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MoS2/App/SicRT/Equipments/AutoTransfer.cs

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2026-06-15 10:56:30 +08:00
using Aitex.Core.Common;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Key;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Sorter.Common;
using Kxware.Common;
using MECF.Framework.Common.DBCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Gem;
using MECF.Framework.Common.Jobs;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using OpenSEMI.Ctrlib.Controls;
using SicRT.Equipments.Schedulers;
using SicRT.Modules.Schedulers;
using SicRT.Scheduler;
using System;
using System.Collections.Generic;
using System.Linq;
namespace SicRT.Modules
{
public partial class AutoTransfer : SchedulerModuleFactory
{
private List<ControlJobInfo> _controlJobList = new();
private List<ProcessJobInfo> _processJobList = new();
private int _maxTrayCount = 4; //可以同时运行的石墨盘总数
private const string LogSource = "Scheduler";
private SchedulerDBCallback _dbCallback = new();
private bool _isCycleMode;
private bool _isATMMode;
private int _cycleSetPoint = 0;
private int _cycledCount = 0;
private int _cycledWafer = 0;
private string _curRecipeName = "";
private string _curSequenceName = "";
private bool _isModuleErrorPrevious;
private bool[] _isPMErrorPrevious = new bool[2];
private double _timeBuffer1 { get; set; }
private double _timeBuffer2 { get; set; }
private double _timeBuffer3 { get; set; }
private double _timeLoad { get; set; }
private const int _bufferFloors = 1;
private Dictionary<string, DateTime> _loadWaferInfo = new();
private Dictionary<string, DateTime> _bufferWaferInfo = new();
private Queue<Action> tmRobotActions = new() { };
private R_TRIG _updateAutoJobLocation = new(); //需要向数据库更新Wafer位置
public AutoTransfer()
{
DATA.Subscribe("Scheduler.IsCycleMode", () => _isCycleMode);
DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);
DATA.Subscribe("Scheduler.RecipeName", () => _curRecipeName);
DATA.Subscribe("Scheduler.SequenceName", () => _curSequenceName);
DATA.Subscribe("Scheduler.TimeBuffer1", () => _timeBuffer1);
DATA.Subscribe("Scheduler.TimeBuffer2", () => _timeBuffer2);
DATA.Subscribe("Scheduler.TimeBuffer3", () => _timeBuffer3);
DATA.Subscribe("Scheduler.TimeLoad", () => _timeLoad);
DATA.Subscribe("LoadLock.LocalJobName", () =>
{
var jb = _controlJobList.Find(x => x.Module == "LoadLock");
if (jb != null)
return jb.Name;
return "";
});
DATA.Subscribe("LoadLock.LocalJobStatus", () =>
{
var jb = _controlJobList.Find(x => x.Module == "LoadLock");
if (jb != null)
return jb.State.ToString();
return "";
});
OP.Subscribe($"{ModuleName.TM}.ResetTask", (string cmd, object[] args) =>
{
_tmRobot.ResetTask();
return true;
});
OP.Subscribe($"{ModuleName.EFEM}.ResetTask", (string cmd, object[] args) =>
{
_waferRobot.ResetTask();
_trayRobot.ResetTask();
return true;
});
OP.Subscribe($"{ModuleName.WaferRobot}.ResetTask", (string cmd, object[] args) =>
{
_waferRobot.ResetTask();
return true;
});
OP.Subscribe($"{ModuleName.TrayRobot}.ResetTask", (string cmd, object[] args) =>
{
_tmRobot.ResetTask();
return true;
});
tmRobotActions.Enqueue(MonitorTmRobotLoadPlaceTask);
tmRobotActions.Enqueue(MonitorTmRobotLoadPickTask);
tmRobotActions.Enqueue(MonitorTmRobotPMPlaceTask);
tmRobotActions.Enqueue(MonitorTmRobotPMPickTask);
tmRobotActions.Enqueue(MonitorTmRobotBufferPlaceTask);
tmRobotActions.Enqueue(MonitorTmRobotBufferPickTask);
}
public bool HasJobRunning
{
get { return _controlJobList.Count > 0; }
}
public void Clear()
{
_tmRobot.ResetTask();
foreach (var pm in _lstPms)
{
pm.ResetTask();
}
_load.ResetTask();
_buffer.ResetTask();
_controlJobList.Clear();
_processJobList.Clear();
_loadWaferInfo.Clear();
}
public void ResetTask()
{
if (!_load.IsOnline)
{
_load.ResetTask();
}
if (!_buffer.IsOnline)
{
_buffer.ResetTask();
}
if (!_tmRobot.IsOnline)
{
_tmRobot.ResetTask();
}
foreach (var pm in _lstPms)
{
if (!pm.IsOnline)
{
pm.ResetTask();
}
}
}
#region Job Management
public bool CreateJob(Dictionary<string, object> param)
{
var reason = "";
var slotSequence = (string[])param["SlotSequence"];
var jobId = (string)param["JobId"];
var module = (string)param["Module"];
var lotId = (string)param["LotId"];
////检查Load腔Lock是否锁定
//if(!_load.CheckLocked())
//{
// EV.PostWarningLog(LogSource, $"The Load is Unlocked,do not start");
// return false;
//}
//检查所有Module里Tray的数量
if(GetCurrentTrayCount() >= _maxTrayCount)
{
EV.PostWarningLog(LogSource, $"The machine has more than {_maxTrayCount} Tray");
return false;
}
if (slotSequence.Length != 1)
{
reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be 1";
EV.PostWarningLog(LogSource, reason);
return false;
}
//拿到Recipe和ModuleName
var recipeName = "";
var pmModule = ModuleName.System;
var seq = SequenceInfoHelper.GetInfo(slotSequence[0]);
for (var i = 0; i < seq.Steps.Count; i++)
{
var stepInfo = seq.Steps[i];
foreach (var m in stepInfo.StepModules)
{
if (ModuleHelper.IsPm(m))
{
recipeName = seq.Steps[i].RecipeName;
pmModule = m;
}
}
}
//每个PM腔不能超过2个对应Wafer
if(pmModule != ModuleName.System)
{
if (GetRunWaferCount(pmModule) >= _maxTrayCount/2)
{
EV.PostWarningLog(LogSource, $"Creating the job failed . There are already {_maxTrayCount / 2} job of the same pm in the system.");
return false;
}
}
if (CheckModuleHaveWaferWithNoJob(out reason))
{
EV.PostWarningLog(LogSource, $"{reason}");
return false;
}
if (!ValidateSequence(slotSequence, out reason))
{
EV.PostWarningLog(LogSource, $"{reason}");
return false;
}
if (string.IsNullOrEmpty(jobId))
{
jobId = "CJ_Local_Load_" + DateTime.Now.ToString("yyyy-MM-dd HH:mm:ss");
}
if (!string.IsNullOrEmpty(lotId))
{
if (_controlJobList.Exists(x => x.LotName == lotId))
{
reason = $"LotID : {lotId} already created";
EV.PostWarningLog(LogSource, reason);
return false;
}
}
var cj = new ControlJobInfo();
cj.Name = jobId;
cj.Module = module;
cj.LotName = lotId;
cj.LotInnerId = Guid.NewGuid();
cj.LotWafers = new List<WaferInfoRt>();
cj.SetState(EnumControlJobState.WaitingForStart);
List<string> sequenceNameList = new List<string>();
string WaferAssociationInfo = $"WaferAssociationInfo({module}):";
for (int i = 0; i < 1; i++)
{
//检查是否设置Sequence
string sequenceName = slotSequence[i];
if (string.IsNullOrEmpty(sequenceName))
{
reason = $"sequence name is empty";
EV.PostWarningLog(LogSource, reason);
return false;
}
//检查是否有Normal Wafer
if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
{
reason = $"{module} has no normal wafer";
EV.PostWarningLog(LogSource, reason);
return false;
}
WaferInfoRt wafer = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
if (wafer.ProcessState != WaferProcessStatus.Idle)
{
reason = $"specifies wafer: {module} slot {i + 1} process state is not idle";
EV.PostWarningLog(LogSource, reason);
return false;
}
if (wafer.ProcessJob != null)
{
reason = $"{module} wafer has processJob";
EV.PostWarningLog(LogSource, reason);
return false;
}
WaferAssociationInfo = WaferAssociationInfo + string.Format(" slot{0} -- {1};", i + 1, slotSequence[i]);
wafer.NextSequenceStep = 0;
wafer.PPID = sequenceName;
wafer.LotId = lotId;
cj.LotWafers.Add(wafer);
_isATMMode = SC.GetValue<bool>("System.IsATMMode");
_isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
//没有包含sequenceName,需新建
if (!sequenceNameList.Exists(s => s == sequenceName))
{
sequenceNameList.Add(sequenceName);
ProcessJobInfo pj = new ProcessJobInfo();
pj.Name = jobId + "_" + (i + 1);
pj.ControlJobName = cj.Name;
pj.Sequence = SequenceInfoHelper.GetInfo(sequenceName);
pj.SetState(EnumProcessJobState.Queued);
pj.SlotWafers = [Tuple.Create(ModuleHelper.Converter(module), i)];
//不是CycleMode模式，则CycleCount设为1
pj.CycleCount = _isATMMode && _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 1;
pj.CycleTime = 0;
//检查Sequence对应的PM腔状态
if (!CheckPMState(sequenceName))
{
return false;
}
wafer.ProcessJob = pj;
_processJobList.Add(pj);
cj.ProcessJobNameList.Add(pj.Name);
}
//已包含sequenceName
else
{
ProcessJobInfo pj = _processJobList.Find(p => p.Sequence.Name == sequenceName);
wafer.ProcessJob = pj;
pj.SlotWafers.Add(Tuple.Create(ModuleHelper.Converter(module), i));
}
}
_controlJobList.Add(cj);
int totalWafer = 0;
foreach (string pjName in cj.ProcessJobNameList)
{
ProcessJobInfo tempPJ = _processJobList.First(p => p.Name == pjName);
foreach (var pjSlotWafer in tempPJ.SlotWafers)
{
var wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
WaferDataRecorder.SetCjInfo(wafer.WaferInnerID.ToString(), cj.InnerId.ToString());
WaferDataRecorder.SetWaferSequence(wafer.WaferInnerID.ToString(), tempPJ.Sequence.Name);
WaferDataRecorder.SetWaferLotId(wafer.WaferInnerID.ToString(), jobId);
WaferManager.Instance.UpdateWaferLotId(pjSlotWafer.Item1, pjSlotWafer.Item2, jobId);
totalWafer++;
}
}
CarrierManager.Instance.DeleteCarrier(cj.Module);
CarrierManager.Instance.CreateCarrier(cj.Module);
CarrierManager.Instance.UpdateCarrierId(cj.Module, $"{cj.Module} {DateTime.Now}");
//此carrier为null
CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
JobDataRecorder.StartCJ(cj.InnerId.ToString(), "", cj.Name, cj.Module, cj.Module, totalWafer);
EV.PostInfoLog(LogSource, WaferAssociationInfo);
//保存信息
var waferInfo = WaferManager.Instance.GetWafer(ModuleName.LoadLock, 0);
if (waferInfo != null)
{
waferInfo.LotId = cj.LotName;
if (recipeName.IndexOf(@"\") > 0)
{
recipeName = recipeName.Substring(recipeName.LastIndexOf(@"\") + 1);
}
AutoJobRecorder.Add(waferInfo.WaferID.ToString(), recipeName, cj.LotName, ModuleName.LoadLock.ToString(), GetWaferStatue(waferInfo), cj.Name);
}
return true;
}
public void StartJob(string jobName)
{
_maxTrayCount = _lstPms.Count * 2;
var cj = _controlJobList.Find(x => x.Name == jobName);
if (cj == null)
{
EV.PostWarningLog(LogSource, $"start job rejected, not found job with id {jobName}");
return;
}
if (cj.State == EnumControlJobState.WaitingForStart)
{
cj.BeginTime = DateTime.Now;
cj.LotInnerId = Guid.NewGuid();
//_dbCallback.LotCreated(cj);
foreach (var pjName in cj.ProcessJobNameList)
{
var pj = _processJobList.Find(x => x.Name == pjName);
if (pj == null)
{
LOG.Error($"Not find pj named {pjName} in {cj.Name}");
continue;
}
if (pj.State == EnumProcessJobState.Queued)
{
ActiveProcessJob(pj);
}
}
cj.SetState(EnumControlJobState.Executing);
string squenceID = cj.LotWafers != null ? cj.LotWafers[0].PPID : string.Empty;
//补全路径
squenceID = $"Sequence\\{squenceID}.seq";
GemManager.Instance.Equipment?.TriggerEvent("JobStart", new string[] { "LotID", "SequenceID" }, new object[] { cj.LotName, squenceID });
}
}
private string GetWaferStatue(WaferInfoRt wafer)
{
if (wafer.ProcessState == WaferProcessStatus.InProcess)
{
return "InProcess";
}
else if (wafer.ProcessState == WaferProcessStatus.Completed)
{
return "Completed";
}
else if (wafer.ProcessState == WaferProcessStatus.Abort)
{
return "Aborted";
}
else
{
return "Idle";
}
}
private bool ValidateSequence(string[] seqs, out string reason)
{
reason = string.Empty;
//bool isAllSequenceNull = true;
//for (int i = 0; i < seqs.Length; i++)
//{
// if (string.IsNullOrEmpty(seqs[i]))
// continue;
// var sequence = SequenceInfoHelper.GetInfo(seqs[i]);
// if ((sequence == null || sequence.Steps == null || sequence.Steps.Count == 0) && !string.IsNullOrEmpty(sequence.Name))
// {
// reason = $"Invalid sequence {seqs[i]}";
// return false;
// }
// isAllSequenceNull = false;
// if (sequence.Steps != null)
// {
// int currentIndex = 0;
// if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.Aligner)
// {
// reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Aligner";
// return false;
// }
// else
// {
// if (sequence.Steps[currentIndex].AlignAngle < 0 || sequence.Steps[currentIndex].AlignAngle > 360)
// {
// reason = $"Invalid sequence {seqs[i]},{currentIndex + 1}st step Aligner angle parameter is not valid";
// return false;
// }
// }
// currentIndex++;
// if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.Load)
// {
// reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Load";
// return false;
// }
// currentIndex++;
// if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.Buffer)
// {
// reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Buffer";
// return false;
// }
// else
// {
// //if (!sequence.Steps[currentIndex].StepParameter.ContainsKey("SlotSelection")
// // || string.IsNullOrEmpty(sequence.Steps[currentIndex].StepParameter["SlotSelection"].ToString())
// // || sequence.Steps[currentIndex].StepParameter["SlotSelection"].ToString().Contains("3"))
// //{
// // reason = $"Invalid sequence {seqs[i]},{currentIndex + 1}st step Buffer SlotSelection parameter is not valid";
// // return false;
// //}
// if (!sequence.Steps[currentIndex].StepParameter.ContainsKey("BufferType") || !sequence.Steps[currentIndex].StepParameter["BufferType"].ToString().Contains("Heat"))
// {
// reason = $"Invalid sequence {seqs[i]},{currentIndex + 1}st step Buffer BufferType parameter is not valid";
// return false;
// }
// }
// currentIndex++;
// if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules.Any(pm => !ModuleHelper.IsPm(pm)))
// {
// reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be PM";
// return false;
// }
// //if (sequence.Steps.Count == 7)
// //{
// // currentIndex++;
// // if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.Buffer)
// // {
// // reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Buffer";
// // return false;
// // }
// // else
// // {
// // if (!sequence.Steps[currentIndex].StepParameter.ContainsKey("SlotSelection")
// // || sequence.Steps[currentIndex].StepParameter["SlotSelection"].ToString() != "3")
// // {
// // reason = $"Invalid sequence {seqs[i]},{currentIndex + 1}st step Buffer SlotSelection parameter is not valid";
// // return false;
// // }
// // if (!sequence.Steps[currentIndex].StepParameter.ContainsKey("BufferType") || !sequence.Steps[currentIndex].StepParameter["BufferType"].ToString().Contains("Cooling"))
// // {
// // reason = $"Invalid sequence {seqs[i]},{currentIndex + 1}st step Buffer BufferType parameter is not valid";
// // return false;
// // }
// // }
// //}
// currentIndex++;
// if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.UnLoad)
// {
// reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Unload";
// return false;
// }
// currentIndex++;
// if (sequence.Steps[currentIndex] == null || sequence.Steps[currentIndex].StepModules.Count <= 0 || sequence.Steps[currentIndex].StepModules[0] != ModuleName.Aligner)
// {
// reason = $"Invalid sequence {seqs[i]}, {currentIndex + 1}st step should be Aligner";
// return false;
// }
// else
// {
// if (sequence.Steps[0].AlignAngle < 0 || sequence.Steps[0].AlignAngle > 360)
// {
// reason = $"Invalid sequence {seqs[i]}, Aligner angle parameter is not valid";
// return false;
// }
// }
// }
//}
//if (isAllSequenceNull)
//{
// reason = $"Invalid sequence, sequence are all null ";
// return false;
//}
return true;
}
internal void StopJob(string jobName)
{
//ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
//if (cj == null)
//{
// EV.PostWarningLog(LogSource, $"stop job rejected, not found job with id {jobName}");
// return;
//}
foreach (var cj in _controlJobList)
{
foreach (var pj in _processJobList)
{
if (pj.ControlJobName == cj.Name)
{
pj.SetState(EnumProcessJobState.Stopping);
}
}
if (_cycleSetPoint > 0)
{
_cycleSetPoint = _cycledCount;
}
}
}
public void Abort()
{
try
{
var wafer = WaferManager.Instance.GetWafer(ModuleName.PM1, 0);
if (wafer != null && !string.IsNullOrEmpty(wafer.WaferID))
{
AutoJobRecorder.UpdatePosition(wafer.WaferID.ToString(), ModuleName.PM1.ToString(), "Aborted");
}
var wafer1 = WaferManager.Instance.GetWafer(ModuleName.TMRobot, 0);
if (wafer1 != null && !string.IsNullOrEmpty(wafer1.WaferID))
{
AutoJobRecorder.UpdatePosition(wafer1.WaferID.ToString(), ModuleName.TM.ToString(), "Aborted");
}
var wafer2 = WaferManager.Instance.GetWafer(ModuleName.Buffer, 0);
if (wafer2 != null && !string.IsNullOrEmpty(wafer2.WaferID))
{
AutoJobRecorder.UpdatePosition(wafer2.WaferID.ToString(), ModuleName.Buffer.ToString(), "Aborted");
}
var wafer3 = WaferManager.Instance.GetWafer(ModuleName.LoadLock, 0);
if (wafer3 != null && !string.IsNullOrEmpty(wafer3.WaferID))
{
AutoJobRecorder.UpdatePosition(wafer3.WaferID.ToString(), ModuleName.LoadLock.ToString(), "Aborted");
}
var cjList = _controlJobList.FindAll(c => c.State == EnumControlJobState.Executing);
if (cjList != null)
{
foreach (var cj in cjList)
{
string squenceID = cj.LotWafers != null ? cj.LotWafers[0].PPID : string.Empty;
//补全路径
squenceID = $"Sequence\\{squenceID}.seq";
GemManager.Instance.Equipment?.TriggerEvent("JobAbort", new string[] { "LotID", "SequenceID" }, new object[] { cj.LotName, squenceID });
}
}
}
catch (Exception ex)
{
LOG.Error(ex.Message, ex);
}
}
internal void AbortJob(string jobName)
{
var cj = _controlJobList.Find(x => x.Name == jobName);
if (cj == null)
{
EV.PostWarningLog(LogSource, $"abort job rejected, not found job with id {jobName}");
return;
}
var unprocessed_cj = 0;
var aborted_cj = 0;
var pjAbortList = new List<ProcessJobInfo>();
foreach (var pj in _processJobList)
{
if (pj.ControlJobName == cj.Name)
{
pj.SetState(EnumProcessJobState.Aborting);
pjAbortList.Add(pj);
var unprocessed = 0;
var aborted = 0;
var wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
foreach (var waferInfo in wafers)
{
waferInfo.ProcessJob = null;
waferInfo.NextSequenceStep = 0;
if (waferInfo.ProcessState != WaferProcessStatus.Completed)
{
unprocessed++;
unprocessed_cj++;
}
}
JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
}
}
foreach (var pj in pjAbortList)
{
_processJobList.Remove(pj);
}
_controlJobList.Remove(cj);
_dbCallback.LotFinished(cj);
JobDataRecorder.EndCJ(cj.InnerId.ToString(), aborted_cj, unprocessed_cj);
}
public void AbortSingleJob(string jobName, string waferID)
{
var cj = _controlJobList.Find(x => x.Name.ToString() == jobName);
if (cj == null)
{
EV.PostWarningLog(LogSource, $"abort job rejected, not found job with id {jobName}");
return;
}
var pjAbortList = new List<ProcessJobInfo>();
foreach (var pj in _processJobList)
{
if (pj.ControlJobName == cj.Name)
{
var wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
foreach (var waferInfo in wafers)
{
SkipWaferProcessStep(waferInfo);
waferInfo.WaferStatus = WaferStatus.Aborted;
waferInfo.ProcessState = WaferProcessStatus.Abort;
AutoJobRecorder.UpdateStatus(waferInfo.WaferID.ToString(),"Aborted");
}
}
}
}
public void ResumeJob(string jobName)
{
//ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
//if (cj == null)
//{
// EV.PostWarningLog(LogSource, $"resume job rejected, not found job with id {jobName}");
// return;
//}
foreach (var cj in _controlJobList)
{
if (cj.State == EnumControlJobState.Paused)
{
cj.SetState(EnumControlJobState.Executing);
}
}
}
internal void PauseJob(string jobName)
{
//ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
//if (cj == null)
//{
// EV.PostWarningLog(LogSource, $"pause job rejected, not found job with id {jobName}");
// return;
//}
foreach (var cj in _controlJobList)
{
if (cj.State == EnumControlJobState.Executing)
{
cj.SetState(EnumControlJobState.Paused);
}
}
}
internal bool CheckPMState(string sequence)
{
var seqInfo = SequenceInfoHelper.GetInfo(sequence);
if (seqInfo.Name != "")
{
foreach (var step in seqInfo.Steps)
{
foreach (var moduleName in step.StepModules)
{
if (ModuleHelper.IsPm(moduleName))
{
var module = _lstPms.Find(x => x.Module == moduleName);
if (module != null)
{
if (module.IsError)
{
EV.PostWarningLog("Scheduler", $"{moduleName} is not be error");
return false;
}
if (!module.IsOnline)
{
EV.PostWarningLog("Scheduler", $"{moduleName} is not be Online");
return false;
}
if (!module.IsLineHeaterEnable)
{
EV.PostWarningLog("Scheduler", $"{moduleName} LineHeater is not be Open");
return false;
}
//if (module.IsService)
//{
// EV.PostWarningLog("Scheduler", $"can not start job, {moduleName} is Service Mode");
// return false;
//}
}
else
{
EV.PostWarningLog("Scheduler", "Sequence PM can not be null!");
return false;
}
}
}
}
}
else
{
EV.PostWarningLog("Scheduler", "Sequence can not be null!");
return false;
}
return true;
}
#endregion
/// <summary>
/// Start Auto Transfer
/// </summary>
/// <param name="objs"></param>
/// <returns></returns>
public Result CheckAutoMode(params object[] objs)
{
if (!_tmRobot.IsOnline || _tmRobot.IsError)
{
EV.PostWarningLog("Scheduler", "can not change to auto mode, TM robot should be online and no error");
return Result.FAIL;
}
return Result.RUN;
}
public Result Monitor()
{
MonitorModuleTasks();
MonitorAutoJobStatus();
MonitorModuleError();
MonitorJobTasks();
return Result.RUN;
}
#region Job task
public Result MonitorJobTasks()
{
UpdateProcessJobStatus();
UpdateControlJobStatus();
return Result.RUN;
}
/// <summary>
/// 检查PJ中的Wafer信息是否被清空。
/// <para>如果被清空，则说明中间过程中Wafer被人工删除，此时返回true，通知相关Monitor可以改PJ。</para>
/// </summary>
/// <param name="pj"></param>
/// <returns></returns>
protected bool CheckAllWaferDeleted(ProcessJobInfo pj)
{
var wi = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
return wi == null || wi.Length <= 0;
}
protected bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
{
for (var i = 0; i < pj.SlotWafers.Count; ++i)
{
WaferInfoRt wafer = WaferManager.Instance.GetWafer(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2);
if (wafer.IsWaferEmpty)
return false;
if (checkAllProcessed && CheckWaferNeedProcess(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2))
return false;
if (wafer.ProcessJob == null || wafer.ProcessJob.InnerId != pj.InnerId)
{
return false;
}
}
return true;
}
protected bool CheckAllDummyWaferReturned()
{
foreach (var schedulerPm in _lstPms)
{
if (WaferManager.Instance.CheckWaferIsDummy(schedulerPm.Module, 0))
return false;
}
if (WaferManager.Instance.CheckWaferIsDummy(_tmRobot.Module, 0))
return false;
if (WaferManager.Instance.CheckWaferIsDummy(_tmRobot.Module, 1))
return false;
return true;
}
protected bool CheckAllPmCleaned(ProcessJobInfo pj)
{
foreach (var schedulerPm in _lstPms)
{
if (GetModule(schedulerPm.Module).CheckNeedRunClean(out _, out _))
{
foreach (var sequenceStepInfo in pj.Sequence.Steps)
{
if (sequenceStepInfo.StepModules.Contains(schedulerPm.Module))
return false;
}
}
}
return true;
}
private void UpdateProcessJobStatus()
{
foreach (var pj in _processJobList)
{
if (pj.State == EnumProcessJobState.Processing)
{
if (CheckAllWaferReturned(pj, true))
{
if (CheckWaferSequenceStepDone(ModuleName.LoadLock, 0))
{
pj.CycleTime++;
if (pj.CycleTime < pj.CycleCount)
{
//重新设置wafer
for (int i = 0; i < pj.SlotWafers.Count; ++i)
{
var wafer = GetModule(pj.SlotWafers[i].Item1).GetWaferInfo(pj.SlotWafers[i].Item2);
wafer.NextSequenceStep = 0;
wafer.WaferStatus = WaferStatus.Normal;
wafer.ProcessState = WaferProcessStatus.Idle;
}
}
else
{
_load.SetJobStatue();
pj.SetState(EnumProcessJobState.ProcessingComplete);
JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
AutoJobRecorder.EndJob(WaferManager.Instance.GetWafer(ModuleName.LoadLock, 0).WaferID.ToString());
}
}
}
if (CheckAllWaferDeleted(pj))
{
_load.SetJobStatue();
pj.SetState(EnumProcessJobState.Complete);
JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
AutoJobRecorder.EndJob(WaferManager.Instance.GetWafer(ModuleName.LoadLock, 0).WaferID.ToString());
}
}
else if (pj.State == EnumProcessJobState.Stopping)
{
if (CheckAllWaferReturned(pj, false))
{
if (CheckWaferSequenceStepDone(ModuleName.LoadLock, 0))
{
_load.SetJobStatue();
pj.SetState(EnumProcessJobState.Complete);
JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
AutoJobRecorder.EndJob(WaferManager.Instance.GetWafer(ModuleName.LoadLock, 0).WaferID.ToString());
}
}
}
}
}
private void UpdateControlJobStatus()
{
try
{
if (_controlJobList.Count == 0)
{
return;
}
foreach (var cj in _controlJobList)
{
if (cj.State == EnumControlJobState.Executing)
{
bool allPjCompleted = true;
foreach (var pjName in cj.ProcessJobNameList)
{
var pj = _processJobList.Find(x => x.Name == pjName);
if (pj != null)
{
if (pj.State != EnumProcessJobState.ProcessingComplete && pj.State != EnumProcessJobState.Complete)
{
allPjCompleted = false;
break;
}
}
}
if (allPjCompleted)
{
foreach (var pjName in cj.ProcessJobNameList)
{
var pj = _processJobList.Find(x => x.Name == pjName);
if (pj != null)
{
_processJobList.Remove(pj);
}
}
var wafer = cj.LotWafers[0];
if(wafer != null)
{
if(wafer.WaferStatus == WaferStatus.Aborted)
{
cj.SetState(EnumControlJobState.Aborted);
}
else
{
cj.SetState(EnumControlJobState.Completed);
}
AutoJobRecorder.UpdatePosition(wafer.WaferID.ToString(), ModuleName.LoadLock.ToString(), cj.State.ToString());
JobDataRecorder.EndCJ(cj.InnerId.ToString(), 0, 0);
_dbCallback.LotFinished(cj);
}
}
}
}
for (int i = 0; i < _controlJobList.Count; i++)
{
if (_controlJobList[i].State == EnumControlJobState.Completed || _controlJobList[i].State == EnumControlJobState.Aborted)
{
_controlJobList.RemoveAt(i);
}
}
}
catch (Exception ex)
{
LOG.Error(ex.Message,ex);
}
}
public void MonitorAutoJobStatus()
{
try
{
_updateAutoJobLocation.CLK = _tmRobot.IsAvailable;
if (_updateAutoJobLocation.Q)
{
WaferInfoRt wafer = WaferManager.Instance.GetWafer(ModuleName.PM1, 0);
if (wafer != null && !string.IsNullOrEmpty(wafer.WaferID))
{
AutoJobRecorder.UpdateWaferPosition(wafer.WaferID.ToString(), ModuleName.PM1.ToString());
}
WaferInfoRt wafer1 = WaferManager.Instance.GetWafer(ModuleName.TMRobot, 0);
if (wafer1 != null && !string.IsNullOrEmpty(wafer1.WaferID))
{
AutoJobRecorder.UpdateWaferPosition(wafer1.WaferID.ToString(), ModuleName.TM.ToString());
}
WaferInfoRt wafer2 = WaferManager.Instance.GetWafer(ModuleName.Buffer, 0);
if (wafer2 != null && !string.IsNullOrEmpty(wafer2.WaferID))
{
AutoJobRecorder.UpdateWaferPosition(wafer2.WaferID.ToString(), ModuleName.Buffer.ToString());
}
WaferInfoRt wafer3 = WaferManager.Instance.GetWafer(ModuleName.LoadLock, 0);
if (wafer3 != null && !string.IsNullOrEmpty(wafer3.WaferID))
{
AutoJobRecorder.UpdateWaferPosition(wafer3.WaferID.ToString(), ModuleName.LoadLock.ToString());
}
}
}
catch (Exception ex)
{
LOG.Error(ex.Message, ex);
}
}
public bool CheckAllJobDone()
{
//条件满足状态由AutoRunning切换到AutoIdle状态
if (_load.IsAvailable && _tmRobot.IsAvailable && _tmRobot.NoWafer(0) && _tmRobot.NoTray(0) &&
_buffer.NoWafer(0) && _buffer.NoTray(0) && _buffer.NoWafer(1) && _buffer.NoTray(1) && _buffer.NoWafer(2) && _buffer.NoTray(2) &&
_pm1.NoWafer(0) && _pm1.NoTray(0) && _pm2.NoWafer(0) && _pm2.NoTray(0) && !_controlJobList.Exists(c => c.State == EnumControlJobState.Executing))
{
return true;
}
return false;
}
private bool ActiveProcessJob(ProcessJobInfo pj)
{
foreach (var pjSlotWafer in pj.SlotWafers)
{
WaferInfoRt wafer = GetModule(pjSlotWafer.Item1).GetWaferInfo(pjSlotWafer.Item2);
wafer.ProcessJob = pj;
wafer.NextSequenceStep = 0;
WaferDataRecorder.SetPjInfo(wafer.WaferInnerID.ToString(), pj.InnerId.ToString());
}
var cj = _controlJobList.Find(x => x.Name == pj.ControlJobName);
var carrier = CarrierManager.Instance.GetCarrier(cj.Module);
JobDataRecorder.StartPJ(pj.InnerId.ToString(), null, cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
pj.SetState(EnumProcessJobState.Processing);
return true;
}
#endregion
#region Module task
public Result MonitorModuleTasks()
{
MonitorPMTask();
MonitorBufferTask();
MonitorTmRobotTask();
MonitorLoadTask();
return Result.RUN;
}
private void MonitorBufferTask()
{
if (!_buffer.IsAvailable)
{
return;
}
for (var i = 0; i < _bufferFloors; i++)
{
var canExcute = _buffer.HasWafer(i) && _buffer.CheckWaferNextStepIsThis(_buffer.Module, i);
if (canExcute)
{
WaferInfoRt bufferWafer = _buffer.GetWaferInfo(i);
if(i == 2 || i ==1)
{
bufferWafer.NextSequenceStep++;
continue;
}
var bufferSetValue = 0;
if (!GetWaferSequenceNextValue(ModuleName.Buffer, i, "Type", out var strBufferType))
{
continue;
}
if (!GetWaferSequenceNextValue(ModuleName.Buffer, i, "SetValue", out var strBufferSetValue))
{
continue;
}
if (!Int32.TryParse(strBufferSetValue, out bufferSetValue))
{
continue;
}
//分别判断冷却和加热方式温度是否达到
if (strBufferType == "HeatByTemp")
{
if (_bufferWaferInfo.ContainsKey(bufferWafer.WaferInnerID.ToString()))
{
var dtStartTime = _bufferWaferInfo[bufferWafer.WaferInnerID.ToString()];
var pastTime = (DateTime.Now - dtStartTime).TotalSeconds;
//选择By温度5秒后再判断温度
if (pastTime > 5)
{
if (_buffer.GetTemperature() >= bufferSetValue)
bufferWafer.NextSequenceStep++;
_bufferWaferInfo.Remove(bufferWafer.WaferInnerID.ToString());
}
}
else
{
_bufferWaferInfo.Add(bufferWafer.WaferInnerID.ToString(), DateTime.Now);
}
}
else if (strBufferType == "HeatByTime")
{
if (_bufferWaferInfo.ContainsKey(bufferWafer.WaferInnerID.ToString()))
{
var dtStartTime = _bufferWaferInfo[bufferWafer.WaferInnerID.ToString()];
var pastTime = (DateTime.Now - dtStartTime).TotalSeconds;
if (i == 0)
{
_timeBuffer1 = pastTime > bufferSetValue ? 0 : (bufferSetValue - pastTime);
}
else if (i == 1)
{
_timeBuffer2 = pastTime > bufferSetValue ? 0 : (bufferSetValue - pastTime);
}
else if (i == 2)
{
_timeBuffer3 = pastTime > bufferSetValue ? 0 : (bufferSetValue - pastTime);
}
if (pastTime > bufferSetValue)
{
bufferWafer.NextSequenceStep++;
_bufferWaferInfo.Remove(bufferWafer.WaferInnerID.ToString());
}
}
else
{
_bufferWaferInfo.Add(bufferWafer.WaferInnerID.ToString(), DateTime.Now);
}
}
else if (strBufferType == "CoolingByTime")
{
if (_bufferWaferInfo.ContainsKey(bufferWafer.WaferInnerID.ToString()))
{
var dtStartTime = _bufferWaferInfo[bufferWafer.WaferInnerID.ToString()];
var pastTime = (DateTime.Now - dtStartTime).TotalSeconds;
if (i == 0)
{
_timeBuffer1 = pastTime > bufferSetValue ? 0 : (bufferSetValue - pastTime);
}
else if (i == 1)
{
_timeBuffer2 = pastTime > bufferSetValue ? 0 : (bufferSetValue - pastTime);
}
else if (i == 2)
{
_timeBuffer3 = pastTime > bufferSetValue ? 0 : (bufferSetValue - pastTime);
}
if (pastTime > bufferSetValue)
{
bufferWafer.NextSequenceStep++;
_bufferWaferInfo.Remove(bufferWafer.WaferInnerID.ToString());
}
}
else
{
_bufferWaferInfo.Add(bufferWafer.WaferInnerID.ToString(), DateTime.Now);
}
}
//return;
}
}
//Place和Pick条件都一样
if (!_buffer.IsReadyForPlace(ModuleName.TMRobot, 0))
{
_buffer.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Place, 0);
}
}
/// <summary>
/// 检测到LL中的Wafer已完成Job。
/// </summary>
//private readonly R_TRIG _trigLLPjDone = new();
private void MonitorLoadTask()
{
if (!_load.IsAvailable)
{
return;
}
if (_load.FirstDetectWaferArrive(0) || _load.FirstDetectWaferLeave(0))
{
_load.ResetPurged();
//_trigLLPjDone.RST = true;
}
var canExcute = _load.HasWafer(0);
if (canExcute)
{
if (_load.GetWaferInfo(0).ProcessJob != null)
{
if (_load.GetWaferInfo(0).ProcessJob.State != EnumProcessJobState.Processing)
{
return;
}
}
else
{
return;
}
if (!_load.CheckWaferSequenceStepDone(0))
{
if (_load.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0))
{
if (_load.CheckWaferNeedProcess(0))
{
_load.Purge(_load.GetWaferPurgeCount(0), _load.GetWaferPumpDelayTime(0));
_load.GetWaferInfo(0).NextSequenceStep++;
return;
}
else
{
if (!GetWaferSequenceNextValue(ModuleName.Load, 0, "Type", out var strType))
{
return;
}
if (!GetWaferSequenceNextValue(ModuleName.Load, 0, "SetValue", out var strSetValue))
{
return;
}
if (!Int32.TryParse(strSetValue, out var setValue))
{
return;
}
//Load腔没有测温
//if (strType == "CoolingByTemp")
//{
// if (_load.GetTemperature() <= setValue)
// {
// _load.Purge(_load.GetWaferPurgeCount(0), _load.GetWaferPumpDelayTime(0));
// _load.Vent();
// _load.GetWaferInfo(0).NextSequenceStep++;
// }
//}
if (strType == "CoolingByTime")
{
if (_loadWaferInfo.ContainsKey(_load.GetWaferInfo(0).WaferInnerID.ToString()))
{
var dtStartTime = _loadWaferInfo[_load.GetWaferInfo(0).WaferInnerID.ToString()];
var pastTime = (DateTime.Now - dtStartTime).TotalSeconds;
_timeLoad = pastTime > setValue ? 0 : (setValue - pastTime);
if (pastTime > setValue)
{
if (!_load.CheckPurged())
{
_load.Purge(_load.GetWaferPurgeCount(0), _load.GetWaferPumpDelayTime(0));
return;
}
_load.ResetPurged();
_load.Vent();
_load.GetWaferInfo(0).NextSequenceStep++;
_loadWaferInfo.Remove(_load.GetWaferInfo(0).WaferInnerID.ToString());
//补全路径
string squenceID = $"Sequence\\{_load.GetWaferInfo(0).PPID}.seq";
GemManager.Instance.Equipment?.TriggerEvent("JobComplete", new string[] { "LotID", "SequenceID" },
new object[] { _load.GetWaferInfo(0).LotId, squenceID });
return;
}
}
else
{
_loadWaferInfo.Add(_load.GetWaferInfo(0).WaferInnerID.ToString(), DateTime.Now);
return;
}
}
}
}
else if (!_load.IsReadyForPick(ModuleName.TMRobot, 0) && !_tmRobot.IsInPumping)
{
_load.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Pick, 0);
return;
}
}
/*else
{
// Job Done, 响蜂鸣器
_trigLLPjDone.CLK = true;
if (_trigLLPjDone.Q)
{
OP.DoOperation("System.AlertJobDone", ModuleName.LoadLock.ToString(), 0);
}
}*/
}
else
{
if (_load.NoTray(0))
{
if (!_load.IsReadyForPlace(ModuleName.TMRobot, 0) && !_tmRobot.IsInPumping)
{
_load.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Place, 0);
return;
}
}
}
}
private void MonitorPMTask()
{
//if (_pm1.FirstDetectTrayArrive(0))
//{
// _pm1.GetWaferInfo(0).TrayUsedForWhichPM = (int)_pm1.Module;
//}
//if (_pm2.FirstDetectTrayArrive(1))
//{
// _pm2.GetWaferInfo(0).TrayUsedForWhichPM = (int)_pm2.Module;
//}
foreach (var pm in _lstPms)
{
if (!pm.IsAvailable)
continue;
if (pm.HasWafer(0))
{
if (pm.CheckNeedRunClean(out var withWafer, out var recipe) && withWafer
&& GetModule(pm.Module).GetWaferInfo(0).WaferStatus == WaferStatus.Dummy
&& GetModule(pm.Module).GetWaferInfo(0).ProcessState == WaferProcessStatus.Wait)
{
pm.Process(recipe, true, withWafer);
continue;
}
if (GetModule(pm.Module).CheckWaferNeedProcess(0, pm.Module))
{
WaferInfoRt wafer = GetModule(pm.Module).GetWaferInfo(0);
if (pm.Process(wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].RecipeName, false, true))
{
GetModule(pm.Module).GetWaferInfo(0).NextSequenceStep++;
continue;
}
}
else
{
if (!pm.IsReadyForPick(ModuleName.TMRobot, 0))
{
pm.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Pick, 0);
}
}
}
else
{
if (GetModule(pm.Module).CheckNeedRunClean(out var withWafer, out var recipe) && !withWafer)
{
pm.Process(recipe, true, withWafer);
continue;
}
if (!pm.IsReadyForPlace(ModuleName.TMRobot, 0))
{
pm.PrepareTransfer(ModuleName.TMRobot, EnumTransferType.Place, 0);
}
}
}
}
private void MonitorTmRobotTask()
{
// TMRobot Idle或者Error时，清除被传盘对象的等待状态
if (_tmRobot.CheckTaskDone())
{
foreach (var pm in _lstPms.Where(
pm => pm.IsWaitTransfer(ModuleName.TMRobot) && _tmRobot.CheckTaskDone()))
{
pm.StopWaitTransfer(ModuleName.TMRobot);
}
if (_buffer.IsWaitTransfer(ModuleName.TMRobot) && _tmRobot.CheckTaskDone())
_buffer.StopWaitTransfer(ModuleName.TMRobot);
if (_load.IsWaitTransfer(ModuleName.TMRobot) && _tmRobot.CheckTaskDone())
_load.StopWaitTransfer(ModuleName.TMRobot);
//if (_unload.IsWaitTransfer(ModuleName.TMRobot))
// _unload.StopWaitTransfer(ModuleName.TMRobot);
}
if (!_tmRobot.IsAvailable)
{
return;
}
if (!_tmRobot.IsAvailable)
return;
var act = tmRobotActions.Peek();
act.Invoke();
tmRobotActions.Enqueue(tmRobotActions.Dequeue());
}
#region TmRobotTask
private void MonitorTmRobotLoadPlaceTask()
{
if (!_load.IsAvailable || !_tmRobot.IsAvailable)
{
return;
}
//place Robot有Tray有Wafer,Load无Tray,无Wafer
var canPlace = _tmRobot.HasTray(0) && _load.NoTray(0) && _load.NoWafer(0)
&& !_load.CheckTrayPlaced();
if (canPlace)
{
if(!_tmRobot.CheckWaferNeedProcess(0) || _tmRobot.CheckWaferSequenceStepDone(0) || _load.CheckWaferNextStepIsThis(ModuleName.TMRobot,0))
{
if (_load.IsReadyForPlace(ModuleName.TMRobot, 0))
{
if (_tmRobot.Place(_load.Module, 0, Hand.Blade1))
{
_load.WaitTransfer(ModuleName.TMRobot, false, 0);
return;
}
}
}
}
}
private void MonitorTmRobotLoadPickTask()
{
if (!_load.IsAvailable || !_tmRobot.IsAvailable)
{
return;
}
//pick TM无Tray,需要Process
var canPick = _tmRobot.NoTray(0) && _tmRobot.NoWafer(0)
&& _load.HasTray(0) && _load.HasWafer(0)
&& _load.CheckWaferNeedProcess(0)
&& !_load.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0)
&& _load.CheckWaferNextStepModuleNoTray(0);
if (canPick)
{
//下一步如果去PM1，判断PM1是否准备好
if (_pm1.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0))
{
if (!_pm1.IsAvailable || _pm1.HasTray(0) || _pm1.HasWafer(0) || !_pm1.IsReadyForPlace(ModuleName.TMRobot, 0))
{
return;
}
if(!_pm1.CheckBufferToPMTemp())
{
return;
}
}
//下一步如果去PM2，判断PM2是否准备好
if (_pm2.CheckWaferNextStepIsThis(ModuleName.LoadLock, 0))
{
if (!_pm2.IsAvailable || _pm2.HasTray(0) || _pm2.HasWafer(0) || !_pm2.IsReadyForPlace(ModuleName.TMRobot, 0))
{
return;
}
if (!_pm2.CheckBufferToPMTemp())
{
return;
}
}
if (_load.IsReadyForPick(ModuleName.TMRobot, 0))
{
if (_tmRobot.Pick(_load.Module, 0, Hand.Blade1))
{
_load.WaitTransfer(ModuleName.TMRobot, true, 0);
return;
}
}
}
}
private void MonitorTmRobotBufferPlaceTask()
{
if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
{
return;
}
//place Buffer位置没有Tray,Robot有Wafer,下一步骤是Buffer
var canPalce = _tmRobot.HasTray(0);
if (canPalce)
{
SlotItem bufferEmptySlot = null;
if (_tmRobot.CheckWaferNeedProcess(0, _pm1.Module)
&& _buffer.NoTray(2)
&& _buffer.NoWafer(2)
&& _buffer.CheckWaferNextStepIsThis(ModuleName.TMRobot, 0))
{
bufferEmptySlot = new SlotItem(ModuleName.Buffer, 2);
}
else if (_tmRobot.CheckWaferNeedProcess(0, _pm2.Module)
&& _buffer.NoTray(1)
&& _buffer.NoWafer(1)
&& _buffer.CheckWaferNextStepIsThis(ModuleName.TMRobot, 0))
{
bufferEmptySlot = new SlotItem(ModuleName.Buffer, 1);
}
//TMRobot的下一步是Buffer3
else if (!_tmRobot.CheckWaferNeedProcess(0)
&& _buffer.NoTray(0)
&& _buffer.NoWafer(0)
&& _buffer.CheckWaferNextStepIsThis(ModuleName.TMRobot, 0))
{
bufferEmptySlot = new SlotItem(ModuleName.Buffer, 0);
}
//Load里有Tray
else if (!_tmRobot.CheckWaferNeedProcess(0)
&& _buffer.NoTray(0)
&& _buffer.NoWafer(0)
&& _load.HasTray(0))
{
bufferEmptySlot = new SlotItem(ModuleName.Buffer, 0);
}
if (bufferEmptySlot == null)
{
return;
}
if (_buffer.IsReadyForPlace(ModuleName.TMRobot, bufferEmptySlot.Slot))
{
if (_tmRobot.Place(_buffer.Module, bufferEmptySlot.Slot, Hand.Blade1))
{
_buffer.WaitTransfer(ModuleName.TMRobot);
return;
}
}
return;
}
}
private void MonitorTmRobotBufferPickTask()
{
if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
{
return;
}
//pick,Buffer有Tray,机械手没有Tray
MonitorTmRobotBuffer1PickTask();
MonitorTmRobotBuffer2PickTask();
MonitorTmRobotBuffer3PickTask();
}
private void MonitorTmRobotBuffer3PickTask()
{
if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
{
return;
}
//pick,Buffer有Tray,机械手没有Tray
var canPick = _tmRobot.NoTray(0);
if (canPick)
{
if (_buffer.HasTray(2) && _buffer.HasWafer(2))
{
if (_buffer.CheckWaferNextStepIsThis(ModuleName.Buffer, 2))
{
return;
}
//下一步如果去PM1，判断PM1是否准备好
if (_pm1.CheckWaferNextStepIsThis(ModuleName.Buffer, 2))
{
if (!_pm1.IsAvailable || _pm1.HasTray(0) || _pm1.HasWafer(0) || !_pm1.IsReadyForPlace(ModuleName.TMRobot, 0))
{
return;
}
if(!_pm1.CheckBufferToPMTemp())
{
return;
}
}
if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
{
if (_tmRobot.Pick(_buffer.Module, 2, Hand.Blade1))
{
_buffer.WaitTransfer(ModuleName.TMRobot);
return;
}
}
}
}
}
private void MonitorTmRobotBuffer2PickTask()
{
if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
{
return;
}
//pick,Buffer有Tray,机械手没有Tray
var canPick = _tmRobot.NoTray(0);
if (canPick)
{
if (_buffer.HasTray(1) && _buffer.HasWafer(1))
{
if (_buffer.CheckWaferNextStepIsThis(ModuleName.Buffer, 1))
{
return;
}
//下一步如果去PM2，判断PM2是否准备好
if (_pm2.CheckWaferNextStepIsThis(ModuleName.Buffer, 1))
{
if (!_pm2.IsAvailable || _pm2.HasTray(0) || _pm2.HasWafer(0) || !_pm2.IsReadyForPlace(ModuleName.TMRobot, 0))
{
return;
}
if(!_pm2.CheckBufferToPMTemp())
{
return;
}
}
if (_buffer.CheckWaferNextStepModuleNoTray(1))
{
if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
{
if (_tmRobot.Pick(_buffer.Module, 1, Hand.Blade1))
{
_buffer.WaitTransfer(ModuleName.TMRobot);
return;
}
}
}
}
}
}
private void MonitorTmRobotBuffer1PickTask()
{
if (!_tmRobot.IsAvailable || !_buffer.IsAvailable)
{
return;
}
var canPick = _tmRobot.NoTray(0) && _tmRobot.NoWafer(0);
if (canPick)
{
if (_buffer.HasTray(0)
&& _load.NoTray(0) && _load.NoWafer(0)
&& !_buffer.CheckWaferNextStepIsThis(ModuleName.Buffer, 0)
&& _load.IsReadyForPlace(ModuleName.TMRobot,0)
&& _load.IsAvailable
&& _load.IsOnline)
{
if (!_buffer.CheckWaferNeedProcess(0))
{
if (_buffer.IsReadyForPick(ModuleName.TMRobot, 0))
{
if (_tmRobot.Pick(_buffer.Module,0, Hand.Blade1))
{
_buffer.WaitTransfer(ModuleName.TMRobot);
return;
}
}
}
}
}
}
private void MonitorTmRobotPMPlaceTask()
{
if (!_tmRobot.IsAvailable)
return;
//place to pm
var blade0HasWaferAndNeedProcess = _tmRobot.HasWafer(0) && _tmRobot.HasTray(0) && _tmRobot.CheckWaferNeedProcess(0);
if (blade0HasWaferAndNeedProcess)
{
foreach (var pm in _lstPms)
{
if (!pm.IsAvailable
|| !GetModule(pm.Module).NoWafer(0)
|| !GetModule(pm.Module).NoTray(0)
|| !pm.IsReadyForPlace(ModuleName.TMRobot, 0))
continue;
var blade0Place = _tmRobot.HasWafer(0) && _tmRobot.CheckWaferNeedProcess(0, pm.Module) &&
pm.CheckWaferNextStepIsThis(ModuleName.TMRobot, 0);
if (blade0Place)
{
if (!pm.CheckBufferToPMTemp())
{
continue;
}
if (_tmRobot.Place(pm.Module, 0, Hand.Blade1))
{
pm.WaitTransfer(ModuleName.TMRobot);
return;
}
}
}
}
}
private void MonitorTmRobotPMPickTask()
{
if (!_tmRobot.IsAvailable)
return;
//TMRobot从PM取Wafer,Buffer1中不能有Tray,否则先去Buffer1中的Tray
if (_tmRobot.NoWafer(0) && _tmRobot.NoTray(0))
{
var pickBlade = Hand.Blade1;
var pickPm = ModuleName.System;
foreach (var schedulerPm in _lstPms)
{
//增加温度低于900才能Pick的限制
if (!schedulerPm.IsAvailable
|| GetModule(schedulerPm.Module).NoTray(0)
|| GetModule(schedulerPm.Module).CheckWaferNeedProcess(0, schedulerPm.Module)
|| _tmRobot.HasWafer((int)pickBlade)
|| _tmRobot.HasTray((int)pickBlade))
continue;
//如果下一步是Buffer,只能取出放Buffer1
if (_buffer.CheckWaferNextStepIsThis(schedulerPm.Module, 0))
{
if (_buffer.NoTray(0) && _buffer.NoWafer(0))
{
pickPm = schedulerPm.Module;
break;
}
}
else if ((_buffer.NoTray(0) && _buffer.NoWafer(0))
|| (_load.NoTray(0) && _load.NoWafer(0)))
{
pickPm = schedulerPm.Module;
break;
}
}
if (pickPm != ModuleName.System)
{
var pmScheduler = _lstPms.Find(scheduler => scheduler.Module == pickPm);
if (!pmScheduler.CheckPMToTMRobotTemp())
{
return;
}
var pm = GetModule(pickPm.ToString());
if (pm.IsReadyForPick(ModuleName.TMRobot, 0))
{
if (_tmRobot.Pick(pm.Module, 0, pickBlade))
{
pm.WaitTransfer(ModuleName.TMRobot);
return;
}
}
}
}
}
#endregion
#endregion
#region Logic Check
/// <summary>
/// 获得Buffer的方式和数值
/// </summary>
/// <param name="module"></param>
/// <param name="slot"></param>
/// <param name="coolingType"></param>
/// <param name="setValue"></param>
/// <returns></returns>
private bool GetWaferSequenceNextValue(ModuleName module, int slot, string nodeName, out string nodeValue)
{
nodeValue = "";
if (!GetModule(module).HasWafer(slot))
return false;
WaferInfoRt wafer = GetModule(module).GetWaferInfo(slot);
if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
return false;
if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
return false;
if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(module))
return false;
nodeValue = wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter[nodeName].ToString();
if (String.IsNullOrEmpty(nodeValue))
{
return false;
}
return true;
}
private bool GetWaferSequenceCurrentValue(ModuleName module, int slot, string nodeName, out string nodeValue)
{
nodeValue = "";
if (!GetModule(module).HasWafer(slot))
return false;
WaferInfoRt wafer = GetModule(module).GetWaferInfo(slot);
if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
return false;
if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
return false;
if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep - 1].StepModules.Contains(module))
return false;
nodeValue = wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep - 1].StepParameter[nodeName].ToString();
if (String.IsNullOrEmpty(nodeValue))
{
return false;
}
return true;
}
public bool CheckBufferWaferHasJob()
{
WaferInfoRt wafer = _buffer.GetWaferInfo(0);
if (wafer.IsWaferEmpty)
{
return false;
}
if (wafer.ProcessJob == null)
{
return false;
}
var pj = _processJobList.Find(x => x.InnerId == wafer.ProcessJob.InnerId);
if (pj == null)
{
return false;
}
return true;
}
public bool CheckWaferProcessModuleIsAvailable(ModuleName waferModule, int waferSlot)
{
var wafer = GetModule(waferModule).GetWaferInfo(waferSlot);
if (wafer.IsWaferEmpty)
return false;
if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
return false;
if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
return false;
//foreach (var module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
//{
//if (GetModule(module).NoWafer(0)
// && _lstPms.Find(x => x.Module == module).IsAvailable
// && !CheckNeedRunClean(module, out bool _, out string _))
// return true;
//}
foreach (var step in wafer.ProcessJob.Sequence.Steps)
{
foreach (var module in step.StepModules)
{
if (module.ToString().StartsWith("PM")
&& GetModule(module).NoWafer(0)
&& _lstPms.Find(x => x.Module == module).IsAvailable
&& !GetModule(module).CheckNeedRunClean(out var _, out var _))
return true;
}
}
return false;
}
public bool CheckWaferSequenceStepDone(ModuleName waferModule, int waferSlot)
{
var wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);
if (wafer.IsWaferEmpty)
{
return false;
}
if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
{
return false;
}
if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count && wafer.ProcessJob.Sequence.Steps.Count > 0)
{
return true;
}
return false;
}
private SlotItem SortBySerialMode(List<Tuple<ModuleName, int>> processingWafers)
{
foreach (var pjSlotWafer in processingWafers)
{
if (pjSlotWafer.Item1 == ModuleName.CassAL || pjSlotWafer.Item1 == ModuleName.CassAR)
{
if (GetModule(pjSlotWafer.Item1).CheckWaferNeedProcess(pjSlotWafer.Item2, _pm1.Module))
{
if (GetRunWaferCount(_pm1.Module) < 2)
{
return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
}
else
{
return null;
}
}
else if (GetModule(pjSlotWafer.Item1).CheckWaferNeedProcess(pjSlotWafer.Item2, _pm2.Module))
{
if (GetRunWaferCount(_pm2.Module) < 2)
{
return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
}
else
{
return null;
}
}
}
}
return null;
}
private SlotItem SortByParallelMode(List<Tuple<ModuleName, int>> processingWafers)
{
foreach (var pjSlotWafer in processingWafers)
{
if (pjSlotWafer.Item1 == ModuleName.CassAL || pjSlotWafer.Item1 == ModuleName.CassAR)
{
if (GetModule(pjSlotWafer.Item1).CheckWaferNeedProcess(pjSlotWafer.Item2, _pm1.Module))
{
if (GetRunWaferCount(_pm1.Module) < 2 && GetRunWaferCount(_pm1.Module) <= GetRunWaferCount(_pm2.Module))
{
return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
}
}
else if (GetModule(pjSlotWafer.Item1).CheckWaferNeedProcess(pjSlotWafer.Item2, _pm2.Module))
{
if (GetRunWaferCount(_pm2.Module) < 2 && GetRunWaferCount(_pm2.Module) <= GetRunWaferCount(_pm1.Module))
{
return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
}
}
}
}
return SortBySerialMode(processingWafers);
}
/// <summary>
/// 获取各个模块的Wafer总数量
/// </summary>
/// <returns></returns>
private int GetRunWaferCount()
{
var waferCount = 0;
if (_load.HasWafer(0))
{
waferCount++;
}
if (_unload.HasWafer(0))
{
waferCount++;
}
if (_tmRobot.HasWafer(0))
{
waferCount++;
}
foreach (var pm in _lstPms)
{
if (GetModule(pm.Module).HasWafer(0))
{
waferCount++;
}
}
for (var i = 0; i < _bufferFloors; i++)
{
if (_buffer.HasWafer(i))
{
waferCount++;
}
}
return waferCount;
}
private int GetRunWaferCount(ModuleName processIn)
{
var waferCount = 0;
if (_tmRobot.HasWafer(0) && (_tmRobot.CheckWaferNeedProcess(0, processIn) || _tmRobot.GetWaferInfo(0).SubstHists.Select(x => x.locationID).Contains(processIn.ToString())))
{
waferCount++;
}
if (GetModule(processIn).HasWafer(0) && (GetModule(processIn).CheckWaferNeedProcess(0, processIn) || GetModule(processIn).GetWaferInfo(0).SubstHists.Select(x => x.locationID).Contains(processIn.ToString())))
{
waferCount++;
}
for (var i = 0; i < _bufferFloors; i++)
{
if (_buffer.HasWafer(i) && (_buffer.CheckWaferNeedProcess(i, processIn) || _buffer.GetWaferInfo(i).SubstHists.Select(x => x.locationID).Contains(processIn.ToString())))
{
waferCount++;
}
}
return waferCount;
}
/// <summary>
/// 获取各个模块的石墨盘总数量
/// </summary>
/// <returns></returns>
private int GetCurrentTrayCount()
{
var trayCount = 0;
if (_tmRobot.HasTray(0))
{
trayCount++;
}
foreach (var pm in _lstPms)
{
if (GetModule(pm.Module).HasTray(0))
{
trayCount++;
}
}
for (var i = 0; i < _bufferFloors; i++)
{
if (_buffer.HasTray(i))
{
trayCount++;
}
}
return trayCount;
}
/// <summary>
/// 获取ProcessJob可以同时运行工艺的Wafer总数
/// </summary>
/// <returns></returns>
private int GetCurrentWaferCount()
{
var waferCountDiv = 0;
var cassWaferCount = 0;
foreach (var cj in _controlJobList)
{
if (cj.State == EnumControlJobState.Executing)
{
foreach (var pj in _processJobList)
{
if (pj.ControlJobName == cj.Name && pj.State == EnumProcessJobState.Processing)
{
cassWaferCount += pj.SlotWafers.Count;
foreach (var pjSlotWafer in pj.SlotWafers)
{
var module = GetModule(pjSlotWafer.Item1);
if (module.HasWafer(pjSlotWafer.Item2) && !module.CheckWaferNeedProcess(pjSlotWafer.Item2))
{
waferCountDiv++;
}
}
}
}
}
}
return cassWaferCount - waferCountDiv;
//int waferCount = 0;
//if (_load.HasWafer(0))
//{
// waferCount++;
//}
//for (int i = 0; i < 3; i++)
//{
//if (_buffer.HasWafer(i))
// {
// waferCount++;
// }
//}
//if (_waferRobot.CheckWaferNeedProcess(0) )
//{
// waferCount++;
//}
//if (_aligner.CheckWaferNeedProcess(0) )
//{
// waferCount++;
//}
//for (int i=0;i<25;i++)
//{
// if (CheckWaferNeedProcess(ModuleName.CassAL, i))
// {
// waferCount++;
// }
// if (CheckWaferNeedProcess(ModuleName.CassAR, i))
// {
// waferCount++;
// }
//}
//return waferCount;
}
#endregion
#region Module error
public Result MonitorModuleError()
{
var isModuleError = false;
var isPMError = new bool[2];
for (var i = 0; i < isPMError.Length; i++)
{
isPMError[i] = false;
}
if (_tmRobot.IsError)
isModuleError = true;
for (var i = 0; i < _lstPms.Count; i++) // PM出错，不影响其他腔体的传片
{
if (_lstPms[i].IsError)
isPMError[i] = true;
}
if (isModuleError && !_isModuleErrorPrevious)
{
}
else if (!isModuleError && _isModuleErrorPrevious)
{
Reset();
}
for (var i = 0; i < _lstPms.Count; i++)
{
if (!isPMError[i] && _isPMErrorPrevious[i])
{
_lstPms[i].ResetTask();
}
_isPMErrorPrevious[i] = isPMError[i];
}
_isModuleErrorPrevious = isModuleError;
return Result.RUN;
}
private bool CheckModuleHaveWaferWithNoJob(out string reason)
{
reason = "";
if (_controlJobList.Count > 0)
{
reason = "lstControlJobs.Count > 0";
return false;
}
else
{
if (_buffer.HasWafer(0) || _buffer.HasWafer(1) || _buffer.HasWafer(2))
{
reason = $"Buffer have wafer!";
EV.PostWarningLog(LogSource, reason);
return true;
}
if (_tmRobot.HasWafer(0))
{
reason = $"TmRobot have wafer!";
EV.PostWarningLog(LogSource, reason);
return true;
}
if (!_load.HasWafer(0))
{
reason = $"Load have no wafer!";
EV.PostWarningLog(LogSource, reason);
return true;
}
if (!_load.HasTray(0))
{
reason = $"Load have no Tray!";
EV.PostWarningLog(LogSource, reason);
return true;
}
return false;
}
}
private bool CheckWaferNeedProcess(ModuleName module, int waferSlot, ModuleName processIn = ModuleName.System)
{
WaferInfoRt wafer = WaferManager.Instance.GetWafer(module, waferSlot);
if (wafer.IsWaferEmpty)
return false;
if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.Sequence.Steps == null)
return false;
if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count || wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules == null)
return false;
//if (processIn != ModuleName.System && !wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(processIn))
// return false;
var hasPm = false;
for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
{
foreach (var stepModule in wafer.ProcessJob.Sequence.Steps[i].StepModules)
{
if (ModuleHelper.IsPm(stepModule))
{
hasPm = true;
break;
}
}
if (hasPm)
break;
}
if (processIn == ModuleName.System && !hasPm)
return false;
return true;
}
private bool SkipWaferProcessStep(WaferInfoRt wafer)
{
if (wafer.IsWaferEmpty)
return false;
if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.Sequence.Steps == null)
return false;
if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count || wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules == null)
return false;
for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
{
foreach (var stepModule in wafer.ProcessJob.Sequence.Steps[i].StepModules)
{
if (ModuleHelper.IsPm(stepModule))
{
if(wafer.NextSequenceStep == 0)
{
wafer.NextSequenceStep = wafer.ProcessJob.Sequence.Steps.Count - 1;
}
else
{
wafer.NextSequenceStep = i + 1;
}
break;
}
}
}
return true;
}
#endregion
}
}
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