添加PM Sensor配置
This commit is contained in:
hanqiangqiang
parent
3bd54f6986
commit
205ce27da5
@ -255,6 +255,201 @@
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<DoSensors classType="Aitex.Core.RT.Device.Devices.DoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
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<DoSensors classType="Aitex.Core.RT.Device.Devices.DoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
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<DoSensor id="CleanRoutineSucceed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_CleanRoutineSuscessed" infoText="" warningText="" alarmText="" />
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<DoSensor id="CleanRoutineSucceed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_CleanRoutineSuscessed" infoText="" warningText="" alarmText="" />
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</DoSensors>
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</DoSensors>
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<IoSensors classType="Aitex.Core.RT.Device.Devices.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamCabDoorClosed" infoText="" warningText="Warning1 Chamber Cab Door Not Closed [DI-3]" alarmText="" />
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<IoSensor id="SensorDORPressVacSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressVacSW" infoText="Information2 DOR Press Vac [DI-6]" warningText="" alarmText="" />
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<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressATMSW" infoText="" warningText="Warning2 DOR Press ATM [DI-7]" alarmText="" />
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<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText="Warning3 Gas Box Door Not Closed [DI-33]" alarmText="" />
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<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Warning4 GasPipeTempCtrl.Alarm [DI-35]" alarmText="" />
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<IoSensor id="SensorSpare2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare2FlowSW" infoText="" warningText="Warning5 Spare2 Flow Low -U13 [DI-47]" alarmText="" DisInServiceMode="true"/>
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<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText="Warning6 ReactorWaterLeak [DI-48]" alarmText="" />
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<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText="Warning7 Gas Box Water Leak [DI-60]" alarmText="" />
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<IoSensor id="SensorShutterUpLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterUpLimitSW" infoText="" warningText="" alarmText="" />
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<IoSensor id="SensorShutterDownLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterDownLimitSW" infoText="" warningText="" alarmText="" />
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<IoSensor id="SensorDryPump1Warning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Warning" infoText="" warningText="Warning10 DryPump1 Warning [DI-67]" alarmText="" />
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<IoSensor id="SensorPRWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRackWaterLeakSW" infoText="" warningText="Warning11 Power Rack Water Leak [DI-77]" alarmText="" />
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<IoSensor id="SensorTransformerOTSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TransformerOTSW" infoText="" warningText="Warning12 TransformerOverTemp [DI-83]" alarmText="" />
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<IoSensor id="SensorSHLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHLidClosed" infoText="" warningText="Warning13 SH Lid Opened [DI-106]" alarmText="" />
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<IoSensor id="SensorMiddleLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MiddleLidClosed" infoText="" warningText="Warning14 Middle Lid Opened [DI-120]" alarmText="" />
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<IoSensor id="SensorTMPumpFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMPumpFlowSW" infoText="" warningText="Warning15 TMPump1 Cooling Water Low Flow -U11 [DI-24]" alarmText="" DisInServiceMode="true"/>
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<IoSensor id="SensorPSUInnerTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUInnerTempHAlarm" infoText="" warningText="" alarmText="" />
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<IoSensor id="SensorPSUMiddleTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUMiddleTempHAlarm" infoText="" warningText="" alarmText="" />
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<IoSensor id="SensorPSUOuterTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUOuterTempHAlarm" infoText="" warningText="" alarmText="" />
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<IoSensor id="SensorSCRUpperTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRUpperTempHAlarm" infoText="" warningText="" alarmText="" />
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<IoSensor id="SensorSCRMiddleTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRMiddleTempHAlarm" infoText="" warningText="" alarmText="" />
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<IoSensor id="SensorSCRLowerTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRLowerTempHAlarm" infoText="" warningText="" alarmText="" />
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<IoSensor id="SensorConfinementRingServoError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingServoError" infoText="" warningText="Warning28 ConfinementRingServoError [DI-342]" alarmText="" />
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<IoSensor id="SensorChamLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamLidClosed" infoText="" warningText="" alarmText="Alarm1 Chamber Lid Opened [DI-0]" DisInServiceMode="true"/>
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<IoSensor id="SensorChamPressAboveATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamPressAboveATMSW" infoText="" warningText="" alarmText="Alarm2 Chamber Press Above ATM [DI-4]" />
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<IoSensor id="SensorHeaterTempUp1680CSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_HeaterTempUpLimitSW" infoText="" warningText="" alarmText="Alarm3 Heater Controller1 Present Temp High [DI-10]" />
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<IoSensor id="SensorSHFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHFlowSW" infoText="" warningText="" alarmText="Alarm4 SH Cooling Water Low Flow -U1 [DI-15]" DisInServiceMode="true"/>
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<IoSensor id="SensorChamTopFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamTopFlowSW" infoText="" warningText="" alarmText="Alarm5 Chamber Top Cooling Water Low Flow -U2 [DI-16]" DisInServiceMode="true"/>
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<IoSensor id="SensorChamMiddleFlow1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow1SW" infoText="" warningText="" alarmText="Alarm6 Chamber Middle1 Cooling Water Flow Abnormal -U3 [DI-17]" DisInServiceMode="true"/>
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<IoSensor id="SensorChamBottomFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamBottomFlowSW" infoText="" warningText="" alarmText="Alarm7 Chamber Bottom Cooling Water Flow Abnormal -U5 [DI-18]" DisInServiceMode="true"/>
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<IoSensor id="SensorForeline1FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Foreline1FlowSW" infoText="" warningText="" alarmText="Alarm8 Foreline1 Cooling Water Low Flow -U6 [DI-19]" DisInServiceMode="true"/>
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<IoSensor id="SensorPowerRod1FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod1FlowSW" infoText="" warningText="" alarmText="Alarm9 Power Rod1 Cooling Water Low Flow -U7 [DI-20]" DisInServiceMode="true"/>
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<IoSensor id="SensorPowerRod2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod2FlowSW" infoText="" warningText="" alarmText="Alarm10 Power Rod2 Cooling Water Low Flow -U8 [DI-21]" DisInServiceMode="true"/>
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<IoSensor id="SensorForeline2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Foreline2FlowSW" infoText="" warningText="" alarmText="Alarm11 Foreline2 Cooling Water Low Flow -U9 [DI-22]" DisInServiceMode="true"/>
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<IoSensor id="SensorElectrodeWFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ElectrodeWFlowSW" infoText="" warningText="" alarmText="Alarm12 Electrode-W Cooling Water Low Flow -U10 [DI-23]" DisInServiceMode="true"/>
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<IoSensor id="SensorTransformerFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TransformerFlowSW" infoText="" warningText="" alarmText="Alarm14 Transformer Cooling Water Low Flow -U14 [DI-25]" DisInServiceMode="true" />
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<IoSensor id="SensorSpare1FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare1FlowSW" infoText="" warningText="" alarmText="Alarm15 Spare1 Flow Low-U12 [DI-26]" DisInServiceMode="true"/>
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<IoSensor id="SensorInletTotalFlowLowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowLowSW" infoText="" warningText="" alarmText="Alarm16 Chamber Cooling Water Pressure Low [DI-27]" />
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<IoSensor id="SensorInletTotalFlowHighSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowHighSW" infoText="" warningText="" alarmText="Alarm17 Chamber Cooling Water Pressure High [DI-28]" />
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<IoSensor id="SensorPMH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2DetectorSW" infoText="" warningText="" alarmText="Alarm19 PM H2 Leak Detect [DI-30]" />
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<IoSensor id="SensorGBHCLDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBHCLDetectorSW" infoText="" warningText="" alarmText="Alarm20 Gasbox HCL Leak Detect [DI-31]" />
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<IoSensor id="SensorGBExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBExhaustDPSW" infoText="" warningText="Alarm21 Gasbox Exhaust DP Error [DI-32]" alarmText="" />
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<IoSensor id="SensorDryPumpAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPumpAlarm" infoText="" warningText="" alarmText="Alarm22 DryPump.Alarm [DI-36]" />
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<IoSensor id="SensorPumpExhaustPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustPressSW" infoText="" warningText="" alarmText="Alarm23 Pump Exhaust Pressure Abnormal [DI-38]" />
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<IoSensor id="SensorPMAExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMAExhaustDPSW" infoText="" warningText="Alarm24 PM Exhaust DP Error [DI-39]" alarmText="" />
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<IoSensor id="SensorPumpExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustDPSW" infoText="" warningText="Alarm25 Pump Exhaust DP Error [DI-40]" alarmText="" />
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<IoSensor id="SensorScrubberIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ScrubberIntlkSW" infoText="" warningText="" alarmText="Alarm26 Scrubber System Error [DI-41]" />
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<IoSensor id="SensorFacilityIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityIntlkSW" infoText="" warningText="" alarmText="Alarm27 Facility Error [DI-42]" />
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<IoSensor id="SensorTCSAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TCSAlarm" infoText="" warningText="" alarmText="Alarm28 TCS.Alarm [DI-43]" />
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<IoSensor id="SensorServoDriverFaultSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ServoDriverFaultSW" infoText="" warningText="" alarmText="Alarm29 Rotation Servo Driver Error [DI-45]" />
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<IoSensor id="SensorChamMiddleFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow2SW" infoText="" warningText="" alarmText="Alarm30 Chamber Middle2 Cooling Water Flow Abnormal U4[DI-46]" DisInServiceMode="true"/>
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<IoSensor id="SensorReactorHCLDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorHCLDetectorSW" infoText="" warningText="" alarmText="Alarm31 ReactorHCLDetector [DI-52]" />
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<IoSensor id="SensorGN2InletPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GN2InletPressSW" infoText="" warningText="" alarmText="Alarm32 Gasbox N2 Pressure Low [DI-55]" />
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<IoSensor id="SensorArInletPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ArInletPressSW" infoText="" warningText="" alarmText="Alarm33 Gasbox Ar Pressure Low [DI-56]" />
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<IoSensor id="SensorH2PressureSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_H2PressureSW" infoText="" warningText="" alarmText="Alarm34 Gasbox H2 Pressure Low [DI-57]" />
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<IoSensor id="SensorGBH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBH2DetectorSW" infoText="" warningText="" alarmText="Alarm35 Gasbox H2 Leak Detect [DI-59]" />
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<IoSensor id="SensorDryPump1Running" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Running" infoText="" warningText="" alarmText="Alarm36 DryPump1 Not Running [DI-65]" />
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<IoSensor id="SensorEMOStatusSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_EMOStatusSW" infoText="" warningText="" alarmText="Alarm37 EMOStatus [DI-70]" />
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<IoSensor id="SensorFacilityWarningSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityWarningSW" infoText="" warningText="" alarmText="Alarm38 Facility Equipment Alarm [DI-72]" />
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<IoSensor id="SensorMainCBStatusSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MainCBStatusSW" infoText="" warningText="" alarmText="Alarm39 Main CB Status Off [DI-76]" />
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<IoSensor id="SensorUPS1Enable" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS1Enable" infoText="" warningText="" alarmText="Alarm40 UPS1.Enable [DI-78]" />
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<IoSensor id="SensorUPS2Enable" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS2Enable" infoText="" warningText="" alarmText="Alarm41 UPS2.Enable [DI-79]" />
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<IoSensor id="SensorUPS1LowBattery" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS1LowBattery" infoText="" warningText="" alarmText="Alarm43 UPS1.LowBattery [DI-84]" />
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<IoSensor id="SensorUPS2LowBattery" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS2LowBattery" infoText="" warningText="" alarmText="Alarm44 UPS2.LowBattery [DI-85]" />
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<IoSensor id="SensorProcessStopSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ProcessStopSW" infoText="" warningText="" alarmText="Alarm42 Process Stop [DI-81]" />
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<IoSensor id="SensorSHFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_SHFlowTemp" infoText="" warningText="" alarmText="Alarm45 SH Cooling Water Temp Over Temp -U1 [DO196]" />
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<IoSensor id="SensorChamTopFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamTopFlowTemp" infoText="" warningText="" alarmText="Alarm46 Chamber Top Cooling Water Over Temp -U2 [DO197]" />
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<IoSensor id="SensorChamMiddleFlow1Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamMiddleFlow1Temp" infoText="" warningText="" alarmText="Alarm47 Chamber Middle Flow1 Cooling Water Over Temp -U3 [DO198]" />
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<IoSensor id="SensorChamMiddleFlow2Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamMiddleFlow2Temp" infoText="" warningText="" alarmText="Alarm48 Chamber Middle Flow2 Cooling Water Over Temp -U4 [DO195]" />
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<IoSensor id="SensorChamBottomFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamBottomFlowTemp" infoText="" warningText="" alarmText="Alarm49 Chamber Bottom Cooling Water Over Temp -U5 [DO199]" />
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<IoSensor id="SensorSpareFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_SpareFlowTemp" infoText="" warningText="" alarmText="Alarm50 Spare Cooling Water Over Temp -U6 [DO200]" />
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<IoSensor id="SensorPowerRod1FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_PowerRod1FlowTemp" infoText="" warningText="" alarmText="Alarm51 Power Rod1 Cooling Water Over Temp -U7 [DO201]" />
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<IoSensor id="SensorPowerRod2FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_PowerRod2FlowTemp" infoText="" warningText="" alarmText="Alarm52 Power Rod2 Cooling Water Over Temp -U8 [DO202]" />
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<IoSensor id="SensorForelineFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ForelineFlowTemp" infoText="" warningText="" alarmText="Alarm53 Foreline Cooling Water Over Temp -U9 [DO203]" />
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<IoSensor id="SensorElectrodeWFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ElectrodeWFlowTemp" infoText="" warningText="" alarmText="Alarm54 Electrode-W Cooling Water Over Temp -U10 [DO204]" />
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<IoSensor id="SensorTMPump1FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_TMPump1FlowTemp" infoText="" warningText="" alarmText="Alarm55 TMPump1 Cooling Water Over Temp -U11 [DO205]" />
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<IoSensor id="SensorSpare1FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_Spare1FlowTemp" infoText="" warningText="" alarmText="Alarm56 Spare1 Flow.Temp Over Temp -U12 [DO207]" />
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<IoSensor id="SensorSpare2FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_Spare2FlowTemp" infoText="" warningText="" alarmText="Alarm57 Spare2 Flow.Temp Over Temp -U13 [DO208]" />
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<IoSensor id="SensorTransformerFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_TransformerFlowTemp" infoText="" warningText="" alarmText="Alarm58 Transformer Cooling Water Over Temp -U14 [DO206]" />
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<IoSensor id="SensorPyroCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_PyroCommunicationError" infoText="" warningText="" alarmText="Alarm59 Pyro Communication Error [DO220]" />
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<IoSensor id="SensorTC1PyroWarmMaxDiff" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_TC1PyroWarmMaxDiff" infoText="" warningText="" alarmText="Alarm60 Pyro Warm Max Diff [DO230]" />
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<IoSensor id="SensorTC1AETempRasisingFast" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_TC1AETempRaisingFast" infoText="" warningText="" alarmText="Alarm61 PyroTemp Rasising Fast [DO231]" />
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<IoSensor id="SensorTCSHighLevel1" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TCSHighLevel1" infoText="" warningText="" alarmText="Alarm63 TCS Level High [DI-29]" />
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<IoSensor id="SensorPSU1Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU1Alarm" infoText="" warningText="" alarmText="Alarm66 PSU1.Alarm [DI-320]" />
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<IoSensor id="SensorPSU2Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU2Alarm" infoText="" warningText="" alarmText="Alarm67 PSU2.Alarm [DI-321]" />
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<IoSensor id="SensorPSU3Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU3Alarm" infoText="" warningText="" alarmText="Alarm68 PSU3.Alarm [DI-322]" />
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<IoSensor id="SensorSCR1Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR1Alarm" infoText="" warningText="" alarmText="Alarm69 SCR1.Alarm [DI-323]" />
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<IoSensor id="SensorSCR2Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR2Alarm" infoText="" warningText="" alarmText="Alarm70 SCR2.Alarm [DI-324]" />
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<IoSensor id="SensorSCR3Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR3Alarm" infoText="" warningText="" alarmText="Alarm71 SCR3.Alarm [DI-325]" />
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<IoSensor id="SensorPSUTCDPCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUdpCommunicationError" infoText="" warningText="" alarmText="Alarm72 PSU dp Communication Error [DI-328]" />
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<IoSensor id="SensorSCRTCDPCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRTCDPCommunicationError" infoText="" warningText="" alarmText="Alarm73 SCR dp Communication Error [DI-329]" />
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<IoSensor id="SensorPSU1dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU1dpCommunicationError" infoText="" warningText="" alarmText="Alarm74 PSU-1 dp Communication Error [DI-330]" />
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<IoSensor id="SensorPSU2dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU2dpCommunicationError" infoText="" warningText="" alarmText="Alarm75 PSU-2 dp Communication Error [DI-331]" />
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<IoSensor id="SensorPSU3dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU3dpCommunicationError" infoText="" warningText="" alarmText="Alarm76 PSU-3 dp Communication Error [DI-332]" />
|
||||||
|
<IoSensor id="SensorSCRdpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRdpCommunicationError" infoText="" warningText="" alarmText="Alarm77 SCR dp Communication Error [DI-333]" />
|
||||||
|
<IoSensor id="SensorGBNH3DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBNH3DetectorSW" infoText="" warningText="" alarmText="Alarm79 Gasbox NH3 Leak Detect [DI-34]" />
|
||||||
|
<IoSensor id="SensorPMNH3DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMNH3DetectorSW" infoText="" warningText="" alarmText="Alarm80 PM NH3 Leak Detect [DI-58]" />
|
||||||
|
<IoSensor id="SensorChamPressAboveATMSW2" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamPressAboveATMSW2" infoText="" warningText="" alarmText="Alarm98 Chamber Press Above ATM [DI-345]" />
|
||||||
|
<IoSensor id="SensorApcButterflyError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ApcButterflyError" infoText="" warningText="" alarmText="Alarm99 Apc Butterfly Error [DI-346]" />
|
||||||
|
<IoSensor id="SensorHearbeatTimeout" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_HearbeatTimeout" infoText="" warningText="" alarmText="Alarm100 PM Hearbeat Timeout [DI-350]" />
|
||||||
|
<IoSensor id="SensorMFC01Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC01Offline" infoText="" warningText="" alarmText="Alarm101 MFC01 Offline [DI-351]" />
|
||||||
|
<IoSensor id="SensorMFC02Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC02Offline" infoText="" warningText="" alarmText="Alarm102 MFC02 Offline [DI-352]" />
|
||||||
|
<IoSensor id="SensorMFC03Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC03Offline" infoText="" warningText="" alarmText="Alarm103 MFC03 Offline [DI-353]" />
|
||||||
|
<IoSensor id="SensorMFC04Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC04Offline" infoText="" warningText="" alarmText="Alarm104 MFC04 Offline [DI-354]" />
|
||||||
|
<IoSensor id="SensorMFC05Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC05Offline" infoText="" warningText="" alarmText="Alarm105 MFC05 Offline [DI-355]" />
|
||||||
|
<IoSensor id="SensorMFC06Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC06Offline" infoText="" warningText="" alarmText="Alarm106 MFC06 Offline [DI-356]" />
|
||||||
|
<IoSensor id="SensorMFC07Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC07Offline" infoText="" warningText="" alarmText="Alarm107 MFC07 Offline [DI-357]" />
|
||||||
|
<IoSensor id="SensorMFC08Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC08Offline" infoText="" warningText="" alarmText="Alarm108 MFC08 Offline [DI-358]" />
|
||||||
|
<IoSensor id="SensorMFC09Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC09Offline" infoText="" warningText="" alarmText="Alarm109 MFC09 Offline [DI-359]" />
|
||||||
|
<IoSensor id="SensorMFC10Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC10Offline" infoText="" warningText="" alarmText="Alarm110 MFC10 Offline [DI-360]" />
|
||||||
|
<IoSensor id="SensorMFC11Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC11Offline" infoText="" warningText="" alarmText="Alarm111 MFC11 Offline [DI-361]" />
|
||||||
|
<IoSensor id="SensorMFC12Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC12Offline" infoText="" warningText="" alarmText="Alarm112 MFC12 Offline [DI-362]" />
|
||||||
|
<IoSensor id="SensorMFC13Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC13Offline" infoText="" warningText="" alarmText="Alarm113 MFC13 Offline [DI-363]" />
|
||||||
|
<IoSensor id="SensorMFC14Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC14Offline" infoText="" warningText="" alarmText="Alarm114 MFC14 Offline [DI-364]" />
|
||||||
|
<IoSensor id="SensorMFC15Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC15Offline" infoText="" warningText="" alarmText="Alarm115 MFC15 Offline [DI-365]" />
|
||||||
|
<IoSensor id="SensorMFC16Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC16Offline" infoText="" warningText="" alarmText="Alarm116 MFC16 Offline [DI-366]" />
|
||||||
|
<IoSensor id="SensorMFC17Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC17Offline" infoText="" warningText="" alarmText="Alarm117 MFC17 Offline [DI-367]" />
|
||||||
|
<IoSensor id="SensorMFC18Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC18Offline" infoText="" warningText="" alarmText="Alarm118 MFC18 Offline [DI-368]" />
|
||||||
|
<IoSensor id="SensorMFC19Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC19Offline" infoText="" warningText="" alarmText="Alarm119 MFC19 Offline [DI-369]" />
|
||||||
|
<IoSensor id="SensorMFC20Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC20Offline" infoText="" warningText="" alarmText="Alarm120 MFC20 Offline [DI-370]" />
|
||||||
|
<IoSensor id="SensorMFC22Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC22Offline" infoText="" warningText="" alarmText="Alarm122 MFC22 Offline [DI-372]" />
|
||||||
|
<IoSensor id="SensorMFC23Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC23Offline" infoText="" warningText="" alarmText="Alarm123 MFC23 Offline [DI-373]" />
|
||||||
|
<IoSensor id="SensorMFC25Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC25Offline" infoText="" warningText="" alarmText="Alarm125 MFC25 Offline [DI-375]" />
|
||||||
|
<IoSensor id="SensorMFC26Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC26Offline" infoText="" warningText="" alarmText="Alarm126 MFC26 Offline [DI-376]" />
|
||||||
|
<IoSensor id="SensorMFC27Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC27Offline" infoText="" warningText="" alarmText="Alarm127 MFC27 Offline [DI-377]" />
|
||||||
|
<IoSensor id="SensorMFC28Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC28Offline" infoText="" warningText="" alarmText="Alarm128 MFC28 Offline [DI-378]" />
|
||||||
|
<IoSensor id="SensorMFC29Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC29Offline" infoText="" warningText="" alarmText="Alarm129 MFC29 Offline [DI-379]" />
|
||||||
|
<IoSensor id="SensorMFC30Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC30Offline" infoText="" warningText="" alarmText="Alarm130 MFC30 Offline [DI-380]" />
|
||||||
|
<IoSensor id="SensorMFC31Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC31Offline" infoText="" warningText="" alarmText="Alarm131 MFC31 Offline [DI-381]" />
|
||||||
|
<IoSensor id="SensorMFC32Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC32Offline" infoText="" warningText="" alarmText="Alarm132 MFC32 Offline [DI-382]" />
|
||||||
|
<IoSensor id="SensorMFC33Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC33Offline" infoText="" warningText="" alarmText="Alarm133 MFC33 Offline [DI-383]" />
|
||||||
|
<IoSensor id="SensorMFC34Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC34Offline" infoText="" warningText="" alarmText="Alarm134 MFC34 Offline [DI-384]" />
|
||||||
|
<IoSensor id="SensorMFC35Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC35Offline" infoText="" warningText="" alarmText="Alarm135 MFC35 Offline [DI-385]" />
|
||||||
|
<IoSensor id="SensorMFC36Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC36Offline" infoText="" warningText="" alarmText="Alarm136 MFC36 Offline [DI-386]" />
|
||||||
|
<IoSensor id="SensorMFC37Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC37Offline" infoText="" warningText="" alarmText="Alarm137 MFC37 Offline [DI-387]" />
|
||||||
|
<IoSensor id="SensorMFC38Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC38Offline" infoText="" warningText="" alarmText="Alarm138 MFC38 Offline [DI-388]" />
|
||||||
|
<IoSensor id="SensorMFC40Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC40Offline" infoText="" warningText="" alarmText="Alarm140 MFC40 Offline [DI-390]" />
|
||||||
|
<IoSensor id="SensorPC01Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC01Offline" infoText="" warningText="" alarmText="Alarm141 PC1 Offline [DI-391]" />
|
||||||
|
<IoSensor id="SensorPC02Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC02Offline" infoText="" warningText="" alarmText="Alarm142 PC2 Offline [DI-392]" />
|
||||||
|
<IoSensor id="SensorPC03Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC03Offline" infoText="" warningText="" alarmText="Alarm143 PC3 Offline [DI-393]" />
|
||||||
|
<IoSensor id="SensorPC04Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC04Offline" infoText="" warningText="" alarmText="Alarm144 PC4 Offline [DI-394]" />
|
||||||
|
<IoSensor id="SensorPC05Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC05Offline" infoText="" warningText="" alarmText="Alarm145 PC5 Offline [DI-395]" />
|
||||||
|
<IoSensor id="SensorPC06Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC06Offline" infoText="" warningText="" alarmText="Alarm146 PC6 Offline [DI-396]" />
|
||||||
|
<IoSensor id="SensorPC07Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC07Offline" infoText="" warningText="" alarmText="Alarm147 PC7 Offline [DI-397]" />
|
||||||
|
|
||||||
|
<IoSensor id="SensorChamAtSafeProcessPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamAtSafeProcessPressSW" infoText="Information1 Chamber At Safe Process Press [DI-5]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorPMATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMATMSW" infoText="Information3 PM At ATM [DI-9]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorHeaterTempBelow900CSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_HeaterTempLowLimitSW" infoText="Information4 Heater Temp Below 900C [DI-11]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorConfinementRingUp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingUp" infoText="Information5 Confinement Ring At Up Position [DI-12]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSusceptorAtSafeSpeed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SusceptorAtSafeSpeed" infoText="Information6 Susceptor At Safe Speed [DI-13]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorChamLidPushButtonLocal" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamLidPushButtonLocal" infoText="Information7 Chamer Lid Push Button On Local Mode [DI-49]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorConfinementRingDown" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingDown" infoText="Information8 Confinement Ring At Down position [DI-50]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorReactorSuspectorCheck" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorSuspectorCheck" infoText="Information9 ReactorSuspectorCheck [DI-51]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorManualLidOPLocal" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidOPLocal" infoText="Information10 ManualLidOP.Local[DI-88]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorManualLidUpPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidUpPB" infoText="Information11 ManualLidUp.PB[DI-89]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorManualLidDownPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidDownPB" infoText="Information12 ManualLidDown.PB[DI-90]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorManualLidUpLockPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidUpLockPB" infoText="Information13 ManualLidUpLock.PB[DI-91]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorManualLidForwardPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidForwardPB" infoText="Information14 ManualLidForward.PB[DI-92]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorManualLidBackwardPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidBackwardPB" infoText="Information15 ManualLidBackward.PB[DI-93]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorChamMoveBodyUp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyUp" infoText="Information16 ChamMoveBody.Up[DI-96]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorChamMoveBodyUpLatchFW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyUpLatchFW" infoText="Information17 ChamMoveBody.Up.LatchFW[DI-97]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorChamMoveBodyDown" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyDown" infoText="Information18 ChamMoveBody.Down[DI-98]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorChamMoveBodyFront" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyFront" infoText="Information19 ChamMoveBody.Front[DI-99]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorChamMoveBodyEnd" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyEnd" infoText="Information20 ChamMoveBody.End[DI-100]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorChamMoveBodyEndLatchBW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyEndLatchBW" infoText="Information21 ChamMoveBody.End.LatchBW[DI-101]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSHGasConnectorLoosen" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHGasConnectorLoosen" infoText="Information22 SH.GasConnector.Loosen[DI-102]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSHGasConnectorTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHGasConnectorTighten" infoText="Information23 SH.GasConnector.Tighten[DI-103]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSHLidLoosen" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidLoosen" infoText="Information24 SH.Lid.Loosen[DI-104]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSHLidTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidTighten" infoText="Information25 SH.Lid.Tighten[DI-105]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSHLidSwingLock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidSwingLock" infoText="Information26 SH.Lid.Swing.Lock[DI-107]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSHLidSwingUnlock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidSwingUnlock" infoText="Information27 SH.Lid.Swing.Unlock[DI-108]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorMiddleLidLoosen" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidLoosen" infoText="Information28 Middle.Lid.Loosen[DI-118]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorMiddleLidTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidTighten" infoText="Information29 Middle.Lid.Tighten[DI-119]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorMiddleLidSwingLock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingLock" infoText="Information30 Middle.Lid.Swing.Lock[DI-121]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorMiddleLidSwingUnlock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingUnlock" infoText="Information31 Middle.Lid.Swing.Unlock[DI-122]" warningText="" alarmText="" />
|
||||||
|
<!--<IoSensor id="SensorPSUInnerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUInnerTempLAlarm" infoText="Information32 PSU.Inner.Temp Low[DI-308]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorPSUMiddleTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUMiddleTempLAlarm" infoText="Information33 PSU.Middle.Temp Low[DI-309]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorPSUOuterTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUOuterTempLAlarm" infoText="Information34 PSU.Outer.TempLow[DI-310]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSCRUpperTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRUpperTempLAlarm" infoText="Information35 SCR.Upper.Temp Low[DI-314]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSCRMiddleTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRMiddleTempLAlarm" infoText="Information36 SCR.Middle.Temp Low[DI-315]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSCRLowerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRLowerTempLAlarm" infoText="Information37 SCR.Lower.Temp Low[DI-316]" warningText="" alarmText="" />-->
|
||||||
|
<IoSensor id="SensorConfinementRingServoON" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingServoON" infoText="Information38 ConfinementRingServoON [DI-337]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorServoReady" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ServoReady" infoText="Information39 Servo Not Ready [DI-288]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorPSU1Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU1Status" infoText="Information40 PSU1 Status Is Off[DI-296]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorPSU2Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU2Status" infoText="Information41 PSU2 Status Is Off[DI-297]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorPSU3Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU3Status" infoText="Information42 PSU3 Status Is Off[DI-298]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSCR1Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR1Status" infoText="Information43 SCR1 Status Is Off[DI-302]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSCR2Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR2Status" infoText="Information44 SCR2 Status Is Off[DI-303]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorSCR3Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR3Status" infoText="Information45 SCR3 Status Is Off[DI-304]" warningText="" alarmText="" />
|
||||||
|
<IoSensor id="SensorPumpCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpCabDoorClosed" infoText="Information46 PumpCabDoor Not Closed [DI-71]" warningText="" alarmText="" />
|
||||||
|
</IoSensors>
|
||||||
|
|
||||||
<SicServos classType="Aitex.Core.RT.Device.Devices.SicServo" assembly="MECF.Framework.RT.EquipmentLibrary">
|
<SicServos classType="Aitex.Core.RT.Device.Devices.SicServo" assembly="MECF.Framework.RT.EquipmentLibrary">
|
||||||
<SicServo id="PMServo" module="" display="PMServo" schematicId="PMServo" unit="" aioType="float"
|
<SicServo id="PMServo" module="" display="PMServo" schematicId="PMServo" unit="" aioType="float"
|
||||||
|
|||||||
Loading…
Reference in New Issue
Block a user