diff --git a/App/Modules/SicModules/PMs/RecipeExecutions/PostProcess.cs b/App/Modules/SicModules/PMs/RecipeExecutions/PostProcess.cs index 4695888..8f4813b 100644 --- a/App/Modules/SicModules/PMs/RecipeExecutions/PostProcess.cs +++ b/App/Modules/SicModules/PMs/RecipeExecutions/PostProcess.cs @@ -28,9 +28,10 @@ namespace SicModules.PMs.RecipeExecutions SetGroupG, SetV65, SetV68, - SetM1to16, + SetM1to17, SetM17M18, SetM2toM40, + SetM18toM40, SetPC, SetEPV2, VentPumpClose, @@ -154,9 +155,6 @@ namespace SicModules.PMs.RecipeExecutions //打开V31,打开V32 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); - //打开V103,关闭V105 - SetIoValueByGroup((int)RoutineStep.SetV103, IoGroupName.V103, true, _IoValueOpenCloseTimeout); - SetIoValueByGroup((int)RoutineStep.SetV105, IoGroupName.V105, false, _IoValueOpenCloseTimeout); //打开V35,打开V36 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); @@ -174,21 +172,14 @@ namespace SicModules.PMs.RecipeExecutions SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); - //打开V65 - SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout); - - //打开V68 - SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); - - //M2、M9、M15、M19-M40 MFC 30s ramp 到 default 值 - SetMfcToDefaultByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM42, 5); - - //M1 - M16 MFC 30s ramp 到 default 值(M2、M9、M15除外) - SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 5); - SetMfcToDefaultByGroup((int)RoutineStep.SetM17M18, MfcGroupName.M17M18, 5); + // 1 - M17 设定为 default 值,所有 PC 设定为 default 值(PC1 - PC9), + SetMfcToDefaultByGroup((int)RoutineStep.SetM1to17, MfcGroupName.M1toM17, 0); //所有PC设定为默认值 SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); + // M18 - M40(除 M30\M34\M39)) MFC 5s ramp 到 0。 + SetMfcByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 0, 5); + //打开EPV2 SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);