Sic-Software/MoS2
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1修改Recipe模板问题

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2修改流量计算器问题
This commit is contained in:
hanqiangqiang 2026-08-26 09:57:18 +08:00
parent 7c5ce8117e
commit 6c349f492d
2 changed files with 12 additions and 12 deletions
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8
App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
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@ -88,7 +88,7 @@
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="24. Mo(CO)6 Carrier Flow(M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="100" Description="M16Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="24. Mo(CO)6 Carrier Flow(M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="100" Description="M9Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. Mo(CO)6 Push Flow(M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="1000" Description="M10Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. Mo(CO)6 Pressure(PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="3000" Description="PC8"/>
</Group>
@ -110,8 +110,8 @@
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. W(CO)6 Carrier Flow(M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="100" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. W(CO)6 Push Flow(M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. W(CO)6 Carrier Flow(M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="100" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. W(CO)6 Push Flow(M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. W(CO)6 Pressure(PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="3000" Description="PC2"/>
</Group>
@ -201,7 +201,7 @@
<Group DisplayName="SH Flow->SH Push Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="1000000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="1000000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="1000000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. SH Middle Flow" UnitName="sccm" ControlName="SHMiddleFlow" InputMode="" Min="0" Max="1000000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="1000000" DIsColumnEditable="false" escription=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="15000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="20000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>

16
Framework/MECF.Framework.UI.Client/RecipeEditorLib/RecipeModel/RecipeGasFlowCalculators/RecipeGasFlowCalculatorBase.cs
View File

@ -181,14 +181,14 @@ namespace MECF.Framework.UI.Client.RecipeEditorLib.RecipeModel
((DoubleParam)currentStep.FindParamByControlName(NameOuterPushFlow)).Value = Math.Round(currentOutterSuppFlow, 1);
}
public const string NameMoCO6FlowMode = "MoCO6Flow";
public const string NameMoFlowMode = "MoFlow";
public const string NameWCO6FlowMode = "WCO6Flow";
public const string NameCS2FlowMode = "CS2Flow";
public const string NameH2SFlowMode = "H2SFlow";
public const string NameH2SEFlowMode = "H2SEFlow";
public const string NameO2FlowMode = "O2Flow";
public const string NameSO2FlowMode = "SO2Flow";
public const string NameMoCO6FlowMode = "MoCO6Flow.SetValve";
public const string NameMoFlowMode = "MoFlow.SetValve";
public const string NameWCO6FlowMode = "WCO6Flow.SetValve";
public const string NameCS2FlowMode = "CS2Flow.SetValve";
public const string NameH2SFlowMode = "H2SFlow.SetValve";
public const string NameH2SEFlowMode = "H2SEFlow.SetValve";
public const string NameO2FlowMode = "O2Flow.SetValve";
public const string NameSO2FlowMode = "SO2Flow.SetValve";
public const string NameMoCO6CarrierFlow = "Mfc9.Ramp";
public const string NameMoCO6PushFlow = "Mfc10.Ramp";