PMPostTransferRoutine增加隔热罩上升
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@ -204,7 +204,13 @@ namespace SicModules.PMs.Routines
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EnableRotation((int)RoutineStep.EnableRotation, 5);
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EnableRotation((int)RoutineStep.EnableRotation, 5);
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SetRotationValveAndNoWait((int)RoutineStep.SetRotation1, _rotationSpeed);
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SetRotationValveAndNoWait((int)RoutineStep.SetRotation1, _rotationSpeed);
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//9、加热使能(PSU 和 SCR)(可配置)
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//9、延时
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TimeDelay((int)RoutineStep.TimeDelay1, _servoUpDelay);
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//10、隔热罩上升
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SetConfinementRingUpAndWait((int)RoutineStep.SetServoUp, 30);
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//11、加热使能(PSU 和 SCR)(可配置)
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if (_psuHeatEnable && _needEnableHeat)
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if (_psuHeatEnable && _needEnableHeat)
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{
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{
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SetPSUEnable((int)RoutineStep.EnableTC1, true, 5);
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SetPSUEnable((int)RoutineStep.EnableTC1, true, 5);
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