整理TM io
This commit is contained in:
hanqiangqiang
parent
9dd9a60a78
commit
3ab2553f57
@ -55,7 +55,7 @@
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<IoSensor id="UnLoadTrayPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="UnLoadTrayPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="UnLoadWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="UnLoadWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="ForelineBasePressureReady" module="TM" display="" schematicId="" unit="" di="DI_ForelineBasePressureReady" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="ForelineBasePressureReady" module="TM" display="" schematicId="" unit="" di="DI_ForelineBasePressureReady" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="LoadTrayHomeSensor" module="TM" display="" schematicId="" unit="" di="DI_LoadHomeTraySensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="LoadTrayHomeSensor" module="TM" display="" schematicId="" unit="" di="DI_LoaderTraySensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassALWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassALWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassARWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetRightConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassARWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetRightConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassALInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftInch6" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassALInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftInch6" textOutTrigValue="true" warningText="" alarmText="" />
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@ -112,7 +112,7 @@
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<IoSlitValve id="PM2Door" module="TM" display="PM2Door" Type="" unit="" schematicId="PM2Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorBDoorOpened" diClose="DI_ReactorBDoorClosed" doOpen="DO_RectorBDoorOpen" doClose="DO_RectorBDoorClose" />
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<IoSlitValve id="PM2Door" module="TM" display="PM2Door" Type="" unit="" schematicId="PM2Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorBDoorOpened" diClose="DI_ReactorBDoorClosed" doOpen="DO_RectorBDoorOpen" doClose="DO_RectorBDoorClose" />
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<IoSlitValve id="UnLoadDoor" module="TM" display="UnLoadDoor" Type="" unit="" schematicId="UnLoadDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadStationDoorOpened" diClose="DI_UnloadStationDoorClosed" doOpen="DO_UnloadStationDoorOpen" doClose="DO_UnloadStationDoorClose" />
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<IoSlitValve id="UnLoadDoor" module="TM" display="UnLoadDoor" Type="" unit="" schematicId="UnLoadDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadStationDoorOpened" diClose="DI_UnloadStationDoorClosed" doOpen="DO_UnloadStationDoorOpen" doClose="DO_UnloadStationDoorClose" />
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<IoSlitValve id="BufferDoor" module="TM" display="BufferDoor" Type="" unit="" schematicId="BufferDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_BufferStationDoorOpened" diClose="DI_BufferStationDoorClosed" doOpen="DO_BufferStationDoorOpen" doClose="DO_BufferStationDoorClose" />
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<IoSlitValve id="BufferDoor" module="TM" display="BufferDoor" Type="" unit="" schematicId="BufferDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_BufferStationDoorOpened" diClose="DI_BufferStationDoorClosed" doOpen="DO_BufferStationDoorOpen" doClose="DO_BufferStationDoorClose" />
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<IoSlitValve id="UnLoadSubDoor" module="EFEM" display="UnLoadSubDoor" Type="" unit="" schematicId="UnLoadSubDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadSubStationDoorOpened" diClose="DI_UnloadSubStationDoorClosed" doOpen="DO_UnloadSubStationDoorOpen" doClose="DO_UnloadSubStationDoorClose" />
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<IoSlitValve id="UnLoadSubDoor" module="EFEM" display="UnLoadSubDoor" Type="" unit="" schematicId="UnLoadSubDoor" scTimeout="System.SlitValveotMionTimeout" diOpen="DI_UnloadSubStationDoorOpened" diClose="DI_UnloadSubStationDoorClosed" doOpen="DO_UnloadSubStationDoorOpen" doClose="DO_UnloadSubStationDoorClose" />
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<IoSlitValve id="LoadLockLSideDoor" module="EFEM" display="LLLSideDoor" Type="" unit="" schematicId="LLLSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadLSideDoorOpened" diClose="DI_LoadLSideDoorClosed" doOpen="DO_LoadLSideDoorOpen" doClose="DO_LoadLSideDoorClose" />
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<IoSlitValve id="LoadLockLSideDoor" module="EFEM" display="LLLSideDoor" Type="" unit="" schematicId="LLLSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadLSideDoorOpened" diClose="DI_LoadLSideDoorClosed" doOpen="DO_LoadLSideDoorOpen" doClose="DO_LoadLSideDoorClose" />
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<IoSlitValve id="LoadLockRSideDoor" module="EFEM" display="LLRSideDoor" Type="" unit="" schematicId="LLRSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadRSideDoorOpened" diClose="DI_LoadRSideDoorClosed" doOpen="DO_LoadRSideDoorOpen" doClose="DO_LoadRSideDoorClose" />
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<IoSlitValve id="LoadLockRSideDoor" module="EFEM" display="LLRSideDoor" Type="" unit="" schematicId="LLRSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadRSideDoorOpened" diClose="DI_LoadRSideDoorClosed" doOpen="DO_LoadRSideDoorOpen" doClose="DO_LoadRSideDoorClose" />
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</IoSlitValves>
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</IoSlitValves>
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@ -5,20 +5,23 @@
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<Block Index="0">
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<Block Index="0">
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<DI_ITEM Index="0" Name="DI_LoadDoorClosed" BufferOffset="0" Addr="0" Description="" />
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<DI_ITEM Index="0" Name="DI_LoadDoorClosed" BufferOffset="0" Addr="0" Description="" />
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<DI_ITEM Index="1" Name="DI_LoadDoorOpened" BufferOffset="1" Addr="1" Description="" />
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<DI_ITEM Index="1" Name="DI_LoadDoorOpened" BufferOffset="1" Addr="1" Description="" />
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<DI_ITEM Index="2" Name="DI_UnloadStationDoorClosed" BufferOffset="2" Addr="2" Description="" />
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<DI_ITEM Index="2" Name="DI_UnloadStationDoorClosed" BufferOffset="2" Addr="2" Description="" Visible="false"/>
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<DI_ITEM Index="3" Name="DI_UnloadStationDoorOpened" BufferOffset="3" Addr="3" Description="" />
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<DI_ITEM Index="3" Name="DI_UnloadStationDoorOpened" BufferOffset="3" Addr="3" Description="" Visible="false"/>
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<DI_ITEM Index="4" Name="DI_ReactorADoorClosed" BufferOffset="4" Addr="4" Description="" />
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<DI_ITEM Index="4" Name="DI_ReactorADoorClosed" BufferOffset="4" Addr="4" Description="" />
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<DI_ITEM Index="5" Name="DI_ReactorADoorOpened" BufferOffset="5" Addr="5" Description="" />
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<DI_ITEM Index="5" Name="DI_ReactorADoorOpened" BufferOffset="5" Addr="5" Description="" />
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<DI_ITEM Index="6" Name="DI_ReactorBDoorClosed" BufferOffset="6" Addr="6" Description="" />
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<DI_ITEM Index="6" Name="DI_ReactorBDoorClosed" BufferOffset="6" Addr="6" Description="" Visible="false"/>
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<DI_ITEM Index="7" Name="DI_ReactorBDoorOpened" BufferOffset="7" Addr="7" Description="" />
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<DI_ITEM Index="7" Name="DI_ReactorBDoorOpened" BufferOffset="7" Addr="7" Description="" Visible="false"/>
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<DI_ITEM Index="8" Name="DI_UnloadSubStationDoorClosed" BufferOffset="8" Addr="8" Description="" Visible="false"/>
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<DI_ITEM Index="8" Name="DI_UnloadSubStationDoorClosed" BufferOffset="8" Addr="8" Description="" Visible="false"/>
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<DI_ITEM Index="9" Name="DI_UnloadSubStationDoorOpened" BufferOffset="9" Addr="9" Description="" Visible="false"/>
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<DI_ITEM Index="9" Name="DI_UnloadSubStationDoorOpened" BufferOffset="9" Addr="9" Description="" Visible="false"/>
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<DI_ITEM Index="10" Name="DI_BufferStationDoorClosed" BufferOffset="10" Addr="10" Description="" />
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<DI_ITEM Index="10" Name="DI_BufferStationDoorClosed" BufferOffset="10" Addr="10" Description="" Visible="false"/>
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<DI_ITEM Index="11" Name="DI_BufferStationDoorOpened" BufferOffset="11" Addr="11" Description="" />
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<DI_ITEM Index="11" Name="DI_BufferStationDoorOpened" BufferOffset="11" Addr="11" Description="" Visible="false"/>
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<DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description="" />
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<DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description="" />
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<DI_ITEM Index="13" Name="DI_LoadLidClosed" BufferOffset="13" Addr="13" Description="" />
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<DI_ITEM Index="13" Name="DI_LoadLidClosed" BufferOffset="13" Addr="13" Description="" />
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<DI_ITEM Index="14" Name="DI_UnloadStationLidClosed" BufferOffset="14" Addr="14" Description="" Visible="false"/>
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<DI_ITEM Index="14" Name="DI_UnloadStationLidClosed" BufferOffset="14" Addr="14" Description="" Visible="false"/>
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<DI_ITEM Index="15" Name="DI_BufferStationLidClosed" BufferOffset="15" Addr="15" Description="" />
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<DI_ITEM Index="15" Name="DI_BufferStationLidClosed" BufferOffset="15" Addr="15" Description="" />
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<DI_ITEM Index="20" Name="DI_CDAPressureSWReady" BufferOffset="20" Addr="20" Description="" />
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<DI_ITEM Index="21" Name="DI_WaterFlowSWReady" BufferOffset="21" Addr="21" Description="" />
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<DI_ITEM Index="22" Name="DI_LoadLockGateClosed" BufferOffset="22" Addr="22" Description="" />
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<DI_ITEM Index="22" Name="DI_LoadLockGateClosed" BufferOffset="22" Addr="22" Description="" />
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<DI_ITEM Index="24" Name="DI_LoadLSideDoorClosed" BufferOffset="24" Addr="24" Description="" Visible="false"/>
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<DI_ITEM Index="24" Name="DI_LoadLSideDoorClosed" BufferOffset="24" Addr="24" Description="" Visible="false"/>
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<DI_ITEM Index="25" Name="DI_LoadLSideDoorOpened" BufferOffset="25" Addr="25" Description="" Visible="false"/>
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<DI_ITEM Index="25" Name="DI_LoadLSideDoorOpened" BufferOffset="25" Addr="25" Description="" Visible="false"/>
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@ -26,28 +29,32 @@
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<DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/>
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<DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/>
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<DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" />
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<DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" />
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<DI_ITEM Index="32" Name="DI_LoadTrayPresence" BufferOffset="32" Addr="32" Description="" />
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<DI_ITEM Index="32" Name="DI_LoadTrayPresence" BufferOffset="32" Addr="32" Description="" />
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<DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" Visible="false"/>
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<DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" />
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<DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" Visible="false"/>
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<DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" />
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<DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" Visible="false"/>
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<DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" />
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<DI_ITEM Index="36" Name="DI_LoadHomeTraySensor" BufferOffset="36" Addr="36" Description="" Visible="false"/>
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<DI_ITEM Index="36" Name="DI_LoaderTraySensor" BufferOffset="36" Addr="36" Description="" />
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<DI_ITEM Index="37" Name="DI_BufferStationOptSensorHigh" BufferOffset="37" Addr="37" Description="" />
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<DI_ITEM Index="37" Name="DI_BufferStationOptSensorHigh" BufferOffset="37" Addr="37" Description="" />
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<DI_ITEM Index="38" Name="DI_BufferStationOptSensorMid" BufferOffset="38" Addr="38" Description="" />
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<DI_ITEM Index="38" Name="DI_BufferStationOptSensorMid" BufferOffset="38" Addr="38" Description="" Visible="false"/>
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<DI_ITEM Index="39" Name="DI_BufferStationOptSensorLow" BufferOffset="39" Addr="39" Description="" />
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<DI_ITEM Index="39" Name="DI_BufferStationOptSensorLow" BufferOffset="39" Addr="39" Description="" Visible="false"/>
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<DI_ITEM Index="40" Name="DI_UnloadStationWaferPresence" BufferOffset="40" Addr="40" Description="" Visible="false"/>
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<DI_ITEM Index="40" Name="DI_UnloadStationWaferPresence" BufferOffset="40" Addr="40" Description="" Visible="false"/>
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<DI_ITEM Index="41" Name="DI_UnloadStationGateINTK" BufferOffset="41" Addr="41" Description="" Visible="false"/>
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<DI_ITEM Index="41" Name="DI_UnloadStationGateINTK" BufferOffset="41" Addr="41" Description="" Visible="false"/>
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<DI_ITEM Index="43" Name="DI_TMDryPump1Alarm" BufferOffset="43" Addr="43" Description="" />
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<DI_ITEM Index="43" Name="DI_TMDryPump1Alarm" BufferOffset="43" Addr="43" Description="" />
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<DI_ITEM Index="44" Name="DI_TMDryPump1Warning" BufferOffset="44" Addr="44" Description="" />
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<DI_ITEM Index="44" Name="DI_TMDryPump1Warning" BufferOffset="44" Addr="44" Description="" />
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<DI_ITEM Index="47" Name="DI_BufferStationBLidClosed" BufferOffset="47" Addr="47" Description="" />
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<DI_ITEM Index="49" Name="DI_TMDryPump1Running" BufferOffset="49" Addr="49" Description="" />
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<DI_ITEM Index="49" Name="DI_TMDryPump1Running" BufferOffset="49" Addr="49" Description="" />
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<DI_ITEM Index="50" Name="DI_WaferCassetLeftInch6" BufferOffset="50" Addr="50" Description="" Visible="false"/>
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<DI_ITEM Index="50" Name="DI_GloveBoxLoadwaferReady" BufferOffset="50" Addr="50" Description="" />
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<DI_ITEM Index="52" Name="DI_WaferCassetRightInch6" BufferOffset="52" Addr="52" Description="" Visible="false"/>
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<DI_ITEM Index="51" Name="DI_GloveBoxLoadwaferFinished" BufferOffset="51" Addr="51" Description="" />
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<DI_ITEM Index="54" Name="DI_WaferCassetLeftConvexSensor" BufferOffset="54" Addr="54" Description="" Visible="false"/>
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<DI_ITEM Index="52" Name="DI_GloveBoxUnLoadwaferReady" BufferOffset="52" Addr="52" Description="" />
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<DI_ITEM Index="55" Name="DI_WaferCassetRightConvexSensor" BufferOffset="55" Addr="55" Description="" Visible="false"/>
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<DI_ITEM Index="53" Name="DI_GloveBoxUnLoadwaferFinished" BufferOffset="53" Addr="53" Description="" />
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<DI_ITEM Index="56" Name="DI_TrayCassetInch6" BufferOffset="56" Addr="56" Description="" Visible="false"/>
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<DI_ITEM Index="54" Name="DI_GloveBoxReady" BufferOffset="54" Addr="54" Description="" />
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<DI_ITEM Index="58" Name="DI_TrayCassetConvexSensor" BufferOffset="58" Addr="58" Description="" Visible="false"/>
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<DI_ITEM Index="55" Name="DI_GloveBoxSpare01" BufferOffset="55" Addr="55" Description="" />
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<DI_ITEM Index="62" Name="DI_LoadLidLockedR" BufferOffset="62" Addr="62" Description=""/>
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<DI_ITEM Index="56" Name="DI_GloveBoxSpare02" BufferOffset="56" Addr="56" Description="" />
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<DI_ITEM Index="63" Name="DI_LoadLidUnlockedR" BufferOffset="63" Addr="63" Description=""/>
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<DI_ITEM Index="57" Name="DI_GloveBoxSpare03" BufferOffset="57" Addr="57" Description="" />
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<DI_ITEM Index="64" Name="DI_LoadLidLocked" BufferOffset="64" Addr="64" Description=""/>
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<DI_ITEM Index="65" Name="DI_LoadLidUnlocked" BufferOffset="65" Addr="65" Description="" />
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<DI_ITEM Index="62" Name="DI_LoadLidLockedR" BufferOffset="62" Addr="62" Description="" Visible="false"/>
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<DI_ITEM Index="63" Name="DI_LoadLidUnlockedR" BufferOffset="63" Addr="63" Description="" Visible="false"/>
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<DI_ITEM Index="64" Name="DI_LoadLidLocked" BufferOffset="64" Addr="64" Description="" Visible="false"/>
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<DI_ITEM Index="65" Name="DI_LoadLidUnlocked" BufferOffset="65" Addr="65" Description="" Visible="false"/>
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<DI_ITEM Index="66" Name="DI_LoadWaferCYClamped" BufferOffset="66" Addr="66" Description="" Visible="false"/>
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<DI_ITEM Index="66" Name="DI_LoadWaferCYClamped" BufferOffset="66" Addr="66" Description="" Visible="false"/>
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<DI_ITEM Index="67" Name="DI_LoadWafeCYOpened" BufferOffset="67" Addr="67" Description="" Visible="false"/>
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<DI_ITEM Index="67" Name="DI_LoadWafeCYOpened" BufferOffset="67" Addr="67" Description="" Visible="false"/>
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<DI_ITEM Index="68" Name="DI_LoadTrayCYClamped" BufferOffset="68" Addr="68" Description="" Visible="false"/>
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<DI_ITEM Index="68" Name="DI_LoadTrayCYClamped" BufferOffset="68" Addr="68" Description="" Visible="false"/>
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<DI_ITEM Index="73" Name="DI_UnloadStationWaferCYOpened" BufferOffset="73" Addr="73" Description="" Visible="false"/>
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<DI_ITEM Index="73" Name="DI_UnloadStationWaferCYOpened" BufferOffset="73" Addr="73" Description="" Visible="false"/>
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<DI_ITEM Index="74" Name="DI_UnloadStationLifterCYUp" BufferOffset="74" Addr="74" Description="" Visible="false"/>
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<DI_ITEM Index="74" Name="DI_UnloadStationLifterCYUp" BufferOffset="74" Addr="74" Description="" Visible="false"/>
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<DI_ITEM Index="75" Name="DI_UnloadStationLifterCYDown" BufferOffset="75" Addr="75" Description="" Visible="false"/>
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<DI_ITEM Index="75" Name="DI_UnloadStationLifterCYDown" BufferOffset="75" Addr="75" Description="" Visible="false"/>
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<DI_ITEM Index="88" Name="DI_TMPressure1ATM" BufferOffset="88" Addr="88" Description="" />
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<DI_ITEM Index="88" Name="DI_TMPressure1ATM" BufferOffset="88" Addr="88" Description="" />
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<DI_ITEM Index="89" Name="DI_TMPressure1VAC" BufferOffset="89" Addr="89" Description="" />
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<DI_ITEM Index="89" Name="DI_TMPressure1VAC" BufferOffset="89" Addr="89" Description="" />
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<DI_ITEM Index="90" Name="DI_LoadPressureATM" BufferOffset="90" Addr="90" Description="" />
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<DI_ITEM Index="90" Name="DI_LoadPressureATM" BufferOffset="90" Addr="90" Description="" />
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@ -68,19 +77,19 @@
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<DI_ITEM Index="97" Name="DI_LoadFastPumpFB" BufferOffset="97" Addr="97" Description="V83" />
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<DI_ITEM Index="97" Name="DI_LoadFastPumpFB" BufferOffset="97" Addr="97" Description="V83" />
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<DI_ITEM Index="98" Name="DI_TMSlowPumpFB" BufferOffset="98" Addr="98" Description="V82" />
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<DI_ITEM Index="98" Name="DI_TMSlowPumpFB" BufferOffset="98" Addr="98" Description="V82" />
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<DI_ITEM Index="99" Name="DI_TMFastPumpFB" BufferOffset="99" Addr="99" Description="V81" />
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<DI_ITEM Index="99" Name="DI_TMFastPumpFB" BufferOffset="99" Addr="99" Description="V81" />
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<DI_ITEM Index="100" Name="DI_BufferVentFB" BufferOffset="100" Addr="100" Description="V80" />
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<DI_ITEM Index="100" Name="DI_BufferVentFB" BufferOffset="100" Addr="100" Description="V80" Visible="false"/>
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<DI_ITEM Index="101" Name="DI_LoadVentFB" BufferOffset="101" Addr="101" Description="V79" />
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<DI_ITEM Index="101" Name="DI_LoadVentFB" BufferOffset="101" Addr="101" Description="V79" />
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<DI_ITEM Index="102" Name="DI_TMVentFB" BufferOffset="102" Addr="102" Description="V77" />
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<DI_ITEM Index="102" Name="DI_TMVentFB" BufferOffset="102" Addr="102" Description="V77" />
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<DI_ITEM Index="103" Name="DI_UnloadVentFB" BufferOffset="103" Addr="103" Description="V78" Visible="false"/>
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<DI_ITEM Index="103" Name="DI_UnloadVentFB" BufferOffset="103" Addr="103" Description="V78" Visible="false"/>
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<DI_ITEM Index="104" Name="DI_TMLoadBanlanceFB" BufferOffset="104" Addr="104" Description="V85" />
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<DI_ITEM Index="104" Name="DI_TMLoadBanlanceFB" BufferOffset="104" Addr="104" Description="V85" />
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<DI_ITEM Index="105" Name="DI_LoadDoorCloseFB" BufferOffset="105" Addr="105" Description="" />
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<DI_ITEM Index="105" Name="DI_LoadDoorCloseFB" BufferOffset="105" Addr="105" Description="" />
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<DI_ITEM Index="106" Name="DI_LoadDoorOpenFB" BufferOffset="106" Addr="106" Description="" />
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<DI_ITEM Index="106" Name="DI_LoadDoorOpenFB" BufferOffset="106" Addr="106" Description="" />
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<DI_ITEM Index="107" Name="DI_UnloadStationDoorCloseFB" BufferOffset="107" Addr="107" Description="" />
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<DI_ITEM Index="107" Name="DI_UnloadStationDoorCloseFB" BufferOffset="107" Addr="107" Description="" Visible="false"/>
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<DI_ITEM Index="108" Name="DI_UnloadStationDoorOpenFB" BufferOffset="108" Addr="108" Description="" />
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<DI_ITEM Index="108" Name="DI_UnloadStationDoorOpenFB" BufferOffset="108" Addr="108" Description="" Visible="false"/>
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<DI_ITEM Index="109" Name="DI_RectorADoorCloseFB" BufferOffset="109" Addr="109" Description="" />
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<DI_ITEM Index="109" Name="DI_RectorADoorCloseFB" BufferOffset="109" Addr="109" Description="" />
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<DI_ITEM Index="110" Name="DI_RectorADoorOpenFB" BufferOffset="110" Addr="110" Description="" />
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<DI_ITEM Index="110" Name="DI_RectorADoorOpenFB" BufferOffset="110" Addr="110" Description="" />
|
||||||
<DI_ITEM Index="111" Name="DI_RectorBDoorCloseFB" BufferOffset="111" Addr="111" Description="" />
|
<DI_ITEM Index="111" Name="DI_RectorBDoorCloseFB" BufferOffset="111" Addr="111" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="112" Name="DI_RectorBDoorOpenFB" BufferOffset="112" Addr="112" Description="" />
|
<DI_ITEM Index="112" Name="DI_RectorBDoorOpenFB" BufferOffset="112" Addr="112" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="113" Name="DI_TMToUnloadBanlanceFB" BufferOffset="113" Addr="113" Description="V124" Visible="false"/>
|
<DI_ITEM Index="113" Name="DI_TMToUnloadBanlanceFB" BufferOffset="113" Addr="113" Description="V124" Visible="false"/>
|
||||||
<DI_ITEM Index="114" Name="DI_VacRobotEstopFB" BufferOffset="114" Addr="114" Description="" />
|
<DI_ITEM Index="114" Name="DI_VacRobotEstopFB" BufferOffset="114" Addr="114" Description="" />
|
||||||
<DI_ITEM Index="115" Name="DI_VacRobotExtenLoadEnableFB" BufferOffset="115" Addr="115" Description="" />
|
<DI_ITEM Index="115" Name="DI_VacRobotExtenLoadEnableFB" BufferOffset="115" Addr="115" Description="" />
|
||||||
@ -93,22 +102,22 @@
|
|||||||
<DI_ITEM Index="122" Name="DI_ATMRobotExtendLoadRSideEnableFB" BufferOffset="122" Addr="122" Description="" Visible="false"/>
|
<DI_ITEM Index="122" Name="DI_ATMRobotExtendLoadRSideEnableFB" BufferOffset="122" Addr="122" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="123" Name="DI_LoadLSideDoorCloseFB" BufferOffset="123" Addr="123" Description="" Visible="false"/>
|
<DI_ITEM Index="123" Name="DI_LoadLSideDoorCloseFB" BufferOffset="123" Addr="123" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="124" Name="DI_LoadLSideDoorOpenFB" BufferOffset="124" Addr="124" Description="" Visible="false"/>
|
<DI_ITEM Index="124" Name="DI_LoadLSideDoorOpenFB" BufferOffset="124" Addr="124" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="125" Name="DI_LoadRSideDoorCloseFB" BufferOffset="125" Addr="125" Description="" Visible="false"/>
|
<DI_ITEM Index="125" Name="DI_LoadLockWaferCYUPFB" BufferOffset="125" Addr="125" Description="" />
|
||||||
<DI_ITEM Index="126" Name="DI_LoadRSideDoorOpenFB" BufferOffset="126" Addr="126" Description="" Visible="false"/>
|
<DI_ITEM Index="126" Name="DI_LoadLockWaferCYDownFB" BufferOffset="126" Addr="126" Description="" />
|
||||||
<DI_ITEM Index="127" Name="DI_UnloadSubStationDoorCloseFB" BufferOffset="127" Addr="127" Description="" Visible="false"/>
|
<DI_ITEM Index="127" Name="DI_UnloadSubStationDoorCloseFB" BufferOffset="127" Addr="127" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="128" Name="DI_UnloadSubStationDoorOpenFB" BufferOffset="128" Addr="128" Description="" Visible="false"/>
|
<DI_ITEM Index="128" Name="DI_UnloadSubStationDoorOpenFB" BufferOffset="128" Addr="128" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="129" Name="DI_BufferStationDoorCloseFB" BufferOffset="129" Addr="129" Description="" />
|
<DI_ITEM Index="129" Name="DI_BufferStationDoorCloseFB" BufferOffset="129" Addr="129" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="130" Name="DI_BufferStationDoorOpenFB" BufferOffset="130" Addr="130" Description="" />
|
<DI_ITEM Index="130" Name="DI_BufferStationDoorOpenFB" BufferOffset="130" Addr="130" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="133" Name="DI_LoadWaferCYClampFB" BufferOffset="133" Addr="133" Description="" Visible="false"/>
|
<DI_ITEM Index="131" Name="DI_GloveBoxLoadwaferFB" BufferOffset="131" Addr="131" Description="" />
|
||||||
<DI_ITEM Index="134" Name="DI_LoadWaferCYOpenFB" BufferOffset="134" Addr="134" Description="" Visible="false"/>
|
<DI_ITEM Index="132" Name="DI_GloveBoxUnLoadwaferFB" BufferOffset="132" Addr="132" Description="" />
|
||||||
<DI_ITEM Index="135" Name="DI_LoadTrayCYClampFB" BufferOffset="135" Addr="135" Description="" Visible="false"/>
|
|
||||||
<DI_ITEM Index="136" Name="DI_LoadTrayCYOpenFB" BufferOffset="136" Addr="136" Description="" Visible="false"/>
|
|
||||||
<DI_ITEM Index="139" Name="DI_UnloadStationWaferCYClampFB" BufferOffset="139" Addr="139" Description="" Visible="false"/>
|
<DI_ITEM Index="139" Name="DI_UnloadStationWaferCYClampFB" BufferOffset="139" Addr="139" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="140" Name="DI_UnloadStationWaferCYOpenFB" BufferOffset="140" Addr="140" Description="" Visible="false"/>
|
<DI_ITEM Index="140" Name="DI_UnloadStationWaferCYOpenFB" BufferOffset="140" Addr="140" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="141" Name="DI_UnloadStationLifterCYUpFB" BufferOffset="141" Addr="141" Description="" Visible="false"/>
|
<DI_ITEM Index="141" Name="DI_UnloadStationLifterCYUpFB" BufferOffset="141" Addr="141" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" Visible="false"/>
|
<DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="143" Name="DI_TMToPMABanlanceFB" BufferOffset="143" Addr="143" Description="" />
|
<DI_ITEM Index="143" Name="DI_TMToPMABanlanceFB" BufferOffset="143" Addr="143" Description="" />
|
||||||
<DI_ITEM Index="144" Name="DI_TMToPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" />
|
<DI_ITEM Index="144" Name="DI_TMToPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" />
|
||||||
|
|
||||||
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122" Visible="false"/>
|
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122" Visible="false"/>
|
||||||
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123" Visible="false"/>
|
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123" Visible="false"/>
|
||||||
<DI_ITEM Index="160" Name="DI_ReactorAATMTransferReadyFB" BufferOffset="160" Addr="160" Description="" />
|
<DI_ITEM Index="160" Name="DI_ReactorAATMTransferReadyFB" BufferOffset="160" Addr="160" Description="" />
|
||||||
@ -138,9 +147,9 @@
|
|||||||
<DI_ITEM Index="189" Name="DI_TMVentUpRoutineRunningFB" BufferOffset="189" Addr="189" Description="" />
|
<DI_ITEM Index="189" Name="DI_TMVentUpRoutineRunningFB" BufferOffset="189" Addr="189" Description="" />
|
||||||
<DI_ITEM Index="190" Name="DI_LLCyclePurgeRoutineRunningFB" BufferOffset="190" Addr="190" Description="" />
|
<DI_ITEM Index="190" Name="DI_LLCyclePurgeRoutineRunningFB" BufferOffset="190" Addr="190" Description="" />
|
||||||
|
|
||||||
<DI_ITEM Index="191" Name="DI_LLLeakCheckRoutineRunningFB" BufferOffset="191" Addr="191" Description="" />
|
<DI_ITEM Index="191" Name="DI_LLLeakCheckRoutineRunningFB" BufferOffset="191" Addr="191" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="192" Name="DI_LLPumpDownRoutineRunningFB" BufferOffset="192" Addr="192" Description="" />
|
<DI_ITEM Index="192" Name="DI_LLPumpDownRoutineRunningFB" BufferOffset="192" Addr="192" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="193" Name="DI_LLVentUpRoutineRunningFB" BufferOffset="193" Addr="193" Description="" />
|
<DI_ITEM Index="193" Name="DI_LLVentUpRoutineRunningFB" BufferOffset="193" Addr="193" Description="" Visible="false"/>
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@ -152,6 +161,28 @@
|
|||||||
<DI_ITEM Index="213" Name="DI_LdRotationOneCircleDone" BufferOffset="213" Addr="213" Description="" Visible="false"/>
|
<DI_ITEM Index="213" Name="DI_LdRotationOneCircleDone" BufferOffset="213" Addr="213" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="214" Name="DI_LdRotationCCD1PosDone" BufferOffset="214" Addr="214" Description="" Visible="false"/>
|
<DI_ITEM Index="214" Name="DI_LdRotationCCD1PosDone" BufferOffset="214" Addr="214" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="215" Name="DI_LdRotationCCD2PosDone" BufferOffset="215" Addr="215" Description="" Visible="false"/>
|
<DI_ITEM Index="215" Name="DI_LdRotationCCD2PosDone" BufferOffset="215" Addr="215" Description="" Visible="false"/>
|
||||||
|
|
||||||
|
|
||||||
|
<!--存放垃圾IO数据-->
|
||||||
|
<DI_ITEM Index="220" Name="DI_WaferCassetLeftInch6" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_WaferCassetRightInch6" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_WaferCassetLeftConvexSensor" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_WaferCassetRightConvexSensor" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_TrayCassetInch6" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_TrayCassetConvexSensor" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadWaferCYClampFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadWaferCYOpenFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadTrayCYClampFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadTrayCYOpenFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadRSideDoorCloseFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadRSideDoorOpenFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<!--存放垃圾IO数据-->
|
||||||
|
|
||||||
|
<DI_ITEM Index="221" Name="DI_TMPMAS7ComErr" BufferOffset="221" Addr="221" Description="" />
|
||||||
|
<DI_ITEM Index="222" Name="DI_TMPMATCPComErr" BufferOffset="222" Addr="222" Description="" />
|
||||||
|
<DI_ITEM Index="223" Name="DI_TMPMBS7ComErr" BufferOffset="223" Addr="223" Description="" />
|
||||||
</Block>
|
</Block>
|
||||||
</Dig_In>
|
</Dig_In>
|
||||||
<Dig_Out>
|
<Dig_Out>
|
||||||
@ -160,20 +191,20 @@
|
|||||||
<DO_ITEM Index="1" Name="DO_LoadFastPump" BufferOffset="1" Addr="1" Description="V83" />
|
<DO_ITEM Index="1" Name="DO_LoadFastPump" BufferOffset="1" Addr="1" Description="V83" />
|
||||||
<DO_ITEM Index="2" Name="DO_TMSlowPump" BufferOffset="2" Addr="2" Description="V82" />
|
<DO_ITEM Index="2" Name="DO_TMSlowPump" BufferOffset="2" Addr="2" Description="V82" />
|
||||||
<DO_ITEM Index="3" Name="DO_TMFastPump" BufferOffset="3" Addr="3" Description="V81" />
|
<DO_ITEM Index="3" Name="DO_TMFastPump" BufferOffset="3" Addr="3" Description="V81" />
|
||||||
<DO_ITEM Index="4" Name="DO_BufferVent" BufferOffset="4" Addr="4" Description="V80" />
|
<DO_ITEM Index="4" Name="DO_BufferVent" BufferOffset="4" Addr="4" Description="V80" Visible="false"/>
|
||||||
<DO_ITEM Index="5" Name="DO_LoadVent" BufferOffset="5" Addr="5" Description="V79" />
|
<DO_ITEM Index="5" Name="DO_LoadVent" BufferOffset="5" Addr="5" Description="V79" />
|
||||||
<DO_ITEM Index="6" Name="DO_TMVent" BufferOffset="6" Addr="6" Description="V77" />
|
<DO_ITEM Index="6" Name="DO_TMVent" BufferOffset="6" Addr="6" Description="V77" />
|
||||||
<DO_ITEM Index="7" Name="DO_UnloadVent" BufferOffset="7" Addr="7" Description="V78" />
|
<DO_ITEM Index="7" Name="DO_UnloadVent" BufferOffset="7" Addr="7" Description="V78" />
|
||||||
<DO_ITEM Index="8" Name="DO_TMLoadBanlance" BufferOffset="8" Addr="8" Description="V85" />
|
<DO_ITEM Index="8" Name="DO_TMLoadBanlance" BufferOffset="8" Addr="8" Description="V85" />
|
||||||
<DO_ITEM Index="9" Name="DO_LoadDoorClose" BufferOffset="9" Addr="9" Description="" />
|
<DO_ITEM Index="9" Name="DO_LoadDoorClose" BufferOffset="9" Addr="9" Description="" />
|
||||||
<DO_ITEM Index="10" Name="DO_LoadDoorOpen" BufferOffset="10" Addr="10" Description="" />
|
<DO_ITEM Index="10" Name="DO_LoadDoorOpen" BufferOffset="10" Addr="10" Description="" />
|
||||||
<DO_ITEM Index="11" Name="DO_UnloadStationDoorClose" BufferOffset="11" Addr="11" Description="" />
|
<DO_ITEM Index="11" Name="DO_UnloadStationDoorClose" BufferOffset="11" Addr="11" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="12" Name="DO_UnloadStationDoorOpen" BufferOffset="12" Addr="12" Description="" />
|
<DO_ITEM Index="12" Name="DO_UnloadStationDoorOpen" BufferOffset="12" Addr="12" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="13" Name="DO_RectorADoorClose" BufferOffset="13" Addr="13" Description="" />
|
<DO_ITEM Index="13" Name="DO_RectorADoorClose" BufferOffset="13" Addr="13" Description="" />
|
||||||
<DO_ITEM Index="14" Name="DO_RectorADoorOpen" BufferOffset="14" Addr="14" Description="" />
|
<DO_ITEM Index="14" Name="DO_RectorADoorOpen" BufferOffset="14" Addr="14" Description="" />
|
||||||
<DO_ITEM Index="15" Name="DO_RectorBDoorClose" BufferOffset="15" Addr="15" Description="" />
|
<DO_ITEM Index="15" Name="DO_RectorBDoorClose" BufferOffset="15" Addr="15" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="16" Name="DO_RectorBDoorOpen" BufferOffset="16" Addr="16" Description="" />
|
<DO_ITEM Index="16" Name="DO_RectorBDoorOpen" BufferOffset="16" Addr="16" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="17" Name="DO_TMToUnloadBanlance" BufferOffset="17" Addr="17" Description="V124" />
|
<DO_ITEM Index="17" Name="DO_TMToUnloadBanlance" BufferOffset="17" Addr="17" Description="V124" Visible="false"/>
|
||||||
<DO_ITEM Index="18" Name="DO_VacRobotEstop" BufferOffset="18" Addr="18" Description="" />
|
<DO_ITEM Index="18" Name="DO_VacRobotEstop" BufferOffset="18" Addr="18" Description="" />
|
||||||
<DO_ITEM Index="19" Name="DO_VacRobotExtenLoadEnable" BufferOffset="19" Addr="19" Description="" />
|
<DO_ITEM Index="19" Name="DO_VacRobotExtenLoadEnable" BufferOffset="19" Addr="19" Description="" />
|
||||||
<DO_ITEM Index="20" Name="DO_VacRobotExtendUnloadEnable" BufferOffset="20" Addr="20" Description="" />
|
<DO_ITEM Index="20" Name="DO_VacRobotExtendUnloadEnable" BufferOffset="20" Addr="20" Description="" />
|
||||||
@ -191,12 +222,10 @@
|
|||||||
<DO_ITEM Index="32" Name="DO_UnloadSubStationDoorOpen" BufferOffset="32" Addr="32" Description="" Visible="false"/>
|
<DO_ITEM Index="32" Name="DO_UnloadSubStationDoorOpen" BufferOffset="32" Addr="32" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="33" Name="DO_BufferStationDoorClose" BufferOffset="33" Addr="33" Description="" Visible="false"/>
|
<DO_ITEM Index="33" Name="DO_BufferStationDoorClose" BufferOffset="33" Addr="33" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="34" Name="DO_BufferStationDoorOpen" BufferOffset="34" Addr="34" Description="" Visible="false"/>
|
<DO_ITEM Index="34" Name="DO_BufferStationDoorOpen" BufferOffset="34" Addr="34" Description="" Visible="false"/>
|
||||||
<!--<DO_ITEM Index="35" Name="DO_LoadLidLock" BufferOffset="35" Addr="35" Description="" />
|
<DO_ITEM Index="35" Name="DO_GloveBoxLoadwafer" BufferOffset="35" Addr="35" Description="" />
|
||||||
<DO_ITEM Index="36" Name="DO_LoadLidUnlock" BufferOffset="36" Addr="36" Description="" />
|
<DO_ITEM Index="36" Name="DO_GloveBoxUnLoadwafer" BufferOffset="36" Addr="36" Description="" />
|
||||||
<DO_ITEM Index="37" Name="DO_LoadWaferCYClamp" BufferOffset="37" Addr="37" Description="" Visible="false"/>
|
|
||||||
<DO_ITEM Index="38" Name="DO_LoadWaferCYOpen" BufferOffset="38" Addr="38" Description="" Visible="false"/>
|
|
||||||
<DO_ITEM Index="39" Name="DO_LoadTrayCYClamp" BufferOffset="39" Addr="39" Description="" Visible="false"/>
|
|
||||||
<DO_ITEM Index="40" Name="DO_LoadTrayCYOpen" BufferOffset="40" Addr="40" Description="" Visible="false"/>-->
|
|
||||||
<DO_ITEM Index="43" Name="DO_UnloadStationWaferCYClamp" BufferOffset="43" Addr="43" Description="" Visible="false"/>
|
<DO_ITEM Index="43" Name="DO_UnloadStationWaferCYClamp" BufferOffset="43" Addr="43" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="44" Name="DO_UnloadStationWaferCYOpen" BufferOffset="44" Addr="44" Description="" Visible="false"/>
|
<DO_ITEM Index="44" Name="DO_UnloadStationWaferCYOpen" BufferOffset="44" Addr="44" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="45" Name="DO_UnloadStationLifterCYUp" BufferOffset="45" Addr="45" Description="" Visible="false"/>
|
<DO_ITEM Index="45" Name="DO_UnloadStationLifterCYUp" BufferOffset="45" Addr="45" Description="" Visible="false"/>
|
||||||
@ -221,7 +250,7 @@
|
|||||||
<DO_ITEM Index="72" Name="DO_TMWaferPresenceA" BufferOffset="72" Addr="72" Description="" />
|
<DO_ITEM Index="72" Name="DO_TMWaferPresenceA" BufferOffset="72" Addr="72" Description="" />
|
||||||
<DO_ITEM Index="73" Name="DO_TMWaferPresenceB" BufferOffset="73" Addr="73" Description="" />
|
<DO_ITEM Index="73" Name="DO_TMWaferPresenceB" BufferOffset="73" Addr="73" Description="" />
|
||||||
<DO_ITEM Index="74" Name="DO_TMWaferPresenceBuf" BufferOffset="74" Addr="74" Description="" />
|
<DO_ITEM Index="74" Name="DO_TMWaferPresenceBuf" BufferOffset="74" Addr="74" Description="" />
|
||||||
<DO_ITEM Index="75" Name="DO_TMWaferPresenceUnload" BufferOffset="75" Addr="75" Description="" />
|
<DO_ITEM Index="75" Name="DO_TMWaferPresencePreheat" BufferOffset="75" Addr="75" Description="" />
|
||||||
<DO_ITEM Index="78" Name="DO_ForelineBasePressureReady" BufferOffset="78" Addr="78" Description="" />
|
<DO_ITEM Index="78" Name="DO_ForelineBasePressureReady" BufferOffset="78" Addr="78" Description="" />
|
||||||
<DO_ITEM Index="79" Name="DO_TMatATM" BufferOffset="79" Addr="79" Description="" />
|
<DO_ITEM Index="79" Name="DO_TMatATM" BufferOffset="79" Addr="79" Description="" />
|
||||||
<DO_ITEM Index="80" Name="DO_LoadAtATM" BufferOffset="80" Addr="80" Description="" />
|
<DO_ITEM Index="80" Name="DO_LoadAtATM" BufferOffset="80" Addr="80" Description="" />
|
||||||
@ -257,6 +286,15 @@
|
|||||||
<DO_ITEM Index="152" Name="DO_LdRotationMoveOneCircle" BufferOffset="152" Addr="152" Description="" Visible="false"/>
|
<DO_ITEM Index="152" Name="DO_LdRotationMoveOneCircle" BufferOffset="152" Addr="152" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="153" Name="DO_LdRotationMoveCCD1Pos" BufferOffset="153" Addr="153" Description="" Visible="false"/>
|
<DO_ITEM Index="153" Name="DO_LdRotationMoveCCD1Pos" BufferOffset="153" Addr="153" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="154" Name="DO_LdRotationMoveCCD2Pos" BufferOffset="154" Addr="154" Description="" Visible="false"/>
|
<DO_ITEM Index="154" Name="DO_LdRotationMoveCCD2Pos" BufferOffset="154" Addr="154" Description="" Visible="false"/>
|
||||||
|
|
||||||
|
<!--垃圾IO数据-->
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadLidLock" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadLidUnlock" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadWaferCYClamp" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadWaferCYOpen" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadTrayCYClamp" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadTrayCYOpen" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<!--垃圾IO数据-->
|
||||||
</Block>
|
</Block>
|
||||||
</Dig_Out>
|
</Dig_Out>
|
||||||
<Ana_In>
|
<Ana_In>
|
||||||
@ -264,23 +302,30 @@
|
|||||||
<AI_ITEM Index="0" Name="AI_TMPressure1" BufferOffset="0" Addr="0" Description="" />
|
<AI_ITEM Index="0" Name="AI_TMPressure1" BufferOffset="0" Addr="0" Description="" />
|
||||||
<AI_ITEM Index="1" Name="AI_LoadPressure" BufferOffset="1" Addr="1" Description="" />
|
<AI_ITEM Index="1" Name="AI_LoadPressure" BufferOffset="1" Addr="1" Description="" />
|
||||||
<AI_ITEM Index="2" Name="AI_PM1Pressure2" BufferOffset="2" Addr="2" Description="" />
|
<AI_ITEM Index="2" Name="AI_PM1Pressure2" BufferOffset="2" Addr="2" Description="" />
|
||||||
<AI_ITEM Index="3" Name="AI_PM2Pressure2" BufferOffset="3" Addr="3" Description="" />
|
<AI_ITEM Index="3" Name="AI_PM2Pressure2" BufferOffset="3" Addr="3" Description="" Visible="false"/>
|
||||||
<AI_ITEM Index="4" Name="AI_UnloadPressure" BufferOffset="4" Addr="4" Description="" />
|
<AI_ITEM Index="4" Name="AI_UnloadPressure" BufferOffset="4" Addr="4" Description="" Visible="false"/>
|
||||||
<AI_ITEM Index="5" Name="AI_UnloadTemp" BufferOffset="5" Addr="5" Description="" />
|
<AI_ITEM Index="5" Name="AI_UnloadTemp" BufferOffset="5" Addr="5" Description="" Visible="false"/>
|
||||||
|
<AI_ITEM Index="6" Name="AI_LoadLockTemp" BufferOffset="6" Addr="6" Description="" />
|
||||||
<AI_ITEM Index="7" Name="AI_BufferTemp" BufferOffset="7" Addr="7" Description="" />
|
<AI_ITEM Index="7" Name="AI_BufferTemp" BufferOffset="7" Addr="7" Description="" />
|
||||||
<AI_ITEM Index="8" Name="AI_M60FlowRead" BufferOffset="8" Addr="8" Description="" />
|
<AI_ITEM Index="8" Name="AI_M60FlowRead" BufferOffset="8" Addr="8" Description="" />
|
||||||
|
|
||||||
<AI_ITEM Index="9" Name="AI_M61FlowRead" BufferOffset="9" Addr="9" Description="" />
|
|
||||||
|
|
||||||
<AI_ITEM Index="13" Name="AI_LdRotationRelativeDegree" BufferOffset="13" Addr="13" Description="" />
|
<AI_ITEM Index="13" Name="AI_LdRotationRelativeDegree" BufferOffset="13" Addr="13" Description="" />
|
||||||
<AI_ITEM Index="14" Name="AI_LdRotationCCD1Degree" BufferOffset="14" Addr="14" Description="" />
|
<AI_ITEM Index="14" Name="AI_LdRotationCCD1Degree" BufferOffset="14" Addr="14" Description="" />
|
||||||
<AI_ITEM Index="15" Name="AI_LdRotationCCD2Degree" BufferOffset="15" Addr="15" Description="" />
|
<AI_ITEM Index="15" Name="AI_LdRotationCCD2Degree" BufferOffset="15" Addr="15" Description="" />
|
||||||
|
<AI_ITEM Index="16" Name="AI_Temp0" BufferOffset="16" Addr="16" Description="" />
|
||||||
|
<AI_ITEM Index="17" Name="AI_Temp1" BufferOffset="17" Addr="17" Description="" />
|
||||||
|
<AI_ITEM Index="18" Name="AI_Temp2" BufferOffset="18" Addr="18" Description="" />
|
||||||
|
<AI_ITEM Index="19" Name="AI_Temp3" BufferOffset="19" Addr="19" Description="" />
|
||||||
|
<AI_ITEM Index="20" Name="AI_RunVentPT1" BufferOffset="20" Addr="20" Description="" />
|
||||||
|
<AI_ITEM Index="21" Name="AI_RunVentPT2" BufferOffset="21" Addr="21" Description="" />
|
||||||
|
<AI_ITEM Index="22" Name="AI_RunVentPT3" BufferOffset="22" Addr="22" Description="" />
|
||||||
|
<AI_ITEM Index="23" Name="AI_RunVentPT4" BufferOffset="23" Addr="23" Description="" />
|
||||||
|
<AI_ITEM Index="24" Name="AI_RunVentPT5" BufferOffset="24" Addr="24" Description="" />
|
||||||
</Block>
|
</Block>
|
||||||
</Ana_In>
|
</Ana_In>
|
||||||
<Ana_Out>
|
<Ana_Out>
|
||||||
<Block Index="0">
|
<Block Index="0">
|
||||||
<AO_ITEM Index="8" Name="AO_M60FlowSetpoint" BufferOffset="8" Addr="8" Description="" />
|
<AO_ITEM Index="8" Name="AO_M60FlowSetpoint" BufferOffset="8" Addr="8" Description="" />
|
||||||
<AO_ITEM Index="9" Name="AO_M61FlowSetpoint" BufferOffset="9" Addr="9" Description="" />
|
|
||||||
<AO_ITEM Index="10" Name="AO_LdRotationHomeOffset" BufferOffset="10" Addr="10" Description="" Visible="false"/>
|
<AO_ITEM Index="10" Name="AO_LdRotationHomeOffset" BufferOffset="10" Addr="10" Description="" Visible="false"/>
|
||||||
<AO_ITEM Index="11" Name="AO_HomeOffsetDegreeLU" BufferOffset="11" Addr="11" Description="" />
|
<AO_ITEM Index="11" Name="AO_HomeOffsetDegreeLU" BufferOffset="11" Addr="11" Description="" />
|
||||||
<AO_ITEM Index="12" Name="AO_LdRotationCCD1Degree" BufferOffset="12" Addr="12" Description="" />
|
<AO_ITEM Index="12" Name="AO_LdRotationCCD1Degree" BufferOffset="12" Addr="12" Description="" />
|
||||||
|
|||||||
@ -152,7 +152,7 @@ namespace SicModules.EFEMs.Routines
|
|||||||
{
|
{
|
||||||
/* DI_LoadTrayPresence 托盘有无
|
/* DI_LoadTrayPresence 托盘有无
|
||||||
* DI_LoadWaferPlaced Wafer有无
|
* DI_LoadWaferPlaced Wafer有无
|
||||||
* DI_LoadHomeTraySensor 托盘测距
|
* DI_LoaderTraySensor 托盘测距
|
||||||
*/
|
*/
|
||||||
|
|
||||||
|
|
||||||
|
|||||||
@ -5,20 +5,23 @@
|
|||||||
<Block Index="0">
|
<Block Index="0">
|
||||||
<DI_ITEM Index="0" Name="DI_LoadDoorClosed" BufferOffset="0" Addr="0" Description="" />
|
<DI_ITEM Index="0" Name="DI_LoadDoorClosed" BufferOffset="0" Addr="0" Description="" />
|
||||||
<DI_ITEM Index="1" Name="DI_LoadDoorOpened" BufferOffset="1" Addr="1" Description="" />
|
<DI_ITEM Index="1" Name="DI_LoadDoorOpened" BufferOffset="1" Addr="1" Description="" />
|
||||||
<DI_ITEM Index="2" Name="DI_UnloadStationDoorClosed" BufferOffset="2" Addr="2" Description="" />
|
<DI_ITEM Index="2" Name="DI_UnloadStationDoorClosed" BufferOffset="2" Addr="2" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="3" Name="DI_UnloadStationDoorOpened" BufferOffset="3" Addr="3" Description="" />
|
<DI_ITEM Index="3" Name="DI_UnloadStationDoorOpened" BufferOffset="3" Addr="3" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="4" Name="DI_ReactorADoorClosed" BufferOffset="4" Addr="4" Description="" />
|
<DI_ITEM Index="4" Name="DI_ReactorADoorClosed" BufferOffset="4" Addr="4" Description="" />
|
||||||
<DI_ITEM Index="5" Name="DI_ReactorADoorOpened" BufferOffset="5" Addr="5" Description="" />
|
<DI_ITEM Index="5" Name="DI_ReactorADoorOpened" BufferOffset="5" Addr="5" Description="" />
|
||||||
<DI_ITEM Index="6" Name="DI_ReactorBDoorClosed" BufferOffset="6" Addr="6" Description="" />
|
<DI_ITEM Index="6" Name="DI_ReactorBDoorClosed" BufferOffset="6" Addr="6" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="7" Name="DI_ReactorBDoorOpened" BufferOffset="7" Addr="7" Description="" />
|
<DI_ITEM Index="7" Name="DI_ReactorBDoorOpened" BufferOffset="7" Addr="7" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="8" Name="DI_UnloadSubStationDoorClosed" BufferOffset="8" Addr="8" Description="" Visible="false"/>
|
<DI_ITEM Index="8" Name="DI_UnloadSubStationDoorClosed" BufferOffset="8" Addr="8" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="9" Name="DI_UnloadSubStationDoorOpened" BufferOffset="9" Addr="9" Description="" Visible="false"/>
|
<DI_ITEM Index="9" Name="DI_UnloadSubStationDoorOpened" BufferOffset="9" Addr="9" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="10" Name="DI_BufferStationDoorClosed" BufferOffset="10" Addr="10" Description="" />
|
<DI_ITEM Index="10" Name="DI_BufferStationDoorClosed" BufferOffset="10" Addr="10" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="11" Name="DI_BufferStationDoorOpened" BufferOffset="11" Addr="11" Description="" />
|
<DI_ITEM Index="11" Name="DI_BufferStationDoorOpened" BufferOffset="11" Addr="11" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description="" />
|
<DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description="" />
|
||||||
<DI_ITEM Index="13" Name="DI_LoadLidClosed" BufferOffset="13" Addr="13" Description="" />
|
<DI_ITEM Index="13" Name="DI_LoadLidClosed" BufferOffset="13" Addr="13" Description="" />
|
||||||
<DI_ITEM Index="14" Name="DI_UnloadStationLidClosed" BufferOffset="14" Addr="14" Description="" Visible="false"/>
|
<DI_ITEM Index="14" Name="DI_UnloadStationLidClosed" BufferOffset="14" Addr="14" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="15" Name="DI_BufferStationLidClosed" BufferOffset="15" Addr="15" Description="" />
|
<DI_ITEM Index="15" Name="DI_BufferStationLidClosed" BufferOffset="15" Addr="15" Description="" />
|
||||||
|
|
||||||
|
<DI_ITEM Index="20" Name="DI_CDAPressureSWReady" BufferOffset="20" Addr="20" Description="" />
|
||||||
|
<DI_ITEM Index="21" Name="DI_WaterFlowSWReady" BufferOffset="21" Addr="21" Description="" />
|
||||||
<DI_ITEM Index="22" Name="DI_LoadLockGateClosed" BufferOffset="22" Addr="22" Description="" />
|
<DI_ITEM Index="22" Name="DI_LoadLockGateClosed" BufferOffset="22" Addr="22" Description="" />
|
||||||
<DI_ITEM Index="24" Name="DI_LoadLSideDoorClosed" BufferOffset="24" Addr="24" Description="" Visible="false"/>
|
<DI_ITEM Index="24" Name="DI_LoadLSideDoorClosed" BufferOffset="24" Addr="24" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="25" Name="DI_LoadLSideDoorOpened" BufferOffset="25" Addr="25" Description="" Visible="false"/>
|
<DI_ITEM Index="25" Name="DI_LoadLSideDoorOpened" BufferOffset="25" Addr="25" Description="" Visible="false"/>
|
||||||
@ -26,28 +29,32 @@
|
|||||||
<DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/>
|
<DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" />
|
<DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" />
|
||||||
<DI_ITEM Index="32" Name="DI_LoadTrayPresence" BufferOffset="32" Addr="32" Description="" />
|
<DI_ITEM Index="32" Name="DI_LoadTrayPresence" BufferOffset="32" Addr="32" Description="" />
|
||||||
<DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" Visible="false"/>
|
<DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" />
|
||||||
<DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" Visible="false"/>
|
<DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" />
|
||||||
<DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" Visible="false"/>
|
<DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" />
|
||||||
<DI_ITEM Index="36" Name="DI_LoadHomeTraySensor" BufferOffset="36" Addr="36" Description="" Visible="false"/>
|
<DI_ITEM Index="36" Name="DI_LoaderTraySensor" BufferOffset="36" Addr="36" Description="" />
|
||||||
<DI_ITEM Index="37" Name="DI_BufferStationOptSensorHigh" BufferOffset="37" Addr="37" Description="" />
|
<DI_ITEM Index="37" Name="DI_BufferStationOptSensorHigh" BufferOffset="37" Addr="37" Description="" />
|
||||||
<DI_ITEM Index="38" Name="DI_BufferStationOptSensorMid" BufferOffset="38" Addr="38" Description="" />
|
<DI_ITEM Index="38" Name="DI_BufferStationOptSensorMid" BufferOffset="38" Addr="38" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="39" Name="DI_BufferStationOptSensorLow" BufferOffset="39" Addr="39" Description="" />
|
<DI_ITEM Index="39" Name="DI_BufferStationOptSensorLow" BufferOffset="39" Addr="39" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="40" Name="DI_UnloadStationWaferPresence" BufferOffset="40" Addr="40" Description="" Visible="false"/>
|
<DI_ITEM Index="40" Name="DI_UnloadStationWaferPresence" BufferOffset="40" Addr="40" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="41" Name="DI_UnloadStationGateINTK" BufferOffset="41" Addr="41" Description="" Visible="false"/>
|
<DI_ITEM Index="41" Name="DI_UnloadStationGateINTK" BufferOffset="41" Addr="41" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="43" Name="DI_TMDryPump1Alarm" BufferOffset="43" Addr="43" Description="" />
|
<DI_ITEM Index="43" Name="DI_TMDryPump1Alarm" BufferOffset="43" Addr="43" Description="" />
|
||||||
<DI_ITEM Index="44" Name="DI_TMDryPump1Warning" BufferOffset="44" Addr="44" Description="" />
|
<DI_ITEM Index="44" Name="DI_TMDryPump1Warning" BufferOffset="44" Addr="44" Description="" />
|
||||||
|
<DI_ITEM Index="47" Name="DI_BufferStationBLidClosed" BufferOffset="47" Addr="47" Description="" />
|
||||||
<DI_ITEM Index="49" Name="DI_TMDryPump1Running" BufferOffset="49" Addr="49" Description="" />
|
<DI_ITEM Index="49" Name="DI_TMDryPump1Running" BufferOffset="49" Addr="49" Description="" />
|
||||||
<DI_ITEM Index="50" Name="DI_WaferCassetLeftInch6" BufferOffset="50" Addr="50" Description="" Visible="false"/>
|
<DI_ITEM Index="50" Name="DI_GloveBoxLoadwaferReady" BufferOffset="50" Addr="50" Description="" />
|
||||||
<DI_ITEM Index="52" Name="DI_WaferCassetRightInch6" BufferOffset="52" Addr="52" Description="" Visible="false"/>
|
<DI_ITEM Index="51" Name="DI_GloveBoxLoadwaferFinished" BufferOffset="51" Addr="51" Description="" />
|
||||||
<DI_ITEM Index="54" Name="DI_WaferCassetLeftConvexSensor" BufferOffset="54" Addr="54" Description="" Visible="false"/>
|
<DI_ITEM Index="52" Name="DI_GloveBoxUnLoadwaferReady" BufferOffset="52" Addr="52" Description="" />
|
||||||
<DI_ITEM Index="55" Name="DI_WaferCassetRightConvexSensor" BufferOffset="55" Addr="55" Description="" Visible="false"/>
|
<DI_ITEM Index="53" Name="DI_GloveBoxUnLoadwaferFinished" BufferOffset="53" Addr="53" Description="" />
|
||||||
<DI_ITEM Index="56" Name="DI_TrayCassetInch6" BufferOffset="56" Addr="56" Description="" Visible="false"/>
|
<DI_ITEM Index="54" Name="DI_GloveBoxReady" BufferOffset="54" Addr="54" Description="" />
|
||||||
<DI_ITEM Index="58" Name="DI_TrayCassetConvexSensor" BufferOffset="58" Addr="58" Description="" Visible="false"/>
|
<DI_ITEM Index="55" Name="DI_GloveBoxSpare01" BufferOffset="55" Addr="55" Description="" />
|
||||||
<DI_ITEM Index="62" Name="DI_LoadLidLockedR" BufferOffset="62" Addr="62" Description=""/>
|
<DI_ITEM Index="56" Name="DI_GloveBoxSpare02" BufferOffset="56" Addr="56" Description="" />
|
||||||
<DI_ITEM Index="63" Name="DI_LoadLidUnlockedR" BufferOffset="63" Addr="63" Description=""/>
|
<DI_ITEM Index="57" Name="DI_GloveBoxSpare03" BufferOffset="57" Addr="57" Description="" />
|
||||||
<DI_ITEM Index="64" Name="DI_LoadLidLocked" BufferOffset="64" Addr="64" Description=""/>
|
|
||||||
<DI_ITEM Index="65" Name="DI_LoadLidUnlocked" BufferOffset="65" Addr="65" Description="" />
|
<DI_ITEM Index="62" Name="DI_LoadLidLockedR" BufferOffset="62" Addr="62" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="63" Name="DI_LoadLidUnlockedR" BufferOffset="63" Addr="63" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="64" Name="DI_LoadLidLocked" BufferOffset="64" Addr="64" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="65" Name="DI_LoadLidUnlocked" BufferOffset="65" Addr="65" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="66" Name="DI_LoadWaferCYClamped" BufferOffset="66" Addr="66" Description="" Visible="false"/>
|
<DI_ITEM Index="66" Name="DI_LoadWaferCYClamped" BufferOffset="66" Addr="66" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="67" Name="DI_LoadWafeCYOpened" BufferOffset="67" Addr="67" Description="" Visible="false"/>
|
<DI_ITEM Index="67" Name="DI_LoadWafeCYOpened" BufferOffset="67" Addr="67" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="68" Name="DI_LoadTrayCYClamped" BufferOffset="68" Addr="68" Description="" Visible="false"/>
|
<DI_ITEM Index="68" Name="DI_LoadTrayCYClamped" BufferOffset="68" Addr="68" Description="" Visible="false"/>
|
||||||
@ -56,6 +63,8 @@
|
|||||||
<DI_ITEM Index="73" Name="DI_UnloadStationWaferCYOpened" BufferOffset="73" Addr="73" Description="" Visible="false"/>
|
<DI_ITEM Index="73" Name="DI_UnloadStationWaferCYOpened" BufferOffset="73" Addr="73" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="74" Name="DI_UnloadStationLifterCYUp" BufferOffset="74" Addr="74" Description="" Visible="false"/>
|
<DI_ITEM Index="74" Name="DI_UnloadStationLifterCYUp" BufferOffset="74" Addr="74" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="75" Name="DI_UnloadStationLifterCYDown" BufferOffset="75" Addr="75" Description="" Visible="false"/>
|
<DI_ITEM Index="75" Name="DI_UnloadStationLifterCYDown" BufferOffset="75" Addr="75" Description="" Visible="false"/>
|
||||||
|
|
||||||
|
|
||||||
<DI_ITEM Index="88" Name="DI_TMPressure1ATM" BufferOffset="88" Addr="88" Description="" />
|
<DI_ITEM Index="88" Name="DI_TMPressure1ATM" BufferOffset="88" Addr="88" Description="" />
|
||||||
<DI_ITEM Index="89" Name="DI_TMPressure1VAC" BufferOffset="89" Addr="89" Description="" />
|
<DI_ITEM Index="89" Name="DI_TMPressure1VAC" BufferOffset="89" Addr="89" Description="" />
|
||||||
<DI_ITEM Index="90" Name="DI_LoadPressureATM" BufferOffset="90" Addr="90" Description="" />
|
<DI_ITEM Index="90" Name="DI_LoadPressureATM" BufferOffset="90" Addr="90" Description="" />
|
||||||
@ -68,19 +77,19 @@
|
|||||||
<DI_ITEM Index="97" Name="DI_LoadFastPumpFB" BufferOffset="97" Addr="97" Description="V83" />
|
<DI_ITEM Index="97" Name="DI_LoadFastPumpFB" BufferOffset="97" Addr="97" Description="V83" />
|
||||||
<DI_ITEM Index="98" Name="DI_TMSlowPumpFB" BufferOffset="98" Addr="98" Description="V82" />
|
<DI_ITEM Index="98" Name="DI_TMSlowPumpFB" BufferOffset="98" Addr="98" Description="V82" />
|
||||||
<DI_ITEM Index="99" Name="DI_TMFastPumpFB" BufferOffset="99" Addr="99" Description="V81" />
|
<DI_ITEM Index="99" Name="DI_TMFastPumpFB" BufferOffset="99" Addr="99" Description="V81" />
|
||||||
<DI_ITEM Index="100" Name="DI_BufferVentFB" BufferOffset="100" Addr="100" Description="V80" />
|
<DI_ITEM Index="100" Name="DI_BufferVentFB" BufferOffset="100" Addr="100" Description="V80" Visible="false"/>
|
||||||
<DI_ITEM Index="101" Name="DI_LoadVentFB" BufferOffset="101" Addr="101" Description="V79" />
|
<DI_ITEM Index="101" Name="DI_LoadVentFB" BufferOffset="101" Addr="101" Description="V79" />
|
||||||
<DI_ITEM Index="102" Name="DI_TMVentFB" BufferOffset="102" Addr="102" Description="V77" />
|
<DI_ITEM Index="102" Name="DI_TMVentFB" BufferOffset="102" Addr="102" Description="V77" />
|
||||||
<DI_ITEM Index="103" Name="DI_UnloadVentFB" BufferOffset="103" Addr="103" Description="V78" Visible="false"/>
|
<DI_ITEM Index="103" Name="DI_UnloadVentFB" BufferOffset="103" Addr="103" Description="V78" Visible="false"/>
|
||||||
<DI_ITEM Index="104" Name="DI_TMLoadBanlanceFB" BufferOffset="104" Addr="104" Description="V85" />
|
<DI_ITEM Index="104" Name="DI_TMLoadBanlanceFB" BufferOffset="104" Addr="104" Description="V85" />
|
||||||
<DI_ITEM Index="105" Name="DI_LoadDoorCloseFB" BufferOffset="105" Addr="105" Description="" />
|
<DI_ITEM Index="105" Name="DI_LoadDoorCloseFB" BufferOffset="105" Addr="105" Description="" />
|
||||||
<DI_ITEM Index="106" Name="DI_LoadDoorOpenFB" BufferOffset="106" Addr="106" Description="" />
|
<DI_ITEM Index="106" Name="DI_LoadDoorOpenFB" BufferOffset="106" Addr="106" Description="" />
|
||||||
<DI_ITEM Index="107" Name="DI_UnloadStationDoorCloseFB" BufferOffset="107" Addr="107" Description="" />
|
<DI_ITEM Index="107" Name="DI_UnloadStationDoorCloseFB" BufferOffset="107" Addr="107" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="108" Name="DI_UnloadStationDoorOpenFB" BufferOffset="108" Addr="108" Description="" />
|
<DI_ITEM Index="108" Name="DI_UnloadStationDoorOpenFB" BufferOffset="108" Addr="108" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="109" Name="DI_RectorADoorCloseFB" BufferOffset="109" Addr="109" Description="" />
|
<DI_ITEM Index="109" Name="DI_RectorADoorCloseFB" BufferOffset="109" Addr="109" Description="" />
|
||||||
<DI_ITEM Index="110" Name="DI_RectorADoorOpenFB" BufferOffset="110" Addr="110" Description="" />
|
<DI_ITEM Index="110" Name="DI_RectorADoorOpenFB" BufferOffset="110" Addr="110" Description="" />
|
||||||
<DI_ITEM Index="111" Name="DI_RectorBDoorCloseFB" BufferOffset="111" Addr="111" Description="" />
|
<DI_ITEM Index="111" Name="DI_RectorBDoorCloseFB" BufferOffset="111" Addr="111" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="112" Name="DI_RectorBDoorOpenFB" BufferOffset="112" Addr="112" Description="" />
|
<DI_ITEM Index="112" Name="DI_RectorBDoorOpenFB" BufferOffset="112" Addr="112" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="113" Name="DI_TMToUnloadBanlanceFB" BufferOffset="113" Addr="113" Description="V124" Visible="false"/>
|
<DI_ITEM Index="113" Name="DI_TMToUnloadBanlanceFB" BufferOffset="113" Addr="113" Description="V124" Visible="false"/>
|
||||||
<DI_ITEM Index="114" Name="DI_VacRobotEstopFB" BufferOffset="114" Addr="114" Description="" />
|
<DI_ITEM Index="114" Name="DI_VacRobotEstopFB" BufferOffset="114" Addr="114" Description="" />
|
||||||
<DI_ITEM Index="115" Name="DI_VacRobotExtenLoadEnableFB" BufferOffset="115" Addr="115" Description="" />
|
<DI_ITEM Index="115" Name="DI_VacRobotExtenLoadEnableFB" BufferOffset="115" Addr="115" Description="" />
|
||||||
@ -93,22 +102,22 @@
|
|||||||
<DI_ITEM Index="122" Name="DI_ATMRobotExtendLoadRSideEnableFB" BufferOffset="122" Addr="122" Description="" Visible="false"/>
|
<DI_ITEM Index="122" Name="DI_ATMRobotExtendLoadRSideEnableFB" BufferOffset="122" Addr="122" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="123" Name="DI_LoadLSideDoorCloseFB" BufferOffset="123" Addr="123" Description="" Visible="false"/>
|
<DI_ITEM Index="123" Name="DI_LoadLSideDoorCloseFB" BufferOffset="123" Addr="123" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="124" Name="DI_LoadLSideDoorOpenFB" BufferOffset="124" Addr="124" Description="" Visible="false"/>
|
<DI_ITEM Index="124" Name="DI_LoadLSideDoorOpenFB" BufferOffset="124" Addr="124" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="125" Name="DI_LoadRSideDoorCloseFB" BufferOffset="125" Addr="125" Description="" Visible="false"/>
|
<DI_ITEM Index="125" Name="DI_LoadLockWaferCYUPFB" BufferOffset="125" Addr="125" Description="" />
|
||||||
<DI_ITEM Index="126" Name="DI_LoadRSideDoorOpenFB" BufferOffset="126" Addr="126" Description="" Visible="false"/>
|
<DI_ITEM Index="126" Name="DI_LoadLockWaferCYDownFB" BufferOffset="126" Addr="126" Description="" />
|
||||||
<DI_ITEM Index="127" Name="DI_UnloadSubStationDoorCloseFB" BufferOffset="127" Addr="127" Description="" Visible="false"/>
|
<DI_ITEM Index="127" Name="DI_UnloadSubStationDoorCloseFB" BufferOffset="127" Addr="127" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="128" Name="DI_UnloadSubStationDoorOpenFB" BufferOffset="128" Addr="128" Description="" Visible="false"/>
|
<DI_ITEM Index="128" Name="DI_UnloadSubStationDoorOpenFB" BufferOffset="128" Addr="128" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="129" Name="DI_BufferStationDoorCloseFB" BufferOffset="129" Addr="129" Description="" />
|
<DI_ITEM Index="129" Name="DI_BufferStationDoorCloseFB" BufferOffset="129" Addr="129" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="130" Name="DI_BufferStationDoorOpenFB" BufferOffset="130" Addr="130" Description="" />
|
<DI_ITEM Index="130" Name="DI_BufferStationDoorOpenFB" BufferOffset="130" Addr="130" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="133" Name="DI_LoadWaferCYClampFB" BufferOffset="133" Addr="133" Description="" Visible="false"/>
|
<DI_ITEM Index="131" Name="DI_GloveBoxLoadwaferFB" BufferOffset="131" Addr="131" Description="" />
|
||||||
<DI_ITEM Index="134" Name="DI_LoadWaferCYOpenFB" BufferOffset="134" Addr="134" Description="" Visible="false"/>
|
<DI_ITEM Index="132" Name="DI_GloveBoxUnLoadwaferFB" BufferOffset="132" Addr="132" Description="" />
|
||||||
<DI_ITEM Index="135" Name="DI_LoadTrayCYClampFB" BufferOffset="135" Addr="135" Description="" Visible="false"/>
|
|
||||||
<DI_ITEM Index="136" Name="DI_LoadTrayCYOpenFB" BufferOffset="136" Addr="136" Description="" Visible="false"/>
|
|
||||||
<DI_ITEM Index="139" Name="DI_UnloadStationWaferCYClampFB" BufferOffset="139" Addr="139" Description="" Visible="false"/>
|
<DI_ITEM Index="139" Name="DI_UnloadStationWaferCYClampFB" BufferOffset="139" Addr="139" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="140" Name="DI_UnloadStationWaferCYOpenFB" BufferOffset="140" Addr="140" Description="" Visible="false"/>
|
<DI_ITEM Index="140" Name="DI_UnloadStationWaferCYOpenFB" BufferOffset="140" Addr="140" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="141" Name="DI_UnloadStationLifterCYUpFB" BufferOffset="141" Addr="141" Description="" Visible="false"/>
|
<DI_ITEM Index="141" Name="DI_UnloadStationLifterCYUpFB" BufferOffset="141" Addr="141" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" Visible="false"/>
|
<DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="143" Name="DI_TMToPMABanlanceFB" BufferOffset="143" Addr="143" Description="" />
|
<DI_ITEM Index="143" Name="DI_TMToPMABanlanceFB" BufferOffset="143" Addr="143" Description="" />
|
||||||
<DI_ITEM Index="144" Name="DI_TMToPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" />
|
<DI_ITEM Index="144" Name="DI_TMToPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" />
|
||||||
|
|
||||||
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122" Visible="false"/>
|
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122" Visible="false"/>
|
||||||
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123" Visible="false"/>
|
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123" Visible="false"/>
|
||||||
<DI_ITEM Index="160" Name="DI_ReactorAATMTransferReadyFB" BufferOffset="160" Addr="160" Description="" />
|
<DI_ITEM Index="160" Name="DI_ReactorAATMTransferReadyFB" BufferOffset="160" Addr="160" Description="" />
|
||||||
@ -138,9 +147,9 @@
|
|||||||
<DI_ITEM Index="189" Name="DI_TMVentUpRoutineRunningFB" BufferOffset="189" Addr="189" Description="" />
|
<DI_ITEM Index="189" Name="DI_TMVentUpRoutineRunningFB" BufferOffset="189" Addr="189" Description="" />
|
||||||
<DI_ITEM Index="190" Name="DI_LLCyclePurgeRoutineRunningFB" BufferOffset="190" Addr="190" Description="" />
|
<DI_ITEM Index="190" Name="DI_LLCyclePurgeRoutineRunningFB" BufferOffset="190" Addr="190" Description="" />
|
||||||
|
|
||||||
<DI_ITEM Index="191" Name="DI_LLLeakCheckRoutineRunningFB" BufferOffset="191" Addr="191" Description="" />
|
<DI_ITEM Index="191" Name="DI_LLLeakCheckRoutineRunningFB" BufferOffset="191" Addr="191" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="192" Name="DI_LLPumpDownRoutineRunningFB" BufferOffset="192" Addr="192" Description="" />
|
<DI_ITEM Index="192" Name="DI_LLPumpDownRoutineRunningFB" BufferOffset="192" Addr="192" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="193" Name="DI_LLVentUpRoutineRunningFB" BufferOffset="193" Addr="193" Description="" />
|
<DI_ITEM Index="193" Name="DI_LLVentUpRoutineRunningFB" BufferOffset="193" Addr="193" Description="" Visible="false"/>
|
||||||
|
|
||||||
|
|
||||||
|
|
||||||
@ -152,6 +161,28 @@
|
|||||||
<DI_ITEM Index="213" Name="DI_LdRotationOneCircleDone" BufferOffset="213" Addr="213" Description="" Visible="false"/>
|
<DI_ITEM Index="213" Name="DI_LdRotationOneCircleDone" BufferOffset="213" Addr="213" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="214" Name="DI_LdRotationCCD1PosDone" BufferOffset="214" Addr="214" Description="" Visible="false"/>
|
<DI_ITEM Index="214" Name="DI_LdRotationCCD1PosDone" BufferOffset="214" Addr="214" Description="" Visible="false"/>
|
||||||
<DI_ITEM Index="215" Name="DI_LdRotationCCD2PosDone" BufferOffset="215" Addr="215" Description="" Visible="false"/>
|
<DI_ITEM Index="215" Name="DI_LdRotationCCD2PosDone" BufferOffset="215" Addr="215" Description="" Visible="false"/>
|
||||||
|
|
||||||
|
|
||||||
|
<!--存放垃圾IO数据-->
|
||||||
|
<DI_ITEM Index="220" Name="DI_WaferCassetLeftInch6" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_WaferCassetRightInch6" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_WaferCassetLeftConvexSensor" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_WaferCassetRightConvexSensor" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_TrayCassetInch6" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_TrayCassetConvexSensor" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadWaferCYClampFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadWaferCYOpenFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadTrayCYClampFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadTrayCYOpenFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadRSideDoorCloseFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<DI_ITEM Index="220" Name="DI_LoadRSideDoorOpenFB" BufferOffset="220" Addr="220" Description="" Visible="false"/>
|
||||||
|
<!--存放垃圾IO数据-->
|
||||||
|
|
||||||
|
<DI_ITEM Index="221" Name="DI_TMPMAS7ComErr" BufferOffset="221" Addr="221" Description="" />
|
||||||
|
<DI_ITEM Index="222" Name="DI_TMPMATCPComErr" BufferOffset="222" Addr="222" Description="" />
|
||||||
|
<DI_ITEM Index="223" Name="DI_TMPMBS7ComErr" BufferOffset="223" Addr="223" Description="" />
|
||||||
</Block>
|
</Block>
|
||||||
</Dig_In>
|
</Dig_In>
|
||||||
<Dig_Out>
|
<Dig_Out>
|
||||||
@ -160,20 +191,20 @@
|
|||||||
<DO_ITEM Index="1" Name="DO_LoadFastPump" BufferOffset="1" Addr="1" Description="V83" />
|
<DO_ITEM Index="1" Name="DO_LoadFastPump" BufferOffset="1" Addr="1" Description="V83" />
|
||||||
<DO_ITEM Index="2" Name="DO_TMSlowPump" BufferOffset="2" Addr="2" Description="V82" />
|
<DO_ITEM Index="2" Name="DO_TMSlowPump" BufferOffset="2" Addr="2" Description="V82" />
|
||||||
<DO_ITEM Index="3" Name="DO_TMFastPump" BufferOffset="3" Addr="3" Description="V81" />
|
<DO_ITEM Index="3" Name="DO_TMFastPump" BufferOffset="3" Addr="3" Description="V81" />
|
||||||
<DO_ITEM Index="4" Name="DO_BufferVent" BufferOffset="4" Addr="4" Description="V80" />
|
<DO_ITEM Index="4" Name="DO_BufferVent" BufferOffset="4" Addr="4" Description="V80" Visible="false"/>
|
||||||
<DO_ITEM Index="5" Name="DO_LoadVent" BufferOffset="5" Addr="5" Description="V79" />
|
<DO_ITEM Index="5" Name="DO_LoadVent" BufferOffset="5" Addr="5" Description="V79" />
|
||||||
<DO_ITEM Index="6" Name="DO_TMVent" BufferOffset="6" Addr="6" Description="V77" />
|
<DO_ITEM Index="6" Name="DO_TMVent" BufferOffset="6" Addr="6" Description="V77" />
|
||||||
<DO_ITEM Index="7" Name="DO_UnloadVent" BufferOffset="7" Addr="7" Description="V78" />
|
<DO_ITEM Index="7" Name="DO_UnloadVent" BufferOffset="7" Addr="7" Description="V78" />
|
||||||
<DO_ITEM Index="8" Name="DO_TMLoadBanlance" BufferOffset="8" Addr="8" Description="V85" />
|
<DO_ITEM Index="8" Name="DO_TMLoadBanlance" BufferOffset="8" Addr="8" Description="V85" />
|
||||||
<DO_ITEM Index="9" Name="DO_LoadDoorClose" BufferOffset="9" Addr="9" Description="" />
|
<DO_ITEM Index="9" Name="DO_LoadDoorClose" BufferOffset="9" Addr="9" Description="" />
|
||||||
<DO_ITEM Index="10" Name="DO_LoadDoorOpen" BufferOffset="10" Addr="10" Description="" />
|
<DO_ITEM Index="10" Name="DO_LoadDoorOpen" BufferOffset="10" Addr="10" Description="" />
|
||||||
<DO_ITEM Index="11" Name="DO_UnloadStationDoorClose" BufferOffset="11" Addr="11" Description="" />
|
<DO_ITEM Index="11" Name="DO_UnloadStationDoorClose" BufferOffset="11" Addr="11" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="12" Name="DO_UnloadStationDoorOpen" BufferOffset="12" Addr="12" Description="" />
|
<DO_ITEM Index="12" Name="DO_UnloadStationDoorOpen" BufferOffset="12" Addr="12" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="13" Name="DO_RectorADoorClose" BufferOffset="13" Addr="13" Description="" />
|
<DO_ITEM Index="13" Name="DO_RectorADoorClose" BufferOffset="13" Addr="13" Description="" />
|
||||||
<DO_ITEM Index="14" Name="DO_RectorADoorOpen" BufferOffset="14" Addr="14" Description="" />
|
<DO_ITEM Index="14" Name="DO_RectorADoorOpen" BufferOffset="14" Addr="14" Description="" />
|
||||||
<DO_ITEM Index="15" Name="DO_RectorBDoorClose" BufferOffset="15" Addr="15" Description="" />
|
<DO_ITEM Index="15" Name="DO_RectorBDoorClose" BufferOffset="15" Addr="15" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="16" Name="DO_RectorBDoorOpen" BufferOffset="16" Addr="16" Description="" />
|
<DO_ITEM Index="16" Name="DO_RectorBDoorOpen" BufferOffset="16" Addr="16" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="17" Name="DO_TMToUnloadBanlance" BufferOffset="17" Addr="17" Description="V124" />
|
<DO_ITEM Index="17" Name="DO_TMToUnloadBanlance" BufferOffset="17" Addr="17" Description="V124" Visible="false"/>
|
||||||
<DO_ITEM Index="18" Name="DO_VacRobotEstop" BufferOffset="18" Addr="18" Description="" />
|
<DO_ITEM Index="18" Name="DO_VacRobotEstop" BufferOffset="18" Addr="18" Description="" />
|
||||||
<DO_ITEM Index="19" Name="DO_VacRobotExtenLoadEnable" BufferOffset="19" Addr="19" Description="" />
|
<DO_ITEM Index="19" Name="DO_VacRobotExtenLoadEnable" BufferOffset="19" Addr="19" Description="" />
|
||||||
<DO_ITEM Index="20" Name="DO_VacRobotExtendUnloadEnable" BufferOffset="20" Addr="20" Description="" />
|
<DO_ITEM Index="20" Name="DO_VacRobotExtendUnloadEnable" BufferOffset="20" Addr="20" Description="" />
|
||||||
@ -191,12 +222,10 @@
|
|||||||
<DO_ITEM Index="32" Name="DO_UnloadSubStationDoorOpen" BufferOffset="32" Addr="32" Description="" Visible="false"/>
|
<DO_ITEM Index="32" Name="DO_UnloadSubStationDoorOpen" BufferOffset="32" Addr="32" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="33" Name="DO_BufferStationDoorClose" BufferOffset="33" Addr="33" Description="" Visible="false"/>
|
<DO_ITEM Index="33" Name="DO_BufferStationDoorClose" BufferOffset="33" Addr="33" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="34" Name="DO_BufferStationDoorOpen" BufferOffset="34" Addr="34" Description="" Visible="false"/>
|
<DO_ITEM Index="34" Name="DO_BufferStationDoorOpen" BufferOffset="34" Addr="34" Description="" Visible="false"/>
|
||||||
<!--<DO_ITEM Index="35" Name="DO_LoadLidLock" BufferOffset="35" Addr="35" Description="" />
|
<DO_ITEM Index="35" Name="DO_GloveBoxLoadwafer" BufferOffset="35" Addr="35" Description="" />
|
||||||
<DO_ITEM Index="36" Name="DO_LoadLidUnlock" BufferOffset="36" Addr="36" Description="" />
|
<DO_ITEM Index="36" Name="DO_GloveBoxUnLoadwafer" BufferOffset="36" Addr="36" Description="" />
|
||||||
<DO_ITEM Index="37" Name="DO_LoadWaferCYClamp" BufferOffset="37" Addr="37" Description="" Visible="false"/>
|
|
||||||
<DO_ITEM Index="38" Name="DO_LoadWaferCYOpen" BufferOffset="38" Addr="38" Description="" Visible="false"/>
|
|
||||||
<DO_ITEM Index="39" Name="DO_LoadTrayCYClamp" BufferOffset="39" Addr="39" Description="" Visible="false"/>
|
|
||||||
<DO_ITEM Index="40" Name="DO_LoadTrayCYOpen" BufferOffset="40" Addr="40" Description="" Visible="false"/>-->
|
|
||||||
<DO_ITEM Index="43" Name="DO_UnloadStationWaferCYClamp" BufferOffset="43" Addr="43" Description="" Visible="false"/>
|
<DO_ITEM Index="43" Name="DO_UnloadStationWaferCYClamp" BufferOffset="43" Addr="43" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="44" Name="DO_UnloadStationWaferCYOpen" BufferOffset="44" Addr="44" Description="" Visible="false"/>
|
<DO_ITEM Index="44" Name="DO_UnloadStationWaferCYOpen" BufferOffset="44" Addr="44" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="45" Name="DO_UnloadStationLifterCYUp" BufferOffset="45" Addr="45" Description="" Visible="false"/>
|
<DO_ITEM Index="45" Name="DO_UnloadStationLifterCYUp" BufferOffset="45" Addr="45" Description="" Visible="false"/>
|
||||||
@ -221,7 +250,7 @@
|
|||||||
<DO_ITEM Index="72" Name="DO_TMWaferPresenceA" BufferOffset="72" Addr="72" Description="" />
|
<DO_ITEM Index="72" Name="DO_TMWaferPresenceA" BufferOffset="72" Addr="72" Description="" />
|
||||||
<DO_ITEM Index="73" Name="DO_TMWaferPresenceB" BufferOffset="73" Addr="73" Description="" />
|
<DO_ITEM Index="73" Name="DO_TMWaferPresenceB" BufferOffset="73" Addr="73" Description="" />
|
||||||
<DO_ITEM Index="74" Name="DO_TMWaferPresenceBuf" BufferOffset="74" Addr="74" Description="" />
|
<DO_ITEM Index="74" Name="DO_TMWaferPresenceBuf" BufferOffset="74" Addr="74" Description="" />
|
||||||
<DO_ITEM Index="75" Name="DO_TMWaferPresenceUnload" BufferOffset="75" Addr="75" Description="" />
|
<DO_ITEM Index="75" Name="DO_TMWaferPresencePreheat" BufferOffset="75" Addr="75" Description="" />
|
||||||
<DO_ITEM Index="78" Name="DO_ForelineBasePressureReady" BufferOffset="78" Addr="78" Description="" />
|
<DO_ITEM Index="78" Name="DO_ForelineBasePressureReady" BufferOffset="78" Addr="78" Description="" />
|
||||||
<DO_ITEM Index="79" Name="DO_TMatATM" BufferOffset="79" Addr="79" Description="" />
|
<DO_ITEM Index="79" Name="DO_TMatATM" BufferOffset="79" Addr="79" Description="" />
|
||||||
<DO_ITEM Index="80" Name="DO_LoadAtATM" BufferOffset="80" Addr="80" Description="" />
|
<DO_ITEM Index="80" Name="DO_LoadAtATM" BufferOffset="80" Addr="80" Description="" />
|
||||||
@ -257,6 +286,15 @@
|
|||||||
<DO_ITEM Index="152" Name="DO_LdRotationMoveOneCircle" BufferOffset="152" Addr="152" Description="" Visible="false"/>
|
<DO_ITEM Index="152" Name="DO_LdRotationMoveOneCircle" BufferOffset="152" Addr="152" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="153" Name="DO_LdRotationMoveCCD1Pos" BufferOffset="153" Addr="153" Description="" Visible="false"/>
|
<DO_ITEM Index="153" Name="DO_LdRotationMoveCCD1Pos" BufferOffset="153" Addr="153" Description="" Visible="false"/>
|
||||||
<DO_ITEM Index="154" Name="DO_LdRotationMoveCCD2Pos" BufferOffset="154" Addr="154" Description="" Visible="false"/>
|
<DO_ITEM Index="154" Name="DO_LdRotationMoveCCD2Pos" BufferOffset="154" Addr="154" Description="" Visible="false"/>
|
||||||
|
|
||||||
|
<!--垃圾IO数据-->
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadLidLock" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadLidUnlock" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadWaferCYClamp" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadWaferCYOpen" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadTrayCYClamp" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<DO_ITEM Index="159" Name="DO_LoadTrayCYOpen" BufferOffset="159" Addr="159" Description="" Visible="false"/>
|
||||||
|
<!--垃圾IO数据-->
|
||||||
</Block>
|
</Block>
|
||||||
</Dig_Out>
|
</Dig_Out>
|
||||||
<Ana_In>
|
<Ana_In>
|
||||||
@ -264,23 +302,30 @@
|
|||||||
<AI_ITEM Index="0" Name="AI_TMPressure1" BufferOffset="0" Addr="0" Description="" />
|
<AI_ITEM Index="0" Name="AI_TMPressure1" BufferOffset="0" Addr="0" Description="" />
|
||||||
<AI_ITEM Index="1" Name="AI_LoadPressure" BufferOffset="1" Addr="1" Description="" />
|
<AI_ITEM Index="1" Name="AI_LoadPressure" BufferOffset="1" Addr="1" Description="" />
|
||||||
<AI_ITEM Index="2" Name="AI_PM1Pressure2" BufferOffset="2" Addr="2" Description="" />
|
<AI_ITEM Index="2" Name="AI_PM1Pressure2" BufferOffset="2" Addr="2" Description="" />
|
||||||
<AI_ITEM Index="3" Name="AI_PM2Pressure2" BufferOffset="3" Addr="3" Description="" />
|
<AI_ITEM Index="3" Name="AI_PM2Pressure2" BufferOffset="3" Addr="3" Description="" Visible="false"/>
|
||||||
<AI_ITEM Index="4" Name="AI_UnloadPressure" BufferOffset="4" Addr="4" Description="" />
|
<AI_ITEM Index="4" Name="AI_UnloadPressure" BufferOffset="4" Addr="4" Description="" Visible="false"/>
|
||||||
<AI_ITEM Index="5" Name="AI_UnloadTemp" BufferOffset="5" Addr="5" Description="" />
|
<AI_ITEM Index="5" Name="AI_UnloadTemp" BufferOffset="5" Addr="5" Description="" Visible="false"/>
|
||||||
|
<AI_ITEM Index="6" Name="AI_LoadLockTemp" BufferOffset="6" Addr="6" Description="" />
|
||||||
<AI_ITEM Index="7" Name="AI_BufferTemp" BufferOffset="7" Addr="7" Description="" />
|
<AI_ITEM Index="7" Name="AI_BufferTemp" BufferOffset="7" Addr="7" Description="" />
|
||||||
<AI_ITEM Index="8" Name="AI_M60FlowRead" BufferOffset="8" Addr="8" Description="" />
|
<AI_ITEM Index="8" Name="AI_M60FlowRead" BufferOffset="8" Addr="8" Description="" />
|
||||||
|
|
||||||
<AI_ITEM Index="9" Name="AI_M61FlowRead" BufferOffset="9" Addr="9" Description="" />
|
|
||||||
|
|
||||||
<AI_ITEM Index="13" Name="AI_LdRotationRelativeDegree" BufferOffset="13" Addr="13" Description="" />
|
<AI_ITEM Index="13" Name="AI_LdRotationRelativeDegree" BufferOffset="13" Addr="13" Description="" />
|
||||||
<AI_ITEM Index="14" Name="AI_LdRotationCCD1Degree" BufferOffset="14" Addr="14" Description="" />
|
<AI_ITEM Index="14" Name="AI_LdRotationCCD1Degree" BufferOffset="14" Addr="14" Description="" />
|
||||||
<AI_ITEM Index="15" Name="AI_LdRotationCCD2Degree" BufferOffset="15" Addr="15" Description="" />
|
<AI_ITEM Index="15" Name="AI_LdRotationCCD2Degree" BufferOffset="15" Addr="15" Description="" />
|
||||||
|
<AI_ITEM Index="16" Name="AI_Temp0" BufferOffset="16" Addr="16" Description="" />
|
||||||
|
<AI_ITEM Index="17" Name="AI_Temp1" BufferOffset="17" Addr="17" Description="" />
|
||||||
|
<AI_ITEM Index="18" Name="AI_Temp2" BufferOffset="18" Addr="18" Description="" />
|
||||||
|
<AI_ITEM Index="19" Name="AI_Temp3" BufferOffset="19" Addr="19" Description="" />
|
||||||
|
<AI_ITEM Index="20" Name="AI_RunVentPT1" BufferOffset="20" Addr="20" Description="" />
|
||||||
|
<AI_ITEM Index="21" Name="AI_RunVentPT2" BufferOffset="21" Addr="21" Description="" />
|
||||||
|
<AI_ITEM Index="22" Name="AI_RunVentPT3" BufferOffset="22" Addr="22" Description="" />
|
||||||
|
<AI_ITEM Index="23" Name="AI_RunVentPT4" BufferOffset="23" Addr="23" Description="" />
|
||||||
|
<AI_ITEM Index="24" Name="AI_RunVentPT5" BufferOffset="24" Addr="24" Description="" />
|
||||||
</Block>
|
</Block>
|
||||||
</Ana_In>
|
</Ana_In>
|
||||||
<Ana_Out>
|
<Ana_Out>
|
||||||
<Block Index="0">
|
<Block Index="0">
|
||||||
<AO_ITEM Index="8" Name="AO_M60FlowSetpoint" BufferOffset="8" Addr="8" Description="" />
|
<AO_ITEM Index="8" Name="AO_M60FlowSetpoint" BufferOffset="8" Addr="8" Description="" />
|
||||||
<AO_ITEM Index="9" Name="AO_M61FlowSetpoint" BufferOffset="9" Addr="9" Description="" />
|
|
||||||
<AO_ITEM Index="10" Name="AO_LdRotationHomeOffset" BufferOffset="10" Addr="10" Description="" Visible="false"/>
|
<AO_ITEM Index="10" Name="AO_LdRotationHomeOffset" BufferOffset="10" Addr="10" Description="" Visible="false"/>
|
||||||
<AO_ITEM Index="11" Name="AO_HomeOffsetDegreeLU" BufferOffset="11" Addr="11" Description="" />
|
<AO_ITEM Index="11" Name="AO_HomeOffsetDegreeLU" BufferOffset="11" Addr="11" Description="" />
|
||||||
<AO_ITEM Index="12" Name="AO_LdRotationCCD1Degree" BufferOffset="12" Addr="12" Description="" />
|
<AO_ITEM Index="12" Name="AO_LdRotationCCD1Degree" BufferOffset="12" Addr="12" Description="" />
|
||||||
|
|||||||
Loading…
Reference in New Issue
Block a user