From c6bcd06b617df6942b5e0b8154bf021f2a30e78b Mon Sep 17 00:00:00 2001 From: "SIC1016\\caipeilun" <905168240@qq.com> Date: Tue, 18 Aug 2026 19:18:07 +0800 Subject: [PATCH] =?UTF-8?q?load=E4=BC=BA=E6=9C=8D=E9=85=8D=E7=BD=AE?= =?UTF-8?q?=E4=B8=8D=E9=9A=90=E8=97=8F=20=E5=88=A0=E9=99=A4tm=E6=8E=A7?= =?UTF-8?q?=E5=88=B6v124=E4=BB=A3=E7=A0=81?= MIME-Version: 1.0 Content-Type: text/plain; charset=UTF-8 Content-Transfer-Encoding: 8bit --- .../Config/TM/DeviceModelSystem.xml | 8 +- .../LLs/Routines/LoadHomeRoutine.cs | 82 +------------- .../LLs/Routines/LoadLockBaseRoutine.cs | 105 ++++++++++++++++++ .../LLs/Routines/LoadLockPumpRoutine.cs | 6 + .../LLs/Routines/LoadLockVentRoutine.cs | 6 + App/Modules/SicModules/TMs/SicTM.cs | 11 +- App/SicRT/Config/System.sccfg | 2 +- App/SicUI/Models/Maintenances/TM/TMView.xaml | 91 +-------------- 8 files changed, 137 insertions(+), 174 deletions(-) diff --git a/App/Modules/SicModules/Config/TM/DeviceModelSystem.xml b/App/Modules/SicModules/Config/TM/DeviceModelSystem.xml index 4d667df..092aa09 100644 --- a/App/Modules/SicModules/Config/TM/DeviceModelSystem.xml +++ b/App/Modules/SicModules/Config/TM/DeviceModelSystem.xml @@ -17,12 +17,12 @@ + aiCurPos="AI_LdRotationRelativeDegree" aiCCD1Degree="AI_LdRotationCCD1Degree" aiCCD2Degree="AI_LdRotationCCD2Degree" + aoCCD1Degree="AO_LdRotationCCD1Degree" aoHomeSpeed="AO_LdRotationSpeed" aoPosSpeed="AO_LdRotationPosSpeed" aoCCD2Degree="AO_LdRotationCCD2Degree" + aoJogDegree="AO_LdRotationJogDegree" aoHomeOffset="AO_LdRotationHomeOffset"/> diff --git a/App/Modules/SicModules/LLs/Routines/LoadHomeRoutine.cs b/App/Modules/SicModules/LLs/Routines/LoadHomeRoutine.cs index b031e2f..6b942a3 100644 --- a/App/Modules/SicModules/LLs/Routines/LoadHomeRoutine.cs +++ b/App/Modules/SicModules/LLs/Routines/LoadHomeRoutine.cs @@ -12,7 +12,8 @@ namespace SicModules.LLs.Routines { CloseV79, CloseV83, - CloseV84 + CloseV84, + CloseV85 } private int _homeTimeout; @@ -41,6 +42,7 @@ namespace SicModules.LLs.Routines CloseLoadVent((int)RoutineStep.CloseV79); CloseFastPump((int)RoutineStep.CloseV83); CloseSlowPump((int)RoutineStep.CloseV84); + CloseBalanceValve((int)RoutineStep.CloseV85); LoadLockDevice.AutoCreatWafer(); } @@ -59,84 +61,6 @@ namespace SicModules.LLs.Routines return Result.DONE; } - public void CloseLoadVent(int id) - { - Tuple ret = Execute(id, () => - { - Notify($"Close Load vent valve"); - - if (!LoadLockDevice.SetFastVentValve(false, out string reason)) - { - Stop(reason); - return false; - } - - return true; - }); - - if (ret.Item1) - { - if (ret.Item2 == Result.FAIL) - { - throw (new RoutineFaildException()); - } - else - throw (new RoutineBreakException()); - } - } - - public void CloseFastPump(int id) - { - Tuple ret = Execute(id, () => - { - Notify($"Close Load fast pump valve"); - - if (!LoadLockDevice.SetFastPumpValve(false, out string reason)) - { - Stop(reason); - return false; - } - - return true; - }); - - if (ret.Item1) - { - if (ret.Item2 == Result.FAIL) - { - throw (new RoutineFaildException()); - } - else - throw (new RoutineBreakException()); - } - } - - public void CloseSlowPump(int id) - { - Tuple ret = Execute(id, () => - { - Notify($"Close slow pump valve"); - - if (!LoadLockDevice.SetSlowPumpValve(false, out string reason)) - { - Stop(reason); - return false; - } - - return true; - }); - - if (ret.Item1) - { - if (ret.Item2 == Result.FAIL) - { - throw (new RoutineFaildException()); - } - else - throw (new RoutineBreakException()); - } - } - public override void Abort() { base.Abort(); diff --git a/App/Modules/SicModules/LLs/Routines/LoadLockBaseRoutine.cs b/App/Modules/SicModules/LLs/Routines/LoadLockBaseRoutine.cs index 3088af0..0ff2bb5 100644 --- a/App/Modules/SicModules/LLs/Routines/LoadLockBaseRoutine.cs +++ b/App/Modules/SicModules/LLs/Routines/LoadLockBaseRoutine.cs @@ -87,6 +87,7 @@ namespace SicModules.LLs.Routines LoadLockDevice.SetSlowPumpValve(false, out _); LoadLockDevice.SetFastPumpValve(false, out _); LoadLockDevice.SetSlowVentValve(false, out _); + TMDevice.SetTmToLLVent(false, out _); } protected void LiftMove(int id, bool up, int timeout) @@ -855,5 +856,109 @@ namespace SicModules.LLs.Routines return CCDTriggerResult; } + public void CloseLoadVent(int id) + { + Tuple ret = Execute(id, () => + { + Notify($"Close Load vent valve"); + + if (!LoadLockDevice.SetFastVentValve(false, out string reason)) + { + Stop(reason); + return false; + } + + return true; + }); + + if (ret.Item1) + { + if (ret.Item2 == Result.FAIL) + { + throw (new RoutineFaildException()); + } + else + throw (new RoutineBreakException()); + } + } + + public void CloseFastPump(int id) + { + Tuple ret = Execute(id, () => + { + Notify($"Close Load fast pump valve"); + + if (!LoadLockDevice.SetFastPumpValve(false, out string reason)) + { + Stop(reason); + return false; + } + + return true; + }); + + if (ret.Item1) + { + if (ret.Item2 == Result.FAIL) + { + throw (new RoutineFaildException()); + } + else + throw (new RoutineBreakException()); + } + } + + public void CloseSlowPump(int id) + { + Tuple ret = Execute(id, () => + { + Notify($"Close slow pump valve"); + + if (!LoadLockDevice.SetSlowPumpValve(false, out string reason)) + { + Stop(reason); + return false; + } + + return true; + }); + + if (ret.Item1) + { + if (ret.Item2 == Result.FAIL) + { + throw (new RoutineFaildException()); + } + else + throw (new RoutineBreakException()); + } + } + + public void CloseBalanceValve(int id) + { + Tuple ret = Execute(id, () => + { + Notify($"Close Balance valve V85"); + + if (!TMDevice.SetTmToLLVent(false, out string reason)) + { + Stop(reason); + return false; + } + + return true; + }); + + if (ret.Item1) + { + if (ret.Item2 == Result.FAIL) + { + throw (new RoutineFaildException()); + } + else + throw (new RoutineBreakException()); + } + } + } } diff --git a/App/Modules/SicModules/LLs/Routines/LoadLockPumpRoutine.cs b/App/Modules/SicModules/LLs/Routines/LoadLockPumpRoutine.cs index 06060d3..1e122a4 100644 --- a/App/Modules/SicModules/LLs/Routines/LoadLockPumpRoutine.cs +++ b/App/Modules/SicModules/LLs/Routines/LoadLockPumpRoutine.cs @@ -22,6 +22,8 @@ namespace SicModules.LLs.Routines CloseFastValve, Delay, TimeDelay1, + CloseV79, + CloseV85 } private double _pumpBasePressure=0; @@ -138,8 +140,12 @@ namespace SicModules.LLs.Routines { try { + //关闭 V79， V85；打开 V84，等待压力低于 200mbar（可配置），打开 V83，压力达到 0mbar（可配置），等待 5s（可配置），关闭 V83、 V84。 Routine 结束。 CheckRoutineTimeOut(); + CloseLoadVent((int)RoutineStep.CloseV79); + CloseBalanceValve((int)RoutineStep.CloseV85); + TimeDelay((int)RoutineStep.RequestPumpDelay, 1); SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _slowPumpTimeout); diff --git a/App/Modules/SicModules/LLs/Routines/LoadLockVentRoutine.cs b/App/Modules/SicModules/LLs/Routines/LoadLockVentRoutine.cs index 90647bb..5d3a742 100644 --- a/App/Modules/SicModules/LLs/Routines/LoadLockVentRoutine.cs +++ b/App/Modules/SicModules/LLs/Routines/LoadLockVentRoutine.cs @@ -18,6 +18,7 @@ namespace SicModules.LLs.Routines CloseSlowVentValve, CloseFastVentValve, CloseValveDelay, + CloseFastPumpValve, CloseSlowPumpValve, CloseV85 } private double _ventBasePressure; @@ -110,8 +111,13 @@ namespace SicModules.LLs.Routines { try { + //关闭 V83， V84， V85；打开 V79，等到压力等于 ATM（1020mbar 可配置），等待 5s（可配置），关闭 V79。 Routine 结束。 CheckRoutineTimeOut(); + CloseFastPumpValve((int)RoutineStep.CloseFastPumpValve); + CloseSlowPumpValve((int)RoutineStep.CloseSlowPumpValve); + CloseBalanceValve((int)RoutineStep.CloseV85); + SlowVent((int)RoutineStep.SlowVent, _ventBasePressure, _slowVentTimeout); TimeDelay((int)RoutineStep.VentDelay, _ventDelayTime); diff --git a/App/Modules/SicModules/TMs/SicTM.cs b/App/Modules/SicModules/TMs/SicTM.cs index d250c53..0df8acb 100644 --- a/App/Modules/SicModules/TMs/SicTM.cs +++ b/App/Modules/SicModules/TMs/SicTM.cs @@ -26,7 +26,7 @@ namespace SicModules.TMs //四个联通阀 private IoValve _tmLoadBanlance_V85; - private IoValve _tmUnLoadBanlance_V124; + //private IoValve _tmUnLoadBanlance_V124; private IoValve _tmPMABanlance_V70_1; //private IoValve _tmPMABanlance_V70_2; @@ -153,7 +153,7 @@ namespace SicModules.TMs _pumpValveV81 = DEVICE.GetDevice("TM.TMFastPump"); _pumpSlowValveV82 = DEVICE.GetDevice("TM.TMSlowPump"); _tmLoadBanlance_V85 = DEVICE.GetDevice("TM.TMLoadBanlance"); - _tmUnLoadBanlance_V124 = DEVICE.GetDevice("TM.TMUnLoadBanlance"); + //_tmUnLoadBanlance_V124 = DEVICE.GetDevice("TM.TMUnLoadBanlance"); _tmPMABanlance_V70_1 = DEVICE.GetDevice("PM1.V70"); //_tmPMABanlance_V70_2 = DEVICE.GetDevice("TM.TMPMBBanlance"); _bufferVentValveV80 = DEVICE.GetDevice("TM.BufferVent"); @@ -352,7 +352,7 @@ namespace SicModules.TMs _ventValveV77.TurnValve(false, out reason); _tmLoadBanlance_V85.TurnValve(false, out reason); _tmPMABanlance_V70_1.TurnValve(false, out reason); - _tmUnLoadBanlance_V124.TurnValve(false, out reason); + //_tmUnLoadBanlance_V124.TurnValve(false, out reason); return true; } @@ -364,7 +364,8 @@ namespace SicModules.TMs public override bool SetTmToUnLoadVent(bool isOpen, out string reason) { - return _tmUnLoadBanlance_V124.TurnValve(isOpen, out reason); + reason = ""; + return true; } public bool SetPIDValve(bool isOpen, out string reason) @@ -511,7 +512,7 @@ namespace SicModules.TMs _pumpSlowValveV82.TurnValve(false, out reason); //_bufferVentValveV80.TurnValve(false, out reason); _tmLoadBanlance_V85.TurnValve(false, out reason); - _tmUnLoadBanlance_V124.TurnValve(false, out reason); + //_tmUnLoadBanlance_V124.TurnValve(false, out reason); _tmPMABanlance_V70_1.TurnValve(false, out reason); //_tmPMABanlance_V70_2.TurnValve(false, out reason); diff --git a/App/SicRT/Config/System.sccfg b/App/SicRT/Config/System.sccfg index 5b08200..490961d 100644 --- a/App/SicRT/Config/System.sccfg +++ b/App/SicRT/Config/System.sccfg @@ -2090,7 +2090,7 @@ - + diff --git a/App/SicUI/Models/Maintenances/TM/TMView.xaml b/App/SicUI/Models/Maintenances/TM/TMView.xaml index 7371ff5..3afd7bd 100644 --- a/App/SicUI/Models/Maintenances/TM/TMView.xaml +++ b/App/SicUI/Models/Maintenances/TM/TMView.xaml @@ -1651,86 +1651,7 @@ - - - - - - - - - - - - - - - TextWrapping="Wrap" /> TextWrapping="Wrap" />