修改pm vacidle 和atmidle

App/Modules/SicModules/Config/TM/DeviceModelSystem.xml

@@ -116,7 +116,6 @@
     <IoValve id="TMVent" module="TM" display="V77" schematicId="TMVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMVentFB" doOpen="DO_TMVent" />
     <IoValve id="UnLoadVent" module="TM" display="V78" schematicId="UnLoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadVentFB" doOpen="DO_UnloadVent" />
     <IoValve id="TMLoadBanlance" module="TM" display="V85" schematicId="TMLoadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMLoadBanlanceFB" doOpen="DO_TMLoadBanlance" />
-    <IoValve id="TMUnLoadBanlance" module="TM" display="V124" schematicId="TMToUnloadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_TMToUnloadBanlance" />
   </IoValves>
   <IoSlitValves classType="Aitex.Core.RT.Device.Unit.IoSlitValve" assembly="MECF.Framework.RT.EquipmentLibrary">
     <IoSlitValve id="LoadLockDoor" module="TM" display="LLDoor" Type="" unit="" schematicId="LLDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadDoorOpened" diClose="DI_LoadDoorClosed" doOpen="DO_LoadDoorOpen" doClose="DO_LoadDoorClose" />

App/Modules/SicModules/PMs/Routines/PMPumpRoutine.cs

@@ -244,7 +244,6 @@ namespace SicModules.PMs.Routines
                 SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
                 SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);
 
-                _pmIoInterLock.SetPMPumpRoutineRunning(false, out _);
             }
             catch (RoutineBreakException)
             {
@@ -255,6 +254,7 @@ namespace SicModules.PMs.Routines
                 return Result.FAIL;
             }
 
+            _pmIoInterLock.SetPMPumpRoutineRunning(false, out _);
             Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
             _swTimer.Stop();
 

App/Modules/SicModules/PMs/Routines/PMToAtmIdleRoutine.cs

@@ -34,7 +34,7 @@ namespace SicModules.PMs.Routines
 
             SetM1to16,
             SetM17M18,
-            SetM2toM40,
+            SetM18toM40,
             SetPC,
             SetM291519to38,
             SetGroupJ,
@@ -79,9 +79,9 @@ namespace SicModules.PMs.Routines
             SetV31,
             SetV32,
             SetV35V36,
-            SetGroupV25,
             SetV103,
             SetV105,
+            SetGroupV25,
 
             SetV92V93V95,
             SetV94,
@@ -164,7 +164,7 @@ namespace SicModules.PMs.Routines
             {
                 CheckRoutineTimeOut();
 
-                //关闭V76,打开V75
+                //DOR Pump 抽真空。关闭V76,打开V75
                 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
 
@@ -175,91 +175,62 @@ namespace SicModules.PMs.Routines
                 //关闭V72,打开V25
                 SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
-                //打开V103,关闭V105
-                SetIoValueByGroup((int)RoutineStep.SetV103, IoGroupName.V103, true, _IoValueOpenCloseTimeout);
-                SetIoValueByGroup((int)RoutineStep.SetV105, IoGroupName.V105, false, _IoValueOpenCloseTimeout);
 
                 //打开V31,打开V32
                 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
 
-                //打开V35,打开V36
+                //5、 打开 V35(H2N2.Line1)、 V36（H2N2.Line2） , 关闭 B/ C / E / F / H / K Valves,打开 D/ G Valves 。
                 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
-
-                //关闭B/C/E/F/H/K 阀门
                 SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
-
-                //打开D/G 阀门
                 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
 
-                //设置MFC和PC的模式
+                //6、 M1-M17 设定为 default 值， 所有 PC 设定为 default 值（PC1-PC9） ，M18 - M40（除 M30\M34\M39） MFC 5s ramp 到 0。
-                SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
+                SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.M1toM17);
-                SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
-
-                //M1-M16设定为default值(M2、M9、M15除外)
-                SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
-                SetMfcToDefaultByGroup((int)RoutineStep.SetM17M18, MfcGroupName.M17M18, 0);
-
-                //设置所有PC到默认值
                 SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
+                SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 5);
 
-                //M2、M9、M15、M19-M40 MFC 3s ramp 到默认值
+                //7、 关闭蝶阀， 再关闭 EPV2
-                SetMfcToDefaultByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM42, 3);
-
-                //关闭蝶阀
                 SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
                 SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8);
                 TimeDelay((int)RoutineStep.TimeDelay1, 1);
-
-                //关闭EPV2
                 SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
 
-                //打开A 组阀
+                //8、 打开 A Valves（V33S(SH.H2/N2 Switch); V67、 V68(N2.Supply） ).
                 SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
 
-                //打开Final2阀
+                //9 、 打 开 V87 （ SHPurge.Final ）、 V88 （ OuterGas.Final ）、 V89 （ InnerGas.Final ）、 V90（MiddleGas.Final） 、 V91（OpticPurge.Final）、 V97（CarryGas.Final） ；
+                //M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ；
                 SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
-
-                //Final2阀对应的MFC 3s Ramp到Default值
                 SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
 
+                //10、 打开 V92（GasRingPurge.Final）、 V93（ChamberPurge.Final）、 V95（ConfinementRing.Final）；等待 3S
                 SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout);
                 TimeDelay((int)RoutineStep.TimeDelay2, 3);
 
+                //11、 M32、 M35、 M37 依次设定 3S ramp 到 default 值 ； 等待 3S，
                 SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 3);
 
-                //打开V68
+                //12、 打开 J Valves ；设置 M18-M26 3s ramp 到 default 值。
-                SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
+                //等到腔体压力达到 900 mbar打开 V94（RotationUpPurge.Final）、 M36 设定 5S ramp 到 default 值；
-
+                //等待 3S，打开 V96（HeaterWF.Final）； M38 设定 5S ramp 到 default 值；
-                //打开J Valves
                 SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
-
+                WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 900, _waitPMPressureUpTimeout);
-                //设置M2,M9,M15,M19-M26 3s ramp 到default 值
-                SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M2toM26, 3);
-
-                //开V94,V96需等到腔体压力大于950
-                WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 950, _waitPMPressureUpTimeout);
-
                 SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout);
                 SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 5);
                 TimeDelay((int)RoutineStep.TimeDelay3, 3);
-
                 SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout);
                 SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 5);
-                TimeDelay((int)RoutineStep.TimeDelay4, 3);
 
-                //等待反应腔压力大于1000 
+                //13、 压力达到 1020，结束
                 NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to {_ventBasePressure} mbar!");
-                WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout);
+                WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout); //等待反应腔压力大于1000 
-
-                //设置M28,M29,M31,M40 3s ramp 到default 值
-                SetMfcToDefaultByGroup((int)RoutineStep.SetMfc28to40Default, MfcGroupName.M28293140, 3);
             }
             catch (RoutineBreakException)
             {

App/Modules/SicModules/PMs/Routines/PMVacIdleRoutine.cs

@@ -68,7 +68,6 @@ namespace SicModules.PMs.Routines
             SetTvModeToPress,
             SetTVto1050,
             OpenGasIn1,
-            SetV65,
             CloseGasIn1,
             CloseFinanl1,
             CloseFinanl2,
@@ -81,6 +80,7 @@ namespace SicModules.PMs.Routines
             SetV32,
             SetV35V36,
             SetV87V97,
+            SetV65,
             SetV103,
             SetV105,
             SetTVPositionMode,

App/Modules/SicModules/PMs/Routines/PMVentRoutine.cs

@@ -233,8 +233,6 @@ namespace SicModules.PMs.Routines
                 NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to {_ventBasePressure} mbar!");
                 WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout); //等待反应腔压力大于1000 
 
-                _pmIoInterLock.SetPMVentRoutineRunning(false, out _);
-
             }
             catch (RoutineBreakException)
             {
@@ -245,6 +243,7 @@ namespace SicModules.PMs.Routines
                 return Result.FAIL;
             }
 
+            _pmIoInterLock.SetPMVentRoutineRunning(false, out _);
             Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
             _swTimer.Stop();
 

App/Modules/SicModules/TMs/Routines/TMBaseRoutine.cs

@@ -1860,5 +1860,31 @@ namespace SicModules.TMs.Routines
                     throw (new RoutineBreakException());
             }
         }
+
+        public void SetTMLLBalanceValve(int id, TM tm,bool value)
+        {
+            Tuple<bool, Result> ret = Execute(id, () =>
+            {
+                Notify($"{(value ? "Open":"Close")} {tm.Name} balance valve");
+
+                if (!tm.SetSlowVentValve(value, out string reason))
+                {
+                    Stop(reason);
+                    return false;
+                }
+
+                return true;
+            });
+
+            if (ret.Item1)
+            {
+                if (ret.Item2 == Result.FAIL)
+                {
+                    throw (new RoutineFaildException());
+                }
+                else
+                    throw (new RoutineBreakException());
+            }
+        }
     }
 }

App/Modules/SicModules/TMs/Routines/TMHomeRoutine.cs

@@ -10,6 +10,7 @@ namespace SicModules.TMs.Routines
         {
             CloseV77,
             CloseV80,
+            CloseV85,
             TMRobotHome
         }
 
@@ -42,8 +43,11 @@ namespace SicModules.TMs.Routines
         {
             try
             {
+                //关闭 V77， V78； 关闭 V85；关闭 V70-1， V70-2； Home Robot, Check Load
                 CloseTMVent((int)RoutineStep.CloseV77);
-                //CloseBufferVent((int)RoutineStep.CloseV80);
+                //没有V78
+                SetTMLLBalanceValve((int)RoutineStep.CloseV85, TMDevice,false);
+                //没有V70
                 ExecuteRoutine((int)RoutineStep.TMRobotHome, _tmRobotHomeRoutine);
             }
             catch (RoutineBreakException)