|
|
|
@ -72,7 +72,11 @@
|
|
|
|
</IoHeats>
|
|
|
|
</IoHeats>
|
|
|
|
|
|
|
|
|
|
|
|
<IoThrottleValves classType="Aitex.Core.RT.Device.Devices.IoThrottleValve2" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
|
|
<IoThrottleValves classType="Aitex.Core.RT.Device.Devices.IoThrottleValve2" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
|
|
<IoThrottleValve id="TV" display="TV" schematicId="TV" unit="mbar" scBasePath="PM.{module}" modeValuePressure="5" modeValuePosition="2" modeValueClose="3" modeValueOpen="4" aioType="float" aiStatus="AI_ValveMode" aiPositionFeedback="AI_ActualPositon" aiPressureFeedback="AI_ActualPressure" aoPressureMode="AO_ValveModeSetpoint" aoPositionSetPoint="AO_SetpointPositon" aoPressureSetPoint="AO_SetpointPressure" doTVValveEnable="DO_TVEnable" doTVReset="DO_TVReset" diTVValveEnable="" />
|
|
|
|
<IoThrottleValve id="TV" display="TV" schematicId="TV" unit="mbar" scBasePath="PM.{module}" modeValuePressure="5" modeValuePosition="2" modeValueClose="3" modeValueOpen="4" aioType="float"
|
|
|
|
|
|
|
|
aiStatus="AI_ValveMode" aiPositionFeedback="AI_ActualPositon" aiPressureFeedback="AI_ActualPressure"
|
|
|
|
|
|
|
|
aoPressureMode="AO_ValveModeSetpoint" aoPositionSetPoint="AO_SetpointPositon" aoPressureSetPoint="AO_SetpointPressure"
|
|
|
|
|
|
|
|
doTVValveEnable="DO_TVEnable" doTVReset="DO_TVReset"
|
|
|
|
|
|
|
|
diTVValveEnable="" />
|
|
|
|
</IoThrottleValves>
|
|
|
|
</IoThrottleValves>
|
|
|
|
|
|
|
|
|
|
|
|
<IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
|
|
<IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
|
|
@ -407,15 +411,18 @@
|
|
|
|
<DoSensor id="CleanRoutineSucceed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_CleanRoutineSuscessed" infoText="" warningText="" alarmText="" />
|
|
|
|
<DoSensor id="CleanRoutineSucceed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_CleanRoutineSuscessed" infoText="" warningText="" alarmText="" />
|
|
|
|
</DoSensors>
|
|
|
|
</DoSensors>
|
|
|
|
|
|
|
|
|
|
|
|
<!--<IoSensors classType="Aitex.Core.RT.Device.Devices.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
|
|
<IoSensors classType="Aitex.Core.RT.Device.Devices.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
|
|
<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamCabDoorClosed" infoText="" warningText="Warning1 Chamber Cab Door Not Closed [DI-3]" alarmText="" />
|
|
|
|
<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMGasDetectorSW" infoText="" warningText="Warning1 PMGasDetectorFault1 [DI-1]" alarmText="" />
|
|
|
|
|
|
|
|
<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBGasDetectorSW" infoText="" warningText="Warning2 GBGasDetectorFault [DI-2]" alarmText="" />
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamCabDoorClosed" infoText="" warningText="Warning3 Chamber Cab Door Not Closed [DI-3]" alarmText="" />
|
|
|
|
<IoSensor id="SensorDORPressVacSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressVacSW" infoText="Information2 DOR Press Vac [DI-6]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorDORPressVacSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressVacSW" infoText="Information2 DOR Press Vac [DI-6]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressATMSW" infoText="" warningText="Warning2 DOR Press ATM [DI-7]" alarmText="" />
|
|
|
|
<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressATMSW" infoText="" warningText="Warning4 DOR Press ATM [DI-7]" alarmText="" />
|
|
|
|
<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText="Warning3 Gas Box Door Not Closed [DI-33]" alarmText="" />
|
|
|
|
<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText="Warning5 Gas Box Door Not Closed [DI-33]" alarmText="" />
|
|
|
|
<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Warning4 GasPipeTempCtrl.Alarm [DI-35]" alarmText="" />
|
|
|
|
<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Warning6 GasPipeTempCtrl.Alarm [DI-35]" alarmText="" />
|
|
|
|
<IoSensor id="SensorSpare2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare2FlowSW" infoText="" warningText="Warning5 Spare2 Flow Low -U13 [DI-47]" alarmText="" DisInServiceMode="true"/>
|
|
|
|
<IoSensor id="SensorSpare2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare2FlowSW" infoText="" warningText="Warning7 Spare2 Flow Low -U13 [DI-47]" alarmText="" DisInServiceMode="true"/>
|
|
|
|
<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText="Warning6 ReactorWaterLeak [DI-48]" alarmText="" />
|
|
|
|
<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText="Warning8 ReactorWaterLeak [DI-48]" alarmText="" />
|
|
|
|
<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText="Warning7 Gas Box Water Leak [DI-60]" alarmText="" />
|
|
|
|
<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText="Warning9 Gas Box Water Leak [DI-60]" alarmText="" />
|
|
|
|
<IoSensor id="SensorShutterUpLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterUpLimitSW" infoText="" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorShutterUpLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterUpLimitSW" infoText="" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorShutterDownLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterDownLimitSW" infoText="" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorShutterDownLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterDownLimitSW" infoText="" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorDryPump1Warning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Warning" infoText="" warningText="Warning10 DryPump1 Warning [DI-67]" alarmText="" />
|
|
|
|
<IoSensor id="SensorDryPump1Warning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Warning" infoText="" warningText="Warning10 DryPump1 Warning [DI-67]" alarmText="" />
|
|
|
|
@ -585,12 +592,12 @@
|
|
|
|
<IoSensor id="SensorMiddleLidTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidTighten" infoText="Information29 Middle.Lid.Tighten[DI-119]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorMiddleLidTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidTighten" infoText="Information29 Middle.Lid.Tighten[DI-119]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorMiddleLidSwingLock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingLock" infoText="Information30 Middle.Lid.Swing.Lock[DI-121]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorMiddleLidSwingLock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingLock" infoText="Information30 Middle.Lid.Swing.Lock[DI-121]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorMiddleLidSwingUnlock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingUnlock" infoText="Information31 Middle.Lid.Swing.Unlock[DI-122]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorMiddleLidSwingUnlock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingUnlock" infoText="Information31 Middle.Lid.Swing.Unlock[DI-122]" warningText="" alarmText="" />
|
|
|
|
--><!--<IoSensor id="SensorPSUInnerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUInnerTempLAlarm" infoText="Information32 PSU.Inner.Temp Low[DI-308]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorPSUInnerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUInnerTempLAlarm" infoText="Information32 PSU.Inner.Temp Low[DI-308]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorPSUMiddleTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUMiddleTempLAlarm" infoText="Information33 PSU.Middle.Temp Low[DI-309]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorPSUMiddleTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUMiddleTempLAlarm" infoText="Information33 PSU.Middle.Temp Low[DI-309]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorPSUOuterTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUOuterTempLAlarm" infoText="Information34 PSU.Outer.TempLow[DI-310]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorPSUOuterTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUOuterTempLAlarm" infoText="Information34 PSU.Outer.TempLow[DI-310]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorSCRUpperTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRUpperTempLAlarm" infoText="Information35 SCR.Upper.Temp Low[DI-314]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorSCRUpperTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRUpperTempLAlarm" infoText="Information35 SCR.Upper.Temp Low[DI-314]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorSCRMiddleTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRMiddleTempLAlarm" infoText="Information36 SCR.Middle.Temp Low[DI-315]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorSCRMiddleTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRMiddleTempLAlarm" infoText="Information36 SCR.Middle.Temp Low[DI-315]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorSCRLowerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRLowerTempLAlarm" infoText="Information37 SCR.Lower.Temp Low[DI-316]" warningText="" alarmText="" />--><!--
|
|
|
|
<IoSensor id="SensorSCRLowerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRLowerTempLAlarm" infoText="Information37 SCR.Lower.Temp Low[DI-316]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorConfinementRingServoON" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingServoON" infoText="Information38 ConfinementRingServoON [DI-337]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorConfinementRingServoON" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingServoON" infoText="Information38 ConfinementRingServoON [DI-337]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorServoReady" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ServoReady" infoText="Information39 Servo Not Ready [DI-288]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorServoReady" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ServoReady" infoText="Information39 Servo Not Ready [DI-288]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorPSU1Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU1Status" infoText="Information40 PSU1 Status Is Off[DI-296]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorPSU1Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU1Status" infoText="Information40 PSU1 Status Is Off[DI-296]" warningText="" alarmText="" />
|
|
|
|
@ -600,7 +607,7 @@
|
|
|
|
<IoSensor id="SensorSCR2Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR2Status" infoText="Information44 SCR2 Status Is Off[DI-303]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorSCR2Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR2Status" infoText="Information44 SCR2 Status Is Off[DI-303]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorSCR3Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR3Status" infoText="Information45 SCR3 Status Is Off[DI-304]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorSCR3Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR3Status" infoText="Information45 SCR3 Status Is Off[DI-304]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorPumpCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpCabDoorClosed" infoText="Information46 PumpCabDoor Not Closed [DI-71]" warningText="" alarmText="" />
|
|
|
|
<IoSensor id="SensorPumpCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpCabDoorClosed" infoText="Information46 PumpCabDoor Not Closed [DI-71]" warningText="" alarmText="" />
|
|
|
|
</IoSensors>-->
|
|
|
|
</IoSensors>
|
|
|
|
|
|
|
|
|
|
|
|
<SicServos classType="Aitex.Core.RT.Device.Devices.SicServo" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
|
|
<SicServos classType="Aitex.Core.RT.Device.Devices.SicServo" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
|
|
<SicServo id="PMServo" module="" display="PMServo" schematicId="PMServo" unit="" aioType="float"
|
|
|
|
<SicServo id="PMServo" module="" display="PMServo" schematicId="PMServo" unit="" aioType="float"
|
|
|
|
|