完成气动阀配置,界面后台数据绑定,初步整理仿真配置和启动

This commit is contained in:
hanqiangqiang 2026-07-09 17:30:01 +08:00
parent 5235bb562a
commit 6168f16fbe
9 changed files with 520 additions and 576 deletions

View File

@ -2,100 +2,95 @@
<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoValve id="V18" display="ArSafetyBypass" schematicId="V18" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_ArSafetyBypass(V18)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V18s" display="ArSafetyBypass" schematicId="V18s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18s)" doOpen="DO_ArSafetyBypass(V18s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V19" display="ArSafetyBypass" schematicId="V19" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6BypassFB(V19)" doOpen="DO_ArSafetyBypass(V19)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V18" display="MoCO6CarrierOutlet" schematicId="V18" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_MoCO6CarrierOutlet(V18)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V18s" display="MoCO6CarrierOutlet" schematicId="V18s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18s)" doOpen="DO_MoCO6CarrierOutlet(V18s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V19" display="MoCO6Bypass" schematicId="V19" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6BypassFB(V19)" doOpen="DO_MoCO6Bypass(V19)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V20" display="ArSafetyBypass" schematicId="V20" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)" doOpen="DO_ArSafetyBypass(V20)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V20s" display="ArSafetyBypass" schematicId="V20s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20s)" doOpen="DO_ArSafetyBypass(V20s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V21" display="ArSafetyBypass" schematicId="V21" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)" doOpen="DO_ArSafetyBypass(V21)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V21s" display="ArSafetyBypass" schematicId="V21s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21s)" doOpen="DO_ArSafetyBypass(V21s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V20" display="MoCO6InOutLeakTest" schematicId="V20" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)" doOpen="DO_MoCO6InOutLeakTest(V20)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V20s" display="MoCO6InOutLeakTest" schematicId="V20s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20s)" doOpen="DO_MoCO6InOutLeakTest(V20s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V21" display="MoResrvCarrierOutlet" schematicId="V21" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)" doOpen="DO_MoResrvCarrierOutlet(V21)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V21s" display="MoResrvCarrierOutlet" schematicId="V21s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21s)" doOpen="DO_MoResrvCarrierOutlet(V21s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V22" display="ArSafetyBypass" schematicId="V22" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvBypassFB(V22)" doOpen="DO_ArSafetyBypass(V22)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V22" display="MoResrvBypass" schematicId="V22" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvBypassFB(V22)" doOpen="DO_MoResrvBypass(V22)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V25" display="SideLeakIsolate" schematicId="V25" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_SideLeakIsolateFB(V25)" doOpen="DO_SideLeakIsolate(V25)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V23" display="ArSafetyBypass" schematicId="V23" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)" doOpen="DO_ArSafetyBypass(V23)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V23s" display="ArSafetyBypass" schematicId="V23s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23s)" doOpen="DO_ArSafetyBypass(V23s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V27" display="PMLeakTestIsolate" schematicId="V27" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_PMLeakTestIsolateFB(V27)" doOpen="DO_PMLeakTestIsolate(V27)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V31" display="H2Supply" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2InletCutOffFB(V31)" doOpen="DO_H2Supply(V31)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V32" display="ArSupply" schematicId="V32" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_N2InletCutOffFB(V32)" doOpen="DO_ArSupply(V32)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33" display="SHH2ArSupply" schematicId="V33" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33s" display="SHH2ArSupply" schematicId="V33s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V23" display="MoResrvInoutLeakTest" schematicId="V23" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)" doOpen="DO_MoResrvInoutLeakTest(V23)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V23s" display="MoResrvInoutLeakTest" schematicId="V23s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23s)" doOpen="DO_MoResrvInoutLeakTest(V23s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V31" display="H2InletCutOff" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2InletCutOffFB(V31)" doOpen="DO_H2InletCutOff(V31)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V32" display="N2InletCutOff" schematicId="V32" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_N2InletCutOffFB(V32)" doOpen="DO_N2InletCutOff(V32)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33" display="SHH2ArSupply" schematicId="V33" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33s" display="SHH2ArSupply" schematicId="V33s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V35" display="H2ArLine1" schematicId="V35" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PushGasSupplyFB(V35)" doOpen="DO_H2ArLine1(V35)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V36" display="H2ArLine2" schematicId="V36" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_RunVentGasSupplyFB(V36)" doOpen="DO_H2ArLine2(V36)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V37" display="N2.Switch" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_N2Switch(V37)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V37s" display="N2.Switch" schematicId="V37s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_N2Switch(V37)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V35" display="PushGasSupply" schematicId="V35" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PushGasSupplyFB(V35)" doOpen="DO_PushGasSupply(V35)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V36" display="RunVentGasSupply" schematicId="V36" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_RunVentGasSupplyFB(V36)" doOpen="DO_RunVentGasSupply(V36)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V37" display="O2CarrierSource" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V37s" display="O2CarrierSource" schematicId="V37s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V39" display="Diluted N2 Run" schematicId="V39" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_DilutedN2Run/Vent(V39)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V39s" display="Diluted N2 Vent" schematicId="V39s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_DilutedN2Run/Vent(V39)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V40" display="High N2 Run" schematicId="V40" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_HighN2Run/Vent(V40)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V40s" display="High N2 Vent" schematicId="V40s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_HighN2Run/Vent(V40)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V41" display="TMA Run" schematicId="V41" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6RunFB(V41)" doOpen="DO_TMARun(V41)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V42" display="TMA Vent" schematicId="V42" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6VentFB(V42)" doOpen="DO_TMAVent(V42)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V43" display="TMARelease" schematicId="V43" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_TMARelease(V43)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V43s" display="TMARelease" schematicId="V43s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_TMARelease(V43)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V45" display="TMABypass" schematicId="V45" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6BypassFB(V45)" doOpen="DO_TMABypass(V45)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V46" display="TMAVac" schematicId="V46" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_TMAVac(V46)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V46s" display="TMAVac" schematicId="V46s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_TMAVac(V46)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V47" display="HCLRun" schematicId="V47" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_PN2Run/Vent(V47)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V47s" display="HCLVent" schematicId="V47s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_PN2Run/Vent(V47)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V48" display="TCSRelease" schematicId="V48" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_TCSRelease(V48)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V48s" display="TCSRelease" schematicId="V48s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_TCSRelease(V48)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V49" display="TCSBypass" schematicId="V49" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2BypassFB(V49)" doOpen="DO_TCSBypass(V49)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V39" display="MoCO6RunVent" schematicId="V39" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V39s" display="MoCO6RunVent" schematicId="V39s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V40" display="MoResrvRunVent" schematicId="V40" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V40s" display="MoResrvRunVent" schematicId="V40s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V41" display="WCO6Run" schematicId="V41" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6RunFB(V41)" doOpen="DO_WCO6Run(V41)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V42" display="WCO6Vent" schematicId="V42" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6VentFB(V42)" doOpen="DO_WCO6Vent(V42)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V43" display="WCO6Carrier" schematicId="V43" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V43s" display="WCO6Carrier" schematicId="V43s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V45" display="WCO6Bypass" schematicId="V45" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6BypassFB(V45)" doOpen="DO_WCO6Bypass(V45)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V46" display="WCO6InLeakTest" schematicId="V46" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V46s" display="WCO6InLeakTest" schematicId="V46s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V47" display="O2RunVent" schematicId="V47" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V47s" display="O2RunVent" schematicId="V47s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V48" display="CS2Carrier" schematicId="V48" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V48s" display="CS2Carrier" schematicId="V48s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V49" display="CS2Bypass" schematicId="V49" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2BypassFB(V49)" doOpen="DO_CS2Bypass(V49)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V50" display="CS2InOutLeakTest" schematicId="V50" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V50s" display="CS2InOutLeakTest" schematicId="V50s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V51" display="H2SSourceCarrier" schematicId="V51" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V51s" display="H2SSourceCarrier" schematicId="V51s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V52" display="H2SeSourceCarrier" schematicId="V52" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V52s" display="H2SeSourceCarrier" schematicId="V52s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V53" display="CS2RunVent" schematicId="V53" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2RunVentFB" doOpen="DO_CS2RunVent" diCloseSensor="" diOpenSensor="" />
<IoValve id="V53s" display="CS2RunVent" schematicId="V53s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2RunVentFB" doOpen="DO_CS2RunVent" diCloseSensor="" diOpenSensor="" />
<IoValve id="V54" display="H2SRunVent" schematicId="V54" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V54s" display="H2SRunVent" schematicId="V54s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V55" display="H2SeRun" schematicId="V55" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeRunFB(V55)" doOpen="DO_H2SeRun(V55)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V56" display="H2SeVent" schematicId="V56" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeVentFB(V56)" doOpen="DO_H2SeVent(V56)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V50" display="TCSVac" schematicId="V50" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_TCSVac(V50)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V50s" display="TCSVac" schematicId="V50s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_TCSVac(V50)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V51" display="HCLSwitch" schematicId="V51" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_HCLSwitch(V51)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V51s" display="HCLSwitch" schematicId="V51s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_HCLSwitch(V51)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V52" display="SiH4Switch" schematicId="V52" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_SiH4Switch(V52)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V52s" display="SiH4Switch" schematicId="V52s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_SiH4Switch(V52)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V53" display="TCSRun" schematicId="V53" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2RunVentFB" doOpen="DO_TCSRun/Vent(V53)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V53s" display="TCSVent" schematicId="V53s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2RunVentFB" doOpen="DO_TCSRun/Vent(V53)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V54" display="HCLRun" schematicId="V54" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_HCLRun/Vent(V54)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V54s" display="HCLVent" schematicId="V54s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_HCLRun/Vent(V54)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V55" display="SiH4Run" schematicId="V55" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeRunFB(V55)" doOpen="DO_SiH4Run(V55)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V56" display="SiH4Vent" schematicId="V56" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeVentFB(V56)" doOpen="DO_SiH4Vent(V56)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V58" display="SO2SourceCarrier" schematicId="V58" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V58s" display="SO2SourceCarrier" schematicId="V58s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V59" display="SO2RunVent" schematicId="V59" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V59s" display="SO2RunVent" schematicId="V59s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V58" display="C2H4Switch" schematicId="V58" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_C2H4Switch(V58)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V58s" display="C2H4Switch" schematicId="V58s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_C2H4Switch(V58)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V59" display="C2H4Run" schematicId="V59" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_C2H4Run(V59)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V59s" display="C2H4Run" schematicId="V59s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_C2H4Run(V59)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V66" display="SHPurgeH2" schematicId="V66" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHPurgeH2FB(V66)" doOpen="DO_SHPurgeH2(V66)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V67" display="SHPurgeN2" schematicId="V67" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHPurgeN2FB(V67)" doOpen="DO_SHPurgeN2(V67)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V68" display="PMPurgeN2" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PMPurgeN2FB(V68)" doOpen="DO_PMPurgeN2(V68)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V69" display="SrcLeakTestPreFilter" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SrcLeakTestPreFilterFB(V69)" doOpen="DO_SrcLeakTestPreFilter(V69)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V66" display="SilaneFinal" schematicId="V66" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHPurgeH2FB(V66)" doOpen="DO_SilaneFinal(V66)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V67" display="PropaneFinal" schematicId="V67" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHPurgeN2FB(V67)" doOpen="DO_PropaneFinal(V67)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V68" display="ChamBodyArPurge" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PMPurgeN2FB(V68)" doOpen="DO_ChamBodyArPurge(V68)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V69" display="ReactorLeakCheck" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ReactorLeakCheckFB(V69)" doOpen="DO_ReactorLeakCheck(V69)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V70" display="TMPressBalance" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMPressBalanceFB(V70)" doOpen="DO_TMPressBalance(V70)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V72" display="GasBoxVentPump" schematicId="V72" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasBoxVentPumpFB(V72)" doOpen="DO_GasBoxVentPump(V72)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V70" display="PMTMBalance" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PMTMBalanceFB(V70)" doOpen="DO_PMTMBalance(V70)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V72" display="VentGasDump" schematicId="V72" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_VentGasDumpFB(V72)" doOpen="DO_VentGasDump(V72)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V73" display="MOVac" schematicId="V73" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MOVacFB(V73)" doOpen="DO_MOVac(V73)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V74" display="GasboxLeakCheck" schematicId="V74" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasboxLeakCheckFB(V74)" doOpen="DO_GasboxLeakCheck(V74)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V75" display="DORVac" schematicId="V75" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DORVacFB(V75)" doOpen="DO_DORVac(V75)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V76" display="DORRefill" schematicId="V76" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_DORRefillFB(V76)" doOpen="DO_DORRefill(V76)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V87" display="SHPurgeFinal" schematicId="V87" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeFinalFB(V87)" doOpen="DO_SHPurgeFinal(V87)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V88" display="OuterGasFinal" schematicId="V88" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_OuterGasFinalFB(V88)" doOpen="DO_OuterGasFinal(V88)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V89" display="InnerGasFinal" schematicId="V89" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_InnerGasFinalFB(V89)" doOpen="DO_InnerGasFinal(V89)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V90" display="MiddleGasFinal" schematicId="V90" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MiddleGasFinalFB(V90)" doOpen="DO_MiddleGasFinal(V90)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V91" display="OpticPurgeFinal" schematicId="V91" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_OpticPurgeFinalFB(V91)" doOpen="DO_OpticPurgeFinal(V91)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V92" display="GasRingPurgeFinal" schematicId="V92" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasRingPurgeFinalFB(V92)" doOpen="DO_GasRingPurgeFinal(V92)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V93" display="ChamberPurgeFinal" schematicId="V93" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ChamberPurgeFinalFB(V93)" doOpen="DO_ChamberPurgeFinal(V93)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V94" display="RotationUpPurgeFinal" schematicId="V94" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_RotationUpPurgeFinalFB(V94)" doOpen="DO_RotationUpPurgeFinal(V94)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V95" display="ConfinementRingFinal" schematicId="V95" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ConfinementRingFinalFB(V95)" doOpen="DO_ConfinementRingFinal(V95)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V96" display="HeaterWFFinal" schematicId="V96" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HeaterWFFinalFB(V96)" doOpen="DO_HeaterWFFinal(V96)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V97" display="CarryGasFinal" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_CarryGasFinal(V97)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V111" display="OpenLidPurge" schematicId="V111" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_OpenLidPurge" diCloseSensor="" diOpenSensor="" />
<IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV2-1FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
<IoValve id="HeatEnable" display="HeatEnable" schematicId="HeatEnable" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PSUEnableFB" doOpen="DO_HeaterEnable" diCloseSensor="" diOpenSensor="" />
<IoValve id="V99" display="C2H4SwitchHTPurge" schematicId="V99" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_C2H4SwitchHTPurge" doOpen="DO_C2H4SwitchHTPurge" diCloseSensor="" diOpenSensor="" />
<IoValve id="V99s" display="C2H4SwitchHTPurge" schematicId="V99s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_C2H4SwitchHTPurge" doOpen="DO_C2H4SwitchHTPurge" diCloseSensor="" diOpenSensor="" />
<IoValve id="V25" display="GasBoxVentBypass" schematicId="V99" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_GasBoxVentBypass(V25)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V100" display="TMASource" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMASourceFB(V100)" doOpen="DO_TMASource(V100)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V103" display="NdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_NdopeDiluteVentFB(V103)" doOpen="DO_NdopeDiluteVent(V103)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V103s" display="NdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_NdopeDiluteVentFB(V103)" doOpen="DO_NdopeDiluteVent(V103)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V105" display="PdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PdopeDiluteVentFB(V105)" doOpen="DO_PdopeDiluteVent(V105)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V105s" display="PdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PdopeDiluteVentFB(V105)" doOpen="DO_PdopeDiluteVent(V105)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V74" display="GasboxLeakTest" schematicId="V74" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasboxLeakTestFB(V74)" doOpen="DO_GasboxLeakTest(V74)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V75" display="DORVacuum" schematicId="V75" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DORVacuumFB(V75)" doOpen="DO_DORVacuum(V75)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V76" display="DORPressureRelief" schematicId="V76" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_DORPressureReliefFB(V76)" doOpen="DO_DORPressureRelief(V76)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V87" display="FinalSHPurge" schematicId="V87" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalSHPurgeFB(V87)" doOpen="DO_FinalSHPurge(V87)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V88" display="FinalOuterGas" schematicId="V88" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOuterGasFB(V88)" doOpen="DO_FinalOuterGas(V88)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V89" display="FinalOuterGas" schematicId="V89" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOuterGasFB(V89)" doOpen="DO_FinalOuterGas(V89)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V90" display="FinalMiddleGas" schematicId="V90" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalMiddleGasFB(V90)" doOpen="DO_FinalMiddleGas(V90)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V91" display="FinalOpticPurge" schematicId="V91" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOpticPurgeFB(V91)" doOpen="DO_FinalOpticPurge(V91)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V92" display="FinalGasRing" schematicId="V92" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalGasRingFB(V92)" doOpen="DO_FinalGasRing(V92)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V93" display="FinalChamberPurge" schematicId="V93" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalChamberPurgeFB(V93)" doOpen="DO_FinalChamberPurge(V93)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V94" display="FinalRotationPurge" schematicId="V94" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalRotationPurgeFB(V94)" doOpen="DO_FinalRotationPurge(V94)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V95" display="FinalShutterPurge" schematicId="V95" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalShutterPurgeFB(V95)" doOpen="DO_FinalShutterPurge(V95)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V96" display="FinalHeaterWFPurge" schematicId="V96" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalHeaterWFPurgeFB(V96)" doOpen="DO_FinalHeaterWFPurge(V96)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V97" display="CarryGasFinal" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DI_FinalCarryGasFB(V97)" diCloseSensor="" diOpenSensor="" />
<IoValve id="EPV1" display="EPV1" schematicId="EPV1" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV1FB" doOpen="DO_EPV1" diCloseSensor="" diOpenSensor="" />
<IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV2FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
</IoValves>
</DeviceModelDefine>

View File

@ -142,7 +142,7 @@
<DI_ITEM Index="208" Name="DI_DORVacuumFB(V75)" BufferOffset="208" Addr="208" Description="" />
<DI_ITEM Index="209" Name="DI_DORPressureReliefFB(V76)" BufferOffset="209" Addr="209" Description="" />
<DI_ITEM Index="210" Name="DI_SideLeakIsolateFB(V25)" BufferOffset="210" Addr="210" Description="" />
<DI_ITEM Index="212" Name="DI_PMLeakTestIsolateFB(V27-1)" BufferOffset="212" Addr="212" Description="" />
<DI_ITEM Index="212" Name="DI_PMLeakTestIsolateFB(V27)" BufferOffset="212" Addr="212" Description="" />
<DI_ITEM Index="214" Name="DI_FinalCarryGasFB(V97)" BufferOffset="214" Addr="214" Description="" />
<DI_ITEM Index="216" Name="DI_PSUEnableFB" BufferOffset="216" Addr="216" Description="" />
<DI_ITEM Index="217" Name="DI_InnerHeaterEnableFB" BufferOffset="217" Addr="217" Description="" />
@ -192,8 +192,8 @@
<DI_ITEM Index="277" Name="DI_FinalRotationPurgeFB(V94)" BufferOffset="277" Addr="277" Description="" />
<DI_ITEM Index="278" Name="DI_FinalShutterPurgeFB(V95)" BufferOffset="278" Addr="278" Description="" />
<DI_ITEM Index="279" Name="DI_FinalHeaterWFPurgeFB(V96)" BufferOffset="279" Addr="279" Description="" />
<DI_ITEM Index="280" Name="DI_EPV11FB" BufferOffset="280" Addr="280" Description="" />
<DI_ITEM Index="282" Name="DI_EPV21FB" BufferOffset="282" Addr="282" Description="" />
<DI_ITEM Index="280" Name="DI_EPV1FB" BufferOffset="280" Addr="280" Description="" />
<DI_ITEM Index="282" Name="DI_EPV2FB" BufferOffset="282" Addr="282" Description="" />
<DI_ITEM Index="288" Name="DI_ServoReady" BufferOffset="288" Addr="288" Description="" />
<DI_ITEM Index="289" Name="DI_AbortProcessRunning" BufferOffset="289" Addr="289" Description="" />
<DI_ITEM Index="296" Name="DI_PSU1Status" BufferOffset="296" Addr="296" Description="" />

View File

@ -192,8 +192,8 @@
<DI_ITEM Index="277" Name="DI_FinalRotationPurge(V94)FB" BufferOffset="277" Addr="277" Description="" />
<DI_ITEM Index="278" Name="DI_FinalShutterPurge(V95)FB" BufferOffset="278" Addr="278" Description="" />
<DI_ITEM Index="279" Name="DI_FinalHeaterWFPurge(V96)FB" BufferOffset="279" Addr="279" Description="" />
<DI_ITEM Index="280" Name="DI_EPV11FB" BufferOffset="280" Addr="280" Description="" />
<DI_ITEM Index="282" Name="DI_EPV21FB" BufferOffset="282" Addr="282" Description="" />
<DI_ITEM Index="280" Name="DI_EPV1FB" BufferOffset="280" Addr="280" Description="" />
<DI_ITEM Index="282" Name="DI_EPV2FB" BufferOffset="282" Addr="282" Description="" />
<DI_ITEM Index="288" Name="DI_ServoReady" BufferOffset="288" Addr="288" Description="" />
<DI_ITEM Index="289" Name="DI_AbortProcessRunning" BufferOffset="289" Addr="289" Description="" />
<DI_ITEM Index="296" Name="DI_PSU1Status" BufferOffset="296" Addr="296" Description="" />

View File

@ -0,0 +1,328 @@
<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="GaN" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<!--给IO数值初始值仿真-->
<IoValveGroup classType="MECF.Framework.Simulator.Core.SimulatorIoDefault" assembly="MECF.Framework.Simulator.Core">
<IoDefaults id="IoDefault" display="" schematicId="" unit="">
<!--测试仿真功能配置用法示例,后期删除 -->
<!--<IODefault type="AI" ioName="AI_ButterflyValveActualPressure" default="330"/>-->
<!--<IODefault type="AO" ioName="AO_M2" default="2000"/>-->
<!--测试仿真功能配置用法示例,后期删除-->
<!--<IODefault type="AI" ioName="AI_ButterflyValveActualPressure" default="1030"/>-->
<!--interlock默认值-->
<!--Interlock默认值-->
<!--Alarm默认值-->
<!--Alarm默认值-->
</IoDefaults>
</IoValveGroup>
<!--给AI或AO在基准值上写入随机数baseValue是基准数值配置-->
<AI_AORandomGroup classType="MECF.Framework.Simulator.Core.SimulatorAI_AORandom" assembly="MECF.Framework.Simulator.Core">
<AI_AORandoms id="AI_AORandom" display="" schematicId="" unit="" >
<!--测试仿真功能配置用法示例,后期删除-->
<!--<Random type="AO" ioName="AO_PressCtrl1" baseValue="30" />-->
<!--测试仿真功能配置用法示例,后期删除-->
<!--水路温度仿真-->
<!--<Random type="AI" ioName="AI_MoSourceFlowTemp" baseValue="21" />
<Random type="AI" ioName="AI_PMPumpFlowTemp" baseValue="22" />
<Random type="AI" ioName="AI_TMpumpFlowTemp" baseValue="23" />
<Random type="AI" ioName="AI_HeatingCoilFlowTemp" baseValue="24" />
<Random type="AI" ioName="AI_HeaterFlowTemp" baseValue="25" />
<Random type="AI" ioName="AI_ChillerFlowTemp" baseValue="26" />
<Random type="AI" ioName="AI_OscillatorFlowTemp" baseValue="27" />
<Random type="AI" ioName="AI_CoilFlangeFlowTemp" baseValue="28" />
<Random type="AI" ioName="AI_Top1FlowTemp" baseValue="29" />
<Random type="AI" ioName="AI_Top2FlowTemp" baseValue="30" />
<Random type="AI" ioName="AI_ReactorRingFlowTemp" baseValue="31" />
<Random type="AI" ioName="AI_BottomFlowTemp" baseValue="32" />
<Random type="AI" ioName="AI_GasInletBottomFlowTemp" baseValue="33" />
<Random type="AI" ioName="AI_TemChillerFlowTemp" baseValue="34" />-->
</AI_AORandoms>
</AI_AORandomGroup>
<!--DO数值实时刷到DIDO设置初始值初始值可以不设置-->
<IoDO_DIGroup classType="MECF.Framework.Simulator.Core.SimulatorIoDO_DI" assembly="MECF.Framework.Simulator.Core">
<IoDO_DIs id="IoDO_DI" display="" schematicId="" unit="">
<!--<DO_DI doDefault="" do="DO_PID01StartRunning" di="DI_PID01RunningState" />-->
</IoDO_DIs>
</IoDO_DIGroup>
<!--AO数值实时刷到AIAO设置初始值初始值可以不设置-->
<IoAO_AIGroup classType="MECF.Framework.Simulator.Core.SimulatorIoAO_AI" assembly="MECF.Framework.Simulator.Core">
<IoAO_AIs id="IoAO_AI" display="" schematicId="" unit="">
</IoAO_AIs>
</IoAO_AIGroup>
<IoValveGroup classType="MECF.Framework.Simulator.Core.SimulatorIoValve" assembly="MECF.Framework.Simulator.Core">
<!--这里是包了一层复制PM配置的气阀时需要注意-->
<IoValves id="IoValves" display="" schematicId="" unit="">
<IoValve id="V18" display="MoCO6CarrierOutlet" schematicId="V18" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_MoCO6CarrierOutlet(V18)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V18s" display="MoCO6CarrierOutlet" schematicId="V18s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18s)" doOpen="DO_MoCO6CarrierOutlet(V18s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V19" display="MoCO6Bypass" schematicId="V19" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6BypassFB(V19)" doOpen="DO_MoCO6Bypass(V19)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V20" display="MoCO6InOutLeakTest" schematicId="V20" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)" doOpen="DO_MoCO6InOutLeakTest(V20)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V20s" display="MoCO6InOutLeakTest" schematicId="V20s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20s)" doOpen="DO_MoCO6InOutLeakTest(V20s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V21" display="MoResrvCarrierOutlet" schematicId="V21" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)" doOpen="DO_MoResrvCarrierOutlet(V21)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V21s" display="MoResrvCarrierOutlet" schematicId="V21s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21s)" doOpen="DO_MoResrvCarrierOutlet(V21s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V22" display="MoResrvBypass" schematicId="V22" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvBypassFB(V22)" doOpen="DO_MoResrvBypass(V22)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V25" display="SideLeakIsolate" schematicId="V25" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_SideLeakIsolateFB(V25)" doOpen="DO_SideLeakIsolate(V25)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V27" display="PMLeakTestIsolate" schematicId="V27" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_PMLeakTestIsolateFB(V27)" doOpen="DO_PMLeakTestIsolate(V27)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V23" display="MoResrvInoutLeakTest" schematicId="V23" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)" doOpen="DO_MoResrvInoutLeakTest(V23)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V23s" display="MoResrvInoutLeakTest" schematicId="V23s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23s)" doOpen="DO_MoResrvInoutLeakTest(V23s)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V31" display="H2InletCutOff" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2InletCutOffFB(V31)" doOpen="DO_H2InletCutOff(V31)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V32" display="N2InletCutOff" schematicId="V32" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_N2InletCutOffFB(V32)" doOpen="DO_N2InletCutOff(V32)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33" display="SHH2ArSupply" schematicId="V33" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33s" display="SHH2ArSupply" schematicId="V33s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V35" display="PushGasSupply" schematicId="V35" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PushGasSupplyFB(V35)" doOpen="DO_PushGasSupply(V35)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V36" display="RunVentGasSupply" schematicId="V36" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_RunVentGasSupplyFB(V36)" doOpen="DO_RunVentGasSupply(V36)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V37" display="O2CarrierSource" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V37s" display="O2CarrierSource" schematicId="V37s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V39" display="MoCO6RunVent" schematicId="V39" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V39s" display="MoCO6RunVent" schematicId="V39s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V40" display="MoResrvRunVent" schematicId="V40" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V40s" display="MoResrvRunVent" schematicId="V40s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V41" display="WCO6Run" schematicId="V41" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6RunFB(V41)" doOpen="DO_WCO6Run(V41)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V42" display="WCO6Vent" schematicId="V42" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6VentFB(V42)" doOpen="DO_WCO6Vent(V42)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V43" display="WCO6Carrier" schematicId="V43" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V43s" display="WCO6Carrier" schematicId="V43s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V45" display="WCO6Bypass" schematicId="V45" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6BypassFB(V45)" doOpen="DO_WCO6Bypass(V45)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V46" display="WCO6InLeakTest" schematicId="V46" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V46s" display="WCO6InLeakTest" schematicId="V46s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V47" display="O2RunVent" schematicId="V47" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V47s" display="O2RunVent" schematicId="V47s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V48" display="CS2Carrier" schematicId="V48" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V48s" display="CS2Carrier" schematicId="V48s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V49" display="CS2Bypass" schematicId="V49" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2BypassFB(V49)" doOpen="DO_CS2Bypass(V49)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V50" display="CS2InOutLeakTest" schematicId="V50" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V50s" display="CS2InOutLeakTest" schematicId="V50s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V51" display="H2SSourceCarrier" schematicId="V51" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V51s" display="H2SSourceCarrier" schematicId="V51s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V52" display="H2SeSourceCarrier" schematicId="V52" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V52s" display="H2SeSourceCarrier" schematicId="V52s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V53" display="CS2RunVent" schematicId="V53" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2RunVentFB" doOpen="DO_CS2RunVent" diCloseSensor="" diOpenSensor="" />
<IoValve id="V53s" display="CS2RunVent" schematicId="V53s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2RunVentFB" doOpen="DO_CS2RunVent" diCloseSensor="" diOpenSensor="" />
<IoValve id="V54" display="H2SRunVent" schematicId="V54" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V54s" display="H2SRunVent" schematicId="V54s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V55" display="H2SeRun" schematicId="V55" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeRunFB(V55)" doOpen="DO_H2SeRun(V55)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V56" display="H2SeVent" schematicId="V56" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeVentFB(V56)" doOpen="DO_H2SeVent(V56)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V58" display="SO2SourceCarrier" schematicId="V58" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V58s" display="SO2SourceCarrier" schematicId="V58s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V59" display="SO2RunVent" schematicId="V59" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V59s" display="SO2RunVent" schematicId="V59s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V66" display="SHPurgeH2" schematicId="V66" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHPurgeH2FB(V66)" doOpen="DO_SHPurgeH2(V66)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V67" display="SHPurgeN2" schematicId="V67" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHPurgeN2FB(V67)" doOpen="DO_SHPurgeN2(V67)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V68" display="PMPurgeN2" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PMPurgeN2FB(V68)" doOpen="DO_PMPurgeN2(V68)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V69" display="SrcLeakTestPreFilter" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SrcLeakTestPreFilterFB(V69)" doOpen="DO_SrcLeakTestPreFilter(V69)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V70" display="PMTMBalance" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PMTMBalanceFB(V70)" doOpen="DO_PMTMBalance(V70)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V72" display="VentGasDump" schematicId="V72" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_VentGasDumpFB(V72)" doOpen="DO_VentGasDump(V72)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V73" display="MOVac" schematicId="V73" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MOVacFB(V73)" doOpen="DO_MOVac(V73)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V74" display="GasboxLeakTest" schematicId="V74" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasboxLeakTestFB(V74)" doOpen="DO_GasboxLeakTest(V74)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V75" display="DORVacuum" schematicId="V75" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DORVacuumFB(V75)" doOpen="DO_DORVacuum(V75)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V76" display="DORPressureRelief" schematicId="V76" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_DORPressureReliefFB(V76)" doOpen="DO_DORPressureRelief(V76)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V87" display="FinalSHPurge" schematicId="V87" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalSHPurgeFB(V87)" doOpen="DO_FinalSHPurge(V87)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V88" display="FinalOuterGas" schematicId="V88" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOuterGasFB(V88)" doOpen="DO_FinalOuterGas(V88)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V89" display="FinalOuterGas" schematicId="V89" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOuterGasFB(V89)" doOpen="DO_FinalOuterGas(V89)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V90" display="FinalMiddleGas" schematicId="V90" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalMiddleGasFB(V90)" doOpen="DO_FinalMiddleGas(V90)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V91" display="FinalOpticPurge" schematicId="V91" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOpticPurgeFB(V91)" doOpen="DO_FinalOpticPurge(V91)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V92" display="FinalGasRing" schematicId="V92" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalGasRingFB(V92)" doOpen="DO_FinalGasRing(V92)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V93" display="FinalChamberPurge" schematicId="V93" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalChamberPurgeFB(V93)" doOpen="DO_FinalChamberPurge(V93)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V94" display="FinalRotationPurge" schematicId="V94" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalRotationPurgeFB(V94)" doOpen="DO_FinalRotationPurge(V94)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V95" display="FinalShutterPurge" schematicId="V95" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalShutterPurgeFB(V95)" doOpen="DO_FinalShutterPurge(V95)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V96" display="FinalHeaterWFPurge" schematicId="V96" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalHeaterWFPurgeFB(V96)" doOpen="DO_FinalHeaterWFPurge(V96)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V97" display="CarryGasFinal" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DI_FinalCarryGasFB(V97)" diCloseSensor="" diOpenSensor="" />
<IoValve id="EPV1" display="EPV1" schematicId="EPV1" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV1FB" doOpen="DO_EPV1" diCloseSensor="" diOpenSensor="" />
<IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV2FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
</IoValves>
</IoValveGroup>
<!--<IoThrottleValves classType="Aitex.Core.RT.Device.Devices.IoThrottleValve2" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoThrottleValve id="TV" display="TV" schematicId="TV" unit="mbar" scBasePath="PM.{module}" modeValuePressure="5" modeValuePosition="2" modeValueClose="3" modeValueOpen="4"
aioType="float" aiStatus="AI_ButterflyValveActualMode" aiPositionFeedback="AI_ButterflyValveActualPosition" aiPressureFeedback="AI_ButterflyValveActualPressure"
aoPressureMode="AO_ButterflyValveSetMode" aoPositionSetPoint="AO_ButterflyValveSetPosition" aoPressureSetPoint="AO_ButterflyValveSetPressure"
doTVValveEnable="DO_ButterflyEnable" doTVReset="DO_ButterflyReset" diTVValveEnable="" />
</IoThrottleValves>-->
<IoMfcGroup classType="MECF.Framework.Simulator.Core.SimulatorMFC" assembly="MECF.Framework.Simulator.Core">
<!--这里是包了一层复制PM配置的MFC时需要注意-->
<!--<IoMFCs id="IoMFCs" display="" schematicId="" unit="">
<IoMfc id="Mfc1" display="Mfc1" schematicId="Mfc1" unit="sccm" aiActMode="AI_M1ActMode" aoSetMode="AO_M1CtrlMode" aiFlow="AI_M1" aoFlow="AO_M1" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC01CommunicationAlarm" AlarmText="Alarm101 MFC01 CommunicationAlarm[DI-351]" />
<IoMfc id="Mfc2" display="Mfc2" schematicId="Mfc2" unit="sccm" aiActMode="AI_M2ActMode" aoSetMode="AO_M2CtrlMode" aiFlow="AI_M2" aoFlow="AO_M2" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC02CommunicationAlarm" AlarmText="Alarm102 MFC02 CommunicationAlarm[DI-352]" />
<IoMfc id="Mfc3" display="Mfc3" schematicId="Mfc3" unit="sccm" aiActMode="AI_M3ActMode" aoSetMode="AO_M3CtrlMode" aiFlow="AI_M3" aoFlow="AO_M3" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC03CommunicationAlarm" AlarmText="Alarm103 MFC03 CommunicationAlarm[DI-353]" />
<IoMfc id="Mfc4" display="Mfc4" schematicId="Mfc4" unit="sccm" aiActMode="AI_M4ActMode" aoSetMode="AO_M4CtrlMode" aiFlow="AI_M4" aoFlow="AO_M4" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC04CommunicationAlarm" AlarmText="Alarm104 MFC04 CommunicationAlarm[DI-354]" />
<IoMfc id="Mfc5" display="Mfc5" schematicId="Mfc5" unit="sccm" aiActMode="AI_M5ActMode" aoSetMode="AO_M5CtrlMode" aiFlow="AI_M5" aoFlow="AO_M5" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC05CommunicationAlarm" AlarmText="Alarm105 MFC05 CommunicationAlarm[DI-355]" />
<IoMfc id="Mfc6" display="Mfc6" schematicId="Mfc6" unit="sccm" aiActMode="AI_M6ActMode" aoSetMode="AO_M6CtrlMode" aiFlow="AI_M6" aoFlow="AO_M6" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC06CommunicationAlarm" AlarmText="Alarm106 MFC06 CommunicationAlarm[DI-356]" />
<IoMfc id="Mfc7" display="Mfc7" schematicId="Mfc7" unit="sccm" aiActMode="AI_M7ActMode" aoSetMode="AO_M7CtrlMode" aiFlow="AI_M7" aoFlow="AO_M7" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC07CommunicationAlarm" AlarmText="Alarm107 MFC07 CommunicationAlarm[DI-357]" />
<IoMfc id="Mfc8" display="Mfc8" schematicId="Mfc8" unit="sccm" aiActMode="AI_M8ActMode" aoSetMode="AO_M8CtrlMode" aiFlow="AI_M8" aoFlow="AO_M8" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC08CommunicationAlarm" AlarmText="Alarm108 MFC08 CommunicationAlarm[DI-358]" />
<IoMfc id="Mfc9" display="Mfc9" schematicId="Mfc9" unit="sccm" aiActMode="AI_M9ActMode" aoSetMode="AO_M9CtrlMode" aiFlow="AI_M9" aoFlow="AO_M9" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC09CommunicationAlarm" AlarmText="Alarm109 MFC09 CommunicationAlarm[DI-359]" />
<IoMfc id="Mfc10" display="Mfc10" schematicId="Mfc10" unit="sccm" aiActMode="AI_M10ActMode" aoSetMode="AO_M10CtrlMode" aiFlow="AI_M10" aoFlow="AO_M10" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC10CommunicationAlarm" AlarmText="Alarm110 MFC10 CommunicationAlarm[DI-360]" />
<IoMfc id="Mfc11" display="Mfc11" schematicId="Mfc11" unit="sccm" aiActMode="AI_M11ActMode" aoSetMode="AO_M11CtrlMode" aiFlow="AI_M11" aoFlow="AO_M11" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC11CommunicationAlarm" AlarmText="Alarm111 MFC11 CommunicationAlarm[DI-361]" />
<IoMfc id="Mfc12" display="Mfc12" schematicId="Mfc12" unit="sccm" aiActMode="AI_M12ActMode" aoSetMode="AO_M12CtrlMode" aiFlow="AI_M12" aoFlow="AO_M12" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC12CommunicationAlarm" AlarmText="Alarm112 MFC12 CommunicationAlarm[DI-362]" />
<IoMfc id="Mfc13" display="Mfc13" schematicId="Mfc13" unit="sccm" aiActMode="AI_M13ActMode" aoSetMode="AO_M13CtrlMode" aiFlow="AI_M13" aoFlow="AO_M13" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC13CommunicationAlarm" AlarmText="Alarm113 MFC13 CommunicationAlarm[DI-363]" />
<IoMfc id="Mfc14" display="Mfc14" schematicId="Mfc14" unit="sccm" aiActMode="AI_M14ActMode" aoSetMode="AO_M14CtrlMode" aiFlow="AI_M14" aoFlow="AO_M14" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC14CommunicationAlarm" AlarmText="Alarm114 MFC14 CommunicationAlarm[DI-364]" />
<IoMfc id="Mfc15" display="Mfc15" schematicId="Mfc15" unit="sccm" aiActMode="AI_M15ActMode" aoSetMode="AO_M15CtrlMode" aiFlow="AI_M15" aoFlow="AO_M15" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC15CommunicationAlarm" AlarmText="Alarm115 MFC15 CommunicationAlarm[DI-365]" />
<IoMfc id="Mfc16" display="Mfc16" schematicId="Mfc16" unit="sccm" aiActMode="AI_M16ActMode" aoSetMode="AO_M16CtrlMode" aiFlow="AI_M16" aoFlow="AO_M16" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC16CommunicationAlarm" AlarmText="Alarm116 MFC16 CommunicationAlarm[DI-366]" />
<IoMfc id="Mfc17" display="Mfc17" schematicId="Mfc17" unit="sccm" aiActMode="AI_M17ActMode" aoSetMode="AO_M17CtrlMode" aiFlow="AI_M17" aoFlow="AO_M17" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC17CommunicationAlarm" AlarmText="Alarm117 MFC17 CommunicationAlarm[DI-367]" />
<IoMfc id="Mfc18" display="Mfc18" schematicId="Mfc18" unit="sccm" aiActMode="AI_M18ActMode" aoSetMode="AO_M18CtrlMode" aiFlow="AI_M18" aoFlow="AO_M18" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC18CommunicationAlarm" AlarmText="Alarm118 MFC18 CommunicationAlarm[DI-369]" />
<IoMfc id="Mfc19" display="Mfc19" schematicId="Mfc19" unit="sccm" aiActMode="AI_M19ActMode" aoSetMode="AO_M19CtrlMode" aiFlow="AI_M19" aoFlow="AO_M19" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC19CommunicationAlarm" AlarmText="Alarm119 MFC19 CommunicationAlarm[DI-369]" />
<IoMfc id="Mfc20" display="Mfc20" schematicId="Mfc20" unit="sccm" aiActMode="AI_M20ActMode" aoSetMode="AO_M20CtrlMode" aiFlow="AI_M20" aoFlow="AO_M20" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC20CommunicationAlarm" AlarmText="Alarm120 MFC20 CommunicationAlarm[DI-370]" />
<IoMfc id="Mfc21" display="Mfc21" schematicId="Mfc21" unit="sccm" aiActMode="AI_M21ActMode" aoSetMode="AO_M21CtrlMode" aiFlow="AI_M21" aoFlow="AO_M21" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC21CommunicationAlarm" AlarmText="Alarm121 MFC21 CommunicationAlarm[DI-372]" />
<IoMfc id="Mfc22" display="Mfc22" schematicId="Mfc22" unit="sccm" aiActMode="AI_M22ActMode" aoSetMode="AO_M22CtrlMode" aiFlow="AI_M22" aoFlow="AO_M22" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC22CommunicationAlarm" AlarmText="Alarm122 MFC22 CommunicationAlarm[DI-372]" />
<IoMfc id="Mfc25" display="Mfc25" schematicId="Mfc25" unit="sccm" aiActMode="AI_M25ActMode" aoSetMode="AO_M25CtrlMode" aiFlow="AI_M25" aoFlow="AO_M25" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC25CommunicationAlarm" AlarmText="Alarm125 MFC25 CommunicationAlarm[DI-375]" />
<IoMfc id="Mfc26" display="Mfc26" schematicId="Mfc26" unit="sccm" aiActMode="AI_M26ActMode" aoSetMode="AO_M26CtrlMode" aiFlow="AI_M26" aoFlow="AO_M26" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC26CommunicationAlarm" AlarmText="Alarm126 MFC26 CommunicationAlarm[DI-376]" />
<IoMfc id="Mfc27" display="Mfc27" schematicId="Mfc27" unit="sccm" aiActMode="AI_M27ActMode" aoSetMode="AO_M27CtrlMode" aiFlow="AI_M27" aoFlow="AO_M27" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC27CommunicationAlarm" AlarmText="Alarm127 MFC27 CommunicationAlarm[DI-377]" />
<IoMfc id="Mfc31" display="Mfc31" schematicId="Mfc31" unit="sccm" aiActMode="AI_M31ActMode" aoSetMode="AO_M31CtrlMode" aiFlow="AI_M31" aoFlow="AO_M31" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC31CommunicationAlarm" AlarmText="Alarm131 MFC31 CommunicationAlarm[DI-381]" />
<IoMfc id="Mfc32" display="Mfc32" schematicId="Mfc32" unit="sccm" aiActMode="AI_M32ActMode" aoSetMode="AO_M32CtrlMode" aiFlow="AI_M32" aoFlow="AO_M32" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC32CommunicationAlarm" AlarmText="Alarm132 MFC32 CommunicationAlarm[DI-382]" />
<IoMfc id="Mfc33" display="Mfc33" schematicId="Mfc33" unit="sccm" aiActMode="AI_M33ActMode" aoSetMode="AO_M33CtrlMode" aiFlow="AI_M33" aoFlow="AO_M33" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC33CommunicationAlarm" AlarmText="Alarm133 MFC33 CommunicationAlarm[DI-383]" />
<IoMfc id="Mfc34" display="Mfc34" schematicId="Mfc34" unit="sccm" aiActMode="AI_M34ActMode" aoSetMode="AO_M34CtrlMode" aiFlow="AI_M34" aoFlow="AO_M34" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC34CommunicationAlarm" AlarmText="Alarm134 MFC34 CommunicationAlarm[DI-383]" />
<IoMfc id="Mfc35" display="Mfc35" schematicId="Mfc35" unit="sccm" aiActMode="AI_M35ActMode" aoSetMode="AO_M35CtrlMode" aiFlow="AI_M35" aoFlow="AO_M35" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC35CommunicationAlarm" AlarmText="Alarm135 MFC35 CommunicationAlarm[DI-385]" />
<IoMfc id="Mfc36" display="Mfc36" schematicId="Mfc36" unit="sccm" aiActMode="AI_M36ActMode" aoSetMode="AO_M36CtrlMode" aiFlow="AI_M36" aoFlow="AO_M36" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC36CommunicationAlarm" AlarmText="Alarm136 MFC36 CommunicationAlarm[DI-386]" />
<IoMfc id="Mfc37" display="Mfc37" schematicId="Mfc37" unit="sccm" aiActMode="AI_M37ActMode" aoSetMode="AO_M37CtrlMode" aiFlow="AI_M37" aoFlow="AO_M37" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC37CommunicationAlarm" AlarmText="Alarm137 MFC37 CommunicationAlarm[DI-387]" />
<IoMfc id="Mfc38" display="Mfc38" schematicId="Mfc38" unit="sccm" aiActMode="AI_M38ActMode" aoSetMode="AO_M38CtrlMode" aiFlow="AI_M38" aoFlow="AO_M38" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC38CommunicationAlarm" AlarmText="Alarm138 MFC38 CommunicationAlarm[DI-388]" />
<IoMfc id="Mfc39" display="Mfc39" schematicId="Mfc39" unit="sccm" aiActMode="AI_M39ActMode" aoSetMode="AO_M39CtrlMode" aiFlow="AI_M39" aoFlow="AO_M39" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC39CommunicationAlarm" AlarmText="Alarm139 MFC39 CommunicationAlarm[DI-388]" />
<IoMfc id="Mfc40" display="Mfc40" schematicId="Mfc40" unit="sccm" aiActMode="AI_M40ActMode" aoSetMode="AO_M40CtrlMode" aiFlow="AI_M40" aoFlow="AO_M40" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC40CommunicationAlarm" AlarmText="Alarm140 MFC40 CommunicationAlarm[DI-390]" />
<IoMfc id="Mfc41" display="Mfc41" schematicId="Mfc41" unit="sccm" aiActMode="AI_M41ActMode" aoSetMode="AO_M41CtrlMode" aiFlow="AI_M41" aoFlow="AO_M41" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC41CommunicationAlarm" AlarmText="Alarm141 MFC41 CommunicationAlarm[DI-391]" />
<IoMfc id="Mfc42" display="Mfc42" schematicId="Mfc42" unit="sccm" aiActMode="AI_M42ActMode" aoSetMode="AO_M42CtrlMode" aiFlow="AI_M42" aoFlow="AO_M42" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC42CommunicationAlarm" AlarmText="Alarm142 MFC42 CommunicationAlarm[DI-392]" />
<IoMfc id="Mfc43" display="Mfc43" schematicId="Mfc43" unit="sccm" aiActMode="AI_M43ActMode" aoSetMode="AO_M43CtrlMode" aiFlow="AI_M43" aoFlow="AO_M43" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC43CommunicationAlarm" AlarmText="Alarm143 MFC43 CommunicationAlarm[DI-393]" />
<IoMfc id="Mfc44" display="Mfc44" schematicId="Mfc44" unit="sccm" aiActMode="AI_M44ActMode" aoSetMode="AO_M44CtrlMode" aiFlow="AI_M44" aoFlow="AO_M44" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC44CommunicationAlarm" AlarmText="Alarm144 MFC44 CommunicationAlarm[DI-394]" />
<IoMfc id="Mfc45" display="Mfc45" schematicId="Mfc45" unit="sccm" aiActMode="AI_M45ActMode" aoSetMode="AO_M45CtrlMode" aiFlow="AI_M45" aoFlow="AO_M45" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC45CommunicationAlarm" AlarmText="Alarm145 MFC45 CommunicationAlarm[DI-395]" />
<IoMfc id="Mfc50" display="Mfc50" schematicId="Mfc50" unit="sccm" aiActMode="AI_M50ActMode" aoSetMode="AO_M50CtrlMode" aiFlow="AI_M50" aoFlow="AO_M50" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC50CommunicationAlarm" AlarmText="Alarm150 MFC50 CommunicationAlarm[DI-360]" />
<IoMfc id="Mfc51" display="Mfc51" schematicId="Mfc51" unit="sccm" aiActMode="AI_M51ActMode" aoSetMode="AO_M51CtrlMode" aiFlow="AI_M51" aoFlow="AO_M51" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC51CommunicationAlarm" AlarmText="Alarm151 MFC51 CommunicationAlarm[DI-361]" />
<IoMfc id="Mfc52" display="Mfc52" schematicId="Mfc52" unit="sccm" aiActMode="AI_M52ActMode" aoSetMode="AO_M52CtrlMode" aiFlow="AI_M52" aoFlow="AO_M52" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC52CommunicationAlarm" AlarmText="Alarm152 MFC52 CommunicationAlarm[DI-362]" />
<IoMfc id="Mfc53" display="Mfc53" schematicId="Mfc53" unit="sccm" aiActMode="AI_M53ActMode" aoSetMode="AO_M53CtrlMode" aiFlow="AI_M53" aoFlow="AO_M53" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC53CommunicationAlarm" AlarmText="Alarm153 MFC53 CommunicationAlarm[DI-363]" />
<IoMfc id="Mfc54" display="Mfc54" schematicId="Mfc54" unit="sccm" aiActMode="AI_M54ActMode" aoSetMode="AO_M54CtrlMode" aiFlow="AI_M54" aoFlow="AO_M54" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC54CommunicationAlarm" AlarmText="Alarm154 MFC54 CommunicationAlarm[DI-364]" />
<IoMfc id="Mfc55" display="Mfc55" schematicId="Mfc55" unit="sccm" aiActMode="AI_M55ActMode" aoSetMode="AO_M55CtrlMode" aiFlow="AI_M55" aoFlow="AO_M55" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC55CommunicationAlarm" AlarmText="Alarm155 MFC55 CommunicationAlarm[DI-365]" />
<IoMfc id="Mfc56" display="Mfc56" schematicId="Mfc56" unit="sccm" aiActMode="AI_M56ActMode" aoSetMode="AO_M56CtrlMode" aiFlow="AI_M56" aoFlow="AO_M56" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC56CommunicationAlarm" AlarmText="Alarm156 MFC56 CommunicationAlarm[DI-366]" />
<IoMfc id="Mfc57" display="Mfc57" schematicId="Mfc57" unit="sccm" aiActMode="AI_M57ActMode" aoSetMode="AO_M57CtrlMode" aiFlow="AI_M57" aoFlow="AO_M57" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC57CommunicationAlarm" AlarmText="Alarm157 MFC57 CommunicationAlarm[DI-367]" />
<IoMfc id="Mfc58" display="Mfc58" schematicId="Mfc58" unit="sccm" aiActMode="AI_M58ActMode" aoSetMode="AO_M58CtrlMode" aiFlow="AI_M58" aoFlow="AO_M58" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC58CommunicationAlarm" AlarmText="Alarm158 MFC58 CommunicationAlarm[DI-369]" />
<IoMfc id="Mfc59" display="Mfc59" schematicId="Mfc59" unit="sccm" aiActMode="AI_M59ActMode" aoSetMode="AO_M59CtrlMode" aiFlow="AI_M59" aoFlow="AO_M59" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC59CommunicationAlarm" AlarmText="Alarm159 MFC59 CommunicationAlarm[DI-369]" />
<IoMfc id="Mfc60" display="Mfc60" schematicId="Mfc60" unit="sccm" aiActMode="AI_M60ActMode" aoSetMode="AO_M60CtrlMode" aiFlow="AI_M60" aoFlow="AO_M60" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC10CommunicationAlarm" AlarmText="Alarm160 MFC60 CommunicationAlarm[DI-360]" />
<IoMfc id="Mfc61" display="Mfc61" schematicId="Mfc61" unit="sccm" aiActMode="AI_M61ActMode" aoSetMode="AO_M61CtrlMode" aiFlow="AI_M61" aoFlow="AO_M61" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC11CommunicationAlarm" AlarmText="Alarm161 MFC61 CommunicationAlarm[DI-361]" />
<IoMfc id="Mfc62" display="Mfc62" schematicId="Mfc62" unit="sccm" aiActMode="AI_M62ActMode" aoSetMode="AO_M62CtrlMode" aiFlow="AI_M62" aoFlow="AO_M62" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC12CommunicationAlarm" AlarmText="Alarm162 MFC62 CommunicationAlarm[DI-362]" />
<IoMfc id="Mfc63" display="Mfc63" schematicId="Mfc63" unit="sccm" aiActMode="AI_M63ActMode" aoSetMode="AO_M63CtrlMode" aiFlow="AI_M63" aoFlow="AO_M63" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC13CommunicationAlarm" AlarmText="Alarm163 MFC63 CommunicationAlarm[DI-363]" />
<IoMfc id="Mfc64" display="Mfc64" schematicId="Mfc64" unit="sccm" aiActMode="AI_M64ActMode" aoSetMode="AO_M64CtrlMode" aiFlow="AI_M64" aoFlow="AO_M64" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC14CommunicationAlarm" AlarmText="Alarm164 MFC64 CommunicationAlarm[DI-364]" />
<IoMfc id="Mfc65" display="Mfc65" schematicId="Mfc65" unit="sccm" aiActMode="AI_M65ActMode" aoSetMode="AO_M65CtrlMode" aiFlow="AI_M65" aoFlow="AO_M65" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC15CommunicationAlarm" AlarmText="Alarm165 MFC65 CommunicationAlarm[DI-365]" />
<IoMfc id="Mfc66" display="Mfc66" schematicId="Mfc66" unit="sccm" aiActMode="AI_M66ActMode" aoSetMode="AO_M66CtrlMode" aiFlow="AI_M66" aoFlow="AO_M66" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC16CommunicationAlarm" AlarmText="Alarm166 MFC66 CommunicationAlarm[DI-366]" />
<IoMfc id="Mfc67" display="Mfc67" schematicId="Mfc67" unit="sccm" aiActMode="AI_M67ActMode" aoSetMode="AO_M67CtrlMode" aiFlow="AI_M67" aoFlow="AO_M67" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC17CommunicationAlarm" AlarmText="Alarm167 MFC67 CommunicationAlarm[DI-367]" />
<IoMfc id="Mfc68" display="Mfc68" schematicId="Mfc68" unit="sccm" aiActMode="AI_M68ActMode" aoSetMode="AO_M68CtrlMode" aiFlow="AI_M68" aoFlow="AO_M68" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC18CommunicationAlarm" AlarmText="Alarm168 MFC68 CommunicationAlarm[DI-369]" />
<IoMfc id="Mfc70" display="Mfc70" schematicId="Mfc70" unit="sccm" aiActMode="AI_M70ActMode" aoSetMode="AO_M70CtrlMode" aiFlow="AI_M70" aoFlow="AO_M70" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC70CommunicationAlarm" AlarmText="Alarm170 MFC70 CommunicationAlarm[DI-360]" />
<IoMfc id="Mfc71" display="Mfc71" schematicId="Mfc71" unit="sccm" aiActMode="AI_M71ActMode" aoSetMode="AO_M71CtrlMode" aiFlow="AI_M71" aoFlow="AO_M71" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC71CommunicationAlarm" AlarmText="Alarm171 MFC71 CommunicationAlarm[DI-361]" />
<IoMfc id="Mfc72" display="Mfc72" schematicId="Mfc72" unit="sccm" aiActMode="AI_M72ActMode" aoSetMode="AO_M72CtrlMode" aiFlow="AI_M72" aoFlow="AO_M72" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC72CommunicationAlarm" AlarmText="Alarm172 MFC72 CommunicationAlarm[DI-362]" />
<IoMfc id="Mfc73" display="Mfc73" schematicId="Mfc73" unit="sccm" aiActMode="AI_M73ActMode" aoSetMode="AO_M73CtrlMode" aiFlow="AI_M73" aoFlow="AO_M73" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC73CommunicationAlarm" AlarmText="Alarm173 MFC73 CommunicationAlarm[DI-363]" />
<IoMfc id="Mfc74" display="Mfc74" schematicId="Mfc74" unit="sccm" aiActMode="AI_M74ActMode" aoSetMode="AO_M74CtrlMode" aiFlow="AI_M74" aoFlow="AO_M74" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC74CommunicationAlarm" AlarmText="Alarm174 MFC74 CommunicationAlarm[DI-364]" />
<IoMfc id="Mfc75" display="Mfc75" schematicId="Mfc75" unit="sccm" aiActMode="AI_M75ActMode" aoSetMode="AO_M75CtrlMode" aiFlow="AI_M75" aoFlow="AO_M75" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC75CommunicationAlarm" AlarmText="Alarm175 MFC75 CommunicationAlarm[DI-365]" />
<IoMfc id="Mfc76" display="Mfc76" schematicId="Mfc76" unit="sccm" aiActMode="AI_M76ActMode" aoSetMode="AO_M76CtrlMode" aiFlow="AI_M76" aoFlow="AO_M76" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC76CommunicationAlarm" AlarmText="Alarm176 MFC76 CommunicationAlarm[DI-366]" />
<IoMfc id="Mfc77" display="Mfc77" schematicId="Mfc77" unit="sccm" aiActMode="AI_M77ActMode" aoSetMode="AO_M77CtrlMode" aiFlow="AI_M77" aoFlow="AO_M77" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC77CommunicationAlarm" AlarmText="Alarm177 MFC77 CommunicationAlarm[DI-367]" />
<IoMfc id="Mfc78" display="Mfc78" schematicId="Mfc78" unit="sccm" aiActMode="AI_M78ActMode" aoSetMode="AO_M78CtrlMode" aiFlow="AI_M78" aoFlow="AO_M78" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC78CommunicationAlarm" AlarmText="Alarm178 MFC78 CommunicationAlarm[DI-369]" />
<IoMfc id="Mfc79" display="Mfc79" schematicId="Mfc79" unit="sccm" aiActMode="AI_M79ActMode" aoSetMode="AO_M79CtrlMode" aiFlow="AI_M79" aoFlow="AO_M79" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC79CommunicationAlarm" AlarmText="Alarm179 MFC79 CommunicationAlarm[DI-369]" />
<IoMfc id="Mfc80" display="Mfc80" schematicId="Mfc80" unit="sccm" aiActMode="AI_M80ActMode" aoSetMode="AO_M80CtrlMode" aiFlow="AI_M80" aoFlow="AO_M80" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC80CommunicationAlarm" AlarmText="Alarm180 MFC80 CommunicationAlarm[DI-360]" />
<IoMfc id="Mfc81" display="Mfc81" schematicId="Mfc81" unit="sccm" aiActMode="AI_M81ActMode" aoSetMode="AO_M81CtrlMode" aiFlow="AI_M81" aoFlow="AO_M81" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC81CommunicationAlarm" AlarmText="Alarm181 MFC81 CommunicationAlarm[DI-361]" />
<IoMfc id="Mfc82" display="Mfc82" schematicId="Mfc82" unit="sccm" aiActMode="AI_M82ActMode" aoSetMode="AO_M82CtrlMode" aiFlow="AI_M82" aoFlow="AO_M82" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC82CommunicationAlarm" AlarmText="Alarm182 MFC82 CommunicationAlarm[DI-362]" />
<IoMfc id="Mfc83" display="Mfc83" schematicId="Mfc83" unit="sccm" aiActMode="AI_M83ActMode" aoSetMode="AO_M83CtrlMode" aiFlow="AI_M83" aoFlow="AO_M83" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC83CommunicationAlarm" AlarmText="Alarm183 MFC83 CommunicationAlarm[DI-363]" />
<IoMfc id="Mfc84" display="Mfc84" schematicId="Mfc84" unit="sccm" aiActMode="AI_M84ActMode" aoSetMode="AO_M84CtrlMode" aiFlow="AI_M84" aoFlow="AO_M84" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC84CommunicationAlarm" AlarmText="Alarm184 MFC84 CommunicationAlarm[DI-364]" />
<IoMfc id="Mfc85" display="Mfc85" schematicId="Mfc85" unit="sccm" aiActMode="AI_M85ActMode" aoSetMode="AO_M85CtrlMode" aiFlow="AI_M85" aoFlow="AO_M85" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC85CommunicationAlarm" AlarmText="Alarm185 MFC85 CommunicationAlarm[DI-365]" />
<IoMfc id="Mfc86" display="Mfc86" schematicId="Mfc86" unit="sccm" aiActMode="AI_M86ActMode" aoSetMode="AO_M86CtrlMode" aiFlow="AI_M86" aoFlow="AO_M86" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC86CommunicationAlarm" AlarmText="Alarm186 MFC86 CommunicationAlarm[DI-366]" />
<IoMfc id="Mfc87" display="Mfc87" schematicId="Mfc87" unit="sccm" aiActMode="AI_M87ActMode" aoSetMode="AO_M87CtrlMode" aiFlow="AI_M87" aoFlow="AO_M87" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC87CommunicationAlarm" AlarmText="Alarm187 MFC87 CommunicationAlarm[DI-367]" />
<IoMfc id="Mfc88" display="Mfc88" schematicId="Mfc88" unit="sccm" aiActMode="AI_M88ActMode" aoSetMode="AO_M88CtrlMode" aiFlow="AI_M88" aoFlow="AO_M88" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC88CommunicationAlarm" AlarmText="Alarm188 MFC88 CommunicationAlarm[DI-369]" />
<IoMfc id="Mfc89" display="Mfc89" schematicId="Mfc89" unit="sccm" aiActMode="AI_M89ActMode" aoSetMode="AO_M89CtrlMode" aiFlow="AI_M89" aoFlow="AO_M89" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC89CommunicationAlarm" AlarmText="Alarm189 MFC89 CommunicationAlarm[DI-369]" />
</IoMFCs>-->
</IoMfcGroup>
<IoPressureMeterGroup classType="MECF.Framework.Simulator.Core.SimulatorPressure" assembly="MECF.Framework.Simulator.Core">
<!--这里是包了一层复制PM配置的PC时需要注意-->
<!--<IoPressureMeters id="IoPressures" display="" schematicId="" unit="">
<IoPressureMeter id="PC1" display="PC1" schematicId="PC1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC1Valve" aiActMode="AI_PC1ActMode" aoSetMode="AO_PC1CtrlMode" aiValue="AI_PressCtrl1" aoValue="AO_PressCtrl1" formatString="0.0" diAlarm="DI_PC1CommunicationAlarm" AlarmText="Alarm141 PC1 Offline[DI-391]" />
<IoPressureMeter id="PC2" display="PC2" schematicId="PC2" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC2Valve" aiActMode="AI_PC2ActMode" aoSetMode="AO_PC2CtrlMode" aiValue="AI_PressCtrl2" aoValue="AO_PressCtrl2" formatString="0.0" diAlarm="DI_PC2CommunicationAlarm" AlarmText="Alarm142 PC2 Offline[DI-392]" />
<IoPressureMeter id="PC3" display="PC3" schematicId="PC3" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC3Valve" aiActMode="AI_PC3ActMode" aoSetMode="AO_PC3CtrlMode" aiValue="AI_PressCtrl3" aoValue="AO_PressCtrl3" formatString="0.0" diAlarm="DI_PC3CommunicationAlarm" AlarmText="Alarm143 PC3 Offline[DI-393]" />
<IoPressureMeter id="PC4" display="PC4" schematicId="PC4" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC4Valve" aiActMode="AI_PC4ActMode" aoSetMode="AO_PC4CtrlMode" aiValue="AI_PressCtrl4" aoValue="AO_PressCtrl4" formatString="0.0" diAlarm="DI_PC4CommunicationAlarm" AlarmText="Alarm144 PC4 Offline[DI-394]" />
<IoPressureMeter id="PC5" display="PC5" schematicId="PC5" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC5Valve" aiActMode="AI_PC5ActMode" aoSetMode="AO_PC5CtrlMode" aiValue="AI_PressCtrl5" aoValue="AO_PressCtrl5" formatString="0.0" diAlarm="DI_PC5CommunicationAlarm" AlarmText="Alarm145 PC5 Offline[DI-395]" />
<IoPressureMeter id="PC6" display="PC6" schematicId="PC6" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC6Valve" aiActMode="AI_PC6ActMode" aoSetMode="AO_PC6CtrlMode" aiValue="AI_PressCtrl6" aoValue="AO_PressCtrl6" formatString="0.0" diAlarm="DI_PC6CommunicationAlarm" AlarmText="Alarm146 PC6 Offline[DI-396]" />
<IoPressureMeter id="PC7" display="PC7" schematicId="PC7" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC7Valve" aiActMode="AI_PC7ActMode" aoSetMode="AO_PC7CtrlMode" aiValue="AI_PressCtrl7" aoValue="AO_PressCtrl7" formatString="0.0" diAlarm="DI_PC7CommunicationAlarm" AlarmText="Alarm147 PC7 Offline[DI-397]" />
<IoPressureMeter id="PC8" display="PC8" schematicId="PC8" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC8Valve" aiActMode="AI_PC8ActMode" aoSetMode="AO_PC8CtrlMode" aiValue="AI_PressCtrl8" aoValue="AO_PressCtrl8" formatString="0.0" diAlarm="DI_PC8CommunicationAlarm" AlarmText="Alarm141 PC8 Offline[DI-391]" />
<IoPressureMeter id="PC9" display="PC9" schematicId="PC9" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC9Valve" aiActMode="AI_PC9ActMode" aoSetMode="AO_PC9CtrlMode" aiValue="AI_PressCtrl9" aoValue="AO_PressCtrl9" formatString="0.0" diAlarm="DI_PC9CommunicationAlarm" AlarmText="Alarm142 PC9 Offline[DI-392]" />
<IoPressureMeter id="PC10" display="PC10" schematicId="PC10" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC10Valve" aiActMode="AI_PC10ActMode" aoSetMode="AO_PC10CtrlMode" aiValue="AI_PressCtrl10" aoValue="AO_PressCtrl10" formatString="0.0" diAlarm="DI_PC10CommunicationAlarm" AlarmText="Alarm143 PC10 Offline[DI-393]" />
<IoPressureMeter id="PC11" display="PC11" schematicId="PC11" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC11Valve" aiActMode="AI_PC11ActMode" aoSetMode="AO_PC11CtrlMode" aiValue="AI_PressCtrl11" aoValue="AO_PressCtrl11" formatString="0.0" diAlarm="DI_PC11CommunicationAlarm" AlarmText="Alarm144 PC11 Offline[DI-394]" />
<IoPressureMeter id="PC12" display="PC12" schematicId="PC12" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC12Valve" aiActMode="AI_PC12ActMode" aoSetMode="AO_PC12CtrlMode" aiValue="AI_PressCtrl12" aoValue="AO_PressCtrl12" formatString="0.0" diAlarm="DI_PC12CommunicationAlarm" AlarmText="Alarm145 PC12 Offline[DI-395]" />
<IoPressureMeter id="PC13" display="PC13" schematicId="PC13" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC13Valve" aiActMode="AI_PC13ActMode" aoSetMode="AO_PC13CtrlMode" aiValue="AI_PressCtrl13" aoValue="AO_PressCtrl13" formatString="0.0" diAlarm="DI_PC13CommunicationAlarm" AlarmText="Alarm146 PC13 Offline[DI-396]" />
<IoPressureMeter id="PC14" display="PC14" schematicId="PC14" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC14Valve" aiActMode="AI_PC14ActMode" aoSetMode="AO_PC14CtrlMode" aiValue="AI_PressCtrl14" aoValue="AO_PressCtrl14" formatString="0.0" diAlarm="DI_PC14CommunicationAlarm" AlarmText="Alarm147 PC14 Offline[DI-397]" />
<IoPressureMeter id="PC15" display="PC15" schematicId="PC15" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC15Valve" aiActMode="AI_PC15ActMode" aoSetMode="AO_PC15CtrlMode" aiValue="AI_PressCtrl15" aoValue="AO_PressCtrl15" formatString="0.0" diAlarm="DI_PC15CommunicationAlarm" AlarmText="Alarm141 PC15 Offline[DI-391]" />
<IoPressureMeter id="PC16" display="PC16" schematicId="PC16" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC16Valve" aiActMode="AI_PC16ActMode" aoSetMode="AO_PC16CtrlMode" aiValue="AI_PressCtrl16" aoValue="AO_PressCtrl16" formatString="0.0" diAlarm="DI_PC16CommunicationAlarm" AlarmText="Alarm142 PC16 Offline[DI-392]" />
<IoPressureMeter id="PC17" display="PC17" schematicId="PC17" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC17Valve" aiActMode="AI_PC17ActMode" aoSetMode="AO_PC17CtrlMode" aiValue="AI_PressCtrl17" aoValue="AO_PressCtrl17" formatString="0.0" diAlarm="DI_PC17CommunicationAlarm" AlarmText="Alarm143 PC17 Offline[DI-393]" />
<IoPressureMeter id="PC18" display="PC18" schematicId="PC18" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC18Valve" aiActMode="AI_PC18ActMode" aoSetMode="AO_PC18CtrlMode" aiValue="AI_PressCtrl18" aoValue="AO_PressCtrl18" formatString="0.0" diAlarm="DI_PC18CommunicationAlarm" AlarmText="Alarm144 PC18 Offline[DI-394]" />
<IoPressureMeter id="PC19" display="PC19" schematicId="PC19" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC19Valve" aiActMode="AI_PC19ActMode" aoSetMode="AO_PC19CtrlMode" aiValue="AI_PressCtrl19" aoValue="AO_PressCtrl19" formatString="0.0" diAlarm="DI_PC19CommunicationAlarm" AlarmText="Alarm145 PC19 Offline[DI-395]" />
<IoPressureMeter id="PC20" display="PC20" schematicId="PC20" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC20Valve" aiActMode="AI_PC20ActMode" aoSetMode="AO_PC20CtrlMode" aiValue="AI_PressCtrl20" aoValue="AO_PressCtrl20" formatString="0.0" diAlarm="DI_PC20CommunicationAlarm" AlarmText="Alarm146 PC20 Offline[DI-396]" />
<IoPressureMeter id="PT1" display="PT1" schematicId="PT1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_PMChamberPressure" aoValue="" formatString="0.0" />
<IoPressureMeter id="PT2" display="PT2" schematicId="PT2" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_ColdtrapExitPressure" aoValue="" formatString="0.0" />
<IoPressureMeter id="PT3" display="PT3" schematicId="PT3" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_FilterExitPressure" aoValue="" formatString="0.0" />
<IoPressureMeter id="PT5" display="PT5" schematicId="PT5" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_MoVacPressure" aoValue="" formatString="0.0" />
<IoPressureMeter id="PT6" display="PT6" schematicId="PT6" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_Mo1RunPressure" aoValue="" formatString="0.0" />
<IoPressureMeter id="PT7" display="PT7" schematicId="PT7" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_Mo1VentPressure" aoValue="" formatString="0.0" />
<IoPressureMeter id="PT8" display="PT8" schematicId="PT8" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_Mo2RunPressure" aoValue="" formatString="0.0" />
<IoPressureMeter id="PT9" display="PT9" schematicId="PT9" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_Mo2VentPressure" aoValue="" formatString="0.0" />
</IoPressureMeters>-->
</IoPressureMeterGroup>
<!--<DoSensors classType="Aitex.Core.RT.Device.Devices.DoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
</DoSensors>-->
<!--<SicMultipleServos classType="Aitex.Core.RT.Device.Devices.SicMultipleServo" assembly="MECF.Framework.RT.EquipmentLibrary">
<SicMultipleServo id="PMServo" module="" display="PMServo" schematicId="PMServo" unit="" aioType="float"
aiActualSpeed="AI_SpindleActualSpeed" aiActualCurrent="AI_ActualCurrent" aiAccSpeed="AI_ActualspeedACC" aiDecSpeed="AI_ActualspeedDEC" aiServoCurrentPosition="AI_SpindleCurrentPosition"
aoAccSpeedSetPoint="AO_SpindleAcc" aoDecSpeedSetPoint="AO_SpindleDec" aoSpindleJogSpeed="AO_SpindleJogSpeed"
aoSpindleSpeedSet="AO_SpindleSpeedSet" aoSpindleLoadAngle="AO_SpindleLoadAngle" aoSpindleUnloadAngle="AO_SpindleUnloadAngle"
diServoReady="DI_SpindleHome" diServoEnable="DI_SpindleEnable" diServoHome="DI_SpindleHome" diServoPositionComplete="DI_SpindlePositionComplete" diServoError="DI_ServoDriverFaultSW" diSpindleMoveComplete="DI_SpindleMoveComplete"
diSpindleJogAcc="DI_SpindleJogAcc" diSpindleJogDec="DI_SpindleJogDec"
doSpindleJogAcc="DO_SpindleJogAcc" doSpindleJogDec="DO_SpindleJogDec" doSpindleJogHighLowSpeed="DO_SpindleJogHighLowSpeed"
doServoEnable="DO_SpindleEnable" doServoInital="DO_SpindleHome" doServoReset="DO_SpindleRest" doSpindleLoadAngleRun="DO_SpindleLoadAngleRun" doSpindleUnloadAngleRun="DO_SpindleUnloadAngleRun" doSpindleSpeedRun="DO_SpindleSpeedRun"/>
</SicMultipleServos>-->
<!--<IoSignalTowers classType="MECF.Framework.RT.EquipmentLibrary.Devices.IoSignalTower" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSignalTower id="SignalTower" module="PM1" display="SignalTower" schematicId="PMSignalTower" eventFile="STEvents.xml"
doGreen="DO_TowerGreen" doYellow="DO_TowerYellow" doRed="DO_TowerRed" doBuzzer="DO_Buzzer"
aoBuzzerBlinkFreq="AO_BuzzerBlinkFreqHz"/>
</IoSignalTowers>-->
</DeviceModelDefine>

View File

@ -0,0 +1,57 @@
<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="GaN" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<IoValveGroup classType="MECF.Framework.Simulator.Core.SimulatorIoDefault" assembly="MECF.Framework.Simulator.Core">
<IoDefaults id="IoDefault" display="" schematicId="" unit="">
<!--<IODefault type="DI" ioName="DI_VCEATMRobotEnableExtend" default="true"/>
<IODefault type="DI" ioName="DI_VCEBTMRobotEnableExtend" default="true"/>
<IODefault type="AI" ioName="AI_TMChamberPressure" default="1024"/>
<IODefault type="AI" ioName="AI_LoadVCEAChamberPressure" default="1024"/>-->
</IoDefaults>
</IoValveGroup>
<AI_AORandomGroup classType="MECF.Framework.Simulator.Core.SimulatorAI_AORandom" assembly="MECF.Framework.Simulator.Core">
<AI_AORandoms id="AI_AORandom" display="" schematicId="" unit="" >
<!--<Random type="AI" ioName="AI_TMChamberPressure" baseValue="1024" />-->
</AI_AORandoms>
</AI_AORandomGroup>
<IoDO_DIGroup classType="MECF.Framework.Simulator.Core.SimulatorIoDO_DI" assembly="MECF.Framework.Simulator.Core">
<IoDO_DIs id="IoDO_DI" display="" schematicId="" unit="">
<!--<DO_DI doDefault="false" do="DO_PMASlitValveOpen" di="DI_PMASlitValveOpen" />-->
</IoDO_DIs>
</IoDO_DIGroup>
<IoValveGroup classType="MECF.Framework.Simulator.Core.SimulatorIoValve" assembly="MECF.Framework.Simulator.Core">
<IoValves id="IoValves" display="" schematicId="" unit="">
<IoValve id="BalanceValve" module="PM1" display="V96_1" schematicId="BalanceValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMPMABanlanceFB" doOpen="DO_TMPMABanlance"/>
<IoValve id="BalanceValve" module="PM2" display="V96_2" schematicId="BalanceValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMPMBBanlanceFB" doOpen="DO_TMPMBBanlance"/>
<IoValve id="FastPumpValve" module="TM" display="V101" schematicId="FastPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMFastPumpValveFB" doOpen="DO_TMFastPumpValve"/>
<IoValve id="SlowPumpValve" module="TM" display="V102" schematicId="SlowPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMSlowPumpValveFB" doOpen="DO_TMSlowPumpValve"/>
<IoValve id="VentValve" module="TM" display="V107" schematicId="VentValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMVentValveFB" doOpen="DO_TMVentValve"/>
<IoValve id="FastPumpValve" module="LoadVCEA" display="V103" schematicId="FastPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEAFastPumpValveFB" doOpen="DO_LoadVCEAFastPumpValve"/>
<IoValve id="SlowPumpValve" module="LoadVCEA" display="V104" schematicId="SlowPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEASlowPumpValveFB" doOpen="DO_LoadVCEASlowPumpValve"/>
<IoValve id="VentValve" module="LoadVCEA" display="V108" schematicId="VentValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEAVentValveFB" doOpen="DO_LoadVCEAVentValve"/>
<IoValve id="BalanceValve" module="LoadVCEA" display="V109" schematicId="BalanceValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEABalanceValveFB" doOpen="DO_LoadVCEABalanceValve"/>
<IoValve id="FastPumpValve" module="LoadVCEB" display="V105" schematicId="FastPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEBFastPumpValveFB" doOpen="DO_LoadVCEBFastPumpValve"/>
<IoValve id="SlowPumpValve" module="LoadVCEB" display="V106" schematicId="SlowPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEBSlowPumpValveFB" doOpen="DO_LoadVCEBSlowPumpValve"/>
<IoValve id="VentValve" module="LoadVCEB" display="V111" schematicId="VentValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEBVentValveFB" doOpen="DO_LoadVCEBVentValve"/>
<IoValve id="BalanceValve" module="LoadVCEB" display="V112" schematicId="BalanceValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEBBalanceValveFB" doOpen="DO_LoadVCEBBalanceValve"/>
</IoValves>
</IoValveGroup>
<IoMfcGroup classType="MECF.Framework.Simulator.Core.SimulatorMFC" assembly="MECF.Framework.Simulator.Core">
<IoMFCs id="IoMFCs" display="" schematicId="" unit="">
<IoMfc id="Mfc96" module="TM" display="Mfc96" schematicId="Mfc96" unit="sccm" aiActMode="AI_M96ActMode" aoSetMode="AO_M96CtrlMode" aiFlow="AI_M96" aoFlow="AO_M96" scBasePath="TM.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC096CommunicationAlarm" AlarmText="Alarm106 MFC06 CommunicationAlarm[DI-356]" />
</IoMFCs>
</IoMfcGroup>
</DeviceModelDefine>

View File

@ -142,7 +142,7 @@
<DI_ITEM Index="208" Name="DI_DORVacuumFB(V75)" BufferOffset="208" Addr="208" Description="" />
<DI_ITEM Index="209" Name="DI_DORPressureReliefFB(V76)" BufferOffset="209" Addr="209" Description="" />
<DI_ITEM Index="210" Name="DI_SideLeakIsolateFB(V25)" BufferOffset="210" Addr="210" Description="" />
<DI_ITEM Index="212" Name="DI_PMLeakTestIsolateFB(V27-1)" BufferOffset="212" Addr="212" Description="" />
<DI_ITEM Index="212" Name="DI_PMLeakTestIsolateFB(V27)" BufferOffset="212" Addr="212" Description="" />
<DI_ITEM Index="214" Name="DI_FinalCarryGasFB(V97)" BufferOffset="214" Addr="214" Description="" />
<DI_ITEM Index="216" Name="DI_PSUEnableFB" BufferOffset="216" Addr="216" Description="" />
<DI_ITEM Index="217" Name="DI_InnerHeaterEnableFB" BufferOffset="217" Addr="217" Description="" />
@ -192,8 +192,8 @@
<DI_ITEM Index="277" Name="DI_FinalRotationPurgeFB(V94)" BufferOffset="277" Addr="277" Description="" />
<DI_ITEM Index="278" Name="DI_FinalShutterPurgeFB(V95)" BufferOffset="278" Addr="278" Description="" />
<DI_ITEM Index="279" Name="DI_FinalHeaterWFPurgeFB(V96)" BufferOffset="279" Addr="279" Description="" />
<DI_ITEM Index="280" Name="DI_EPV11FB" BufferOffset="280" Addr="280" Description="" />
<DI_ITEM Index="282" Name="DI_EPV21FB" BufferOffset="282" Addr="282" Description="" />
<DI_ITEM Index="280" Name="DI_EPV1FB" BufferOffset="280" Addr="280" Description="" />
<DI_ITEM Index="282" Name="DI_EPV2FB" BufferOffset="282" Addr="282" Description="" />
<DI_ITEM Index="288" Name="DI_ServoReady" BufferOffset="288" Addr="288" Description="" />
<DI_ITEM Index="289" Name="DI_AbortProcessRunning" BufferOffset="289" Addr="289" Description="" />
<DI_ITEM Index="296" Name="DI_PSU1Status" BufferOffset="296" Addr="296" Description="" />

View File

@ -28,15 +28,15 @@ namespace SicSimulator.Instances
public void Initialize()
{
SetDefaultValue("PM1");
SetDefaultValue("PM2");
SetTMDefaultValue("TM");
//SetDefaultValue("PM1");
//SetDefaultValue("PM2");
//SetTMDefaultValue("TM");
//Singleton<DataManager>.Instance.Initialize(false);
WcfServiceManager.Instance.Initialize(new Type[] { typeof(SimulatorAdsPlcService) });
//Singleton<SimulatorDeviceManager>.Instance.Initialize(PathManager.GetCfgDir() + "DevicePM.xml", "GaN", ModuleName.PM1, "PM1");
Singleton<SimulatorDeviceManager>.Instance.Initialize(PathManager.GetCfgDir() + "DevicePM.xml", "GaN", ModuleName.PM1, "PM1");
//Singleton<SimulatorDeviceManager>.Instance.Initialize(PathManager.GetCfgDir() + "DevicePM.xml", "GaN", ModuleName.PM2, "PM2");
//Singleton<SimulatorDeviceManager>.Instance.Initialize(PathManager.GetCfgDir() + "DeviceTM.xml", "GaN", ModuleName.TM, "TM");

View File

@ -174,5 +174,13 @@
<Name>SimulatorCore</Name>
</ProjectReference>
</ItemGroup>
<ItemGroup>
<None Include="Config\DevicePM.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
<None Include="Config\DeviceTM.xml">
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
</None>
</ItemGroup>
<Import Project="$(MSBuildToolsPath)\Microsoft.CSharp.targets" />
</Project>

View File

@ -90,23 +90,9 @@ namespace SicUI.Models.PMs
#region MFC
public double V90CountMFC => Mfc31Data.FeedBack + (V63.IsOpen ? Mfc25Data.FeedBack : 0) + (V62.IsOpen ? Mfc22Data.FeedBack : 0) + (V61.IsOpen ? Mfc19Data.FeedBack : 0);
public double V89CountMFC => Mfc29Data.FeedBack + (V63.IsOpen ? Mfc26Data.FeedBack : 0) + (V62.IsOpen ? Mfc23Data.FeedBack : 0) + (V61.IsOpen ? Mfc20Data.FeedBack : 0);
public double V88CountMFC => Mfc28Data.FeedBack + (V63.IsOpen ? Mfc15Data.FeedBack : 0) + (V62.IsOpen ? Mfc9Data.FeedBack : 0) + (V61.IsOpen ? Mfc2Data.FeedBack : 0);
//PT4Data.OpenDegree > 0
public double ACountMFC => (V25.IsOpen || V72.IsOpen) ?
Mfc1Data.FeedBack +
(!V39.IsOpen ? Mfc6Data.FeedBack : 0) +
(!V40.IsOpen ? Mfc5Data.FeedBack : 0) +
(!V41.IsOpen && V42.IsOpen && (V43s.IsOpen || V45.IsOpen) && TMAEnable ? Mfc7Data.FeedBack : 0) +
(!V41.IsOpen && V42.IsOpen && TMAEnable ? Mfc8Data.FeedBack : 0) +
(!V53.IsOpen ? (Mfc12Data.FeedBack + (V49.IsOpen || V48s.IsOpen ? Mfc10Data.FeedBack + Mfc11Data.FeedBack : 0)) : 0) +
(!V54.IsOpen ? Mfc13Data.FeedBack : 0) +
(V56.IsOpen && !V55.IsOpen ? Mfc14Data.FeedBack : 0) +
(V60.IsOpen && !V59.IsOpen ? Mfc16Data.FeedBack : 0)
: 0;
//PT4Data.OpenDegree >
public double BCountMFC => (V25.IsOpen || V72.IsOpen) ? Mfc3Data.FeedBack + Mfc4Data.FeedBack - Mfc6Data.FeedBack : 0;//PT1Data.OpenDegree > 0 ? Mfc3Data.FeedBack + Mfc4Data.FeedBack - Mfc6Data.FeedBack : 0;
@ -295,12 +281,35 @@ namespace SicUI.Models.PMs
#region Valve
[Subscription("V18.DeviceData")]
public AITValveData V18 { get; set; }
[Subscription("V18s.DeviceData")]
public AITValveData V18s { get; set; }
[Subscription("V19.DeviceData")]
public AITValveData V19 { get; set; }
[Subscription("V19s.DeviceData")]
public AITValveData V19s { get; set; }
[Subscription("V20.DeviceData")]
public AITValveData V20 { get; set; }
[Subscription("V20s.DeviceData")]
public AITValveData V20s { get; set; }
[Subscription("V21.DeviceData")]
public AITValveData V21 { get; set; }
[Subscription("V21s.DeviceData")]
public AITValveData V21s { get; set; }
[Subscription("V22.DeviceData")]
public AITValveData V22 { get; set; }
[Subscription("V23.DeviceData")]
public AITValveData V23 { get; set; }
[Subscription("V23s.DeviceData")]
public AITValveData V23s { get; set; }
[Subscription("V25.DeviceData")]
public AITValveData V25 { get; set; }
@ -308,9 +317,6 @@ namespace SicUI.Models.PMs
[Subscription("V27.DeviceData")]
public AITValveData V27 { get; set; }
[Subscription("V30.DeviceData")]
public AITValveData V30 { get; set; }
[Subscription("V31.DeviceData")]
public AITValveData V31 { get; set; }
@ -335,9 +341,6 @@ namespace SicUI.Models.PMs
[Subscription("V37s.DeviceData")]
public AITValveData V37s { get; set; }
[Subscription("V38.DeviceData")]
public AITValveData V38 { get; set; }
[Subscription("V39.DeviceData")]
public AITValveData V39 { get; set; }
@ -350,14 +353,9 @@ namespace SicUI.Models.PMs
[Subscription("V40s.DeviceData")]
public AITValveData V40s { get; set; }
[Subscription("V41.DeviceData")]
public AITValveData V41 { get; set; }
[Subscription("V41s.DeviceData")]
public AITValveData V41s { get; set; }
[Subscription("V42.DeviceData")]
public AITValveData V42 { get; set; }
@ -367,11 +365,9 @@ namespace SicUI.Models.PMs
[Subscription("V43s.DeviceData")]
public AITValveData V43s { get; set; }
[Subscription("V45.DeviceData")]
public AITValveData V45 { get; set; }
[Subscription("V46.DeviceData")]
public AITValveData V46 { get; set; }
@ -390,7 +386,6 @@ namespace SicUI.Models.PMs
[Subscription("V48s.DeviceData")]
public AITValveData V48s { get; set; }
[Subscription("V49.DeviceData")]
public AITValveData V49 { get; set; }
@ -406,7 +401,6 @@ namespace SicUI.Models.PMs
[Subscription("V51s.DeviceData")]
public AITValveData V51s { get; set; }
[Subscription("V52.DeviceData")]
public AITValveData V52 { get; set; }
@ -431,37 +425,23 @@ namespace SicUI.Models.PMs
[Subscription("V56.DeviceData")]
public AITValveData V56 { get; set; }
[Subscription("V57.DeviceData")]
public AITValveData V57 { get; set; }
[Subscription("V58.DeviceData")]
public AITValveData V58 { get; set; }
[Subscription("V58s.DeviceData")]
public AITValveData V58s { get; set; }
[Subscription("V59.DeviceData")]
public AITValveData V59 { get; set; }
[Subscription("V60.DeviceData")]
public AITValveData V60 { get; set; }
[Subscription("V59s.DeviceData")]
public AITValveData V59s { get; set; }
[Subscription("V61.DeviceData")]
public AITValveData V61 { get; set; }
[Subscription("V66.DeviceData")]
public AITValveData V66 { get; set; }
[Subscription("V62.DeviceData")]
public AITValveData V62 { get; set; }
[Subscription("V63.DeviceData")]
public AITValveData V63 { get; set; }
[Subscription("V64.DeviceData")]
public AITValveData V64 { get; set; }
[Subscription("V65.DeviceData")]
public AITValveData V65 { get; set; }
[Subscription("V67.DeviceData")]
public AITValveData V67 { get; set; }
[Subscription("V68.DeviceData")]
public AITValveData V68 { get; set; }
@ -520,36 +500,11 @@ namespace SicUI.Models.PMs
[Subscription("V97.DeviceData")]
public AITValveData V97 { get; set; }
[Subscription("V111.DeviceData")]
public AITValveData V111 { get; set; }
[Subscription("V99.DeviceData")]
public AITValveData V99 { get; set; }
[Subscription("V99s.DeviceData")]
public AITValveData V99s { get; set; }
[Subscription("V100.DeviceData")]
public AITValveData V100 { get; set; }
[Subscription("V103.DeviceData")]
public AITValveData V103 { get; set; }
[Subscription("V103s.DeviceData")]
public AITValveData V103s { get; set; }
[Subscription("V105.DeviceData")]
public AITValveData V105 { get; set; }
[Subscription("V105s.DeviceData")]
public AITValveData V105s { get; set; }
[Subscription("EPV1.DeviceData")]
public AITValveData EPV1 { get; set; }
[Subscription("EPV2.DeviceData")]
public AITValveData EPV2 { get; set; }
#endregion
#region Temp
@ -1097,406 +1052,7 @@ namespace SicUI.Models.PMs
{
get { return IsOnline; }
}
#region MoveSpeed
private const double movespeed = 0;
public double V31MoveSpeed
{
get
{
if (V31.Feedback) return movespeed;
else return 0;
}
}
public double V32MoveSpeed
{
get
{
if (V32.Feedback) return movespeed;
else return 0;
}
}
public double V33MoveSpeed
{
get
{
if (V33.Feedback) return movespeed;
else return 0;
}
}
public double V33sMoveSpeed
{
get
{
if (V33s.Feedback) return movespeed;
else return 0;
}
}
public double V35MoveSpeed
{
get
{
if (V35.Feedback) return movespeed;
else return 0;
}
}
public double V36MoveSpeed
{
get
{
if (V36.Feedback) return movespeed;
else return 0;
}
}
public double V37sMoveSpeed
{
get
{
if (V37s.Feedback) return movespeed;
else return 0;
}
}
public double V37MoveSpeed
{
get
{
if (V37.Feedback) return movespeed;
else return 0;
}
}
public double V43MoveSpeed
{
get
{
if (V43.Feedback) return movespeed;
else return 0;
}
}
public double V45MoveSpeed
{
get
{
if (V45.Feedback) return movespeed;
else return 0;
}
}
public double V46MoveSpeed
{
get
{
if (V46.Feedback) return movespeed;
else return 0;
}
}
public double V46sMoveSpeed
{
get
{
if (V46s.Feedback) return movespeed;
else return 0;
}
}
public double V46_46sMoveSpeed
{
get
{
if (V46.Feedback || V46s.Feedback) return movespeed;
else return 0;
}
}
public double V43sMoveSpeed
{
get
{
if (V43s.Feedback) return movespeed;
else return 0;
}
}
public double V48MoveSpeed
{
get
{
if (V48.Feedback) return movespeed;
else return 0;
}
}
public double V50MoveSpeed
{
get
{
if (V50.Feedback) return movespeed;
else return 0;
}
}
public double V50sMoveSpeed
{
get
{
if (V50s.Feedback) return movespeed;
else return 0;
}
}
public double V50_50sMoveSpeed
{
get
{
if (V50.Feedback || V50s.Feedback) return movespeed;
else return 0;
}
}
public double V49MoveSpeed
{
get
{
if (V49.Feedback) return movespeed;
else return 0;
}
}
public double V48sMoveSpeed
{
get
{
if (V48s.Feedback) return movespeed;
else return 0;
}
}
public double V51MoveSpeed
{
get
{
if (V51.Feedback) return movespeed;
else return 0;
}
}
public double V51sMoveSpeed
{
get
{
if (V51s.Feedback) return movespeed;
else return 0;
}
}
public double V51_51sMoveSpeed
{
get
{
if (V51.Feedback || V51s.Feedback) return movespeed;
else return 0;
}
}
public double V52MoveSpeed
{
get
{
if (V52.Feedback) return movespeed;
else return 0;
}
}
public double V52sMoveSpeed
{
get
{
if (V52s.Feedback) return movespeed;
else return 0;
}
}
public double V52_52sMoveSpeed
{
get
{
if (V52.Feedback || V52s.Feedback) return movespeed;
else return 0;
}
}
public double V58MoveSpeed
{
get
{
if (V58.Feedback) return movespeed;
else return 0;
}
}
public double V58sMoveSpeed
{
get
{
if (V58s.Feedback) return movespeed;
else return 0;
}
}
public double V58_58sMoveSpeed
{
get
{
if (V58.Feedback || V58s.Feedback) return movespeed;
else return 0;
}
}
public double V53sMoveSpeed
{
get
{
if (V53s.Feedback) return movespeed;
else return 0;
}
}
public double V54sMoveSpeed
{
get
{
if (V54s.Feedback) return movespeed;
else return 0;
}
}
public double V56MoveSpeed
{
get
{
if (V56.Feedback) return movespeed;
else return 0;
}
}
public double V60MoveSpeed
{
get
{
if (V60.Feedback) return movespeed;
else return 0;
}
}
public double V59MoveSpeed
{
get
{
if (V59.Feedback) return movespeed;
else return 0;
}
}
public double V53MoveSpeed
{
get
{
if (V53.Feedback) return movespeed;
else return 0;
}
}
public double V54MoveSpeed
{
get
{
if (V54.Feedback) return movespeed;
else return 0;
}
}
public double V55MoveSpeed
{
get
{
if (V55.Feedback) return movespeed;
else return 0;
}
}
public double V61MoveSpeed
{
get
{
if (V61.Feedback) return movespeed;
else return 0;
}
}
public double V62MoveSpeed
{
get
{
if (V62.Feedback) return movespeed;
else return 0;
}
}
public double V63MoveSpeed
{
get
{
if (V63.Feedback) return movespeed;
else return 0;
}
}
public double V62_63MoveSpeed
{
get
{
if (V62.Feedback || V63.Feedback) return movespeed;
else return 0;
}
}
public double V68MoveSpeed
{
get
{
if (V68.Feedback) return movespeed;
else return 0;
}
}
public double V69MoveSpeed
{
get
{
if (V69.Feedback) return movespeed;
else return 0;
}
}
public double V70MoveSpeed
{
get
{
if (V70.Feedback) return movespeed;
else return 0;
}
}
public double V72MoveSpeed
{
get
{
if (V72.Feedback) return movespeed;
else return 0;
}
}
public double V73MoveSpeed
{
get
{
if (V73.Feedback) return movespeed;
else return 0;
}
}
public double V74MoveSpeed
{
get
{
if (V74.Feedback) return movespeed;
else return 0;
}
}
public double V75MoveSpeed
{
get
{
if (V75.Feedback) return movespeed;
else return 0;
}
}
public double V76MoveSpeed
{
get
{
if (V76.Feedback) return movespeed;
else return 0;
}
}
#endregion
[IgnorePropertyChange]
public string TVModeSetPoint