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修改pm vacidle 和atmidle

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SIC1016\caipeilun 2026-08-15 10:36:59 +08:00
parent c74feb63b9
commit 2ca805fe2e
7 changed files with 53 additions and 54 deletions
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1
App/Modules/SicModules/Config/TM/DeviceModelSystem.xml
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@ -116,7 +116,6 @@
<IoValve id="TMVent" module="TM" display="V77" schematicId="TMVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMVentFB" doOpen="DO_TMVent" />
<IoValve id="UnLoadVent" module="TM" display="V78" schematicId="UnLoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadVentFB" doOpen="DO_UnloadVent" />
<IoValve id="TMLoadBanlance" module="TM" display="V85" schematicId="TMLoadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMLoadBanlanceFB" doOpen="DO_TMLoadBanlance" />
<IoValve id="TMUnLoadBanlance" module="TM" display="V124" schematicId="TMToUnloadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_TMToUnloadBanlance" />
</IoValves>
<IoSlitValves classType="Aitex.Core.RT.Device.Unit.IoSlitValve" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSlitValve id="LoadLockDoor" module="TM" display="LLDoor" Type="" unit="" schematicId="LLDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadDoorOpened" diClose="DI_LoadDoorClosed" doOpen="DO_LoadDoorOpen" doClose="DO_LoadDoorClose" />

2
App/Modules/SicModules/PMs/Routines/PMPumpRoutine.cs
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@ -244,7 +244,6 @@ namespace SicModules.PMs.Routines
SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);
_pmIoInterLock.SetPMPumpRoutineRunning(false, out _);
}
catch (RoutineBreakException)
{
@ -255,6 +254,7 @@ namespace SicModules.PMs.Routines
return Result.FAIL;
}
_pmIoInterLock.SetPMPumpRoutineRunning(false, out _);
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
_swTimer.Stop();

67
App/Modules/SicModules/PMs/Routines/PMToAtmIdleRoutine.cs
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@ -34,7 +34,7 @@ namespace SicModules.PMs.Routines
SetM1to16,
SetM17M18,
SetM2toM40,
SetM18toM40,
SetPC,
SetM291519to38,
SetGroupJ,
@ -79,9 +79,9 @@ namespace SicModules.PMs.Routines
SetV31,
SetV32,
SetV35V36,
SetGroupV25,
SetV103,
SetV105,
SetGroupV25,
SetV92V93V95,
SetV94,
@ -164,7 +164,7 @@ namespace SicModules.PMs.Routines
{
CheckRoutineTimeOut();
//关闭V76,打开V75
//DOR Pump 抽真空。关闭V76,打开V75
SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
@ -175,91 +175,62 @@ namespace SicModules.PMs.Routines
//关闭V72,打开V25
SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
//打开V103,关闭V105
SetIoValueByGroup((int)RoutineStep.SetV103, IoGroupName.V103, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV105, IoGroupName.V105, false, _IoValueOpenCloseTimeout);
//打开V31,打开V32
SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
//打开V35,打开V36
//5、 打开 V35(H2N2.Line1)、 V36（H2N2.Line2） , 关闭 B/ C / E / F / H / K Valves,打开 D/ G Valves 。
SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
//关闭B/C/E/F/H/K 阀门
SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
//打开D/G 阀门
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
//设置MFC和PC的模式
SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
//M1-M16设定为default值(M2、M9、M15除外)
SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
SetMfcToDefaultByGroup((int)RoutineStep.SetM17M18, MfcGroupName.M17M18, 0);
//设置所有PC到默认值
//6、 M1-M17 设定为 default 值， 所有 PC 设定为 default 值（PC1-PC9） ，M18 - M40（除 M30\M34\M39） MFC 5s ramp 到 0。
SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.M1toM17);
SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 5);
//M2、M9、M15、M19-M40 MFC 3s ramp 到默认值
SetMfcToDefaultByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM42, 3);
//关闭蝶阀
//7、 关闭蝶阀， 再关闭 EPV2
SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8);
TimeDelay((int)RoutineStep.TimeDelay1, 1);
//关闭EPV2
SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
//打开A 组阀
//8、 打开 A Valves（V33S(SH.H2/N2 Switch); V67、 V68(N2.Supply） ).
SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
//打开Final2阀
//9 、 打 开 V87 （ SHPurge.Final ）、 V88 （ OuterGas.Final ）、 V89 （ InnerGas.Final ）、 V90（MiddleGas.Final） 、 V91（OpticPurge.Final）、 V97（CarryGas.Final） ；
//M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ；
SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
//Final2阀对应的MFC 3s Ramp到Default值
SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
//10、 打开 V92（GasRingPurge.Final）、 V93（ChamberPurge.Final）、 V95（ConfinementRing.Final）；等待 3S
SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout);
TimeDelay((int)RoutineStep.TimeDelay2, 3);
//11、 M32、 M35、 M37 依次设定 3S ramp 到 default 值 ； 等待 3S，
SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 3);
//打开V68
SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
//打开J Valves
//12、 打开 J Valves ；设置 M18-M26 3s ramp 到 default 值。
//等到腔体压力达到 900 mbar打开 V94（RotationUpPurge.Final）、 M36 设定 5S ramp 到 default 值；
//等待 3S，打开 V96（HeaterWF.Final）； M38 设定 5S ramp 到 default 值；
SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
//设置M2,M9,M15,M19-M26 3s ramp 到default 值
SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M2toM26, 3);
//开V94,V96需等到腔体压力大于950
WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 950, _waitPMPressureUpTimeout);
WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 900, _waitPMPressureUpTimeout);
SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout);
SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 5);
TimeDelay((int)RoutineStep.TimeDelay3, 3);
SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout);
SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 5);
TimeDelay((int)RoutineStep.TimeDelay4, 3);
//等待反应腔压力大于1000
//13、 压力达到 1020，结束
NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to {_ventBasePressure} mbar!");
WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout);
//设置M28,M29,M31,M40 3s ramp 到default 值
SetMfcToDefaultByGroup((int)RoutineStep.SetMfc28to40Default, MfcGroupName.M28293140, 3);
WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout); //等待反应腔压力大于1000
}
catch (RoutineBreakException)
{

2
App/Modules/SicModules/PMs/Routines/PMVacIdleRoutine.cs
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@ -68,7 +68,6 @@ namespace SicModules.PMs.Routines
SetTvModeToPress,
SetTVto1050,
OpenGasIn1,
SetV65,
CloseGasIn1,
CloseFinanl1,
CloseFinanl2,
@ -81,6 +80,7 @@ namespace SicModules.PMs.Routines
SetV32,
SetV35V36,
SetV87V97,
SetV65,
SetV103,
SetV105,
SetTVPositionMode,

3
App/Modules/SicModules/PMs/Routines/PMVentRoutine.cs
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@ -233,8 +233,6 @@ namespace SicModules.PMs.Routines
NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to {_ventBasePressure} mbar!");
WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout); //等待反应腔压力大于1000
_pmIoInterLock.SetPMVentRoutineRunning(false, out _);
}
catch (RoutineBreakException)
{
@ -245,6 +243,7 @@ namespace SicModules.PMs.Routines
return Result.FAIL;
}
_pmIoInterLock.SetPMVentRoutineRunning(false, out _);
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
_swTimer.Stop();

26
App/Modules/SicModules/TMs/Routines/TMBaseRoutine.cs
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@ -1860,5 +1860,31 @@ namespace SicModules.TMs.Routines
throw (new RoutineBreakException());
}
}
public void SetTMLLBalanceValve(int id, TM tm,bool value)
{
Tuple<bool, Result> ret = Execute(id, () =>
{
Notify($"{(value ? "Open":"Close")} {tm.Name} balance valve");
if (!tm.SetSlowVentValve(value, out string reason))
{
Stop(reason);
return false;
}
return true;
});
if (ret.Item1)
{
if (ret.Item2 == Result.FAIL)
{
throw (new RoutineFaildException());
}
else
throw (new RoutineBreakException());
}
}
}
}

6
App/Modules/SicModules/TMs/Routines/TMHomeRoutine.cs
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@ -10,6 +10,7 @@ namespace SicModules.TMs.Routines
{
CloseV77,
CloseV80,
CloseV85,
TMRobotHome
}
@ -42,8 +43,11 @@ namespace SicModules.TMs.Routines
{
try
{
//关闭 V77， V78； 关闭 V85；关闭 V70-1， V70-2； Home Robot, Check Load
CloseTMVent((int)RoutineStep.CloseV77);
//CloseBufferVent((int)RoutineStep.CloseV80);
//没有V78
SetTMLLBalanceValve((int)RoutineStep.CloseV85, TMDevice,false);
//没有V70
ExecuteRoutine((int)RoutineStep.TMRobotHome, _tmRobotHomeRoutine);
}
catch (RoutineBreakException)