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修改MFC PC默认配置

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hanqiangqiang 2026-07-29 14:51:19 +08:00
parent bf2cf1cd35
commit 4c524514b0
1 changed files with 116 additions and 129 deletions
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App/SicRT/Config/System.sccfg
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@ -833,8 +833,8 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc4">
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -845,8 +845,8 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc7">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -857,20 +857,20 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc9">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc10">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc11">
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -881,32 +881,32 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc13">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="HCL" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc14">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="SiH4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc15">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc16">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc17">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -928,6 +928,12 @@
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc21">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc22">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
@ -940,6 +946,12 @@
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc24">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc25">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
@ -953,8 +965,8 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc27">
<config default="200000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="2500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -996,25 +1008,25 @@
</configs>
<configs name="Mfc36">
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc37">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc38">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc40">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -1025,55 +1037,55 @@
<config default="10" name="AlarmTime" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
<config default="10" name="AlarmRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发报警" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
<configs name="PC1">
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC2">
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC3">
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1900" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC4">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1200" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC5">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC6">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC7">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC8">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC9">
<config default="30000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
@ -1455,12 +1467,6 @@
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc2">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc3">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
@ -1468,18 +1474,11 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc4">
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc5">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
<config default="true" name="IsInstalled" description="MFC5是否安装" max="" min="" paramter="" tag="" unit="" type="Bool" />
</configs>
<configs name="Mfc6">
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
@ -1487,8 +1486,8 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc7">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -1499,20 +1498,20 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc9">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc10">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc11">
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -1523,35 +1522,41 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc13">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="HCL" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc14">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="SiH4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc15">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc16">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc17">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc18">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc19">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
@ -1564,6 +1569,12 @@
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc21">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc22">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
@ -1576,6 +1587,12 @@
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc24">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc25">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
@ -1589,8 +1606,8 @@
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc27">
<config default="200000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="2500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -1632,55 +1649,25 @@
</configs>
<configs name="Mfc36">
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc37">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc38">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc40">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc41">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc42">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc43">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc44">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="Mfc45">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
@ -1691,55 +1678,55 @@
<config default="10" name="AlarmTime" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
<config default="10" name="AlarmRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发报警" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
<configs name="PC1">
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC2">
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC3">
<config default="5000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1900" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC4">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1200" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC5">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC6">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC7">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC8">
<config default="10000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1260" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
</configs>
<configs name="PC9">
<config default="30000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="3000" name="Scale" description="Scale" max="10000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="150" name="DefaultSetPoint" description="DefaultSetPoint" max="3000" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="Offset" description="PC Offset" max="1000" min="-1000" paramter="" tag="" unit="mbar" type="Double" />
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />