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<?xml version="1.0" encoding="utf-8"?>
2026-06-15 10:56:30 +08:00
<DeviceModelDefine type= "Sic" xmlns:xsi= "http://www.w3.org/2001/XMLSchema-instance" >
2026-08-06 14:26:13 +08:00
<IoTCs classType= "Aitex.Core.RT.Device.Devices.IoTC" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoTC id= "TC1" display= "TC1" schematicId= "TC1" isDBSaveTemp= "true" aioType= "float" aiL1WorkingOPFeedBack= "AI_PSUInnerWorkingOP" aiL2WorkingOPFeedBack= "AI_PSUMiddleWorkingOP" aiL3WorkingOPFeedBack= "AI_PSUOuterWorkingOP" aiL1PVFeedBack= "AI_PSUInnerPV" aiL2PVFeedBack= "AI_PSUMiddlePV" aiL3PVFeedBack= "AI_PSUOuterPV" diL1TempHighAlarmFeedBack= "DI_PSUInnerTempHAlarm" diL2TempHighAlarmFeedBack= "DI_PSUMiddleTempHAlarm" diL3TempHighAlarmFeedBack= "DI_PSUOuterTempHAlarm" diL1TempLowAlarmFeedBack= "DI_PSUInnerTempLAlarm" diL2TempLowAlarmFeedBack= "DI_PSUMiddleTempLAlarm" diL3TempLowAlarmFeedBack= "DI_PSUOuterTempLAlarm" aoHeaterModeSetPoint= "AO_PSUHeaterMode" aoPowerRefSetPoint= "AO_PSUPowerRef" aoL1RatioSetPoint= "AO_PSUInnerRatio" aoL2RatioSetPoint= "AO_PSUMiddleRatio" aoL3RatioSetPoint= "AO_PSUOuterRatio" aoL1RatedSetPoint= "AO_PSUInnerRatedValue" aoL2RatedSetPoint= "AO_PSUMiddleRatedValue" aoL3RatedSetPoint= "AO_PSUOuterRatedValue" aoL1LoopModeSetPoint= "AO_PSUInnerLoopMode" aoL2LoopModeSetPoint= "AO_PSUMiddleLoopMode" aoL3LoopModeSetPoint= "AO_PSUOuterLoopMode" aoL1TargetSPSetPoint= "AO_PSUInnerTargetSP" aoL2TargetSPSetPoint= "AO_PSUMiddleTargetSP" aoL3TargetSPSetPoint= "AO_PSUOuterTargetSP" aoL1TargetOPSetPoint= "AO_PSUInnerTargetOP" aoL2TargetOPSetPoint= "AO_PSUMiddleTargetOP" aoL3TargetOPSetPoint= "AO_PSUOuterTargetOP" aoPIDLimitLower= "AO_PIDLimitLower" aoPIDLimitUpper= "AO_PIDLimitUpper" aoPIDRateLimit= "AO_PIDRateLimit" aoL1InputTempSetPoint= "AO_PSUInnerTargetSP" aoL2InputTempSetPoint= "AO_PSUMiddleTargetSP" aoL3InputTempSetPoint= "AO_PSUOuterTargetSP" aoTCPyroModeSetPoint= "AO_PSUTCPyroMode" aoL1VoltageLimited= "AO_PSUInnerVoltageLimited" aoL2VoltageLimited= "AO_PSUMiddleVoltageLimited" aoL3VoltageLimited= "AO_PSUOuterVoltageLimited" aoL1TempHighLimitSetPoint= "AO_PSUInnerTempHighLimit" aoL2TempHighLimitSetPoint= "AO_PSUMiddleTempHighLimit" aoL3TempHighLimitSetPoint= "AO_PSUOuterTempHighLimit" aoL1TempLowLimitSetPoint= "AO_PSUInnerTempLowLimit" aoL2TempLowLimitSetPoint= "AO_PSUMiddleTempLowLimit" aoL3TempLowLimitSetPoint= "AO_PSUOuterTempLowLimit" aiTtempCtrlTCIN= "AI_PSUTC" aoPSU1Y= "AO_PSU1Y" aoPSU2Y= "AO_PSU2Y" aoPSU3Y= "AO_PSU3Y"
diPSUInnerHeaterEnable="DI_InnerHeaterEnableFB"
diPSUMiddleHeaterEnable="DI_MiddleHeaterEnableFB"
diPSUOuterHeaterEnable="DI_OuterHeaterEnableFB"
diSCRUpHeaterEnable="DI_SCR1Status"
diSCRMiddleHeaterEnable="DI_SCR2Status"
diSCRDownHeaterEnable="DI_SCR3Status"
aoPLCTargetOPLowLimit="AO_PLCTargetOPLowLimit" aoPLCTargetOPUpLimit="AO_PLCTargetOPUpLimit"
doPLCTempFilterEN="DO_PLCTempFilterEN" doPLCTargetOPCtrlEN="DO_PLCTargetOPCtrlEN" />
<IoTC id= "TC2" display= "TC2" schematicId= "TC2" isDBSaveTemp= "false" aioType= "float" aiL1WorkingOPFeedBack= "AI_SCRUpperWorkingOP" aiL2WorkingOPFeedBack= "AI_SCRMiddleWorkingOP" aiL3WorkingOPFeedBack= "AI_SCRLowerWorkingOP" aiL1PVFeedBack= "AI_SCRUpperPV" aiL2PVFeedBack= "AI_SCRMiddlePV" aiL3PVFeedBack= "AI_SCRLowerPV" diL1TempHighAlarmFeedBack= "DI_SCRUpperTempHAlarm" diL2TempHighAlarmFeedBack= "DI_SCRMiddleTempHAlarm" diL3TempHighAlarmFeedBack= "DI_SCRLowerTempHAlarm" diL1TempLowAlarmFeedBack= "DI_SCRUpperTempLAlarm" diL2TempLowAlarmFeedBack= "DI_SCRMiddleTempLAlarm" diL3TempLowAlarmFeedBack= "DI_SCRLowerTempLAlarm" aoHeaterModeSetPoint= "AO_SCRHeaterMode" aoPowerRefSetPoint= "AO_SCRPowerRef" aoL1RatioSetPoint= "AO_SCRUpperRatio" aoL2RatioSetPoint= "AO_SCRMiddleRatio" aoL3RatioSetPoint= "AO_SCRLowerRatio" aoL1RatedSetPoint= "AO_SCRUpperRatedValue" aoL2RatedSetPoint= "AO_SCRMiddleRatedValue" aoL3RatedSetPoint= "AO_SCRLowerRatedValue" aoL1LoopModeSetPoint= "AO_SCRUpperLoopMode" aoL2LoopModeSetPoint= "AO_SCRMiddleLoopMode" aoL3LoopModeSetPoint= "AO_SCRLowerLoopMode" aoL1TargetSPSetPoint= "AO_SCRUpperTargetSP" aoL2TargetSPSetPoint= "AO_SCRMiddleTargetSP" aoL3TargetSPSetPoint= "AO_SCRLowerTargetSP" aoL1TargetOPSetPoint= "AO_SCRUpperTargetOP" aoL2TargetOPSetPoint= "AO_SCRMiddleTargetOP" aoL3TargetOPSetPoint= "AO_SCRLowerTargetOP" aoPIDLimitLower= "AO_SCRUpperRecipeValue" aoPIDLimitUpper= "AO_SCRMiddleRecipeValue" aoPIDRateLimit= "AO_SCRLowerRecipeValue" aoL1InputTempSetPoint= "AO_SCRUpperTargetSP" aoL2InputTempSetPoint= "AO_SCRMiddleTargetSP" aoL3InputTempSetPoint= "AO_SCRLowerTargetSP" aoTCPyroModeSetPoint= "AO_SCRTCPyroMode" aoL1VoltageLimited= "AO_SCRUpperVoltageLimited" aoL2VoltageLimited= "AO_SCRMiddleVoltageLimited2" aoL3VoltageLimited= "AO_SCRLowerVoltageLimited" aoL1TempHighLimitSetPoint= "AO_SCRUpperTempHighLimit" aoL2TempHighLimitSetPoint= "AO_SCRMiddleTempHighLimit" aoL3TempHighLimitSetPoint= "AO_SCRLowerTempHighLimit" aoL1TempLowLimitSetPoint= "AO_SCRUpperTempLowLimit" aoL2TempLowLimitSetPoint= "AO_SCRMiddleTempLowLimit" aoL3TempLowLimitSetPoint= "AO_SCRLowerTempLowLimit" aiTtempCtrlTCIN= "AI_SCRTC"
diPSUInnerHeaterEnable="DI_InnerHeaterEnableFB"
diPSUMiddleHeaterEnable="DI_MiddleHeaterEnableFB"
diPSUOuterHeaterEnable="DI_OuterHeaterEnableFB"
diSCRUpHeaterEnable="DI_SCR1Status"
diSCRMiddleHeaterEnable="DI_SCR2Status"
diSCRDownHeaterEnable="DI_SCR3Status"/>
</IoTCs>
<IoOmronTemps classType= "Aitex.Core.RT.Device.Devices.IoOmronTemp" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoTC id= "OmronTemp" display= "OmronTemp" schematicId= "OmronTemp" aioType= "float" aoCH1= "" aoCH2= "" aoCH3= "" aoCH4= "" aoCH5= "" aoCH6= "" aoCH7= "" aoCH8= "" aoCH9= "" aoCH10= "" aoCH11= "" aoCH12= "" doLineHeaterEnable= "DO_LineHeaterEnable" />
</IoOmronTemps>
<IoPSUs classType= "Aitex.Core.RT.Device.Devices.IoPSU" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPSU id= "PSU1" display= "PSU1" schematicId= "PSU1" aioType= "float"
scBasePath="PM.{module}.Heater" scResLimitMax="PSU1ResistanceMax"
diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
aiOutputVoltage="AI_PSU1OutputVoltage" aiOutputArms="AI_PSU1OutputArms" aiOutputPower="AI_PSU1OutputPower" aiSimVoltage="AI_PSU1SimVoltage" aiSimArms="AI_PSU1SimArms" doStatus="DO_PSU1Enable" doReset="DO_PSU1Reset" aoConstant="AO_PSU1Constant" diStatus="DI_InnerHeaterEnableFB" diAlarm="DI_PSU1Alarm" AlarmText="Alarm66 PSU1 Alarm[DI-320]" diCommunicationError="DI_PSU1dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_InnerHeaterEnable" />
<IoPSU id= "PSU2" display= "PSU2" schematicId= "PSU2" aioType= "float"
scBasePath="PM.{module}.Heater" scResLimitMax="PSU2ResistanceMax"
aoOutputLimitHigh="AO_PSU2OutputLimitHigh"
aoOutputLimitLow="AO_PSU2OutputLimitLow"
diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
aiOutputVoltage="AI_PSU2OutputVoltage" aiOutputArms="AI_PSU2OutputArms" aiOutputPower="AI_PSU2OutputPower" aiSimVoltage="AI_PSU2SimVoltage" aiSimArms="AI_PSU2SimArms" doStatus="DO_PSU2Enable" doReset="DO_PSU2Reset" aoConstant="AO_PSU2Constant" diStatus="DI_MiddleHeaterEnableFB" diAlarm="DI_PSU2Alarm" AlarmText="Alarm67 PSU2 Alarm[DI-321]" diCommunicationError="DI_PSU2dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_MiddleHeaterEnable" />
<IoPSU id= "PSU3" display= "PSU3" schematicId= "PSU3" aioType= "float"
scBasePath="PM.{module}.Heater" scResLimitMax="PSU3ResistanceMax"
diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
aiOutputVoltage="AI_PSU3OutputVoltage" aiOutputArms="AI_PSU3OutputArms" aiOutputPower="AI_PSU3OutputPower" iSimVoltage="AI_PSU3SimVoltage" aiSimArms="AI_PSU3SimArms" doStatus="DO_PSU3Enable" doReset="DO_PSU3Reset" aoConstant="AO_PSU3Constant" diStatus="DI_OuterHeaterEnableFB" diAlarm="DI_PSU3Alarm" AlarmText="Alarm68 PSU3 Alarm[DI-322]" diCommunicationError="DI_PSU3dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_OuterHeaterEnable" />
</IoPSUs>
<IoSCRs classType= "Aitex.Core.RT.Device.Devices.IoSCR" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoSCR id= "SCR1" display= "SCR1" schematicId= "SCR1" aioType= "float"
scBasePath="PM.{module}.Heater" scResLimitMax="SCR1ResistanceMax"
diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
aiVoltage="AI_SCR1Voltage" aiArms="AI_SCR1Arms" aiPower="AI_SCR1Power" diStatus="DI_SCR1Status" doReset="DO_SCR1Reset" doStatus="DO_SCR1Enable" diAlarm="DI_SCR1Alarm" AlarmText="" />
<IoSCR id= "SCR2" display= "SCR2" schematicId= "SCR2" aioType= "float"
scBasePath="PM.{module}.Heater" scResLimitMax="SCR2ResistanceMax"
diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
aiVoltage="AI_SCR2Voltage" aiArms="AI_SCR2Arms" aiPower="AI_SCR2Power" diStatus="DI_SCR2Status" doReset="DO_SCR2Reset" doStatus="DO_SCR2Enable" diAlarm="DI_SCR2Alarm" AlarmText="" />
<IoSCR id= "SCR3" display= "SCR3" schematicId= "SCR3" aioType= "float"
scBasePath="PM.{module}.Heater" scResLimitMax="SCR3ResistanceMax"
diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
aiVoltage="AI_SCR3Voltage" aiArms="AI_SCR3Arms" aiPower="AI_SCR3Power" diStatus="DI_SCR3Status" doReset="DO_SCR3Reset" doStatus="DO_SCR3Enable" diAlarm="DI_SCR3Alarm" AlarmText="" />
</IoSCRs>
<IoPSUPowers classType= "Aitex.Core.RT.Device.Devices.PSUPowerDetection" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPSUPower id= "PSU1Power" display= "PSU1Power" schematicId= "PSU1Power" aioType= "float" aiPower= "AI_PSU1OutputPower" scBasePath= "PM.{module}.PowerDetection" />
<IoPSUPower id= "PSU2Power" display= "PSU2Power" schematicId= "PSU2Power" aioType= "float" aiPower= "AI_PSU2OutputPower" scBasePath= "PM.{module}.PowerDetection" />
<IoPSUPower id= "PSU3Power" display= "PSU3Power" schematicId= "PSU3Power" aioType= "float" aiPower= "AI_PSU3OutputPower" scBasePath= "PM.{module}.PowerDetection" />
<IoPSUPower id= "SCR1Power" display= "SCR1Power" schematicId= "SCR1Power" aioType= "float" aiPower= "AI_SCR1Power" scBasePath= "PM.{module}.PowerDetection" />
<IoPSUPower id= "SCR2Power" display= "SCR2Power" schematicId= "SCR2Power" aioType= "float" aiPower= "AI_SCR2Power" scBasePath= "PM.{module}.PowerDetection" />
<IoPSUPower id= "SCR3Power" display= "SCR3Power" schematicId= "SCR3Power" aioType= "float" aiPower= "AI_SCR3Power" scBasePath= "PM.{module}.PowerDetection" />
</IoPSUPowers>
<IoPlcProcessAborts classType= "Aitex.Core.RT.Device.Devices.IoPlcProcessAbort" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPlcProcessAbort module= "" id= "IoPlcProcessAbort" display= "IoPlcProcessAbort" schematicId= "IoPlcProcessAbort" diAbortProcessRun= "DI_AbortProcessRunning" doAbortProcessInterrupt= "DO_AbortProcessInterrupt" doAbortProcessBuzzerOFF= "DO_AbortProcessBuzzerOFF" />
</IoPlcProcessAborts>
<IoHeats classType= "Aitex.Core.RT.Device.Devices.IoHeat" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoHeat module= "" id= "PMHeatEnable" display= "HeatEnable" schematicId= "HeatEnable" diEnable= "DI_PSUEnableFB" doEnable= "DO_HeaterEnable" />
</IoHeats>
<IoThrottleValves classType= "Aitex.Core.RT.Device.Devices.IoThrottleValve2" assembly= "MECF.Framework.RT.EquipmentLibrary" >
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<IoThrottleValve id= "TV" display= "TV" schematicId= "TV" unit= "mbar" scBasePath= "PM.{module}" modeValuePressure= "5" modeValuePosition= "2" modeValueClose= "3" modeValueOpen= "4" aioType= "float" aiStatus= "AI_ValveMode" aiPositionFeedback= "AI_ActualPositon" aiPressureFeedback= "AI_ActualPressure" aoPressureMode= "AO_ValveModeSetpoint" aoPositionSetPoint= "AO_SetpointPositon" aoPressureSetPoint= "AO_SetpointPressure" doTVValveEnable= "DO_TVEnable" doTVReset= "DO_TVReset" diTVValveEnable= "" />
2026-08-06 14:26:13 +08:00
</IoThrottleValves>
<IoValves classType= "Aitex.Core.RT.Device.Devices.IoValve" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoValve id= "V18" display= "V18" schematicId= "V18" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoCO6CarrierOutletFB(V18)" doOpen= "DO_MoCO6CarrierOutlet(V18)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V18s" display= "V18s" schematicId= "V18s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoCO6CarrierOutletFB(V18)" doOpen= "DO_MoCO6CarrierOutlet(V18)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V19" display= "V19" schematicId= "V19" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_MoCO6BypassFB(V19)" doOpen= "DO_MoCO6Bypass(V19)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V20" display= "V20" schematicId= "V20" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoCO6InOutLeakTestFB(V20)" doOpen= "DO_MoCO6InOutLeakTest(V20)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V20s" display= "V20s" schematicId= "V20s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoCO6InOutLeakTestFB(V20)" doOpen= "DO_MoCO6InOutLeakTest(V20)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V21" display= "V21" schematicId= "V21" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoResrvCarrierOutletFB(V21)" doOpen= "DO_MoResrvCarrierOutlet(V21)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V21s" display= "V21s" schematicId= "V21s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoResrvCarrierOutletFB(V21)" doOpen= "DO_MoResrvCarrierOutlet(V21)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V22" display= "V22" schematicId= "V22" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_MoResrvBypassFB(V22)" doOpen= "DO_MoResrvBypass(V22)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V25" display= "V25" schematicId= "V25" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SideLeakIsolateFB(V25)" doOpen= "DO_SideLeakIsolate(V25)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V27" display= "V27" schematicId= "V27" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_PMLeakTestIsolateFB(V27)" doOpen= "DO_PMLeakTestIsolate(V27)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V23" display= "V23" schematicId= "V23" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoResrvInoutLeakTestFB(V23)" doOpen= "DO_MoResrvInoutLeakTest(V23)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V23s" display= "V23s" schematicId= "V23s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoResrvInoutLeakTestFB(V23)" doOpen= "DO_MoResrvInoutLeakTest(V23)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V31" display= "V31" schematicId= "V31" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2InletCutOffFB(V31)" doOpen= "DO_H2InletCutOff(V31)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V32" display= "V32" schematicId= "V32" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_N2InletCutOffFB(V32)" doOpen= "DO_N2InletCutOff(V32)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V33" display= "V33" schematicId= "V33" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SHH2ArSupplyFB(V33)" doOpen= "DO_SHH2ArSupply(V33)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V33s" display= "V33s" schematicId= "V33s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SHH2ArSupplyFB(V33)" doOpen= "DO_SHH2ArSupply(V33)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V35" display= "V35" schematicId= "V35" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_PushGasSupplyFB(V35)" doOpen= "DO_PushGasSupply(V35)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V36" display= "V36" schematicId= "V36" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_RunVentGasSupplyFB(V36)" doOpen= "DO_RunVentGasSupply(V36)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V37" display= "V37" schematicId= "V37" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_O2CarrierSourceFB(V37)" doOpen= "DO_O2CarrierSource(V37)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V37s" display= "V37s" schematicId= "V37s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_O2CarrierSourceFB(V37)" doOpen= "DO_O2CarrierSource(V37)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V39" display= "V39" schematicId= "V39" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoCO6RunVentFB(V39)" doOpen= "DO_MoCO6RunVent(V39)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V39s" display= "V39s" schematicId= "V39s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_MoCO6RunVentFB(V39)" doOpen= "DO_MoCO6RunVent(V39)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V40" display= "V40" schematicId= "V40" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoResrvRunVentFB(V40)" doOpen= "DO_MoResrvRunVent(V40)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V40s" display= "V40s" schematicId= "V40s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_MoResrvRunVentFB(V40)" doOpen= "DO_MoResrvRunVent(V40)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V41" display= "V41" schematicId= "V41" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6RunFB(V41)" doOpen= "DO_WCO6Run(V41)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V42" display= "V42" schematicId= "V42" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6VentFB(V42)" doOpen= "DO_WCO6Vent(V42)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V43" display= "V43" schematicId= "V43" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6CarrierFB(V43)" doOpen= "DO_WCO6Carrier(V43)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V43s" display= "V43s" schematicId= "V43s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6CarrierFB(V43)" doOpen= "DO_WCO6Carrier(V43)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V45" display= "V45" schematicId= "V45" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_WCO6BypassFB(V45)" doOpen= "DO_WCO6Bypass(V45)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V46" display= "V46" schematicId= "V46" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6InLeakTestFB(V46)" doOpen= "DO_WCO6InLeakTest(V46)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V46s" display= "V46s" schematicId= "V46s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6InLeakTestFB(V46)" doOpen= "DO_WCO6InLeakTest(V46)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V47" display= "V47" schematicId= "V47" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_O2RunVentFB(V47)" doOpen= "DO_O2RunVent(V47)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V47s" display= "V47s" schematicId= "V47s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_O2RunVentFB(V47)" doOpen= "DO_O2RunVent(V47)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V48" display= "V48" schematicId= "V48" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2CarrierFB(V48)" doOpen= "DO_CS2Carrier(V48)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V48s" display= "V48s" schematicId= "V48s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2CarrierFB(V48)" doOpen= "DO_CS2Carrier(V48)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V49" display= "V49" schematicId= "V49" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_CS2BypassFB(V49)" doOpen= "DO_CS2Bypass(V49)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V50" display= "V50" schematicId= "V50" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2InOutLeakTestFB(V50)" doOpen= "DO_CS2InOutLeakTest(V50)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V50s" display= "V50s" schematicId= "V50s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2InOutLeakTestFB(V50)" doOpen= "DO_CS2InOutLeakTest(V50)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V51" display= "V51" schematicId= "V51" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SSourceCarrierFB(V51)" doOpen= "DO_H2SSourceCarrier(V51)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V51s" display= "V51s" schematicId= "V51s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2SSourceCarrierFB(V51)" doOpen= "DO_H2SSourceCarrier(V51)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V52" display= "V52" schematicId= "V52" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SeSourceCarrierFB(V52)" doOpen= "DO_H2SeSourceCarrier(V52)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V52s" display= "V52s" schematicId= "V52s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2SeSourceCarrierFB(V52)" doOpen= "DO_H2SeSourceCarrier(V52)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V53" display= "V53" schematicId= "V53" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2RunVentFB(V53)" doOpen= "DO_CS2RunVent(V53)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V53s" display= "V53s" schematicId= "V53s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_CS2RunVentFB(V53)" doOpen= "DO_CS2RunVent(V53)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V54" display= "V54" schematicId= "V54" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SRunVentFB(V54)" doOpen= "DO_H2SRunVent(V54)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V54s" display= "V54s" schematicId= "V54s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2SRunVentFB(V54)" doOpen= "DO_H2SRunVent(V54)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V55" display= "V55" schematicId= "V55" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SeRunFB(V55)" doOpen= "DO_H2SeRun(V55)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V56" display= "V56" schematicId= "V56" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SeVentFB(V56)" doOpen= "DO_H2SeVent(V56)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V58" display= "V58" schematicId= "V58" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SO2SourceCarrierFB(V58)" doOpen= "DO_SO2SourceCarrier(V58)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V58s" display= "V58s" schematicId= "V58s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SO2SourceCarrierFB(V58)" doOpen= "DO_SO2SourceCarrier(V58)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V59" display= "V59" schematicId= "V59" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SO2RunVentFB(V59)" doOpen= "DO_SO2RunVent(V59)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V59s" display= "V59s" schematicId= "V59s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SO2RunVentFB(V59)" doOpen= "DO_SO2RunVent(V59)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V60" display= "V60" schematicId= "V60" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SO2VentFB(V60)" doOpen= "DO_SO2Vent(V60)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V61" display= "V61" schematicId= "V61" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_Run1MoWFB(V61)" doOpen= "DO_Run1MoW(V61)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V62" display= "V62" schematicId= "V62" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_Run2SSeFB(V62)" doOpen= "DO_Run2SSe(V62)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V63" display= "V63" schematicId= "V63" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_Run3O2SO2FB(V63)" doOpen= "DO_Run3O2SO2(V63)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V66" display= "V66" schematicId= "V66" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SHPurgeH2FB(V66)" doOpen= "DO_SHPurgeH2(V66)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V67" display= "V67" schematicId= "V67" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SHPurgeN2FB(V67)" doOpen= "DO_SHPurgeN2(V67)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V68" display= "V68" schematicId= "V68" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_PMPurgeN2FB(V68)" doOpen= "DO_PMPurgeN2(V68)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V69" display= "V69" schematicId= "V69" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SrcLeakTestPreFilterFB(V69)" doOpen= "DO_SrcLeakTestPreFilter(V69)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V70" display= "V70" schematicId= "V70" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_PMTMBalanceFB(V70)" doOpen= "DO_PMTMBalance(V70)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V72" display= "V72" schematicId= "V72" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_VentGasDumpFB(V72)" doOpen= "DO_VentGasDump(V72)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V73" display= "V73" schematicId= "V73" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SrcLeakTestPrePumpFB(V73)" doOpen= "DO_SrcLeakTestPrePump(V73)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V74" display= "V74" schematicId= "V74" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_GasboxLeakTestFB(V74)" doOpen= "DO_GasboxLeakTest(V74)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V75" display= "V75" schematicId= "V75" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_DORVacuumFB(V75)" doOpen= "DO_DORVacuum(V75)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V76" display= "V76" schematicId= "V76" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_DORPressureReliefFB(V76)" doOpen= "DO_DORPressureRelief(V76)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V87" display= "V87" schematicId= "V87" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalSHPurgeFB(V87)" doOpen= "DO_FinalSHPurge(V87)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V88" display= "V88" schematicId= "V88" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalOuterGasFB(V88)" doOpen= "DO_FinalOuterGas(V88)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V89" display= "V89" schematicId= "V89" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalInnerGasFB(V89)" doOpen= "DO_FinalInnerGas(V89)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V90" display= "V90" schematicId= "V90" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalMiddleGasFB(V90)" doOpen= "DO_FinalMiddleGas(V90)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V91" display= "V91" schematicId= "V91" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalOpticPurgeFB(V91)" doOpen= "DO_FinalOpticPurge(V91)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V92" display= "V92" schematicId= "V92" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalGasRingFB(V92)" doOpen= "DO_FinalGasRing(V92)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V93" display= "V93" schematicId= "V93" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalChamberPurgeFB(V93)" doOpen= "DO_FinalChamberPurge(V93)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V94" display= "V94" schematicId= "V94" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalRotationPurgeFB(V94)" doOpen= "DO_FinalRotationPurge(V94)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V95" display= "V95" schematicId= "V95" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalShutterPurgeFB(V95)" doOpen= "DO_FinalShutterPurge(V95)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V96" display= "V96" schematicId= "V96" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalHeaterWFPurgeFB(V96)" doOpen= "DO_FinalHeaterWFPurge(V96)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V97" display= "V97" schematicId= "V97" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalCarryGasFB(V97)" doOpen= "DO_FinalCarryGas(V97)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "EPV1" display= "EPV1" schematicId= "EPV1" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_EPV1FB" doOpen= "DO_EPV1" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "EPV2" display= "EPV2" schematicId= "EPV2" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_EPV2FB" doOpen= "DO_EPV2" diCloseSensor= "" diOpenSensor= "" />
</IoValves>
<IoMfcs classType= "Aitex.Core.RT.Device.Devices.IoMFC" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoMfc id= "Mfc1" display= "Mfc1" schematicId= "Mfc1" unit= "sccm" aiActMode= "AI_M1ActMode" aoSetMode= "AO_M1CtrlMode" aiFlow= "AI_M1" aoFlow= "AO_M1" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC01Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm101 MFC01 Offline[DI-351]" />
<IoMfc id= "Mfc3" display= "Mfc3" schematicId= "Mfc3" unit= "sccm" aiActMode= "AI_M3ActMode" aoSetMode= "AO_M3CtrlMode" aiFlow= "AI_M3" aoFlow= "AO_M3" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC03Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm103 MFC03 Offline[DI-353]" />
<IoMfc id= "Mfc4" display= "Mfc4" schematicId= "Mfc4" unit= "sccm" aiActMode= "AI_M4ActMode" aoSetMode= "AO_M4CtrlMode" aiFlow= "AI_M4" aoFlow= "AO_M4" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC04Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm104 MFC04 Offline[DI-354]" />
<IoMfc id= "Mfc6" display= "Mfc6" schematicId= "Mfc6" unit= "sccm" aiActMode= "AI_M6ActMode" aoSetMode= "AO_M6CtrlMode" aiFlow= "AI_M6" aoFlow= "AO_M6" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC06Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm106 MFC06 Offline[DI-356]" />
<IoMfc id= "Mfc7" display= "Mfc7" schematicId= "Mfc7" unit= "sccm" aiActMode= "AI_M7ActMode" aoSetMode= "AO_M7CtrlMode" aiFlow= "AI_M7" aoFlow= "AO_M7" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC07Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm107 MFC07 Offline[DI-357]" />
<IoMfc id= "Mfc8" display= "Mfc8" schematicId= "Mfc8" unit= "sccm" aiActMode= "AI_M8ActMode" aoSetMode= "AO_M8CtrlMode" aiFlow= "AI_M8" aoFlow= "AO_M8" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC08Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm108 MFC08 Offline[DI-358]" />
<IoMfc id= "Mfc9" display= "Mfc9" schematicId= "Mfc9" unit= "sccm" aiActMode= "AI_M9ActMode" aoSetMode= "AO_M9CtrlMode" aiFlow= "AI_M9" aoFlow= "AO_M9" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC09Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm109 MFC09 Offline[DI-359]" />
<IoMfc id= "Mfc10" display= "Mfc10" schematicId= "Mfc10" unit= "sccm" aiActMode= "AI_M10ActMode" aoSetMode= "AO_M10CtrlMode" aiFlow= "AI_M10" aoFlow= "AO_M10" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC10Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm110 MFC10 Offline[DI-360]" />
<IoMfc id= "Mfc11" display= "Mfc11" schematicId= "Mfc11" unit= "sccm" aiActMode= "AI_M11ActMode" aoSetMode= "AO_M11CtrlMode" aiFlow= "AI_M11" aoFlow= "AO_M11" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC11Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm111 MFC11 Offline[DI-361]" />
<IoMfc id= "Mfc12" display= "Mfc12" schematicId= "Mfc12" unit= "sccm" aiActMode= "AI_M12ActMode" aoSetMode= "AO_M12CtrlMode" aiFlow= "AI_M12" aoFlow= "AO_M12" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC12Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm112 MFC12 Offline[DI-362]" />
<IoMfc id= "Mfc13" display= "Mfc13" schematicId= "Mfc13" unit= "sccm" aiActMode= "AI_M13ActMode" aoSetMode= "AO_M13CtrlMode" aiFlow= "AI_M13" aoFlow= "AO_M13" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC13Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm113 MFC13 Offline[DI-363]" />
<IoMfc id= "Mfc14" display= "Mfc14" schematicId= "Mfc14" unit= "sccm" aiActMode= "AI_M14ActMode" aoSetMode= "AO_M14CtrlMode" aiFlow= "AI_M14" aoFlow= "AO_M14" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC14Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm114 MFC14 Offline[DI-364]" />
<IoMfc id= "Mfc15" display= "Mfc15" schematicId= "Mfc15" unit= "sccm" aiActMode= "AI_M15ActMode" aoSetMode= "AO_M15CtrlMode" aiFlow= "AI_M15" aoFlow= "AO_M15" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC15Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm115 MFC15 Offline[DI-365]" />
<IoMfc id= "Mfc16" display= "Mfc16" schematicId= "Mfc16" unit= "sccm" aiActMode= "AI_M16ActMode" aoSetMode= "AO_M16CtrlMode" aiFlow= "AI_M16" aoFlow= "AO_M16" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC16Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm116 MFC16 Offline[DI-366]" />
<IoMfc id= "Mfc17" display= "Mfc17" schematicId= "Mfc17" unit= "sccm" aiActMode= "AI_M17ActMode" aoSetMode= "AO_M17CtrlMode" aiFlow= "AI_M17" aoFlow= "AO_M17" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC17Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm117 MFC17 Offline[DI-367]" />
<IoMfc id= "Mfc18" display= "Mfc18" schematicId= "Mfc18" unit= "sccm" aiActMode= "AI_M18ActMode" aoSetMode= "AO_M18CtrlMode" aiFlow= "AI_M18" aoFlow= "AO_M18" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC18Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm118 MFC18 Offline[DI-368]" />
<IoMfc id= "Mfc19" display= "Mfc19" schematicId= "Mfc19" unit= "sccm" aiActMode= "AI_M19ActMode" aoSetMode= "AO_M19CtrlMode" aiFlow= "AI_M19" aoFlow= "AO_M19" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC19Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm119 MFC19 Offline[DI-369]" />
<IoMfc id= "Mfc20" display= "Mfc20" schematicId= "Mfc20" unit= "sccm" aiActMode= "AI_M20ActMode" aoSetMode= "AO_M20CtrlMode" aiFlow= "AI_M20" aoFlow= "AO_M20" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC20Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm120 MFC20 Offline[DI-370]" />
<IoMfc id= "Mfc21" display= "Mfc21" schematicId= "Mfc21" unit= "sccm" aiActMode= "AI_M21ActMode" aoSetMode= "AO_M21CtrlMode" aiFlow= "AI_M21" aoFlow= "AO_M21" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC21Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm121 MFC21 Offline[DI-371]" />
<IoMfc id= "Mfc22" display= "Mfc22" schematicId= "Mfc22" unit= "sccm" aiActMode= "AI_M22ActMode" aoSetMode= "AO_M22CtrlMode" aiFlow= "AI_M22" aoFlow= "AO_M22" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC22Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm122 MFC22 Offline[DI-372]" />
<IoMfc id= "Mfc23" display= "Mfc23" schematicId= "Mfc23" unit= "sccm" aiActMode= "AI_M23ActMode" aoSetMode= "AO_M23CtrlMode" aiFlow= "AI_M23" aoFlow= "AO_M23" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC23Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm123 MFC23 Offline[DI-373]" />
<IoMfc id= "Mfc24" display= "Mfc24" schematicId= "Mfc24" unit= "sccm" aiActMode= "AI_M24ActMode" aoSetMode= "AO_M24CtrlMode" aiFlow= "AI_M24" aoFlow= "AO_M24" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC24Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm124 MFC24 Offline[DI-374]" />
<IoMfc id= "Mfc25" display= "Mfc25" schematicId= "Mfc25" unit= "sccm" aiActMode= "AI_M25ActMode" aoSetMode= "AO_M25CtrlMode" aiFlow= "AI_M25" aoFlow= "AO_M25" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC25Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm125 MFC25 Offline[DI-375]" />
<IoMfc id= "Mfc26" display= "Mfc26" schematicId= "Mfc26" unit= "sccm" aiActMode= "AI_M26ActMode" aoSetMode= "AO_M26CtrlMode" aiFlow= "AI_M26" aoFlow= "AO_M26" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC26Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm126 MFC26 Offline[DI-376]" />
<IoMfc id= "Mfc27" display= "Mfc27" schematicId= "Mfc27" unit= "sccm" aiActMode= "AI_M27ActMode" aoSetMode= "AO_M27CtrlMode" aiFlow= "AI_M27" aoFlow= "AO_M27" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC27Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm127 MFC27 Offline[DI-377]" />
<IoMfc id= "Mfc28" display= "Mfc28" schematicId= "Mfc28" unit= "sccm" aiActMode= "AI_M28ActMode" aoSetMode= "AO_M28CtrlMode" aiFlow= "AI_M28" aoFlow= "AO_M28" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC28Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm128 MFC28 Offline[DI-378]" />
<IoMfc id= "Mfc29" display= "Mfc29" schematicId= "Mfc29" unit= "sccm" aiActMode= "AI_M29ActMode" aoSetMode= "AO_M29CtrlMode" aiFlow= "AI_M29" aoFlow= "AO_M29" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC29Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm129 MFC29 Offline[DI-379]" />
<IoMfc id= "Mfc31" display= "Mfc31" schematicId= "Mfc31" unit= "sccm" aiActMode= "AI_M31ActMode" aoSetMode= "AO_M31CtrlMode" aiFlow= "AI_M31" aoFlow= "AO_M31" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC31Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm131 MFC31 Offline[DI-381]" />
<IoMfc id= "Mfc32" display= "Mfc32" schematicId= "Mfc32" unit= "sccm" aiActMode= "AI_M32ActMode" aoSetMode= "AO_M32CtrlMode" aiFlow= "AI_M32" aoFlow= "AO_M32" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC32Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm132 MFC32 Offline[DI-382]" />
<IoMfc id= "Mfc33" display= "Mfc33" schematicId= "Mfc33" unit= "sccm" aiActMode= "AI_M33ActMode" aoSetMode= "AO_M33CtrlMode" aiFlow= "AI_M33" aoFlow= "AO_M33" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC33Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm133 MFC33 Offline[DI-383]" />
<IoMfc id= "Mfc35" display= "Mfc35" schematicId= "Mfc35" unit= "sccm" aiActMode= "AI_M35ActMode" aoSetMode= "AO_M35CtrlMode" aiFlow= "AI_M35" aoFlow= "AO_M35" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC35Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm135 MFC35 Offline[DI-385]" />
<IoMfc id= "Mfc36" display= "Mfc36" schematicId= "Mfc36" unit= "sccm" aiActMode= "AI_M36ActMode" aoSetMode= "AO_M36CtrlMode" aiFlow= "AI_M36" aoFlow= "AO_M36" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC36Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm136 MFC36 Offline[DI-386]" />
<IoMfc id= "Mfc37" display= "Mfc37" schematicId= "Mfc37" unit= "sccm" aiActMode= "AI_M37ActMode" aoSetMode= "AO_M37CtrlMode" aiFlow= "AI_M37" aoFlow= "AO_M37" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC37Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm137 MFC37 Offline[DI-387]" />
<IoMfc id= "Mfc38" display= "Mfc38" schematicId= "Mfc38" unit= "sccm" aiActMode= "AI_M38ActMode" aoSetMode= "AO_M38CtrlMode" aiFlow= "AI_M38" aoFlow= "AO_M38" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC38Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm138 MFC38 Offline[DI-388]" />
<IoMfc id= "Mfc40" display= "Mfc40" schematicId= "Mfc40" unit= "sccm" aiActMode= "AI_M40ActMode" aoSetMode= "AO_M40CtrlMode" aiFlow= "AI_M40" aoFlow= "AO_M40" scBasePath= "PM.PM2.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC40Offline" maskDOProcessIdle= "DO_ProcessIdleRunning" maskDOPreProcess= "DO_PreprocessRunning" maskDOPostProcess= "DO_PostProcessRunning" maskDOProcess= "DO_ProcessRunning" AlarmText= "Alarm140 MFC40 Offline[DI-390]" />
</IoMfcs>
<IoPressures classType= "Aitex.Core.RT.Device.Devices.IoPressure" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPressure id= "PC1" display= "PC1" schematicId= "PC1" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC1Valve" aiActMode= "AI_PC1ActMode" aoSetMode= "AO_PC1CtrlMode" aiValue= "AI_PressCtrl1" aoValue= "AO_PressCtrl1" formatString= "0.0" diAlarm= "DI_PC1Offline" AlarmText= "Alarm141 PC1 Offline[DI-391]" />
<IoPressure id= "PC2" display= "PC2" schematicId= "PC2" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC2Valve" aiActMode= "AI_PC2ActMode" aoSetMode= "AO_PC2CtrlMode" aiValue= "AI_PressCtrl2" aoValue= "AO_PressCtrl2" formatString= "0.0" diAlarm= "DI_PC2Offline" AlarmText= "Alarm142 PC2 Offline[DI-392]" />
<IoPressure id= "PC3" display= "PC3" schematicId= "PC3" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC3Valve" aiActMode= "AI_PC3ActMode" aoSetMode= "AO_PC3CtrlMode" aiValue= "AI_PressCtrl3" aoValue= "AO_PressCtrl3" formatString= "0.0" diAlarm= "DI_PC3Offline" AlarmText= "Alarm143 PC3 Offline[DI-393]" />
<IoPressure id= "PC4" display= "PC4" schematicId= "PC4" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC4Valve" aiActMode= "AI_PC4ActMode" aoSetMode= "AO_PC4CtrlMode" aiValue= "AI_PressCtrl4" aoValue= "AO_PressCtrl4" formatString= "0.0" diAlarm= "DI_PC4Offline" AlarmText= "Alarm144 PC4 Offline[DI-394]" />
<IoPressure id= "PC5" display= "PC5" schematicId= "PC5" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC5Valve" aiActMode= "AI_PC5ActMode" aoSetMode= "AO_PC5CtrlMode" aiValue= "AI_PressCtrl5" aoValue= "AO_PressCtrl5" formatString= "0.0" diAlarm= "DI_PC5Offline" AlarmText= "Alarm145 PC5 Offline[DI-395]" />
<IoPressure id= "PC6" display= "PC6" schematicId= "PC6" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC6Valve" aiActMode= "AI_PC6ActMode" aoSetMode= "AO_PC6CtrlMode" aiValue= "AI_PressCtrl6" aoValue= "AO_PressCtrl6" formatString= "0.0" diAlarm= "DI_PC6Offline" AlarmText= "Alarm146 PC6 Offline[DI-396]" />
<IoPressure id= "PC7" display= "PC7" schematicId= "PC7" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC7Valve" aiActMode= "AI_PC7ActMode" aoSetMode= "AO_PC7CtrlMode" aiValue= "AI_PressCtrl7" aoValue= "AO_PressCtrl7" formatString= "0.0" diAlarm= "DI_PC7Offline" AlarmText= "Alarm147 PC7 Offline[DI-397]" />
<IoPressure id= "PC8" display= "PC8" schematicId= "PC8" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC8Valve" aiActMode= "AI_PC8ActMode" aoSetMode= "AO_PC8CtrlMode" aiValue= "AI_PressCtrl8" aoValue= "AO_PressCtrl8" formatString= "0.0" diAlarm= "DI_PC8Offline" AlarmText= "Alarm141 PC8 Offline[DI-391]" />
<IoPressure id= "PC9" display= "PC9" schematicId= "PC9" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC9Valve" aiActMode= "AI_PC9ActMode" aoSetMode= "AO_PC9CtrlMode" aiValue= "AI_PressCtrl9" aoValue= "AO_PressCtrl9" formatString= "0.0" diAlarm= "DI_PC9Offline" AlarmText= "Alarm142 PC9 Offline[DI-392]" />
</IoPressures>
<IoGasBoxTemps classType= "Aitex.Core.RT.Device.Devices.IoLineHeater" assembly= "MECF.Framework.RT.EquipmentLibrary" >
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<IoGasBoxTemp id= "HeatTMAPanelTemp" display= "TMAPanelTemp(ATC-1)" aiHeatTMA= "AI_HeatTMA" scBasePath= "PM.{module}.LineHeaterTemp" scAlarmHigh= "加热带温区1" scWarningLog= "" doLineHeaterEnable= "DO_LineHeaterEnable" />
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<IoGasBoxTemp id= "HeatTCSPanelTemp" display= "TCSPanelTemp(ATC-2)" aiHeatTMA= "AI_HeatTCSPanel" scBasePath= "PM.{module}.LineHeaterTemp" scAlarmHigh= "加热带温区2" scWarningLog= "" doLineHeaterEnable= "DO_LineHeaterEnable" />
<IoGasBoxTemp id= "HeatinsidePanelTemp" display= "insidePanelTemp(ATC-3)" aiHeatTMA= "AI_HeatinsidePanel" scBasePath= "PM.{module}.LineHeaterTemp" scAlarmHigh= "加热带温区3" scWarningLog= "" doLineHeaterEnable= "DO_LineHeaterEnable" />
<IoGasBoxTemp id= "HeatoutsidePanelTemp" display= "outsidePanelTemp(ATC-4)" aiHeatTMA= "AI_HeatoutsidePanel" scBasePath= "PM.{module}.LineHeaterTemp" scAlarmHigh= "加热带温区4" scWarningLog= "" doLineHeaterEnable= "DO_LineHeaterEnable" />
<IoGasBoxTemp id= "HeatoutsideSHTemp" display= "outsideSHTemp(ATC-5)" aiHeatTMA= "AI_HeatoutsideSH" scBasePath= "PM.{module}.LineHeaterTemp" scAlarmHigh= "加热带温区5" scWarningLog= "" doLineHeaterEnable= "DO_LineHeaterEnable" />
<IoGasBoxTemp id= "HeatLeakBypassTemp" display= "LeakBypassTemp(ATC-6)" aiHeatTMA= "AI_HeatLeakBypass" scBasePath= "PM.{module}.LineHeaterTemp" scAlarmHigh= "加热带温区6" scWarningLog= "" doLineHeaterEnable= "DO_LineHeaterEnable" />
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<!-- <IoGasBoxTemp id="HeatTailFilter" display="HeatTailFilter" aiHeatTMA="AI_HeatTailFilter" scBasePath="PM.{module}.LineHeaterTemp" scAlarmHigh="PumpLineTempLimt" scWarningLog="PumpLineTempAlarm" doLineHeaterEnable="" />
<IoGasBoxTemp id= "HeatTailPipe" display= "HeatTailPipe" aiHeatTMA= "AI_HeatTailPipe" scBasePath= "PM.{module}.LineHeaterTemp" scAlarmHigh= "PumpLineTempLimt" scWarningLog= "PumpLineTempAlarm" doLineHeaterEnable= "" /> -->
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</IoGasBoxTemps>
<IoPumps classType= "Aitex.Core.RT.Device.Devices.IoPump" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPump id= "Pump" module= "" display= "Pump" schematicId= "Pump" unit= "" aioType= "" diDryPumpAlarm= "DI_DryPumpAlarm" diPumpExhaustPress= "DI_PumpExhaustPressSW" diDryPumpFlow= "DI_DryPumpFlowSW" diDryPump1Running= "DI_DryPump1Running" diDryPump1Warning= "DI_DryPump1Warning" />
</IoPumps>
<IoPTOffsetAndKs classType= "Aitex.Core.RT.Device.Devices.IoPTOffsetAndK" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPTOffsetAndK id= "PT1_Offset" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT1_Offset" />
<IoPTOffsetAndK id= "PT1_K" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT1_K" />
<IoPTOffsetAndK id= "PT2_Offset" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT2_Offset" />
<IoPTOffsetAndK id= "PT2_K" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT2_K" />
<IoPTOffsetAndK id= "PT3_Offset" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT3_Offset" />
<IoPTOffsetAndK id= "PT3_K" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT3_K" />
<IoPTOffsetAndK id= "PT4_Offset" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT4_Offset" />
<IoPTOffsetAndK id= "PT4_K" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT4_K" />
<IoPTOffsetAndK id= "PT9_Offset" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT9_Offset" />
<IoPTOffsetAndK id= "PT9_K" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT9_K" />
<IoPTOffsetAndK id= "PT10_Offset" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT10_Offset" />
<IoPTOffsetAndK id= "PT10_K" module= "" display= "PT" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_PT10_K" />
<IoPTOffsetAndK id= "U1_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI3_Offset" />
<IoPTOffsetAndK id= "U2_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI4_Offset" />
<IoPTOffsetAndK id= "U3_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI5_Offset" />
<IoPTOffsetAndK id= "U4_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI2_Offset" />
<IoPTOffsetAndK id= "U5_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI6_Offset" />
<IoPTOffsetAndK id= "U6_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI7_Offset" />
<IoPTOffsetAndK id= "U7_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI8_Offset" />
<IoPTOffsetAndK id= "U8_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI9_Offset" />
<IoPTOffsetAndK id= "U9_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI10_Offset" />
<IoPTOffsetAndK id= "U10_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI11_Offset" />
<IoPTOffsetAndK id= "U11_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI12_Offset" />
<IoPTOffsetAndK id= "U12_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI14_Offset" />
<IoPTOffsetAndK id= "U13_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI15_Offset" />
<IoPTOffsetAndK id= "U14_Water" module= "" display= "WaterTemp" schematicId= "" unit= "" aioType= "float" aoOffset= "AO_AI13_Offset" />
</IoPTOffsetAndKs>
<DoSensors classType= "Aitex.Core.RT.Device.Devices.DoSensor" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<DoSensor id= "CleanRoutineSucceed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" do= "DO_CleanRoutineSuscessed" infoText= "" warningText= "" alarmText= "" />
</DoSensors>
<SicServos classType= "Aitex.Core.RT.Device.Devices.SicServo" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<SicServo id= "PMServo" module= "" display= "PMServo" schematicId= "PMServo" unit= "" aioType= "float"
aiActualSpeed="AI_ActualSpeed"
aiActualCurrent="AI_ActualCurrent"
aiAccSpeed="AI_ActualSpeedACC"
aiDecSpeed="AI_ActualSpeedDEC"
aoActualSpeedSetPoint="AO_SpindleSpeed"
aoAccSpeedSetPoint="AO_SpindleACC"
aoDecSpeedSetPoint="AO_SpindleDEC"
diServoReady="DI_ServoReady"
diServoError="DI_ServoDriverFaultSW"
doServoEnable="DO_ServoEnable"
doServoInital="DO_ServoInitial"
doServoReset="DO_ServoReset" />
</SicServos>
<IoSignalTowers classType= "MECF.Framework.RT.EquipmentLibrary.Devices.IoSignalTower" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoSignalTower id= "SignalTower" module= "PM2" display= "SignalTower" schematicId= "PMSignalTower"
eventFile="STEvents.xml"
doGreen="DO_TowerGreen"
doYellow="DO_TowerYellow"
doRed="DO_TowerRed"
doBuzzer="DO_Buzzer" />
</IoSignalTowers>
<IoChamberMoveBodys classType= "Aitex.Core.RT.Device.Devices.IoChamberMoveBody" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoChamberMoveBody id= "ChamberMoveBody" module= "" display= "ChamberMoveBody" schematicId= "ChamberMoveBody" unit= "" aioType= "" diUpFaceback= "DI_ChamMoveBodyUp" diDownFaceback= "DI_ChamMoveBodyDown" diFront= " DI_ChamMoveBodyFront" diEndFaceback= "DI_ChamMoveBodyEnd" doUpSetpoint= "DO_ChamMoveBodyUp" doDownSetpoint= "DO_ChamMoveBodyDown" doUpBrake= "DO_ChamMoveBodyUpAirBrake" doForward= "DO_ChamMoveBodyForward" doBackward= "DO_ChamMoveBodyBackward" doForwardLatch= "DO_ChamMoveBodyBrakerForward" doBackwardLatch= "DO_ChamMoveBodyBrakerBackward" diForwardLatch= "DI_ChamMoveBodyUpLatchFW" diBackwardLatch= "DI_ChamMoveBodyEndLatchBW" diRemote= "DI_ChamLidPushButtonLocal" diLock= "DI_ManualLidUpPB" diUpDownEnable= "DI_ChamMoveBodyUpDownEnableFB" doUpDownEnable= "DO_ChamMoveBodyUpDownEnable" />
</IoChamberMoveBodys>
<IoGasConnectors classType= "Aitex.Core.RT.Device.Devices.IoGasConnector" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoGasConnector id= "GasConnector" module= "" display= "GasConnector" schematicId= "GasConnector" unit= "" aioType= "" diGasConnectorLoosen= "DI_SHGasConnectorLoosen" diGasConnectorTighten= "DI_SHGasConnectorTighten" doGasConnectorLoosen= "DO_SHGasConnectorLoosen" doGasConnectorTighten= "DO_SHGasConnectorTighten" />
</IoGasConnectors>
<IoLids classType= "Aitex.Core.RT.Device.Devices.IoLid" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoLid id= "SHLid" module= "" display= "SH Lid" schematicId= "SHLid" unit= "" aioType= "" diLoosenFaceback= "DI_SHLidLoosen" diTightenFaceback= "DI_SHLidTighten" diClosedFaceback= "DI_SHLidClosed" doLoosenSetpoint= "DO_SHLidLoosen" doTightenSetpoint= "DO_SHLidTighten" />
<IoLid id= "MiddleLid" module= "" display= "Middle Lid" schematicId= "MiddleLid" unit= "" aioType= "" diLoosenFaceback= "DI_MiddleLidLoosen" diTightenFaceback= "DI_MiddleLidTighten" diClosedFaceback= "DI_MiddleLidClosed" doLoosenSetpoint= "DO_MiddleLidLoosen" doTightenSetpoint= "DO_MiddleLidTighten" />
</IoLids>
<IoLidSwings classType= "Aitex.Core.RT.Device.Devices.IoLidSwing" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoLidSwing id= "SHLidSwing" module= "" display= "SH Lid Swing" schematicId= "SHLidSwing" unit= "" aioType= "" diLidLockFaceback= "DI_SHLidSwingLock" diLidUnlockFaceback= "DI_SHLidSwingUnlock" doLidLockSetpoint= "DO_SHLidSwingLock" doLidUnlockSetpoint= "DO_SHLidSwingUnlock" />
<IoLidSwing id= "MiddleLidSwing" module= "" display= "Middle Lid Swing" schematicId= "MiddleLidSwing" unit= "" aioType= "" diLidLockFaceback= "DI_MiddleLidSwingLock" diLidUnlockFaceback= "DI_MiddleLidSwingUnlock" doLidLockSetpoint= "DO_MiddleLidSwingLock" doLidUnlockSetpoint= "DO_MiddleLidSwingUnlock" />
</IoLidSwings>
<IoConfinementRings classType= "Aitex.Core.RT.Device.Devices.IoConfinementRing" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoConfinementRing id= "ConfinementRing" module= "" display= "ConfinementRing" schematicId= "ConfinementRing" unit= "" aioType= "" diRingDownFaceback= "DI_ConfinementRingDown" diRingUpFaceback= "DI_ConfinementRingUp" diRingDone= "DI_ConfinementRingDone" diRingServoOn= "DI_ConfinementRingServoOn" diRingHomed= "DI_ConfinementRingHomed" diRingBusy= "DI_ConfinementRingBusy" diRingServoError= "DI_ConfinementRingServoError" doRingServoOn= "DO_ConfinementRingServoOn" doRingJogUp= "DO_ConfinementRingJogUp" doRingJogDown= "DO_ConfinementRingJogDown" doRingStop= "DO_ConfinementRingStop" doRingTeachUp= "DO_ConfinementRingUpPosTeach" doRingTeachDown= "DO_ConfinementRingDownPosTeach" doRingMoveUp= "DO_ConfinementRingMoveUp" doRingMoveDown= "DO_ConfinementRingMoveDown" aiRingCurPos= "AI_ConfinementRingCurPos" aiRingUpPos= "AI_ConfinementRingUpPos" aiRingDownPos= "AI_ConfinementRingDownPos" aoRingMode= "AO_ConfinementRingMode" aoRingSpeed= "AO_ConfinementRingSpeed" aoRingDistance= "AO_ConfinementRingDistance" doRingServoReset= "DO_ConfinementRingServoReset" aoRingUpPos= "AO_ConfinementRingUpPos" aoRingDownPos= "AO_ConfinementRingDownPos" />
</IoConfinementRings>
<IoHeartBeats classType= "Aitex.Core.RT.Device.Devices.IoHeartBeat" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoHeartBeat id= "HeartBeat" display= "HeartBeat" schematicId= "HeartBeat" aioType= "float" ai= "AI_HeartBeat" ao= "AO_HeartBeat" />
</IoHeartBeats>
<IoInterLocks classType= "Aitex.Core.RT.Device.Devices.IoInterLock" assembly= "MECF.Framework.RT.EquipmentLibrary" >
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<IoInterLock id= "PMInterLock" display= "" schematicId= "" unit= "" doLidOpenRoutineSucceed= "DO_PurgeRoutineSuscessed"
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doLidCloseRoutineSucceed="DO_CleanRoutineSuscessed" doProcessRunning="DO_ProcessRunning" doPreprocessRunning="DO_PreprocessRunning"
doCyclePurgeRoutineRunning="DO_CyclePurgeRoutineRunning" doExchangeMoRoutineRunning="DO_ExchangeMoRoutineRunning"
doLidCloseRoutineRunning="DO_CleanRoutineRunning" doLidOpenRoutineRunning="DO_PurgeRoutineRunning"
doPumpDownRoutineRunning="DO_PumpRoutineRunning" doVentRoutineRunning="DO_VentRoutineRunning"
doPostProcessRunning="DO_PostProcessRunning" diServoDriverFaultSW="DI_ServoDriverFaultSW" diH2PressureSW="DI_H2PressureSW"
doVACTransferAllowed="DO_VACTransferAllowed" doATMTransferAllowed="DO_ATMTransferAllowed" doProcessIdleRunning="DO_ProcessIdleRunning"
doATMIdleRoutineRunning="DO_ATMIdleRoutineRunning" doVACIdleRoutineRunning="DO_VACIdleRoutineRunning" diPSU1Status="DI_PSU1Status"
diPSU2Status="DI_PSU2Status" diPSU3Status="DI_PSU3Status" diSCR1Status="DI_SCR1Status" diSCR2Status="DI_SCR2Status" diSCR3Status="DI_SCR3Status"
doPSU1Enable="DO_PSU1Enable" doPSU2Enable="DO_PSU2Enable" doPSU3Enable="DO_PSU3Enable" doSCR1Enable="DO_SCR1Enable"
doSCR2Enable="DO_SCR2Enable" doSCR3Enable="DO_SCR3Enable" doTCSSupply="DO_TCSFluidInfusion" doTCSSupplementing="DO_TCSSupplementing" diTCSHighLevel1="DI_TCSHighLevel1" diTCSNormalLevel="DI_TCSNormalLevel"
aiTempCtrl1="AI_PSUTC" doReactorATMTransferReady="DO_ReactorATMTransferReady" doReactorVACTransferReady="DO_ReactorVACTransferReady" diPMATMSW="DI_PMATMSW"
aiActualSpeed="AI_ActualSpeed" aiCurPos="AI_ConfinementRingCurPos" aiDownPos="AI_ConfinementRingDownPos" diPSUEnable="DI_PSUEnableFB" diHeaterTempBelow900CSW="DI_HeaterTempLowLimitSW"
doPMASlitDoorClosed="DO_SlitVlvClosed" diChamLidClosed="DI_ChamLidClosed" diConfinementRingDown="DI_ConfinementRingDown"
aiChamPress="AI_ActualPressure" doReactorPressRisingRate="DO_ReactorPressRisingRateFast" doUPSLowBattery="DO_UPSLowBattery"
doChamMiddleFlow2Temp="DO_ChamMiddleFlow2Temp"
doSHFlowTemp="DO_SHFlowTemp"
doChamTopFlowTemp="DO_ChamTopFlowTemp"
doChamMiddleFlow1Temp="DO_ChamMiddleFlow1Temp"
doChamBottomFlowTemp="DO_ChamBottomFlowTemp"
doSpareFlowTemp="DO_SpareFlowTemp"
doPowerRod1FlowTemp="DO_PowerRod1FlowTemp"
doPowerRod2FlowTemp="DO_PowerRod2FlowTemp"
doForelineFlowTemp ="DO_ForelineFlowTemp"
doElectrodeWFlowTemp="DO_ElectrodeWFlowTemp"
doTMPump1FlowTemp="DO_TMPump1FlowTemp"
doTransformerFlowTemp="DO_TransformerFlowTemp"
doTMTopLidTemp="DO_Spare1FlowTemp"
doTMBufferFlowTemp="DO_Spare2FlowTemp"
aiChamMiddleFlow2Temp="AI_ChamMiddleFlow2Temp"
aiSHFlowTemp="AI_SHFlowTemp"
aiChamTopFlowTemp="AI_ChamTopFlowTemp"
aiChamMiddleFlowTemp="AI_ChamMiddleFlow1Temp"
aiChamBottomFlowTemp="AI_ChamBottomFlowTemp"
aiForeline1FlowTemp="AI_Foreline1FlowTemp"
aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp"
aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp"
aiElectrodeWFlowTemp="AI_ElectrodeWFlowTemp"
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aiTMPump1FlowTemp="AI_TMPump1FlowTemp"
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aiTMPump2FlowTemp="AI_Foreline1FlowTemp"
aiTransformerFlowTemp="AI_TransformerFlowTemp"
aiForelineFlowTemp="AI_Foreline2FlowTemp"
aiTMTopLidTemp="AI_Spare1Temp"
aiTMBufferFlowTemp="AI_Spare2Temp"/>
</IoInterLocks>
<PryoTempChecks classType= "MECF.Framework.RT.EquipmentLibrary.Devices.PryoTempCheck" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<PryoTempCheck id= "PryoTempCheck" display= "" schematicId= "" unit= "" scBasePath= "PM.{module}.Heater"
aoPSUMiddleLoopMode="AO_PSUMiddleLoopMode" aoPSUMiddleTargetSP="AO_PSUMiddleTargetSP"/>
</PryoTempChecks>
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</DeviceModelDefine>
