2026-07-02 15:51:14 +08:00
|
|
|
|
<?xml version="1.0" encoding="utf-8"?>
|
2026-06-15 10:56:30 +08:00
|
|
|
|
<IO_DEFINE xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
|
2026-07-02 15:51:14 +08:00
|
|
|
|
<VersionID Name="V2.2.3.0" />
|
|
|
|
|
|
<Dig_In>
|
|
|
|
|
|
<Block Index="0">
|
|
|
|
|
|
<DI_ITEM Index="0" Name="DI_LoaderDoorClosed" BufferOffset="0" Addr="0" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="1" Name="DI_LoaderDoorOpened" BufferOffset="1" Addr="1" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="4" Name="DI_ReactorADoorClosed" BufferOffset="4" Addr="4" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="5" Name="DI_ReactorADoorOpened" BufferOffset="5" Addr="5" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="13" Name="DI_LoaderLidClosed" BufferOffset="13" Addr="13" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="15" Name="DI_BufferStationLidClosed" BufferOffset="15" Addr="15" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="20" Name="DI_CDAPressureSWReady" BufferOffset="20" Addr="20" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="21" Name="DI_WaterFlowSWReady" BufferOffset="21" Addr="21" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="22" Name="DI_LoadLockGateClosed" BufferOffset="22" Addr="22" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="24" Name="DI_LoadLsideDoorClosed" BufferOffset="24" Addr="24" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="25" Name="DI_LoadLsideDoorOpened" BufferOffset="25" Addr="25" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="32" Name="DI_LoaderWaferPresence" BufferOffset="32" Addr="32" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="33" Name="DI_LoaderLeftGateINTK" BufferOffset="33" Addr="33" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="34" Name="DI_LoaderRightGateINTK" BufferOffset="34" Addr="34" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="36" Name="DI_LoaderTraySensor" BufferOffset="36" Addr="36" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="37" Name="DI_BufferStationOptSensorHigh" BufferOffset="37" Addr="37" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="43" Name="DI_DryPumpAlarm" BufferOffset="43" Addr="43" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="44" Name="DI_DryPumpRuning" BufferOffset="44" Addr="44" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="47" Name="DI_BufferStationBLidClosed" BufferOffset="47" Addr="47" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="49" Name="DI_DryPumpWarning" BufferOffset="49" Addr="49" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="50" Name="DI_GloveBoxLoadwaferReady" BufferOffset="50" Addr="50" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="51" Name="DI_GloveBoxLoadwaferFinished" BufferOffset="51" Addr="51" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="52" Name="DI_GloveBoxUnLoadwaferReady" BufferOffset="52" Addr="52" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="53" Name="DI_GloveBoxUnLoadwaferFinished" BufferOffset="53" Addr="53" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="54" Name="DI_GloveBoxReady" BufferOffset="54" Addr="54" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="88" Name="DI_TMPressure1ATM" BufferOffset="88" Addr="88" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="89" Name="DI_TMPressure1VAC" BufferOffset="89" Addr="89" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="90" Name="DI_LoaderPressureATM" BufferOffset="90" Addr="90" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="91" Name="DI_LoaderPressureVAC" BufferOffset="91" Addr="91" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="92" Name="DI_TMPressure2ATM" BufferOffset="92" Addr="92" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="93" Name="DI_TMPressure2VAC" BufferOffset="93" Addr="93" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="94" Name="DI_UnloadPressureATM" BufferOffset="94" Addr="94" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="95" Name="DI_UnloadPressureVAC" BufferOffset="95" Addr="95" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="96" Name="DI_LoaderSlowPumpFB" BufferOffset="96" Addr="96" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="97" Name="DI_LoaderFastPumpFB" BufferOffset="97" Addr="97" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="98" Name="DI_TMSlowPumpFB" BufferOffset="98" Addr="98" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="99" Name="DI_TMFastPumpFB" BufferOffset="99" Addr="99" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="101" Name="DI_LoadChamber1FillFBFB" BufferOffset="101" Addr="101" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="102" Name="DI_TMChamberFillFBFB" BufferOffset="102" Addr="102" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="103" Name="DI_TMChamberFastFillFBFB" BufferOffset="103" Addr="103" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="104" Name="DI_LoadTMBalanceFBFB" BufferOffset="104" Addr="104" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="105" Name="DI_LoaderDoorCloseFB" BufferOffset="105" Addr="105" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="106" Name="DI_LoaderDoorOpenFB" BufferOffset="106" Addr="106" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="107" Name="DI_UnloadStationDoorCloseFB" BufferOffset="107" Addr="107" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="108" Name="DI_UnloadStationDoorOpenFB" BufferOffset="108" Addr="108" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="109" Name="DI_RectorADoorCloseFB" BufferOffset="109" Addr="109" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="110" Name="DI_RectorADoorOpenFB" BufferOffset="110" Addr="110" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="111" Name="DI_RectorBDoorCloseFB" BufferOffset="111" Addr="111" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="112" Name="DI_RectorBDoorOpenFB" BufferOffset="112" Addr="112" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="113" Name="DI_TMUnloadBanlanceFB" BufferOffset="113" Addr="113" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="114" Name="DI_VacRobotEstopFB" BufferOffset="114" Addr="114" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="115" Name="DI_VacRobotExtenLLEnableFB" BufferOffset="115" Addr="115" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="116" Name="DI_VacRobotExtendSupplyEnableFB" BufferOffset="116" Addr="116" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="117" Name="DI_VacRobotExtendPMAEnableFB" BufferOffset="117" Addr="117" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="118" Name="DI_VacRobotExtendPMBEnableFB" BufferOffset="118" Addr="118" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="119" Name="DI_VacRobotExtendBufferEnableFB" BufferOffset="119" Addr="119" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="120" Name="DI_atmRobotExtendSupplyEnableFB" BufferOffset="120" Addr="120" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="121" Name="DI_atmRobotExtendLoaLockLsideEnableFB" BufferOffset="121" Addr="121" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="122" Name="DI_atmRobotExtendLoaLockRsideEnableFB" BufferOffset="122" Addr="122" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="123" Name="DI_LoaderLsideDoorCloseFB" BufferOffset="123" Addr="123" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="124" Name="DI_LoaderLsideDoorOpenFB" BufferOffset="124" Addr="124" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="125" Name="DI_LoaderRsideDoorCloseFB" BufferOffset="125" Addr="125" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="126" Name="DI_LoaderRsideDoorOpenFB" BufferOffset="126" Addr="126" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="127" Name="DI_UnloadSubStationDoorCloseFB" BufferOffset="127" Addr="127" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="128" Name="DI_UnloadSubStationDoorOpenFB" BufferOffset="128" Addr="128" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="129" Name="DI_BufferStationDoorCloseFB" BufferOffset="129" Addr="129" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="130" Name="DI_BufferStationDoorOpenFB" BufferOffset="130" Addr="130" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="131" Name="DI_LoaderLifterCYUpFB" BufferOffset="131" Addr="131" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="132" Name="DI_LoaderLifterCYDownFB" BufferOffset="132" Addr="132" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="133" Name="DI_LoaderWaferCYClampFB" BufferOffset="133" Addr="133" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="134" Name="DI_LoaderWaferCYOpenFB" BufferOffset="134" Addr="134" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="135" Name="DI_LoaderTrayCYClampFB" BufferOffset="135" Addr="135" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="136" Name="DI_LoaderTrayCYOpenFB" BufferOffset="136" Addr="136" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="139" Name="DI_UnloadStationWaferCYClampFB" BufferOffset="139" Addr="139" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="140" Name="DI_UnloadStationWaferCYOpenFB" BufferOffset="140" Addr="140" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="141" Name="DI_UnloadStationLifterCYUpFB" BufferOffset="141" Addr="141" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="143" Name="DI_TMPMABanlanceFB" BufferOffset="143" Addr="143" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="144" Name="DI_TMPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="160" Name="DI_ReactorAATMTransferReady" BufferOffset="160" Addr="160" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="161" Name="DI_ReactorAProcessTransferReady" BufferOffset="161" Addr="161" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="162" Name="DI_ReactorBATMTransferReady" BufferOffset="162" Addr="162" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="163" Name="DI_ReactorBProcessTransferReady" BufferOffset="163" Addr="163" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="164" Name="DI_PreheatATMTransferReady" BufferOffset="164" Addr="164" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="165" Name="DI_PreheatProcessTransferReady" BufferOffset="165" Addr="165" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="167" Name="DI_TMWaferPresenceLL" BufferOffset="167" Addr="167" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="168" Name="DI_TMWaferPresenceA" BufferOffset="168" Addr="168" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="169" Name="DI_TMWaferPresenceB" BufferOffset="169" Addr="169" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="170" Name="DI_TMWaferPresenceBuf" BufferOffset="170" Addr="170" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="171" Name="DI_TMWaferPresencePreheat" BufferOffset="171" Addr="171" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="174" Name="DI_ForelineBasePressureReady" BufferOffset="174" Addr="174" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="175" Name="DI_TMatATM" BufferOffset="175" Addr="175" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="176" Name="DI_LoaderAtATM" BufferOffset="176" Addr="176" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="177" Name="DI_TMUnderVac" BufferOffset="177" Addr="177" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="178" Name="DI_LoaderUnderVAC" BufferOffset="178" Addr="178" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="179" Name="DI_TMAtProcessPress" BufferOffset="179" Addr="179" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="180" Name="DI_LLAtProcessPress" BufferOffset="180" Addr="180" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="181" Name="DI_LoaderTempReady" BufferOffset="181" Addr="181" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="182" Name="DI_BufferTempReady" BufferOffset="182" Addr="182" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="185" Name="DI_TmCyclePurgeRoutineRunning" BufferOffset="185" Addr="185" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="186" Name="DI_TmLeakCheckRoutineRunning" BufferOffset="186" Addr="186" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="187" Name="DI_TmPumpDownRoutineRunning" BufferOffset="187" Addr="187" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="188" Name="DI_TmServoPressRoutineRunning" BufferOffset="188" Addr="188" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="189" Name="DI_TmVentUpRoutineRunning" BufferOffset="189" Addr="189" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="190" Name="DI_LLCyclePurgeRoutineRunning" BufferOffset="190" Addr="190" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="200" Name="DI_PMAH2SupplyFB" BufferOffset="200" Addr="200" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="201" Name="DI_PMAN2SwitchFB" BufferOffset="201" Addr="201" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="202" Name="DI_PMAHCLSwitchFB" BufferOffset="202" Addr="202" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="203" Name="DI_PMASiH4SwitchFB" BufferOffset="203" Addr="203" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="204" Name="DI_PMAC3H8SwitchFB" BufferOffset="204" Addr="204" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="208" Name="DI_LdRotationServoOn" BufferOffset="208" Addr="208" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="209" Name="DI_LdRotationBusy" BufferOffset="209" Addr="209" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="210" Name="DI_LdRotationServoError" BufferOffset="210" Addr="210" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="211" Name="DI_LdRotationMoveDone" BufferOffset="211" Addr="211" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="212" Name="DI_LdRotationRelativeHomeDone" BufferOffset="212" Addr="212" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="213" Name="DI_LdRotationOneCircleDone" BufferOffset="213" Addr="213" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="214" Name="DI_LdRotationCCD1posDone" BufferOffset="214" Addr="214" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="215" Name="DI_LdRotationCCD2posDone" BufferOffset="215" Addr="215" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="216" Name="DI_PMBH2SupplyFB" BufferOffset="216" Addr="216" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="217" Name="DI_PMBN2SwitchFB" BufferOffset="217" Addr="217" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="218" Name="DI_PMBHCLSwitchFB" BufferOffset="218" Addr="218" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="219" Name="DI_PMBSiH4SwitchFB" BufferOffset="219" Addr="219" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="220" Name="DI_PMBC3H8SwitchFB" BufferOffset="220" Addr="220" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="221" Name="DI_TMPMAS7ComErr" BufferOffset="221" Addr="221" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="222" Name="DI_TMPMATCPComErr" BufferOffset="222" Addr="222" Description="" />
|
|
|
|
|
|
<DI_ITEM Index="223" Name="DI_TMPMBS7ComErr" BufferOffset="223" Addr="223" Description="" />
|
|
|
|
|
|
</Block>
|
|
|
|
|
|
</Dig_In>
|
|
|
|
|
|
<Dig_Out>
|
|
|
|
|
|
<Block Index="0">
|
|
|
|
|
|
<DO_ITEM Index="0" Name="DO_LoadSlowPump(V84)" BufferOffset="0" Addr="0" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="1" Name="DO_LoadFastPump(V83)" BufferOffset="1" Addr="1" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="2" Name="DO_TMSlowPump(V82)" BufferOffset="2" Addr="2" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="3" Name="DO_TMFastPump(V81)" BufferOffset="3" Addr="3" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="5" Name="DO_LoadChamber1Fill(V79)" BufferOffset="5" Addr="5" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="6" Name="DO_TMChamberFill(V77)" BufferOffset="6" Addr="6" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="7" Name="DO_TMChamberFastFill(V78)" BufferOffset="7" Addr="7" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="8" Name="DO_LoadTMBalance(V85)" BufferOffset="8" Addr="8" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="9" Name="DO_LoadLockDoorClose" BufferOffset="9" Addr="9" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="10" Name="DO_LoadLockDoorOpen" BufferOffset="10" Addr="10" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="13" Name="DO_RectorADoorClose" BufferOffset="13" Addr="13" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="14" Name="DO_RectorADoorOpen" BufferOffset="14" Addr="14" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="18" Name="DO_VacRobotEstop" BufferOffset="18" Addr="18" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="19" Name="DO_VacRobotExtenLLEnable" BufferOffset="19" Addr="19" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="20" Name="DO_VacRobotExtendSupplyEnable" BufferOffset="20" Addr="20" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="21" Name="DO_VacRobotExtendPMAEnable" BufferOffset="21" Addr="21" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="22" Name="DO_VacRobotExtendPMBEnable" BufferOffset="22" Addr="22" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="23" Name="DO_VacRobotExtendBufferEnable" BufferOffset="23" Addr="23" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="24" Name="DO_atmRobotExtendSupplyEnable" BufferOffset="24" Addr="24" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="25" Name="DO_atmRobotExtendLoaLockLsideEnable" BufferOffset="25" Addr="25" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="26" Name="DO_atmRobotExtendLoaLockRsideEnable" BufferOffset="26" Addr="26" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="27" Name="DO_LoadLockLsideDoorClose" BufferOffset="27" Addr="27" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="28" Name="DO_LoadLockLsideDoorOpen" BufferOffset="28" Addr="28" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="47" Name="DO_TMPMABanlance(V70-1)" BufferOffset="47" Addr="47" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="48" Name="DO_TMPMBBanlance(V70-2)" BufferOffset="48" Addr="48" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="50" Name="DO_GloveBoxLoadwafer" BufferOffset="50" Addr="50" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="51" Name="DO_GloveBoxUnLoadwafer" BufferOffset="51" Addr="51" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="64" Name="DO_ReactorAATMTransferReady" BufferOffset="64" Addr="64" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="65" Name="DO_ReactorAProcessTransferReady" BufferOffset="65" Addr="65" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="66" Name="DO_ReactorBATMTransferReady" BufferOffset="66" Addr="66" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="67" Name="DO_ReactorBProcessTransferReady" BufferOffset="67" Addr="67" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="68" Name="DO_PreheatATMTransferReady" BufferOffset="68" Addr="68" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="69" Name="DO_PreheatProcessTransferReady" BufferOffset="69" Addr="69" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="71" Name="DO_TMWaferPresenceLL" BufferOffset="71" Addr="71" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="72" Name="DO_TMWaferPresenceA" BufferOffset="72" Addr="72" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="73" Name="DO_TMWaferPresenceB" BufferOffset="73" Addr="73" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="74" Name="DO_TMWaferPresenceBuf" BufferOffset="74" Addr="74" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="75" Name="DO_TMWaferPresencePreheat" BufferOffset="75" Addr="75" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="78" Name="DO_ForelineBasePressureReady" BufferOffset="78" Addr="78" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="79" Name="DO_TMatATM" BufferOffset="79" Addr="79" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="80" Name="DO_LoadLockAtATM" BufferOffset="80" Addr="80" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="81" Name="DO_TMUnderVac(Vac)" BufferOffset="81" Addr="81" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="82" Name="DO_LoadLockUnderVAC(Vac)" BufferOffset="82" Addr="82" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="83" Name="DO_TMAtProcessPress" BufferOffset="83" Addr="83" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="84" Name="DO_LLAtProcessPress" BufferOffset="84" Addr="84" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="85" Name="DO_LoadlockTempReady" BufferOffset="85" Addr="85" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="86" Name="DO_BufferTempReady" BufferOffset="86" Addr="86" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="89" Name="DO_TmCyclePurgeRoutineRunning" BufferOffset="89" Addr="89" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="90" Name="DO_TmLeakCheckRoutineRunning" BufferOffset="90" Addr="90" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="91" Name="DO_TmPumpDownRoutineRunning" BufferOffset="91" Addr="91" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="92" Name="DO_TmServoPressRoutineRunning" BufferOffset="92" Addr="92" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="93" Name="DO_TmVentUpRoutineRunning" BufferOffset="93" Addr="93" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="94" Name="DO_LLCyclePurgeRoutineRunning" BufferOffset="94" Addr="94" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="95" Name="DO_LoadLeakCheckRoutineRunning" BufferOffset="95" Addr="95" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="96" Name="DO_LoadPumpDownRoutineRunning" BufferOffset="96" Addr="96" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="97" Name="DO_LoadVentUpRoutineRunning" BufferOffset="97" Addr="97" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="98" Name="DO_UnLoadCyclePurgeRoutineRunning" BufferOffset="98" Addr="98" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="99" Name="DO_UnLoadLeakCheckRoutineRunning" BufferOffset="99" Addr="99" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="100" Name="DO_UnLoadPumpDownRoutineRunning" BufferOffset="100" Addr="100" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="101" Name="DO_UnLoadVentUpRoutineRunning" BufferOffset="101" Addr="101" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="144" Name="DO_LdRotationServoOn" BufferOffset="144" Addr="144" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="145" Name="DO_LdRotationReset" BufferOffset="145" Addr="145" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="146" Name="DO_LdRotationJogCW" BufferOffset="146" Addr="146" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="147" Name="DO_LdRotationJogCCW" BufferOffset="147" Addr="147" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="148" Name="DO_LdRotationStop" BufferOffset="148" Addr="148" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="149" Name="DO_LdRotationCCD1Teach" BufferOffset="149" Addr="149" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="150" Name="DO_LdRotationCCD2Teach" BufferOffset="150" Addr="150" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="151" Name="DO_LdRotationMoveRelativeHome" BufferOffset="151" Addr="151" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="152" Name="DO_LdRotationMoveOneCircle" BufferOffset="152" Addr="152" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="153" Name="DO_LdRotationMoveCCD1pos" BufferOffset="153" Addr="153" Description="" />
|
|
|
|
|
|
<DO_ITEM Index="154" Name="DO_LdRotationMoveCCD2pos" BufferOffset="154" Addr="154" Description="" />
|
|
|
|
|
|
</Block>
|
|
|
|
|
|
</Dig_Out>
|
|
|
|
|
|
<Ana_In>
|
|
|
|
|
|
<Block Index="0">
|
|
|
|
|
|
<AI_ITEM Index="0" Name="AI_TMPressure1" BufferOffset="0" Addr="0" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="1" Name="AI_LoadLockPressure" BufferOffset="1" Addr="1" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="2" Name="AI_PMAPressure2" BufferOffset="2" Addr="2" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="3" Name="AI_PMBPressure2" BufferOffset="3" Addr="3" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="4" Name="AI_UnloadPressure" BufferOffset="4" Addr="4" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="5" Name="AI_UnloadTemp" BufferOffset="5" Addr="5" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="6" Name="AI_LoadLockTemp" BufferOffset="6" Addr="6" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="7" Name="AI_BufferTemp" BufferOffset="7" Addr="7" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="8" Name="AI_MFC60TMChamberFill" BufferOffset="8" Addr="8" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="13" Name="AI_LdRotationRelativeDegree" BufferOffset="13" Addr="13" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="14" Name="AI_LdRotationCCD1Degree" BufferOffset="14" Addr="14" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="15" Name="AI_LdRotationCCD2Degree" BufferOffset="15" Addr="15" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="16" Name="AI_Temp0" BufferOffset="16" Addr="16" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="17" Name="AI_Temp1" BufferOffset="17" Addr="17" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="18" Name="AI_Temp2" BufferOffset="18" Addr="18" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="19" Name="AI_Temp3" BufferOffset="19" Addr="19" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="20" Name="AI_RunVentPT1" BufferOffset="20" Addr="20" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="21" Name="AI_RunVentPT2" BufferOffset="21" Addr="21" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="22" Name="AI_RunVentPT3" BufferOffset="22" Addr="22" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="23" Name="AI_RunVentPT4" BufferOffset="23" Addr="23" Description="" />
|
|
|
|
|
|
<AI_ITEM Index="24" Name="AI_RunVentPT5" BufferOffset="24" Addr="24" Description="" />
|
|
|
|
|
|
</Block>
|
|
|
|
|
|
</Ana_In>
|
|
|
|
|
|
<Ana_Out>
|
|
|
|
|
|
<Block Index="0">
|
|
|
|
|
|
<AO_ITEM Index="8" Name="AO_M60FlowSetpoint" BufferOffset="8" Addr="8" Description="" />
|
|
|
|
|
|
<AO_ITEM Index="9" Name="AO_M61FlowSetpoint" BufferOffset="9" Addr="9" Description="" />
|
|
|
|
|
|
<AO_ITEM Index="10" Name="AO_BlingHZ" BufferOffset="10" Addr="10" Description="" />
|
|
|
|
|
|
<AO_ITEM Index="11" Name="AO_HomeOffsetDegreeLU" BufferOffset="11" Addr="11" Description="" />
|
|
|
|
|
|
<AO_ITEM Index="12" Name="AO_LdRotationCCD1Degree" BufferOffset="12" Addr="12" Description="" />
|
|
|
|
|
|
<AO_ITEM Index="13" Name="AO_LdRotationSpeed" BufferOffset="13" Addr="13" Description="" />
|
|
|
|
|
|
<AO_ITEM Index="14" Name="AO_LdRotationPosSpeed" BufferOffset="14" Addr="14" Description="" />
|
|
|
|
|
|
<AO_ITEM Index="15" Name="AO_LdRotationCCD2Degree" BufferOffset="15" Addr="15" Description="" />
|
|
|
|
|
|
</Block>
|
|
|
|
|
|
</Ana_Out>
|
2026-06-15 10:56:30 +08:00
|
|
|
|
</IO_DEFINE>
|
