1根据最新气路重新调整气动阀配置
2修改MFC io配置内容
This commit is contained in:
hanqiangqiang
parent
a26b4ac47d
commit
1a23654a2a
@ -474,41 +474,41 @@
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@ -549,41 +549,41 @@
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@ -658,41 +658,41 @@
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|
||||
<AO_ITEM Index="40" Name="AO_M9" BufferOffset="40" Addr="40" Description="" />
|
||||
<AO_ITEM Index="41" Name="AO_M10" BufferOffset="41" Addr="41" Description="" />
|
||||
<AO_ITEM Index="42" Name="AO_M11" BufferOffset="42" Addr="42" Description="" />
|
||||
<AO_ITEM Index="43" Name="AO_M12" BufferOffset="43" Addr="43" Description="" />
|
||||
<AO_ITEM Index="44" Name="AO_M13" BufferOffset="44" Addr="44" Description="" />
|
||||
<AO_ITEM Index="45" Name="AO_M14" BufferOffset="45" Addr="45" Description="" />
|
||||
<AO_ITEM Index="46" Name="AO_M15" BufferOffset="46" Addr="46" Description="" />
|
||||
<AO_ITEM Index="47" Name="AO_M16" BufferOffset="47" Addr="47" Description="" />
|
||||
<AO_ITEM Index="48" Name="AO_M17" BufferOffset="48" Addr="48" Description="" />
|
||||
<AO_ITEM Index="49" Name="AO_M18" BufferOffset="49" Addr="49" Description="" />
|
||||
<AO_ITEM Index="50" Name="AO_M19" BufferOffset="50" Addr="50" Description="" />
|
||||
<AO_ITEM Index="51" Name="AO_M20" BufferOffset="51" Addr="51" Description="" />
|
||||
<AO_ITEM Index="52" Name="AO_M21" BufferOffset="52" Addr="52" Description="" />
|
||||
<AO_ITEM Index="53" Name="AO_M22" BufferOffset="53" Addr="53" Description="" />
|
||||
<AO_ITEM Index="54" Name="AO_M23" BufferOffset="54" Addr="54" Description="" />
|
||||
<AO_ITEM Index="55" Name="AO_M24" BufferOffset="55" Addr="55" Description="" />
|
||||
<AO_ITEM Index="56" Name="AO_M25" BufferOffset="56" Addr="56" Description="" />
|
||||
<AO_ITEM Index="57" Name="AO_M26" BufferOffset="57" Addr="57" Description="" />
|
||||
<AO_ITEM Index="58" Name="AO_M27" BufferOffset="58" Addr="58" Description="" />
|
||||
<AO_ITEM Index="59" Name="AO_M28" BufferOffset="59" Addr="59" Description="" />
|
||||
<AO_ITEM Index="60" Name="AO_M29" BufferOffset="60" Addr="60" Description="" />
|
||||
<AO_ITEM Index="62" Name="AO_M31" BufferOffset="62" Addr="62" Description="" />
|
||||
<AO_ITEM Index="63" Name="AO_M32" BufferOffset="63" Addr="63" Description="" />
|
||||
<AO_ITEM Index="64" Name="AO_M33" BufferOffset="64" Addr="64" Description="" />
|
||||
<AO_ITEM Index="66" Name="AO_M35" BufferOffset="66" Addr="66" Description="" />
|
||||
<AO_ITEM Index="67" Name="AO_M36" BufferOffset="67" Addr="67" Description="" />
|
||||
<AO_ITEM Index="68" Name="AO_M37" BufferOffset="68" Addr="68" Description="" />
|
||||
<AO_ITEM Index="69" Name="AO_M38" BufferOffset="69" Addr="69" Description="" />
|
||||
<AO_ITEM Index="71" Name="AO_M40" BufferOffset="71" Addr="71" Description="" />
|
||||
<AO_ITEM Index="72" Name="AO_PT1OFFSET" BufferOffset="72" Addr="72" Description="" />
|
||||
<AO_ITEM Index="73" Name="AO_PT1K" BufferOffset="73" Addr="73" Description="" />
|
||||
<AO_ITEM Index="74" Name="AO_PT2OFFSET" BufferOffset="74" Addr="74" Description="" />
|
||||
@ -736,41 +736,41 @@
|
||||
<AO_ITEM Index="128" Name="AO_SetpointPositon" BufferOffset="128" Addr="128" Description="" />
|
||||
<AO_ITEM Index="129" Name="AO_SetpointPressure" BufferOffset="129" Addr="129" Description="" />
|
||||
<AO_ITEM Index="130" Name="AO_HeartBeat" BufferOffset="130" Addr="130" Description="" />
|
||||
<AO_ITEM Index="131" Name="AO_MFC1VentGasSM" BufferOffset="131" Addr="131" Description="" />
|
||||
<AO_ITEM Index="133" Name="AO_MFC3O2DiluteCarrierSM" BufferOffset="133" Addr="133" Description="" />
|
||||
<AO_ITEM Index="134" Name="AO_MFC4O2SourceSM" BufferOffset="134" Addr="134" Description="" />
|
||||
<AO_ITEM Index="136" Name="AO_MFC6O2DilutedSM" BufferOffset="136" Addr="136" Description="" />
|
||||
<AO_ITEM Index="137" Name="AO_MFC7WCO6CarrierSM" BufferOffset="137" Addr="137" Description="" />
|
||||
<AO_ITEM Index="138" Name="AO_MFC8WCO6PushSM" BufferOffset="138" Addr="138" Description="" />
|
||||
<AO_ITEM Index="139" Name="AO_MFC9MoCO6CarrierSM" BufferOffset="139" Addr="139" Description="" />
|
||||
<AO_ITEM Index="140" Name="AO_MFC10MoCO6PushSM" BufferOffset="140" Addr="140" Description="" />
|
||||
<AO_ITEM Index="141" Name="AO_MFC11CS2CarrierSM" BufferOffset="141" Addr="141" Description="" />
|
||||
<AO_ITEM Index="142" Name="AO_MFC12CS2PushSM" BufferOffset="142" Addr="142" Description="" />
|
||||
<AO_ITEM Index="143" Name="AO_MFC13H2SSourceSM" BufferOffset="143" Addr="143" Description="" />
|
||||
<AO_ITEM Index="144" Name="AO_MFC14H2SeSourceSM" BufferOffset="144" Addr="144" Description="" />
|
||||
<AO_ITEM Index="145" Name="AO_MFC15SO2SourceSM" BufferOffset="145" Addr="145" Description="" />
|
||||
<AO_ITEM Index="146" Name="AO_MFC16MoReserveCarrierSM" BufferOffset="146" Addr="146" Description="" />
|
||||
<AO_ITEM Index="147" Name="AO_MFC17MoReservePushSM" BufferOffset="147" Addr="147" Description="" />
|
||||
<AO_ITEM Index="148" Name="AO_MFC18MOWOuterSM" BufferOffset="148" Addr="148" Description="" />
|
||||
<AO_ITEM Index="149" Name="AO_MFC19MOWMiddleSM" BufferOffset="149" Addr="149" Description="" />
|
||||
<AO_ITEM Index="150" Name="AO_MFC20MOWInnerSM" BufferOffset="150" Addr="150" Description="" />
|
||||
<AO_ITEM Index="151" Name="AO_MFC21CS2H2SSeOuterSM" BufferOffset="151" Addr="151" Description="" />
|
||||
<AO_ITEM Index="152" Name="AO_MFC22CS2H2SSeMiddleSM" BufferOffset="152" Addr="152" Description="" />
|
||||
<AO_ITEM Index="153" Name="AO_MFC23CS2H2SSeInnerSM" BufferOffset="153" Addr="153" Description="" />
|
||||
<AO_ITEM Index="154" Name="AO_MFC24O2SO2OuterSM" BufferOffset="154" Addr="154" Description="" />
|
||||
<AO_ITEM Index="155" Name="AO_MFC25O2SO2MiddleSM" BufferOffset="155" Addr="155" Description="" />
|
||||
<AO_ITEM Index="156" Name="AO_MFC26O2SO2InnerSM" BufferOffset="156" Addr="156" Description="" />
|
||||
<AO_ITEM Index="157" Name="AO_MFC27ShowerheadPurgeSM" BufferOffset="157" Addr="157" Description="" />
|
||||
<AO_ITEM Index="158" Name="AO_MFC28OuterPushGasSM" BufferOffset="158" Addr="158" Description="" />
|
||||
<AO_ITEM Index="159" Name="AO_MFC29InnerPushGasSM" BufferOffset="159" Addr="159" Description="" />
|
||||
<AO_ITEM Index="161" Name="AO_MFC31MiddlePushGasSM" BufferOffset="161" Addr="161" Description="" />
|
||||
<AO_ITEM Index="162" Name="AO_MFC32GasRingPurgeSM" BufferOffset="162" Addr="162" Description="" />
|
||||
<AO_ITEM Index="163" Name="AO_MFC33OpticPurgeSM" BufferOffset="163" Addr="163" Description="" />
|
||||
<AO_ITEM Index="165" Name="AO_MFC35ChamberPurgeSM" BufferOffset="165" Addr="165" Description="" />
|
||||
<AO_ITEM Index="166" Name="AO_MFC36RotationPurgeSM" BufferOffset="166" Addr="166" Description="" />
|
||||
<AO_ITEM Index="167" Name="AO_MFC37ShutterPurgeSM" BufferOffset="167" Addr="167" Description="" />
|
||||
<AO_ITEM Index="168" Name="AO_MFC38HeaterWFPurgeSM" BufferOffset="168" Addr="168" Description="" />
|
||||
<AO_ITEM Index="170" Name="AO_MFC40CarryGasSM" BufferOffset="170" Addr="170" Description="" />
|
||||
<AO_ITEM Index="131" Name="AO_M1CtrlMode" BufferOffset="131" Addr="131" Description="" />
|
||||
<AO_ITEM Index="133" Name="AO_M3CtrlMode" BufferOffset="133" Addr="133" Description="" />
|
||||
<AO_ITEM Index="134" Name="AO_M4CtrlMode" BufferOffset="134" Addr="134" Description="" />
|
||||
<AO_ITEM Index="136" Name="AO_M6CtrlMode" BufferOffset="136" Addr="136" Description="" />
|
||||
<AO_ITEM Index="137" Name="AO_M7CtrlMode" BufferOffset="137" Addr="137" Description="" />
|
||||
<AO_ITEM Index="138" Name="AO_M8CtrlMode" BufferOffset="138" Addr="138" Description="" />
|
||||
<AO_ITEM Index="139" Name="AO_M9CtrlMode" BufferOffset="139" Addr="139" Description="" />
|
||||
<AO_ITEM Index="140" Name="AO_M10CtrlMode" BufferOffset="140" Addr="140" Description="" />
|
||||
<AO_ITEM Index="141" Name="AO_M11CtrlMode" BufferOffset="141" Addr="141" Description="" />
|
||||
<AO_ITEM Index="142" Name="AO_M12CtrlMode" BufferOffset="142" Addr="142" Description="" />
|
||||
<AO_ITEM Index="143" Name="AO_M13CtrlMode" BufferOffset="143" Addr="143" Description="" />
|
||||
<AO_ITEM Index="144" Name="AO_M14CtrlMode" BufferOffset="144" Addr="144" Description="" />
|
||||
<AO_ITEM Index="145" Name="AO_M15CtrlMode" BufferOffset="145" Addr="145" Description="" />
|
||||
<AO_ITEM Index="146" Name="AO_M16CtrlMode" BufferOffset="146" Addr="146" Description="" />
|
||||
<AO_ITEM Index="147" Name="AO_M17CtrlMode" BufferOffset="147" Addr="147" Description="" />
|
||||
<AO_ITEM Index="148" Name="AO_M18CtrlMode" BufferOffset="148" Addr="148" Description="" />
|
||||
<AO_ITEM Index="149" Name="AO_M19CtrlMode" BufferOffset="149" Addr="149" Description="" />
|
||||
<AO_ITEM Index="150" Name="AO_M20CtrlMode" BufferOffset="150" Addr="150" Description="" />
|
||||
<AO_ITEM Index="151" Name="AO_M21CtrlMode" BufferOffset="151" Addr="151" Description="" />
|
||||
<AO_ITEM Index="152" Name="AO_M22CtrlMode" BufferOffset="152" Addr="152" Description="" />
|
||||
<AO_ITEM Index="153" Name="AO_M23CtrlMode" BufferOffset="153" Addr="153" Description="" />
|
||||
<AO_ITEM Index="154" Name="AO_M24CtrlMode" BufferOffset="154" Addr="154" Description="" />
|
||||
<AO_ITEM Index="155" Name="AO_M25CtrlMode" BufferOffset="155" Addr="155" Description="" />
|
||||
<AO_ITEM Index="156" Name="AO_M26CtrlMode" BufferOffset="156" Addr="156" Description="" />
|
||||
<AO_ITEM Index="157" Name="AO_M27CtrlMode" BufferOffset="157" Addr="157" Description="" />
|
||||
<AO_ITEM Index="158" Name="AO_M28CtrlMode" BufferOffset="158" Addr="158" Description="" />
|
||||
<AO_ITEM Index="159" Name="AO_M29CtrlMode" BufferOffset="159" Addr="159" Description="" />
|
||||
<AO_ITEM Index="161" Name="AO_M31CtrlMode" BufferOffset="161" Addr="161" Description="" />
|
||||
<AO_ITEM Index="162" Name="AO_M32CtrlMode" BufferOffset="162" Addr="162" Description="" />
|
||||
<AO_ITEM Index="163" Name="AO_M33CtrlMode" BufferOffset="163" Addr="163" Description="" />
|
||||
<AO_ITEM Index="165" Name="AO_M35CtrlMode" BufferOffset="165" Addr="165" Description="" />
|
||||
<AO_ITEM Index="166" Name="AO_M36CtrlMode" BufferOffset="166" Addr="166" Description="" />
|
||||
<AO_ITEM Index="167" Name="AO_M37CtrlMode" BufferOffset="167" Addr="167" Description="" />
|
||||
<AO_ITEM Index="168" Name="AO_M38CtrlMode" BufferOffset="168" Addr="168" Description="" />
|
||||
<AO_ITEM Index="170" Name="AO_M40CtrlMode" BufferOffset="170" Addr="170" Description="" />
|
||||
<AO_ITEM Index="171" Name="AO_PC1O2DiluteVentSM" BufferOffset="171" Addr="171" Description="" />
|
||||
<AO_ITEM Index="172" Name="AO_PC2WCO6PressureSM" BufferOffset="172" Addr="172" Description="" />
|
||||
<AO_ITEM Index="173" Name="AO_PC3CS2PressureSM" BufferOffset="173" Addr="173" Description="" />
|
||||
|
||||
@ -93,9 +93,9 @@
|
||||
<IoValve id="V37" display="V37" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V37s" display="V37s" schematicId="V37s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V39" display="V39" schematicId="V39" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V39s" display="V39s" schematicId="V39s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V39s" display="V39s" schematicId="V39s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V40" display="V40" schematicId="V40" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V40s" display="V40s" schematicId="V40s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V40s" display="V40s" schematicId="V40s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V41" display="V41" schematicId="V41" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6RunFB(V41)" doOpen="DO_WCO6Run(V41)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V42" display="V42" schematicId="V42" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6VentFB(V42)" doOpen="DO_WCO6Vent(V42)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V43" display="V43" schematicId="V43" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
|
||||
@ -104,7 +104,7 @@
|
||||
<IoValve id="V46" display="V46" schematicId="V46" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V46s" display="V46s" schematicId="V46s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V47" display="V47" schematicId="V47" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V47s" display="V47s" schematicId="V47s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V47s" display="V47s" schematicId="V47s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V48" display="V48" schematicId="V48" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V48s" display="V48s" schematicId="V48s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V49" display="V49" schematicId="V49" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2BypassFB(V49)" doOpen="DO_CS2Bypass(V49)" diCloseSensor="" diOpenSensor="" />
|
||||
@ -115,9 +115,9 @@
|
||||
<IoValve id="V52" display="V52" schematicId="V52" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V52s" display="V52s" schematicId="V52s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V53" display="V53" schematicId="V53" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2RunVentFB(V53)" doOpen="DO_CS2RunVent(V53)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V53s" display="V53s" schematicId="V53s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2RunVentFB(V53)" doOpen="DO_CS2RunVent(V53)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V53s" display="V53s" schematicId="V53s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2RunVentFB(V53)" doOpen="DO_CS2RunVent(V53)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V54" display="V54" schematicId="V54" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V54s" display="V54s" schematicId="V54s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V54s" display="V54s" schematicId="V54s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V55" display="V55" schematicId="V55" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeRunFB(V55)" doOpen="DO_H2SeRun(V55)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V56" display="V56" schematicId="V56" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeVentFB(V56)" doOpen="DO_H2SeVent(V56)" diCloseSensor="" diOpenSensor="" />
|
||||
<IoValve id="V58" display="V58" schematicId="V58" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
|
||||
|
||||
@ -474,41 +474,41 @@
|
||||
<AI_ITEM Index="23" Name="AI_HeatoutsidePanel" BufferOffset="23" Addr="23" Description="" />
|
||||
<AI_ITEM Index="24" Name="AI_HeatoutsideSH" BufferOffset="24" Addr="24" Description="" />
|
||||
<AI_ITEM Index="25" Name="AI_HeatLeakBypass" BufferOffset="25" Addr="25" Description="" />
|
||||
<AI_ITEM Index="32" Name="AI_MFC1VentGasCV" BufferOffset="32" Addr="32" Description="" />
|
||||
<AI_ITEM Index="34" Name="AI_MFC3O2DiluteCarrierCV" BufferOffset="34" Addr="34" Description="" />
|
||||
<AI_ITEM Index="35" Name="AI_MFC4O2SourceCV" BufferOffset="35" Addr="35" Description="" />
|
||||
<AI_ITEM Index="37" Name="AI_MFC6O2DilutedCV" BufferOffset="37" Addr="37" Description="" />
|
||||
<AI_ITEM Index="38" Name="AI_MFC7WCO6CarrierCV" BufferOffset="38" Addr="38" Description="" />
|
||||
<AI_ITEM Index="39" Name="AI_MFC8WCO6PushCV" BufferOffset="39" Addr="39" Description="" />
|
||||
<AI_ITEM Index="40" Name="AI_MFC9MoCO6CarrierCV" BufferOffset="40" Addr="40" Description="" />
|
||||
<AI_ITEM Index="41" Name="AI_MFC10MoCO6PushCV" BufferOffset="41" Addr="41" Description="" />
|
||||
<AI_ITEM Index="42" Name="AI_MFC11CS2CarrierCV" BufferOffset="42" Addr="42" Description="" />
|
||||
<AI_ITEM Index="43" Name="AI_MFC12CS2PushCV" BufferOffset="43" Addr="43" Description="" />
|
||||
<AI_ITEM Index="44" Name="AI_MFC13H2SSourceCV" BufferOffset="44" Addr="44" Description="" />
|
||||
<AI_ITEM Index="45" Name="AI_MFC14H2SeSourceCV" BufferOffset="45" Addr="45" Description="" />
|
||||
<AI_ITEM Index="46" Name="AI_MFC15SO2SourceCV" BufferOffset="46" Addr="46" Description="" />
|
||||
<AI_ITEM Index="47" Name="AI_MFC16MoReserveCarrierCV" BufferOffset="47" Addr="47" Description="" />
|
||||
<AI_ITEM Index="48" Name="AI_MFC17MoReservePushCV" BufferOffset="48" Addr="48" Description="" />
|
||||
<AI_ITEM Index="49" Name="AI_MFC18MOWOuterCV" BufferOffset="49" Addr="49" Description="" />
|
||||
<AI_ITEM Index="50" Name="AI_MFC19MOWMiddleCV" BufferOffset="50" Addr="50" Description="" />
|
||||
<AI_ITEM Index="51" Name="AI_MFC20MOWInnerCV" BufferOffset="51" Addr="51" Description="" />
|
||||
<AI_ITEM Index="52" Name="AI_MFC21CS2H2SSeOuterCV" BufferOffset="52" Addr="52" Description="" />
|
||||
<AI_ITEM Index="53" Name="AI_MFC22CS2H2SSeMiddleCV" BufferOffset="53" Addr="53" Description="" />
|
||||
<AI_ITEM Index="54" Name="AI_MFC23CS2H2SSeInnerCV" BufferOffset="54" Addr="54" Description="" />
|
||||
<AI_ITEM Index="55" Name="AI_MFC24O2SO2OuterCV" BufferOffset="55" Addr="55" Description="" />
|
||||
<AI_ITEM Index="56" Name="AI_MFC25O2SO2MiddleCV" BufferOffset="56" Addr="56" Description="" />
|
||||
<AI_ITEM Index="57" Name="AI_MFC26O2SO2InnerCV" BufferOffset="57" Addr="57" Description="" />
|
||||
<AI_ITEM Index="58" Name="AI_MFC27ShowerheadPurgeCV" BufferOffset="58" Addr="58" Description="" />
|
||||
<AI_ITEM Index="59" Name="AI_MFC28OuterPushGasCV" BufferOffset="59" Addr="59" Description="" />
|
||||
<AI_ITEM Index="60" Name="AI_MFC29InnerPushGasCV" BufferOffset="60" Addr="60" Description="" />
|
||||
<AI_ITEM Index="62" Name="AI_MFC31MiddlePushGasCV" BufferOffset="62" Addr="62" Description="" />
|
||||
<AI_ITEM Index="63" Name="AI_MFC32GasRingPurgeCV" BufferOffset="63" Addr="63" Description="" />
|
||||
<AI_ITEM Index="64" Name="AI_MFC33OpticPurgeCV" BufferOffset="64" Addr="64" Description="" />
|
||||
<AI_ITEM Index="66" Name="AI_MFC35ChamberPurgeCV" BufferOffset="66" Addr="66" Description="" />
|
||||
<AI_ITEM Index="67" Name="AI_MFC36RotationPurgeCV" BufferOffset="67" Addr="67" Description="" />
|
||||
<AI_ITEM Index="68" Name="AI_MFC37ShutterPurgeCV" BufferOffset="68" Addr="68" Description="" />
|
||||
<AI_ITEM Index="69" Name="AI_MFC38HeaterWFPurgeCV" BufferOffset="69" Addr="69" Description="" />
|
||||
<AI_ITEM Index="71" Name="AI_MFC40CarryGasCV" BufferOffset="71" Addr="71" Description="" />
|
||||
<AI_ITEM Index="32" Name="AI_M1" BufferOffset="32" Addr="32" Description="" />
|
||||
<AI_ITEM Index="34" Name="AI_M3" BufferOffset="34" Addr="34" Description="" />
|
||||
<AI_ITEM Index="35" Name="AI_M4" BufferOffset="35" Addr="35" Description="" />
|
||||
<AI_ITEM Index="37" Name="AI_M6" BufferOffset="37" Addr="37" Description="" />
|
||||
<AI_ITEM Index="38" Name="AI_M7" BufferOffset="38" Addr="38" Description="" />
|
||||
<AI_ITEM Index="39" Name="AI_M8" BufferOffset="39" Addr="39" Description="" />
|
||||
<AI_ITEM Index="40" Name="AI_M9" BufferOffset="40" Addr="40" Description="" />
|
||||
<AI_ITEM Index="41" Name="AI_M10" BufferOffset="41" Addr="41" Description="" />
|
||||
<AI_ITEM Index="42" Name="AI_M11" BufferOffset="42" Addr="42" Description="" />
|
||||
<AI_ITEM Index="43" Name="AI_M12" BufferOffset="43" Addr="43" Description="" />
|
||||
<AI_ITEM Index="44" Name="AI_M13" BufferOffset="44" Addr="44" Description="" />
|
||||
<AI_ITEM Index="45" Name="AI_M14" BufferOffset="45" Addr="45" Description="" />
|
||||
<AI_ITEM Index="46" Name="AI_M15" BufferOffset="46" Addr="46" Description="" />
|
||||
<AI_ITEM Index="47" Name="AI_M16" BufferOffset="47" Addr="47" Description="" />
|
||||
<AI_ITEM Index="48" Name="AI_M17" BufferOffset="48" Addr="48" Description="" />
|
||||
<AI_ITEM Index="49" Name="AI_M18" BufferOffset="49" Addr="49" Description="" />
|
||||
<AI_ITEM Index="50" Name="AI_M19" BufferOffset="50" Addr="50" Description="" />
|
||||
<AI_ITEM Index="51" Name="AI_M20" BufferOffset="51" Addr="51" Description="" />
|
||||
<AI_ITEM Index="52" Name="AI_M21" BufferOffset="52" Addr="52" Description="" />
|
||||
<AI_ITEM Index="53" Name="AI_M22" BufferOffset="53" Addr="53" Description="" />
|
||||
<AI_ITEM Index="54" Name="AI_M23" BufferOffset="54" Addr="54" Description="" />
|
||||
<AI_ITEM Index="55" Name="AI_M24" BufferOffset="55" Addr="55" Description="" />
|
||||
<AI_ITEM Index="56" Name="AI_M25" BufferOffset="56" Addr="56" Description="" />
|
||||
<AI_ITEM Index="57" Name="AI_M26" BufferOffset="57" Addr="57" Description="" />
|
||||
<AI_ITEM Index="58" Name="AI_M27" BufferOffset="58" Addr="58" Description="" />
|
||||
<AI_ITEM Index="59" Name="AI_M28" BufferOffset="59" Addr="59" Description="" />
|
||||
<AI_ITEM Index="60" Name="AI_M29" BufferOffset="60" Addr="60" Description="" />
|
||||
<AI_ITEM Index="62" Name="AI_M31" BufferOffset="62" Addr="62" Description="" />
|
||||
<AI_ITEM Index="63" Name="AI_M32" BufferOffset="63" Addr="63" Description="" />
|
||||
<AI_ITEM Index="64" Name="AI_M33" BufferOffset="64" Addr="64" Description="" />
|
||||
<AI_ITEM Index="66" Name="AI_M35" BufferOffset="66" Addr="66" Description="" />
|
||||
<AI_ITEM Index="67" Name="AI_M36" BufferOffset="67" Addr="67" Description="" />
|
||||
<AI_ITEM Index="68" Name="AI_M37" BufferOffset="68" Addr="68" Description="" />
|
||||
<AI_ITEM Index="69" Name="AI_M38" BufferOffset="69" Addr="69" Description="" />
|
||||
<AI_ITEM Index="71" Name="AI_M40" BufferOffset="71" Addr="71" Description="" />
|
||||
<AI_ITEM Index="72" Name="AI_PC1OpenDegree" BufferOffset="72" Addr="72" Description="" />
|
||||
<AI_ITEM Index="73" Name="AI_PC2OpenDegree" BufferOffset="73" Addr="73" Description="" />
|
||||
<AI_ITEM Index="74" Name="AI_PC3OpenDegree" BufferOffset="74" Addr="74" Description="" />
|
||||
@ -549,41 +549,41 @@
|
||||
<AI_ITEM Index="128" Name="AI_ActualPositon" BufferOffset="128" Addr="128" Description="" />
|
||||
<AI_ITEM Index="129" Name="AI_ActualPressure" BufferOffset="129" Addr="129" Description="" />
|
||||
<AI_ITEM Index="130" Name="AI_AIHeartBeat" BufferOffset="130" Addr="130" Description="" />
|
||||
<AI_ITEM Index="131" Name="AI_MFC1VentGasCM" BufferOffset="131" Addr="131" Description="" />
|
||||
<AI_ITEM Index="133" Name="AI_MFC3O2DiluteCarrierCM" BufferOffset="133" Addr="133" Description="" />
|
||||
<AI_ITEM Index="134" Name="AI_MFC4O2SourceCM" BufferOffset="134" Addr="134" Description="" />
|
||||
<AI_ITEM Index="136" Name="AI_MFC6O2DilutedCM" BufferOffset="136" Addr="136" Description="" />
|
||||
<AI_ITEM Index="137" Name="AI_MFC7WCO6CarrierCM" BufferOffset="137" Addr="137" Description="" />
|
||||
<AI_ITEM Index="138" Name="AI_MFC8WCO6PushCM" BufferOffset="138" Addr="138" Description="" />
|
||||
<AI_ITEM Index="139" Name="AI_MFC9MoCO6CarrierCM" BufferOffset="139" Addr="139" Description="" />
|
||||
<AI_ITEM Index="140" Name="AI_MFC10MoCO6PushCM" BufferOffset="140" Addr="140" Description="" />
|
||||
<AI_ITEM Index="141" Name="AI_MFC11CS2CarrierCM" BufferOffset="141" Addr="141" Description="" />
|
||||
<AI_ITEM Index="142" Name="AI_MFC12CS2PushCM" BufferOffset="142" Addr="142" Description="" />
|
||||
<AI_ITEM Index="143" Name="AI_MFC13H2SSourceCM" BufferOffset="143" Addr="143" Description="" />
|
||||
<AI_ITEM Index="144" Name="AI_MFC14H2SeSourceCM" BufferOffset="144" Addr="144" Description="" />
|
||||
<AI_ITEM Index="145" Name="AI_MFC15SO2SourceCM" BufferOffset="145" Addr="145" Description="" />
|
||||
<AI_ITEM Index="146" Name="AI_MFC16MoReserveCarrierCM" BufferOffset="146" Addr="146" Description="" />
|
||||
<AI_ITEM Index="147" Name="AI_MFC17MoReservePushCM" BufferOffset="147" Addr="147" Description="" />
|
||||
<AI_ITEM Index="148" Name="AI_MFC18MOWOuterCM" BufferOffset="148" Addr="148" Description="" />
|
||||
<AI_ITEM Index="149" Name="AI_MFC19MOWMiddleCM" BufferOffset="149" Addr="149" Description="" />
|
||||
<AI_ITEM Index="150" Name="AI_MFC20MOWInnerCM" BufferOffset="150" Addr="150" Description="" />
|
||||
<AI_ITEM Index="151" Name="AI_MFC21CS2H2SSeOuterCM" BufferOffset="151" Addr="151" Description="" />
|
||||
<AI_ITEM Index="152" Name="AI_MFC22CS2H2SSeMiddleCM" BufferOffset="152" Addr="152" Description="" />
|
||||
<AI_ITEM Index="153" Name="AI_MFC23CS2H2SSeInnerCM" BufferOffset="153" Addr="153" Description="" />
|
||||
<AI_ITEM Index="154" Name="AI_MFC24O2SO2OuterCM" BufferOffset="154" Addr="154" Description="" />
|
||||
<AI_ITEM Index="155" Name="AI_MFC25O2SO2MiddleCM" BufferOffset="155" Addr="155" Description="" />
|
||||
<AI_ITEM Index="156" Name="AI_MFC26O2SO2InnerCM" BufferOffset="156" Addr="156" Description="" />
|
||||
<AI_ITEM Index="157" Name="AI_MFC27ShowerheadPurgeCM" BufferOffset="157" Addr="157" Description="" />
|
||||
<AI_ITEM Index="158" Name="AI_MFC28OuterPushGasCM" BufferOffset="158" Addr="158" Description="" />
|
||||
<AI_ITEM Index="159" Name="AI_MFC29InnerPushGasCM" BufferOffset="159" Addr="159" Description="" />
|
||||
<AI_ITEM Index="161" Name="AI_MFC31MiddlePushGasCM" BufferOffset="161" Addr="161" Description="" />
|
||||
<AI_ITEM Index="162" Name="AI_MFC32GasRingPurgeCM" BufferOffset="162" Addr="162" Description="" />
|
||||
<AI_ITEM Index="163" Name="AI_MFC33OpticPurgeCM" BufferOffset="163" Addr="163" Description="" />
|
||||
<AI_ITEM Index="165" Name="AI_MFC35ChamberPurgeCM" BufferOffset="165" Addr="165" Description="" />
|
||||
<AI_ITEM Index="166" Name="AI_MFC36RotationPurgeCM" BufferOffset="166" Addr="166" Description="" />
|
||||
<AI_ITEM Index="167" Name="AI_MFC37ShutterPurgeCM" BufferOffset="167" Addr="167" Description="" />
|
||||
<AI_ITEM Index="168" Name="AI_MFC38HeaterWFPurgeCM" BufferOffset="168" Addr="168" Description="" />
|
||||
<AI_ITEM Index="170" Name="AI_MFC40CarryGasCM" BufferOffset="170" Addr="170" Description="" />
|
||||
<AI_ITEM Index="131" Name="AI_M1ActMode" BufferOffset="131" Addr="131" Description="" />
|
||||
<AI_ITEM Index="133" Name="AI_M3ActMode" BufferOffset="133" Addr="133" Description="" />
|
||||
<AI_ITEM Index="134" Name="AI_M4ActMode" BufferOffset="134" Addr="134" Description="" />
|
||||
<AI_ITEM Index="136" Name="AI_M6ActMode" BufferOffset="136" Addr="136" Description="" />
|
||||
<AI_ITEM Index="137" Name="AI_M7ActMode" BufferOffset="137" Addr="137" Description="" />
|
||||
<AI_ITEM Index="138" Name="AI_M8ActMode" BufferOffset="138" Addr="138" Description="" />
|
||||
<AI_ITEM Index="139" Name="AI_M9ActMode" BufferOffset="139" Addr="139" Description="" />
|
||||
<AI_ITEM Index="140" Name="AI_M10ActMode" BufferOffset="140" Addr="140" Description="" />
|
||||
<AI_ITEM Index="141" Name="AI_M11ActMode" BufferOffset="141" Addr="141" Description="" />
|
||||
<AI_ITEM Index="142" Name="AI_M12ActMode" BufferOffset="142" Addr="142" Description="" />
|
||||
<AI_ITEM Index="143" Name="AI_M13ActMode" BufferOffset="143" Addr="143" Description="" />
|
||||
<AI_ITEM Index="144" Name="AI_M14ActMode" BufferOffset="144" Addr="144" Description="" />
|
||||
<AI_ITEM Index="145" Name="AI_M15ActMode" BufferOffset="145" Addr="145" Description="" />
|
||||
<AI_ITEM Index="146" Name="AI_M16ActMode" BufferOffset="146" Addr="146" Description="" />
|
||||
<AI_ITEM Index="147" Name="AI_M17ActMode" BufferOffset="147" Addr="147" Description="" />
|
||||
<AI_ITEM Index="148" Name="AI_M18ActMode" BufferOffset="148" Addr="148" Description="" />
|
||||
<AI_ITEM Index="149" Name="AI_M19ActMode" BufferOffset="149" Addr="149" Description="" />
|
||||
<AI_ITEM Index="150" Name="AI_M20ActMode" BufferOffset="150" Addr="150" Description="" />
|
||||
<AI_ITEM Index="151" Name="AI_M21ActMode" BufferOffset="151" Addr="151" Description="" />
|
||||
<AI_ITEM Index="152" Name="AI_M22ActMode" BufferOffset="152" Addr="152" Description="" />
|
||||
<AI_ITEM Index="153" Name="AI_M23ActMode" BufferOffset="153" Addr="153" Description="" />
|
||||
<AI_ITEM Index="154" Name="AI_M24ActMode" BufferOffset="154" Addr="154" Description="" />
|
||||
<AI_ITEM Index="155" Name="AI_M25ActMode" BufferOffset="155" Addr="155" Description="" />
|
||||
<AI_ITEM Index="156" Name="AI_M26ActMode" BufferOffset="156" Addr="156" Description="" />
|
||||
<AI_ITEM Index="157" Name="AI_M27ActMode" BufferOffset="157" Addr="157" Description="" />
|
||||
<AI_ITEM Index="158" Name="AI_M28ActMode" BufferOffset="158" Addr="158" Description="" />
|
||||
<AI_ITEM Index="159" Name="AI_M29ActMode" BufferOffset="159" Addr="159" Description="" />
|
||||
<AI_ITEM Index="161" Name="AI_M31ActMode" BufferOffset="161" Addr="161" Description="" />
|
||||
<AI_ITEM Index="162" Name="AI_M32ActMode" BufferOffset="162" Addr="162" Description="" />
|
||||
<AI_ITEM Index="163" Name="AI_M33ActMode" BufferOffset="163" Addr="163" Description="" />
|
||||
<AI_ITEM Index="165" Name="AI_M35ActMode" BufferOffset="165" Addr="165" Description="" />
|
||||
<AI_ITEM Index="166" Name="AI_M36ActMode" BufferOffset="166" Addr="166" Description="" />
|
||||
<AI_ITEM Index="167" Name="AI_M37ActMode" BufferOffset="167" Addr="167" Description="" />
|
||||
<AI_ITEM Index="168" Name="AI_M38ActMode" BufferOffset="168" Addr="168" Description="" />
|
||||
<AI_ITEM Index="170" Name="AI_M40ActMode" BufferOffset="170" Addr="170" Description="" />
|
||||
<AI_ITEM Index="171" Name="AI_PC1O2DiluteVentCM" BufferOffset="171" Addr="171" Description="" />
|
||||
<AI_ITEM Index="172" Name="AI_PC2WCO6PressureCM" BufferOffset="172" Addr="172" Description="" />
|
||||
<AI_ITEM Index="173" Name="AI_PC3CS2PressureCM" BufferOffset="173" Addr="173" Description="" />
|
||||
@ -658,41 +658,41 @@
|
||||
<AO_ITEM Index="29" Name="AO_ai13OFFSET" BufferOffset="29" Addr="29" Description="" />
|
||||
<AO_ITEM Index="30" Name="AO_ai14OFFSET" BufferOffset="30" Addr="30" Description="" />
|
||||
<AO_ITEM Index="31" Name="AO_ai15OFFSET" BufferOffset="31" Addr="31" Description="" />
|
||||
<AO_ITEM Index="32" Name="AO_MFC1VentGasCV" BufferOffset="32" Addr="32" Description="" />
|
||||
<AO_ITEM Index="34" Name="AO_MFC3O2DiluteCarrierCV" BufferOffset="34" Addr="34" Description="" />
|
||||
<AO_ITEM Index="35" Name="AO_MFC4O2SourceCV" BufferOffset="35" Addr="35" Description="" />
|
||||
<AO_ITEM Index="37" Name="AO_MFC6O2DilutedCV" BufferOffset="37" Addr="37" Description="" />
|
||||
<AO_ITEM Index="38" Name="AO_MFC7WCO6CarrierCV" BufferOffset="38" Addr="38" Description="" />
|
||||
<AO_ITEM Index="39" Name="AO_MFC8WCO6PushCV" BufferOffset="39" Addr="39" Description="" />
|
||||
<AO_ITEM Index="40" Name="AO_MFC9MoCO6CarrierCV" BufferOffset="40" Addr="40" Description="" />
|
||||
<AO_ITEM Index="41" Name="AO_MFC10MoCO6PushCV" BufferOffset="41" Addr="41" Description="" />
|
||||
<AO_ITEM Index="42" Name="AO_MFC11CS2CarrierCV" BufferOffset="42" Addr="42" Description="" />
|
||||
<AO_ITEM Index="43" Name="AO_MFC12CS2PushCV" BufferOffset="43" Addr="43" Description="" />
|
||||
<AO_ITEM Index="44" Name="AO_MFC13H2SSourceCV" BufferOffset="44" Addr="44" Description="" />
|
||||
<AO_ITEM Index="45" Name="AO_MFC14H2SeSourceCV" BufferOffset="45" Addr="45" Description="" />
|
||||
<AO_ITEM Index="46" Name="AO_MFC15SO2SourceCV" BufferOffset="46" Addr="46" Description="" />
|
||||
<AO_ITEM Index="47" Name="AO_MFC16MoReserveCarrierCV" BufferOffset="47" Addr="47" Description="" />
|
||||
<AO_ITEM Index="48" Name="AO_MFC17MoReservePushCV" BufferOffset="48" Addr="48" Description="" />
|
||||
<AO_ITEM Index="49" Name="AO_MFC18MOWOuterCV" BufferOffset="49" Addr="49" Description="" />
|
||||
<AO_ITEM Index="50" Name="AO_MFC19MOWMiddleCV" BufferOffset="50" Addr="50" Description="" />
|
||||
<AO_ITEM Index="51" Name="AO_MFC20MOWInnerCV" BufferOffset="51" Addr="51" Description="" />
|
||||
<AO_ITEM Index="52" Name="AO_MFC21CS2H2SSeOuterCV" BufferOffset="52" Addr="52" Description="" />
|
||||
<AO_ITEM Index="53" Name="AO_MFC22CS2H2SSeMiddleCV" BufferOffset="53" Addr="53" Description="" />
|
||||
<AO_ITEM Index="54" Name="AO_MFC23CS2H2SSeInnerCV" BufferOffset="54" Addr="54" Description="" />
|
||||
<AO_ITEM Index="55" Name="AO_MFC24O2SO2OuterCV" BufferOffset="55" Addr="55" Description="" />
|
||||
<AO_ITEM Index="56" Name="AO_MFC25O2SO2MiddleCV" BufferOffset="56" Addr="56" Description="" />
|
||||
<AO_ITEM Index="57" Name="AO_MFC26O2SO2InnerCV" BufferOffset="57" Addr="57" Description="" />
|
||||
<AO_ITEM Index="58" Name="AO_MFC27ShowerheadPurgeCV" BufferOffset="58" Addr="58" Description="" />
|
||||
<AO_ITEM Index="59" Name="AO_MFC28OuterPushGasCV" BufferOffset="59" Addr="59" Description="" />
|
||||
<AO_ITEM Index="60" Name="AO_MFC29InnerPushGasCV" BufferOffset="60" Addr="60" Description="" />
|
||||
<AO_ITEM Index="62" Name="AO_MFC31MiddlePushGasCV" BufferOffset="62" Addr="62" Description="" />
|
||||
<AO_ITEM Index="63" Name="AO_MFC32GasRingPurgeCV" BufferOffset="63" Addr="63" Description="" />
|
||||
<AO_ITEM Index="64" Name="AO_MFC33OpticPurgeCV" BufferOffset="64" Addr="64" Description="" />
|
||||
<AO_ITEM Index="66" Name="AO_MFC35ChamberPurgeCV" BufferOffset="66" Addr="66" Description="" />
|
||||
<AO_ITEM Index="67" Name="AO_MFC36RotationPurgeCV" BufferOffset="67" Addr="67" Description="" />
|
||||
<AO_ITEM Index="68" Name="AO_MFC37ShutterPurgeCV" BufferOffset="68" Addr="68" Description="" />
|
||||
<AO_ITEM Index="69" Name="AO_MFC38HeaterWFPurgeCV" BufferOffset="69" Addr="69" Description="" />
|
||||
<AO_ITEM Index="71" Name="AO_MFC40CarryGasCV" BufferOffset="71" Addr="71" Description="" />
|
||||
<AO_ITEM Index="32" Name="AO_M1" BufferOffset="32" Addr="32" Description="" />
|
||||
<AO_ITEM Index="34" Name="AO_M3" BufferOffset="34" Addr="34" Description="" />
|
||||
<AO_ITEM Index="35" Name="AO_M4" BufferOffset="35" Addr="35" Description="" />
|
||||
<AO_ITEM Index="37" Name="AO_M6" BufferOffset="37" Addr="37" Description="" />
|
||||
<AO_ITEM Index="38" Name="AO_M7" BufferOffset="38" Addr="38" Description="" />
|
||||
<AO_ITEM Index="39" Name="AO_M8" BufferOffset="39" Addr="39" Description="" />
|
||||
<AO_ITEM Index="40" Name="AO_M9" BufferOffset="40" Addr="40" Description="" />
|
||||
<AO_ITEM Index="41" Name="AO_M10" BufferOffset="41" Addr="41" Description="" />
|
||||
<AO_ITEM Index="42" Name="AO_M11" BufferOffset="42" Addr="42" Description="" />
|
||||
<AO_ITEM Index="43" Name="AO_M12" BufferOffset="43" Addr="43" Description="" />
|
||||
<AO_ITEM Index="44" Name="AO_M13" BufferOffset="44" Addr="44" Description="" />
|
||||
<AO_ITEM Index="45" Name="AO_M14" BufferOffset="45" Addr="45" Description="" />
|
||||
<AO_ITEM Index="46" Name="AO_M15" BufferOffset="46" Addr="46" Description="" />
|
||||
<AO_ITEM Index="47" Name="AO_M16" BufferOffset="47" Addr="47" Description="" />
|
||||
<AO_ITEM Index="48" Name="AO_M17" BufferOffset="48" Addr="48" Description="" />
|
||||
<AO_ITEM Index="49" Name="AO_M18" BufferOffset="49" Addr="49" Description="" />
|
||||
<AO_ITEM Index="50" Name="AO_M19" BufferOffset="50" Addr="50" Description="" />
|
||||
<AO_ITEM Index="51" Name="AO_M20" BufferOffset="51" Addr="51" Description="" />
|
||||
<AO_ITEM Index="52" Name="AO_M21" BufferOffset="52" Addr="52" Description="" />
|
||||
<AO_ITEM Index="53" Name="AO_M22" BufferOffset="53" Addr="53" Description="" />
|
||||
<AO_ITEM Index="54" Name="AO_M23" BufferOffset="54" Addr="54" Description="" />
|
||||
<AO_ITEM Index="55" Name="AO_M24" BufferOffset="55" Addr="55" Description="" />
|
||||
<AO_ITEM Index="56" Name="AO_M25" BufferOffset="56" Addr="56" Description="" />
|
||||
<AO_ITEM Index="57" Name="AO_M26" BufferOffset="57" Addr="57" Description="" />
|
||||
<AO_ITEM Index="58" Name="AO_M27" BufferOffset="58" Addr="58" Description="" />
|
||||
<AO_ITEM Index="59" Name="AO_M28" BufferOffset="59" Addr="59" Description="" />
|
||||
<AO_ITEM Index="60" Name="AO_M29" BufferOffset="60" Addr="60" Description="" />
|
||||
<AO_ITEM Index="62" Name="AO_M31" BufferOffset="62" Addr="62" Description="" />
|
||||
<AO_ITEM Index="63" Name="AO_M32" BufferOffset="63" Addr="63" Description="" />
|
||||
<AO_ITEM Index="64" Name="AO_M33" BufferOffset="64" Addr="64" Description="" />
|
||||
<AO_ITEM Index="66" Name="AO_M35" BufferOffset="66" Addr="66" Description="" />
|
||||
<AO_ITEM Index="67" Name="AO_M36" BufferOffset="67" Addr="67" Description="" />
|
||||
<AO_ITEM Index="68" Name="AO_M37" BufferOffset="68" Addr="68" Description="" />
|
||||
<AO_ITEM Index="69" Name="AO_M38" BufferOffset="69" Addr="69" Description="" />
|
||||
<AO_ITEM Index="71" Name="AO_M40" BufferOffset="71" Addr="71" Description="" />
|
||||
<AO_ITEM Index="72" Name="AO_PT1OFFSET" BufferOffset="72" Addr="72" Description="" />
|
||||
<AO_ITEM Index="73" Name="AO_PT1K" BufferOffset="73" Addr="73" Description="" />
|
||||
<AO_ITEM Index="74" Name="AO_PT2OFFSET" BufferOffset="74" Addr="74" Description="" />
|
||||
@ -736,41 +736,41 @@
|
||||
<AO_ITEM Index="128" Name="AO_SetpointPositon" BufferOffset="128" Addr="128" Description="" />
|
||||
<AO_ITEM Index="129" Name="AO_SetpointPressure" BufferOffset="129" Addr="129" Description="" />
|
||||
<AO_ITEM Index="130" Name="AO_HeartBeat" BufferOffset="130" Addr="130" Description="" />
|
||||
<AO_ITEM Index="131" Name="AO_MFC1VentGasSM" BufferOffset="131" Addr="131" Description="" />
|
||||
<AO_ITEM Index="133" Name="AO_MFC3O2DiluteCarrierSM" BufferOffset="133" Addr="133" Description="" />
|
||||
<AO_ITEM Index="134" Name="AO_MFC4O2SourceSM" BufferOffset="134" Addr="134" Description="" />
|
||||
<AO_ITEM Index="136" Name="AO_MFC6O2DilutedSM" BufferOffset="136" Addr="136" Description="" />
|
||||
<AO_ITEM Index="137" Name="AO_MFC7WCO6CarrierSM" BufferOffset="137" Addr="137" Description="" />
|
||||
<AO_ITEM Index="138" Name="AO_MFC8WCO6PushSM" BufferOffset="138" Addr="138" Description="" />
|
||||
<AO_ITEM Index="139" Name="AO_MFC9MoCO6CarrierSM" BufferOffset="139" Addr="139" Description="" />
|
||||
<AO_ITEM Index="140" Name="AO_MFC10MoCO6PushSM" BufferOffset="140" Addr="140" Description="" />
|
||||
<AO_ITEM Index="141" Name="AO_MFC11CS2CarrierSM" BufferOffset="141" Addr="141" Description="" />
|
||||
<AO_ITEM Index="142" Name="AO_MFC12CS2PushSM" BufferOffset="142" Addr="142" Description="" />
|
||||
<AO_ITEM Index="143" Name="AO_MFC13H2SSourceSM" BufferOffset="143" Addr="143" Description="" />
|
||||
<AO_ITEM Index="144" Name="AO_MFC14H2SeSourceSM" BufferOffset="144" Addr="144" Description="" />
|
||||
<AO_ITEM Index="145" Name="AO_MFC15SO2SourceSM" BufferOffset="145" Addr="145" Description="" />
|
||||
<AO_ITEM Index="146" Name="AO_MFC16MoReserveCarrierSM" BufferOffset="146" Addr="146" Description="" />
|
||||
<AO_ITEM Index="147" Name="AO_MFC17MoReservePushSM" BufferOffset="147" Addr="147" Description="" />
|
||||
<AO_ITEM Index="148" Name="AO_MFC18MOWOuterSM" BufferOffset="148" Addr="148" Description="" />
|
||||
<AO_ITEM Index="149" Name="AO_MFC19MOWMiddleSM" BufferOffset="149" Addr="149" Description="" />
|
||||
<AO_ITEM Index="150" Name="AO_MFC20MOWInnerSM" BufferOffset="150" Addr="150" Description="" />
|
||||
<AO_ITEM Index="151" Name="AO_MFC21CS2H2SSeOuterSM" BufferOffset="151" Addr="151" Description="" />
|
||||
<AO_ITEM Index="152" Name="AO_MFC22CS2H2SSeMiddleSM" BufferOffset="152" Addr="152" Description="" />
|
||||
<AO_ITEM Index="153" Name="AO_MFC23CS2H2SSeInnerSM" BufferOffset="153" Addr="153" Description="" />
|
||||
<AO_ITEM Index="154" Name="AO_MFC24O2SO2OuterSM" BufferOffset="154" Addr="154" Description="" />
|
||||
<AO_ITEM Index="155" Name="AO_MFC25O2SO2MiddleSM" BufferOffset="155" Addr="155" Description="" />
|
||||
<AO_ITEM Index="156" Name="AO_MFC26O2SO2InnerSM" BufferOffset="156" Addr="156" Description="" />
|
||||
<AO_ITEM Index="157" Name="AO_MFC27ShowerheadPurgeSM" BufferOffset="157" Addr="157" Description="" />
|
||||
<AO_ITEM Index="158" Name="AO_MFC28OuterPushGasSM" BufferOffset="158" Addr="158" Description="" />
|
||||
<AO_ITEM Index="159" Name="AO_MFC29InnerPushGasSM" BufferOffset="159" Addr="159" Description="" />
|
||||
<AO_ITEM Index="161" Name="AO_MFC31MiddlePushGasSM" BufferOffset="161" Addr="161" Description="" />
|
||||
<AO_ITEM Index="162" Name="AO_MFC32GasRingPurgeSM" BufferOffset="162" Addr="162" Description="" />
|
||||
<AO_ITEM Index="163" Name="AO_MFC33OpticPurgeSM" BufferOffset="163" Addr="163" Description="" />
|
||||
<AO_ITEM Index="165" Name="AO_MFC35ChamberPurgeSM" BufferOffset="165" Addr="165" Description="" />
|
||||
<AO_ITEM Index="166" Name="AO_MFC36RotationPurgeSM" BufferOffset="166" Addr="166" Description="" />
|
||||
<AO_ITEM Index="167" Name="AO_MFC37ShutterPurgeSM" BufferOffset="167" Addr="167" Description="" />
|
||||
<AO_ITEM Index="168" Name="AO_MFC38HeaterWFPurgeSM" BufferOffset="168" Addr="168" Description="" />
|
||||
<AO_ITEM Index="170" Name="AO_MFC40CarryGasSM" BufferOffset="170" Addr="170" Description="" />
|
||||
<AO_ITEM Index="131" Name="AO_M1CtrlMode" BufferOffset="131" Addr="131" Description="" />
|
||||
<AO_ITEM Index="133" Name="AO_M3CtrlMode" BufferOffset="133" Addr="133" Description="" />
|
||||
<AO_ITEM Index="134" Name="AO_M4CtrlMode" BufferOffset="134" Addr="134" Description="" />
|
||||
<AO_ITEM Index="136" Name="AO_M6CtrlMode" BufferOffset="136" Addr="136" Description="" />
|
||||
<AO_ITEM Index="137" Name="AO_M7CtrlMode" BufferOffset="137" Addr="137" Description="" />
|
||||
<AO_ITEM Index="138" Name="AO_M8CtrlMode" BufferOffset="138" Addr="138" Description="" />
|
||||
<AO_ITEM Index="139" Name="AO_M9CtrlMode" BufferOffset="139" Addr="139" Description="" />
|
||||
<AO_ITEM Index="140" Name="AO_M10CtrlMode" BufferOffset="140" Addr="140" Description="" />
|
||||
<AO_ITEM Index="141" Name="AO_M11CtrlMode" BufferOffset="141" Addr="141" Description="" />
|
||||
<AO_ITEM Index="142" Name="AO_M12CtrlMode" BufferOffset="142" Addr="142" Description="" />
|
||||
<AO_ITEM Index="143" Name="AO_M13CtrlMode" BufferOffset="143" Addr="143" Description="" />
|
||||
<AO_ITEM Index="144" Name="AO_M14CtrlMode" BufferOffset="144" Addr="144" Description="" />
|
||||
<AO_ITEM Index="145" Name="AO_M15CtrlMode" BufferOffset="145" Addr="145" Description="" />
|
||||
<AO_ITEM Index="146" Name="AO_M16CtrlMode" BufferOffset="146" Addr="146" Description="" />
|
||||
<AO_ITEM Index="147" Name="AO_M17CtrlMode" BufferOffset="147" Addr="147" Description="" />
|
||||
<AO_ITEM Index="148" Name="AO_M18CtrlMode" BufferOffset="148" Addr="148" Description="" />
|
||||
<AO_ITEM Index="149" Name="AO_M19CtrlMode" BufferOffset="149" Addr="149" Description="" />
|
||||
<AO_ITEM Index="150" Name="AO_M20CtrlMode" BufferOffset="150" Addr="150" Description="" />
|
||||
<AO_ITEM Index="151" Name="AO_M21CtrlMode" BufferOffset="151" Addr="151" Description="" />
|
||||
<AO_ITEM Index="152" Name="AO_M22CtrlMode" BufferOffset="152" Addr="152" Description="" />
|
||||
<AO_ITEM Index="153" Name="AO_M23CtrlMode" BufferOffset="153" Addr="153" Description="" />
|
||||
<AO_ITEM Index="154" Name="AO_M24CtrlMode" BufferOffset="154" Addr="154" Description="" />
|
||||
<AO_ITEM Index="155" Name="AO_M25CtrlMode" BufferOffset="155" Addr="155" Description="" />
|
||||
<AO_ITEM Index="156" Name="AO_M26CtrlMode" BufferOffset="156" Addr="156" Description="" />
|
||||
<AO_ITEM Index="157" Name="AO_M27CtrlMode" BufferOffset="157" Addr="157" Description="" />
|
||||
<AO_ITEM Index="158" Name="AO_M28CtrlMode" BufferOffset="158" Addr="158" Description="" />
|
||||
<AO_ITEM Index="159" Name="AO_M29CtrlMode" BufferOffset="159" Addr="159" Description="" />
|
||||
<AO_ITEM Index="161" Name="AO_M31CtrlMode" BufferOffset="161" Addr="161" Description="" />
|
||||
<AO_ITEM Index="162" Name="AO_M32CtrlMode" BufferOffset="162" Addr="162" Description="" />
|
||||
<AO_ITEM Index="163" Name="AO_M33CtrlMode" BufferOffset="163" Addr="163" Description="" />
|
||||
<AO_ITEM Index="165" Name="AO_M35CtrlMode" BufferOffset="165" Addr="165" Description="" />
|
||||
<AO_ITEM Index="166" Name="AO_M36CtrlMode" BufferOffset="166" Addr="166" Description="" />
|
||||
<AO_ITEM Index="167" Name="AO_M37CtrlMode" BufferOffset="167" Addr="167" Description="" />
|
||||
<AO_ITEM Index="168" Name="AO_M38CtrlMode" BufferOffset="168" Addr="168" Description="" />
|
||||
<AO_ITEM Index="170" Name="AO_M40CtrlMode" BufferOffset="170" Addr="170" Description="" />
|
||||
<AO_ITEM Index="171" Name="AO_PC1O2DiluteVentSM" BufferOffset="171" Addr="171" Description="" />
|
||||
<AO_ITEM Index="172" Name="AO_PC2WCO6PressureSM" BufferOffset="172" Addr="172" Description="" />
|
||||
<AO_ITEM Index="173" Name="AO_PC3CS2PressureSM" BufferOffset="173" Addr="173" Description="" />
|
||||
|
||||
Loading…
Reference in New Issue
Block a user