From 6c349f492d9656b2d12593b15fd242caec04fa7e Mon Sep 17 00:00:00 2001
From: hanqiangqiang <1364346467@qq.com>
Date: Wed, 26 Aug 2026 09:57:18 +0800
Subject: [PATCH] =?UTF-8?q?1=E4=BF=AE=E6=94=B9Recipe=E6=A8=A1=E6=9D=BF?=
 =?UTF-8?q?=E9=97=AE=E9=A2=98=202=E4=BF=AE=E6=94=B9=E6=B5=81=E9=87=8F?=
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---
 .../SicModules/Config/Recipe/Sic/Process/PN2.xml |  8 ++++----
 .../RecipeGasFlowCalculatorBase.cs               | 16 ++++++++--------
 2 files changed, 12 insertions(+), 12 deletions(-)

diff --git a/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml b/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
index c965ee8..7a5f112 100644
--- a/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
+++ b/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
@@ -88,7 +88,7 @@
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="24. Mo(CO)6 Carrier Flow(M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="100" Description="M16Flow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="24. Mo(CO)6 Carrier Flow(M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="100" Description="M9Flow"/>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="25. Mo(CO)6 Push Flow(M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="1000" Description="M10Flow"/>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="26. Mo(CO)6 Pressure(PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="3000" Description="PC8"/>
       </Group>
@@ -110,8 +110,8 @@
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="32. W(CO)6 Carrier Flow(M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="100" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="33. W(CO)6 Push Flow(M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="32. W(CO)6 Carrier Flow(M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="100" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="33. W(CO)6 Push Flow(M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="34. W(CO)6 Pressure(PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="3000" Description="PC2"/>
       </Group>
 
@@ -201,7 +201,7 @@
       <Group DisplayName="SH Flow->SH Push Flow">
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="68. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="1000000" IsColumnEditable="false" Description=""/>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="69. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="1000000" IsColumnEditable="false" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="70. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="1000000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="70. SH Middle Flow" UnitName="sccm" ControlName="SHMiddleFlow" InputMode="" Min="0" Max="1000000" IsColumnEditable="false" Description=""/>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="71. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="1000000" DIsColumnEditable="false" escription=""/>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="72. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="15000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="73. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="20000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
diff --git a/Framework/MECF.Framework.UI.Client/RecipeEditorLib/RecipeModel/RecipeGasFlowCalculators/RecipeGasFlowCalculatorBase.cs b/Framework/MECF.Framework.UI.Client/RecipeEditorLib/RecipeModel/RecipeGasFlowCalculators/RecipeGasFlowCalculatorBase.cs
index cc4d533..9eed939 100644
--- a/Framework/MECF.Framework.UI.Client/RecipeEditorLib/RecipeModel/RecipeGasFlowCalculators/RecipeGasFlowCalculatorBase.cs
+++ b/Framework/MECF.Framework.UI.Client/RecipeEditorLib/RecipeModel/RecipeGasFlowCalculators/RecipeGasFlowCalculatorBase.cs
@@ -181,14 +181,14 @@ namespace MECF.Framework.UI.Client.RecipeEditorLib.RecipeModel
             ((DoubleParam)currentStep.FindParamByControlName(NameOuterPushFlow)).Value = Math.Round(currentOutterSuppFlow, 1);
         }
 
-        public const string NameMoCO6FlowMode = "MoCO6Flow";
-        public const string NameMoFlowMode = "MoFlow";
-        public const string NameWCO6FlowMode = "WCO6Flow";
-        public const string NameCS2FlowMode = "CS2Flow";
-        public const string NameH2SFlowMode = "H2SFlow";
-        public const string NameH2SEFlowMode = "H2SEFlow";
-        public const string NameO2FlowMode = "O2Flow";
-        public const string NameSO2FlowMode = "SO2Flow";
+        public const string NameMoCO6FlowMode = "MoCO6Flow.SetValve";
+        public const string NameMoFlowMode = "MoFlow.SetValve";
+        public const string NameWCO6FlowMode = "WCO6Flow.SetValve";
+        public const string NameCS2FlowMode = "CS2Flow.SetValve";
+        public const string NameH2SFlowMode = "H2SFlow.SetValve";
+        public const string NameH2SEFlowMode = "H2SEFlow.SetValve";
+        public const string NameO2FlowMode = "O2Flow.SetValve";
+        public const string NameSO2FlowMode = "SO2Flow.SetValve";
 
         public const string NameMoCO6CarrierFlow = "Mfc9.Ramp";
         public const string NameMoCO6PushFlow = "Mfc10.Ramp";