整理TM气路 数据属性 IO等内容
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hanqiangqiang
parent
311abf6ed3
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@ -1,17 +1,159 @@
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<?xml version="1.0" encoding="utf-8"?>
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<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
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<TcAdses classType="Aitex.Core.RT.Device.Devices.SicAds" assembly="MECF.Framework.RT.EquipmentLibrary">
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<TcAds id="MainPLC" module="PM1" display="" schematicId="" unit="" option="true" doShutDown=""/>
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<TcAds id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" doShutDown=""/>
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<IoInterLocks assembly="SicModules" classType="SicModules.Devices.IoInterLockEx">
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<IoInterLock id="IoInterLock" module="TM" display="IoInterLock" schematicId="IoInterLock" unit="" doTmAtProcessPress="DO_TMAtProcessPress" doLLAtProcessPress="DO_LoadAtProcessPress" diTmAtATM="DI_TMPressure1ATM" diLoadLockAtATm="DI_LoadPressureATM" aiTmPressure="AI_TMPressure1" aiLLPressure="AI_LoadPressure" diTmUnderVac="DI_TMPressure1VAC" doTmCyclePurgeRoutineSuccessed="DO_TMCyclePurgeRoutineSuccessed" doTmCyclePurgeRoutineRunning="DO_TMCyclePurgeRoutineRunning" doTmLeakCheckRoutineRunning="DO_TMLeakCheckRoutineRunning" doTmPumpDownRoutineRunning="DO_TMPumpDownRoutineRunning" doTmServoPressRoutineRunning="DO_TMServoPressRoutineRunning" doTmVentUpRoutineRunning="DO_TMVentUpRoutineRunning" doLLCyclePurgeRoutineRunning="DO_LoadCyclePurgeRoutineRunning" doLLLeakCheckRoutineRunning="DO_LoadLeakCheckRoutineRunning" doLLPumpDownRoutineRunning="DO_LoadPumpDownRoutineRunning" doLLVentUpRoutineRunning="DO_LoadVentUpRoutineRunning" diVacRobotExtenLLEnableFB="DI_VacRobotExtenLoadEnableFB" diVacRobotExtendBufferEnableFB="DI_VacRobotExtendBufferEnableFB" diVacRobotExtendPMAEnableFB="DI_VacRobotExtendPMAEnableFB" diATMRobotExtendUnloadEnableFB="DI_ATMRobotExtendUnloadEnableFB" diATMRobotExtendLoadLSideEnableFB="DI_ATMRobotExtendLoadLSideEnableFB" diATMRobotExtendLoadRSideEnableFB="DI_ATMRobotExtendLoadRSideEnableFB" diVacRobotExtendUnloadEnableFB="DI_VacRobotExtendUnloadEnableFB" diVacRobotExtendPMBEnableFB="DI_VacRobotExtendPMBEnableFB" doVacRobotExtenLLEnable="DO_VacRobotExtenLoadEnable" doVacRobotExtendBufferEnable="DO_VacRobotExtendBufferEnable" doVacRobotExtendPMAEnable="DO_VacRobotExtendPMAEnable" doVacRobotExtendUnloadEnable="DO_VacRobotExtendUnloadEnable" doVacRobotExtendPMBEnable="DO_VacRobotExtendPMBEnable" doATMRobotExtendUnloadEnable="DO_ATMRobotExtendUnloadEnable" doATMRobotExtendLoaLSideEnable="DO_ATMRobotExtendLoaLSideEnable" doATMRobotExtendLoaRSideEnable="DO_ATMRobotExtendLoaRSideEnable" doRectorAATMTransferReady="DO_ReactorAATMTransferReady" doRectorAProcessTransferReady="DO_ReactorAProcessTransferReady" doPm1LidClosed="DO_PM1LidClosed" doRectorBATMTransferReady="DO_ReactorBATMTransferReady" doRectorBProcessTransferReady="DO_ReactorBProcessTransferReady" doPm2LidClosed="DO_PM2LidClosed" doUnLoadPurgeRoutineRunning="DO_UnLoadCyclePurgeRoutineRunning" doUnLoadLeakCheckRoutineRunning="DO_UnLoadLeakCheckRoutineRunning" doUnLoadPumpDownRoutineRunning="DO_UnLoadPumpDownRoutineRunning" doUnLoadVentUpRoutineRunning="DO_UnLoadVentUpRoutineRunning" diTMLidClosed="DI_TMLidClosed" diBufferLidClosed="DI_BufferStationLidClosed" diPM1DoorClosed="DI_ReactorADoorClosed" diPM2DoorClosed="DI_ReactorBDoorClosed"/>
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</IoInterLocks>
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<IoMfcs classType="Aitex.Core.RT.Device.Devices.IoMFC" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoMfc3 id="Mfc60" module="TM" display="Mfc60" schematicId="Mfc60" unit="sccm"
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aiFlow="AI_M60FlowRead" aoFlow="AO_M60FlowSetpoint"
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scBasePath="TM.MFC"
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Valve="TMVent"
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DisableFbSpErrMonWhenValveClosed="true"
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aioType="float" />
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</IoMfcs>
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<TcAdses classType="Aitex.Core.RT.Device.Devices.SicAds" assembly="MECF.Framework.RT.EquipmentLibrary">
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<TcAds id="MainPLC" module="PM1" display="" schematicId="" unit="" option="true" scBasePath="PM.{module}" />
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<TcAds id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" scBasePath="PM.{module}" />
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<TcAds id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" scBasePath="{module}" />
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</TcAdses>
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<WcfPlcs assembly="MECF.Framework.Common" classType="MECF.Framework.Common.PLC.WcfPlc">
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<WcfPlcs assembly="MECF.Framework.Common" classType="MECF.Framework.Common.PLC.WcfPlc" >
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<WcfPlc id="MainPLC" module="PM1" display="" schematicId="" unit="" option="true" />
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<WcfPlc id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" />
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<WcfPlc id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
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</WcfPlcs>
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<TcAdses assembly="SicModules" classType="SicModules.Devices.SicAds">
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<!--<TcAdses assembly="SicModules" classType="SicModules.Devices.SicAds">
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<TcAds id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
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</TcAdses>
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<WcfPlcs assembly="MECF.Framework.Common" classType="MECF.Framework.Common.PLC.WcfPlc">
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</TcAdses>-->
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<!--<WcfPlcs assembly="MECF.Framework.Common" classType="MECF.Framework.Common.PLC.WcfPlc">
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<WcfPlc id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
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</WcfPlcs>
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</WcfPlcs>-->
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<IoSignalTowers classType="MECF.Framework.RT.EquipmentLibrary.Devices.IoSignalTower" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSignalTower id="SignalTower" module="TM" display="SignalTower" schematicId="TMSignalTower"
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eventFile="STEvents.xml"
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doGreen="DO_TowerGreen"
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doYellow="DO_TowerYellow"
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doRed="DO_TowerRed"
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doBuzzer="DO_Buzzer" />
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</IoSignalTowers>
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<IoSensors classType="Aitex.Core.RT.Device.Devices.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSensor id="TMLidClosed" module="TM" display="" schematicId="" unit="" di="DI_TMLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm200 TM Lid Opened [TDI-12]" />
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<IoSensor id="LLLidClosed" module="LoadLock" display="" schematicId="" unit="" di="DI_LoadLidClosed" textOutTrigValue="false" infoText="Information23 LoadLid Opened [TDI-13]" warningText="" alarmText="" />
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<IoSensor id="UnloadLidClosed" module="UnLoad" display="" schematicId="" unit="" di="DI_UnloadStationLidClosed" textOutTrigValue="false" warningText="" alarmText="" />
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<IoSensor id="BufferLidClosed" module="Buffer" display="" schematicId="" unit="" di="DI_BufferStationLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm202 BufferStation Lid Opened [TDI-15]" />
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<IoSensor id="LoadLockGateClosed" module="TM" display="" schematicId="" unit="" di="DI_LoadLockGateClosed" textOutTrigValue="true" infoText="Information11 LoadLockGate.Closed [TDI-22]" warningText="" alarmText="" />
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<IoSensor id="BufferWaferHigh" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorHigh" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="BufferWaferMiddle" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorMid" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="BufferWaferLow" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorLow" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="LLTrayPresence" module="TM" display="" schematicId="" unit="" di="DI_LoadTrayPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="LLWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_LoadWaferPlaced" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="UnLoadTrayPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="UnLoadWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="ForelineBasePressureReady" module="TM" display="" schematicId="" unit="" di="DI_ForelineBasePressureReady" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="LoadTrayHomeSensor" module="TM" display="" schematicId="" unit="" di="DI_LoadHomeTraySensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassALWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassARWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetRightConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassALInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftInch6" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassARInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetRightInch6" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassBLInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_TrayCassetInch6" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassBLWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_TrayCassetConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="SensorLoadDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadDoorClosed" infoText="Information1 LoadDoor.Closed [TDI-0]" warningText="" alarmText="" />
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<IoSensor id="SensorLoadDoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadDoorOpened" infoText="Information2 LoadDoor.Opened [TDI-1]" warningText="" alarmText="" />
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<IoSensor id="SensorUnloadStationDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UnloadStationDoorClosed" infoText="Information3 UnloadStationDoor.Closed [TDI-2]" warningText="" alarmText="" />
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<IoSensor id="SensorUnloadStationDoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UnloadStationDoorOpened" infoText="Information4 UnloadStationDoor.Opened [TDI-3]" warningText="" alarmText="" />
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<IoSensor id="SensorReactorADoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorADoorClosed" infoText="Information5 ReactorA.Door.Closed [TDI-4]" warningText="" alarmText="" />
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<IoSensor id="SensorReactorADoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorADoorOpened" infoText="Information6 ReactorA.Door.Opened [TDI-5]" warningText="" alarmText="" />
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<IoSensor id="SensorReactorBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorBDoorClosed" infoText="Information7 ReactorB.Door.Closed [TDI-6]" warningText="" alarmText="" />
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<IoSensor id="SensorReactorBDoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorBDoorOpened" infoText="Information8 ReactorB.Door.Opened [TDI-7]" warningText="" alarmText="" />
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<IoSensor id="SensorBufferStationDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationDoorClosed" infoText="Information9 BufferStationDoor.Closed [TDI-10]" warningText="" alarmText="" />
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<IoSensor id="SensorBufferStationDoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationDoorOpened" infoText="Information10 BufferStationDoor.Closed [TDI-11]" warningText="" alarmText="" />
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<IoSensor id="SensorRobotOnBackPos" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_RobotOnBackPos" infoText="Information12 RobotOnBackPos [TDI-31]" warningText="" alarmText="" />
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<IoSensor id="SensorLoadWaferPresence" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadWaferPresence" infoText="Information13 Load position with Tray [TDI-32]" warningText="" alarmText="" />
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<IoSensor id="SensorBufferStationOptSensorHigh" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationOptSensorHigh" infoText="Information14 Buffer High Position with Tray [TDI-37]" warningText="" alarmText="" />
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<IoSensor id="SensorBufferStationOptSensorMid" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationOptSensorMid" infoText="Information15 Buffer Middle Position with Tray [TDI-38]" warningText="" alarmText="" />
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<IoSensor id="SensorBufferStationOptSensorLow" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationOptSensorLow" infoText="Information16 Buffer Low Position with Tray [TDI-39]" warningText="" alarmText="" />
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<IoSensor id="SensorTMDryPump1Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMDryPump1Alarm" infoText="" warningText="" alarmText="Alarm203 TMDryPump1 Alarm [TDI-43]" />
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<IoSensor id="SensorTMDryPump1Warning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMDryPump1Warning" infoText="" warningText="" alarmText="Alarm204 TMDryPump1 Warning [TDI-44]" />
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<IoSensor id="SensorTMDryPump1Running" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMDryPump1Running" infoText="" warningText="" alarmText="Alarm205 TMDryPump1 Not Runing [TDI-49]" />
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<IoSensor id="SensorLoadLidLocked" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadLidLocked" infoText="Information17 LoadLockLid.Locked [TDI-64]" warningText="" alarmText="" />
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<IoSensor id="SensorLoadLidUnlocked" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadLidUnlocked" infoText="Information18 LoadLockLid.Unlocked [TDI-65]" warningText="" alarmText="" />
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<IoSensor id="SensorTMPressure1ATM" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMPressure1ATM" infoText="Information19 TM at ATM [TDI-88]" warningText="" alarmText="" />
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<IoSensor id="SensorTMPressure1VAC" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMPressure1VAC" infoText="Information20 TM at VAC [TDI-89]" warningText="" alarmText="" />
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<IoSensor id="SensorLoadPressureATM" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadPressureATM" infoText="Information21 Load at ATM [TDI-90]" warningText="" alarmText="" />
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<IoSensor id="SensorLoadPressureVAC" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadPressureVAC" infoText="Information22 Load at VAC [TDI-91]" warningText="" alarmText="" />
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</IoSensors>
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<IoPumps classType="SicModules.Devices.IoPump" assembly="SicModules">
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<IoPump id="TMPump1" module="TM" display="Pump1" schematicId="TMPump1" unit="" diRunning="DI_TMDryPump1Running" diAlarm="DI_TMDryPump1Alarm" diWarning="DI_TMDryPump1Warning" />
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</IoPumps>
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<IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoValve id="LoadSlowPump" module="TM" display="V84" schematicId="LoadSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadSlowPumpFB" doOpen="DO_LoadSlowPump" />
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<IoValve id="LoadFastPump" module="TM" display="V83" schematicId="LoadFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadFastPumpFB" doOpen="DO_LoadFastPump" />
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<IoValve id="TMSlowPump" module="TM" display="V82" schematicId="TMSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMSlowPumpFB" doOpen="DO_TMSlowPump" />
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<IoValve id="TMFastPump" module="TM" display="V81" schematicId="TMFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMFastPumpFB" doOpen="DO_TMFastPump" />
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<IoValve id="UnLoadSlowPump" module="TM" display="V123" schematicId="UnLoadSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadSlowPumpFB" doOpen="DO_UnloadSlowPump" />
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<IoValve id="UnLoadFastPump" module="TM" display="V122" schematicId="UnLoadFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadFastPumpFB" doOpen="DO_UnloadFastPump" />
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<IoValve id="BufferVent" module="TM" display="V80" schematicId="BufferVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_BufferVentFB" doOpen="DO_BufferVent" />
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<IoValve id="LoadVent" module="TM" display="V79" schematicId="LoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVentFB" doOpen="DO_LoadVent" />
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<IoValve id="TMVent" module="TM" display="V77" schematicId="TMVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMVentFB" doOpen="DO_TMVent" />
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<IoValve id="UnLoadVent" module="TM" display="V78" schematicId="UnLoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadVentFB" doOpen="DO_UnloadVent" />
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<IoValve id="TMLoadBanlance" module="TM" display="V85" schematicId="TMLoadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMLoadBanlanceFB" doOpen="DO_TMLoadBanlance" />
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<IoValve id="TMUnLoadBanlance" module="TM" display="V124" schematicId="TMToUnloadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_TMToUnloadBanlance" />
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</IoValves>
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<IoSlitValves classType="Aitex.Core.RT.Device.Unit.IoSlitValve" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSlitValve id="LoadLockDoor" module="TM" display="LLDoor" Type="" unit="" schematicId="LLDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadDoorOpened" diClose="DI_LoadDoorClosed" doOpen="DO_LoadDoorOpen" doClose="DO_LoadDoorClose" />
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<IoSlitValve id="PM1Door" module="TM" display="PM1Door" Type="" unit="" schematicId="PM1Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorADoorOpened" diClose="DI_ReactorADoorClosed" doOpen="DO_RectorADoorOpen" doClose="DO_RectorADoorClose" />
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<IoSlitValve id="PM2Door" module="TM" display="PM2Door" Type="" unit="" schematicId="PM2Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorBDoorOpened" diClose="DI_ReactorBDoorClosed" doOpen="DO_RectorBDoorOpen" doClose="DO_RectorBDoorClose" />
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<IoSlitValve id="UnLoadDoor" module="TM" display="UnLoadDoor" Type="" unit="" schematicId="UnLoadDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadStationDoorOpened" diClose="DI_UnloadStationDoorClosed" doOpen="DO_UnloadStationDoorOpen" doClose="DO_UnloadStationDoorClose" />
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<IoSlitValve id="BufferDoor" module="TM" display="BufferDoor" Type="" unit="" schematicId="BufferDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_BufferStationDoorOpened" diClose="DI_BufferStationDoorClosed" doOpen="DO_BufferStationDoorOpen" doClose="DO_BufferStationDoorClose" />
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<IoSlitValve id="UnLoadSubDoor" module="EFEM" display="UnLoadSubDoor" Type="" unit="" schematicId="UnLoadSubDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadSubStationDoorOpened" diClose="DI_UnloadSubStationDoorClosed" doOpen="DO_UnloadSubStationDoorOpen" doClose="DO_UnloadSubStationDoorClose" />
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<IoSlitValve id="LoadLockLSideDoor" module="EFEM" display="LLLSideDoor" Type="" unit="" schematicId="LLLSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadLSideDoorOpened" diClose="DI_LoadLSideDoorClosed" doOpen="DO_LoadLSideDoorOpen" doClose="DO_LoadLSideDoorClose" />
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<IoSlitValve id="LoadLockRSideDoor" module="EFEM" display="LLRSideDoor" Type="" unit="" schematicId="LLRSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadRSideDoorOpened" diClose="DI_LoadRSideDoorClosed" doOpen="DO_LoadRSideDoorOpen" doClose="DO_LoadRSideDoorClose" />
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</IoSlitValves>
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<IoPressureMeter3s classType="Aitex.Core.RT.Device.Unit.IoPressureMeter3" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoPressureMeter3 id="LLPressure" module="TM" display="LLPressure" schematicId="LLPressure" unit="mbar" aioType="float" aiValue="AI_LoadPressure" formatString="F1" MaxValue="1500" />
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<IoPressureMeter3 id="UnLoadPressure" module="TM" display="UnLoadPressure" schematicId="UnLoadPressure" unit="mbar" aioType="float" aiValue="AI_UnloadPressure" formatString="F1" MaxValue="1500" />
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<IoPressureMeter3 id="TMPressure" module="TM" display="TMPressure" schematicId="TMPressure" unit="mbar" aioType="float" aiValue="AI_TMPressure1" formatString="F1" MaxValue="1500" />
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<IoPressureMeter3 id="PM1Pressure2" module="TM" display="PM1Pressure2" schematicId="PM1Pressure2" unit="mbar" aioType="float" aiValue="AI_PM1Pressure2" formatString="F1" MaxValue="1500" />
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<IoPressureMeter3 id="PM2Pressure2" module="TM" display="PM2Pressure2" schematicId="PM2Pressure2" unit="mbar" aioType="float" aiValue="AI_PM2Pressure2" formatString="F1" MaxValue="1500" />
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</IoPressureMeter3s>
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<IoTempMeters classType="Aitex.Core.RT.Device.Devices.IoTempMeter" assembly="MECF.Framework.RT.EquipmentLibrary">
|
||||
<IoTempMeter module="UnLoad" id="UnLoadTemp" display="" schematicId="" aioType="float" aiFeedback="AI_UnloadTemp" />
|
||||
<IoTempMeter module="Buffer" id="BufferTemp" display="" schematicId="" aioType="float" aiFeedback="AI_BufferTemp" />
|
||||
</IoTempMeters>
|
||||
<IoLift4s classType="Aitex.Core.RT.Device.Unit.IoLift4" assembly="MECF.Framework.RT.EquipmentLibrary">
|
||||
<IoLift4 id="LoadLidLock" module="LoadLock" display="LoadLidLock" schematicId="LoadLidLock" unit="" aioType="" diUp="DI_LoadLidLocked" diDown="DI_LoadLidUnlocked" doUp="DO_LoadLidLock" doDown="DO_LoadLidUnlock" scTimeout="10" />
|
||||
<IoLift4 id="UnLoadLift" module="UnLoad" display="UnLoadLift" schematicId="UnLoadLift" unit="" aioType="" diUp="DI_UnloadStationLifterCYUp" diDown="DI_UnloadStationLifterCYDown" doUp="DO_UnloadStationLifterCYUp" doDown="DO_UnloadStationLifterCYDown" scTimeout="10" />
|
||||
</IoLift4s>
|
||||
<IoClaws classType="Aitex.Core.RT.Device.Unit.IoClaw" assembly="MECF.Framework.RT.EquipmentLibrary">
|
||||
<IoClaw id="LLWaferClaw" module="LoadLock" display="LLWaferClaw" schematicId="LLWaferClaw" unit="" aioType="" diUp="DI_LoadWaferCYClamped" diDown="DI_LoadWafeCYOpened" doUp="DO_LoadWaferCYClamp" doDown="DO_LoadWaferCYOpen" scTimeout="10" />
|
||||
<IoClaw id="LLTrayClaw" module="LoadLock" display="LLTrayClaw" schematicId="LLTrayClaw" unit="" aioType="" diUp="DI_LoadTrayCYClamped" diDown="DI_LoadTrayCYOpend" doUp="DO_LoadTrayCYClamp" doDown="DO_LoadTrayCYOpen" scTimeout="10" />
|
||||
<IoClaw id="UnLoadWaferClaw" module="UnLoad" display="UnLoadWaferClaw" schematicId="UnLoadWaferClaw" unit="" aioType="" diUp="DI_UnloadStationWaferCYClamped" diDown="DI_UnloadStationWaferCYOpened" doUp="DO_UnloadStationWaferCYClamp" doDown="DO_UnloadStationWaferCYOpen" scTimeout="10" />
|
||||
</IoClaws>
|
||||
<TMRobots assembly="SicModules" classType="SicModules.TMs.SicTMRobot">
|
||||
<TMRobot id="TMRobot" module="TMRobot" display="" schematicId="" unit="" />
|
||||
</TMRobots>
|
||||
|
||||
|
||||
<TMs assembly="SicModules" classType="SicModules.TMs.SicTM">
|
||||
<TM id="TM" module="System" display="" schematicId="" unit="" DiTMLidClosedAlarm="DI_TMLidClosed" DiLLLidClosedAlarm="DI_LLLidClosed" DiBufferLidClosedAlarm="DI_BufferLidClosed" aiLLTemp="AI_LoadTemp" aiBufferTemp="AI_BufferTemp" />
|
||||
</TMs>
|
||||
|
||||
<LLs assembly="SicModules" classType="SicModules.LLs.SicLoadLock">
|
||||
<TM id="LoadLock" module="LoadLock" display="" schematicId="" unit="" />
|
||||
</LLs>
|
||||
<Unloads assembly="SicModules" classType="SicModules.UnLoads.SicUnLoad">
|
||||
<Unload id="UnLoad" module="UnLoad" display="" schematicId="" unit="" />
|
||||
</Unloads>
|
||||
<Buffers assembly="SicModules" classType="SicModules.Buffers.SicBuffer">
|
||||
<Buffer id="Buffer" module="Buffer" display="" schematicId="" unit="" />
|
||||
</Buffers>
|
||||
</DeviceModelDefine>
|
||||
@ -1,169 +1,216 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<?xml version="1.0" encoding="UTF-8"?>
|
||||
<IO_DEFINE xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
|
||||
<VersionID Name="V2.2.3.0" />
|
||||
<Dig_In>
|
||||
<Block Index="0">
|
||||
<DI_ITEM Index="0" Name="DI_LoaderDoorClosed" BufferOffset="0" Addr="0" Description="" />
|
||||
<DI_ITEM Index="1" Name="DI_LoaderDoorOpened" BufferOffset="1" Addr="1" Description="" />
|
||||
<DI_ITEM Index="0" Name="DI_LoadDoorClosed" BufferOffset="0" Addr="0" Description="" />
|
||||
<DI_ITEM Index="1" Name="DI_LoadDoorOpened" BufferOffset="1" Addr="1" Description="" />
|
||||
<DI_ITEM Index="2" Name="DI_UnloadStationDoorClosed" BufferOffset="2" Addr="2" Description="" />
|
||||
<DI_ITEM Index="3" Name="DI_UnloadStationDoorOpened" BufferOffset="3" Addr="3" Description="" />
|
||||
<DI_ITEM Index="4" Name="DI_ReactorADoorClosed" BufferOffset="4" Addr="4" Description="" />
|
||||
<DI_ITEM Index="5" Name="DI_ReactorADoorOpened" BufferOffset="5" Addr="5" Description="" />
|
||||
<DI_ITEM Index="6" Name="DI_ReactorBDoorClosed" BufferOffset="6" Addr="6" Description="" />
|
||||
<DI_ITEM Index="7" Name="DI_ReactorBDoorOpened" BufferOffset="7" Addr="7" Description="" />
|
||||
<DI_ITEM Index="8" Name="DI_UnloadSubStationDoorClosed" BufferOffset="8" Addr="8" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="9" Name="DI_UnloadSubStationDoorOpened" BufferOffset="9" Addr="9" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="10" Name="DI_BufferStationDoorClosed" BufferOffset="10" Addr="10" Description="" />
|
||||
<DI_ITEM Index="11" Name="DI_BufferStationDoorOpened" BufferOffset="11" Addr="11" Description="" />
|
||||
<DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description="" />
|
||||
<DI_ITEM Index="13" Name="DI_LoaderLidClosed" BufferOffset="13" Addr="13" Description="" />
|
||||
<DI_ITEM Index="13" Name="DI_LoadLidClosed" BufferOffset="13" Addr="13" Description="" />
|
||||
<DI_ITEM Index="14" Name="DI_UnloadStationLidClosed" BufferOffset="14" Addr="14" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="15" Name="DI_BufferStationLidClosed" BufferOffset="15" Addr="15" Description="" />
|
||||
<DI_ITEM Index="20" Name="DI_CDAPressureSWReady" BufferOffset="20" Addr="20" Description="" />
|
||||
<DI_ITEM Index="21" Name="DI_WaterFlowSWReady" BufferOffset="21" Addr="21" Description="" />
|
||||
<DI_ITEM Index="22" Name="DI_LoadLockGateClosed" BufferOffset="22" Addr="22" Description="" />
|
||||
<DI_ITEM Index="24" Name="DI_LoadLsideDoorClosed" BufferOffset="24" Addr="24" Description="" />
|
||||
<DI_ITEM Index="25" Name="DI_LoadLsideDoorOpened" BufferOffset="25" Addr="25" Description="" />
|
||||
<DI_ITEM Index="24" Name="DI_LoadLSideDoorClosed" BufferOffset="24" Addr="24" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="25" Name="DI_LoadLSideDoorOpened" BufferOffset="25" Addr="25" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="26" Name="DI_LoadRSideDoorClosed" BufferOffset="26" Addr="26" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" />
|
||||
<DI_ITEM Index="32" Name="DI_LoaderWaferPresence" BufferOffset="32" Addr="32" Description="" />
|
||||
<DI_ITEM Index="33" Name="DI_LoaderLeftGateINTK" BufferOffset="33" Addr="33" Description="" />
|
||||
<DI_ITEM Index="34" Name="DI_LoaderRightGateINTK" BufferOffset="34" Addr="34" Description="" />
|
||||
<DI_ITEM Index="36" Name="DI_LoaderTraySensor" BufferOffset="36" Addr="36" Description="" />
|
||||
<DI_ITEM Index="32" Name="DI_LoadTrayPresence" BufferOffset="32" Addr="32" Description="" />
|
||||
<DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="36" Name="DI_LoadHomeTraySensor" BufferOffset="36" Addr="36" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="37" Name="DI_BufferStationOptSensorHigh" BufferOffset="37" Addr="37" Description="" />
|
||||
<DI_ITEM Index="43" Name="DI_DryPumpAlarm" BufferOffset="43" Addr="43" Description="" />
|
||||
<DI_ITEM Index="44" Name="DI_DryPumpRuning" BufferOffset="44" Addr="44" Description="" />
|
||||
<DI_ITEM Index="47" Name="DI_BufferStationBLidClosed" BufferOffset="47" Addr="47" Description="" />
|
||||
<DI_ITEM Index="49" Name="DI_DryPumpWarning" BufferOffset="49" Addr="49" Description="" />
|
||||
<DI_ITEM Index="50" Name="DI_GloveBoxLoadwaferReady" BufferOffset="50" Addr="50" Description="" />
|
||||
<DI_ITEM Index="51" Name="DI_GloveBoxLoadwaferFinished" BufferOffset="51" Addr="51" Description="" />
|
||||
<DI_ITEM Index="52" Name="DI_GloveBoxUnLoadwaferReady" BufferOffset="52" Addr="52" Description="" />
|
||||
<DI_ITEM Index="53" Name="DI_GloveBoxUnLoadwaferFinished" BufferOffset="53" Addr="53" Description="" />
|
||||
<DI_ITEM Index="54" Name="DI_GloveBoxReady" BufferOffset="54" Addr="54" Description="" />
|
||||
<DI_ITEM Index="38" Name="DI_BufferStationOptSensorMid" BufferOffset="38" Addr="38" Description="" />
|
||||
<DI_ITEM Index="39" Name="DI_BufferStationOptSensorLow" BufferOffset="39" Addr="39" Description="" />
|
||||
<DI_ITEM Index="40" Name="DI_UnloadStationWaferPresence" BufferOffset="40" Addr="40" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="41" Name="DI_UnloadStationGateINTK" BufferOffset="41" Addr="41" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="43" Name="DI_TMDryPump1Alarm" BufferOffset="43" Addr="43" Description="" />
|
||||
<DI_ITEM Index="44" Name="DI_TMDryPump1Warning" BufferOffset="44" Addr="44" Description="" />
|
||||
<DI_ITEM Index="49" Name="DI_TMDryPump1Running" BufferOffset="49" Addr="49" Description="" />
|
||||
<DI_ITEM Index="50" Name="DI_WaferCassetLeftInch6" BufferOffset="50" Addr="50" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="52" Name="DI_WaferCassetRightInch6" BufferOffset="52" Addr="52" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="54" Name="DI_WaferCassetLeftConvexSensor" BufferOffset="54" Addr="54" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="55" Name="DI_WaferCassetRightConvexSensor" BufferOffset="55" Addr="55" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="56" Name="DI_TrayCassetInch6" BufferOffset="56" Addr="56" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="58" Name="DI_TrayCassetConvexSensor" BufferOffset="58" Addr="58" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="62" Name="DI_LoadLidLockedR" BufferOffset="62" Addr="62" Description=""/>
|
||||
<DI_ITEM Index="63" Name="DI_LoadLidUnlockedR" BufferOffset="63" Addr="63" Description=""/>
|
||||
<DI_ITEM Index="64" Name="DI_LoadLidLocked" BufferOffset="64" Addr="64" Description=""/>
|
||||
<DI_ITEM Index="65" Name="DI_LoadLidUnlocked" BufferOffset="65" Addr="65" Description="" />
|
||||
<DI_ITEM Index="66" Name="DI_LoadWaferCYClamped" BufferOffset="66" Addr="66" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="67" Name="DI_LoadWafeCYOpened" BufferOffset="67" Addr="67" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="68" Name="DI_LoadTrayCYClamped" BufferOffset="68" Addr="68" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="69" Name="DI_LoadTrayCYOpend" BufferOffset="69" Addr="69" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="72" Name="DI_UnloadStationWaferCYClamped" BufferOffset="72" Addr="72" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="73" Name="DI_UnloadStationWaferCYOpened" BufferOffset="73" Addr="73" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="74" Name="DI_UnloadStationLifterCYUp" BufferOffset="74" Addr="74" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="75" Name="DI_UnloadStationLifterCYDown" BufferOffset="75" Addr="75" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="88" Name="DI_TMPressure1ATM" BufferOffset="88" Addr="88" Description="" />
|
||||
<DI_ITEM Index="89" Name="DI_TMPressure1VAC" BufferOffset="89" Addr="89" Description="" />
|
||||
<DI_ITEM Index="90" Name="DI_LoaderPressureATM" BufferOffset="90" Addr="90" Description="" />
|
||||
<DI_ITEM Index="91" Name="DI_LoaderPressureVAC" BufferOffset="91" Addr="91" Description="" />
|
||||
<DI_ITEM Index="90" Name="DI_LoadPressureATM" BufferOffset="90" Addr="90" Description="" />
|
||||
<DI_ITEM Index="91" Name="DI_LoadPressureVAC" BufferOffset="91" Addr="91" Description="" />
|
||||
<DI_ITEM Index="92" Name="DI_TMPressure2ATM" BufferOffset="92" Addr="92" Description="" />
|
||||
<DI_ITEM Index="93" Name="DI_TMPressure2VAC" BufferOffset="93" Addr="93" Description="" />
|
||||
<DI_ITEM Index="94" Name="DI_UnloadPressureATM" BufferOffset="94" Addr="94" Description="" />
|
||||
<DI_ITEM Index="95" Name="DI_UnloadPressureVAC" BufferOffset="95" Addr="95" Description="" />
|
||||
<DI_ITEM Index="96" Name="DI_LoaderSlowPumpFB" BufferOffset="96" Addr="96" Description="" />
|
||||
<DI_ITEM Index="97" Name="DI_LoaderFastPumpFB" BufferOffset="97" Addr="97" Description="" />
|
||||
<DI_ITEM Index="98" Name="DI_TMSlowPumpFB" BufferOffset="98" Addr="98" Description="" />
|
||||
<DI_ITEM Index="99" Name="DI_TMFastPumpFB" BufferOffset="99" Addr="99" Description="" />
|
||||
<DI_ITEM Index="101" Name="DI_LoadChamber1FillFBFB" BufferOffset="101" Addr="101" Description="" />
|
||||
<DI_ITEM Index="102" Name="DI_TMChamberFillFBFB" BufferOffset="102" Addr="102" Description="" />
|
||||
<DI_ITEM Index="103" Name="DI_TMChamberFastFillFBFB" BufferOffset="103" Addr="103" Description="" />
|
||||
<DI_ITEM Index="104" Name="DI_LoadTMBalanceFBFB" BufferOffset="104" Addr="104" Description="" />
|
||||
<DI_ITEM Index="105" Name="DI_LoaderDoorCloseFB" BufferOffset="105" Addr="105" Description="" />
|
||||
<DI_ITEM Index="106" Name="DI_LoaderDoorOpenFB" BufferOffset="106" Addr="106" Description="" />
|
||||
<DI_ITEM Index="94" Name="DI_UnloadPressureATM" BufferOffset="94" Addr="94" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="95" Name="DI_UnloadPressureVAC" BufferOffset="95" Addr="95" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="96" Name="DI_LoadSlowPumpFB" BufferOffset="96" Addr="96" Description="V84" />
|
||||
<DI_ITEM Index="97" Name="DI_LoadFastPumpFB" BufferOffset="97" Addr="97" Description="V83" />
|
||||
<DI_ITEM Index="98" Name="DI_TMSlowPumpFB" BufferOffset="98" Addr="98" Description="V82" />
|
||||
<DI_ITEM Index="99" Name="DI_TMFastPumpFB" BufferOffset="99" Addr="99" Description="V81" />
|
||||
<DI_ITEM Index="100" Name="DI_BufferVentFB" BufferOffset="100" Addr="100" Description="V80" />
|
||||
<DI_ITEM Index="101" Name="DI_LoadVentFB" BufferOffset="101" Addr="101" Description="V79" />
|
||||
<DI_ITEM Index="102" Name="DI_TMVentFB" BufferOffset="102" Addr="102" Description="V77" />
|
||||
<DI_ITEM Index="103" Name="DI_UnloadVentFB" BufferOffset="103" Addr="103" Description="V78" Visible="false"/>
|
||||
<DI_ITEM Index="104" Name="DI_TMLoadBanlanceFB" BufferOffset="104" Addr="104" Description="V85" />
|
||||
<DI_ITEM Index="105" Name="DI_LoadDoorCloseFB" BufferOffset="105" Addr="105" Description="" />
|
||||
<DI_ITEM Index="106" Name="DI_LoadDoorOpenFB" BufferOffset="106" Addr="106" Description="" />
|
||||
<DI_ITEM Index="107" Name="DI_UnloadStationDoorCloseFB" BufferOffset="107" Addr="107" Description="" />
|
||||
<DI_ITEM Index="108" Name="DI_UnloadStationDoorOpenFB" BufferOffset="108" Addr="108" Description="" />
|
||||
<DI_ITEM Index="109" Name="DI_RectorADoorCloseFB" BufferOffset="109" Addr="109" Description="" />
|
||||
<DI_ITEM Index="110" Name="DI_RectorADoorOpenFB" BufferOffset="110" Addr="110" Description="" />
|
||||
<DI_ITEM Index="111" Name="DI_RectorBDoorCloseFB" BufferOffset="111" Addr="111" Description="" />
|
||||
<DI_ITEM Index="112" Name="DI_RectorBDoorOpenFB" BufferOffset="112" Addr="112" Description="" />
|
||||
<DI_ITEM Index="113" Name="DI_TMUnloadBanlanceFB" BufferOffset="113" Addr="113" Description="" />
|
||||
<DI_ITEM Index="113" Name="DI_TMToUnloadBanlanceFB" BufferOffset="113" Addr="113" Description="V124" Visible="false"/>
|
||||
<DI_ITEM Index="114" Name="DI_VacRobotEstopFB" BufferOffset="114" Addr="114" Description="" />
|
||||
<DI_ITEM Index="115" Name="DI_VacRobotExtenLLEnableFB" BufferOffset="115" Addr="115" Description="" />
|
||||
<DI_ITEM Index="116" Name="DI_VacRobotExtendSupplyEnableFB" BufferOffset="116" Addr="116" Description="" />
|
||||
<DI_ITEM Index="115" Name="DI_VacRobotExtenLoadEnableFB" BufferOffset="115" Addr="115" Description="" />
|
||||
<DI_ITEM Index="116" Name="DI_VacRobotExtendUnloadEnableFB" BufferOffset="116" Addr="116" Description="" />
|
||||
<DI_ITEM Index="117" Name="DI_VacRobotExtendPMAEnableFB" BufferOffset="117" Addr="117" Description="" />
|
||||
<DI_ITEM Index="118" Name="DI_VacRobotExtendPMBEnableFB" BufferOffset="118" Addr="118" Description="" />
|
||||
<DI_ITEM Index="119" Name="DI_VacRobotExtendBufferEnableFB" BufferOffset="119" Addr="119" Description="" />
|
||||
<DI_ITEM Index="120" Name="DI_atmRobotExtendSupplyEnableFB" BufferOffset="120" Addr="120" Description="" />
|
||||
<DI_ITEM Index="121" Name="DI_atmRobotExtendLoaLockLsideEnableFB" BufferOffset="121" Addr="121" Description="" />
|
||||
<DI_ITEM Index="122" Name="DI_atmRobotExtendLoaLockRsideEnableFB" BufferOffset="122" Addr="122" Description="" />
|
||||
<DI_ITEM Index="123" Name="DI_LoaderLsideDoorCloseFB" BufferOffset="123" Addr="123" Description="" />
|
||||
<DI_ITEM Index="124" Name="DI_LoaderLsideDoorOpenFB" BufferOffset="124" Addr="124" Description="" />
|
||||
<DI_ITEM Index="125" Name="DI_LoaderRsideDoorCloseFB" BufferOffset="125" Addr="125" Description="" />
|
||||
<DI_ITEM Index="126" Name="DI_LoaderRsideDoorOpenFB" BufferOffset="126" Addr="126" Description="" />
|
||||
<DI_ITEM Index="127" Name="DI_UnloadSubStationDoorCloseFB" BufferOffset="127" Addr="127" Description="" />
|
||||
<DI_ITEM Index="128" Name="DI_UnloadSubStationDoorOpenFB" BufferOffset="128" Addr="128" Description="" />
|
||||
<DI_ITEM Index="120" Name="DI_ATMRobotExtendUnloadEnableFB" BufferOffset="120" Addr="120" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="121" Name="DI_ATMRobotExtendLoadLSideEnableFB" BufferOffset="121" Addr="121" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="122" Name="DI_ATMRobotExtendLoadRSideEnableFB" BufferOffset="122" Addr="122" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="123" Name="DI_LoadLSideDoorCloseFB" BufferOffset="123" Addr="123" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="124" Name="DI_LoadLSideDoorOpenFB" BufferOffset="124" Addr="124" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="125" Name="DI_LoadRSideDoorCloseFB" BufferOffset="125" Addr="125" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="126" Name="DI_LoadRSideDoorOpenFB" BufferOffset="126" Addr="126" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="127" Name="DI_UnloadSubStationDoorCloseFB" BufferOffset="127" Addr="127" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="128" Name="DI_UnloadSubStationDoorOpenFB" BufferOffset="128" Addr="128" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="129" Name="DI_BufferStationDoorCloseFB" BufferOffset="129" Addr="129" Description="" />
|
||||
<DI_ITEM Index="130" Name="DI_BufferStationDoorOpenFB" BufferOffset="130" Addr="130" Description="" />
|
||||
<DI_ITEM Index="131" Name="DI_LoaderLifterCYUpFB" BufferOffset="131" Addr="131" Description="" />
|
||||
<DI_ITEM Index="132" Name="DI_LoaderLifterCYDownFB" BufferOffset="132" Addr="132" Description="" />
|
||||
<DI_ITEM Index="133" Name="DI_LoaderWaferCYClampFB" BufferOffset="133" Addr="133" Description="" />
|
||||
<DI_ITEM Index="134" Name="DI_LoaderWaferCYOpenFB" BufferOffset="134" Addr="134" Description="" />
|
||||
<DI_ITEM Index="135" Name="DI_LoaderTrayCYClampFB" BufferOffset="135" Addr="135" Description="" />
|
||||
<DI_ITEM Index="136" Name="DI_LoaderTrayCYOpenFB" BufferOffset="136" Addr="136" Description="" />
|
||||
<DI_ITEM Index="139" Name="DI_UnloadStationWaferCYClampFB" BufferOffset="139" Addr="139" Description="" />
|
||||
<DI_ITEM Index="140" Name="DI_UnloadStationWaferCYOpenFB" BufferOffset="140" Addr="140" Description="" />
|
||||
<DI_ITEM Index="141" Name="DI_UnloadStationLifterCYUpFB" BufferOffset="141" Addr="141" Description="" />
|
||||
<DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" />
|
||||
<DI_ITEM Index="143" Name="DI_TMPMABanlanceFB" BufferOffset="143" Addr="143" Description="" />
|
||||
<DI_ITEM Index="144" Name="DI_TMPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" />
|
||||
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="" />
|
||||
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="" />
|
||||
<DI_ITEM Index="160" Name="DI_ReactorAATMTransferReady" BufferOffset="160" Addr="160" Description="" />
|
||||
<DI_ITEM Index="161" Name="DI_ReactorAProcessTransferReady" BufferOffset="161" Addr="161" Description="" />
|
||||
<DI_ITEM Index="162" Name="DI_ReactorBATMTransferReady" BufferOffset="162" Addr="162" Description="" />
|
||||
<DI_ITEM Index="163" Name="DI_ReactorBProcessTransferReady" BufferOffset="163" Addr="163" Description="" />
|
||||
<DI_ITEM Index="164" Name="DI_PreheatATMTransferReady" BufferOffset="164" Addr="164" Description="" />
|
||||
<DI_ITEM Index="165" Name="DI_PreheatProcessTransferReady" BufferOffset="165" Addr="165" Description="" />
|
||||
<DI_ITEM Index="167" Name="DI_TMWaferPresenceLL" BufferOffset="167" Addr="167" Description="" />
|
||||
<DI_ITEM Index="168" Name="DI_TMWaferPresenceA" BufferOffset="168" Addr="168" Description="" />
|
||||
<DI_ITEM Index="169" Name="DI_TMWaferPresenceB" BufferOffset="169" Addr="169" Description="" />
|
||||
<DI_ITEM Index="170" Name="DI_TMWaferPresenceBuf" BufferOffset="170" Addr="170" Description="" />
|
||||
<DI_ITEM Index="171" Name="DI_TMWaferPresencePreheat" BufferOffset="171" Addr="171" Description="" />
|
||||
<DI_ITEM Index="174" Name="DI_ForelineBasePressureReady" BufferOffset="174" Addr="174" Description="" />
|
||||
<DI_ITEM Index="175" Name="DI_TMatATM" BufferOffset="175" Addr="175" Description="" />
|
||||
<DI_ITEM Index="176" Name="DI_LoaderAtATM" BufferOffset="176" Addr="176" Description="" />
|
||||
<DI_ITEM Index="177" Name="DI_TMUnderVac" BufferOffset="177" Addr="177" Description="" />
|
||||
<DI_ITEM Index="178" Name="DI_LoaderUnderVAC" BufferOffset="178" Addr="178" Description="" />
|
||||
<DI_ITEM Index="179" Name="DI_TMAtProcessPress" BufferOffset="179" Addr="179" Description="" />
|
||||
<DI_ITEM Index="180" Name="DI_LLAtProcessPress" BufferOffset="180" Addr="180" Description="" />
|
||||
<DI_ITEM Index="181" Name="DI_LoaderTempReady" BufferOffset="181" Addr="181" Description="" />
|
||||
<DI_ITEM Index="182" Name="DI_BufferTempReady" BufferOffset="182" Addr="182" Description="" />
|
||||
<DI_ITEM Index="185" Name="DI_TmCyclePurgeRoutineRunning" BufferOffset="185" Addr="185" Description="" />
|
||||
<DI_ITEM Index="186" Name="DI_TmLeakCheckRoutineRunning" BufferOffset="186" Addr="186" Description="" />
|
||||
<DI_ITEM Index="187" Name="DI_TmPumpDownRoutineRunning" BufferOffset="187" Addr="187" Description="" />
|
||||
<DI_ITEM Index="188" Name="DI_TmServoPressRoutineRunning" BufferOffset="188" Addr="188" Description="" />
|
||||
<DI_ITEM Index="189" Name="DI_TmVentUpRoutineRunning" BufferOffset="189" Addr="189" Description="" />
|
||||
<DI_ITEM Index="190" Name="DI_LLCyclePurgeRoutineRunning" BufferOffset="190" Addr="190" Description="" />
|
||||
<DI_ITEM Index="200" Name="DI_PMAH2SupplyFB" BufferOffset="200" Addr="200" Description="" />
|
||||
<DI_ITEM Index="201" Name="DI_PMAN2SwitchFB" BufferOffset="201" Addr="201" Description="" />
|
||||
<DI_ITEM Index="202" Name="DI_PMAHCLSwitchFB" BufferOffset="202" Addr="202" Description="" />
|
||||
<DI_ITEM Index="203" Name="DI_PMASiH4SwitchFB" BufferOffset="203" Addr="203" Description="" />
|
||||
<DI_ITEM Index="204" Name="DI_PMAC3H8SwitchFB" BufferOffset="204" Addr="204" Description="" />
|
||||
<DI_ITEM Index="208" Name="DI_LdRotationServoOn" BufferOffset="208" Addr="208" Description="" />
|
||||
<DI_ITEM Index="209" Name="DI_LdRotationBusy" BufferOffset="209" Addr="209" Description="" />
|
||||
<DI_ITEM Index="210" Name="DI_LdRotationServoError" BufferOffset="210" Addr="210" Description="" />
|
||||
<DI_ITEM Index="211" Name="DI_LdRotationMoveDone" BufferOffset="211" Addr="211" Description="" />
|
||||
<DI_ITEM Index="212" Name="DI_LdRotationRelativeHomeDone" BufferOffset="212" Addr="212" Description="" />
|
||||
<DI_ITEM Index="213" Name="DI_LdRotationOneCircleDone" BufferOffset="213" Addr="213" Description="" />
|
||||
<DI_ITEM Index="214" Name="DI_LdRotationCCD1posDone" BufferOffset="214" Addr="214" Description="" />
|
||||
<DI_ITEM Index="215" Name="DI_LdRotationCCD2posDone" BufferOffset="215" Addr="215" Description="" />
|
||||
<DI_ITEM Index="216" Name="DI_PMBH2SupplyFB" BufferOffset="216" Addr="216" Description="" />
|
||||
<DI_ITEM Index="217" Name="DI_PMBN2SwitchFB" BufferOffset="217" Addr="217" Description="" />
|
||||
<DI_ITEM Index="218" Name="DI_PMBHCLSwitchFB" BufferOffset="218" Addr="218" Description="" />
|
||||
<DI_ITEM Index="219" Name="DI_PMBSiH4SwitchFB" BufferOffset="219" Addr="219" Description="" />
|
||||
<DI_ITEM Index="220" Name="DI_PMBC3H8SwitchFB" BufferOffset="220" Addr="220" Description="" />
|
||||
<DI_ITEM Index="221" Name="DI_TMPMAS7ComErr" BufferOffset="221" Addr="221" Description="" />
|
||||
<DI_ITEM Index="222" Name="DI_TMPMATCPComErr" BufferOffset="222" Addr="222" Description="" />
|
||||
<DI_ITEM Index="223" Name="DI_TMPMBS7ComErr" BufferOffset="223" Addr="223" Description="" />
|
||||
<DI_ITEM Index="133" Name="DI_LoadWaferCYClampFB" BufferOffset="133" Addr="133" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="134" Name="DI_LoadWaferCYOpenFB" BufferOffset="134" Addr="134" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="135" Name="DI_LoadTrayCYClampFB" BufferOffset="135" Addr="135" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="136" Name="DI_LoadTrayCYOpenFB" BufferOffset="136" Addr="136" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="139" Name="DI_UnloadStationWaferCYClampFB" BufferOffset="139" Addr="139" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="140" Name="DI_UnloadStationWaferCYOpenFB" BufferOffset="140" Addr="140" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="141" Name="DI_UnloadStationLifterCYUpFB" BufferOffset="141" Addr="141" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="143" Name="DI_TMToPMABanlanceFB" BufferOffset="143" Addr="143" Description="" />
|
||||
<DI_ITEM Index="144" Name="DI_TMToPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" />
|
||||
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122" Visible="false"/>
|
||||
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123" Visible="false"/>
|
||||
<DI_ITEM Index="160" Name="DI_ReactorAATMTransferReadyFB" BufferOffset="160" Addr="160" Description="" />
|
||||
<DI_ITEM Index="161" Name="DI_ReactorAProcessTransferReadyFB" BufferOffset="161" Addr="161" Description="" />
|
||||
<DI_ITEM Index="162" Name="DI_ReactorBATMTransferReadyFB" BufferOffset="162" Addr="162" Description="" />
|
||||
<DI_ITEM Index="163" Name="DI_ReactorBProcessTransferReadyFB" BufferOffset="163" Addr="163" Description="" />
|
||||
<DI_ITEM Index="164" Name="DI_PreheatATMTransferReadyFB" BufferOffset="164" Addr="164" Description="" />
|
||||
<DI_ITEM Index="165" Name="DI_PreheatProcessTransferReadyFB" BufferOffset="165" Addr="165" Description="" />
|
||||
<DI_ITEM Index="167" Name="DI_TMWaferPresenceLLFB" BufferOffset="167" Addr="167" Description="" />
|
||||
<DI_ITEM Index="168" Name="DI_TMWaferPresenceAFB" BufferOffset="168" Addr="168" Description="" />
|
||||
<DI_ITEM Index="169" Name="DI_TMWaferPresenceBFB" BufferOffset="169" Addr="169" Description="" />
|
||||
<DI_ITEM Index="170" Name="DI_TMWaferPresenceBufFB" BufferOffset="170" Addr="170" Description="" />
|
||||
<DI_ITEM Index="171" Name="DI_TMWaferPresenceUnloadFB" BufferOffset="171" Addr="171" Description="" />
|
||||
<DI_ITEM Index="174" Name="DI_ForelineBasePressureReadyFB" BufferOffset="174" Addr="174" Description="" />
|
||||
<DI_ITEM Index="175" Name="DI_TMatATMFB" BufferOffset="175" Addr="175" Description="" />
|
||||
<DI_ITEM Index="176" Name="DI_LoadAtATMFB" BufferOffset="176" Addr="176" Description="" />
|
||||
<DI_ITEM Index="177" Name="DI_TMUnderVacFB" BufferOffset="177" Addr="177" Description="" />
|
||||
<DI_ITEM Index="178" Name="DI_LoadUnderVACFB" BufferOffset="178" Addr="178" Description="" />
|
||||
<DI_ITEM Index="179" Name="DI_TMAtProcessPressFB" BufferOffset="179" Addr="179" Description="" />
|
||||
<DI_ITEM Index="180" Name="DI_LLAtProcessPressFB" BufferOffset="180" Addr="180" Description="" />
|
||||
<DI_ITEM Index="181" Name="DI_LoadTempReadyFB" BufferOffset="181" Addr="181" Description="" />
|
||||
<DI_ITEM Index="182" Name="DI_BufferTempReadyFB" BufferOffset="182" Addr="182" Description="" />
|
||||
<DI_ITEM Index="185" Name="DI_TMCyclePurgeRoutineRunningFB" BufferOffset="185" Addr="185" Description="" />
|
||||
<DI_ITEM Index="186" Name="DI_TMLeakCheckRoutineRunningFB" BufferOffset="186" Addr="186" Description="" />
|
||||
<DI_ITEM Index="187" Name="DI_TMPumpDownRoutineRunningFB" BufferOffset="187" Addr="187" Description="" />
|
||||
<DI_ITEM Index="188" Name="DI_TMServoPressRoutineRunningFB" BufferOffset="188" Addr="188" Description="" />
|
||||
<DI_ITEM Index="189" Name="DI_TMVentUpRoutineRunningFB" BufferOffset="189" Addr="189" Description="" />
|
||||
<DI_ITEM Index="190" Name="DI_LLCyclePurgeRoutineRunningFB" BufferOffset="190" Addr="190" Description="" />
|
||||
|
||||
<DI_ITEM Index="191" Name="DI_LLLeakCheckRoutineRunningFB" BufferOffset="191" Addr="191" Description="" />
|
||||
<DI_ITEM Index="192" Name="DI_LLPumpDownRoutineRunningFB" BufferOffset="192" Addr="192" Description="" />
|
||||
<DI_ITEM Index="193" Name="DI_LLVentUpRoutineRunningFB" BufferOffset="193" Addr="193" Description="" />
|
||||
|
||||
|
||||
|
||||
<DI_ITEM Index="208" Name="DI_LdRotationServoOn" BufferOffset="208" Addr="208" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="209" Name="DI_LdRotationBusy" BufferOffset="209" Addr="209" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="210" Name="DI_LdRotationServoError" BufferOffset="210" Addr="210" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="211" Name="DI_LdRotationMoveDone" BufferOffset="211" Addr="211" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="212" Name="DI_LdRotationRelativeHomeDone" BufferOffset="212" Addr="212" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="213" Name="DI_LdRotationOneCircleDone" BufferOffset="213" Addr="213" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="214" Name="DI_LdRotationCCD1PosDone" BufferOffset="214" Addr="214" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="215" Name="DI_LdRotationCCD2PosDone" BufferOffset="215" Addr="215" Description="" Visible="false"/>
|
||||
</Block>
|
||||
</Dig_In>
|
||||
<Dig_Out>
|
||||
<Block Index="0">
|
||||
<DO_ITEM Index="0" Name="DO_LoadSlowPump(V84)" BufferOffset="0" Addr="0" Description="" />
|
||||
<DO_ITEM Index="1" Name="DO_LoadFastPump(V83)" BufferOffset="1" Addr="1" Description="" />
|
||||
<DO_ITEM Index="2" Name="DO_TMSlowPump(V82)" BufferOffset="2" Addr="2" Description="" />
|
||||
<DO_ITEM Index="3" Name="DO_TMFastPump(V81)" BufferOffset="3" Addr="3" Description="" />
|
||||
<DO_ITEM Index="5" Name="DO_LoadChamber1Fill(V79)" BufferOffset="5" Addr="5" Description="" />
|
||||
<DO_ITEM Index="6" Name="DO_TMChamberFill(V77)" BufferOffset="6" Addr="6" Description="" />
|
||||
<DO_ITEM Index="7" Name="DO_TMChamberFastFill(V78)" BufferOffset="7" Addr="7" Description="" />
|
||||
<DO_ITEM Index="8" Name="DO_LoadTMBalance(V85)" BufferOffset="8" Addr="8" Description="" />
|
||||
<DO_ITEM Index="9" Name="DO_LoadLockDoorClose" BufferOffset="9" Addr="9" Description="" />
|
||||
<DO_ITEM Index="10" Name="DO_LoadLockDoorOpen" BufferOffset="10" Addr="10" Description="" />
|
||||
<DO_ITEM Index="0" Name="DO_LoadSlowPump" BufferOffset="0" Addr="0" Description="V84" />
|
||||
<DO_ITEM Index="1" Name="DO_LoadFastPump" BufferOffset="1" Addr="1" Description="V83" />
|
||||
<DO_ITEM Index="2" Name="DO_TMSlowPump" BufferOffset="2" Addr="2" Description="V82" />
|
||||
<DO_ITEM Index="3" Name="DO_TMFastPump" BufferOffset="3" Addr="3" Description="V81" />
|
||||
<DO_ITEM Index="4" Name="DO_BufferVent" BufferOffset="4" Addr="4" Description="V80" />
|
||||
<DO_ITEM Index="5" Name="DO_LoadVent" BufferOffset="5" Addr="5" Description="V79" />
|
||||
<DO_ITEM Index="6" Name="DO_TMVent" BufferOffset="6" Addr="6" Description="V77" />
|
||||
<DO_ITEM Index="7" Name="DO_UnloadVent" BufferOffset="7" Addr="7" Description="V78" />
|
||||
<DO_ITEM Index="8" Name="DO_TMLoadBanlance" BufferOffset="8" Addr="8" Description="V85" />
|
||||
<DO_ITEM Index="9" Name="DO_LoadDoorClose" BufferOffset="9" Addr="9" Description="" />
|
||||
<DO_ITEM Index="10" Name="DO_LoadDoorOpen" BufferOffset="10" Addr="10" Description="" />
|
||||
<DO_ITEM Index="11" Name="DO_UnloadStationDoorClose" BufferOffset="11" Addr="11" Description="" />
|
||||
<DO_ITEM Index="12" Name="DO_UnloadStationDoorOpen" BufferOffset="12" Addr="12" Description="" />
|
||||
<DO_ITEM Index="13" Name="DO_RectorADoorClose" BufferOffset="13" Addr="13" Description="" />
|
||||
<DO_ITEM Index="14" Name="DO_RectorADoorOpen" BufferOffset="14" Addr="14" Description="" />
|
||||
<DO_ITEM Index="15" Name="DO_RectorBDoorClose" BufferOffset="15" Addr="15" Description="" />
|
||||
<DO_ITEM Index="16" Name="DO_RectorBDoorOpen" BufferOffset="16" Addr="16" Description="" />
|
||||
<DO_ITEM Index="17" Name="DO_TMToUnloadBanlance" BufferOffset="17" Addr="17" Description="V124" />
|
||||
<DO_ITEM Index="18" Name="DO_VacRobotEstop" BufferOffset="18" Addr="18" Description="" />
|
||||
<DO_ITEM Index="19" Name="DO_VacRobotExtenLLEnable" BufferOffset="19" Addr="19" Description="" />
|
||||
<DO_ITEM Index="20" Name="DO_VacRobotExtendSupplyEnable" BufferOffset="20" Addr="20" Description="" />
|
||||
<DO_ITEM Index="19" Name="DO_VacRobotExtenLoadEnable" BufferOffset="19" Addr="19" Description="" />
|
||||
<DO_ITEM Index="20" Name="DO_VacRobotExtendUnloadEnable" BufferOffset="20" Addr="20" Description="" />
|
||||
<DO_ITEM Index="21" Name="DO_VacRobotExtendPMAEnable" BufferOffset="21" Addr="21" Description="" />
|
||||
<DO_ITEM Index="22" Name="DO_VacRobotExtendPMBEnable" BufferOffset="22" Addr="22" Description="" />
|
||||
<DO_ITEM Index="23" Name="DO_VacRobotExtendBufferEnable" BufferOffset="23" Addr="23" Description="" />
|
||||
<DO_ITEM Index="24" Name="DO_atmRobotExtendSupplyEnable" BufferOffset="24" Addr="24" Description="" />
|
||||
<DO_ITEM Index="25" Name="DO_atmRobotExtendLoaLockLsideEnable" BufferOffset="25" Addr="25" Description="" />
|
||||
<DO_ITEM Index="26" Name="DO_atmRobotExtendLoaLockRsideEnable" BufferOffset="26" Addr="26" Description="" />
|
||||
<DO_ITEM Index="27" Name="DO_LoadLockLsideDoorClose" BufferOffset="27" Addr="27" Description="" />
|
||||
<DO_ITEM Index="28" Name="DO_LoadLockLsideDoorOpen" BufferOffset="28" Addr="28" Description="" />
|
||||
<DO_ITEM Index="47" Name="DO_TMPMABanlance(V70-1)" BufferOffset="47" Addr="47" Description="" />
|
||||
<DO_ITEM Index="48" Name="DO_TMPMBBanlance(V70-2)" BufferOffset="48" Addr="48" Description="" />
|
||||
<DO_ITEM Index="50" Name="DO_GloveBoxLoadwafer" BufferOffset="50" Addr="50" Description="" />
|
||||
<DO_ITEM Index="51" Name="DO_GloveBoxUnLoadwafer" BufferOffset="51" Addr="51" Description="" />
|
||||
<DO_ITEM Index="24" Name="DO_ATMRobotExtendUnloadEnable" BufferOffset="24" Addr="24" Description="" />
|
||||
<DO_ITEM Index="25" Name="DO_ATMRobotExtendLoaLSideEnable" BufferOffset="25" Addr="25" Description="" />
|
||||
<DO_ITEM Index="26" Name="DO_ATMRobotExtendLoaRSideEnable" BufferOffset="26" Addr="26" Description="" />
|
||||
<DO_ITEM Index="27" Name="DO_LoadLSideDoorClose" BufferOffset="27" Addr="27" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="28" Name="DO_LoadLSideDoorOpen" BufferOffset="28" Addr="28" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="29" Name="DO_LoadRSideDoorClose" BufferOffset="29" Addr="29" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="30" Name="DO_LoadRSideDoorOpen" BufferOffset="30" Addr="30" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="31" Name="DO_UnloadSubStationDoorClose" BufferOffset="31" Addr="31" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="32" Name="DO_UnloadSubStationDoorOpen" BufferOffset="32" Addr="32" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="33" Name="DO_BufferStationDoorClose" BufferOffset="33" Addr="33" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="34" Name="DO_BufferStationDoorOpen" BufferOffset="34" Addr="34" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="35" Name="DO_LoadLidLock" BufferOffset="35" Addr="35" Description="" />
|
||||
<DO_ITEM Index="36" Name="DO_LoadLidUnlock" BufferOffset="36" Addr="36" Description="" />
|
||||
<DO_ITEM Index="37" Name="DO_LoadWaferCYClamp" BufferOffset="37" Addr="37" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="38" Name="DO_LoadWaferCYOpen" BufferOffset="38" Addr="38" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="39" Name="DO_LoadTrayCYClamp" BufferOffset="39" Addr="39" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="40" Name="DO_LoadTrayCYOpen" BufferOffset="40" Addr="40" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="43" Name="DO_UnloadStationWaferCYClamp" BufferOffset="43" Addr="43" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="44" Name="DO_UnloadStationWaferCYOpen" BufferOffset="44" Addr="44" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="45" Name="DO_UnloadStationLifterCYUp" BufferOffset="45" Addr="45" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="46" Name="DO_UnloadStationLifterCYDown" BufferOffset="46" Addr="46" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="47" Name="DO_TMToPMABanlance(V70-1)" BufferOffset="47" Addr="47" Description="" />
|
||||
<DO_ITEM Index="48" Name="DO_TMToPMBBanlance(V70-2)" BufferOffset="48" Addr="48" Description="" />
|
||||
|
||||
<DO_ITEM Index="55" Name="DO_TowerGreen" BufferOffset="55" Addr="55" Description="" />
|
||||
<DO_ITEM Index="56" Name="DO_TowerYellow" BufferOffset="56" Addr="56" Description="" />
|
||||
<DO_ITEM Index="57" Name="DO_TowerRed" BufferOffset="57" Addr="57" Description="" />
|
||||
<DO_ITEM Index="58" Name="DO_Buzzer" BufferOffset="58" Addr="58" Description="" />
|
||||
|
||||
<DO_ITEM Index="61" Name="DO_UnloadFastPump" BufferOffset="61" Addr="61" Description="V122" Visible="false"/>
|
||||
<DO_ITEM Index="62" Name="DO_UnloadSlowPump" BufferOffset="62" Addr="62" Description="V123" Visible="false"/>
|
||||
<DO_ITEM Index="64" Name="DO_ReactorAATMTransferReady" BufferOffset="64" Addr="64" Description="" />
|
||||
<DO_ITEM Index="65" Name="DO_ReactorAProcessTransferReady" BufferOffset="65" Addr="65" Description="" />
|
||||
<DO_ITEM Index="66" Name="DO_ReactorBATMTransferReady" BufferOffset="66" Addr="66" Description="" />
|
||||
@ -174,72 +221,67 @@
|
||||
<DO_ITEM Index="72" Name="DO_TMWaferPresenceA" BufferOffset="72" Addr="72" Description="" />
|
||||
<DO_ITEM Index="73" Name="DO_TMWaferPresenceB" BufferOffset="73" Addr="73" Description="" />
|
||||
<DO_ITEM Index="74" Name="DO_TMWaferPresenceBuf" BufferOffset="74" Addr="74" Description="" />
|
||||
<DO_ITEM Index="75" Name="DO_TMWaferPresencePreheat" BufferOffset="75" Addr="75" Description="" />
|
||||
<DO_ITEM Index="75" Name="DO_TMWaferPresenceUnload" BufferOffset="75" Addr="75" Description="" />
|
||||
<DO_ITEM Index="78" Name="DO_ForelineBasePressureReady" BufferOffset="78" Addr="78" Description="" />
|
||||
<DO_ITEM Index="79" Name="DO_TMatATM" BufferOffset="79" Addr="79" Description="" />
|
||||
<DO_ITEM Index="80" Name="DO_LoadLockAtATM" BufferOffset="80" Addr="80" Description="" />
|
||||
<DO_ITEM Index="81" Name="DO_TMUnderVac(Vac)" BufferOffset="81" Addr="81" Description="" />
|
||||
<DO_ITEM Index="82" Name="DO_LoadLockUnderVAC(Vac)" BufferOffset="82" Addr="82" Description="" />
|
||||
<DO_ITEM Index="80" Name="DO_LoadAtATM" BufferOffset="80" Addr="80" Description="" />
|
||||
<DO_ITEM Index="81" Name="DO_TMUnderVac" BufferOffset="81" Addr="81" Description="" />
|
||||
<DO_ITEM Index="82" Name="DO_LoadUnderVAC" BufferOffset="82" Addr="82" Description="" />
|
||||
<DO_ITEM Index="83" Name="DO_TMAtProcessPress" BufferOffset="83" Addr="83" Description="" />
|
||||
<DO_ITEM Index="84" Name="DO_LLAtProcessPress" BufferOffset="84" Addr="84" Description="" />
|
||||
<DO_ITEM Index="85" Name="DO_LoadlockTempReady" BufferOffset="85" Addr="85" Description="" />
|
||||
<DO_ITEM Index="84" Name="DO_LoadAtProcessPress" BufferOffset="84" Addr="84" Description="" />
|
||||
<DO_ITEM Index="85" Name="DO_LoadTempReady" BufferOffset="85" Addr="85" Description="" />
|
||||
<DO_ITEM Index="86" Name="DO_BufferTempReady" BufferOffset="86" Addr="86" Description="" />
|
||||
<DO_ITEM Index="89" Name="DO_TmCyclePurgeRoutineRunning" BufferOffset="89" Addr="89" Description="" />
|
||||
<DO_ITEM Index="90" Name="DO_TmLeakCheckRoutineRunning" BufferOffset="90" Addr="90" Description="" />
|
||||
<DO_ITEM Index="91" Name="DO_TmPumpDownRoutineRunning" BufferOffset="91" Addr="91" Description="" />
|
||||
<DO_ITEM Index="92" Name="DO_TmServoPressRoutineRunning" BufferOffset="92" Addr="92" Description="" />
|
||||
<DO_ITEM Index="93" Name="DO_TmVentUpRoutineRunning" BufferOffset="93" Addr="93" Description="" />
|
||||
<DO_ITEM Index="94" Name="DO_LLCyclePurgeRoutineRunning" BufferOffset="94" Addr="94" Description="" />
|
||||
<DO_ITEM Index="88" Name="DO_TMCyclePurgeRoutineSuccessed" BufferOffset="88" Addr="88" Description="" />
|
||||
<DO_ITEM Index="89" Name="DO_TMCyclePurgeRoutineRunning" BufferOffset="89" Addr="89" Description="" />
|
||||
<DO_ITEM Index="90" Name="DO_TMLeakCheckRoutineRunning" BufferOffset="90" Addr="90" Description="" />
|
||||
<DO_ITEM Index="91" Name="DO_TMPumpDownRoutineRunning" BufferOffset="91" Addr="91" Description="" />
|
||||
<DO_ITEM Index="92" Name="DO_TMServoPressRoutineRunning" BufferOffset="92" Addr="92" Description="" />
|
||||
<DO_ITEM Index="93" Name="DO_TMVentUpRoutineRunning" BufferOffset="93" Addr="93" Description="" />
|
||||
<DO_ITEM Index="94" Name="DO_LoadCyclePurgeRoutineRunning" BufferOffset="94" Addr="94" Description="" />
|
||||
<DO_ITEM Index="95" Name="DO_LoadLeakCheckRoutineRunning" BufferOffset="95" Addr="95" Description="" />
|
||||
<DO_ITEM Index="96" Name="DO_LoadPumpDownRoutineRunning" BufferOffset="96" Addr="96" Description="" />
|
||||
<DO_ITEM Index="97" Name="DO_LoadVentUpRoutineRunning" BufferOffset="97" Addr="97" Description="" />
|
||||
<DO_ITEM Index="98" Name="DO_UnLoadCyclePurgeRoutineRunning" BufferOffset="98" Addr="98" Description="" />
|
||||
<DO_ITEM Index="99" Name="DO_UnLoadLeakCheckRoutineRunning" BufferOffset="99" Addr="99" Description="" />
|
||||
<DO_ITEM Index="100" Name="DO_UnLoadPumpDownRoutineRunning" BufferOffset="100" Addr="100" Description="" />
|
||||
<DO_ITEM Index="101" Name="DO_UnLoadVentUpRoutineRunning" BufferOffset="101" Addr="101" Description="" />
|
||||
<DO_ITEM Index="144" Name="DO_LdRotationServoOn" BufferOffset="144" Addr="144" Description="" />
|
||||
<DO_ITEM Index="145" Name="DO_LdRotationReset" BufferOffset="145" Addr="145" Description="" />
|
||||
<DO_ITEM Index="146" Name="DO_LdRotationJogCW" BufferOffset="146" Addr="146" Description="" />
|
||||
<DO_ITEM Index="147" Name="DO_LdRotationJogCCW" BufferOffset="147" Addr="147" Description="" />
|
||||
<DO_ITEM Index="148" Name="DO_LdRotationStop" BufferOffset="148" Addr="148" Description="" />
|
||||
<DO_ITEM Index="149" Name="DO_LdRotationCCD1Teach" BufferOffset="149" Addr="149" Description="" />
|
||||
<DO_ITEM Index="150" Name="DO_LdRotationCCD2Teach" BufferOffset="150" Addr="150" Description="" />
|
||||
<DO_ITEM Index="151" Name="DO_LdRotationMoveRelativeHome" BufferOffset="151" Addr="151" Description="" />
|
||||
<DO_ITEM Index="152" Name="DO_LdRotationMoveOneCircle" BufferOffset="152" Addr="152" Description="" />
|
||||
<DO_ITEM Index="153" Name="DO_LdRotationMoveCCD1pos" BufferOffset="153" Addr="153" Description="" />
|
||||
<DO_ITEM Index="154" Name="DO_LdRotationMoveCCD2pos" BufferOffset="154" Addr="154" Description="" />
|
||||
<DO_ITEM Index="98" Name="DO_UnLoadCyclePurgeRoutineRunning" BufferOffset="98" Addr="98" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="99" Name="DO_UnLoadLeakCheckRoutineRunning" BufferOffset="99" Addr="99" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="100" Name="DO_UnLoadPumpDownRoutineRunning" BufferOffset="100" Addr="100" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="101" Name="DO_UnLoadVentUpRoutineRunning" BufferOffset="101" Addr="101" Description="" Visible="false"/>
|
||||
|
||||
<DO_ITEM Index="144" Name="DO_LdRotationServoOn" BufferOffset="144" Addr="144" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="145" Name="DO_LdRotationReset" BufferOffset="145" Addr="145" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="146" Name="DO_LdRotationJogCW" BufferOffset="146" Addr="146" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="147" Name="DO_LdRotationJogCCW" BufferOffset="147" Addr="147" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="148" Name="DO_LdRotationStop" BufferOffset="148" Addr="148" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="149" Name="DO_LdRotationCCD1Teah" BufferOffset="149" Addr="149" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="150" Name="DO_LdRotationCCD2Teah" BufferOffset="150" Addr="150" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="151" Name="DO_LdRotationMoveRelativeHome" BufferOffset="151" Addr="151" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="152" Name="DO_LdRotationMoveOneCircle" BufferOffset="152" Addr="152" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="153" Name="DO_LdRotationMoveCCD1Pos" BufferOffset="153" Addr="153" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="154" Name="DO_LdRotationMoveCCD2Pos" BufferOffset="154" Addr="154" Description="" Visible="false"/>
|
||||
</Block>
|
||||
</Dig_Out>
|
||||
<Ana_In>
|
||||
<Block Index="0">
|
||||
<AI_ITEM Index="0" Name="AI_TMPressure1" BufferOffset="0" Addr="0" Description="" />
|
||||
<AI_ITEM Index="1" Name="AI_LoadLockPressure" BufferOffset="1" Addr="1" Description="" />
|
||||
<AI_ITEM Index="2" Name="AI_PMAPressure2" BufferOffset="2" Addr="2" Description="" />
|
||||
<AI_ITEM Index="3" Name="AI_PMBPressure2" BufferOffset="3" Addr="3" Description="" />
|
||||
<AI_ITEM Index="1" Name="AI_LoadPressure" BufferOffset="1" Addr="1" Description="" />
|
||||
<AI_ITEM Index="2" Name="AI_PM1Pressure2" BufferOffset="2" Addr="2" Description="" />
|
||||
<AI_ITEM Index="3" Name="AI_PM2Pressure2" BufferOffset="3" Addr="3" Description="" />
|
||||
<AI_ITEM Index="4" Name="AI_UnloadPressure" BufferOffset="4" Addr="4" Description="" />
|
||||
<AI_ITEM Index="5" Name="AI_UnloadTemp" BufferOffset="5" Addr="5" Description="" />
|
||||
<AI_ITEM Index="6" Name="AI_LoadLockTemp" BufferOffset="6" Addr="6" Description="" />
|
||||
<AI_ITEM Index="7" Name="AI_BufferTemp" BufferOffset="7" Addr="7" Description="" />
|
||||
<AI_ITEM Index="8" Name="AI_MFC60TMChamberFill" BufferOffset="8" Addr="8" Description="" />
|
||||
<AI_ITEM Index="8" Name="AI_M60FlowRead" BufferOffset="8" Addr="8" Description="" />
|
||||
|
||||
<AI_ITEM Index="9" Name="AI_M61FlowRead" BufferOffset="9" Addr="9" Description="" />
|
||||
|
||||
<AI_ITEM Index="13" Name="AI_LdRotationRelativeDegree" BufferOffset="13" Addr="13" Description="" />
|
||||
<AI_ITEM Index="14" Name="AI_LdRotationCCD1Degree" BufferOffset="14" Addr="14" Description="" />
|
||||
<AI_ITEM Index="15" Name="AI_LdRotationCCD2Degree" BufferOffset="15" Addr="15" Description="" />
|
||||
<AI_ITEM Index="16" Name="AI_Temp0" BufferOffset="16" Addr="16" Description="" />
|
||||
<AI_ITEM Index="17" Name="AI_Temp1" BufferOffset="17" Addr="17" Description="" />
|
||||
<AI_ITEM Index="18" Name="AI_Temp2" BufferOffset="18" Addr="18" Description="" />
|
||||
<AI_ITEM Index="19" Name="AI_Temp3" BufferOffset="19" Addr="19" Description="" />
|
||||
<AI_ITEM Index="20" Name="AI_RunVentPT1" BufferOffset="20" Addr="20" Description="" />
|
||||
<AI_ITEM Index="21" Name="AI_RunVentPT2" BufferOffset="21" Addr="21" Description="" />
|
||||
<AI_ITEM Index="22" Name="AI_RunVentPT3" BufferOffset="22" Addr="22" Description="" />
|
||||
<AI_ITEM Index="23" Name="AI_RunVentPT4" BufferOffset="23" Addr="23" Description="" />
|
||||
<AI_ITEM Index="24" Name="AI_RunVentPT5" BufferOffset="24" Addr="24" Description="" />
|
||||
</Block>
|
||||
</Ana_In>
|
||||
<Ana_Out>
|
||||
<Block Index="0">
|
||||
<AO_ITEM Index="8" Name="AO_M60FlowSetpoint" BufferOffset="8" Addr="8" Description="" />
|
||||
<AO_ITEM Index="9" Name="AO_M61FlowSetpoint" BufferOffset="9" Addr="9" Description="" />
|
||||
<AO_ITEM Index="10" Name="AO_BlingHZ" BufferOffset="10" Addr="10" Description="" />
|
||||
<AO_ITEM Index="10" Name="AO_LdRotationHomeOffset" BufferOffset="10" Addr="10" Description="" Visible="false"/>
|
||||
<AO_ITEM Index="11" Name="AO_HomeOffsetDegreeLU" BufferOffset="11" Addr="11" Description="" />
|
||||
<AO_ITEM Index="12" Name="AO_LdRotationCCD1Degree" BufferOffset="12" Addr="12" Description="" />
|
||||
<AO_ITEM Index="13" Name="AO_LdRotationSpeed" BufferOffset="13" Addr="13" Description="" />
|
||||
|
||||
@ -51,7 +51,7 @@ using System.Windows;
|
||||
// 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
|
||||
// 方法是按如下所示使用“*”: :
|
||||
|
||||
[assembly: AssemblyVersion("1.1.7.60610")]
|
||||
[assembly: AssemblyVersion("1.1.0.60731")]
|
||||
[assembly: AssemblyInformationalVersion("MoS2（无EFEM）")]
|
||||
|
||||
|
||||
|
||||
@ -1,11 +1,11 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<DeviceModelDefine type="GaN" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
|
||||
<IoValveGroup classType="MECF.Framework.Simulator.Core.SimulatorIoDefault" assembly="MECF.Framework.Simulator.Core">
|
||||
<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
|
||||
<!--<IoValveGroup classType="MECF.Framework.Simulator.Core.SimulatorIoDefault" assembly="MECF.Framework.Simulator.Core">
|
||||
<IoDefaults id="IoDefault" display="" schematicId="" unit="">
|
||||
<!--<IODefault type="DI" ioName="DI_VCEATMRobotEnableExtend" default="true"/>
|
||||
--><!--<IODefault type="DI" ioName="DI_VCEATMRobotEnableExtend" default="true"/>
|
||||
<IODefault type="DI" ioName="DI_VCEBTMRobotEnableExtend" default="true"/>
|
||||
<IODefault type="AI" ioName="AI_TMChamberPressure" default="1024"/>
|
||||
<IODefault type="AI" ioName="AI_LoadVCEAChamberPressure" default="1024"/>-->
|
||||
<IODefault type="AI" ioName="AI_LoadVCEAChamberPressure" default="1024"/>--><!--
|
||||
|
||||
|
||||
</IoDefaults>
|
||||
@ -14,7 +14,7 @@
|
||||
<AI_AORandomGroup classType="MECF.Framework.Simulator.Core.SimulatorAI_AORandom" assembly="MECF.Framework.Simulator.Core">
|
||||
<AI_AORandoms id="AI_AORandom" display="" schematicId="" unit="" >
|
||||
|
||||
<!--<Random type="AI" ioName="AI_TMChamberPressure" baseValue="1024" />-->
|
||||
--><!--<Random type="AI" ioName="AI_TMChamberPressure" baseValue="1024" />--><!--
|
||||
|
||||
|
||||
</AI_AORandoms>
|
||||
@ -23,35 +23,29 @@
|
||||
<IoDO_DIGroup classType="MECF.Framework.Simulator.Core.SimulatorIoDO_DI" assembly="MECF.Framework.Simulator.Core">
|
||||
<IoDO_DIs id="IoDO_DI" display="" schematicId="" unit="">
|
||||
|
||||
<!--<DO_DI doDefault="false" do="DO_PMASlitValveOpen" di="DI_PMASlitValveOpen" />-->
|
||||
--><!--<DO_DI doDefault="false" do="DO_PMASlitValveOpen" di="DI_PMASlitValveOpen" />--><!--
|
||||
|
||||
|
||||
</IoDO_DIs>
|
||||
</IoDO_DIGroup>
|
||||
</IoDO_DIGroup>-->
|
||||
|
||||
<IoValveGroup classType="MECF.Framework.Simulator.Core.SimulatorIoValve" assembly="MECF.Framework.Simulator.Core">
|
||||
<!--<IoValveGroup classType="MECF.Framework.Simulator.Core.SimulatorIoValve" assembly="MECF.Framework.Simulator.Core">
|
||||
<IoValves id="IoValves" display="" schematicId="" unit="">
|
||||
<IoValve id="BalanceValve" module="PM1" display="V96_1" schematicId="BalanceValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMPMABanlanceFB" doOpen="DO_TMPMABanlance"/>
|
||||
<IoValve id="BalanceValve" module="PM2" display="V96_2" schematicId="BalanceValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMPMBBanlanceFB" doOpen="DO_TMPMBBanlance"/>
|
||||
<IoValve id="FastPumpValve" module="TM" display="V101" schematicId="FastPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMFastPumpValveFB" doOpen="DO_TMFastPumpValve"/>
|
||||
<IoValve id="SlowPumpValve" module="TM" display="V102" schematicId="SlowPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMSlowPumpValveFB" doOpen="DO_TMSlowPumpValve"/>
|
||||
<IoValve id="VentValve" module="TM" display="V107" schematicId="VentValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMVentValveFB" doOpen="DO_TMVentValve"/>
|
||||
<IoValve id="FastPumpValve" module="LoadVCEA" display="V103" schematicId="FastPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEAFastPumpValveFB" doOpen="DO_LoadVCEAFastPumpValve"/>
|
||||
<IoValve id="SlowPumpValve" module="LoadVCEA" display="V104" schematicId="SlowPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEASlowPumpValveFB" doOpen="DO_LoadVCEASlowPumpValve"/>
|
||||
<IoValve id="VentValve" module="LoadVCEA" display="V108" schematicId="VentValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEAVentValveFB" doOpen="DO_LoadVCEAVentValve"/>
|
||||
<IoValve id="BalanceValve" module="LoadVCEA" display="V109" schematicId="BalanceValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEABalanceValveFB" doOpen="DO_LoadVCEABalanceValve"/>
|
||||
<IoValve id="FastPumpValve" module="LoadVCEB" display="V105" schematicId="FastPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEBFastPumpValveFB" doOpen="DO_LoadVCEBFastPumpValve"/>
|
||||
<IoValve id="SlowPumpValve" module="LoadVCEB" display="V106" schematicId="SlowPumpValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEBSlowPumpValveFB" doOpen="DO_LoadVCEBSlowPumpValve"/>
|
||||
<IoValve id="VentValve" module="LoadVCEB" display="V111" schematicId="VentValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEBVentValveFB" doOpen="DO_LoadVCEBVentValve"/>
|
||||
<IoValve id="BalanceValve" module="LoadVCEB" display="V112" schematicId="BalanceValve" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVCEBBalanceValveFB" doOpen="DO_LoadVCEBBalanceValve"/>
|
||||
<IoValve id="LoadSlowPump" module="TM" display="V84" schematicId="LoadSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadSlowPumpFB" doOpen="DO_LoadSlowPump" />
|
||||
<IoValve id="LoadFastPump" module="TM" display="V83" schematicId="LoadFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadFastPumpFB" doOpen="DO_LoadFastPump" />
|
||||
<IoValve id="TMSlowPump" module="TM" display="V82" schematicId="TMSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMSlowPumpFB" doOpen="DO_TMSlowPump" />
|
||||
<IoValve id="TMFastPump" module="TM" display="V81" schematicId="TMFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMFastPumpFB" doOpen="DO_TMFastPump" />
|
||||
<IoValve id="UnLoadSlowPump" module="TM" display="V123" schematicId="UnLoadSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadSlowPumpFB" doOpen="DO_UnloadSlowPump" />
|
||||
<IoValve id="UnLoadFastPump" module="TM" display="V122" schematicId="UnLoadFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadFastPumpFB" doOpen="DO_UnloadFastPump" />
|
||||
<IoValve id="BufferVent" module="TM" display="V80" schematicId="BufferVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_BufferVentFB" doOpen="DO_BufferVent" />
|
||||
<IoValve id="LoadVent" module="TM" display="V79" schematicId="LoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVentFB" doOpen="DO_LoadVent" />
|
||||
<IoValve id="TMVent" module="TM" display="V77" schematicId="TMVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMVentFB" doOpen="DO_TMVent" />
|
||||
<IoValve id="UnLoadVent" module="TM" display="V78" schematicId="UnLoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadVentFB" doOpen="DO_UnloadVent" />
|
||||
<IoValve id="TMLoadBanlance" module="TM" display="V85" schematicId="TMLoadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMLoadBanlanceFB" doOpen="DO_TMLoadBanlance" />
|
||||
<IoValve id="TMUnLoadBanlance" module="TM" display="V124" schematicId="TMToUnloadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_TMToUnloadBanlance" />
|
||||
</IoValves>
|
||||
</IoValveGroup>
|
||||
</IoValveGroup>-->
|
||||
|
||||
<IoMfcGroup classType="MECF.Framework.Simulator.Core.SimulatorMFC" assembly="MECF.Framework.Simulator.Core">
|
||||
<IoMFCs id="IoMFCs" display="" schematicId="" unit="">
|
||||
<IoMfc id="Mfc96" module="TM" display="Mfc96" schematicId="Mfc96" unit="sccm" aiActMode="AI_M96ActMode" aoSetMode="AO_M96CtrlMode" aiFlow="AI_M96" aoFlow="AO_M96" scBasePath="TM.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC096CommunicationAlarm" AlarmText="Alarm106 MFC06 CommunicationAlarm[DI-356]" />
|
||||
</IoMFCs>
|
||||
</IoMfcGroup>
|
||||
|
||||
|
||||
</DeviceModelDefine>
|
||||
@ -16,7 +16,7 @@
|
||||
<DI_ITEM Index="10" Name="DI_BufferStationDoorClosed" BufferOffset="10" Addr="10" Description="" />
|
||||
<DI_ITEM Index="11" Name="DI_BufferStationDoorOpened" BufferOffset="11" Addr="11" Description="" />
|
||||
<DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description="" />
|
||||
|
||||
<DI_ITEM Index="13" Name="DI_LoadLidClosed" BufferOffset="13" Addr="13" Description="" />
|
||||
<DI_ITEM Index="14" Name="DI_UnloadStationLidClosed" BufferOffset="14" Addr="14" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="15" Name="DI_BufferStationLidClosed" BufferOffset="15" Addr="15" Description="" />
|
||||
<DI_ITEM Index="22" Name="DI_LoadLockGateClosed" BufferOffset="22" Addr="22" Description="" />
|
||||
@ -25,7 +25,7 @@
|
||||
<DI_ITEM Index="26" Name="DI_LoadRSideDoorClosed" BufferOffset="26" Addr="26" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" />
|
||||
|
||||
<DI_ITEM Index="32" Name="DI_LoadTrayPresence" BufferOffset="32" Addr="32" Description="" />
|
||||
<DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" Visible="false"/>
|
||||
@ -37,7 +37,6 @@
|
||||
<DI_ITEM Index="41" Name="DI_UnloadStationGateINTK" BufferOffset="41" Addr="41" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="43" Name="DI_TMDryPump1Alarm" BufferOffset="43" Addr="43" Description="" />
|
||||
<DI_ITEM Index="44" Name="DI_TMDryPump1Warning" BufferOffset="44" Addr="44" Description="" />
|
||||
<DI_ITEM Index="47" Name="DI_LoadLidClosed" BufferOffset="47" Addr="47" Description="" />
|
||||
<DI_ITEM Index="49" Name="DI_TMDryPump1Running" BufferOffset="49" Addr="49" Description="" />
|
||||
<DI_ITEM Index="50" Name="DI_WaferCassetLeftInch6" BufferOffset="50" Addr="50" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="52" Name="DI_WaferCassetRightInch6" BufferOffset="52" Addr="52" Description="" Visible="false"/>
|
||||
@ -45,9 +44,6 @@
|
||||
<DI_ITEM Index="55" Name="DI_WaferCassetRightConvexSensor" BufferOffset="55" Addr="55" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="56" Name="DI_TrayCassetInch6" BufferOffset="56" Addr="56" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="58" Name="DI_TrayCassetConvexSensor" BufferOffset="58" Addr="58" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="59" Name="DI_LoadLidOpen" BufferOffset="59" Addr="59" Description=""/>
|
||||
<DI_ITEM Index="60" Name="DI_LoadLidClose" BufferOffset="60" Addr="60" Description=""/>
|
||||
<DI_ITEM Index="61" Name="DI_LoaderWaferPresence" BufferOffset="61" Addr="61" Description=""/>
|
||||
<DI_ITEM Index="62" Name="DI_LoadLidLockedR" BufferOffset="62" Addr="62" Description=""/>
|
||||
<DI_ITEM Index="63" Name="DI_LoadLidUnlockedR" BufferOffset="63" Addr="63" Description=""/>
|
||||
<DI_ITEM Index="64" Name="DI_LoadLidLocked" BufferOffset="64" Addr="64" Description=""/>
|
||||
@ -60,9 +56,6 @@
|
||||
<DI_ITEM Index="73" Name="DI_UnloadStationWaferCYOpened" BufferOffset="73" Addr="73" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="74" Name="DI_UnloadStationLifterCYUp" BufferOffset="74" Addr="74" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="75" Name="DI_UnloadStationLifterCYDown" BufferOffset="75" Addr="75" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="78" Name="DI_TMDryPump2Alarm" BufferOffset="78" Addr="78" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="79" Name="DI_TMDryPump2Warning" BufferOffset="79" Addr="79" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="86" Name="DI_TMDryPump2Running" BufferOffset="86" Addr="86" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="88" Name="DI_TMPressure1ATM" BufferOffset="88" Addr="88" Description="" />
|
||||
<DI_ITEM Index="89" Name="DI_TMPressure1VAC" BufferOffset="89" Addr="89" Description="" />
|
||||
<DI_ITEM Index="90" Name="DI_LoadPressureATM" BufferOffset="90" Addr="90" Description="" />
|
||||
@ -116,8 +109,8 @@
|
||||
<DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" Visible="false"/>
|
||||
<DI_ITEM Index="143" Name="DI_TMToPMABanlanceFB" BufferOffset="143" Addr="143" Description="" />
|
||||
<DI_ITEM Index="144" Name="DI_TMToPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" />
|
||||
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122"/>
|
||||
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123"/>
|
||||
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122" Visible="false"/>
|
||||
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123" Visible="false"/>
|
||||
<DI_ITEM Index="160" Name="DI_ReactorAATMTransferReadyFB" BufferOffset="160" Addr="160" Description="" />
|
||||
<DI_ITEM Index="161" Name="DI_ReactorAProcessTransferReadyFB" BufferOffset="161" Addr="161" Description="" />
|
||||
<DI_ITEM Index="162" Name="DI_ReactorBATMTransferReadyFB" BufferOffset="162" Addr="162" Description="" />
|
||||
@ -174,8 +167,8 @@
|
||||
<DO_ITEM Index="8" Name="DO_TMLoadBanlance" BufferOffset="8" Addr="8" Description="V85" />
|
||||
<DO_ITEM Index="9" Name="DO_LoadDoorClose" BufferOffset="9" Addr="9" Description="" />
|
||||
<DO_ITEM Index="10" Name="DO_LoadDoorOpen" BufferOffset="10" Addr="10" Description="" />
|
||||
<DO_ITEM Index="11" Name="DO_LoadLidOpen" BufferOffset="11" Addr="11" Description="" />
|
||||
<DO_ITEM Index="12" Name="DO_LoadLidClose" BufferOffset="12" Addr="12" Description="" />
|
||||
<DO_ITEM Index="11" Name="DO_UnloadStationDoorClose" BufferOffset="11" Addr="11" Description="" />
|
||||
<DO_ITEM Index="12" Name="DO_UnloadStationDoorOpen" BufferOffset="12" Addr="12" Description="" />
|
||||
<DO_ITEM Index="13" Name="DO_RectorADoorClose" BufferOffset="13" Addr="13" Description="" />
|
||||
<DO_ITEM Index="14" Name="DO_RectorADoorOpen" BufferOffset="14" Addr="14" Description="" />
|
||||
<DO_ITEM Index="15" Name="DO_RectorBDoorClose" BufferOffset="15" Addr="15" Description="" />
|
||||
@ -210,8 +203,6 @@
|
||||
<DO_ITEM Index="46" Name="DO_UnloadStationLifterCYDown" BufferOffset="46" Addr="46" Description="" Visible="false"/>
|
||||
<DO_ITEM Index="47" Name="DO_TMToPMABanlance(V70-1)" BufferOffset="47" Addr="47" Description="" />
|
||||
<DO_ITEM Index="48" Name="DO_TMToPMBBanlance(V70-2)" BufferOffset="48" Addr="48" Description="" />
|
||||
<DO_ITEM Index="49" Name="DO_BufferStationBDoorClose" BufferOffset="49" Addr="49" Description="" />
|
||||
<DO_ITEM Index="50" Name="DO_BufferStationBDoorOpen" BufferOffset="50" Addr="50" Description="" />
|
||||
|
||||
<DO_ITEM Index="55" Name="DO_TowerGreen" BufferOffset="55" Addr="55" Description="" />
|
||||
<DO_ITEM Index="56" Name="DO_TowerYellow" BufferOffset="56" Addr="56" Description="" />
|
||||
|
||||
@ -37,8 +37,8 @@ namespace SicSimulator.Instances
|
||||
WcfServiceManager.Instance.Initialize(new Type[] { typeof(SimulatorAdsPlcService) });
|
||||
|
||||
Singleton<SimulatorDeviceManager>.Instance.Initialize(PathManager.GetCfgDir() + "DevicePM.xml", "Sic", ModuleName.PM1, "PM1");
|
||||
//Singleton<SimulatorDeviceManager>.Instance.Initialize(PathManager.GetCfgDir() + "DevicePM.xml", "GaN", ModuleName.PM2, "PM2");
|
||||
//Singleton<SimulatorDeviceManager>.Instance.Initialize(PathManager.GetCfgDir() + "DeviceTM.xml", "GaN", ModuleName.TM, "TM");
|
||||
//Singleton<SimulatorDeviceManager>.Instance.Initialize(PathManager.GetCfgDir() + "DevicePM.xml", "Sic", ModuleName.PM2, "PM2");
|
||||
Singleton<SimulatorDeviceManager>.Instance.Initialize(PathManager.GetCfgDir() + "DeviceTM.xml", "Sic", ModuleName.TM, "TM");
|
||||
|
||||
_thread = new PeriodicJob(200, OnMonitor, nameof(SimulatorSystem), true);
|
||||
}
|
||||
|
||||
File diff suppressed because it is too large
Load Diff
@ -136,7 +136,18 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
}
|
||||
}
|
||||
|
||||
|
||||
public FoupDoorState UnLoadDoorState
|
||||
{
|
||||
get
|
||||
{
|
||||
{
|
||||
if (UnLoadDoorOpenFeedback && !UnLoadDoorCloseFeedback) return FoupDoorState.Open;
|
||||
if (!UnLoadDoorOpenFeedback && UnLoadDoorCloseFeedback) return FoupDoorState.Close;
|
||||
}
|
||||
|
||||
return FoupDoorState.Unknown;
|
||||
}
|
||||
}
|
||||
|
||||
|
||||
|
||||
@ -283,7 +294,7 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
}
|
||||
|
||||
//private List<string> _modulesSlitValve = new List<string>() { "PM1", "PM2", "LoadLock", "UnLoad", "Buffer" };
|
||||
private List<string> _modulesSlitValve = new List<string>() { "PM1", "PM2", "LoadLock"};
|
||||
private List<string> _modulesSlitValve = new List<string>() { "PM1", "PM2", "LoadLock" };
|
||||
public List<string> ModulesSlitValve
|
||||
{
|
||||
get { return _modulesSlitValve; }
|
||||
@ -300,7 +311,7 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
_slitValveSelectedModule = value;
|
||||
NotifyOfPropertyChange("SlitValveSelectedModule");
|
||||
|
||||
|
||||
|
||||
}
|
||||
}
|
||||
|
||||
@ -427,7 +438,7 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
public AITValveData TMPMBBanlance { get; set; }
|
||||
|
||||
[Subscription("TM.TMPump1.DeviceData")]
|
||||
public AITPumpData PumpData1 { get; set; }
|
||||
public AITPumpData PumpData { get; set; }
|
||||
|
||||
[Subscription("TM.TMPump2.DeviceData")]
|
||||
public AITPumpData PumpData2 { get; set; }
|
||||
@ -435,10 +446,10 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
[Subscription("TM.LLTrayPresence.DeviceData")]
|
||||
public AITSensorData LLTrayPresence { get; set; }
|
||||
|
||||
[Subscription("LoadLock.LoadLidLock.DownSensor")]
|
||||
[Subscription("LoadLock.LoadLidLock.UpSensor")]
|
||||
public bool LoadLockSensor { get; set; }
|
||||
|
||||
[Subscription("LoadLock.LoadLidLock.UpSensor")]
|
||||
[Subscription("LoadLock.LoadLidLock.DownSensor")]
|
||||
public bool LoadUnLockSensor { get; set; }
|
||||
|
||||
|
||||
@ -449,7 +460,7 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
|
||||
//public bool IsBufferDoorOpen => BufferDoorState == FoupDoorState.Open ? true : false;
|
||||
public bool IsBufferDoorOpen => true;
|
||||
public bool IsUnLoadDoorOpen => true ;
|
||||
public bool IsUnLoadDoorOpen => UnLoadDoorState == FoupDoorState.Open ? true : false;
|
||||
public bool IsPM1DoorOpen => PM1DoorState == FoupDoorState.Open ? true : false;
|
||||
public bool IsPM2DoorOpen => PM2DoorState == FoupDoorState.Open ? true : false;
|
||||
|
||||
@ -550,7 +561,7 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
public double V84MoveSpeed2 => LLSlowRough.Feedback ? movespeed2 : 0;
|
||||
public double V701MoveSpeed => TMPMABanlance.Feedback ? movespeed : 0;
|
||||
public double V701MoveSpeed2 => TMPMABanlance.Feedback ? movespeed2 : 0;
|
||||
public double V702MoveSpeed => TMPMBBanlance.Feedback ? movespeed : 0;
|
||||
public double V702MoveSpeed => TMPMBBanlance.Feedback ? movespeed : 0;
|
||||
public double V702MoveSpeed2 => TMPMBBanlance.Feedback ? movespeed2 : 0;
|
||||
public double V85MoveSpeed => TMLoadBanlance.Feedback ? movespeed : 0;
|
||||
public double V85MoveSpeed2 => TMLoadBanlance.Feedback ? movespeed2 : 0;
|
||||
@ -638,7 +649,7 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
|
||||
public void TMRobot_Pick()
|
||||
{
|
||||
if (PickSelectedModule != null )
|
||||
if (PickSelectedModule != null)
|
||||
{
|
||||
if (PickSelectedModule == "Buffer.01")
|
||||
{
|
||||
@ -661,7 +672,7 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
|
||||
public void TMRobot_Place()
|
||||
{
|
||||
if (PickSelectedModule != null )
|
||||
if (PickSelectedModule != null)
|
||||
{
|
||||
if (PickSelectedModule == "Buffer.01")
|
||||
{
|
||||
@ -675,7 +686,7 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
{
|
||||
TMProvider.Instance.TMRobot_Place("Buffer", 2, 0);
|
||||
}
|
||||
else
|
||||
else
|
||||
{
|
||||
TMProvider.Instance.TMRobot_Place(PickSelectedModule, 0, 0);
|
||||
}
|
||||
@ -918,9 +929,11 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
#endregion
|
||||
|
||||
#region OP
|
||||
public bool IsPmProcess => StatusPM1 == "Process" || StatusPM2 == "Process";
|
||||
|
||||
public void Reset(string module)
|
||||
{
|
||||
if(module =="EFEM")
|
||||
if (module == "EFEM")
|
||||
{
|
||||
InvokeClient.Instance.Service.DoOperation($"{module}.Reset");
|
||||
}
|
||||
@ -934,7 +947,7 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
}
|
||||
public void Home(string module)
|
||||
{
|
||||
if(module == "EFEM")
|
||||
if (module == "EFEM")
|
||||
{
|
||||
InvokeClient.Instance.Service.DoOperation($"{module}.Home");
|
||||
}
|
||||
@ -951,7 +964,7 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
{
|
||||
//TM Vent 时需弹窗提醒Buffer腔温度,提示用户小心Buffer腔开盖烫伤
|
||||
|
||||
if(module == "TM")
|
||||
if (module == "TM")
|
||||
{
|
||||
if (BufferTempPV >= (double)QueryDataClient.Instance.Service.GetConfig("Buffer.TMVentBufferTempMax"))
|
||||
{
|
||||
@ -1035,14 +1048,14 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
{
|
||||
TMProvider.Instance.OpenSlitValve(module);
|
||||
}
|
||||
|
||||
|
||||
public void CloseSlitValve(string module)
|
||||
{
|
||||
TMProvider.Instance.CloseSlitValve(module);
|
||||
}
|
||||
public void Abort(string module)
|
||||
{
|
||||
if(module == "EFEM")
|
||||
if (module == "EFEM")
|
||||
{
|
||||
InvokeClient.Instance.Service.DoOperation($"{module}.Abort");
|
||||
}
|
||||
@ -1050,7 +1063,7 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
{
|
||||
TMProvider.Instance.Abort(module);
|
||||
}
|
||||
|
||||
|
||||
}
|
||||
public void PrepareTransfer(string module, string type)
|
||||
{
|
||||
@ -1081,11 +1094,11 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
|
||||
public void SetBufferTempTargetSP(int tempSP)
|
||||
{
|
||||
InvokeClient.Instance.Service.DoOperation("TM.P116PIDTC.WriteTargetSP",tempSP);
|
||||
InvokeClient.Instance.Service.DoOperation("TM.P116PIDTC.WriteTargetSP", tempSP);
|
||||
}
|
||||
public void SetBufferTempAM(int iAMValue)
|
||||
{
|
||||
InvokeClient.Instance.Service.DoOperation($"TM.P116PIDTC.WriteAM",iAMValue);
|
||||
InvokeClient.Instance.Service.DoOperation($"TM.P116PIDTC.WriteAM", iAMValue);
|
||||
}
|
||||
|
||||
public void Group(string module)
|
||||
@ -1105,12 +1118,12 @@ namespace SicUI.Client.Models.Platform.TM
|
||||
|
||||
public void LoadLidLock()
|
||||
{
|
||||
InvokeClient.Instance.Service.DoOperation($"LoadLock.LoadLidLock.MoveDown");
|
||||
InvokeClient.Instance.Service.DoOperation($"LoadLock.LoadLidLock.MoveUp");
|
||||
}
|
||||
|
||||
public void LoadLidUnlock()
|
||||
{
|
||||
InvokeClient.Instance.Service.DoOperation($"LoadLock.LoadLidLock.MoveUp");
|
||||
InvokeClient.Instance.Service.DoOperation($"LoadLock.LoadLidLock.MoveDown");
|
||||
}
|
||||
|
||||
|
||||
|
||||
@ -55,6 +55,6 @@ using System.Windows;
|
||||
// by using the '*' as shown below:
|
||||
|
||||
|
||||
[assembly: AssemblyVersion("1.1.7.60610")]
|
||||
[assembly: AssemblyVersion("1.1.0.60731")]
|
||||
[assembly: AssemblyInformationalVersion("MoS2（无EFEM）")]
|
||||
|
||||
|
||||
@ -1,7 +1,7 @@
|
||||
|
||||
Microsoft Visual Studio Solution File, Format Version 12.00
|
||||
# Visual Studio Version 18
|
||||
VisualStudioVersion = 18.7.11919.86 stable
|
||||
VisualStudioVersion = 18.7.11919.86
|
||||
MinimumVisualStudioVersion = 10.0.40219.1
|
||||
Project("{2150E333-8FDC-42A3-9474-1A3956D46DE8}") = "App", "App", "{237823DE-69DB-4758-8DDC-07B782E916FA}"
|
||||
EndProject
|
||||
@ -65,6 +65,7 @@ Global
|
||||
{C842F167-DB8E-4827-ACDD-74215AF5100A}.Release|x86.ActiveCfg = Release|x86
|
||||
{C842F167-DB8E-4827-ACDD-74215AF5100A}.Release|x86.Build.0 = Release|x86
|
||||
{FDF5BB48-689B-4B88-BABC-110F3DC07C67}.Debug|Any CPU.ActiveCfg = Debug|Any CPU
|
||||
{FDF5BB48-689B-4B88-BABC-110F3DC07C67}.Debug|Any CPU.Build.0 = Debug|Any CPU
|
||||
{FDF5BB48-689B-4B88-BABC-110F3DC07C67}.Debug|x86.ActiveCfg = Debug|Any CPU
|
||||
{FDF5BB48-689B-4B88-BABC-110F3DC07C67}.Debug|x86.Build.0 = Debug|Any CPU
|
||||
{FDF5BB48-689B-4B88-BABC-110F3DC07C67}.Release|Any CPU.ActiveCfg = Release|Any CPU
|
||||
|
||||
Loading…
Reference in New Issue
Block a user