

  <IoGasBoxTemps classType="Aitex.Core.RT.Device.Devices.IoLineHeater" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoGasBoxTemp id="HeatTMAPanelTemp"     display="TMAPanelTemp(ATC-1)"     aiHeatTMA="AI_HeatTMA"     scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区1" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
    <IoGasBoxTemp id="HeatTCSPanelTemp"     display="TCSPanelTemp(ATC-2)"     aiHeatTMA="AI_HeatTCSPanel"     scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区2" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
    <IoGasBoxTemp id="HeatinsidePanelTemp"  display="insidePanelTemp(ATC-3)"  aiHeatTMA="AI_HeatinsidePanel"  scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区3" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
    <IoGasBoxTemp id="HeatoutsidePanelTemp" display="outsidePanelTemp(ATC-4)" aiHeatTMA="AI_HeatoutsidePanel" scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区4" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
    <IoGasBoxTemp id="HeatoutsideSHTemp"    display="outsideSHTemp(ATC-5)"    aiHeatTMA="AI_HeatoutsideSH"    scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区5" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
    <IoGasBoxTemp id="HeatLeakBypassTemp"   display="LeakBypassTemp(ATC-6)"   aiHeatTMA="AI_HeatLeakBypass"   scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区6" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>

    <!--<IoGasBoxTemp id="HeatTailFilter" display="HeatTailFilter" aiHeatTMA="AI_HeatTailFilter" scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="PumpLineTempLimt" scWarningLog="PumpLineTempAlarm" doLineHeaterEnable="" />
    <IoGasBoxTemp id="HeatTailPipe"   display="HeatTailPipe"   aiHeatTMA="AI_HeatTailPipe"   scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="PumpLineTempLimt" scWarningLog="PumpLineTempAlarm" doLineHeaterEnable=""/>-->
  </IoGasBoxTemps>
  <IoPumps classType="Aitex.Core.RT.Device.Devices.IoPump" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPump id="Pump" module="" display="Pump" schematicId="Pump" unit="" aioType="" diDryPumpAlarm="DI_DryPumpAlarm" diPumpExhaustPress="DI_PumpExhaustPressSW" diDryPumpFlow="DI_DryPumpFlowSW" diDryPump1Running="DI_DryPump1Running" diDryPump1Warning="DI_DryPump1Warning" />
  </IoPumps>
  <IoPTOffsetAndKs classType="Aitex.Core.RT.Device.Devices.IoPTOffsetAndK" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPTOffsetAndK id="PT1_Offset"  module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_Offset"   />
    <IoPTOffsetAndK id="PT1_K"       module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_K"   />
    <IoPTOffsetAndK id="PT2_Offset"  module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT2_Offset"   />
    <IoPTOffsetAndK id="PT2_K"       module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT2_K"   />
    <IoPTOffsetAndK id="PT3_Offset"  module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT3_Offset"   />
    <IoPTOffsetAndK id="PT3_K"       module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT3_K"   />
    <IoPTOffsetAndK id="PT4_Offset"  module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT4_Offset"   />
    <IoPTOffsetAndK id="PT4_K"       module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT4_K"   />
    <IoPTOffsetAndK id="PT9_Offset"  module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT9_Offset"   />
    <IoPTOffsetAndK id="PT9_K"       module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT9_K"   />
    <IoPTOffsetAndK id="PT10_Offset" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT10_Offset"   />
    <IoPTOffsetAndK id="PT10_K"      module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT10_K"   />
    <IoPTOffsetAndK id="U1_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI3_Offset"   />
    <IoPTOffsetAndK id="U2_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI4_Offset"   />
    <IoPTOffsetAndK id="U3_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI5_Offset"   />
    <IoPTOffsetAndK id="U4_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI2_Offset"   />
    <IoPTOffsetAndK id="U5_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI6_Offset"   />
    <IoPTOffsetAndK id="U6_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI7_Offset"   />
    <IoPTOffsetAndK id="U7_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI8_Offset"   />
    <IoPTOffsetAndK id="U8_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI9_Offset"   />
    <IoPTOffsetAndK id="U9_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI10_Offset" />
    <IoPTOffsetAndK id="U10_Water"   module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI11_Offset" />
    <IoPTOffsetAndK id="U11_Water"   module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI12_Offset" />
    <IoPTOffsetAndK id="U12_Water"   module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI14_Offset" />
    <IoPTOffsetAndK id="U13_Water"   module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI15_Offset" />
    <IoPTOffsetAndK id="U14_Water"   module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI13_Offset" />
  </IoPTOffsetAndKs>
  <DoSensors classType="Aitex.Core.RT.Device.Devices.DoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
    <DoSensor id="CleanRoutineSucceed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_CleanRoutineSuscessed" infoText="" warningText="" alarmText="" />
  </DoSensors>

  <SicServos classType="Aitex.Core.RT.Device.Devices.SicServo" assembly="MECF.Framework.RT.EquipmentLibrary">
    <SicServo id="PMServo" module="" display="PMServo" schematicId="PMServo" unit="" aioType="float"
              aiActualSpeed="AI_ActualSpeed"
              aiActualCurrent="AI_ActualCurrent"
              aiAccSpeed="AI_ActualSpeedACC"
              aiDecSpeed="AI_ActualSpeedDEC"
              aoActualSpeedSetPoint="AO_SpindleSpeed"
              aoAccSpeedSetPoint="AO_SpindleACC"
              aoDecSpeedSetPoint="AO_SpindleDEC"
              diServoReady="DI_ServoReady"
              diServoError="DI_ServoDriverFaultSW"
              doServoEnable="DO_ServoEnable"
              doServoInital="DO_ServoInitial"
              doServoReset="DO_ServoReset" />
  </SicServos>

  <IoSignalTowers classType="MECF.Framework.RT.EquipmentLibrary.Devices.IoSignalTower" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoSignalTower id="SignalTower" module="PM2" display="SignalTower" schematicId="PMSignalTower"
                   eventFile="STEvents.xml"
                   doGreen="DO_TowerGreen"
                   doYellow="DO_TowerYellow"
                   doRed="DO_TowerRed"
                   doBuzzer="DO_Buzzer" />
  </IoSignalTowers>
  <IoChamberMoveBodys classType="Aitex.Core.RT.Device.Devices.IoChamberMoveBody" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoChamberMoveBody id="ChamberMoveBody" module="" display="ChamberMoveBody" schematicId="ChamberMoveBody" unit="" aioType="" diUpFaceback="DI_ChamMoveBodyUp" diDownFaceback="DI_ChamMoveBodyDown" diFront=" DI_ChamMoveBodyFront" diEndFaceback="DI_ChamMoveBodyEnd" doUpSetpoint="DO_ChamMoveBodyUp" doDownSetpoint="DO_ChamMoveBodyDown" doUpBrake="DO_ChamMoveBodyUpAirBrake" doForward="DO_ChamMoveBodyForward" doBackward="DO_ChamMoveBodyBackward" doForwardLatch="DO_ChamMoveBodyBrakerForward" doBackwardLatch="DO_ChamMoveBodyBrakerBackward" diForwardLatch="DI_ChamMoveBodyUpLatchFW" diBackwardLatch="DI_ChamMoveBodyEndLatchBW" diRemote="DI_ChamLidPushButtonLocal" diLock="DI_ManualLidUpPB" diUpDownEnable="DI_ChamMoveBodyUpDownEnableFB" doUpDownEnable="DO_ChamMoveBodyUpDownEnable" />
  </IoChamberMoveBodys>
  <IoGasConnectors classType="Aitex.Core.RT.Device.Devices.IoGasConnector" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoGasConnector id="GasConnector" module="" display="GasConnector" schematicId="GasConnector" unit="" aioType="" diGasConnectorLoosen="DI_SHGasConnectorLoosen" diGasConnectorTighten="DI_SHGasConnectorTighten" doGasConnectorLoosen="DO_SHGasConnectorLoosen" doGasConnectorTighten="DO_SHGasConnectorTighten" />
  </IoGasConnectors>
  <IoLids classType="Aitex.Core.RT.Device.Devices.IoLid" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoLid id="SHLid" module="" display="SH Lid" schematicId="SHLid" unit="" aioType="" diLoosenFaceback="DI_SHLidLoosen" diTightenFaceback="DI_SHLidTighten" diClosedFaceback="DI_SHLidClosed" doLoosenSetpoint="DO_SHLidLoosen" doTightenSetpoint="DO_SHLidTighten" />
    <IoLid id="MiddleLid" module="" display="Middle Lid" schematicId="MiddleLid" unit="" aioType="" diLoosenFaceback="DI_MiddleLidLoosen" diTightenFaceback="DI_MiddleLidTighten" diClosedFaceback="DI_MiddleLidClosed" doLoosenSetpoint="DO_MiddleLidLoosen" doTightenSetpoint="DO_MiddleLidTighten" />
  </IoLids>
  <IoLidSwings classType="Aitex.Core.RT.Device.Devices.IoLidSwing" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoLidSwing id="SHLidSwing" module="" display="SH Lid Swing" schematicId="SHLidSwing" unit="" aioType="" diLidLockFaceback="DI_SHLidSwingLock" diLidUnlockFaceback="DI_SHLidSwingUnlock" doLidLockSetpoint="DO_SHLidSwingLock" doLidUnlockSetpoint="DO_SHLidSwingUnlock" />
    <IoLidSwing id="MiddleLidSwing" module="" display="Middle Lid Swing" schematicId="MiddleLidSwing" unit="" aioType="" diLidLockFaceback="DI_MiddleLidSwingLock" diLidUnlockFaceback="DI_MiddleLidSwingUnlock" doLidLockSetpoint="DO_MiddleLidSwingLock" doLidUnlockSetpoint="DO_MiddleLidSwingUnlock" />
  </IoLidSwings>
  <IoConfinementRings classType="Aitex.Core.RT.Device.Devices.IoConfinementRing" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoConfinementRing id="ConfinementRing" module="" display="ConfinementRing" schematicId="ConfinementRing" unit="" aioType="" diRingDownFaceback="DI_ConfinementRingDown" diRingUpFaceback="DI_ConfinementRingUp" diRingDone="DI_ConfinementRingDone" diRingServoOn="DI_ConfinementRingServoOn" diRingHomed="DI_ConfinementRingHomed" diRingBusy="DI_ConfinementRingBusy" diRingServoError="DI_ConfinementRingServoError" doRingServoOn="DO_ConfinementRingServoOn" doRingJogUp="DO_ConfinementRingJogUp" doRingJogDown="DO_ConfinementRingJogDown" doRingStop="DO_ConfinementRingStop" doRingTeachUp="DO_ConfinementRingUpPosTeach" doRingTeachDown="DO_ConfinementRingDownPosTeach" doRingMoveUp="DO_ConfinementRingMoveUp" doRingMoveDown="DO_ConfinementRingMoveDown" aiRingCurPos="AI_ConfinementRingCurPos" aiRingUpPos="AI_ConfinementRingUpPos" aiRingDownPos="AI_ConfinementRingDownPos" aoRingMode="AO_ConfinementRingMode" aoRingSpeed="AO_ConfinementRingSpeed" aoRingDistance="AO_ConfinementRingDistance" doRingServoReset="DO_ConfinementRingServoReset" aoRingUpPos="AO_ConfinementRingUpPos" aoRingDownPos="AO_ConfinementRingDownPos" />
  </IoConfinementRings>
  <IoHeartBeats classType="Aitex.Core.RT.Device.Devices.IoHeartBeat" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoHeartBeat id="HeartBeat" display="HeartBeat" schematicId="HeartBeat" aioType="float" ai="AI_HeartBeat" ao="AO_HeartBeat" />
  </IoHeartBeats>

  <IoInterLocks classType="Aitex.Core.RT.Device.Devices.IoInterLock" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoInterLock id="PMInterLock" display="" schematicId="" unit="" doLidOpenRoutineSucceed="DO_PurgeRoutineSuscessed"
					 doLidCloseRoutineSucceed="DO_CleanRoutineSuscessed" doProcessRunning="DO_ProcessRunning" doPreprocessRunning="DO_PreprocessRunning"
					 doCyclePurgeRoutineRunning="DO_CyclePurgeRoutineRunning" doExchangeMoRoutineRunning="DO_ExchangeMoRoutineRunning"
					 doLidCloseRoutineRunning="DO_CleanRoutineRunning" doLidOpenRoutineRunning="DO_PurgeRoutineRunning"
					 doPumpDownRoutineRunning="DO_PumpRoutineRunning" doVentRoutineRunning="DO_VentRoutineRunning"
					 doPostProcessRunning="DO_PostProcessRunning" diServoDriverFaultSW="DI_ServoDriverFaultSW" diH2PressureSW="DI_H2PressureSW"
					 doVACTransferAllowed="DO_VACTransferAllowed" doATMTransferAllowed="DO_ATMTransferAllowed" doProcessIdleRunning="DO_ProcessIdleRunning"
					 doATMIdleRoutineRunning="DO_ATMIdleRoutineRunning" doVACIdleRoutineRunning="DO_VACIdleRoutineRunning" diPSU1Status="DI_PSU1Status"
					 diPSU2Status="DI_PSU2Status" diPSU3Status="DI_PSU3Status" diSCR1Status="DI_SCR1Status" diSCR2Status="DI_SCR2Status" diSCR3Status="DI_SCR3Status"
					 doPSU1Enable="DO_PSU1Enable" doPSU2Enable="DO_PSU2Enable" doPSU3Enable="DO_PSU3Enable" doSCR1Enable="DO_SCR1Enable"
					 doSCR2Enable="DO_SCR2Enable" doSCR3Enable="DO_SCR3Enable" doTCSSupply="DO_TCSFluidInfusion" doTCSSupplementing="DO_TCSSupplementing" diTCSHighLevel1="DI_TCSHighLevel1" diTCSNormalLevel="DI_TCSNormalLevel"
         aiTempCtrl1="AI_PSUTC" doReactorATMTransferReady="DO_ReactorATMTransferReady" doReactorVACTransferReady="DO_ReactorVACTransferReady" diPMATMSW="DI_PMATMSW"
					 aiActualSpeed="AI_ActualSpeed"   aiCurPos="AI_ConfinementRingCurPos" aiDownPos="AI_ConfinementRingDownPos" diPSUEnable="DI_PSUEnableFB" diHeaterTempBelow900CSW="DI_HeaterTempLowLimitSW"
					 doPMASlitDoorClosed="DO_SlitVlvClosed" diChamLidClosed="DI_ChamLidClosed" diConfinementRingDown="DI_ConfinementRingDown"
					 aiChamPress="AI_ActualPressure" doReactorPressRisingRate="DO_ReactorPressRisingRateFast" doUPSLowBattery="DO_UPSLowBattery"
                 
                 
					 doChamMiddleFlow2Temp="DO_ChamMiddleFlow2Temp"
					 doSHFlowTemp="DO_SHFlowTemp"
					 doChamTopFlowTemp="DO_ChamTopFlowTemp"
					 doChamMiddleFlow1Temp="DO_ChamMiddleFlow1Temp"
					 doChamBottomFlowTemp="DO_ChamBottomFlowTemp"
					 doSpareFlowTemp="DO_SpareFlowTemp"
					 doPowerRod1FlowTemp="DO_PowerRod1FlowTemp"
					 doPowerRod2FlowTemp="DO_PowerRod2FlowTemp"
					 doForelineFlowTemp ="DO_ForelineFlowTemp"
					 doElectrodeWFlowTemp="DO_ElectrodeWFlowTemp"
					 doTMPump1FlowTemp="DO_TMPump1FlowTemp"
					 doTransformerFlowTemp="DO_TransformerFlowTemp"
					 doTMTopLidTemp="DO_Spare1FlowTemp"
					 doTMBufferFlowTemp="DO_Spare2FlowTemp"
                 
					 aiChamMiddleFlow2Temp="AI_ChamMiddleFlow2Temp"
					 aiSHFlowTemp="AI_SHFlowTemp"
					 aiChamTopFlowTemp="AI_ChamTopFlowTemp"
					 aiChamMiddleFlowTemp="AI_ChamMiddleFlow1Temp"
					 aiChamBottomFlowTemp="AI_ChamBottomFlowTemp"
					 aiForeline1FlowTemp="AI_Foreline1FlowTemp"
					 aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp"
					 aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp"
					 aiElectrodeWFlowTemp="AI_ElectrodeWFlowTemp"
					 aiTMPump1FlowTemp="AI_TMPump1FlowTemp"
					 aiTMPump2FlowTemp="AI_Foreline1FlowTemp"
					 aiTransformerFlowTemp="AI_TransformerFlowTemp"
					 aiForelineFlowTemp="AI_Foreline2FlowTemp"
					 aiTMTopLidTemp="AI_Spare1Temp"
					 aiTMBufferFlowTemp="AI_Spare2Temp"/>
  </IoInterLocks>

  <PryoTempChecks classType="MECF.Framework.RT.EquipmentLibrary.Devices.PryoTempCheck" assembly="MECF.Framework.RT.EquipmentLibrary">
    <PryoTempCheck id="PryoTempCheck"  display="" schematicId="" unit="" scBasePath="PM.{module}.Heater"
                   aoPSUMiddleLoopMode="AO_PSUMiddleLoopMode" aoPSUMiddleTargetSP="AO_PSUMiddleTargetSP"/>
  </PryoTempChecks>

</DeviceModelDefine>