diff --git a/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml b/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml index bc8ecd1..4c57b96 100644 --- a/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml +++ b/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml @@ -211,155 +211,6 @@ - @@ -423,7 +274,7 @@ - + @@ -562,7 +413,7 @@ - + @@ -689,7 +540,7 @@ aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp" aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp" aiElectrodeWFlowTemp="AI_ElectrodeWFlowTemp" - aiTMPump1FlowTemp="AI_TMPumpFlowTemp" + aiTMPump1FlowTemp="AI_TMPump1FlowTemp" aiTMPump2FlowTemp="AI_Foreline1FlowTemp" aiTransformerFlowTemp="AI_TransformerFlowTemp" aiForelineFlowTemp="AI_Foreline2FlowTemp" diff --git a/App/Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml b/App/Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml index 6453dbe..8b0453d 100644 --- a/App/Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml +++ b/App/Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml @@ -27,7 +27,7 @@ - + @@ -44,11 +44,13 @@ + + - + @@ -64,8 +66,6 @@ - - @@ -475,12 +475,12 @@ - + - + - + diff --git a/App/Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml b/App/Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml index 3e65336..bbd8299 100644 --- a/App/Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml +++ b/App/Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml @@ -343,7 +343,7 @@ aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp" aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp" aiElectrodeWFlowTemp="AI_ElectrodeWFlowTemp" - aiTMPump1FlowTemp="AI_TMPumpFlowTemp" + aiTMPump1FlowTemp="AI_TMPump1FlowTemp" aiTMPump2FlowTemp="AI_Foreline1FlowTemp" aiTransformerFlowTemp="AI_TransformerFlowTemp" aiForelineFlowTemp="AI_Foreline2FlowTemp" diff --git a/App/Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml b/App/Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml index 6453dbe..8b0453d 100644 --- a/App/Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml +++ b/App/Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml @@ -27,7 +27,7 @@ - + @@ -44,11 +44,13 @@ + + - + @@ -64,8 +66,6 @@ - - @@ -475,12 +475,12 @@ - + - + - + diff --git a/App/Modules/SicModules/Config/PM/PM2/interlockPM2.xml b/App/Modules/SicModules/Config/PM/PM2/interlockPM2.xml index 44fbf19..38e7a2e 100644 --- a/App/Modules/SicModules/Config/PM/PM2/interlockPM2.xml +++ b/App/Modules/SicModules/Config/PM/PM2/interlockPM2.xml @@ -190,7 +190,7 @@ - + @@ -263,7 +263,7 @@ - + @@ -336,7 +336,7 @@ - + @@ -409,7 +409,7 @@ - + @@ -482,7 +482,7 @@ - + @@ -555,7 +555,7 @@ - + @@ -628,7 +628,7 @@ - + @@ -701,7 +701,7 @@ - + @@ -774,7 +774,7 @@ - + @@ -923,7 +923,7 @@ - + @@ -999,7 +999,7 @@ - + @@ -1075,7 +1075,7 @@ - + @@ -1151,7 +1151,7 @@ - + @@ -1346,7 +1346,7 @@ - + @@ -1419,7 +1419,7 @@ - + @@ -1490,7 +1490,7 @@ - + @@ -1561,7 +1561,7 @@ - + @@ -2625,7 +2625,7 @@ - + @@ -2748,7 +2748,7 @@ - + @@ -2876,7 +2876,7 @@ - + @@ -2948,7 +2948,7 @@ - + @@ -3020,7 +3020,7 @@ - + diff --git a/App/Modules/SicModules/TMs/Routines/TMRobotPlaceRoutine.cs b/App/Modules/SicModules/TMs/Routines/TMRobotPlaceRoutine.cs index 5c3468c..42fea77 100644 --- a/App/Modules/SicModules/TMs/Routines/TMRobotPlaceRoutine.cs +++ b/App/Modules/SicModules/TMs/Routines/TMRobotPlaceRoutine.cs @@ -231,7 +231,7 @@ namespace SicModules.TMs.Routines ExecuteRoutine((int)RoutineStep.OpenSlitValve, _openSlitValveRoutine); } - //如果是PM腔,放盘前检查传感器DI_ReactorSuspectorCheck + //如果是PM腔,放盘前检查传感器DI_PMGasDetectorFault2SW //如果有,则不能放盘 if (ModuleHelper.IsPm(_target)) { diff --git a/App/SicSimulator/Config/DevicePM.xml b/App/SicSimulator/Config/DevicePM.xml index 6298fdc..8c07032 100644 --- a/App/SicSimulator/Config/DevicePM.xml +++ b/App/SicSimulator/Config/DevicePM.xml @@ -24,7 +24,7 @@ -->