load伺服配置不隐藏

删除tm控制v124代码

App/Modules/SicModules/Config/TM/DeviceModelSystem.xml

@@ -17,12 +17,12 @@
     <LoadRotation id="Rotation" module="Load" display="LoadRotation" schematicId="LoadRotation" unit=""
 			  diServoOn="DI_LdRotationServoOn"   diServoBusy="DI_LdRotationBusy" diServoError="DI_LdRotationServoError" diMoveDone="DI_LdRotationMoveDone"
 			  diRelativeHomeDone="DI_LdRotationRelativeHomeDone"   diOneCircleDone="DI_LdRotationOneCircleDone" diCCD1PosDone="DI_LdRotationCCD1PosDone"
-			  diCCD2PosDone="DI_LdRotationCCD2PosDone" diCCD3PosDone="DI_LdRotationCCD3PosDone" doServoOn="DO_LdRotationServoOn" doServoReset="DO_LdRotationReset"
+			  diCCD2PosDone="DI_LdRotationCCD2PosDone" doServoOn="DO_LdRotationServoOn" doServoReset="DO_LdRotationReset"
 			  doJogCW="DO_LdRotationJogCW" doJogCCW="DO_LdRotationJogCCW" doStop="DO_LdRotationStop" doMoveRelativeHome="DO_LdRotationMoveRelativeHome"
 			  doMoveOneCircle="DO_LdRotationMoveOneCircle"  doMoveCCD1Pos="DO_LdRotationMoveCCD1Pos" doMoveCCD2Pos="DO_LdRotationMoveCCD2Pos"
-			  doMoveCCD3Pos="DO_LdRotationMoveCCD3Pos" aiCurPos="AI_LdRotationRelativeDegree" aiCCD1Degree="AI_LdRotationCCD1Degree" aiCCD2Degree="AI_LdRotationCCD2Degree"
+			  aiCurPos="AI_LdRotationRelativeDegree" aiCCD1Degree="AI_LdRotationCCD1Degree" aiCCD2Degree="AI_LdRotationCCD2Degree"
-			  aiCCD3Degree="AI_LdRotationCCD3Degree" aoCCD1Degree="AO_LdRotationCCD1Degree"  aoHomeSpeed="AO_LdRotationSpeed"  aoPosSpeed="AO_LdRotationPosSpeed" aoCCD2Degree="AO_LdRotationCCD2Degree"
+			  aoCCD1Degree="AO_LdRotationCCD1Degree"  aoHomeSpeed="AO_LdRotationSpeed"  aoPosSpeed="AO_LdRotationPosSpeed" aoCCD2Degree="AO_LdRotationCCD2Degree"
-			  aoCCD3Degree="AO_LdRotationCCD3Degree" aoJogDegree="AO_LdRotationJogDegree" aoHomeOffset="AO_LdRotationHomeOffset"/>
+			  aoJogDegree="AO_LdRotationJogDegree" aoHomeOffset="AO_LdRotationHomeOffset"/>
   </LoadRotations>
   
   <TcAdses classType="Aitex.Core.RT.Device.Devices.SicAds" assembly="MECF.Framework.RT.EquipmentLibrary">

App/Modules/SicModules/LLs/Routines/LoadHomeRoutine.cs

@@ -12,7 +12,8 @@ namespace SicModules.LLs.Routines
         {
             CloseV79,
             CloseV83,
-            CloseV84
+            CloseV84, 
+            CloseV85
         }
 
         private int _homeTimeout;
@@ -41,6 +42,7 @@ namespace SicModules.LLs.Routines
                 CloseLoadVent((int)RoutineStep.CloseV79);
                 CloseFastPump((int)RoutineStep.CloseV83);
                 CloseSlowPump((int)RoutineStep.CloseV84);
+                CloseBalanceValve((int)RoutineStep.CloseV85);
 
                 LoadLockDevice.AutoCreatWafer();
             }
@@ -59,84 +61,6 @@ namespace SicModules.LLs.Routines
             return Result.DONE;
         }
 
-        public void CloseLoadVent(int id)
-        {
-            Tuple<bool, Result> ret = Execute(id, () =>
-            {
-                Notify($"Close Load vent valve");
-
-                if (!LoadLockDevice.SetFastVentValve(false, out string reason))
-                {
-                    Stop(reason);
-                    return false;
-                }
-
-                return true;
-            });
-
-            if (ret.Item1)
-            {
-                if (ret.Item2 == Result.FAIL)
-                {
-                    throw (new RoutineFaildException());
-                }
-                else
-                    throw (new RoutineBreakException());
-            }
-        }
-
-        public void CloseFastPump(int id)
-        {
-            Tuple<bool, Result> ret = Execute(id, () =>
-            {
-                Notify($"Close Load fast pump valve");
-
-                if (!LoadLockDevice.SetFastPumpValve(false, out string reason))
-                {
-                    Stop(reason);
-                    return false;
-                }
-
-                return true;
-            });
-
-            if (ret.Item1)
-            {
-                if (ret.Item2 == Result.FAIL)
-                {
-                    throw (new RoutineFaildException());
-                }
-                else
-                    throw (new RoutineBreakException());
-            }
-        }
-
-        public void CloseSlowPump(int id)
-        {
-            Tuple<bool, Result> ret = Execute(id, () =>
-            {
-                Notify($"Close slow pump valve");
-
-                if (!LoadLockDevice.SetSlowPumpValve(false, out string reason))
-                {
-                    Stop(reason);
-                    return false;
-                }
-
-                return true;
-            });
-
-            if (ret.Item1)
-            {
-                if (ret.Item2 == Result.FAIL)
-                {
-                    throw (new RoutineFaildException());
-                }
-                else
-                    throw (new RoutineBreakException());
-            }
-        }
-
         public override void Abort()
         {
             base.Abort();

App/Modules/SicModules/LLs/Routines/LoadLockBaseRoutine.cs

@@ -87,6 +87,7 @@ namespace SicModules.LLs.Routines
             LoadLockDevice.SetSlowPumpValve(false, out _);
             LoadLockDevice.SetFastPumpValve(false, out _);
             LoadLockDevice.SetSlowVentValve(false, out _);
+            TMDevice.SetTmToLLVent(false, out _);
         }
 
         protected void LiftMove(int id, bool up, int timeout)
@@ -855,5 +856,109 @@ namespace SicModules.LLs.Routines
             return CCDTriggerResult;
         }
 
+        public void CloseLoadVent(int id)
+        {
+            Tuple<bool, Result> ret = Execute(id, () =>
+            {
+                Notify($"Close Load vent valve");
+
+                if (!LoadLockDevice.SetFastVentValve(false, out string reason))
+                {
+                    Stop(reason);
+                    return false;
+                }
+
+                return true;
+            });
+
+            if (ret.Item1)
+            {
+                if (ret.Item2 == Result.FAIL)
+                {
+                    throw (new RoutineFaildException());
+                }
+                else
+                    throw (new RoutineBreakException());
+            }
+        }
+
+        public void CloseFastPump(int id)
+        {
+            Tuple<bool, Result> ret = Execute(id, () =>
+            {
+                Notify($"Close Load fast pump valve");
+
+                if (!LoadLockDevice.SetFastPumpValve(false, out string reason))
+                {
+                    Stop(reason);
+                    return false;
+                }
+
+                return true;
+            });
+
+            if (ret.Item1)
+            {
+                if (ret.Item2 == Result.FAIL)
+                {
+                    throw (new RoutineFaildException());
+                }
+                else
+                    throw (new RoutineBreakException());
+            }
+        }
+
+        public void CloseSlowPump(int id)
+        {
+            Tuple<bool, Result> ret = Execute(id, () =>
+            {
+                Notify($"Close slow pump valve");
+
+                if (!LoadLockDevice.SetSlowPumpValve(false, out string reason))
+                {
+                    Stop(reason);
+                    return false;
+                }
+
+                return true;
+            });
+
+            if (ret.Item1)
+            {
+                if (ret.Item2 == Result.FAIL)
+                {
+                    throw (new RoutineFaildException());
+                }
+                else
+                    throw (new RoutineBreakException());
+            }
+        }
+
+        public void CloseBalanceValve(int id)
+        {
+            Tuple<bool, Result> ret = Execute(id, () =>
+            {
+                Notify($"Close Balance valve V85");
+
+                if (!TMDevice.SetTmToLLVent(false, out string reason))
+                {
+                    Stop(reason);
+                    return false;
+                }
+
+                return true;
+            });
+
+            if (ret.Item1)
+            {
+                if (ret.Item2 == Result.FAIL)
+                {
+                    throw (new RoutineFaildException());
+                }
+                else
+                    throw (new RoutineBreakException());
+            }
+        }
+
     }
 }

App/Modules/SicModules/LLs/Routines/LoadLockPumpRoutine.cs

@@ -22,6 +22,8 @@ namespace SicModules.LLs.Routines
             CloseFastValve,
             Delay,
             TimeDelay1,
+            CloseV79, 
+            CloseV85
         }
 
         private double _pumpBasePressure=0;
@@ -138,8 +140,12 @@ namespace SicModules.LLs.Routines
         {
             try
             {
+                //关闭 V79， V85；打开 V84，等待压力低于 200mbar（可配置），打开 V83，压力达到 0mbar（可配置），等待 5s（可配置），关闭 V83、 V84。 Routine 结束。
                 CheckRoutineTimeOut();
 
+                CloseLoadVent((int)RoutineStep.CloseV79);
+                CloseBalanceValve((int)RoutineStep.CloseV85);
+
                 TimeDelay((int)RoutineStep.RequestPumpDelay, 1);
 
                 SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _slowPumpTimeout);

App/Modules/SicModules/LLs/Routines/LoadLockVentRoutine.cs

@@ -18,6 +18,7 @@ namespace SicModules.LLs.Routines
             CloseSlowVentValve,
             CloseFastVentValve,
             CloseValveDelay,
+            CloseFastPumpValve, CloseSlowPumpValve, CloseV85
         }
 
         private double _ventBasePressure;
@@ -110,8 +111,13 @@ namespace SicModules.LLs.Routines
         {
             try
             {
+                //关闭 V83， V84， V85；打开 V79，等到压力等于 ATM（1020mbar 可配置），等待 5s（可配置），关闭 V79。 Routine 结束。
                 CheckRoutineTimeOut();
 
+                CloseFastPumpValve((int)RoutineStep.CloseFastPumpValve);
+                CloseSlowPumpValve((int)RoutineStep.CloseSlowPumpValve);
+                CloseBalanceValve((int)RoutineStep.CloseV85);
+
                 SlowVent((int)RoutineStep.SlowVent, _ventBasePressure, _slowVentTimeout);
 
                 TimeDelay((int)RoutineStep.VentDelay, _ventDelayTime);

App/Modules/SicModules/TMs/SicTM.cs

@@ -26,7 +26,7 @@ namespace SicModules.TMs
 
         //四个联通阀
         private IoValve _tmLoadBanlance_V85;
-        private IoValve _tmUnLoadBanlance_V124;
+        //private IoValve _tmUnLoadBanlance_V124;
         private IoValve _tmPMABanlance_V70_1;
         //private IoValve _tmPMABanlance_V70_2;
 
@@ -153,7 +153,7 @@ namespace SicModules.TMs
             _pumpValveV81        = DEVICE.GetDevice<IoValve>("TM.TMFastPump");
             _pumpSlowValveV82    = DEVICE.GetDevice<IoValve>("TM.TMSlowPump");
             _tmLoadBanlance_V85   = DEVICE.GetDevice<IoValve>("TM.TMLoadBanlance");
-            _tmUnLoadBanlance_V124 = DEVICE.GetDevice<IoValve>("TM.TMUnLoadBanlance");
+            //_tmUnLoadBanlance_V124 = DEVICE.GetDevice<IoValve>("TM.TMUnLoadBanlance");
             _tmPMABanlance_V70_1 =    DEVICE.GetDevice<IoValve>("PM1.V70");
             //_tmPMABanlance_V70_2 =    DEVICE.GetDevice<IoValve>("TM.TMPMBBanlance");
             _bufferVentValveV80 = DEVICE.GetDevice<IoValve>("TM.BufferVent");
@@ -352,7 +352,7 @@ namespace SicModules.TMs
             _ventValveV77.TurnValve(false, out reason);
             _tmLoadBanlance_V85.TurnValve(false, out reason);
             _tmPMABanlance_V70_1.TurnValve(false, out reason);            
-            _tmUnLoadBanlance_V124.TurnValve(false, out reason);
+            //_tmUnLoadBanlance_V124.TurnValve(false, out reason);
 
             return true;
         }
@@ -364,7 +364,8 @@ namespace SicModules.TMs
 
         public override bool SetTmToUnLoadVent(bool isOpen, out string reason)
         {
-            return _tmUnLoadBanlance_V124.TurnValve(isOpen, out reason);
+            reason = "";
+            return true;
         }
 
         public bool SetPIDValve(bool isOpen, out string reason)
@@ -511,7 +512,7 @@ namespace SicModules.TMs
             _pumpSlowValveV82.TurnValve(false, out reason);
             //_bufferVentValveV80.TurnValve(false, out reason);
             _tmLoadBanlance_V85.TurnValve(false, out reason);
-            _tmUnLoadBanlance_V124.TurnValve(false, out reason);
+            //_tmUnLoadBanlance_V124.TurnValve(false, out reason);
             _tmPMABanlance_V70_1.TurnValve(false, out reason);
             //_tmPMABanlance_V70_2.TurnValve(false, out reason);
 

App/SicRT/Config/System.sccfg

@@ -2090,7 +2090,7 @@
 			<config default="0.5" name="LeakSpec" description="LeakSpec" max="100" min="0" paramter="" tag="" unit="mbar/min" type="Double" />
 			<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
-		<configs name="LoadRotation" visible="false">
+		<configs name="LoadRotation">
 			<config default="0" name="CCD1Pos" description="CCD拍照位置1" max="360" min="-360" paramter="" tag="" unit="°" type="Double" />
 			<config default="0" name="CCD2Pos" description="CCD拍照位置2" max="360" min="-360" paramter="" tag="" unit="°" type="Double" />
 			<config default="0" name="HomeOffset" description="LoadRotation旋转电机原点偏移量" max="360" min="-360" paramter="" tag="" unit="°" type="Double" />

App/SicUI/Models/Maintenances/TM/TMView.xaml

@@ -1655,85 +1655,6 @@
     Padding="5,1,0,1"
     Background="{DynamicResource Table_BG_Title}"
     BorderBrush="{DynamicResource Table_BD}"
-                        BorderThickness="1,0,1,1">
-                        <TextBlock
-                            lex:ResxLocalizationProvider.DefaultDictionary="lang_tmview"
-                            VerticalAlignment="Center"
-                            FontFamily="Arial"
-                            FontSize="12"
-                            Foreground="{DynamicResource FG_Black}"
-                            Text="{lex:Loc ID_TXT_LoadLid}"
-                            TextWrapping="Wrap" />
-                    </Border>
-                    <Border
-                        Grid.Row="5"
-                        Grid.Column="1"
-                        Padding="5,1,0,1"
-                        Background="{DynamicResource Table_BG_Content}"
-                        BorderBrush="{DynamicResource Table_BD}"
-                        BorderThickness="0,0,0,1">
-                        <TextBlock
-                            lex:ResxLocalizationProvider.DefaultDictionary="lang_tmview"
-                            VerticalAlignment="Center"
-                            FontFamily="Arial"
-                            FontSize="12"
-                            Foreground="{DynamicResource FG_Black}"
-                            Text="{lex:Loc {Binding LLLidState}}"
-                            TextAlignment="Center"
-                            TextWrapping="Wrap" />
-                    </Border>
-                    <Border
-                        Grid.Row="5"
-                        Grid.Column="2"
-                        Padding="5,1"
-                        Background="{DynamicResource Table_BG_Content}"
-                        BorderBrush="{DynamicResource Table_BD}"
-                        BorderThickness="1,0,1,1">
-                        <StackPanel Orientation="Horizontal">
-                            <Button
-                                Width="80"
-                                Height="25"
-                                Margin="10,0"
-                                HorizontalAlignment="Left"
-                                Content="{lex:Loc ID_BTN_Lock_Content}"
-                                IsEnabled="{Binding IsLLEnableManualOperation}">
-                                <i:Interaction.Triggers>
-                                    <i:EventTrigger EventName="Click">
-                                        <cal:ActionMessage MethodName="LoadLidLock" />
-                                    </i:EventTrigger>
-                                </i:Interaction.Triggers>
-                            </Button>
-                            <deviceControl:AITSensor
-                                HorizontalAlignment="Center"
-                                VerticalAlignment="Center"
-                                GreenColor="True"
-                                LightOnValue="{Binding LoadLockSensor}" />
-                            <Button
-                                Width="80"
-                                Height="25"
-                                Margin="10,0"
-                                HorizontalAlignment="Left"
-                                Content="{lex:Loc ID_BTN_Unlock_Content}"
-                                IsEnabled="{Binding IsLLEnableManualOperation}">
-                                <i:Interaction.Triggers>
-                                    <i:EventTrigger EventName="Click">
-                                        <cal:ActionMessage MethodName="LoadLidUnlock" />
-                                    </i:EventTrigger>
-                                </i:Interaction.Triggers>
-                            </Button>
-                            <deviceControl:AITSensor
-                                HorizontalAlignment="Center"
-                                VerticalAlignment="Center"
-                                GreenColor="True"
-                                LightOnValue="{Binding LoadUnLockSensor}" />
-                        </StackPanel>
-                    </Border>
-
-                    <Border
-    Grid.Row="6"
-    Padding="5,1,0,1"
-    Background="{DynamicResource Table_BG_Title}"
-    BorderBrush="{DynamicResource Table_BD}"
     BorderThickness="1,0,1,1">
                         <TextBlock
         VerticalAlignment="Center"
@@ -1745,7 +1666,7 @@
         TextWrapping="Wrap" />
                     </Border>
                     <Border
-    Grid.Row="6"
+    Grid.Row="5"
     Grid.Column="1"
     Padding="5,1,0,1"
     Background="{DynamicResource Table_BG_Content}"
@@ -1761,7 +1682,7 @@ TextAlignment="Center"
 TextWrapping="Wrap" />
                     </Border>
                     <Border
-    Grid.Row="6"
+    Grid.Row="5"
     Grid.Column="2"
     Padding="5,1"
     Background="{DynamicResource Table_BG_Content}"
@@ -1808,7 +1729,7 @@ TextWrapping="Wrap" />
                     </Border>
 
                     <Border
-    Grid.Row="7"
+    Grid.Row="6"
     Padding="5,1,0,1"
     Background="{DynamicResource Table_BG_Title}"
     BorderBrush="{DynamicResource Table_BD}"
@@ -1823,7 +1744,7 @@ TextWrapping="Wrap" />
         TextWrapping="Wrap" />
                     </Border>
                     <Border
-    Grid.Row="7"
+    Grid.Row="6"
     Grid.Column="1"
     Padding="5,1,0,1"
     Background="{DynamicResource Table_BG_Content}"
@@ -1839,7 +1760,7 @@ TextWrapping="Wrap" />
         TextWrapping="Wrap" />
                     </Border>
                     <Border
-    Grid.Row="7"
+    Grid.Row="6"
     Grid.Column="2"
     Padding="5,1"
     Background="{DynamicResource Table_BG_Content}"