MoS2/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml

<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">

    <IoValve id="V18" display="ArSafetyBypass" schematicId="V18" unit=""   isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_ArSafetyBypass(V18)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V18s" display="ArSafetyBypass" schematicId="V18s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18s)" doOpen="DO_ArSafetyBypass(V18s)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V19" display="ArSafetyBypass" schematicId="V19" unit=""   isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6BypassFB(V19)" doOpen="DO_ArSafetyBypass(V19)" diCloseSensor="" diOpenSensor="" />

    <IoValve id="V20" display="ArSafetyBypass"  schematicId="V20" unit=""   isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)"  doOpen="DO_ArSafetyBypass(V20)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V20s" display="ArSafetyBypass" schematicId="V20s" unit=""  isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20s)" doOpen="DO_ArSafetyBypass(V20s)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V21" display="ArSafetyBypass"  schematicId="V21" unit=""   isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)"  doOpen="DO_ArSafetyBypass(V21)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V21s" display="ArSafetyBypass" schematicId="V21s" unit=""  isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21s)" doOpen="DO_ArSafetyBypass(V21s)" diCloseSensor="" diOpenSensor="" />

    <IoValve id="V22" display="ArSafetyBypass"  schematicId="V22" unit=""   isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvBypassFB(V22)"  doOpen="DO_ArSafetyBypass(V22)" diCloseSensor="" diOpenSensor="" />

    <IoValve id="V23" display="ArSafetyBypass"  schematicId="V23" unit=""   isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)"  doOpen="DO_ArSafetyBypass(V23)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V23s" display="ArSafetyBypass" schematicId="V23s" unit=""  isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23s)" doOpen="DO_ArSafetyBypass(V23s)" diCloseSensor="" diOpenSensor="" />
    
    <IoValve id="V31" display="H2Supply" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2InletCutOffFB(V31)" doOpen="DO_H2Supply(V31)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V32" display="ArSupply" schematicId="V32" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_N2InletCutOffFB(V32)" doOpen="DO_ArSupply(V32)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V33" display="SHH2ArSupply" schematicId="V33" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V33s" display="SHH2ArSupply" schematicId="V33s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />


    <IoValve id="V35" display="H2ArLine1" schematicId="V35" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PushGasSupplyFB(V35)" doOpen="DO_H2ArLine1(V35)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V36" display="H2ArLine2" schematicId="V36" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_RunVentGasSupplyFB(V36)" doOpen="DO_H2ArLine2(V36)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V37" display="N2.Switch" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_N2Switch(V37)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V37s" display="N2.Switch" schematicId="V37s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_N2Switch(V37)" diCloseSensor="" diOpenSensor="" />

    <IoValve id="V39" display="Diluted N2 Run" schematicId="V39" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_DilutedN2Run/Vent(V39)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V39s" display="Diluted N2 Vent" schematicId="V39s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_DilutedN2Run/Vent(V39)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V40" display="High N2 Run" schematicId="V40" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_HighN2Run/Vent(V40)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V40s" display="High N2 Vent" schematicId="V40s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_HighN2Run/Vent(V40)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V41" display="TMA Run" schematicId="V41" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6RunFB(V41)" doOpen="DO_TMARun(V41)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V42" display="TMA Vent" schematicId="V42" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6VentFB(V42)" doOpen="DO_TMAVent(V42)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V43" display="TMARelease" schematicId="V43" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_TMARelease(V43)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V43s" display="TMARelease" schematicId="V43s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_TMARelease(V43)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V45" display="TMABypass" schematicId="V45" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6BypassFB(V45)" doOpen="DO_TMABypass(V45)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V46" display="TMAVac" schematicId="V46" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_TMAVac(V46)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V46s" display="TMAVac" schematicId="V46s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_TMAVac(V46)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V47" display="HCLRun" schematicId="V47" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_PN2Run/Vent(V47)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V47s" display="HCLVent" schematicId="V47s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_PN2Run/Vent(V47)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V48" display="TCSRelease" schematicId="V48" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_TCSRelease(V48)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V48s" display="TCSRelease" schematicId="V48s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_TCSRelease(V48)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V49" display="TCSBypass" schematicId="V49" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2BypassFB(V49)" doOpen="DO_TCSBypass(V49)" diCloseSensor="" diOpenSensor="" />
    
    
    <IoValve id="V50" display="TCSVac" schematicId="V50" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_TCSVac(V50)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V50s" display="TCSVac" schematicId="V50s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_TCSVac(V50)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V51" display="HCLSwitch" schematicId="V51" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_HCLSwitch(V51)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V51s" display="HCLSwitch" schematicId="V51s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_HCLSwitch(V51)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V52" display="SiH4Switch" schematicId="V52" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_SiH4Switch(V52)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V52s" display="SiH4Switch" schematicId="V52s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_SiH4Switch(V52)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V53" display="TCSRun" schematicId="V53" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2RunVentFB" doOpen="DO_TCSRun/Vent(V53)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V53s" display="TCSVent" schematicId="V53s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2RunVentFB" doOpen="DO_TCSRun/Vent(V53)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V54" display="HCLRun" schematicId="V54" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_HCLRun/Vent(V54)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V54s" display="HCLVent" schematicId="V54s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_HCLRun/Vent(V54)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V55" display="SiH4Run" schematicId="V55" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeRunFB(V55)" doOpen="DO_SiH4Run(V55)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V56" display="SiH4Vent" schematicId="V56" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeVentFB(V56)" doOpen="DO_SiH4Vent(V56)" diCloseSensor="" diOpenSensor="" />

    <IoValve id="V58" display="C2H4Switch" schematicId="V58" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_C2H4Switch(V58)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V58s" display="C2H4Switch" schematicId="V58s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_C2H4Switch(V58)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V59" display="C2H4Run" schematicId="V59" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_C2H4Run(V59)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V59s" display="C2H4Run" schematicId="V59s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_C2H4Run(V59)" diCloseSensor="" diOpenSensor="" />
    

    <IoValve id="V66" display="SilaneFinal" schematicId="V66" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHPurgeH2FB(V66)" doOpen="DO_SilaneFinal(V66)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V67" display="PropaneFinal" schematicId="V67" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHPurgeN2FB(V67)" doOpen="DO_PropaneFinal(V67)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V68" display="ChamBodyArPurge" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PMPurgeN2FB(V68)" doOpen="DO_ChamBodyArPurge(V68)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V69" display="ReactorLeakCheck" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ReactorLeakCheckFB(V69)" doOpen="DO_ReactorLeakCheck(V69)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V70" display="TMPressBalance" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMPressBalanceFB(V70)" doOpen="DO_TMPressBalance(V70)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V72" display="GasBoxVentPump" schematicId="V72" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasBoxVentPumpFB(V72)" doOpen="DO_GasBoxVentPump(V72)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V73" display="MOVac" schematicId="V73" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MOVacFB(V73)" doOpen="DO_MOVac(V73)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V74" display="GasboxLeakCheck" schematicId="V74" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasboxLeakCheckFB(V74)" doOpen="DO_GasboxLeakCheck(V74)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V75" display="DORVac" schematicId="V75" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DORVacFB(V75)" doOpen="DO_DORVac(V75)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V76" display="DORRefill" schematicId="V76" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_DORRefillFB(V76)" doOpen="DO_DORRefill(V76)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V87" display="SHPurgeFinal" schematicId="V87" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeFinalFB(V87)" doOpen="DO_SHPurgeFinal(V87)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V88" display="OuterGasFinal" schematicId="V88" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_OuterGasFinalFB(V88)" doOpen="DO_OuterGasFinal(V88)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V89" display="InnerGasFinal" schematicId="V89" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_InnerGasFinalFB(V89)" doOpen="DO_InnerGasFinal(V89)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V90" display="MiddleGasFinal" schematicId="V90" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MiddleGasFinalFB(V90)" doOpen="DO_MiddleGasFinal(V90)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V91" display="OpticPurgeFinal" schematicId="V91" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_OpticPurgeFinalFB(V91)" doOpen="DO_OpticPurgeFinal(V91)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V92" display="GasRingPurgeFinal" schematicId="V92" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasRingPurgeFinalFB(V92)" doOpen="DO_GasRingPurgeFinal(V92)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V93" display="ChamberPurgeFinal" schematicId="V93" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ChamberPurgeFinalFB(V93)" doOpen="DO_ChamberPurgeFinal(V93)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V94" display="RotationUpPurgeFinal" schematicId="V94" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_RotationUpPurgeFinalFB(V94)" doOpen="DO_RotationUpPurgeFinal(V94)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V95" display="ConfinementRingFinal" schematicId="V95" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ConfinementRingFinalFB(V95)" doOpen="DO_ConfinementRingFinal(V95)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V96" display="HeaterWFFinal" schematicId="V96" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HeaterWFFinalFB(V96)" doOpen="DO_HeaterWFFinal(V96)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V97" display="CarryGasFinal" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_CarryGasFinal(V97)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V111" display="OpenLidPurge" schematicId="V111" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_OpenLidPurge" diCloseSensor="" diOpenSensor="" />
    <IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV2-1FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
    <IoValve id="HeatEnable" display="HeatEnable" schematicId="HeatEnable" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PSUEnableFB" doOpen="DO_HeaterEnable" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V99" display="C2H4SwitchHTPurge" schematicId="V99" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_C2H4SwitchHTPurge" doOpen="DO_C2H4SwitchHTPurge" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V99s" display="C2H4SwitchHTPurge" schematicId="V99s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_C2H4SwitchHTPurge" doOpen="DO_C2H4SwitchHTPurge" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V25" display="GasBoxVentBypass" schematicId="V99" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_GasBoxVentBypass(V25)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V100" display="TMASource" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMASourceFB(V100)" doOpen="DO_TMASource(V100)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V103" display="NdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_NdopeDiluteVentFB(V103)" doOpen="DO_NdopeDiluteVent(V103)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V103s" display="NdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_NdopeDiluteVentFB(V103)" doOpen="DO_NdopeDiluteVent(V103)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V105" display="PdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PdopeDiluteVentFB(V105)" doOpen="DO_PdopeDiluteVent(V105)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V105s" display="PdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PdopeDiluteVentFB(V105)" doOpen="DO_PdopeDiluteVent(V105)" diCloseSensor="" diOpenSensor="" />
  </IoValves>
  
</DeviceModelDefine>