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load闸板阀开时判断气压差在大气时也判断一下

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SIC1016\caipeilun 2026-08-18 14:23:34 +08:00
parent c305100a38
commit eb54f16fbf
1 changed files with 1 additions and 1 deletions
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App/Modules/SicModules/LLs/Routines/LoadLockServoToRoutine.cs
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@ -94,7 +94,7 @@ namespace SicModules.LLs.Routines
}
if (Math.Abs(_targetPressure - LoadLockDevice.ChamberPressure) < SC.GetConfigItem("TM.PressureBalance.BalanceMaxDiffPressure").DoubleValue && LoadLockDevice.CheckVacuum())
if (Math.Abs(_targetPressure - LoadLockDevice.ChamberPressure) < SC.GetConfigItem("TM.PressureBalance.BalanceMaxDiffPressure").DoubleValue)
{
return Result.DONE;
}