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初步整理仿真默认值

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hanqiangqiang 2026-08-03 16:35:34 +08:00
parent 0ef8d59d8c
commit ea216fca1d
6 changed files with 191 additions and 196 deletions
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78
App/Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml
View File

@ -3,72 +3,72 @@
<VersionID Name="V2.2.3.0" />
<Dig_In>
<Block Index="0">
<DI_ITEM Index="0" Name="DI_ChamberCloseDone" BufferOffset="0" Addr="0" Description="" />
<DI_ITEM Index="0" Name="DI_ChamLidClosed" BufferOffset="0" Addr="0" Description="" />
<DI_ITEM Index="1" Name="DI_PMGasDetectorFault" BufferOffset="1" Addr="1" Description="" />
<DI_ITEM Index="2" Name="DI_GBGasDetectorFault" BufferOffset="2" Addr="2" Description="" />
<DI_ITEM Index="4" Name="DI_ChamPressAboveATMSW" BufferOffset="4" Addr="4" Description="" />
<DI_ITEM Index="5" Name="DI_ChamAtSafeProcessPressSW" BufferOffset="5" Addr="5" Description="" />
<DI_ITEM Index="6" Name="DI_DORPressVac" BufferOffset="6" Addr="6" Description="" />
<DI_ITEM Index="7" Name="DI_DORPressATM" BufferOffset="7" Addr="7" Description="" />
<DI_ITEM Index="6" Name="DI_DORPressVacSW" BufferOffset="6" Addr="6" Description="" />
<DI_ITEM Index="7" Name="DI_DORPressATMSW" BufferOffset="7" Addr="7" Description="" />
<DI_ITEM Index="8" Name="DI_PumpExhaustDPLowAlarm" BufferOffset="8" Addr="8" Description="" />
<DI_ITEM Index="9" Name="DI_PMATMSW" BufferOffset="9" Addr="9" Description="" />
<DI_ITEM Index="10" Name="DI_HeaterTempUpLimitAlarm" BufferOffset="10" Addr="10" Description="" />
<DI_ITEM Index="11" Name="DI_HeaterTempLowLimitAlarm" BufferOffset="11" Addr="11" Description="" />
<DI_ITEM Index="11" Name="DI_HeaterTempLowLimitSW" BufferOffset="11" Addr="11" Description="" />
<DI_ITEM Index="12" Name="DI_ConfinementRingUp" BufferOffset="12" Addr="12" Description="" />
<DI_ITEM Index="13" Name="DI_RotaryMotorSafeSpeed" BufferOffset="13" Addr="13" Description="" />
<DI_ITEM Index="14" Name="DI_PMH2SeDetectorAlarm" BufferOffset="14" Addr="14" Description="" />
<DI_ITEM Index="15" Name="DI_SHFlowLowAlarm" BufferOffset="15" Addr="15" Description="" />
<DI_ITEM Index="16" Name="DI_ChamTopFlowLowAlarm" BufferOffset="16" Addr="16" Description="" />
<DI_ITEM Index="17" Name="DI_ChamMiddleFlow1LowAlarm" BufferOffset="17" Addr="17" Description="" />
<DI_ITEM Index="18" Name="DI_ChamBottomFlowLowAlarm" BufferOffset="18" Addr="18" Description="" />
<DI_ITEM Index="19" Name="DI_Foreline1FlowLowAlarm" BufferOffset="19" Addr="19" Description="" />
<DI_ITEM Index="20" Name="DI_PowerRod1FlowLowAlarm" BufferOffset="20" Addr="20" Description="" />
<DI_ITEM Index="21" Name="DI_PowerRod2FlowLowAlarm" BufferOffset="21" Addr="21" Description="" />
<DI_ITEM Index="22" Name="DI_Foreline2LowAlarm" BufferOffset="22" Addr="22" Description="" />
<DI_ITEM Index="23" Name="DI_ElectrodeWFlowLowAlarm" BufferOffset="23" Addr="23" Description="" />
<DI_ITEM Index="24" Name="DI_TMPump1FlowLowAlarm" BufferOffset="24" Addr="24" Description="" />
<DI_ITEM Index="25" Name="DI_TransformerFlowLowAlarm" BufferOffset="25" Addr="25" Description="" />
<DI_ITEM Index="26" Name="DI_ChamMiddleFlow2LowAlarm" BufferOffset="26" Addr="26" Description="" />
<DI_ITEM Index="27" Name="DI_InletTotalFlowLowAlarm" BufferOffset="27" Addr="27" Description="" />
<DI_ITEM Index="28" Name="DI_InletTotalFlowHighAlarm" BufferOffset="28" Addr="28" Description="" />
<DI_ITEM Index="30" Name="DI_PMH2DetectorAlarm" BufferOffset="30" Addr="30" Description="" />
<DI_ITEM Index="31" Name="DI_ArInletPressAlarm" BufferOffset="31" Addr="31" Description="" />
<DI_ITEM Index="32" Name="DI_GBSO2DetectorAlarm" BufferOffset="32" Addr="32" Description="" />
<DI_ITEM Index="33" Name="DI_GBDoorCloseDone" BufferOffset="33" Addr="33" Description="" />
<DI_ITEM Index="34" Name="DI_GBExhaustDPLowAlarm" BufferOffset="34" Addr="34" Description="" />
<DI_ITEM Index="16" Name="DI_ChamTopFlowSW" BufferOffset="16" Addr="16" Description="" />
<DI_ITEM Index="17" Name="DI_ChamMiddleFlow1SW" BufferOffset="17" Addr="17" Description="" />
<DI_ITEM Index="18" Name="DI_ChamBottomFlowSW" BufferOffset="18" Addr="18" Description="" />
<DI_ITEM Index="19" Name="DI_Foreline1FlowSW" BufferOffset="19" Addr="19" Description="" />
<DI_ITEM Index="20" Name="DI_PowerRod1FlowSW" BufferOffset="20" Addr="20" Description="" />
<DI_ITEM Index="21" Name="DI_PowerRod2FlowSW" BufferOffset="21" Addr="21" Description="" />
<DI_ITEM Index="22" Name="DI_Foreline2FlowSW" BufferOffset="22" Addr="22" Description="" />
<DI_ITEM Index="23" Name="DI_ElectrodeWFlowSW" BufferOffset="23" Addr="23" Description="" />
<DI_ITEM Index="24" Name="DI_TMPumpFlowSW" BufferOffset="24" Addr="24" Description="" />
<DI_ITEM Index="25" Name="DI_TransformerFlowSW" BufferOffset="25" Addr="25" Description="" />
<DI_ITEM Index="26" Name="DI_ChamMiddleFlow2SW" BufferOffset="26" Addr="26" Description="" />
<DI_ITEM Index="27" Name="DI_InletTotalFlowLowSW" BufferOffset="27" Addr="27" Description="" />
<DI_ITEM Index="28" Name="DI_InletTotalFlowHighSW" BufferOffset="28" Addr="28" Description="" />
<DI_ITEM Index="30" Name="DI_PMH2DetectorSW" BufferOffset="30" Addr="30" Description="" />
<DI_ITEM Index="31" Name="DI_ArInletPressSW" BufferOffset="31" Addr="31" Description="" />
<DI_ITEM Index="32" Name="DI_GBExhaustDPSW" BufferOffset="32" Addr="32" Description="" />
<DI_ITEM Index="33" Name="DI_GBDoorClosed" BufferOffset="33" Addr="33" Description="" />
<DI_ITEM Index="34" Name="DI_GBExhaustDPLowSW" BufferOffset="34" Addr="34" Description="" />
<DI_ITEM Index="35" Name="DI_GasPipeTempCtrlAlarm" BufferOffset="35" Addr="35" Description="" />
<DI_ITEM Index="36" Name="DI_DryPump1Alarm" BufferOffset="36" Addr="36" Description="" />
<DI_ITEM Index="38" Name="DI_PumpExhaustPressAlarm" BufferOffset="38" Addr="38" Description="" />
<DI_ITEM Index="39" Name="DI_PMExhaustDPLowAlarm" BufferOffset="39" Addr="39" Description="" />
<DI_ITEM Index="40" Name="DI_PMH2SDetectorAlarm" BufferOffset="40" Addr="40" Description="" />
<DI_ITEM Index="41" Name="DI_ScrubberIntlk" BufferOffset="41" Addr="41" Description="" />
<DI_ITEM Index="42" Name="DI_FacilityIntlk" BufferOffset="42" Addr="42" Description="" />
<DI_ITEM Index="38" Name="DI_PumpExhaustPressSW" BufferOffset="38" Addr="38" Description="" />
<DI_ITEM Index="39" Name="DI_PMAExhaustDPSW" BufferOffset="39" Addr="39" Description="" />
<DI_ITEM Index="40" Name="DI_PMH2SDetectorSW" BufferOffset="40" Addr="40" Description="" />
<DI_ITEM Index="41" Name="DI_ScrubberIntlkSW" BufferOffset="41" Addr="41" Description="" />
<DI_ITEM Index="42" Name="DI_FacilityIntlkSW" BufferOffset="42" Addr="42" Description="" />
<DI_ITEM Index="45" Name="DI_RotaryMotorAlarm" BufferOffset="45" Addr="45" Description="" />
<DI_ITEM Index="48" Name="DI_ReactorWaterLeakAlarm" BufferOffset="48" Addr="48" Description="" />
<DI_ITEM Index="49" Name="DI_ChamLidPushButtonRemote" BufferOffset="49" Addr="49" Description="" />
<DI_ITEM Index="48" Name="DI_ReactorWaterLeakSW" BufferOffset="48" Addr="48" Description="" />
<DI_ITEM Index="49" Name="DI_ChamLidPushButtonLocal" BufferOffset="49" Addr="49" Description="" />
<DI_ITEM Index="50" Name="DI_ConfinementRingDown" BufferOffset="50" Addr="50" Description="" />
<DI_ITEM Index="51" Name="DI_ReactorSuspectorCheck" BufferOffset="51" Addr="51" Description="" />
<DI_ITEM Index="52" Name="DI_PMSO2DetectorAlarm" BufferOffset="52" Addr="52" Description="" />
<DI_ITEM Index="55" Name="DI_GN2InletPressAlarm" BufferOffset="55" Addr="55" Description="" />
<DI_ITEM Index="55" Name="DI_GN2InletPressSW" BufferOffset="55" Addr="55" Description="" />
<DI_ITEM Index="56" Name="DI_GBH2SDetectorAlarm" BufferOffset="56" Addr="56" Description="" />
<DI_ITEM Index="57" Name="DI_GBH2SeDetectorAlarm" BufferOffset="57" Addr="57" Description="" />
<DI_ITEM Index="57" Name="DI_H2PressureSW" BufferOffset="57" Addr="57" Description="" />
<DI_ITEM Index="58" Name="DI_GBSmokeDetectorAlarm" BufferOffset="58" Addr="58" Description="" />
<DI_ITEM Index="59" Name="DI_GBH2DetectorAlarm" BufferOffset="59" Addr="59" Description="" />
<DI_ITEM Index="60" Name="DI_GBWaterLeakAlarm" BufferOffset="60" Addr="60" Description="" />
<DI_ITEM Index="59" Name="DI_GBH2DetectorSW" BufferOffset="59" Addr="59" Description="" />
<DI_ITEM Index="60" Name="DI_GBWaterLeakSW" BufferOffset="60" Addr="60" Description="" />
<DI_ITEM Index="63" Name="DI_H2PressureAlarm" BufferOffset="63" Addr="63" Description="" />
<DI_ITEM Index="65" Name="DI_DryPump1Running" BufferOffset="65" Addr="65" Description="" />
<DI_ITEM Index="67" Name="DI_DryPump1Warning" BufferOffset="67" Addr="67" Description="" />
<DI_ITEM Index="69" Name="DI_PMSmokeDetectorAlarm" BufferOffset="69" Addr="69" Description="" />
<DI_ITEM Index="70" Name="DI_EMOStatusAlarm" BufferOffset="70" Addr="70" Description="" />
<DI_ITEM Index="71" Name="DI_PumpCabDoorCloseDone" BufferOffset="71" Addr="71" Description="" />
<DI_ITEM Index="72" Name="DI_FacilityWarning" BufferOffset="72" Addr="72" Description="" />
<DI_ITEM Index="72" Name="DI_FacilityWarningSW" BufferOffset="72" Addr="72" Description="" />
<DI_ITEM Index="76" Name="DI_MainCBStatusSW" BufferOffset="76" Addr="76" Description="" />
<DI_ITEM Index="77" Name="DI_PowerRackWaterLeakAlarm" BufferOffset="77" Addr="77" Description="" />
<DI_ITEM Index="77" Name="DI_PowerRackWaterLeakSW" BufferOffset="77" Addr="77" Description="" />
<DI_ITEM Index="78" Name="DI_UPS1Enable" BufferOffset="78" Addr="78" Description="" />
<DI_ITEM Index="79" Name="DI_UPS1Bypass" BufferOffset="79" Addr="79" Description="" />
<DI_ITEM Index="80" Name="DI_UPS1Online" BufferOffset="80" Addr="80" Description="" />
<DI_ITEM Index="81" Name="DI_ProcessStop" BufferOffset="81" Addr="81" Description="" />
<DI_ITEM Index="83" Name="DI_TransformerOTAlarm" BufferOffset="83" Addr="83" Description="" />
<DI_ITEM Index="81" Name="DI_ProcessStopSW" BufferOffset="81" Addr="81" Description="" />
<DI_ITEM Index="83" Name="DI_TransformerOTSW" BufferOffset="83" Addr="83" Description="" />
<DI_ITEM Index="84" Name="DI_UPS1LowBattery" BufferOffset="84" Addr="84" Description="" />
<DI_ITEM Index="85" Name="DI_UPS2LowBattery" BufferOffset="85" Addr="85" Description="" />
<DI_ITEM Index="88" Name="DI_ManualLidOPLocal" BufferOffset="88" Addr="88" Description="" />
@ -429,7 +429,7 @@
<DO_ITEM Index="170" Name="DO_ReactorATMTransferReady" BufferOffset="170" Addr="170" Description="" />
<DO_ITEM Index="171" Name="DO_ReactorVACTransferReady" BufferOffset="171" Addr="171" Description="" />
<DO_ITEM Index="172" Name="DO_PurgeRoutineSuscessed" BufferOffset="172" Addr="172" Description="" />
<DO_ITEM Index="173" Name="DO_CleanRoutineSuscessed" BufferOffset="173" Addr="173" Description="" />
<DO_ITEM Index="173" Name="DO_CleanRoutineSucceed" BufferOffset="173" Addr="173" Description="" />
<DO_ITEM Index="174" Name="DO_ProcessRunning" BufferOffset="174" Addr="174" Description="" />
<DO_ITEM Index="175" Name="DO_PreprocessRunning" BufferOffset="175" Addr="175" Description="" />
<DO_ITEM Index="176" Name="DO_CyclePurgeRoutineRunning" BufferOffset="176" Addr="176" Description="" />
@ -753,7 +753,7 @@
<AO_ITEM Index="123" Name="AO_ConfinementRingMode" BufferOffset="123" Addr="123" Description="" />
<AO_ITEM Index="124" Name="AO_ConfinementRingSpeed" BufferOffset="124" Addr="124" Description="" />
<AO_ITEM Index="125" Name="AO_ConfinementRingDistance" BufferOffset="125" Addr="125" Description="" />
<AO_ITEM Index="127" Name="AO_ValvemodeSetpoint" BufferOffset="127" Addr="127" Description="" />
<AO_ITEM Index="127" Name="AO_ValveModeSetpoint" BufferOffset="127" Addr="127" Description="" />
<AO_ITEM Index="128" Name="AO_SetpointPositon" BufferOffset="128" Addr="128" Description="" />
<AO_ITEM Index="129" Name="AO_SetpointPressure" BufferOffset="129" Addr="129" Description="" />
<AO_ITEM Index="130" Name="AO_HeartBeat" BufferOffset="130" Addr="130" Description="" />

86
App/Modules/SicModules/Config/PM/PM1/interlockPM1.xml
View File

@ -128,7 +128,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -202,7 +202,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -275,7 +275,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -348,7 +348,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -421,7 +421,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -494,7 +494,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -567,7 +567,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -640,7 +640,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -713,7 +713,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -860,7 +860,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -936,7 +936,7 @@
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -1012,7 +1012,7 @@
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -1088,7 +1088,7 @@
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -1306,7 +1306,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -1359,7 +1359,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -1430,7 +1430,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -1501,7 +1501,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -1682,7 +1682,7 @@
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -1722,7 +1722,7 @@
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -1842,7 +1842,7 @@
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -1946,7 +1946,7 @@
</Action>
<Action do="PM1.DO_SHPurgeFinal(V87)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-40">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -1973,7 +1973,7 @@
</Action>
<Action do="PM1.DO_OuterGasFinal(V88)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-41">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2000,7 +2000,7 @@
</Action>
<Action do="PM1.DO_CarryGasFinal(V97)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-54">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2027,7 +2027,7 @@
</Action>
<Action do="PM1.DO_InnerGasFinal(V89)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-112">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2054,7 +2054,7 @@
</Action>
<Action do="PM1.DO_MiddleGasFinal(V90)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-113">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2081,7 +2081,7 @@
</Action>
<Action do="PM1.DO_OpticPurgeFinal(V91)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-114">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2108,7 +2108,7 @@
</Action>
<Action do="PM1.DO_GasRingPurgeFinal(V92)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-115">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2135,7 +2135,7 @@
</Action>
<Action do="PM1.DO_ChamberPurgeFinal(V93)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-116">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2162,7 +2162,7 @@
</Action>
<Action do="PM1.DO_RotationUpPurgeFinal(V94)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-117">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2189,7 +2189,7 @@
</Action>
<Action do="PM1.DO_ConfinementRingFinal(V95)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-118">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2216,7 +2216,7 @@
</Action>
<Action do="PM1.DO_HeaterWFFinal(V96)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-119">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2243,7 +2243,7 @@
</Action>
<Action do="PM1.DO_OpenLidPurge" value="true" tip="" tip.zh-CN="" tip.en-US="DO-111">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2401,7 +2401,7 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
@ -2410,7 +2410,7 @@
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -2561,7 +2561,7 @@
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -2637,7 +2637,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -2663,7 +2663,7 @@
<Action do="PM1.DO_ATMTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-183">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -2686,7 +2686,7 @@
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -2760,7 +2760,7 @@
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -2816,7 +2816,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -2888,7 +2888,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -2960,7 +2960,7 @@
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -3132,7 +3132,7 @@
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>

32
App/Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml
View File

@ -3,22 +3,22 @@
<VersionID Name="V2.2.3.0" />
<Dig_In>
<Block Index="0">
<DI_ITEM Index="0" Name="DI_ChamberCloseDone" BufferOffset="0" Addr="0" Description="" />
<DI_ITEM Index="0" Name="DI_ChamLidClosed" BufferOffset="0" Addr="0" Description="" />
<DI_ITEM Index="3" Name="DI_ChamCabDoorClosed" BufferOffset="3" Addr="3" Description="" />
<DI_ITEM Index="4" Name="DI_ChamPressAboveATMSW" BufferOffset="4" Addr="4" Description="" />
<DI_ITEM Index="5" Name="DI_ChamAtSafeProcessPressSW" BufferOffset="5" Addr="5" Description="" />
<DI_ITEM Index="6" Name="DI_DORPressVac" BufferOffset="6" Addr="6" Description="" />
<DI_ITEM Index="7" Name="DI_DORPressATM" BufferOffset="7" Addr="7" Description="" />
<DI_ITEM Index="6" Name="DI_DORPressVacSW" BufferOffset="6" Addr="6" Description="" />
<DI_ITEM Index="7" Name="DI_DORPressATMSW" BufferOffset="7" Addr="7" Description="" />
<DI_ITEM Index="8" Name="DI_PMH2SDetectorAlarm" BufferOffset="8" Addr="8" Description="" />
<DI_ITEM Index="9" Name="DI_PMATMSW" BufferOffset="9" Addr="9" Description="" />
<DI_ITEM Index="10" Name="DI_HeaterTempUpLimitAlarm" BufferOffset="10" Addr="10" Description="" />
<DI_ITEM Index="11" Name="DI_HeaterTempLowLimitAlarm" BufferOffset="11" Addr="11" Description="" />
<DI_ITEM Index="11" Name="DI_HeaterTempLowLimitSW" BufferOffset="11" Addr="11" Description="" />
<DI_ITEM Index="12" Name="DI_ConfinementRingUp" BufferOffset="12" Addr="12" Description="" />
<DI_ITEM Index="13" Name="DI_RotaryMotorSafeSpeed" BufferOffset="13" Addr="13" Description="" />
<DI_ITEM Index="14" Name="DI_PMH2SeDetectorAlarm" BufferOffset="14" Addr="14" Description="" />
<DI_ITEM Index="15" Name="DI_SHFlowLowAlarm" BufferOffset="15" Addr="15" Description="" />
<DI_ITEM Index="16" Name="DI_ChamTopFlowLowAlarm" BufferOffset="16" Addr="16" Description="" />
<DI_ITEM Index="17" Name="DI_ChamMiddleFlow1LowAlarm" BufferOffset="17" Addr="17" Description="" />
<DI_ITEM Index="16" Name="DI_ChamTopFlowSW" BufferOffset="16" Addr="16" Description="" />
<DI_ITEM Index="17" Name="DI_ChamMiddleFlow1SW" BufferOffset="17" Addr="17" Description="" />
<DI_ITEM Index="18" Name="DI_ChamBottomFlowLowAlarm" BufferOffset="18" Addr="18" Description="" />
<DI_ITEM Index="19" Name="DI_Foreline1FlowLowAlarm" BufferOffset="19" Addr="19" Description="" />
<DI_ITEM Index="20" Name="DI_PowerRod1FlowLowAlarm" BufferOffset="20" Addr="20" Description="" />
@ -33,7 +33,7 @@
<DI_ITEM Index="30" Name="DI_PMH2DetectorAlarm" BufferOffset="30" Addr="30" Description="" />
<DI_ITEM Index="31" Name="DI_GBH2SDetectorAlarm" BufferOffset="31" Addr="31" Description="" />
<DI_ITEM Index="32" Name="DI_GBExhaustDPLowAlarm" BufferOffset="32" Addr="32" Description="" />
<DI_ITEM Index="33" Name="DI_GBDoorCloseDone" BufferOffset="33" Addr="33" Description="" />
<DI_ITEM Index="33" Name="DI_GBDoorClosed" BufferOffset="33" Addr="33" Description="" />
<DI_ITEM Index="34" Name="DI_GBSO2DetectorAlarm" BufferOffset="34" Addr="34" Description="" />
<DI_ITEM Index="35" Name="DI_GasPipeTempCtrlAlarm" BufferOffset="35" Addr="35" Description="" />
<DI_ITEM Index="36" Name="DI_DryPump1Alarm" BufferOffset="36" Addr="36" Description="" />
@ -43,29 +43,29 @@
<DI_ITEM Index="41" Name="DI_ScrubberIntlk" BufferOffset="41" Addr="41" Description="" />
<DI_ITEM Index="42" Name="DI_FacilityIntlk" BufferOffset="42" Addr="42" Description="" />
<DI_ITEM Index="45" Name="DI_RotaryMotorAlarm" BufferOffset="45" Addr="45" Description="" />
<DI_ITEM Index="48" Name="DI_ReactorWaterLeakAlarm" BufferOffset="48" Addr="48" Description="" />
<DI_ITEM Index="49" Name="DI_ChamLidPushButtonRemote" BufferOffset="49" Addr="49" Description="" />
<DI_ITEM Index="48" Name="DI_ReactorWaterLeakSW" BufferOffset="48" Addr="48" Description="" />
<DI_ITEM Index="49" Name="DI_ChamLidPushButtonLocal" BufferOffset="49" Addr="49" Description="" />
<DI_ITEM Index="50" Name="DI_ConfinementRingDown" BufferOffset="50" Addr="50" Description="" />
<DI_ITEM Index="51" Name="DI_ReactorSuspectorCheck" BufferOffset="51" Addr="51" Description="" />
<DI_ITEM Index="52" Name="DI_PMSO2DetectorAlarm" BufferOffset="52" Addr="52" Description="" />
<DI_ITEM Index="55" Name="DI_GN2InletPressAlarm" BufferOffset="55" Addr="55" Description="" />
<DI_ITEM Index="55" Name="DI_GN2InletPressSW" BufferOffset="55" Addr="55" Description="" />
<DI_ITEM Index="56" Name="DI_ArInletPressAlarm" BufferOffset="56" Addr="56" Description="" />
<DI_ITEM Index="57" Name="DI_H2PressureAlarm" BufferOffset="57" Addr="57" Description="" />
<DI_ITEM Index="59" Name="DI_GBH2DetectorAlarm" BufferOffset="59" Addr="59" Description="" />
<DI_ITEM Index="60" Name="DI_GBWaterLeakAlarm" BufferOffset="60" Addr="60" Description="" />
<DI_ITEM Index="63" Name="DI_GBH2SeDetectorAlarm" BufferOffset="63" Addr="63" Description="" />
<DI_ITEM Index="60" Name="DI_GBWaterLeakSW" BufferOffset="60" Addr="60" Description="" />
<DI_ITEM Index="63" Name="DI_H2PressureSW" BufferOffset="63" Addr="63" Description="" />
<DI_ITEM Index="65" Name="DI_DryPump1Running" BufferOffset="65" Addr="65" Description="" />
<DI_ITEM Index="67" Name="DI_DryPump1Warning" BufferOffset="67" Addr="67" Description="" />
<DI_ITEM Index="70" Name="DI_EMOStatusAlarm" BufferOffset="70" Addr="70" Description="" />
<DI_ITEM Index="71" Name="DI_PumpCabDoorCloseDone" BufferOffset="71" Addr="71" Description="" />
<DI_ITEM Index="72" Name="DI_FacilityWarning" BufferOffset="72" Addr="72" Description="" />
<DI_ITEM Index="72" Name="DI_FacilityWarningSW" BufferOffset="72" Addr="72" Description="" />
<DI_ITEM Index="76" Name="DI_MainCBStatusSW" BufferOffset="76" Addr="76" Description="" />
<DI_ITEM Index="77" Name="DI_PowerRackWaterLeakAlarm" BufferOffset="77" Addr="77" Description="" />
<DI_ITEM Index="78" Name="DI_UPS1Enable" BufferOffset="78" Addr="78" Description="" />
<DI_ITEM Index="79" Name="DI_UPS1Bypass" BufferOffset="79" Addr="79" Description="" />
<DI_ITEM Index="80" Name="DI_UPS1Online" BufferOffset="80" Addr="80" Description="" />
<DI_ITEM Index="81" Name="DI_ProcessStop" BufferOffset="81" Addr="81" Description="" />
<DI_ITEM Index="83" Name="DI_TransformerOTAlarm" BufferOffset="83" Addr="83" Description="" />
<DI_ITEM Index="83" Name="DI_TransformerOTSW" BufferOffset="83" Addr="83" Description="" />
<DI_ITEM Index="84" Name="DI_UPS1LowBattery" BufferOffset="84" Addr="84" Description="" />
<DI_ITEM Index="85" Name="DI_UPS2LowBattery" BufferOffset="85" Addr="85" Description="" />
<DI_ITEM Index="88" Name="DI_ManualLidOPLocal" BufferOffset="88" Addr="88" Description="" />
@ -418,7 +418,7 @@
<DO_ITEM Index="170" Name="DO_ReactorATMTransferReady" BufferOffset="170" Addr="170" Description="" />
<DO_ITEM Index="171" Name="DO_ReactorVACTransferReady" BufferOffset="171" Addr="171" Description="" />
<DO_ITEM Index="172" Name="DO_PurgeRoutineSuscessed" BufferOffset="172" Addr="172" Description="" />
<DO_ITEM Index="173" Name="DO_CleanRoutineSuscessed" BufferOffset="173" Addr="173" Description="" />
<DO_ITEM Index="173" Name="DO_CleanRoutineSucceed" BufferOffset="173" Addr="173" Description="" />
<DO_ITEM Index="174" Name="DO_ProcessRunning" BufferOffset="174" Addr="174" Description="" />
<DO_ITEM Index="175" Name="DO_PreprocessRunning" BufferOffset="175" Addr="175" Description="" />
<DO_ITEM Index="176" Name="DO_CyclePurgeRoutineRunning" BufferOffset="176" Addr="176" Description="" />
@ -733,7 +733,7 @@
<AO_ITEM Index="123" Name="AO_ConfinementRingMode" BufferOffset="123" Addr="123" Description="" />
<AO_ITEM Index="124" Name="AO_ConfinementRingSpeed" BufferOffset="124" Addr="124" Description="" />
<AO_ITEM Index="125" Name="AO_ConfinementRingDistance" BufferOffset="125" Addr="125" Description="" />
<AO_ITEM Index="127" Name="AO_ValvemodeSetpoint" BufferOffset="127" Addr="127" Description="" />
<AO_ITEM Index="127" Name="AO_ValveModeSetpoint" BufferOffset="127" Addr="127" Description="" />
<AO_ITEM Index="128" Name="AO_SetpointPositon" BufferOffset="128" Addr="128" Description="" />
<AO_ITEM Index="129" Name="AO_SetpointPressure" BufferOffset="129" Addr="129" Description="" />
<AO_ITEM Index="130" Name="AO_HeartBeat" BufferOffset="130" Addr="130" Description="" />

86
App/Modules/SicModules/Config/PM/PM2/interlockPM2.xml
View File

@ -128,7 +128,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -202,7 +202,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -275,7 +275,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -348,7 +348,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -421,7 +421,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -494,7 +494,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -567,7 +567,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -640,7 +640,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -713,7 +713,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -860,7 +860,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -936,7 +936,7 @@
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -1012,7 +1012,7 @@
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -1088,7 +1088,7 @@
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -1306,7 +1306,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -1359,7 +1359,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -1430,7 +1430,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -1501,7 +1501,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -1682,7 +1682,7 @@
<Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -1722,7 +1722,7 @@
<Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -1842,7 +1842,7 @@
<Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -1946,7 +1946,7 @@
</Action>
<Action do="PM2.DO_SHPurgeFinal(V87)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-40">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -1973,7 +1973,7 @@
</Action>
<Action do="PM2.DO_OuterGasFinal(V88)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-41">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2000,7 +2000,7 @@
</Action>
<Action do="PM2.DO_CarryGasFinal(V97)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-54">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2027,7 +2027,7 @@
</Action>
<Action do="PM2.DO_InnerGasFinal(V89)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-112">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2054,7 +2054,7 @@
</Action>
<Action do="PM2.DO_MiddleGasFinal(V90)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-113">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2081,7 +2081,7 @@
</Action>
<Action do="PM2.DO_OpticPurgeFinal(V91)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-114">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2108,7 +2108,7 @@
</Action>
<Action do="PM2.DO_GasRingPurgeFinal(V92)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-115">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2135,7 +2135,7 @@
</Action>
<Action do="PM2.DO_ChamberPurgeFinal(V93)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-116">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2162,7 +2162,7 @@
</Action>
<Action do="PM2.DO_RotationUpPurgeFinal(V94)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-117">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2189,7 +2189,7 @@
</Action>
<Action do="PM2.DO_ConfinementRingFinal(V95)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-118">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2216,7 +2216,7 @@
</Action>
<Action do="PM2.DO_HeaterWFFinal(V96)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-119">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2243,7 +2243,7 @@
</Action>
<Action do="PM2.DO_OpenLidPurge" value="true" tip="" tip.zh-CN="" tip.en-US="DO-111">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
@ -2401,7 +2401,7 @@
<Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM2.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
@ -2410,7 +2410,7 @@
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -2561,7 +2561,7 @@
<Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -2637,7 +2637,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -2663,7 +2663,7 @@
<Action do="PM2.DO_ATMTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-183">
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -2686,7 +2686,7 @@
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
@ -2760,7 +2760,7 @@
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
@ -2816,7 +2816,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -2888,7 +2888,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -2960,7 +2960,7 @@
<Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
<Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
@ -3132,7 +3132,7 @@
<Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
<Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempUpLimitAlarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>

78
App/SicSimulator/Config/_ioDefinePM.xml
View File

@ -3,72 +3,72 @@
<VersionID Name="V2.2.3.0" />
<Dig_In>
<Block Index="0">
<DI_ITEM Index="0" Name="DI_ChamberCloseDone" BufferOffset="0" Addr="0" Description="" />
<DI_ITEM Index="0" Name="DI_ChamLidClosed" BufferOffset="0" Addr="0" Description="" />
<DI_ITEM Index="1" Name="DI_PMGasDetectorFault" BufferOffset="1" Addr="1" Description="" />
<DI_ITEM Index="2" Name="DI_GBGasDetectorFault" BufferOffset="2" Addr="2" Description="" />
<DI_ITEM Index="4" Name="DI_ChamPressAboveATMSW" BufferOffset="4" Addr="4" Description="" />
<DI_ITEM Index="5" Name="DI_ChamAtSafeProcessPressSW" BufferOffset="5" Addr="5" Description="" />
<DI_ITEM Index="6" Name="DI_DORPressVac" BufferOffset="6" Addr="6" Description="" />
<DI_ITEM Index="7" Name="DI_DORPressATM" BufferOffset="7" Addr="7" Description="" />
<DI_ITEM Index="6" Name="DI_DORPressVacSW" BufferOffset="6" Addr="6" Description="" />
<DI_ITEM Index="7" Name="DI_DORPressATMSW" BufferOffset="7" Addr="7" Description="" />
<DI_ITEM Index="8" Name="DI_PumpExhaustDPLowAlarm" BufferOffset="8" Addr="8" Description="" />
<DI_ITEM Index="9" Name="DI_PMATMSW" BufferOffset="9" Addr="9" Description="" />
<DI_ITEM Index="10" Name="DI_HeaterTempUpLimitAlarm" BufferOffset="10" Addr="10" Description="" />
<DI_ITEM Index="11" Name="DI_HeaterTempLowLimitAlarm" BufferOffset="11" Addr="11" Description="" />
<DI_ITEM Index="11" Name="DI_HeaterTempLowLimitSW" BufferOffset="11" Addr="11" Description="" />
<DI_ITEM Index="12" Name="DI_ConfinementRingUp" BufferOffset="12" Addr="12" Description="" />
<DI_ITEM Index="13" Name="DI_RotaryMotorSafeSpeed" BufferOffset="13" Addr="13" Description="" />
<DI_ITEM Index="14" Name="DI_PMH2SeDetectorAlarm" BufferOffset="14" Addr="14" Description="" />
<DI_ITEM Index="15" Name="DI_SHFlowLowAlarm" BufferOffset="15" Addr="15" Description="" />
<DI_ITEM Index="16" Name="DI_ChamTopFlowLowAlarm" BufferOffset="16" Addr="16" Description="" />
<DI_ITEM Index="17" Name="DI_ChamMiddleFlow1LowAlarm" BufferOffset="17" Addr="17" Description="" />
<DI_ITEM Index="18" Name="DI_ChamBottomFlowLowAlarm" BufferOffset="18" Addr="18" Description="" />
<DI_ITEM Index="19" Name="DI_Foreline1FlowLowAlarm" BufferOffset="19" Addr="19" Description="" />
<DI_ITEM Index="20" Name="DI_PowerRod1FlowLowAlarm" BufferOffset="20" Addr="20" Description="" />
<DI_ITEM Index="21" Name="DI_PowerRod2FlowLowAlarm" BufferOffset="21" Addr="21" Description="" />
<DI_ITEM Index="22" Name="DI_Foreline2LowAlarm" BufferOffset="22" Addr="22" Description="" />
<DI_ITEM Index="23" Name="DI_ElectrodeWFlowLowAlarm" BufferOffset="23" Addr="23" Description="" />
<DI_ITEM Index="24" Name="DI_TMPump1FlowLowAlarm" BufferOffset="24" Addr="24" Description="" />
<DI_ITEM Index="25" Name="DI_TransformerFlowLowAlarm" BufferOffset="25" Addr="25" Description="" />
<DI_ITEM Index="26" Name="DI_ChamMiddleFlow2LowAlarm" BufferOffset="26" Addr="26" Description="" />
<DI_ITEM Index="27" Name="DI_InletTotalFlowLowAlarm" BufferOffset="27" Addr="27" Description="" />
<DI_ITEM Index="28" Name="DI_InletTotalFlowHighAlarm" BufferOffset="28" Addr="28" Description="" />
<DI_ITEM Index="30" Name="DI_PMH2DetectorAlarm" BufferOffset="30" Addr="30" Description="" />
<DI_ITEM Index="31" Name="DI_ArInletPressAlarm" BufferOffset="31" Addr="31" Description="" />
<DI_ITEM Index="32" Name="DI_GBSO2DetectorAlarm" BufferOffset="32" Addr="32" Description="" />
<DI_ITEM Index="33" Name="DI_GBDoorCloseDone" BufferOffset="33" Addr="33" Description="" />
<DI_ITEM Index="34" Name="DI_GBExhaustDPLowAlarm" BufferOffset="34" Addr="34" Description="" />
<DI_ITEM Index="16" Name="DI_ChamTopFlowSW" BufferOffset="16" Addr="16" Description="" />
<DI_ITEM Index="17" Name="DI_ChamMiddleFlow1SW" BufferOffset="17" Addr="17" Description="" />
<DI_ITEM Index="18" Name="DI_ChamBottomFlowSW" BufferOffset="18" Addr="18" Description="" />
<DI_ITEM Index="19" Name="DI_Foreline1FlowSW" BufferOffset="19" Addr="19" Description="" />
<DI_ITEM Index="20" Name="DI_PowerRod1FlowSW" BufferOffset="20" Addr="20" Description="" />
<DI_ITEM Index="21" Name="DI_PowerRod2FlowSW" BufferOffset="21" Addr="21" Description="" />
<DI_ITEM Index="22" Name="DI_Foreline2FlowSW" BufferOffset="22" Addr="22" Description="" />
<DI_ITEM Index="23" Name="DI_ElectrodeWFlowSW" BufferOffset="23" Addr="23" Description="" />
<DI_ITEM Index="24" Name="DI_TMPumpFlowSW" BufferOffset="24" Addr="24" Description="" />
<DI_ITEM Index="25" Name="DI_TransformerFlowSW" BufferOffset="25" Addr="25" Description="" />
<DI_ITEM Index="26" Name="DI_ChamMiddleFlow2SW" BufferOffset="26" Addr="26" Description="" />
<DI_ITEM Index="27" Name="DI_InletTotalFlowLowSW" BufferOffset="27" Addr="27" Description="" />
<DI_ITEM Index="28" Name="DI_InletTotalFlowHighSW" BufferOffset="28" Addr="28" Description="" />
<DI_ITEM Index="30" Name="DI_PMH2DetectorSW" BufferOffset="30" Addr="30" Description="" />
<DI_ITEM Index="31" Name="DI_ArInletPressSW" BufferOffset="31" Addr="31" Description="" />
<DI_ITEM Index="32" Name="DI_GBExhaustDPSW" BufferOffset="32" Addr="32" Description="" />
<DI_ITEM Index="33" Name="DI_GBDoorClosed" BufferOffset="33" Addr="33" Description="" />
<DI_ITEM Index="34" Name="DI_GBExhaustDPLowSW" BufferOffset="34" Addr="34" Description="" />
<DI_ITEM Index="35" Name="DI_GasPipeTempCtrlAlarm" BufferOffset="35" Addr="35" Description="" />
<DI_ITEM Index="36" Name="DI_DryPump1Alarm" BufferOffset="36" Addr="36" Description="" />
<DI_ITEM Index="38" Name="DI_PumpExhaustPressAlarm" BufferOffset="38" Addr="38" Description="" />
<DI_ITEM Index="39" Name="DI_PMExhaustDPLowAlarm" BufferOffset="39" Addr="39" Description="" />
<DI_ITEM Index="40" Name="DI_PMH2SDetectorAlarm" BufferOffset="40" Addr="40" Description="" />
<DI_ITEM Index="41" Name="DI_ScrubberIntlk" BufferOffset="41" Addr="41" Description="" />
<DI_ITEM Index="42" Name="DI_FacilityIntlk" BufferOffset="42" Addr="42" Description="" />
<DI_ITEM Index="38" Name="DI_PumpExhaustPressSW" BufferOffset="38" Addr="38" Description="" />
<DI_ITEM Index="39" Name="DI_PMAExhaustDPSW" BufferOffset="39" Addr="39" Description="" />
<DI_ITEM Index="40" Name="DI_PMH2SDetectorSW" BufferOffset="40" Addr="40" Description="" />
<DI_ITEM Index="41" Name="DI_ScrubberIntlkSW" BufferOffset="41" Addr="41" Description="" />
<DI_ITEM Index="42" Name="DI_FacilityIntlkSW" BufferOffset="42" Addr="42" Description="" />
<DI_ITEM Index="45" Name="DI_RotaryMotorAlarm" BufferOffset="45" Addr="45" Description="" />
<DI_ITEM Index="48" Name="DI_ReactorWaterLeakAlarm" BufferOffset="48" Addr="48" Description="" />
<DI_ITEM Index="49" Name="DI_ChamLidPushButtonRemote" BufferOffset="49" Addr="49" Description="" />
<DI_ITEM Index="48" Name="DI_ReactorWaterLeakSW" BufferOffset="48" Addr="48" Description="" />
<DI_ITEM Index="49" Name="DI_ChamLidPushButtonLocal" BufferOffset="49" Addr="49" Description="" />
<DI_ITEM Index="50" Name="DI_ConfinementRingDown" BufferOffset="50" Addr="50" Description="" />
<DI_ITEM Index="51" Name="DI_ReactorSuspectorCheck" BufferOffset="51" Addr="51" Description="" />
<DI_ITEM Index="52" Name="DI_PMSO2DetectorAlarm" BufferOffset="52" Addr="52" Description="" />
<DI_ITEM Index="55" Name="DI_GN2InletPressAlarm" BufferOffset="55" Addr="55" Description="" />
<DI_ITEM Index="55" Name="DI_GN2InletPressSW" BufferOffset="55" Addr="55" Description="" />
<DI_ITEM Index="56" Name="DI_GBH2SDetectorAlarm" BufferOffset="56" Addr="56" Description="" />
<DI_ITEM Index="57" Name="DI_GBH2SeDetectorAlarm" BufferOffset="57" Addr="57" Description="" />
<DI_ITEM Index="57" Name="DI_H2PressureSW" BufferOffset="57" Addr="57" Description="" />
<DI_ITEM Index="58" Name="DI_GBSmokeDetectorAlarm" BufferOffset="58" Addr="58" Description="" />
<DI_ITEM Index="59" Name="DI_GBH2DetectorAlarm" BufferOffset="59" Addr="59" Description="" />
<DI_ITEM Index="60" Name="DI_GBWaterLeakAlarm" BufferOffset="60" Addr="60" Description="" />
<DI_ITEM Index="59" Name="DI_GBH2DetectorSW" BufferOffset="59" Addr="59" Description="" />
<DI_ITEM Index="60" Name="DI_GBWaterLeakSW" BufferOffset="60" Addr="60" Description="" />
<DI_ITEM Index="63" Name="DI_H2PressureAlarm" BufferOffset="63" Addr="63" Description="" />
<DI_ITEM Index="65" Name="DI_DryPump1Running" BufferOffset="65" Addr="65" Description="" />
<DI_ITEM Index="67" Name="DI_DryPump1Warning" BufferOffset="67" Addr="67" Description="" />
<DI_ITEM Index="69" Name="DI_PMSmokeDetectorAlarm" BufferOffset="69" Addr="69" Description="" />
<DI_ITEM Index="70" Name="DI_EMOStatusAlarm" BufferOffset="70" Addr="70" Description="" />
<DI_ITEM Index="71" Name="DI_PumpCabDoorCloseDone" BufferOffset="71" Addr="71" Description="" />
<DI_ITEM Index="72" Name="DI_FacilityWarning" BufferOffset="72" Addr="72" Description="" />
<DI_ITEM Index="72" Name="DI_FacilityWarningSW" BufferOffset="72" Addr="72" Description="" />
<DI_ITEM Index="76" Name="DI_MainCBStatusSW" BufferOffset="76" Addr="76" Description="" />
<DI_ITEM Index="77" Name="DI_PowerRackWaterLeakAlarm" BufferOffset="77" Addr="77" Description="" />
<DI_ITEM Index="77" Name="DI_PowerRackWaterLeakSW" BufferOffset="77" Addr="77" Description="" />
<DI_ITEM Index="78" Name="DI_UPS1Enable" BufferOffset="78" Addr="78" Description="" />
<DI_ITEM Index="79" Name="DI_UPS1Bypass" BufferOffset="79" Addr="79" Description="" />
<DI_ITEM Index="80" Name="DI_UPS1Online" BufferOffset="80" Addr="80" Description="" />
<DI_ITEM Index="81" Name="DI_ProcessStop" BufferOffset="81" Addr="81" Description="" />
<DI_ITEM Index="83" Name="DI_TransformerOTAlarm" BufferOffset="83" Addr="83" Description="" />
<DI_ITEM Index="81" Name="DI_ProcessStopSW" BufferOffset="81" Addr="81" Description="" />
<DI_ITEM Index="83" Name="DI_TransformerOTSW" BufferOffset="83" Addr="83" Description="" />
<DI_ITEM Index="84" Name="DI_UPS1LowBattery" BufferOffset="84" Addr="84" Description="" />
<DI_ITEM Index="85" Name="DI_UPS2LowBattery" BufferOffset="85" Addr="85" Description="" />
<DI_ITEM Index="88" Name="DI_ManualLidOPLocal" BufferOffset="88" Addr="88" Description="" />
@ -429,7 +429,7 @@
<DO_ITEM Index="170" Name="DO_ReactorATMTransferReady" BufferOffset="170" Addr="170" Description="" />
<DO_ITEM Index="171" Name="DO_ReactorVACTransferReady" BufferOffset="171" Addr="171" Description="" />
<DO_ITEM Index="172" Name="DO_PurgeRoutineSuscessed" BufferOffset="172" Addr="172" Description="" />
<DO_ITEM Index="173" Name="DO_CleanRoutineSuscessed" BufferOffset="173" Addr="173" Description="" />
<DO_ITEM Index="173" Name="DO_CleanRoutineSucceed" BufferOffset="173" Addr="173" Description="" />
<DO_ITEM Index="174" Name="DO_ProcessRunning" BufferOffset="174" Addr="174" Description="" />
<DO_ITEM Index="175" Name="DO_PreprocessRunning" BufferOffset="175" Addr="175" Description="" />
<DO_ITEM Index="176" Name="DO_CyclePurgeRoutineRunning" BufferOffset="176" Addr="176" Description="" />
@ -753,7 +753,7 @@
<AO_ITEM Index="123" Name="AO_ConfinementRingMode" BufferOffset="123" Addr="123" Description="" />
<AO_ITEM Index="124" Name="AO_ConfinementRingSpeed" BufferOffset="124" Addr="124" Description="" />
<AO_ITEM Index="125" Name="AO_ConfinementRingDistance" BufferOffset="125" Addr="125" Description="" />
<AO_ITEM Index="127" Name="AO_ValvemodeSetpoint" BufferOffset="127" Addr="127" Description="" />
<AO_ITEM Index="127" Name="AO_ValveModeSetpoint" BufferOffset="127" Addr="127" Description="" />
<AO_ITEM Index="128" Name="AO_SetpointPositon" BufferOffset="128" Addr="128" Description="" />
<AO_ITEM Index="129" Name="AO_SetpointPressure" BufferOffset="129" Addr="129" Description="" />
<AO_ITEM Index="130" Name="AO_HeartBeat" BufferOffset="130" Addr="130" Description="" />

27
App/SicSimulator/Instances/SimulatorSystem.cs
View File

@ -19,7 +19,7 @@ namespace SicSimulator.Instances
public void Initialize()
{
//SetDefaultValue("PM1");
SetDefaultValue("PM1");
//SetDefaultValue("PM2");
//SetTMDefaultValue("TM");
@ -101,7 +101,7 @@ namespace SicSimulator.Instances
//SetWaterTemp(mod);
IO.DI[$"{mod}.DI_ConfinementRingDone"].Value = true;
IO.DI[$"{mod}.DI_DryPumpAlarm"].Value = true;
IO.DI[$"{mod}.DI_DryPump1Alarm"].Value = true;
IO.DI[$"{mod}.DI_DryPump1Warning"].Value = true;
IO.DI[$"{mod}.DI_DryPump1Running"].Value = true;
@ -109,10 +109,10 @@ namespace SicSimulator.Instances
IO.AI[$"{mod}.AI_ForelinePress"].Value = 300;
IO.AI[$"{mod}.AI_ChamPress"].Value = 300;
IO.AI[$"{mod}.AI_ActualPressure"].Value = 300;
IO.DI[$"{mod}.DI_EPV2-1FB"].Value = true;
IO.DI[$"{mod}.DI_EPV2FB"].Value = true;
IO.DI[$"{mod}.DI_ChamPressAboveATMSW"].Value = true;
IO.DI[$"{mod}.DI_HeaterTempUpLimitSW"].Value = false;
IO.DI[$"{mod}.DI_HeaterTempUpLimitAlarm"].Value = false;
IO.DI[$"{mod}.DI_ChamTopFlowSW"].Value = true;
IO.DI[$"{mod}.DI_DryPump1Running"].Value = true;
@ -138,7 +138,7 @@ namespace SicSimulator.Instances
IO.AO[$"{mod}.AO_ValveModeSetpoint"].Value = (float)2;
IO.DI[$"{mod}.DI_ChamLidClosed"].Value = true;
IO.DI[$"{mod}.DI_ChamCabDoorClosed"].Value = true;
//IO.DI[$"{mod}.DI_ChamCabDoorClosed"].Value = true;
IO.DI[$"{mod}.DI_ChamPressAboveATMSW"].Value = true;
IO.DI[$"{mod}.DI_ChamAtSafeProcessPressSW"].Value = false;
IO.DI[$"{mod}.DI_DORPressVacSW"].Value = true;
@ -146,7 +146,7 @@ namespace SicSimulator.Instances
IO.DI[$"{mod}.DI_HeaterTempLowLimitSW"].Value = true;
IO.DI[$"{mod}.DI_ConfinementRingUp"].Value = true;
IO.DI[$"{mod}.DI_ConfinementRingDown"].Value = false;
IO.DI[$"{mod}.DI_SHFlowSW"].Value = true;
IO.DI[$"{mod}.DI_ChamTopFlowSW"].Value = true;
IO.DI[$"{mod}.DI_ChamMiddleFlow1SW"].Value = true;
IO.DI[$"{mod}.DI_ChamBottomFlowSW"].Value = true;
@ -158,7 +158,7 @@ namespace SicSimulator.Instances
IO.DI[$"{mod}.DI_Foreline1FlowSW"].Value = true;
IO.DI[$"{mod}.DI_TransformerFlowSW"].Value = true;
IO.DI[$"{mod}.DI_GBH2DetectorSW"].Value = true;
IO.DI[$"{mod}.DI_GBHCLDetectorSW"].Value = true;
IO.DI[$"{mod}.DI_GBDoorClosed"].Value = true;
IO.DI[$"{mod}.DI_PumpExhaustPressSW"].Value = true;
IO.DI[$"{mod}.DI_PMATMSW"].Value = true;
@ -250,24 +250,19 @@ namespace SicSimulator.Instances
IO.DI[$"{mod}.DI_ReactorWaterLeakSW"].Value = true;
IO.DI[$"{mod}.DI_ChamMiddleFlow1SW"].Value = true;
IO.DI[$"{mod}.DI_ChamMiddleFlow2SW"].Value = true;
IO.DI[$"{mod}.DI_PumpExhaustDPSW"].Value = true;
IO.DI[$"{mod}.DI_Spare2FlowSW"].Value = true;
IO.DI[$"{mod}.DI_Spare1FlowSW"].Value = true;
IO.DI[$"{mod}.DI_H2PressureSW"].Value = true;
IO.DI[$"{mod}.DI_TCSAlarm"].Value = true;
IO.DI[$"{mod}.DI_GBExhaustDPSW"].Value = true;
IO.DI[$"{mod}.DI_PMAExhaustDPSW"].Value = true;
IO.DI[$"{mod}.DI_ServoDriverFaultSW"].Value = true;
IO.DI[$"{mod}.DI_ServoDriverFaultSW"].Value = true;
IO.DI[$"{mod}.DI_GN2InletPressSW"].Value = true;
IO.DI[$"{mod}.DI_ArInletPressSW"].Value = true;
IO.DI[$"{mod}.DI_FacilityWarningSW"].Value = true;
IO.DI[$"{mod}.DI_GBNH3DetectorSW"].Value = true;
IO.DI[$"{mod}.DI_PMNH3DetectorSW"].Value = true;
//IO.DI[$"{mod}.DI_InletTotalTempHighSW"].Value = true;
//IO.DI[$"{mod}.DI_DryPumpFlowSW"].Value = true;