MoS2/App/Modules/SicModules/PMs/Routines/PMToProcessIdleRoutine.cs

using System.Collections.Generic;
using System.Diagnostics;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using SicModules.PMs.Routines.Base;

namespace SicModules.PMs.Routines
{
    public class PMToProcessIdleRoutine : PMBaseRoutine
    {
        private enum RoutineStep
        {
            ConfinementServoOn,
            RotationServoOn,
            RotationEnable,
            HeatEnable,
            VentPumpClose,
            ArSupply,

            OpenH2Valve,

            SetGroupA,
            SetGroupB,
            SetGroupC,
            SetGroupE,
            SetGroupF,
            SetGroupH,
            SetGroupD,
            SetGroupG,
            SetGroupK,

            SetMFCMode,
            SetPCMode,

            SetM1to16,
            SetM17M18,
            SetPC,
            SetGroupJ,
            SetM18toM40,

            SetPC567Close,
            SetPC567Default,
            SetPC567Mode,

            SetGasOut,
            SetTv,

            SetM291519to38,
            SetGasIn1,      //V68
            OpenFinal1,     //V91-96
            SetMfcFinal1,   //M32-38
            SetM18toM26,

            SetTVCloseMode,
            SetTvPositionToZero,
            CheckPM1000,

            SetGasIn2,
            SetGroupJOpen,

            CloseFinal2,
            OpenFinal2,
            SetMfcFinal2,
            WaitPmPressureUp,
            WaitPmPressureUp1020,

            SetTvOpen,
            SetTVEnable,
            SetTVPressMode,
            SetTV,
            SetTvMode,
            SetTVto1050,
            SetTVto300,
            WaitTvTo300,
            CheckPmVac,
            CheckPmAtm,
            CheckV72Open,

            SetV72,
            SetV25,
            SetV76,
            SetV75,
            SetV31,
            SetV32,
            SetV35V36,
            SetV65,
            SetV103,
            SetV105,

            SetEPV1,
            SetEPV2,
            SetEPV11,
            SetEPV22,
            SetTvModeToPress,
            SetMfc28to40Special,
            SetMfc28to40Default,
            SetPressUpOrDown1,
            SetPressureDown,
            EnableRotation,
            EnableHeater,
            SetRotation1,
            WaitRotation1,
            SetTC1Mode,
            SetTC1Ratio,
            SetTC1RatioTo0,
            SetTC1Ref,
            SetTC2Mode,
            SetTC2Ratio,
            SetTC2RatioTo0,
            SetTC2Ref,
            EnableTC1,
            EnableTC2,
            CloseTC1,
            CloseTC2,
            SetFinal1ToDefault,
            SetFinal1To0,
            SetFinal2ToDefault,
            SetFinal2To0,
            CheckFinal1Open,
            CheckFinal2Open,
            CheckTvOpen,
            SetRotation2,
            SetGroupV25,
            SetScrReset,
            CheckEpv2Open,
            CheckEpv1Open,

            SetV92V93V95,
            SetV94,
            SetV96,
            SetV68,
            SetM32M35M37,
            SetM36,
            SetM38,
            WaitPmPressureUp1,

            DelayV25,
            TimeDelay0,
            TimeDelay1,
            TimeDelay2,
            TimeDelay3,
            TimeDelay4,
            TimeDelay5,
            TimeDelay6,
            TimeDelay7,
            TimeDelay8,
            TimeDelay9,
            TimeDelay10,
            TimeDelay11,
            TimeDelay12,
            TimeDelay13,
            TimeDelay14,
            TimeDelay15,
            TimeDelay16,
            TimeDelay20,
            TimeDelay21,
            TimeDelay22,

            Notify1,
            Notify2
        }

        private IoThrottleValve2 _IoThrottle;

        private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
        private int _rotationCloseTimeout;   //旋转停止超时
        private int _IoValueOpenCloseTimeout = 10; //开关超时时间
        private int _heatTimeOut = 5;             //Heat关闭等待Di反馈超时时间
        private double _pmPressureMaxDiff;          //蝶阀与目标压力的差值范围(认为调整到位了)
        private int _throttleTimeout;               //蝶阀调整到指定压力的超时时间
        private double _throttleFinalPressure = 300;//蝶阀最终调整对的压力

        private bool _psuHeatEnable = false;          //是否启用PSU 加热
        private int _psuHeatMode = 0;
        //private float _psuPowerRef = 0;
        private float _psuL1Ratio = 0;
        private float _psuL2Ratio = 0;
        private float _psuL3Ratio = 0;

        private bool _scrHeatEnable = false;          //是否启用SCR 加热
        private int _scrHeatMode = 0;
        //private float _scrPowerRef = 0;
        private float _scrL1Ratio = 0;
        private float _scrL2Ratio = 0;
        private float _scrL3Ratio = 0;

        private int _rotationSpeed = 60;
        private int _routineTimeOut;

        private Stopwatch _swTimer = new Stopwatch();
        private IoInterLock _pmInterLock;
        public PMToProcessIdleRoutine(ModuleName module, PMModule pm) : base(module, pm)
        {
            Module = module.ToString();
            Name = "ProcessIdle";
        }

        public override Result Start(params object[] objs)
        {
            Reset();
            _IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
            _pmInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");

            //if (!_pmInterLock.SetPMProcessIdleRunning(true, out string reason))
            //{
            //    EV.PostAlarmLog(Module, $"can not run ProcessIdle, {reason}");
            //    return Result.FAIL;
            //}

            /*
             * 2025-07-16
             * 执行ProcessIdle Routine需禁用MFC报警；报警只在保持ProcessIdle状态时生效。
             * 这个DO原本用来指示正在执行Routine，现在改为指示PM维持在ProcessIdle状态。
             * 只有维持在ProcessIdle状态时，才会启用MFC报警监测。
             *
             * PM状态机ProcessIdle状态进入和退出时分别设置DOProcessIdleRunning为true和false，因此进入当前Routine时，
             * DOProcessIdleRunning有可能为1，需要强制设置为0；当前Routine执行完毕后再将这个DO设置为1，表示已进入ProcessIdle状态。
             */
            if (!_pmInterLock.SetPMProcessIdleRunning(false, out var reason))
            {
                LOG.Error($"Failed to set DOProcessIdle to false due to {reason}");
            }

            if (!PmDevice.CheckHeadHeaterEnable(true))
            {
                EV.PostAlarmLog(Module, $"Should set HeatEnable on first!");
                return Result.FAIL;
            }

            //检查隔热罩状态
            if (PmDevice.ConfinementRing.RingServoError || PmDevice.ConfinementRing.RingIsBusy ||
                !PmDevice.ConfinementRing.RingServoOn)
            {
                EV.PostAlarmLog(Module, $"ConfinementRing State abnormal,please check");
                return Result.FAIL;
            }

            ////检查磁流体状态
            //if(!PmDevice._sicServo.ServoReady)
            //{
            //    EV.PostAlarmLog(Module, $"NAIS Servo State abnormal,please check");
            //    return Result.FAIL;
            //}

            _v72IsOpen = false;
            _checkPMPressureOver1000 = false;

            _rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
            _pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
            _throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");

            _rotationSpeed = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RotationSpeed");
            _throttleFinalPressure = SC.GetValue<double>($"PM.{Module}.ProcessIdle.FinalPressure");

            _psuHeatEnable = SC.GetValue<bool>($"PM.{Module}.ProcessIdle.PSUHeaterEnable");
            _psuHeatMode = SC.GetValue<int>($"PM.{Module}.ProcessIdle.PSUHeaterMode");
            _psuL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUInnerRatio");
            _psuL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUMiddleRatio");
            _psuL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUOuterRatio");


            _scrHeatEnable = SC.GetValue<bool>($"PM.{Module}.ProcessIdle.SCRHeaterEnable");
            _scrHeatMode = SC.GetValue<int>($"PM.{Module}.ProcessIdle.SCRHeaterMode");
            _scrL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRUpperRatio");
            _scrL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRMiddleRatio");
            _scrL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRLowerRatio");

            _routineTimeOut = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RoutineTimeOut");

            _finalOpen = false;
            _isTvOpen = false;

            currentPressureUpOrDown = PressureUpOrDown.None;
            _swTimer.Restart();
            Notify("Start");
            return Result.RUN;
        }


        public override Result Monitor()
        {
            try
            {
                CheckRoutineTimeOut();

                //关闭V76,打开V75
                SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);

                //2、 旋转停止，加热停止（根据配置，配置加热就不需要停止加热，没有配置加热时停止加热） 。
                //SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
                SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);

                //3、 打开 V31（H2.Supply）、 V32(Ar.Supply） 。
                SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);

                //4、 打开 V35(H2N2.Line1)、 V36(H2N2.Line2)，关闭 B/C/E/F/H/KValves,打开 D/G Valves。
                SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
                SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);

                //5、 M1-M17 设定为 default 值，所有 PC 设定为 default 值(PC1-PC9)。
                SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.M1to17);
                SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);

                //M1-M16设定为default值(M2、M9、M15除外)
                SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
                SetMfcToDefaultByGroup((int)RoutineStep.SetM17M18, MfcGroupName.M17M18, 0);

                //6、 M18-M40（除 M30\M34\M39） MFC 5s ramp 到 0。
                SetMfcByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18to40No303439, 0, 5);

                //7、 打开 EPV2。
                SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
                TimeDelay((int)RoutineStep.TimeDelay1, 3);

                //8 、打 开 V87（ SHPurge.Final ）、 V88（ OuterGas.Final）、 V89（ InnerGas.Final ）、 V90（MiddleGas.Final）、 V91（OpticPurge.Final）、 V97（CarryGas.Final）；
                SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);

                //9、 M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ；
                SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);

                //10、打开 V92（GasRingPurge.Final）、 V93（ChamberPurge.Final）、 V95（ConfinementRing.Final）；等待 3S
                SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout);
                TimeDelay((int)RoutineStep.TimeDelay2, 3);

                //11、 M32、 M35、 M37 依次设定 3S ramp 到 default 值 ； 等待 3S，打开 V68（ChamBody.N2.Purge）
                SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 3);
                SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);

                //12、打开 V94（RotationUpPurge.Final）、 M36 设定 5S ramp 到 default 值；等待 3S，打开V96（HeaterWF.Final）； M38 依次设定 5S ramp 到 default 值 ；
                SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout);
                SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 5);
                TimeDelay((int)RoutineStep.TimeDelay3, 3);
                SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout);
                SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 5);
                TimeDelay((int)RoutineStep.TimeDelay4, 3);

                //13、打开 J Valves ； 设置 M18-M26 3s ramp 到 default 值。
                SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
                SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM26, MfcGroupName.M18toM26, 3);

                //14、 打开 TV enable, 压力模式，伺服压力默认设定为 1050mbar；
                SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5);
                SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
                SetThrottleToTargetAndNoWait((int)RoutineStep.SetTV, _IoThrottle, 1050);

                //15、打开 V72(GasBox.Vent.Pump） 关闭 V25(GasBox.Vent.Bypass)， 反应腔压力伺服到300mbar（可配置）
                SetIoValueByGroup((int)RoutineStep.SetV72, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout);
                TimeDelay((int)RoutineStep.TimeDelay5, 1);
                SetIoValueByGroup((int)RoutineStep.SetV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout);
                SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing);
                SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _throttleFinalPressure);
                WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.SetTVto300, _IoThrottle, _throttleFinalPressure, _pmPressureMaxDiff, _throttleTimeout);

                //16、设定转速（可配置）
                EnableRotation((int)RoutineStep.EnableRotation, 5);
                SetRotationValveAndNoWait((int)RoutineStep.SetRotation1, _rotationSpeed);

                //17、加热使能（PSU 和 SCR）（可配置）
                if (_psuHeatEnable)
                {
                    //打开PSU加热
                    SetPSUEnable((int)RoutineStep.EnableTC1, true, 5);
                    SetPSUHeatMode((int)RoutineStep.SetTC1Mode, _psuHeatMode);
                    TimeDelay((int)RoutineStep.TimeDelay6, 1);
                    SetPSUHeatRatio((int)RoutineStep.SetTC1Ratio, _psuL1Ratio, _psuL2Ratio, _psuL3Ratio);
                }
                else
                {
                    //关闭PSU加热
                    SetPSUHeatRatio((int)RoutineStep.SetTC1RatioTo0, 0, 0, 0);
                    SetPSUEnable((int)RoutineStep.CloseTC1, false, 5);
                }

                if (_scrHeatEnable)
                {
                    //打开SCR加热
                    SetSCRReset((int)RoutineStep.SetScrReset);
                    TimeDelay((int)RoutineStep.TimeDelay7, 1);

                    SetSCREnable((int)RoutineStep.EnableTC2, true, 5);
                    SetSCRHeatMode((int)RoutineStep.SetTC2Mode, _scrHeatMode);
                    TimeDelay((int)RoutineStep.TimeDelay8, 1);
                    SetSCRHeatRatio((int)RoutineStep.SetTC2Ratio, _scrL1Ratio, _scrL2Ratio, _scrL3Ratio);
                }
                else
                {
                    //关闭SCR加热
                    SetSCRHeatRatio((int)RoutineStep.SetTC2RatioTo0, 0, 0, 0);
                    SetSCREnable((int)RoutineStep.CloseTC2, false, 5);
                }

                WaitRotationValve((int)RoutineStep.WaitRotation1, _rotationSpeed, true, _rotationSpeed / 2);
            }

            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                return Result.FAIL;
            }

            // _pmInterLock.SetPMProcessIdleRunning(false, out string reason);
            if (!_pmInterLock.SetPMProcessIdleRunning(true, out string reason))
            {
                LOG.Error($"Failed to set DOProcessIdle to true due to {reason}");
            }


            Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
            _swTimer.Stop();

            return Result.DONE;
        }


        private void CheckRoutineTimeOut()
        {
            if (_routineTimeOut > 10)
            {
                if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
                {
                    Notify($"Routine TimeOut! over {_routineTimeOut} s");
                    throw (new RoutineFaildException());
                }
            }
        }

        public override void Abort()
        {
            _pmInterLock.SetPMProcessIdleRunning(false, out string reason);
            PmDevice._ioThrottleValve.StopRamp();
            PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
            PmDevice.SetHeaterStopRamp();
            PmDevice.SetRotationStopRamp();
            PmDevice.SetRotationServo(0, 0);

            base.Abort();
        }
    }
}