36 lines
928 B
C#
36 lines
928 B
C#
|
namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks
|
|||
|
|
{
|
|||
|
|
public interface ILoadLock
|
|||
|
|
{
|
|||
|
|
bool CheckAtm();
|
|||
|
|
bool CheckVacuum();
|
|||
|
|
|
|||
|
|
bool SetFastVentValve(bool isOpen, out string reason);
|
|||
|
|
bool SetSlowVentValve(bool isOpen, out string reason);
|
|||
|
|
|
|||
|
|
bool SetFastPumpValve(bool isOpen, out string reason);
|
|||
|
|
bool SetSlowPumpValve(bool isOpen, out string reason);
|
|||
|
|
|
|||
|
|
bool CheckLidOpen();
|
|||
|
|
bool CheckLidClose();
|
|||
|
|
|
|||
|
|
bool SetLift(bool isUp, out string reason);
|
|||
|
|
bool CheckLiftUp();
|
|||
|
|
bool CheckLiftDown();
|
|||
|
|
bool CheckTrayClamped();
|
|||
|
|
|
|||
|
|
bool CheckTrayUnClamped();
|
|||
|
|
|
|||
|
|
bool SetTrayClamped(bool clamp, out string reason);
|
|||
|
|
|
|||
|
|
bool CheckWaferClamped();
|
|||
|
|
|
|||
|
|
bool CheckWaferUnClamped();
|
|||
|
|
|
|||
|
|
bool SetWaferClamped(bool clamp, out string reason);
|
|||
|
|
|
|||
|
|
bool CheckWaferPlaced();
|
|||
|
|
bool CheckTrayPlaced();
|
|||
|
|
}
|
|||
|
|
}
|