添加load腔顶升和闸板阀代码

App/Modules/SicModules/Config/TM/DeviceModelSystem.xml

@@ -110,11 +110,8 @@
     <IoSlitValve id="LoadLockDoor" module="TM" display="LLDoor" Type="" unit="" schematicId="LLDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadDoorOpened" diClose="DI_LoadDoorClosed" doOpen="DO_LoadDoorOpen" doClose="DO_LoadDoorClose" />
     <IoSlitValve id="PM1Door" module="TM" display="PM1Door" Type="" unit="" schematicId="PM1Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorADoorOpened" diClose="DI_ReactorADoorClosed" doOpen="DO_RectorADoorOpen" doClose="DO_RectorADoorClose" />
     <IoSlitValve id="PM2Door" module="TM" display="PM2Door" Type="" unit="" schematicId="PM2Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorBDoorOpened" diClose="DI_ReactorBDoorClosed" doOpen="DO_RectorBDoorOpen" doClose="DO_RectorBDoorClose" />
-    <IoSlitValve id="UnLoadDoor" module="TM" display="UnLoadDoor" Type="" unit="" schematicId="UnLoadDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadStationDoorOpened" diClose="DI_UnloadStationDoorClosed" doOpen="DO_UnloadStationDoorOpen" doClose="DO_UnloadStationDoorClose" />
     <IoSlitValve id="BufferDoor" module="TM" display="BufferDoor" Type="" unit="" schematicId="BufferDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_BufferStationDoorOpened" diClose="DI_BufferStationDoorClosed" doOpen="DO_BufferStationDoorOpen" doClose="DO_BufferStationDoorClose" />
-    <IoSlitValve id="UnLoadSubDoor" module="EFEM" display="UnLoadSubDoor" Type="" unit="" schematicId="UnLoadSubDoor" scTimeout="System.SlitValveotMionTimeout" diOpen="DI_UnloadSubStationDoorOpened" diClose="DI_UnloadSubStationDoorClosed" doOpen="DO_UnloadSubStationDoorOpen" doClose="DO_UnloadSubStationDoorClose" />
+    <IoSlitValve id="LoadLockLSideDoor" module="LoadLock" display="LLLSideDoor" Type="" unit="" schematicId="LLLSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadLSideDoorOpened" diClose="DI_LoadLSideDoorClosed" doOpen="DO_LoadLSideDoorOpen" doClose="DO_LoadLSideDoorClose" />
-    <IoSlitValve id="LoadLockLSideDoor" module="EFEM" display="LLLSideDoor" Type="" unit="" schematicId="LLLSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadLSideDoorOpened" diClose="DI_LoadLSideDoorClosed" doOpen="DO_LoadLSideDoorOpen" doClose="DO_LoadLSideDoorClose" />
-    <IoSlitValve id="LoadLockRSideDoor" module="EFEM" display="LLRSideDoor" Type="" unit="" schematicId="LLRSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadRSideDoorOpened" diClose="DI_LoadRSideDoorClosed" doOpen="DO_LoadRSideDoorOpen" doClose="DO_LoadRSideDoorClose" />
   </IoSlitValves>
   <IoPressureMeter3s classType="Aitex.Core.RT.Device.Unit.IoPressureMeter3" assembly="MECF.Framework.RT.EquipmentLibrary">
     <IoPressureMeter3 id="LLPressure" module="TM" display="LLPressure" schematicId="LLPressure" unit="mbar" aioType="float" aiValue="AI_LoadPressure" formatString="F1" MaxValue="1500" />
@@ -128,14 +125,9 @@
     <IoTempMeter module="Buffer" id="BufferTemp" display="" schematicId="" aioType="float" aiFeedback="AI_BufferTemp" />
   </IoTempMeters>
   <IoLift4s classType="Aitex.Core.RT.Device.Unit.IoLift4" assembly="MECF.Framework.RT.EquipmentLibrary">
+    <IoLift4 id="LLLift"		module="LoadLock" display="LLLift" schematicId="LLLift" unit="" aioType="" diUp="DI_LoadLockWaferCYUPFB" diDown="DI_LoadLockWaferCYDownFB" doUp="DO_LoadLockWaferCYUP" doDown="DO_LoadLockWaferCYDown" scTimeout="10"/>
     <IoLift4 id="LoadLidLock" module="LoadLock" display="LoadLidLock" schematicId="LoadLidLock" unit="" aioType="" diUp="DI_LoadLidLocked" diDown="DI_LoadLidUnlocked" doUp="DO_LoadLidLock" doDown="DO_LoadLidUnlock" scTimeout="10" />
-    <IoLift4 id="UnLoadLift" module="UnLoad" display="UnLoadLift" schematicId="UnLoadLift" unit="" aioType="" diUp="DI_UnloadStationLifterCYUp" diDown="DI_UnloadStationLifterCYDown" doUp="DO_UnloadStationLifterCYUp" doDown="DO_UnloadStationLifterCYDown" scTimeout="10" />
   </IoLift4s>
-  <IoClaws classType="Aitex.Core.RT.Device.Unit.IoClaw" assembly="MECF.Framework.RT.EquipmentLibrary">
-    <IoClaw id="LLWaferClaw" module="LoadLock" display="LLWaferClaw" schematicId="LLWaferClaw" unit="" aioType="" diUp="DI_LoadWaferCYClamped" diDown="DI_LoadWafeCYOpened" doUp="DO_LoadWaferCYClamp" doDown="DO_LoadWaferCYOpen" scTimeout="10" />
-    <IoClaw id="LLTrayClaw" module="LoadLock" display="LLTrayClaw" schematicId="LLTrayClaw" unit="" aioType="" diUp="DI_LoadTrayCYClamped" diDown="DI_LoadTrayCYOpend" doUp="DO_LoadTrayCYClamp" doDown="DO_LoadTrayCYOpen" scTimeout="10" />
-    <IoClaw id="UnLoadWaferClaw" module="UnLoad" display="UnLoadWaferClaw" schematicId="UnLoadWaferClaw" unit="" aioType="" diUp="DI_UnloadStationWaferCYClamped" diDown="DI_UnloadStationWaferCYOpened" doUp="DO_UnloadStationWaferCYClamp" doDown="DO_UnloadStationWaferCYOpen" scTimeout="10" />
-  </IoClaws>
   <TMRobots assembly="SicModules" classType="SicModules.TMs.SicTMRobot">
     <TMRobot id="TMRobot" module="TMRobot" display="" schematicId="" unit="" />
   </TMRobots>
@@ -152,10 +144,11 @@
   <LLs assembly="SicModules" classType="SicModules.LLs.SicLoadLock">
     <TM id="LoadLock" module="LoadLock" display="" schematicId="" unit="" />
   </LLs>
-  <Unloads assembly="SicModules" classType="SicModules.UnLoads.SicUnLoad">
-    <Unload id="UnLoad" module="UnLoad" display="" schematicId="" unit="" />
-  </Unloads>
   <Buffers assembly="SicModules" classType="SicModules.Buffers.SicBuffer">
     <Buffer id="Buffer" module="Buffer" display="" schematicId="" unit="" />
   </Buffers>
+
+  <EFEMs assembly="SicModules" classType="SicModules.EFEMs.SicEFEM">
+    <Efem id="EFEM" module="EFEM"  display="" schematicId="" unit="" />
+  </EFEMs>
 </DeviceModelDefine>

App/Modules/SicModules/Config/TM/IODefinePlatform.xml

@@ -288,14 +288,14 @@
       <DO_ITEM Index="154" Name="DO_LdRotationMoveCCD2Pos" BufferOffset="154" Addr="154" Description="" Visible="false"/>
 
       <!--垃圾IO数据-->
-      <DO_ITEM Index="158" Name="DO_LoadLidLock" BufferOffset="158" Addr="158" Description="" Visible="false"/>
+      <!--<DO_ITEM Index="158" Name="DO_LoadLidLock" BufferOffset="158" Addr="158" Description="" Visible="false"/>
       <DO_ITEM Index="158" Name="DO_LoadLidUnlock" BufferOffset="158" Addr="158" Description="" Visible="false"/>
       <DO_ITEM Index="158" Name="DO_LoadWaferCYClamp" BufferOffset="158" Addr="158" Description="" Visible="false"/>
       <DO_ITEM Index="158" Name="DO_LoadWaferCYOpen" BufferOffset="158" Addr="158" Description="" Visible="false"/>
       <DO_ITEM Index="158" Name="DO_LoadTrayCYClamp" BufferOffset="158" Addr="158" Description="" Visible="false"/>
       <DO_ITEM Index="158" Name="DO_LoadTrayCYOpen" BufferOffset="158" Addr="158" Description="" Visible="false"/>
       <DO_ITEM Index="158" Name="DO_LoadRSideDoorClose" BufferOffset="158" Addr="158" Description="" Visible="false"/>
-      <DO_ITEM Index="158" Name="DO_LoadRSideDoorOpen" BufferOffset="158" Addr="158" Description="" Visible="false"/>
+      <DO_ITEM Index="158" Name="DO_LoadRSideDoorOpen" BufferOffset="158" Addr="158" Description="" Visible="false"/>-->
       <!--垃圾IO数据-->
     </Block>
   </Dig_Out>

App/Modules/SicModules/LLs/LoadLockModule.cs

@@ -1,7 +1,4 @@
-using System;
+using Aitex.Core.RT.DataCenter;
-using System.Threading;
-using System.Threading.Tasks;
-using Aitex.Core.RT.DataCenter;
 using Aitex.Core.RT.Device;
 using Aitex.Core.RT.Event;
 using Aitex.Core.RT.Fsm;
@@ -13,7 +10,12 @@ using Aitex.Core.Utilities;
 using Aitex.Sorter.Common;
 using MECF.Framework.Common.Equipment;
 using MECF.Framework.Common.Schedulers;
+using SicModules.EFEMs.Routines;
 using SicModules.LLs.Routines;
+using SicModules.TMs.Routines;
+using System;
+using System.Threading;
+using System.Threading.Tasks;
 
 namespace SicModules.LLs
 {
@@ -39,6 +41,8 @@ namespace SicModules.LLs
             Separating,
             Grouping,
             RotationHomeOffset,
+            OpenSlitValve,
+            CloseSlitValve,
         }
 
         public enum MSG
@@ -63,6 +67,8 @@ namespace SicModules.LLs
             Separate,
             Group,
             RelativeHomeOffset,
+            OpenSlitValve,
+            CloseSlitValve,
         }
 
 
@@ -167,6 +173,7 @@ namespace SicModules.LLs
         private LoadSeparateRoutine _loadSeparateRoutine;
 
         private LoadRotationHomeOffsetRoutine _loadRotationHomeOffsetRoutine;
+        private LoadLockSlitValveRoutine _slitValveRoutine;
 
 
         public LoadLockModule(ModuleName module) : base(1)
@@ -217,6 +224,7 @@ namespace SicModules.LLs
             _loadLockGroupRoutine = new LoadLockGroupRoutine(module);
             _loadSeparateRoutine = new LoadSeparateRoutine(module);
             _loadRotationHomeOffsetRoutine = new LoadRotationHomeOffsetRoutine();
+            _slitValveRoutine = new LoadLockSlitValveRoutine();
         }
 
         private void InitDevice()
@@ -243,7 +251,6 @@ namespace SicModules.LLs
 
             Transition(STATE.Error, MSG.Reset, FsmReset, STATE.Idle);
 
-
             //PrepareTransfer
             Transition(STATE.Idle, MSG.PrepareTransfer, FsmStartPrepareTransfer, STATE.PrepareTransfer);
             Transition(STATE.PrepareTransfer, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
@@ -273,6 +280,15 @@ namespace SicModules.LLs
             Transition(STATE.LeakCheck, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
             Transition(STATE.LeakCheck, MSG.Abort, FsmAbortTask, STATE.Idle);
 
+            //open SlitValve
+            Transition(STATE.Idle, MSG.OpenSlitValve, FsmStartOpenSlitValve, STATE.OpenSlitValve);
+            Transition(STATE.OpenSlitValve, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
+            Transition(STATE.OpenSlitValve, MSG.Abort, FsmAbortTask, STATE.Idle);
+
+            //close SlitValve
+            Transition(STATE.Idle, MSG.CloseSlitValve, FsmStartCloseSlitValve, STATE.CloseSlitValve);
+            Transition(STATE.CloseSlitValve, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
+            Transition(STATE.CloseSlitValve, MSG.Abort, FsmAbortTask, STATE.Idle);
 
             //Separate
             Transition(STATE.Idle, MSG.Separate, FsmStartSeparate, STATE.Separating);
@@ -331,6 +347,16 @@ namespace SicModules.LLs
                 return CheckToPostMessage((int)MSG.CloseDoor);
             });
 
+            OP.Subscribe($"{Name}.OpenSlitValve", (string cmd, object[] args) =>
+            {
+                return CheckToPostMessage((int)MSG.OpenSlitValve);
+            });
+
+            OP.Subscribe($"{Name}.CloseSlitValve", (string cmd, object[] args) =>
+            {
+                return CheckToPostMessage((int)MSG.CloseSlitValve);
+            });
+
             OP.Subscribe($"{Name}.Reset", (string cmd, object[] args) =>
             {
                 return CheckToPostMessage((int)MSG.Reset);
@@ -693,6 +719,26 @@ namespace SicModules.LLs
             return false;
         }
 
+        private bool FsmStartOpenSlitValve(object[] param)
+        {
+            _slitValveRoutine.Init(true);
+
+            Result ret = StartRoutine(_slitValveRoutine);
+            if (ret == Result.FAIL || ret == Result.DONE)
+                return false;
+            return ret == Result.RUN;
+        }
+
+        private bool FsmStartCloseSlitValve(object[] param)
+        {
+            _slitValveRoutine.Init(false);
+
+            Result ret = StartRoutine(_slitValveRoutine);
+            if (ret == Result.FAIL || ret == Result.DONE)
+                return false;
+            return ret == Result.RUN;
+        }
+
         public override bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
         {
             reason = string.Empty;

App/Modules/SicModules/LLs/Routines/LoadLockSlitValveRoutine.cs

@@ -0,0 +1,145 @@
+using Aitex.Core.RT.Device;
+using Aitex.Core.RT.Device.Unit;
+using Aitex.Core.RT.Event;
+using Aitex.Core.RT.Routine;
+using Aitex.Core.RT.SCCore;
+using MECF.Framework.Common.Equipment;
+using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
+using SicModules.EFEMs.Routines;
+using SicModules.TMs;
+using System;
+using System.Collections.Generic;
+using System.Linq;
+using System.Reflection;
+using System.Text;
+using System.Threading.Tasks;
+using System.Xml.Linq;
+
+namespace SicModules.LLs.Routines
+{
+    public class LoadLockSlitValveRoutine : LoadLockBaseRoutine
+    {
+        enum RoutineStep
+        {
+            ServoRoutine,
+            LiftRoutine,
+            CheckPressureCondition,
+            CheckPressure,
+            SetSlitValve,
+            CheckPressureCondition2,
+            TimeDlay1
+        }
+
+        private int _motionTimeout = 30;
+        private bool _paramIsOpen;          //是否开门
+        private SicTM _tm;
+        private IoSlitValve _slitvalveLoadLockLeft;
+        private LoadLockServoToRoutine _llServoToRoutine;
+        private LoadLockLiftRoutine _llLiftRoutine;
+
+        public void Init(bool isOpen)
+        {
+            _paramIsOpen = isOpen;
+            Name = isOpen ? "Open Slit Valve" : "Close Slit Valve";
+        }
+
+        public LoadLockSlitValveRoutine()
+        {
+            Module = ModuleName.LoadLock.ToString();
+            Name = "LoadLockSlitValue";
+            _tm = DEVICE.GetDevice<SicTM>($"{ModuleName.System.ToString()}.{ModuleName.TM.ToString()}");
+            _llServoToRoutine = new LoadLockServoToRoutine(ModuleName.LoadLock);
+
+            _llLiftRoutine = new LoadLockLiftRoutine();
+            _slitvalveLoadLockLeft = DEVICE.GetDevice<IoSlitValve>("LoadLock.LoadLockLSideDoor");
+
+        }
+
+        public override Result Start(params object[] objs)
+        {
+            Reset();
+            if (_paramIsOpen)
+            {
+                //判断TM到LoadLock或者UnLoad的门是否关上
+                if (!_tm.CheckSlitValveClose(ModuleName.LoadLock))
+                {
+                    EV.PostWarningLog(Module, $"can not open left slit valve,TM slit valve not closed, can not open at same time");
+                    return Result.FAIL;
+                }
+
+                _motionTimeout = SC.GetValue<int>("System.SlitValveMotionTimeout");
+
+                _llServoToRoutine.Init(SC.GetValue<double>("LoadLock.AtmPressureBase"));
+                _llLiftRoutine.Init(false);
+            }
+            Notify("Start");
+            return Result.RUN;
+        }
+
+        public override Result Monitor()
+        {
+            try
+            {
+                //开门之前需要对两边腔体进行气压调节,降Lift
+                if (_paramIsOpen)
+                {
+                    ExecuteRoutine((int)RoutineStep.ServoRoutine, _llServoToRoutine);
+                    ExecuteRoutine((int)RoutineStep.LiftRoutine, _llLiftRoutine);
+                }
+
+                SetSlitValve((int)RoutineStep.SetSlitValve, _paramIsOpen, _motionTimeout);
+
+                TimeDelay((int)RoutineStep.TimeDlay1, 1);
+
+            }
+            catch (RoutineBreakException)
+            {
+                return Result.RUN;
+            }
+            catch (RoutineFaildException)
+            {
+                return Result.FAIL;
+            }
+
+            Notify("Finished");
+            return Result.DONE;
+
+        }
+
+        public void SetSlitValve(int id, bool isOpen, int timeout)
+        {
+            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
+            {
+                Notify($"set left slit valve  " + (isOpen ? "Open" : "Close"));
+
+                if (!_slitvalveLoadLockLeft.SetSlitValve(isOpen, out string reason))
+                {
+                    Stop(reason);
+                    return false;
+                }
+
+                return true;
+            }, () =>
+            {
+                return isOpen ? _slitvalveLoadLockLeft.IsOpen : _slitvalveLoadLockLeft.IsClose;
+
+            }, timeout * 1000);
+
+            if (ret.Item1)
+            {
+                if (ret.Item2 == Result.FAIL)
+                {
+                    throw (new RoutineFaildException());
+                }
+                else if (ret.Item2 == Result.TIMEOUT) //timeout
+                {
+                    Stop($"can not complete in {timeout} seconds");
+                    throw (new RoutineFaildException());
+                }
+                else
+                    throw (new RoutineBreakException());
+            }
+        }
+
+    }
+}

App/Modules/SicModules/SicModules.csproj

@@ -98,6 +98,7 @@
     <Compile Include="LLs\Routines\LoadLockPumpRoutine.cs" />
     <Compile Include="LLs\Routines\LoadLockPurgeRoutine.cs" />
     <Compile Include="LLs\Routines\LoadLockServoToRoutine.cs" />
+    <Compile Include="LLs\Routines\LoadLockSlitValveRoutine.cs" />
     <Compile Include="LLs\Routines\LoadLockTrayAlignerRoutine.cs" />
     <Compile Include="LLs\Routines\LoadLockTrayClawRoutine.cs" />
     <Compile Include="LLs\Routines\LoadLockVentRoutine.cs" />

App/SicSimulator/Instances/SimulatorSystem.cs

@@ -736,35 +736,24 @@ namespace SicSimulator.Instances
                 IO.DI["DI_ReactorBDoorClosed"].Value = IO.DO["DO_RectorBDoorClose"].Value;
             }
 
-            if (IO.DO["DO_UnloadStationDoorOpen"].Value != IO.DO["DO_UnloadStationDoorClose"].Value)
-            {
-                IO.DI["DI_UnloadStationDoorOpened"].Value = IO.DO["DO_UnloadStationDoorOpen"].Value;
-                IO.DI["DI_UnloadStationDoorClosed"].Value = IO.DO["DO_UnloadStationDoorClose"].Value;
-            }
-
             if (IO.DO["DO_BufferStationDoorOpen"].Value != IO.DO["DO_BufferStationDoorClose"].Value)
             {
                 IO.DI["DI_BufferStationDoorOpened"].Value = IO.DO["DO_BufferStationDoorOpen"].Value;
                 IO.DI["DI_BufferStationDoorClosed"].Value = IO.DO["DO_BufferStationDoorClose"].Value;
             }
 
-            if (IO.DO["DO_UnloadSubStationDoorOpen"].Value != IO.DO["DO_UnloadSubStationDoorClose"].Value)
-            {
-                IO.DI["DI_UnloadSubStationDoorOpened"].Value = IO.DO["DO_UnloadSubStationDoorOpen"].Value;
-                IO.DI["DI_UnloadSubStationDoorClosed"].Value = IO.DO["DO_UnloadSubStationDoorClose"].Value;
-            }
-
             if (IO.DO["DO_LoadLSideDoorOpen"].Value != IO.DO["DO_LoadLSideDoorClose"].Value)
             {
                 IO.DI["DI_LoadLSideDoorOpened"].Value = IO.DO["DO_LoadLSideDoorOpen"].Value;
                 IO.DI["DI_LoadLSideDoorClosed"].Value = IO.DO["DO_LoadLSideDoorClose"].Value;
             }
 
-            if (IO.DO["DO_LoadRSideDoorOpen"].Value != IO.DO["DO_LoadRSideDoorClose"].Value)
+            if (IO.DO["DO_LoadLidLock"].Value != IO.DO["DO_LoadLidUnlock"].Value)
             {
-                IO.DI["DI_LoadRSideDoorOpened"].Value = IO.DO["DO_LoadRSideDoorOpen"].Value;
+                IO.DI["DI_LoadLidLocked"].Value = IO.DO["DO_LoadLidLock"].Value;
-                IO.DI["DI_LoadRSideDoorClosed"].Value = IO.DO["DO_LoadRSideDoorClose"].Value;
+                IO.DI["DI_LoadLidUnlocked"].Value = IO.DO["DO_LoadLidUnlock"].Value;
             }
+            
         }
 
         private int time1 = 0;
@@ -801,6 +790,16 @@ namespace SicSimulator.Instances
 
             IO.AI["AI_M60FlowRead"].Value = IO.AO[$"AO_M60FlowSetpoint"].Value;
 
+            if (IO.DO["DO_LoadLockWaferCYUP"].Value != IO.DO["DO_LoadLockWaferCYDown"].Value)
+            {
+                time1++;
+                if (time1 > 10)
+                {
+                    time1 = 0;
+                    IO.DI["DI_LoadLockWaferCYUPFB"].Value = IO.DO["DO_LoadLockWaferCYUP"].Value;
+                    IO.DI["DI_LoadLockWaferCYDownFB"].Value = IO.DO["DO_LoadLockWaferCYDown"].Value;
+                }
+            }
             //if (IO.DO["DO_LoadLidLock"].Value != IO.DO["DO_LoadLidUnlock"].Value)
             //{
             //    time1++;

App/SicUI/Models/Maintenances/TM/TMView.xaml

@@ -1321,6 +1321,7 @@
                         <RowDefinition Height="32" />
                         <RowDefinition Height="32" />
                         <RowDefinition Height="32" />
+                        <RowDefinition Height="32" />
                         <RowDefinition />
                     </Grid.RowDefinitions>
                     <Grid.ColumnDefinitions>
@@ -1729,46 +1730,162 @@
                     </Border>
 
                     <Border
-                        Grid.Row="6"
+    Grid.Row="6"
-                        Padding="5,1,0,1"
+    Padding="5,1,0,1"
-                        Background="{DynamicResource Table_BG_Title}"
+    Background="{DynamicResource Table_BG_Title}"
-                        BorderBrush="{DynamicResource Table_BD}"
+    BorderBrush="{DynamicResource Table_BD}"
-                        BorderThickness="1,0,1,1">
+    BorderThickness="1,0,1,1">
                         <TextBlock
-                            lex:ResxLocalizationProvider.DefaultDictionary="lang_tmview"
+        VerticalAlignment="Center"
-                            VerticalAlignment="Center"
+        lex:ResxLocalizationProvider.DefaultDictionary="lang_efemview"
-                            FontFamily="Arial"
+        FontFamily="Arial"
-                            FontSize="12"
+        FontSize="12"
-                            Foreground="{DynamicResource FG_Black}"
+        Foreground="{DynamicResource FG_Black}"
-                            Text="{lex:Loc ID_TXT_CoolingTime}"
+        Text="{lex:Loc ID_TXT_Door}"
-                            TextWrapping="Wrap" />
+        TextWrapping="Wrap" />
                     </Border>
                     <Border
-                        Grid.Row="6"
+    Grid.Row="6"
-                        Grid.Column="1"
+    Grid.Column="1"
-                        Padding="5,1,0,1"
+    Padding="5,1,0,1"
-                        Background="{DynamicResource Table_BG_Content}"
+    Background="{DynamicResource Table_BG_Content}"
-                        BorderBrush="{DynamicResource Table_BD}"
+    BorderBrush="{DynamicResource Table_BD}"
-                        BorderThickness="0,0,0,1">
+    BorderThickness="0,0,0,1">
-                        <TextBlock
+                        <TextBlock Margin="0,7,0,0"
-                            VerticalAlignment="Center"
+VerticalAlignment="Top"
-                            FontFamily="Arial"
+FontFamily="Arial"
-                            FontSize="12"
+FontSize="12"
-                            Foreground="{DynamicResource FG_Black}"
+Foreground="{DynamicResource FG_Black}"
-                            Text="{Binding LoadCoolingTime, StringFormat=0.0}"
+Text="LeftSide"
-                            TextAlignment="Center"
+TextAlignment="Center"
-                            TextWrapping="Wrap" />
+TextWrapping="Wrap" />
                     </Border>
                     <Border
-                        Grid.Row="6"
+    Grid.Row="6"
-                        Grid.Column="2"
+    Grid.Column="2"
-                        Padding="5,1"
+    Padding="5,1"
-                        Background="{DynamicResource Table_BG_Content}"
+    Background="{DynamicResource Table_BG_Content}"
-                        BorderBrush="{DynamicResource Table_BD}"
+    BorderBrush="{DynamicResource Table_BD}"
-                        BorderThickness="1,0,1,1">
+    BorderThickness="1,0,1,1">
-                        <StackPanel Orientation="Horizontal" />
+                        <StackPanel Orientation="Horizontal">
+                            <Button
+            Width="80"
+            Height="25"
+            Margin="10,0"
+            HorizontalAlignment="Left"
+            Content="{lex:Loc ID_BTN_Open_Content}"
+            IsEnabled="{Binding IsLLEnableManualOperation}">
+                                <i:Interaction.Triggers>
+                                    <i:EventTrigger EventName="Click">
+                                        <cal:ActionMessage MethodName="LoadOpenSlitValve" />
+                                    </i:EventTrigger>
+                                </i:Interaction.Triggers>
+                            </Button>
+                            <deviceControl:AITSensor
+    HorizontalAlignment="Center"
+    VerticalAlignment="Center"
+    GreenColor="True"
+    LightOnValue="{Binding LoadLockLSideDoorOpenSensor}" />
+                            <Button
+            Width="80"
+            Height="25"
+            Margin="10,0"
+            HorizontalAlignment="Left"
+            Content="{lex:Loc ID_BTN_Close_Content}"
+            IsEnabled="{Binding IsLLEnableManualOperation}">
+                                <i:Interaction.Triggers>
+                                    <i:EventTrigger EventName="Click">
+                                        <cal:ActionMessage MethodName="LoadCloseSlitValve" />
+                                    </i:EventTrigger>
+                                </i:Interaction.Triggers>
+                            </Button>
+                            <deviceControl:AITSensor
+    HorizontalAlignment="Center"
+    VerticalAlignment="Center"
+    GreenColor="True"
+    LightOnValue="{Binding LoadLockLSideDoorCloseSensor}" />
+                        </StackPanel>
                     </Border>
 
+                    <Border
+    Grid.Row="7"
+    Padding="5,1,0,1"
+    Background="{DynamicResource Table_BG_Title}"
+    BorderBrush="{DynamicResource Table_BD}"
+    BorderThickness="1,0,1,1">
+                        <TextBlock
+        VerticalAlignment="Center"
+        lex:ResxLocalizationProvider.DefaultDictionary="lang_efemview"
+        FontFamily="Arial"
+        FontSize="12"
+        Foreground="{DynamicResource FG_Black}"
+        Text="{lex:Loc ID_TXT_Lift}"
+        TextWrapping="Wrap" />
+                    </Border>
+                    <Border
+    Grid.Row="7"
+    Grid.Column="1"
+    Padding="5,1,0,1"
+    Background="{DynamicResource Table_BG_Content}"
+    BorderBrush="{DynamicResource Table_BD}"
+    BorderThickness="0,0,0,1">
+                        <TextBlock
+        VerticalAlignment="Center"
+        FontFamily="Arial"
+        FontSize="12"
+        Foreground="{DynamicResource FG_Black}"
+        Text=""
+        TextAlignment="Center"
+        TextWrapping="Wrap" />
+                    </Border>
+                    <Border
+    Grid.Row="7"
+    Grid.Column="2"
+    Padding="5,1"
+    Background="{DynamicResource Table_BG_Content}"
+    BorderBrush="{DynamicResource Table_BD}"
+    BorderThickness="1,0,1,1">
+                        <StackPanel Orientation="Horizontal">
+                            <deviceControl:AITSensor
+            Margin="10,0,0,0"
+            HorizontalAlignment="Center"
+            GreenColor="True"
+            LightOnValue="{Binding LoadLiftUpSensor}" />
+                            <Button
+            Width="80"
+            Height="24"
+            Margin="10,0"
+            HorizontalAlignment="Left"
+            lex:ResxLocalizationProvider.DefaultDictionary="lang_efemview"
+            Content="{lex:Loc ID_BTN_Up_Content}"
+            IsEnabled="{Binding IsLLEnableManualOperation}">
+                                <i:Interaction.Triggers>
+                                    <i:EventTrigger EventName="Click">
+                                        <cal:ActionMessage MethodName="LLLiftUp" />
+                                    </i:EventTrigger>
+                                </i:Interaction.Triggers>
+                            </Button>
+                            <deviceControl:AITSensor
+            Margin="60,0,0,0"
+            HorizontalAlignment="Center"
+            GreenColor="True"
+            LightOnValue="{Binding LoadLiftDownSensor}" />
+                            <Button
+            Width="80"
+            Height="24"
+            Margin="10,0"
+            HorizontalAlignment="Left"
+            lex:ResxLocalizationProvider.DefaultDictionary="lang_efemview"
+            Content="{lex:Loc ID_BTN_Down_Content}"
+            IsEnabled="{Binding IsLLEnableManualOperation}">
+                                <i:Interaction.Triggers>
+                                    <i:EventTrigger EventName="Click">
+                                        <cal:ActionMessage MethodName="LLLiftDown" />
+                                    </i:EventTrigger>
+                                </i:Interaction.Triggers>
+                            </Button>
+                        </StackPanel>
+                    </Border>
                 </Grid>
             </StackPanel>
 

App/SicUI/Models/Maintenances/TM/TMViewModel.cs

@@ -701,6 +701,18 @@ namespace SicUI.Client.Models.Platform.TM
         [Subscription("LoadLock.Status")]
         public string LLStatus { get; set; }
 
+        [Subscription("LoadLock.LLLift.UpSensor")]
+        public bool LoadLiftUpSensor { get; set; }
+
+        [Subscription("LoadLock.LLLift.DownSensor")]
+        public bool LoadLiftDownSensor { get; set; }
+
+        [Subscription("LoadLock.LoadLockLSideDoor.OpenFeedback")]
+        public bool LoadLockLSideDoorOpenSensor { get; set; }
+
+        [Subscription("LoadLock.LoadLockLSideDoor.CloseFeedback")]
+        public bool LoadLockLSideDoorCloseSensor { get; set; }
+
         [Subscription("LoadLock.LidState")]
         public string LLLidState { get; set; }
 
@@ -1028,14 +1040,17 @@ namespace SicUI.Client.Models.Platform.TM
 
             TMProvider.Instance.Purge(module);
         }
-        public void LiftUp(string module)
+
+        public void LLLiftUp()
         {
-            TMProvider.Instance.LiftUp(module);
+            InvokeClient.Instance.Service.DoOperation($"LoadLock.LLLift.MoveUp");
         }
-        public void LiftDown(string module)
+
+        public void LLLiftDown()
         {
-            TMProvider.Instance.LiftDown(module);
+            InvokeClient.Instance.Service.DoOperation($"LoadLock.LLLift.MoveDown");
         }
+
         public void OpenDoor(string module)
         {
             TMProvider.Instance.OpenDoor(module);
@@ -1126,7 +1141,14 @@ namespace SicUI.Client.Models.Platform.TM
             InvokeClient.Instance.Service.DoOperation($"LoadLock.LoadLidLock.MoveDown");
         }
 
-
+        public void LoadOpenSlitValve()
+        {
+            InvokeClient.Instance.Service.DoOperation($"LoadLock.OpenSlitValve");
+        }
+        public void LoadCloseSlitValve()
+        {
+            InvokeClient.Instance.Service.DoOperation($"LoadLock.CloseSlitValve");
+        }
         #endregion
 
         #region ConfinementRing
@@ -1153,34 +1175,5 @@ namespace SicUI.Client.Models.Platform.TM
 
         #endregion
 
-
-        #region EFEM
-        [Subscription("EFEM.Status")]
-        public string EFEMStatus { get; set; }
-
-
-        [Subscription("EFEM.IsOnline")]
-        public bool EFEMIsOnline { get; set; }
-        public bool EFEMIsOffline => !EFEMIsOnline;
-
-        public bool IsEFEMEnableManualOperation => !EFEMIsOnline && EFEMStatus == "Idle";
-
-        public void EFEMHomeRoutine(string module)
-        {
-            InvokeClient.Instance.Service.DoOperation($"{module}.Home");
-        }
-        public void EFEMAbortRoutine(string module)
-        {
-            InvokeClient.Instance.Service.DoOperation($"{module}.Abort");
-        }
-        public void SetModuleOnline(string module)
-        {
-            InvokeClient.Instance.Service.DoOperation($"{module}.SetOnline");
-        }
-        public void SetModuleOffline(string module)
-        {
-            InvokeClient.Instance.Service.DoOperation($"{module}.SetOffline");
-        }
-        #endregion
     }
 }