diff --git a/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml b/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
index bc8ecd1..4c57b96 100644
--- a/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
+++ b/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
@@ -211,155 +211,6 @@
-
@@ -423,7 +274,7 @@
-
+
@@ -562,7 +413,7 @@
-
+
@@ -689,7 +540,7 @@
aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp"
aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp"
aiElectrodeWFlowTemp="AI_ElectrodeWFlowTemp"
- aiTMPump1FlowTemp="AI_TMPumpFlowTemp"
+ aiTMPump1FlowTemp="AI_TMPump1FlowTemp"
aiTMPump2FlowTemp="AI_Foreline1FlowTemp"
aiTransformerFlowTemp="AI_TransformerFlowTemp"
aiForelineFlowTemp="AI_Foreline2FlowTemp"
diff --git a/App/Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml b/App/Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml
index 6453dbe..8b0453d 100644
--- a/App/Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml
+++ b/App/Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml
@@ -27,7 +27,7 @@
-
+
@@ -44,11 +44,13 @@
+
+
-
+
@@ -64,8 +66,6 @@
-
-
@@ -475,12 +475,12 @@
-
+
-
+
-
+
diff --git a/App/Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml b/App/Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml
index 3e65336..bbd8299 100644
--- a/App/Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml
+++ b/App/Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml
@@ -343,7 +343,7 @@
aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp"
aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp"
aiElectrodeWFlowTemp="AI_ElectrodeWFlowTemp"
- aiTMPump1FlowTemp="AI_TMPumpFlowTemp"
+ aiTMPump1FlowTemp="AI_TMPump1FlowTemp"
aiTMPump2FlowTemp="AI_Foreline1FlowTemp"
aiTransformerFlowTemp="AI_TransformerFlowTemp"
aiForelineFlowTemp="AI_Foreline2FlowTemp"
diff --git a/App/Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml b/App/Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml
index 6453dbe..8b0453d 100644
--- a/App/Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml
+++ b/App/Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml
@@ -27,7 +27,7 @@
-
+
@@ -44,11 +44,13 @@
+
+
-
+
@@ -64,8 +66,6 @@
-
-
@@ -475,12 +475,12 @@
-
+
-
+
-
+
diff --git a/App/Modules/SicModules/Config/PM/PM2/interlockPM2.xml b/App/Modules/SicModules/Config/PM/PM2/interlockPM2.xml
index 44fbf19..38e7a2e 100644
--- a/App/Modules/SicModules/Config/PM/PM2/interlockPM2.xml
+++ b/App/Modules/SicModules/Config/PM/PM2/interlockPM2.xml
@@ -190,7 +190,7 @@
-
+
@@ -263,7 +263,7 @@
-
+
@@ -336,7 +336,7 @@
-
+
@@ -409,7 +409,7 @@
-
+
@@ -482,7 +482,7 @@
-
+
@@ -555,7 +555,7 @@
-
+
@@ -628,7 +628,7 @@
-
+
@@ -701,7 +701,7 @@
-
+
@@ -774,7 +774,7 @@
-
+
@@ -923,7 +923,7 @@
-
+
@@ -999,7 +999,7 @@
-
+
@@ -1075,7 +1075,7 @@
-
+
@@ -1151,7 +1151,7 @@
-
+
@@ -1346,7 +1346,7 @@
-
+
@@ -1419,7 +1419,7 @@
-
+
@@ -1490,7 +1490,7 @@
-
+
@@ -1561,7 +1561,7 @@
-
+
@@ -2625,7 +2625,7 @@
-
+
@@ -2748,7 +2748,7 @@
-
+
@@ -2876,7 +2876,7 @@
-
+
@@ -2948,7 +2948,7 @@
-
+
@@ -3020,7 +3020,7 @@
-
+
diff --git a/App/Modules/SicModules/TMs/Routines/TMRobotPlaceRoutine.cs b/App/Modules/SicModules/TMs/Routines/TMRobotPlaceRoutine.cs
index 5c3468c..42fea77 100644
--- a/App/Modules/SicModules/TMs/Routines/TMRobotPlaceRoutine.cs
+++ b/App/Modules/SicModules/TMs/Routines/TMRobotPlaceRoutine.cs
@@ -231,7 +231,7 @@ namespace SicModules.TMs.Routines
ExecuteRoutine((int)RoutineStep.OpenSlitValve, _openSlitValveRoutine);
}
- //如果是PM腔,放盘前检查传感器DI_ReactorSuspectorCheck
+ //如果是PM腔,放盘前检查传感器DI_PMGasDetectorFault2SW
//如果有,则不能放盘
if (ModuleHelper.IsPm(_target))
{
diff --git a/App/SicSimulator/Config/DevicePM.xml b/App/SicSimulator/Config/DevicePM.xml
index 6298fdc..8c07032 100644
--- a/App/SicSimulator/Config/DevicePM.xml
+++ b/App/SicSimulator/Config/DevicePM.xml
@@ -24,7 +24,7 @@
-->