From 2ca805fe2e947ac49478566d1e4187f60988fa8f Mon Sep 17 00:00:00 2001 From: "SIC1016\\caipeilun" <905168240@qq.com> Date: Sat, 15 Aug 2026 10:36:59 +0800 Subject: [PATCH] =?UTF-8?q?=E4=BF=AE=E6=94=B9pm=20vacidle=20=E5=92=8Catmid?= =?UTF-8?q?le?= MIME-Version: 1.0 Content-Type: text/plain; charset=UTF-8 Content-Transfer-Encoding: 8bit --- .../Config/TM/DeviceModelSystem.xml | 1 - .../SicModules/PMs/Routines/PMPumpRoutine.cs | 2 +- .../PMs/Routines/PMToAtmIdleRoutine.cs | 67 ++++++------------- .../PMs/Routines/PMVacIdleRoutine.cs | 2 +- .../SicModules/PMs/Routines/PMVentRoutine.cs | 3 +- .../SicModules/TMs/Routines/TMBaseRoutine.cs | 26 +++++++ .../SicModules/TMs/Routines/TMHomeRoutine.cs | 6 +- 7 files changed, 53 insertions(+), 54 deletions(-) diff --git a/App/Modules/SicModules/Config/TM/DeviceModelSystem.xml b/App/Modules/SicModules/Config/TM/DeviceModelSystem.xml index a6763a4..4d667df 100644 --- a/App/Modules/SicModules/Config/TM/DeviceModelSystem.xml +++ b/App/Modules/SicModules/Config/TM/DeviceModelSystem.xml @@ -116,7 +116,6 @@ - diff --git a/App/Modules/SicModules/PMs/Routines/PMPumpRoutine.cs b/App/Modules/SicModules/PMs/Routines/PMPumpRoutine.cs index 880a804..a33cd2f 100644 --- a/App/Modules/SicModules/PMs/Routines/PMPumpRoutine.cs +++ b/App/Modules/SicModules/PMs/Routines/PMPumpRoutine.cs @@ -244,7 +244,6 @@ namespace SicModules.PMs.Routines SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout); SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout); - _pmIoInterLock.SetPMPumpRoutineRunning(false, out _); } catch (RoutineBreakException) { @@ -255,6 +254,7 @@ namespace SicModules.PMs.Routines return Result.FAIL; } + _pmIoInterLock.SetPMPumpRoutineRunning(false, out _); Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); diff --git a/App/Modules/SicModules/PMs/Routines/PMToAtmIdleRoutine.cs b/App/Modules/SicModules/PMs/Routines/PMToAtmIdleRoutine.cs index f4e5a5b..0a08961 100644 --- a/App/Modules/SicModules/PMs/Routines/PMToAtmIdleRoutine.cs +++ b/App/Modules/SicModules/PMs/Routines/PMToAtmIdleRoutine.cs @@ -34,7 +34,7 @@ namespace SicModules.PMs.Routines SetM1to16, SetM17M18, - SetM2toM40, + SetM18toM40, SetPC, SetM291519to38, SetGroupJ, @@ -79,9 +79,9 @@ namespace SicModules.PMs.Routines SetV31, SetV32, SetV35V36, - SetGroupV25, SetV103, SetV105, + SetGroupV25, SetV92V93V95, SetV94, @@ -164,7 +164,7 @@ namespace SicModules.PMs.Routines { CheckRoutineTimeOut(); - //关闭V76,打开V75 + //DOR Pump 抽真空。关闭V76,打开V75 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); @@ -175,91 +175,62 @@ namespace SicModules.PMs.Routines //关闭V72,打开V25 SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); - //打开V103,关闭V105 - SetIoValueByGroup((int)RoutineStep.SetV103, IoGroupName.V103, true, _IoValueOpenCloseTimeout); - SetIoValueByGroup((int)RoutineStep.SetV105, IoGroupName.V105, false, _IoValueOpenCloseTimeout); //打开V31,打开V32 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); - //打开V35,打开V36 + //5、 打开 V35(H2N2.Line1)、 V36（H2N2.Line2） , 关闭 B/ C / E / F / H / K Valves,打开 D/ G Valves 。 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); - - //关闭B/C/E/F/H/K 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); - - //打开D/G 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); - //设置MFC和PC的模式 - SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); - SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); - - //M1-M16设定为default值(M2、M9、M15除外) - SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0); - SetMfcToDefaultByGroup((int)RoutineStep.SetM17M18, MfcGroupName.M17M18, 0); - - //设置所有PC到默认值 + //6、 M1-M17 设定为 default 值， 所有 PC 设定为 default 值（PC1-PC9） ，M18 - M40（除 M30\M34\M39） MFC 5s ramp 到 0。 + SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.M1toM17); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); + SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 5); - //M2、M9、M15、M19-M40 MFC 3s ramp 到默认值 - SetMfcToDefaultByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM42, 3); - - //关闭蝶阀 + //7、 关闭蝶阀， 再关闭 EPV2 SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay1, 1); - - //关闭EPV2 SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); - //打开A 组阀 + //8、 打开 A Valves（V33S(SH.H2/N2 Switch); V67、 V68(N2.Supply） ). SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout); - //打开Final2阀 + //9 、 打 开 V87 （ SHPurge.Final ）、 V88 （ OuterGas.Final ）、 V89 （ InnerGas.Final ）、 V90（MiddleGas.Final） 、 V91（OpticPurge.Final）、 V97（CarryGas.Final） ； + //M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ； SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); - - //Final2阀对应的MFC 3s Ramp到Default值 SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3); + //10、 打开 V92（GasRingPurge.Final）、 V93（ChamberPurge.Final）、 V95（ConfinementRing.Final）；等待 3S SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay2, 3); + //11、 M32、 M35、 M37 依次设定 3S ramp 到 default 值 ； 等待 3S， SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 3); - //打开V68 - SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); - - //打开J Valves + //12、 打开 J Valves ；设置 M18-M26 3s ramp 到 default 值。 + //等到腔体压力达到 900 mbar打开 V94（RotationUpPurge.Final）、 M36 设定 5S ramp 到 default 值； + //等待 3S，打开 V96（HeaterWF.Final）； M38 设定 5S ramp 到 default 值； SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout); - - //设置M2,M9,M15,M19-M26 3s ramp 到default 值 - SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M2toM26, 3); - - //开V94,V96需等到腔体压力大于950 - WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 950, _waitPMPressureUpTimeout); - + WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 900, _waitPMPressureUpTimeout); SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 5); TimeDelay((int)RoutineStep.TimeDelay3, 3); - SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 5); - TimeDelay((int)RoutineStep.TimeDelay4, 3); - //等待反应腔压力大于1000 + //13、 压力达到 1020，结束 NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to {_ventBasePressure} mbar!"); - WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout); - - //设置M28,M29,M31,M40 3s ramp 到default 值 - SetMfcToDefaultByGroup((int)RoutineStep.SetMfc28to40Default, MfcGroupName.M28293140, 3); + WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout); //等待反应腔压力大于1000 } catch (RoutineBreakException) { diff --git a/App/Modules/SicModules/PMs/Routines/PMVacIdleRoutine.cs b/App/Modules/SicModules/PMs/Routines/PMVacIdleRoutine.cs index 9ecbef1..d4e062c 100644 --- a/App/Modules/SicModules/PMs/Routines/PMVacIdleRoutine.cs +++ b/App/Modules/SicModules/PMs/Routines/PMVacIdleRoutine.cs @@ -68,7 +68,6 @@ namespace SicModules.PMs.Routines SetTvModeToPress, SetTVto1050, OpenGasIn1, - SetV65, CloseGasIn1, CloseFinanl1, CloseFinanl2, @@ -81,6 +80,7 @@ namespace SicModules.PMs.Routines SetV32, SetV35V36, SetV87V97, + SetV65, SetV103, SetV105, SetTVPositionMode, diff --git a/App/Modules/SicModules/PMs/Routines/PMVentRoutine.cs b/App/Modules/SicModules/PMs/Routines/PMVentRoutine.cs index 16dd594..5bfc905 100644 --- a/App/Modules/SicModules/PMs/Routines/PMVentRoutine.cs +++ b/App/Modules/SicModules/PMs/Routines/PMVentRoutine.cs @@ -233,8 +233,6 @@ namespace SicModules.PMs.Routines NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to {_ventBasePressure} mbar!"); WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout); //等待反应腔压力大于1000 - _pmIoInterLock.SetPMVentRoutineRunning(false, out _); - } catch (RoutineBreakException) { @@ -245,6 +243,7 @@ namespace SicModules.PMs.Routines return Result.FAIL; } + _pmIoInterLock.SetPMVentRoutineRunning(false, out _); Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); diff --git a/App/Modules/SicModules/TMs/Routines/TMBaseRoutine.cs b/App/Modules/SicModules/TMs/Routines/TMBaseRoutine.cs index 7f2f868..c34cb7f 100644 --- a/App/Modules/SicModules/TMs/Routines/TMBaseRoutine.cs +++ b/App/Modules/SicModules/TMs/Routines/TMBaseRoutine.cs @@ -1860,5 +1860,31 @@ namespace SicModules.TMs.Routines throw (new RoutineBreakException()); } } + + public void SetTMLLBalanceValve(int id, TM tm,bool value) + { + Tuple ret = Execute(id, () => + { + Notify($"{(value ? "Open":"Close")} {tm.Name} balance valve"); + + if (!tm.SetSlowVentValve(value, out string reason)) + { + Stop(reason); + return false; + } + + return true; + }); + + if (ret.Item1) + { + if (ret.Item2 == Result.FAIL) + { + throw (new RoutineFaildException()); + } + else + throw (new RoutineBreakException()); + } + } } } diff --git a/App/Modules/SicModules/TMs/Routines/TMHomeRoutine.cs b/App/Modules/SicModules/TMs/Routines/TMHomeRoutine.cs index 8b363d5..036db99 100644 --- a/App/Modules/SicModules/TMs/Routines/TMHomeRoutine.cs +++ b/App/Modules/SicModules/TMs/Routines/TMHomeRoutine.cs @@ -10,6 +10,7 @@ namespace SicModules.TMs.Routines { CloseV77, CloseV80, + CloseV85, TMRobotHome } @@ -42,8 +43,11 @@ namespace SicModules.TMs.Routines { try { + //关闭 V77， V78； 关闭 V85；关闭 V70-1， V70-2； Home Robot, Check Load CloseTMVent((int)RoutineStep.CloseV77); - //CloseBufferVent((int)RoutineStep.CloseV80); + //没有V78 + SetTMLLBalanceValve((int)RoutineStep.CloseV85, TMDevice,false); + //没有V70 ExecuteRoutine((int)RoutineStep.TMRobotHome, _tmRobotHomeRoutine); } catch (RoutineBreakException)