MoS2/App/Modules/SicModules/PMs/Routines/PMPurgeRoutine.cs

531 lines
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs;
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using SicModules.PMs.Routines.Base;
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using System.Collections.Generic;
using System.Diagnostics;
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namespace SicModules.PMs.Routines
{
public class PMPurgeRoutine : PMBaseRoutine
{
private enum RoutineStep
{
RotationEnable,
HeatEnable,
VentPumpClose,
ArSupply,
SetGroupA,
SetGroupB,
SetGroupC,
SetGroupE,
SetGroupF,
SetGroupH,
SetGroupD,
SetGroupG,
SetGroupK,
SetMFCMode,
SetPCMode,
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SetM1toM17,
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SetM17M18,
SetPC,
SetGroupJ,
CloseGroupJ,
SetM291519to38,
SetGasOut,
SetTv,
SetGasIn1, //V68
OpenFinal1, //V91-96
SetMfcFinal1, //M32-38
SetMfc19to26,
SetTVCloseMode,
SetTvPositionToZero,
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WaitPressUpTo950,
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SetGasIn2,
SetGroupJOpen,
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SetM18toM40,
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SetM291519to26_1,
OpenFinal2,
IsOpenFinal1,
IsOpenFinal2,
IsCloseFinal1,
IsCloseFinal2,
SetMfcFinal2,
SetEPV1,
SetEPV2,
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SetEPV2_1,
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SetTvMode,
SetTVEnable_1,
SetTVEnable_2,
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SetTVPressMode,
SetTVPressMode2,
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SetTVPressMode1,
SetTv1,
WaitTv1,
SetTVPositionMode,
SetTVPositionMode_1,
SetTVPositionMax,
SetTVPositionMax_1,
SetTvOpen,
SetTvModeToPress,
SetTVtoCurrent,
RoutinePre,
SetPressureUp,
SetPressureDown,
WaitPressureDown,
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VentPumpOpen,
PressureToMax,
PressureToMin,
StartLoop,
EndLoop,
SetMfc28to31,
SetReactorPress,
CloseFinanl1,
CloseFinanl2,
CloseEPV2,
SetTVCloseMode1,
SetTVCloseMode2,
CLoseTvvvv,
CLoseTV1,
CLoseTV2,
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FirstWaitPressureUp,
FirstSetDefault_M18toM40,
FirstSet0_M18toM40,
FirstSetEPV2_1,
FirstSetEPV2_2,
FirstSetTv1,
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FirstSetTVCloseMode,
FirstSetTvPositionToZero,
FirstSetEPV2,
FirstSetTVEnable_1,
FirstSetTVPressMode,
FirstWaitTv1,
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SetEPV2_3,
CLoseEPV1,
CheckPM1000,
WaitPressUpTo1000,
WaitPressUpTo1020,
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LoopSetDefault_M18toM40,
LoopSetEPV2_1,
LoopWaitPressureUp,
LoopSetEPV2_2,
LoopSetTv1,
LoopSet0_M18toM40,
Loop2Set0_M18toM40,
LoopWaitTv1,
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SetPressUpOrDown1,
SetPressUpOrDown2,
SetMfc28to40Special,
WaitPmPressureUp,
SetMfc27to40Default,
SetV75,
SetV76,
SetV31,
SetV32,
SetV35V36,
SetV65,
SetV751,
SetV761,
SetV103,
SetV105,
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Set0_M18toM40,
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SetM2toM40_1,
SetM2TOM40Default,
SetM18,
SetM18_1,
SetM18_2,
SetM18Default,
SetV92V93V95,
SetV94,
SetV96,
SetV68,
SetM32M35M37,
SetM36,
SetM38,
SetM36_1,
SetM38_1,
SetV111_1,
SetV111_2,
SetPC567Close,
SetPC567Mode,
SetPC567Default,
OpenEPV2,
WaitPressUpTo20,
SetMfc291519to38,
WaitPressUpTo0,
SetMfc291519to38ToDefault,
WaitPressDownTo20,
SetPmPressureTo20,
CloseMfcFinal1,
CloseMfcFinal2,
CloseMfc2915,
CheckFinal1Open,
SetGroupV25,
Mfc36,
SetM39,
CloseMfc1to16, CloseMfc2to26, CloseJ,
CheckTVOpen1,
CheckTVOpen2,
CheckEPV1Open1,
CheckEPV2Open1,
CheckEPV2Open2,
CloseM32M35M37,
CloseM36,
CloseM38,
CloseGasIn1,
WaitPmPressureUp1,
TimeDelay1,
TimeDelay2,
TimeDelay3,
TimeDelay4,
TimeDelay5,
TimeDelay6,
TimeDelay7,
TimeDelay8,
TimeDelay9,
TimeDelay10,
TimeDelay11,
TimeDelay12,
TimeDelay14,
TimeDelay18,
TimeDelay19,
TimeDelay20,
TimeDelay21,
TimeDelay22,
Notify1,
Notify2
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,FinishSetM1toM17,
FinishSetDefault_M18toM40,
FinishSetTVCloseMode2,
FinishCLoseTV2,
FinishSetEPV2_3,
FinishWaitPressUpTo1020,
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FinishSet0_M2M9M15M19_M26,
LoopSetTVCloseMode,
LoopSetTvPositionToZero,
LoopSetTVEnable_1,
LoopSetTVPressMode,
SetMfcFinal2gongyi
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}
private ModuleName moduleName;
private PMModule _pmModule;
private IoThrottleValve2 _IoThrottle;
private IoInterLock _pmIoInterLock;
private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
private int _rotationCloseTimeout; //旋转停止超时
private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
private int _EPV2OpenTimeDelay = 10;
private double _ventBasePressure;
private double _pumpBasePressure;
private int _pressureLoopCount; //Loop次数
private int _pressureMinDelay;
private int _pressureMaxDelay;
private int _pressureMinTimeout;
private int _pressureMaxTimeout;
private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间
private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
private int _ventTimeout;
private int _pumpTimeout;
private int _EPV12TimeSapn = 10;
private int _waitPressureTimeout = 600; //等待腔体压力上升到950的超时时间
private bool _needFinalValveOpen = false;
private Stopwatch _swTimer = new Stopwatch();
public PMPurgeRoutine(ModuleName module, PMModule pm) : base(module, pm)
{
moduleName = module;
_pmModule = pm;
Name = "Purge";
_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
}
public override Result Start(params object[] objs)
{
Reset();
_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
_ventTimeout = SC.GetValue<int>($"PM.{Module}.Purge.VentTimeout");
_pumpTimeout = SC.GetValue<int>($"PM.{Module}.Purge.PumpTimeout");
_pressureLoopCount = SC.GetValue<int>($"PM.{Module}.Purge.CyclePurgeCount");
_pumpBasePressure = SC.GetValue<double>($"PM.{Module}.Purge.PumpBasePressure");
_pressureMinDelay = SC.GetValue<int>($"PM.{Module}.Purge.PumpDelayTime");
_pressureMinTimeout = SC.GetValue<int>($"PM.{Module}.Purge.PumpTimeout");
_ventBasePressure = SC.GetValue<double>($"PM.{Module}.Purge.VentBasePressure");
_pressureMaxDelay = SC.GetValue<int>($"PM.{Module}.Purge.VentDelayTime");
_pressureMaxTimeout = SC.GetValue<int>($"PM.{Module}.Purge.VentTimeout");
_waitPressureTimeout = SC.GetValue<int>($"PM.{Module}.Purge.WaitPressureTimeout");
_needFinalValveOpen = SC.GetValue<bool>($"PM.{Module}.Purge.NeedFinalValveOpen");
//Clean succeed 清掉
_pmIoInterLock.DoLidCloseRoutineSucceed = false;
_pmIoInterLock.DoLidOpenRoutineSucceed = false;
if (!_pmIoInterLock.SetPMPurgeRoutineRunning(true, out string reason))
{
EV.PostAlarmLog(Module, $"can not Purge,{reason}");
return Result.FAIL;
}
currentPressureUpOrDown = PressureUpOrDown.None;
_finalOpen = false;
_swTimer.Restart();
Notify($"Start LoopCount:{_pressureLoopCount}");
return Result.RUN;
}
public override Result Monitor()
{
try
{
//CheckRoutineTimeOut();
//关闭V76,打开V75
SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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//2、 旋转停止,加热停止
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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//3、 关闭 V72(GasBox.Vent.Pump 打开 V25(GasBox.Vent.Bypass)。
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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//4、 打开 V31H2.Supply、 V32(Ar.Supply
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//5、 打开 V35(H2N2.Line1)、 V36(H2N2.Line2),关闭 B/C/E/F/H/KValves,打开 D/G Valves 打开 J valve。
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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//6、 M1-M17 设定为 default 值,所有 PC 设定为 default 值(PC1-PC9) M18-M40除M30\M34\M39 MFC 3s ramp 到 default 值。
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 0);
SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 3);
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//7、打开 EPV2等待 3s, 打开 TV enable, 压力模式,伺服压力默认设定为 0mbar
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
TimeDelay((int)RoutineStep.TimeDelay1, 3);
SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable_1, _IoThrottle, 5);
SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure);
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//8、当蝶阀设定值 ramp 到 0 后,将 M18-M40除 M30\M34\M39 MFC 3s ramp 到 0
SetMfcByGroup((int)RoutineStep.Set0_M18toM40, MfcGroupName.M18toM40No303439, 0, 3);
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//9、等待腔体压力到 Pump Base Pressure可配置蝶阀改为位置模式开度设定 100 %
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WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pumpBasePressure, _throttleTimeout);
TimeDelay((int)RoutineStep.TimeDelay2, 3);
SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
TimeDelay((int)RoutineStep.TimeDelay11, 3);
SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);
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//10、 M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2gongyi, MfcGroupName.M18toM26, 3);
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//11、 打 开 V87 SHPurge.Final、 V88 OuterGas.Final、 V89 InnerGas.Final )、 V90MiddleGas.Final、 V91OpticPurge.Final、 V97CarryGas.Final
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SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
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//12、 打开 V68ChamBody.N2.Purge
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SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
TimeDelay((int)RoutineStep.TimeDelay3, 1);
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//13、 M32、 M35、 M36、 M37、 M38 依次设定 3S ramp 到 default 值
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SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 1);
SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 1);
SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 1);
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//14、打开 V92GasRingPurge.Final、 V93ChamberPurge.Final、 V95ConfinementRing.Final
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//关闭蝶阀, 再关闭 EPV2,等待 950打开 V94RotationUpPurge.Final、 等待 3S打开 V96HeaterWF.Final
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SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout);
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SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8);
SetIoValueByGroup((int)RoutineStep.SetEPV2_1, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 950, 600);
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SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout);
TimeDelay((int)RoutineStep.TimeDelay4, 3);
SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout);
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//M18-M40除 M30\M34\M39 MFC 3s ramp 到 default 值。
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//关闭蝶阀, 再关闭 EPV2等待压力达到设定值压力达到后打开 EPV2,打开 TV enable, 压力模式,伺服压力默认设定为 0mbar;
//M18 - M40除 M30\M34\M39 MFC 5s ramp 到 0。
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//伺服压力到设定值 0可配置
SetMfcToDefaultByGroup((int)RoutineStep.FirstSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3);
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SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping);
SetThrottleToCloseMode((int)RoutineStep.FirstSetTVCloseMode, _IoThrottle, 8);
SetThrottleDisable((int)RoutineStep.FirstSetTvPositionToZero, _IoThrottle, 8);
SetIoValueByGroup((int)RoutineStep.FirstSetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.FirstWaitPressureUp, _IoThrottle, _ventBasePressure, _ventTimeout);
SetIoValueByGroup((int)RoutineStep.FirstSetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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SetThrottleEnableAndWait((int)RoutineStep.FirstSetTVEnable_1, _IoThrottle, 5);
SetThrottleToPressModeAndWait((int)RoutineStep.FirstSetTVPressMode, _IoThrottle, 5);
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SetThrottleToTargetAndNoWait((int)RoutineStep.FirstSetTv1, _IoThrottle, _pumpBasePressure);
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SetMfcByGroup((int)RoutineStep.FirstSet0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5);
WaitChamberPressDownTo((int)RoutineStep.FirstWaitTv1, _pumpBasePressure, _pumpTimeout);
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//循环开始
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Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
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//M18 - M40除 M30\M34\M39 MFC 3s ramp 到 default 值。
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//关闭蝶阀, 再关闭 EPV2等待压力达到设定值压力达到后打开 EPV2
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//M18 - M40除 M30\M34\M39 MFC 5s ramp 到 0。
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//打开 TV enable, 压力模式,伺服压力默认设定为 0mbar;
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//M18 - M40除 M30\M34\M39 MFC5s ramp 到 0。
//等待压力到达 0可配置
SetMfcToDefaultByGroup((int)RoutineStep.LoopSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3);
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SetThrottleToCloseMode((int)RoutineStep.LoopSetTVCloseMode, _IoThrottle, 8);
SetThrottleDisable((int)RoutineStep.LoopSetTvPositionToZero, _IoThrottle, 8);
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SetIoValueByGroup((int)RoutineStep.LoopSetEPV2_1, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.LoopWaitPressureUp, _IoThrottle, _ventBasePressure, _ventTimeout);
SetIoValueByGroup((int)RoutineStep.LoopSetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
SetMfcByGroup((int)RoutineStep.LoopSet0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5);
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SetThrottleEnableAndWait((int)RoutineStep.LoopSetTVEnable_1, _IoThrottle, 5);
SetThrottleToPressModeAndWait((int)RoutineStep.LoopSetTVPressMode, _IoThrottle, 5);
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SetThrottleToTargetAndNoWait((int)RoutineStep.LoopSetTv1, _IoThrottle, _pumpBasePressure);
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SetMfcByGroup((int)RoutineStep.Loop2Set0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5);
WaitChamberPressDownTo((int)RoutineStep.LoopWaitTv1, _pumpBasePressure, _pumpTimeout);
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EndLoop((int)RoutineStep.EndLoop);
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//设置 M1-M17 3s ramp 到 default M18 - M40除 M30\M34\M39 MFC 3s ramp到 default 值。
//关闭蝶阀,再关闭 EPV2 等待压力到达 1020。
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//M2,M9,M15,M19-M26 3s ramp 到0
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SetMfcToDefaultByGroup((int)RoutineStep.FinishSetM1toM17, MfcGroupName.M1toM17, 3);
SetMfcToDefaultByGroup((int)RoutineStep.FinishSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3);
SetThrottleToCloseMode((int)RoutineStep.FinishSetTVCloseMode2, _IoThrottle, 8);
SetThrottleDisable((int)RoutineStep.FinishCLoseTV2, _IoThrottle, 8);
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TimeDelay((int)RoutineStep.TimeDelay10, 1);
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SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping);
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SetIoValueByGroup((int)RoutineStep.FinishSetEPV2_3, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to 1020 mbar!");
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.FinishWaitPressUpTo1020, _IoThrottle, 1200, _ventTimeout);
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SetMfcByGroup((int)RoutineStep.FinishSet0_M2M9M15M19_M26, MfcGroupName.M2M9M15M19_M26, 0, 3);
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}
catch (RoutineBreakException)
{
return Result.RUN;
}
catch (RoutineFaildException)
{
return Result.FAIL;
}
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
_swTimer.Stop();
SetRoutineSuccessedDo();
return Result.DONE;
}
public override void Abort()
{
_pmIoInterLock.DoLidOpenRoutineRunning = false;
PmDevice._ioThrottleValve.StopRamp();
PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
PmDevice.SetRotationServo(0, 0);
base.Abort();
}
private void SetRoutineSuccessedDo()
{
_pmIoInterLock.DoLidOpenRoutineRunning = false;
_pmIoInterLock.SetLidOpenRoutineSucceed(true, out string reason);
_pmIoInterLock.DoLidCloseRoutineSucceed = false;
}
//private void CheckRoutineTimeOut()
//{
// if (_routineTimeOut > 10)
// {
// if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
// {
// EV.PostAlarmLog(Module,$"Routine TimeOut! over {_routineTimeOut} s");
// throw (new RoutineFaildException());
// }
// }
//}
}
}