MoS2/App/Modules/SicModules/PMs/Routines/PMCleanRoutine.cs

using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs;
using SicModules.PMs.Routines.Base;
using System.Collections.Generic;
using System.Diagnostics;

namespace SicModules.PMs.Routines
{
    public class PMCleanRoutine : PMBaseRoutine
    {
        private enum RoutineStep
        {
            RotationEnable,
            HeatEnable,
            VentPumpClose,
            VentPumpClose_1,
            VentPumpOpen,
            ArSupply,

            SetGroupB,
            SetGroupC,
            SetGroupE,
            SetGroupF,
            SetGroupH,
            SetGroupD,
            SetGroupG,
            SetGroupK,

            SetM1toM17,
            SetM17M18,
            SetPC,
            SetGroupJ,
            SetGroupJ_1,
            SetM291519to38,

            SetGasOut,
            SetTv,

            SetGasIn1,      //V68
            OpenFinal1,     //V91-96
            SetMfcFinal1,   //M32-38
            SetMfc19to26,

            SetTVCloseMode,
            SetTvPositionToZero,

            SetGasIn2,
            SetGroupJOpen,
            SetM18toM40,

            OpenFinal2,
            SetMfcFinal2,

            SetEPV1,
            SetEPV2,
            SetEPV2_1,
            SetEPV2_2,
            SetEPV2_3,
            SetTvMode,

            RoutinePre,
            V27Open,
            V27Close,

            PressureTo1050,
            SetPressureUp,
            SetPressureUp1,
            SetPressureUp2,
            SetPressureDown,

            PressureToMax,
            PressureToMin,

            SetPressUpOrDown1,
            SetPressUpOrDown2,

            WaitPressureDown,
            WaitPressureUp,
            SetMFCMode,
            SetPCMode,
            WaitPmTo1050,
            SetTvOpen,
            SetTvModeToPress,
            SetEPV22,

            SetV76,
            SetV75,
            SetTVto300,

            CheckPM1000,
            SetMfc28to40Special,
            WaitPressUpTo1000,
            SetMfc28to40Default,

            SetPC567Close,
            SetPC567Mode,
            SetPC567Default,
            OpenEPV2,
            WaitV27Open,
            SetTvTo1150,
            WaitPressUpTo20,
            SetMfc28to31To0,
            WaitPressUpTo0,
            SetMfc28to31ToDefault,
            WaitPressDownTo20,
            CheckPMPt21000,
            SetPressureDown1,
            SetMfc28to31Default1,
            CheckFinal1Open,
            SetGroupV25,
            CloseGroupV25,
            SetM39,
            CheckEPV1Open1,
            CheckEPV2Open1,
            CheckTVOpen1,
            CheckEPV1Open2,
            SetTVEnable_1,
            SetTVEnable_2,
            SetTVPressMode,
            SetTv1,
            Set0M18toM40,
            SetM18,
            SetV31,
            SetV32,
            SetV35V36,
            SetV65,
            WaitTv1,
            SetTVPositionMode,
            SetTVPositionMode_1,
            SetTVPositionMax,
            SetTVPositionMax_1,
            SetTVPressMode1,
            SetTVPressMode2,
            SetM2TOM40Default,
            SetM2toM40_1,
            SetMfc2to40Default,
            SetM18Default,
            SetM18_1,
            SetM18_2,

            SetV92V93V95,
            SetV94,
            SetV96,
            SetV103,
            SetV105,
            SetV68,
            SetM32M35M37,
            SetM36,
            SetM38,
            WaitPmPressureUp1,
            SetTVCloseMode1,
            CLoseTV1,

            StartLoop,
            EndLoop,
            TimeDelay1,
            TimeDelay2,
            TimeDelay3,
            TimeDelay4,
            TimeDelay5,
            TimeDelay6,
            TimeDelay7,
            TimeDelay8,
            TimeDelay9,
            TimeDelay10,
            TimeDelay11,
            TimeDelay18,
            TimeDelay20,
            TimeDelay21,
            TimeDelay22,

            Notify1,
            Notify2,
            Notify3,
            Notify4,
            WaitPressUpTo950,

            FirstWaitPressureUp,
            FirstSetDefault_M18toM40,
            FirstSet0_M18toM40,
            FirstSetEPV2_1,
            FirstSetEPV2_2,
            FirstSetTv1,

            LoopSetDefault_M18toM40,
            LoopSetEPV2_1,
            LoopWaitPressureUp,
            LoopSetEPV2_2,
            LoopSetTv1,
            LoopSet0_M18toM40,
            Loop2Set0_M18toM40,
            LoopWaitTv1,

            FinishSetM1toM17, 
            FinishSetM18toM40, 
            FinishVentPumpClose_1, 
            FinishCloseGroupV25, 
            FinishSetPressureUp2, 
            FinishSetTVto300
        }

        private ModuleName moduleName;
        private PMModule _pmModule;
        private IoThrottleValve2 _IoThrottle;
        private IoInterLock _pmIoInterLock;

        private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
        private int _rotationCloseTimeout = 20;   //旋转停止超时
        private int _heatTimeOut = 5;             //Heat关闭等待Di反馈超时时间

        private int _pressureMaxDelay = 10;         //到低压保持时间（采用固定值10s）
        private int _pressureMinDelay = 10;          //到高压保持时间（采用固定值10s）
        private double _pressureMax;            //Loop压力上限可设置600-800）
        private double _pressureMin;            //Loop压力下限可设置  0-400）
        private int _pressureMinTimeout;
        private int _pressureMaxTimeout;
        private int _pressureLoopCount;         //Loop次数

        private int _IoValueOpenCloseTimeout = 10;   //开关阀门超时时间
        private double _pmPressureMaxDiff;          //蝶阀与目标压力的差值范围(认为调整到位了)
        private int _throttleTimeout;               //蝶阀调整到指定压力的超时时间

        private int _ventTimeout;
        private int _pumpTimeout;

        private double _throttleFinalPressure = 300;//蝶阀最终调整对的压力


        private int _pmCleanTime = 20;

        private Stopwatch _swTimer = new Stopwatch();

        public PMCleanRoutine(ModuleName module, PMModule pm) : base(module, pm)
        {
            moduleName = module;
            _pmModule = pm;
            Name = "Clean";

            _IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
            _pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
        }

        public override Result Start(params object[] objs)
        {
            Reset();

            _pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
            _throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");

            _ventTimeout = SC.GetValue<int>($"PM.{Module}.Clean.VentTimeout");
            _pumpTimeout = SC.GetValue<int>($"PM.{Module}.Clean.PumpTimeout");

            _pressureLoopCount = SC.GetValue<int>($"PM.{Module}.Clean.CycleCleanCount");
            _pressureMin = SC.GetValue<double>($"PM.{Module}.Clean.PumpBasePressure");
            _pressureMinDelay = SC.GetValue<int>($"PM.{Module}.Clean.PumpDelayTime");
            _pressureMinTimeout = SC.GetValue<int>($"PM.{Module}.Clean.PumpTimeout");
            _pressureMax = SC.GetValue<double>($"PM.{Module}.Clean.VentBasePressure");
            _pressureMaxDelay = SC.GetValue<int>($"PM.{Module}.Clean.VentDelayTime");
            _pressureMaxTimeout = SC.GetValue<int>($"PM.{Module}.Clean.VentTimeout");
            _pmCleanTime = SC.GetValue<int>($"PM.{Module}.Clean.CleanTime");

            _throttleFinalPressure = SC.GetValue<double>($"PM.{Module}.Clean.FinalPressure");

            //Purge Succeed 清掉
            _pmIoInterLock.DoLidOpenRoutineSucceed = false;
            _pmIoInterLock.DoLidCloseRoutineSucceed = false;
            if (!_pmIoInterLock.SetPMCleanRoutineRunning(true, out string reason))
            {
                EV.PostAlarmLog(Module, $"can not Clean,{reason}");
                return Result.FAIL;
            }


            _checkPMPt2Over1000 = false;
            _checkPMPressureOver1000 = false;
            _finalOpen = false;

            currentPressureUpOrDown = PressureUpOrDown.None;
            _swTimer.Restart();
            Notify($"Start   LoopCount:{_pressureLoopCount}");
            return Result.RUN;
        }

        public override Result Monitor()
        {
            try
            {
                //CheckRoutineTimeOut();

                //关闭V76,打开V75
                SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);

                //旋转停止,加热停止
                SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
                SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);

                //3、 关闭 V72(GasBox.Vent.Pump） 打开 V25(GasBox.Vent.Bypass)。
                SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);

                //4、 打开 V31（H2.Supply）、 V32(Ar.Supply） 。
                SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);

                //5、 打开 V35(H2N2.Line1)、 V36(H2N2.Line2)，关闭 B/C/E/F/H/KValves,打开 D/G Valves； 打开 J valve。
                SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);

                //设置MFC和PC的模式
                SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
                SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);

                //6、 M1-M17 设定为 default 值，所有 PC 设定为 default 值(PC1-PC9)， M18-M40（除M30\M34\M39）） MFC 3s ramp 到 default 值。
                SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 0);
                SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
                SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 3);

                //7、打开 EPV2，等待 3s, 打开 TV enable, 压力模式，伺服压力默认设定为 0mbar；
                SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
                TimeDelay((int)RoutineStep.TimeDelay1, 3);
                SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable_1, _IoThrottle, 5);
                SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
                SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin);

                //8、当蝶阀设定值 ramp 到 0 后，将 M18-M40（除 M30\M34\M39）） MFC 3s ramp 到 0；
                SetMfcByGroup((int)RoutineStep.Set0M18toM40, MfcGroupName.M18toM40No303439, 0, 3);

                //9、等待腔体压力到 Pump Base Pressure（可配置），蝶阀改为位置模式，开度设定 100%
                WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pressureMin, _pumpTimeout);
                TimeDelay((int)RoutineStep.TimeDelay2, 3);
                SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
                TimeDelay((int)RoutineStep.TimeDelay11, 3);
                SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);

                //10、 M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ；
                SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);

                //11、打开 V87（ SHPurge.Final）、 V88（ OuterGas.Final）、 V89（ InnerGas.Final）、 V90（MiddleGas.Final）、 V91（OpticPurge.Final）、 V97（CarryGas.Final）；
                SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);

                //12、 打开 V68（ChamBody.N2.Purge）
                SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
                TimeDelay((int)RoutineStep.TimeDelay3, 1);

                //13、 M32、 M35、 M36、 M37、 M38 依次设定 3S ramp 到 default 值 ；
                SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 1);
                SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 1);
                SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 1);
                TimeDelay((int)RoutineStep.TimeDelay4, 3);
                //14、打开 V92（GasRingPurge.Final）、 V93（ChamberPurge.Final）、 V95（ConfinementRing.Final）；
                //等待 950，，打开 V94（RotationUpPurge.Final）、 等待 3S，打开 V96（HeaterWF.Final） ；
                //蝶阀改为压力模式
                SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout);
                WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo950, 950, 600);
                SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout);
                TimeDelay((int)RoutineStep.TimeDelay4, 3);
                SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout);
                SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5);

                //M18 - M40（除 M30\M34\M39）） MFC 3s ramp 到 default 值。
                //关闭 EPV2，等待压力达到设定值，压力达到后，打开 EPV2；
                //M18 - M40（除 M30\M34\M39）） MFC 5s ramp 到 0。
                //伺服压力到设定值 0（可配置）
                SetMfcToDefaultByGroup((int)RoutineStep.FirstSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3);
                SetIoValueByGroup((int)RoutineStep.FirstSetEPV2_1, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
                WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.FirstWaitPressureUp, _IoThrottle, _pressureMax, _ventTimeout);
                SetIoValueByGroup((int)RoutineStep.FirstSetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
                SetMfcByGroup((int)RoutineStep.FirstSet0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5);
                SetThrottleToTargetAndNoWait((int)RoutineStep.FirstSetTv1, _IoThrottle, _pressureMin);
                //循环开始
                Loop((int)RoutineStep.StartLoop, _pressureLoopCount);

                //M18 - M40（除 M30\M34\M39）） MFC 3s ramp 到 default 值。
                //关闭 EPV2，等待压力达到设定值，压力达到后，打开 EPV2； 
                //M18 - M40（除 M30\M34\M39）） MFC 5s ramp 到 0。
                //伺服压力到设定值 0（可配置）
                //M18 - M40（除 M30\M34\M39）） MFC5s ramp 到 0。
                //等待压力到达 0（可配置）
                SetMfcToDefaultByGroup((int)RoutineStep.LoopSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3);
                SetIoValueByGroup((int)RoutineStep.LoopSetEPV2_1, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
                WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.LoopWaitPressureUp, _IoThrottle, _pressureMax, _ventTimeout);
                SetIoValueByGroup((int)RoutineStep.LoopSetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
                SetMfcByGroup((int)RoutineStep.LoopSet0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5);
                SetThrottleToTargetAndNoWait((int)RoutineStep.LoopSetTv1, _IoThrottle, _pressureMin);
                SetMfcByGroup((int)RoutineStep.Loop2Set0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5);
                WaitChamberPressDownTo((int)RoutineStep.LoopWaitTv1, _pressureMin, _pumpTimeout);

                EndLoop((int)RoutineStep.EndLoop);
                //设置 M1-M17 3s ramp 到 default； M18 - M40（除 M30\M34\M39）） MFC 3s ramp 到default 值。
                //打开 V72(GasBox.Vent.Pump） 关闭 V25(GasBox.Vent.Bypass)， 反应腔压力伺服到300mbar（可配置）
                
                SetMfcToDefaultByGroup((int)RoutineStep.FinishSetM1toM17, MfcGroupName.M1toM17, 3);
                SetMfcToDefaultByGroup((int)RoutineStep.FinishSetM18toM40, MfcGroupName.M18toM40No303439, 3);
                SetIoValueByGroup((int)RoutineStep.FinishVentPumpClose_1, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.FinishCloseGroupV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout);
                SetThrottleToTargetAndNoWait((int)RoutineStep.FinishSetPressureUp2, _IoThrottle, _throttleFinalPressure);
                WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.FinishSetTVto300, _IoThrottle, _throttleFinalPressure, _pmPressureMaxDiff, _throttleTimeout);
            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                return Result.FAIL;
            }

            Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
            _swTimer.Stop();
            SetRoutineRuningDo();
            SetRoutineSuccessedDo();
            return Result.DONE;
        }

        public override void Abort()
        {
            SetRoutineRuningDo();
            PmDevice._ioThrottleValve.StopRamp();
            PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
            PmDevice.SetRotationServo(0, 0);

            base.Abort();
        }

        private void SetRoutineRuningDo()
        {
            _pmIoInterLock.DoLidCloseRoutineRunning = false;
        }

        private void SetRoutineSuccessedDo()
        {
            _pmIoInterLock.SetLidClosedRoutineSucceed(true, out string reason);
            _pmIoInterLock.DoLidOpenRoutineSucceed = false;
        }


        //private void CheckRoutineTimeOut()
        //{
        //    if (_routineTimeOut > 10)
        //    {
        //        if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
        //        {
        //            EV.PostAlarmLog(Module,$"Routine TimeOut! over {_routineTimeOut} s");
        //            throw (new RoutineFaildException());
        //        }
        //    }
        //}

    }
}