Sic-Software/MoS2
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修改Routine

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This commit is contained in:
hanqiangqiang 2026-08-25 09:35:07 +08:00
parent f18933abaa
commit 5a08383991
1 changed files with 7 additions and 16 deletions
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23
App/Modules/SicModules/PMs/RecipeExecutions/PostProcess.cs
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@ -28,9 +28,10 @@ namespace SicModules.PMs.RecipeExecutions
SetGroupG,
SetV65,
SetV68,
SetM1to16,
SetM1to17,
SetM17M18,
SetM2toM40,
SetM18toM40,
SetPC,
SetEPV2,
VentPumpClose,
@ -154,9 +155,6 @@ namespace SicModules.PMs.RecipeExecutions
//打开V31,打开V32
SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
//打开V103,关闭V105
SetIoValueByGroup((int)RoutineStep.SetV103, IoGroupName.V103, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV105, IoGroupName.V105, false, _IoValueOpenCloseTimeout);
//打开V35,打开V36
SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
@ -174,21 +172,14 @@ namespace SicModules.PMs.RecipeExecutions
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
//打开V65
SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
//打开V68
SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
//M2、M9、M15、M19-M40 MFC 30s ramp 到 default 值
SetMfcToDefaultByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM42, 5);
//M1 - M16 MFC 30s ramp 到 default 值(M2、M9、M15除外)
SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 5);
SetMfcToDefaultByGroup((int)RoutineStep.SetM17M18, MfcGroupName.M17M18, 5);
// 1 - M17 设定为 default 值，所有 PC 设定为 default 值(PC1 - PC9)，
SetMfcToDefaultByGroup((int)RoutineStep.SetM1to17, MfcGroupName.M1toM17, 0);
//所有PC设定为默认值
SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
// M18 - M40（除 M30\M34\M39）） MFC 5s ramp 到 0。
SetMfcByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 0, 5);
//打开EPV2
SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);