load闸板阀开时判断气压差在大气时也判断一下
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@ -94,7 +94,7 @@ namespace SicModules.LLs.Routines
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if (Math.Abs(_targetPressure - LoadLockDevice.ChamberPressure) < SC.GetConfigItem("TM.PressureBalance.BalanceMaxDiffPressure").DoubleValue && LoadLockDevice.CheckVacuum())
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if (Math.Abs(_targetPressure - LoadLockDevice.ChamberPressure) < SC.GetConfigItem("TM.PressureBalance.BalanceMaxDiffPressure").DoubleValue)
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{
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{
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return Result.DONE;
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return Result.DONE;
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}
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}
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