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修改蝶阀不能控制问题

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This commit is contained in:
hanqiangqiang 2026-08-17 14:42:55 +08:00
parent 2ca805fe2e
commit cef47a8bbf
7 changed files with 26 additions and 16 deletions
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31
App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
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@ -72,7 +72,11 @@
</IoHeats>
<IoThrottleValves classType="Aitex.Core.RT.Device.Devices.IoThrottleValve2" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoThrottleValve id="TV" display="TV" schematicId="TV" unit="mbar" scBasePath="PM.{module}" modeValuePressure="5" modeValuePosition="2" modeValueClose="3" modeValueOpen="4" aioType="float" aiStatus="AI_ValveMode" aiPositionFeedback="AI_ActualPositon" aiPressureFeedback="AI_ActualPressure" aoPressureMode="AO_ValveModeSetpoint" aoPositionSetPoint="AO_SetpointPositon" aoPressureSetPoint="AO_SetpointPressure" doTVValveEnable="DO_TVEnable" doTVReset="DO_TVReset" diTVValveEnable="" />
<IoThrottleValve id="TV" display="TV" schematicId="TV" unit="mbar" scBasePath="PM.{module}" modeValuePressure="5" modeValuePosition="2" modeValueClose="3" modeValueOpen="4" aioType="float"
aiStatus="AI_ValveMode" aiPositionFeedback="AI_ActualPositon" aiPressureFeedback="AI_ActualPressure"
aoPressureMode="AO_ValveModeSetpoint" aoPositionSetPoint="AO_SetpointPositon" aoPressureSetPoint="AO_SetpointPressure"
doTVValveEnable="DO_TVEnable" doTVReset="DO_TVReset"
diTVValveEnable="" />
</IoThrottleValves>
<IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
@ -407,15 +411,18 @@
<DoSensor id="CleanRoutineSucceed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_CleanRoutineSuscessed" infoText="" warningText="" alarmText="" />
</DoSensors>
<!--<IoSensors classType="Aitex.Core.RT.Device.Devices.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamCabDoorClosed" infoText="" warningText="Warning1 Chamber Cab Door Not Closed [DI-3]" alarmText="" />
<IoSensors classType="Aitex.Core.RT.Device.Devices.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMGasDetectorSW" infoText="" warningText="Warning1 PMGasDetectorFault1 [DI-1]" alarmText="" />
<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBGasDetectorSW" infoText="" warningText="Warning2 GBGasDetectorFault [DI-2]" alarmText="" />
<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamCabDoorClosed" infoText="" warningText="Warning3 Chamber Cab Door Not Closed [DI-3]" alarmText="" />
<IoSensor id="SensorDORPressVacSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressVacSW" infoText="Information2 DOR Press Vac [DI-6]" warningText="" alarmText="" />
<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressATMSW" infoText="" warningText="Warning2 DOR Press ATM [DI-7]" alarmText="" />
<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText="Warning3 Gas Box Door Not Closed [DI-33]" alarmText="" />
<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Warning4 GasPipeTempCtrl.Alarm [DI-35]" alarmText="" />
<IoSensor id="SensorSpare2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare2FlowSW" infoText="" warningText="Warning5 Spare2 Flow Low -U13 [DI-47]" alarmText="" DisInServiceMode="true"/>
<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText="Warning6 ReactorWaterLeak [DI-48]" alarmText="" />
<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText="Warning7 Gas Box Water Leak [DI-60]" alarmText="" />
<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressATMSW" infoText="" warningText="Warning4 DOR Press ATM [DI-7]" alarmText="" />
<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText="Warning5 Gas Box Door Not Closed [DI-33]" alarmText="" />
<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Warning6 GasPipeTempCtrl.Alarm [DI-35]" alarmText="" />
<IoSensor id="SensorSpare2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare2FlowSW" infoText="" warningText="Warning7 Spare2 Flow Low -U13 [DI-47]" alarmText="" DisInServiceMode="true"/>
<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText="Warning8 ReactorWaterLeak [DI-48]" alarmText="" />
<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText="Warning9 Gas Box Water Leak [DI-60]" alarmText="" />
<IoSensor id="SensorShutterUpLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterUpLimitSW" infoText="" warningText="" alarmText="" />
<IoSensor id="SensorShutterDownLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ShutterDownLimitSW" infoText="" warningText="" alarmText="" />
<IoSensor id="SensorDryPump1Warning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Warning" infoText="" warningText="Warning10 DryPump1 Warning [DI-67]" alarmText="" />
@ -585,12 +592,12 @@
<IoSensor id="SensorMiddleLidTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidTighten" infoText="Information29 Middle.Lid.Tighten[DI-119]" warningText="" alarmText="" />
<IoSensor id="SensorMiddleLidSwingLock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingLock" infoText="Information30 Middle.Lid.Swing.Lock[DI-121]" warningText="" alarmText="" />
<IoSensor id="SensorMiddleLidSwingUnlock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingUnlock" infoText="Information31 Middle.Lid.Swing.Unlock[DI-122]" warningText="" alarmText="" />
--><!--<IoSensor id="SensorPSUInnerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUInnerTempLAlarm" infoText="Information32 PSU.Inner.Temp Low[DI-308]" warningText="" alarmText="" />
<IoSensor id="SensorPSUInnerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUInnerTempLAlarm" infoText="Information32 PSU.Inner.Temp Low[DI-308]" warningText="" alarmText="" />
<IoSensor id="SensorPSUMiddleTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUMiddleTempLAlarm" infoText="Information33 PSU.Middle.Temp Low[DI-309]" warningText="" alarmText="" />
<IoSensor id="SensorPSUOuterTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUOuterTempLAlarm" infoText="Information34 PSU.Outer.TempLow[DI-310]" warningText="" alarmText="" />
<IoSensor id="SensorSCRUpperTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRUpperTempLAlarm" infoText="Information35 SCR.Upper.Temp Low[DI-314]" warningText="" alarmText="" />
<IoSensor id="SensorSCRMiddleTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRMiddleTempLAlarm" infoText="Information36 SCR.Middle.Temp Low[DI-315]" warningText="" alarmText="" />
<IoSensor id="SensorSCRLowerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRLowerTempLAlarm" infoText="Information37 SCR.Lower.Temp Low[DI-316]" warningText="" alarmText="" />--><!--
<IoSensor id="SensorSCRLowerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRLowerTempLAlarm" infoText="Information37 SCR.Lower.Temp Low[DI-316]" warningText="" alarmText="" />
<IoSensor id="SensorConfinementRingServoON" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingServoON" infoText="Information38 ConfinementRingServoON [DI-337]" warningText="" alarmText="" />
<IoSensor id="SensorServoReady" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ServoReady" infoText="Information39 Servo Not Ready [DI-288]" warningText="" alarmText="" />
<IoSensor id="SensorPSU1Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU1Status" infoText="Information40 PSU1 Status Is Off[DI-296]" warningText="" alarmText="" />
@ -600,7 +607,7 @@
<IoSensor id="SensorSCR2Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR2Status" infoText="Information44 SCR2 Status Is Off[DI-303]" warningText="" alarmText="" />
<IoSensor id="SensorSCR3Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR3Status" infoText="Information45 SCR3 Status Is Off[DI-304]" warningText="" alarmText="" />
<IoSensor id="SensorPumpCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpCabDoorClosed" infoText="Information46 PumpCabDoor Not Closed [DI-71]" warningText="" alarmText="" />
</IoSensors>-->
</IoSensors>
<SicServos classType="Aitex.Core.RT.Device.Devices.SicServo" assembly="MECF.Framework.RT.EquipmentLibrary">
<SicServo id="PMServo" module="" display="PMServo" schematicId="PMServo" unit="" aioType="float"

1
App/Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml
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@ -418,6 +418,7 @@
<DO_ITEM Index="135" Name="DO_SCR2Enable" BufferOffset="135" Addr="135" Description="" />
<DO_ITEM Index="136" Name="DO_SCR3Enable" BufferOffset="136" Addr="136" Description="" />
<DO_ITEM Index="140" Name="DO_TVEnable" BufferOffset="140" Addr="140" Description="" />
<DO_ITEM Index="141" Name="DO_TVReset" BufferOffset="141" Addr="141" Description="" />
<DO_ITEM Index="144" Name="DO_PSU1Reset" BufferOffset="144" Addr="144" Description="" />
<DO_ITEM Index="145" Name="DO_PSU2Reset" BufferOffset="145" Addr="145" Description="" />
<DO_ITEM Index="146" Name="DO_PSU3Reset" BufferOffset="146" Addr="146" Description="" />

1
App/Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml
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@ -418,6 +418,7 @@
<DO_ITEM Index="135" Name="DO_SCR2Enable" BufferOffset="135" Addr="135" Description="" />
<DO_ITEM Index="136" Name="DO_SCR3Enable" BufferOffset="136" Addr="136" Description="" />
<DO_ITEM Index="140" Name="DO_TVEnable" BufferOffset="140" Addr="140" Description="" />
<DO_ITEM Index="141" Name="DO_TVReset" BufferOffset="141" Addr="141" Description="" />
<DO_ITEM Index="144" Name="DO_PSU1Reset" BufferOffset="144" Addr="144" Description="" />
<DO_ITEM Index="145" Name="DO_PSU2Reset" BufferOffset="145" Addr="145" Description="" />
<DO_ITEM Index="146" Name="DO_PSU3Reset" BufferOffset="146" Addr="146" Description="" />

4
App/Modules/SicModules/Config/TM/IODefinePlatform.xml
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@ -292,14 +292,14 @@
<DO_ITEM Index="154" Name="DO_LdRotationMoveCCD2Pos" BufferOffset="154" Addr="154" Description="" Visible="false"/>
<!--垃圾IO数据-->
<!--<DO_ITEM Index="158" Name="DO_LoadLidLock" BufferOffset="158" Addr="158" Description="" Visible="false"/>
<DO_ITEM Index="158" Name="DO_LoadLidLock" BufferOffset="158" Addr="158" Description="" Visible="false"/>
<DO_ITEM Index="158" Name="DO_LoadLidUnlock" BufferOffset="158" Addr="158" Description="" Visible="false"/>
<DO_ITEM Index="158" Name="DO_LoadWaferCYClamp" BufferOffset="158" Addr="158" Description="" Visible="false"/>
<DO_ITEM Index="158" Name="DO_LoadWaferCYOpen" BufferOffset="158" Addr="158" Description="" Visible="false"/>
<DO_ITEM Index="158" Name="DO_LoadTrayCYClamp" BufferOffset="158" Addr="158" Description="" Visible="false"/>
<DO_ITEM Index="158" Name="DO_LoadTrayCYOpen" BufferOffset="158" Addr="158" Description="" Visible="false"/>
<DO_ITEM Index="158" Name="DO_LoadRSideDoorClose" BufferOffset="158" Addr="158" Description="" Visible="false"/>
<DO_ITEM Index="158" Name="DO_LoadRSideDoorOpen" BufferOffset="158" Addr="158" Description="" Visible="false"/>-->
<DO_ITEM Index="158" Name="DO_LoadRSideDoorOpen" BufferOffset="158" Addr="158" Description="" Visible="false"/>
<!--垃圾IO数据-->
</Block>
</Dig_Out>

2
App/SicRT/Properties/AssemblyInfo.cs
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@ -51,7 +51,7 @@ using System.Windows;
// 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
// 方法是按如下所示使用“*”: :
[assembly: AssemblyVersion("1.1.0.60814")]
[assembly: AssemblyVersion("1.1.0.60817")]
[assembly: AssemblyInformationalVersion("MoS2（无EFEM）")]

1
App/SicSimulator/Config/_ioDefinePM.xml
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@ -418,6 +418,7 @@
<DO_ITEM Index="135" Name="DO_SCR2Enable" BufferOffset="135" Addr="135" Description="" />
<DO_ITEM Index="136" Name="DO_SCR3Enable" BufferOffset="136" Addr="136" Description="" />
<DO_ITEM Index="140" Name="DO_TVEnable" BufferOffset="140" Addr="140" Description="" />
<DO_ITEM Index="141" Name="DO_TVReset" BufferOffset="141" Addr="141" Description="" />
<DO_ITEM Index="144" Name="DO_PSU1Reset" BufferOffset="144" Addr="144" Description="" />
<DO_ITEM Index="145" Name="DO_PSU2Reset" BufferOffset="145" Addr="145" Description="" />
<DO_ITEM Index="146" Name="DO_PSU3Reset" BufferOffset="146" Addr="146" Description="" />

2
App/SicUI/Properties/AssemblyInfo.cs
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@ -55,6 +55,6 @@ using System.Windows;
// by using the '*' as shown below:
[assembly: AssemblyVersion("1.1.0.60814")]
[assembly: AssemblyVersion("1.1.0.60817")]
[assembly: AssemblyInformationalVersion("MoS2（无EFEM）")]