@ -1,38 +1,38 @@
<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type= " GaN " xmlns:xsi= "http://www.w3.org/2001/XMLSchema-instance" >
<DeviceModelDefine type= " Sic " xmlns:xsi= "http://www.w3.org/2001/XMLSchema-instance" >
<!-- 给IO数值初始值仿真 -->
<!-- 给IO数值初始值仿真 --> <!--
<IoValveGroup classType= "MECF.Framework.Simulator.Core.SimulatorIoDefault" assembly= "MECF.Framework.Simulator.Core" >
<IoDefaults id= "IoDefault" display= "" schematicId= "" unit= "" >
<!-- 测试仿真功能配置用法示例,后期删除 -->
<!-- <IODefault type="AI" ioName="AI_ButterflyValveActualPressure" default="330"/> -->
<!-- <IODefault type="AO" ioName="AO_M2" default="2000"/> -->
<!-- 测试仿真功能配置用法示例,后期删除 -->
<!-- <IODefault type="AI" ioName="AI_ButterflyValveActualPressure" default="1030"/> -->
--> <!-- 测试仿真功能配置用法示例,后期删除 --> <!--
--> <!-- <IODefault type="AI" ioName="AI_ButterflyValveActualPressure" default="330"/> --> <!--
--> <!-- <IODefault type="AO" ioName="AO_M2" default="2000"/> --> <!--
--> <!-- 测试仿真功能配置用法示例,后期删除 --> <!--
--> <!-- <IODefault type="AI" ioName="AI_ButterflyValveActualPressure" default="1030"/> --> <!--
<!-- interlock默认值 -->
--> <!-- interlock默认值 --> <!--
<!-- Interlock默认值 -->
<!-- Alarm默认值 -->
--> <!-- Interlock默认值 --> <!--
--> <!-- Alarm默认值 --> <!--
<!-- Alarm默认值 -->
--> <!-- Alarm默认值 --> <!--
</IoDefaults>
</IoValveGroup>
<!-- 给AI或AO在基准值上写入随机数, baseValue是基准数值配置 -->
--> <!-- 给AI或AO在基准值上写入随机数, baseValue是基准数值配置 --> <!--
<AI_AORandomGroup classType= "MECF.Framework.Simulator.Core.SimulatorAI_AORandom" assembly= "MECF.Framework.Simulator.Core" >
<AI_AORandoms id= "AI_AORandom" display= "" schematicId= "" unit= "" >
<!-- 测试仿真功能配置用法示例,后期删除 -->
<!-- <Random type="AO" ioName="AO_PressCtrl1" baseValue="30" /> -->
<!-- 测试仿真功能配置用法示例,后期删除 -->
--> <!-- 测试仿真功能配置用法示例,后期删除 --> <!--
--> <!-- <Random type="AO" ioName="AO_PressCtrl1" baseValue="30" /> --> <!--
--> <!-- 测试仿真功能配置用法示例,后期删除 --> <!--
<!-- 水路温度仿真 -->
--> <!-- 水路温度仿真 --> <!--
<!-- <Random type="AI" ioName="AI_MoSourceFlowTemp" baseValue="21" />
--> <!-- <Random type="AI" ioName="AI_MoSourceFlowTemp" baseValue="21" />
<Random type= "AI" ioName= "AI_PMPumpFlowTemp" baseValue= "22" />
<Random type= "AI" ioName= "AI_TMpumpFlowTemp" baseValue= "23" />
<Random type= "AI" ioName= "AI_HeatingCoilFlowTemp" baseValue= "24" />
@ -45,284 +45,112 @@
<Random type= "AI" ioName= "AI_ReactorRingFlowTemp" baseValue= "31" />
<Random type= "AI" ioName= "AI_BottomFlowTemp" baseValue= "32" />
<Random type= "AI" ioName= "AI_GasInletBottomFlowTemp" baseValue= "33" />
<Random type= "AI" ioName= "AI_TemChillerFlowTemp" baseValue= "34" /> -->
<Random type= "AI" ioName= "AI_TemChillerFlowTemp" baseValue= "34" /> --><!--
</AI_AORandoms>
</AI_AORandomGroup>
<!-- DO数值实时刷到DI, DO设置初始值, 初始值可以不设置 -->
--> <!-- DO数值实时刷到DI, DO设置初始值, 初始值可以不设置 --> <!--
<IoDO_DIGroup classType= "MECF.Framework.Simulator.Core.SimulatorIoDO_DI" assembly= "MECF.Framework.Simulator.Core" >
<IoDO_DIs id= "IoDO_DI" display= "" schematicId= "" unit= "" >
<!-- <DO_DI doDefault="" do="DO_PID01StartRunning" di="DI_PID01RunningState" /> -->
--> <!-- <DO_DI doDefault="" do="DO_PID01StartRunning" di="DI_PID01RunningState" /> --> <!--
</IoDO_DIs>
</IoDO_DIGroup>
<!-- AO数值实时刷到AI, AO设置初始值, 初始值可以不设置 -->
--> <!-- AO数值实时刷到AI, AO设置初始值, 初始值可以不设置 --> <!--
<IoAO_AIGroup classType= "MECF.Framework.Simulator.Core.SimulatorIoAO_AI" assembly= "MECF.Framework.Simulator.Core" >
<IoAO_AIs id= "IoAO_AI" display= "" schematicId= "" unit= "" >
</IoAO_AIs>
</IoAO_AIGroup>
</IoAO_AIGroup> -->
<IoValveGroup classType= "MECF.Framework.Simulator.Core.SimulatorIoValve" assembly= "MECF.Framework.Simulator.Core" >
<!-- 这里是包了一层, 复制PM配置的气阀时需要注意 -->
<IoValves id= "IoValves" display= "" schematicId= "" unit= "" >
<IoValve id= "V18" display= "MoCO6CarrierOutlet" schematicId= "V18" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoCO6CarrierOutletFB(V18)" doOpen= "DO_MoCO6CarrierOutlet(V18)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V18s" display= "MoCO6CarrierOutlet" schematicId= "V18s" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoCO6CarrierOutletFB(V18s)" doOpen= "DO_MoCO6CarrierOutlet(V18s)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V19" display= "MoCO6Bypass" schematicId= "V19" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoCO6BypassFB(V19)" doOpen= "DO_MoCO6Bypass(V19)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V20" display= "MoCO6InOutLeakTest" schematicId= "V20" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoCO6InOutLeakTestFB(V20)" doOpen= "DO_MoCO6InOutLeakTest(V20)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V20s" display= "MoCO6InOutLeakTest" schematicId= "V20s" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoCO6InOutLeakTestFB(V20s)" doOpen= "DO_MoCO6InOutLeakTest(V20s)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V21" display= "MoResrvCarrierOutlet" schematicId= "V21" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoResrvCarrierOutletFB(V21)" doOpen= "DO_MoResrvCarrierOutlet(V21)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V21s" display= "MoResrvCarrierOutlet" schematicId= "V21s" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoResrvCarrierOutletFB(V21s)" doOpen= "DO_MoResrvCarrierOutlet(V21s)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V22" display= "MoResrvBypass" schematicId= "V22" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoResrvBypassFB(V22)" doOpen= "DO_MoResrvBypass(V22)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V25" display= "SideLeakIsolate" schematicId= "V25" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_SideLeakIsolateFB(V25)" doOpen= "DO_SideLeakIsolate(V25)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V27" display= "PMLeakTestIsolate" schematicId= "V27" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_PMLeakTestIsolateFB(V27)" doOpen= "DO_PMLeakTestIsolate(V27)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V23" display= "MoResrvInoutLeakTest" schematicId= "V23" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoResrvInoutLeakTestFB(V23)" doOpen= "DO_MoResrvInoutLeakTest(V23)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V23s" display= "MoResrvInoutLeakTest" schematicId= "V23s" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoResrvInoutLeakTestFB(V23s)" doOpen= "DO_MoResrvInoutLeakTest(V23s)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V31" display= "H2InletCutOff" schematicId= "V31" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2InletCutOffFB(V31)" doOpen= "DO_H2InletCutOff(V31)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V32" display= "N2InletCutOff" schematicId= "V32" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_N2InletCutOffFB(V32)" doOpen= "DO_N2InletCutOff(V32)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V33" display= "SHH2ArSupply" schematicId= "V33" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SHH2ArSupplyFB(V33)" doOpen= "DO_SHH2ArSupply(V33)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V33s" display= "SHH2ArSupply" schematicId= "V33s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SHH2ArSupplyFB(V33)" doOpen= "DO_SHH2ArSupply(V33)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V35" display= "PushGasSupply" schematicId= "V35" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_PushGasSupplyFB(V35)" doOpen= "DO_PushGasSupply(V35)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V36" display= "RunVentGasSupply" schematicId= "V36" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_RunVentGasSupplyFB(V36)" doOpen= "DO_RunVentGasSupply(V36)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V37" display= "O2CarrierSource" schematicId= "V37" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_O2CarrierSourceFB(V37)" doOpen= "DO_O2CarrierSource(V37)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V37s" display= "O2CarrierSource" schematicId= "V37s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_O2CarrierSourceFB(V37)" doOpen= "DO_O2CarrierSource(V37)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V39" display= "MoCO6RunVent" schematicId= "V39" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoCO6RunVentFB(V39)" doOpen= "DO_MoCO6RunVent(V39)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V39s" display= "MoCO6RunVent" schematicId= "V39s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_MoCO6RunVentFB(V39)" doOpen= "DO_MoCO6RunVent(V39)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V40" display= "MoResrvRunVent" schematicId= "V40" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoResrvRunVentFB(V40)" doOpen= "DO_MoResrvRunVent(V40)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V40s" display= "MoResrvRunVent" schematicId= "V40s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_MoResrvRunVentFB(V40)" doOpen= "DO_MoResrvRunVent(V40)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V41" display= "WCO6Run" schematicId= "V41" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6RunFB(V41)" doOpen= "DO_WCO6Run(V41)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V42" display= "WCO6Vent" schematicId= "V42" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_WCO6VentFB(V42)" doOpen= "DO_WCO6Vent(V42)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V43" display= "WCO6Carrier" schematicId= "V43" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6CarrierFB(V43)" doOpen= "DO_WCO6Carrier(V43)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V43s" display= "WCO6Carrier" schematicId= "V43s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6CarrierFB(V43)" doOpen= "DO_WCO6Carrier(V43)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V45" display= "WCO6Bypass" schematicId= "V45" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_WCO6BypassFB(V45)" doOpen= "DO_WCO6Bypass(V45)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V46" display= "WCO6InLeakTest" schematicId= "V46" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6InLeakTestFB(V46)" doOpen= "DO_WCO6InLeakTest(V46)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V46s" display= "WCO6InLeakTest" schematicId= "V46s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6InLeakTestFB(V46)" doOpen= "DO_WCO6InLeakTest(V46)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V47" display= "O2RunVent" schematicId= "V47" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_O2RunVentFB(V47)" doOpen= "DO_O2RunVent(V47)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V47s" display= "O2RunVent" schematicId= "V47s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_O2RunVentFB(V47)" doOpen= "DO_O2RunVent(V47)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V48" display= "CS2Carrier" schematicId= "V48" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2CarrierFB(V48)" doOpen= "DO_CS2Carrier(V48)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V48s" display= "CS2Carrier" schematicId= "V48s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2CarrierFB(V48)" doOpen= "DO_CS2Carrier(V48)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V49" display= "CS2Bypass" schematicId= "V49" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_CS2BypassFB(V49)" doOpen= "DO_CS2Bypass(V49)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V50" display= "CS2InOutLeakTest" schematicId= "V50" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2InOutLeakTestFB(V50)" doOpen= "DO_CS2InOutLeakTest(V50)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V50s" display= "CS2InOutLeakTest" schematicId= "V50s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2InOutLeakTestFB(V50)" doOpen= "DO_CS2InOutLeakTest(V50)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V51" display= "H2SSourceCarrier" schematicId= "V51" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SSourceCarrierFB(V51)" doOpen= "DO_H2SSourceCarrier(V51)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V51s" display= "H2SSourceCarrier" schematicId= "V51s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2SSourceCarrierFB(V51)" doOpen= "DO_H2SSourceCarrier(V51)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V52" display= "H2SeSourceCarrier" schematicId= "V52" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SeSourceCarrierFB(V52)" doOpen= "DO_H2SeSourceCarrier(V52)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V52s" display= "H2SeSourceCarrier" schematicId= "V52s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2SeSourceCarrierFB(V52)" doOpen= "DO_H2SeSourceCarrier(V52)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V53" display= "CS2RunVent" schematicId= "V53" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2RunVentFB" doOpen= "DO_CS2RunVent" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V53s" display= "CS2RunVent" schematicId= "V53s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_CS2RunVentFB" doOpen= "DO_CS2RunVent" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V54" display= "H2SRunVent" schematicId= "V54" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SRunVentFB(V54)" doOpen= "DO_H2SRunVent(V54)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V54s" display= "H2SRunVent" schematicId= "V54s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2SRunVentFB(V54)" doOpen= "DO_H2SRunVent(V54)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V55" display= "H2SeRun" schematicId= "V55" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SeRunFB(V55)" doOpen= "DO_H2SeRun(V55)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V56" display= "H2SeVent" schematicId= "V56" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2SeVentFB(V56)" doOpen= "DO_H2SeVent(V56)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V58" display= "SO2SourceCarrier" schematicId= "V58" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SO2SourceCarrierFB(V58)" doOpen= "DO_SO2SourceCarrier(V58)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V58s" display= "SO2SourceCarrier" schematicId= "V58s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SO2SourceCarrierFB(V58)" doOpen= "DO_SO2SourceCarrier(V58)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V59" display= "SO2RunVent" schematicId= "V59" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SO2RunVentFB(V59)" doOpen= "DO_SO2RunVent(V59)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V59s" display= "SO2RunVent" schematicId= "V59s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SO2RunVentFB(V59)" doOpen= "DO_SO2RunVent(V59)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V66" display= "SHPurgeH2" schematicId= "V66" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SHPurgeH2FB(V66)" doOpen= "DO_SHPurgeH2(V66)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V67" display= "SHPurgeN2" schematicId= "V67" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SHPurgeN2FB(V67)" doOpen= "DO_SHPurgeN2(V67)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V68" display= "PMPurgeN2" schematicId= "V68" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_PMPurgeN2FB(V68)" doOpen= "DO_PMPurgeN2(V68)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V69" display= "SrcLeakTestPreFilter" schematicId= "V69" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SrcLeakTestPreFilterFB(V69)" doOpen= "DO_SrcLeakTestPreFilter(V69)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V70" display= "PMTMBalance" schematicId= "V70" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_PMTMBalanceFB(V70)" doOpen= "DO_PMTMBalance(V70)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V72" display= "VentGasDump" schematicId= "V72" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_VentGasDumpFB(V72)" doOpen= "DO_VentGasDump(V72)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V73" display= "MOVac" schematicId= "V73" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MOVacFB(V73)" doOpen= "DO_MOVac(V73)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V74" display= "GasboxLeakTest" schematicId= "V74" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_GasboxLeakTestFB(V74)" doOpen= "DO_GasboxLeakTest(V74)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V75" display= "DORVacuum" schematicId= "V75" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_DORVacuumFB(V75)" doOpen= "DO_DORVacuum(V75)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V76" display= "DORPressureRelief" schematicId= "V76" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_DORPressureReliefFB(V76)" doOpen= "DO_DORPressureRelief(V76)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V87" display= "FinalSHPurge" schematicId= "V87" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalSHPurgeFB(V87)" doOpen= "DO_FinalSHPurge(V87)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V88" display= "FinalOuterGas" schematicId= "V88" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalOuterGasFB(V88)" doOpen= "DO_FinalOuterGas(V88)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V89" display= "FinalOuterGas" schematicId= "V89" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalOuterGasFB(V89)" doOpen= "DO_FinalOuterGas(V89)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V90" display= "FinalMiddleGas" schematicId= "V90" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalMiddleGasFB(V90)" doOpen= "DO_FinalMiddleGas(V90)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V91" display= "FinalOpticPurge" schematicId= "V91" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalOpticPurgeFB(V91)" doOpen= "DO_FinalOpticPurge(V91)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V92" display= "FinalGasRing" schematicId= "V92" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalGasRingFB(V92)" doOpen= "DO_FinalGasRing(V92)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V93" display= "FinalChamberPurge" schematicId= "V93" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalChamberPurgeFB(V93)" doOpen= "DO_FinalChamberPurge(V93)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V94" display= "FinalRotationPurge" schematicId= "V94" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalRotationPurgeFB(V94)" doOpen= "DO_FinalRotationPurge(V94)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V95" display= "FinalShutterPurge" schematicId= "V95" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalShutterPurgeFB(V95)" doOpen= "DO_FinalShutterPurge(V95)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V96" display= "FinalHeaterWFPurge" schematicId= "V96" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalHeaterWFPurgeFB(V96)" doOpen= "DO_FinalHeaterWFPurge(V96)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V97" display= "CarryGasFinal" schematicId= "V97" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "" doOpen= "DI_FinalCarryGasFB(V97)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V18" display= "V18" schematicId= "V18" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoCO6CarrierOutletFB(V18)" doOpen= "DO_MoCO6CarrierOutlet(V18)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V18s" display= "V18s" schematicId= "V18s" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoCO6CarrierOutletFB(V18)" doOpen= "DO_MoCO6CarrierOutlet(V18)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V19" display= "V19" schematicId= "V19" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoCO6BypassFB(V19)" doOpen= "DO_MoCO6Bypass(V19)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V20" display= "V20" schematicId= "V20" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoCO6InOutLeakTestFB(V20)" doOpen= "DO_MoCO6InOutLeakTest(V20)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V20s" display= "V20s" schematicId= "V20s" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoCO6InOutLeakTestFB(V20)" doOpen= "DO_MoCO6InOutLeakTest(V20)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V21" display= "V21" schematicId= "V21" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoResrvCarrierOutletFB(V21)" doOpen= "DO_MoResrvCarrierOutlet(V21)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V21s" display= "V21s" schematicId= "V21s" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoResrvCarrierOutletFB(V21)" doOpen= "DO_MoResrvCarrierOutlet(V21)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V22" display= "V22" schematicId= "V22" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoResrvBypassFB(V22)" doOpen= "DO_MoResrvBypass(V22)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V25" display= "V25" schematicId= "V25" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_SideLeakIsolateFB(V25)" doOpen= "DO_SideLeakIsolate(V25)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V27" display= "V27" schematicId= "V27" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_PMLeakTestIsolateFB(V27)" doOpen= "DO_PMLeakTestIsolate(V27)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V23" display= "V23" schematicId= "V23" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoResrvInoutLeakTestFB(V23)" doOpen= "DO_MoResrvInoutLeakTest(V23)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V23s" display= "V23s" schematicId= "V23s" unit= "" isNc= "false" isDefaultOpen= "false" diOpen= "DI_MoResrvInoutLeakTestFB(V23)" doOpen= "DO_MoResrvInoutLeakTest(V23)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V31" display= "V31" schematicId= "V31" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2InletCutOffFB(V31)" doOpen= "DO_H2InletCutOff(V31)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V32" display= "V32" schematicId= "V32" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_N2InletCutOffFB(V32)" doOpen= "DO_N2InletCutOff(V32)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V33" display= "V33" schematicId= "V33" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SHH2ArSupplyFB(V33)" doOpen= "DO_SHH2ArSupply(V33)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V33s" display= "V33s" schematicId= "V33s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SHH2ArSupplyFB(V33)" doOpen= "DO_SHH2ArSupply(V33)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V35" display= "V35" schematicId= "V35" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_PushGasSupplyFB(V35)" doOpen= "DO_PushGasSupply(V35)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V36" display= "V36" schematicId= "V36" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_RunVentGasSupplyFB(V36)" doOpen= "DO_RunVentGasSupply(V36)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V37" display= "V37" schematicId= "V37" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_O2CarrierSourceFB(V37)" doOpen= "DO_O2CarrierSource(V37)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V37s" display= "V37s" schematicId= "V37s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_O2CarrierSourceFB(V37)" doOpen= "DO_O2CarrierSource(V37)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V39" display= "V39" schematicId= "V39" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoCO6RunVentFB(V39)" doOpen= "DO_MoCO6RunVent(V39)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V39s" display= "V39s" schematicId= "V39s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_MoCO6RunVentFB(V39)" doOpen= "DO_MoCO6RunVent(V39)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V40" display= "V40" schematicId= "V40" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_MoResrvRunVentFB(V40)" doOpen= "DO_MoResrvRunVent(V40)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V40s" display= "V40s" schematicId= "V40s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_MoResrvRunVentFB(V40)" doOpen= "DO_MoResrvRunVent(V40)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V41" display= "V41" schematicId= "V41" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6RunFB(V41)" doOpen= "DO_WCO6Run(V41)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V42" display= "V42" schematicId= "V42" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_WCO6VentFB(V42)" doOpen= "DO_WCO6Vent(V42)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V43" display= "V43" schematicId= "V43" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6CarrierFB(V43)" doOpen= "DO_WCO6Carrier(V43)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V43s" display= "V43s" schematicId= "V43s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6CarrierFB(V43)" doOpen= "DO_WCO6Carrier(V43)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V45" display= "V45" schematicId= "V45" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_WCO6BypassFB(V45)" doOpen= "DO_WCO6Bypass(V45)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V46" display= "V46" schematicId= "V46" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6InLeakTestFB(V46)" doOpen= "DO_WCO6InLeakTest(V46)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V46s" display= "V46s" schematicId= "V46s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_WCO6InLeakTestFB(V46)" doOpen= "DO_WCO6InLeakTest(V46)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V47" display= "V47" schematicId= "V47" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_O2RunVentFB(V47)" doOpen= "DO_O2RunVent(V47)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V47s" display= "V47s" schematicId= "V47s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_O2RunVentFB(V47)" doOpen= "DO_O2RunVent(V47)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V48" display= "V48" schematicId= "V48" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2CarrierFB(V48)" doOpen= "DO_CS2Carrier(V48)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V48s" display= "V48s" schematicId= "V48s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2CarrierFB(V48)" doOpen= "DO_CS2Carrier(V48)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V49" display= "V49" schematicId= "V49" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_CS2BypassFB(V49)" doOpen= "DO_CS2Bypass(V49)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V50" display= "V50" schematicId= "V50" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2InOutLeakTestFB(V50)" doOpen= "DO_CS2InOutLeakTest(V50)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V50s" display= "V50s" schematicId= "V50s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2InOutLeakTestFB(V50)" doOpen= "DO_CS2InOutLeakTest(V50)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V51" display= "V51" schematicId= "V51" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SSourceCarrierFB(V51)" doOpen= "DO_H2SSourceCarrier(V51)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V51s" display= "V51s" schematicId= "V51s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2SSourceCarrierFB(V51)" doOpen= "DO_H2SSourceCarrier(V51)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V52" display= "V52" schematicId= "V52" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SeSourceCarrierFB(V52)" doOpen= "DO_H2SeSourceCarrier(V52)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V52s" display= "V52s" schematicId= "V52s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2SeSourceCarrierFB(V52)" doOpen= "DO_H2SeSourceCarrier(V52)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V53" display= "V53" schematicId= "V53" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_CS2RunVentFB(V53)" doOpen= "DO_CS2RunVent(V53)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V53s" display= "V53s" schematicId= "V53s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_CS2RunVentFB(V53)" doOpen= "DO_CS2RunVent(V53)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V54" display= "V54" schematicId= "V54" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SRunVentFB(V54)" doOpen= "DO_H2SRunVent(V54)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V54s" display= "V54s" schematicId= "V54s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2SRunVentFB(V54)" doOpen= "DO_H2SRunVent(V54)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V55" display= "V55" schematicId= "V55" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_H2SeRunFB(V55)" doOpen= "DO_H2SeRun(V55)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V56" display= "V56" schematicId= "V56" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_H2SeVentFB(V56)" doOpen= "DO_H2SeVent(V56)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V58" display= "V58" schematicId= "V58" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SO2SourceCarrierFB(V58)" doOpen= "DO_SO2SourceCarrier(V58)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V58s" display= "V58s" schematicId= "V58s" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SO2SourceCarrierFB(V58)" doOpen= "DO_SO2SourceCarrier(V58)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V59" display= "V59" schematicId= "V59" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SO2RunVentFB(V59)" doOpen= "DO_SO2RunVent(V59)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V59s" display= "V59s" schematicId= "V59s" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SO2RunVentFB(V59)" doOpen= "DO_SO2RunVent(V59)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V66" display= "V66" schematicId= "V66" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SHPurgeH2FB(V66)" doOpen= "DO_SHPurgeH2(V66)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V67" display= "V67" schematicId= "V67" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_SHPurgeN2FB(V67)" doOpen= "DO_SHPurgeN2(V67)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V68" display= "V68" schematicId= "V68" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_PMPurgeN2FB(V68)" doOpen= "DO_PMPurgeN2(V68)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V69" display= "V69" schematicId= "V69" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SrcLeakTestPreFilterFB(V69)" doOpen= "DO_SrcLeakTestPreFilter(V69)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V70" display= "V70" schematicId= "V70" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_PMTMBalanceFB(V70)" doOpen= "DO_PMTMBalance(V70)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V72" display= "V72" schematicId= "V72" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_VentGasDumpFB(V72)" doOpen= "DO_VentGasDump(V72)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V73" display= "V73" schematicId= "V73" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_SrcLeakTestPrePumpFB(V73)" doOpen= "DO_SrcLeakTestPrePump(V73)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V74" display= "V74" schematicId= "V74" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_GasboxLeakTestFB(V74)" doOpen= "DO_GasboxLeakTest(V74)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V75" display= "V75" schematicId= "V75" unit= "" isNc= "false" isDefaultOpen= "true" diOpen= "DI_DORVacuumFB(V75)" doOpen= "DO_DORVacuum(V75)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V76" display= "V76" schematicId= "V76" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_DORPressureReliefFB(V76)" doOpen= "DO_DORPressureRelief(V76)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V87" display= "V87" schematicId= "V87" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalSHPurgeFB(V87)" doOpen= "DO_FinalSHPurge(V87)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V88" display= "V88" schematicId= "V88" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalOuterGasFB(V88)" doOpen= "DO_FinalOuterGas(V88)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V89" display= "V89" schematicId= "V89" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalInnerGasFB(V89)" doOpen= "DO_FinalInnerGas(V89)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V90" display= "V90" schematicId= "V90" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalMiddleGasFB(V90)" doOpen= "DO_FinalMiddleGas(V90)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V91" display= "V91" schematicId= "V91" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalOpticPurgeFB(V91)" doOpen= "DO_FinalOpticPurge(V91)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V92" display= "V92" schematicId= "V92" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalGasRingFB(V92)" doOpen= "DO_FinalGasRing(V92)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V93" display= "V93" schematicId= "V93" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalChamberPurgeFB(V93)" doOpen= "DO_FinalChamberPurge(V93)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V94" display= "V94" schematicId= "V94" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalRotationPurgeFB(V94)" doOpen= "DO_FinalRotationPurge(V94)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V95" display= "V95" schematicId= "V95" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalShutterPurgeFB(V95)" doOpen= "DO_FinalShutterPurge(V95)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V96" display= "V96" schematicId= "V96" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalHeaterWFPurgeFB(V96)" doOpen= "DO_FinalHeaterWFPurge(V96)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "V97" display= "V97" schematicId= "V97" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_FinalCarryGasFB(V97)" doOpen= "DO_FinalCarryGas(V97)" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "EPV1" display= "EPV1" schematicId= "EPV1" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_EPV1FB" doOpen= "DO_EPV1" diCloseSensor= "" diOpenSensor= "" />
<IoValve id= "EPV2" display= "EPV2" schematicId= "EPV2" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_EPV2FB" doOpen= "DO_EPV2" diCloseSensor= "" diOpenSensor= "" />
</IoValves>
</IoValveGroup>
<!-- <IoThrottleValves classType="Aitex.Core.RT.Device.Devices.IoThrottleValve2" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoThrottleValve id= "TV" display= "TV" schematicId= "TV" unit= "mbar" scBasePath= "PM.{module}" modeValuePressure= "5" modeValuePosition= "2" modeValueClose= "3" modeValueOpen= "4"
aioType="float" aiStatus="AI_ButterflyValveActualMode" aiPositionFeedback="AI_ButterflyValveActualPosition" aiPressureFeedback="AI_ButterflyValveActualPressure"
aoPressureMode="AO_ButterflyValveSetMode" aoPositionSetPoint="AO_ButterflyValveSetPosition" aoPressureSetPoint="AO_ButterflyValveSetPressure"
doTVValveEnable="DO_ButterflyEnable" doTVReset="DO_ButterflyReset" diTVValveEnable="" />
</IoThrottleValves> -->
<IoMfcGroup classType= "MECF.Framework.Simulator.Core.SimulatorMFC" assembly= "MECF.Framework.Simulator.Core" >
<!-- 这里是包了一层, 复制PM配置的MFC时需要注意 -->
<!-- <IoMFCs id="IoMFCs" display="" schematicId="" unit="">
<IoMfc id= "Mfc1" display= "Mfc1" schematicId= "Mfc1" unit= "sccm" aiActMode= "AI_M1ActMode" aoSetMode= "AO_M1CtrlMode" aiFlow= "AI_M1" aoFlow= "AO_M1" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC01CommunicationAlarm" AlarmText= "Alarm101 MFC01 CommunicationAlarm[DI-351]" />
<IoMfc id= "Mfc2" display= "Mfc2" schematicId= "Mfc2" unit= "sccm" aiActMode= "AI_M2ActMode" aoSetMode= "AO_M2CtrlMode" aiFlow= "AI_M2" aoFlow= "AO_M2" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC02CommunicationAlarm" AlarmText= "Alarm102 MFC02 CommunicationAlarm[DI-352]" />
<IoMfc id= "Mfc3" display= "Mfc3" schematicId= "Mfc3" unit= "sccm" aiActMode= "AI_M3ActMode" aoSetMode= "AO_M3CtrlMode" aiFlow= "AI_M3" aoFlow= "AO_M3" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC03CommunicationAlarm" AlarmText= "Alarm103 MFC03 CommunicationAlarm[DI-353]" />
<IoMfc id= "Mfc4" display= "Mfc4" schematicId= "Mfc4" unit= "sccm" aiActMode= "AI_M4ActMode" aoSetMode= "AO_M4CtrlMode" aiFlow= "AI_M4" aoFlow= "AO_M4" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC04CommunicationAlarm" AlarmText= "Alarm104 MFC04 CommunicationAlarm[DI-354]" />
<IoMfc id= "Mfc5" display= "Mfc5" schematicId= "Mfc5" unit= "sccm" aiActMode= "AI_M5ActMode" aoSetMode= "AO_M5CtrlMode" aiFlow= "AI_M5" aoFlow= "AO_M5" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC05CommunicationAlarm" AlarmText= "Alarm105 MFC05 CommunicationAlarm[DI-355]" />
<IoMfc id= "Mfc6" display= "Mfc6" schematicId= "Mfc6" unit= "sccm" aiActMode= "AI_M6ActMode" aoSetMode= "AO_M6CtrlMode" aiFlow= "AI_M6" aoFlow= "AO_M6" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC06CommunicationAlarm" AlarmText= "Alarm106 MFC06 CommunicationAlarm[DI-356]" />
<IoMfc id= "Mfc7" display= "Mfc7" schematicId= "Mfc7" unit= "sccm" aiActMode= "AI_M7ActMode" aoSetMode= "AO_M7CtrlMode" aiFlow= "AI_M7" aoFlow= "AO_M7" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC07CommunicationAlarm" AlarmText= "Alarm107 MFC07 CommunicationAlarm[DI-357]" />
<IoMfc id= "Mfc8" display= "Mfc8" schematicId= "Mfc8" unit= "sccm" aiActMode= "AI_M8ActMode" aoSetMode= "AO_M8CtrlMode" aiFlow= "AI_M8" aoFlow= "AO_M8" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC08CommunicationAlarm" AlarmText= "Alarm108 MFC08 CommunicationAlarm[DI-358]" />
<IoMfc id= "Mfc9" display= "Mfc9" schematicId= "Mfc9" unit= "sccm" aiActMode= "AI_M9ActMode" aoSetMode= "AO_M9CtrlMode" aiFlow= "AI_M9" aoFlow= "AO_M9" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC09CommunicationAlarm" AlarmText= "Alarm109 MFC09 CommunicationAlarm[DI-359]" />
<IoMfc id= "Mfc10" display= "Mfc10" schematicId= "Mfc10" unit= "sccm" aiActMode= "AI_M10ActMode" aoSetMode= "AO_M10CtrlMode" aiFlow= "AI_M10" aoFlow= "AO_M10" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC10CommunicationAlarm" AlarmText= "Alarm110 MFC10 CommunicationAlarm[DI-360]" />
<IoMfc id= "Mfc11" display= "Mfc11" schematicId= "Mfc11" unit= "sccm" aiActMode= "AI_M11ActMode" aoSetMode= "AO_M11CtrlMode" aiFlow= "AI_M11" aoFlow= "AO_M11" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC11CommunicationAlarm" AlarmText= "Alarm111 MFC11 CommunicationAlarm[DI-361]" />
<IoMfc id= "Mfc12" display= "Mfc12" schematicId= "Mfc12" unit= "sccm" aiActMode= "AI_M12ActMode" aoSetMode= "AO_M12CtrlMode" aiFlow= "AI_M12" aoFlow= "AO_M12" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC12CommunicationAlarm" AlarmText= "Alarm112 MFC12 CommunicationAlarm[DI-362]" />
<IoMfc id= "Mfc13" display= "Mfc13" schematicId= "Mfc13" unit= "sccm" aiActMode= "AI_M13ActMode" aoSetMode= "AO_M13CtrlMode" aiFlow= "AI_M13" aoFlow= "AO_M13" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC13CommunicationAlarm" AlarmText= "Alarm113 MFC13 CommunicationAlarm[DI-363]" />
<IoMfc id= "Mfc14" display= "Mfc14" schematicId= "Mfc14" unit= "sccm" aiActMode= "AI_M14ActMode" aoSetMode= "AO_M14CtrlMode" aiFlow= "AI_M14" aoFlow= "AO_M14" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC14CommunicationAlarm" AlarmText= "Alarm114 MFC14 CommunicationAlarm[DI-364]" />
<IoMfc id= "Mfc15" display= "Mfc15" schematicId= "Mfc15" unit= "sccm" aiActMode= "AI_M15ActMode" aoSetMode= "AO_M15CtrlMode" aiFlow= "AI_M15" aoFlow= "AO_M15" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC15CommunicationAlarm" AlarmText= "Alarm115 MFC15 CommunicationAlarm[DI-365]" />
<IoMfc id= "Mfc16" display= "Mfc16" schematicId= "Mfc16" unit= "sccm" aiActMode= "AI_M16ActMode" aoSetMode= "AO_M16CtrlMode" aiFlow= "AI_M16" aoFlow= "AO_M16" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC16CommunicationAlarm" AlarmText= "Alarm116 MFC16 CommunicationAlarm[DI-366]" />
<IoMfc id= "Mfc17" display= "Mfc17" schematicId= "Mfc17" unit= "sccm" aiActMode= "AI_M17ActMode" aoSetMode= "AO_M17CtrlMode" aiFlow= "AI_M17" aoFlow= "AO_M17" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC17CommunicationAlarm" AlarmText= "Alarm117 MFC17 CommunicationAlarm[DI-367]" />
<IoMfc id= "Mfc18" display= "Mfc18" schematicId= "Mfc18" unit= "sccm" aiActMode= "AI_M18ActMode" aoSetMode= "AO_M18CtrlMode" aiFlow= "AI_M18" aoFlow= "AO_M18" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC18CommunicationAlarm" AlarmText= "Alarm118 MFC18 CommunicationAlarm[DI-369]" />
<IoMfc id= "Mfc19" display= "Mfc19" schematicId= "Mfc19" unit= "sccm" aiActMode= "AI_M19ActMode" aoSetMode= "AO_M19CtrlMode" aiFlow= "AI_M19" aoFlow= "AO_M19" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC19CommunicationAlarm" AlarmText= "Alarm119 MFC19 CommunicationAlarm[DI-369]" />
<IoMfc id= "Mfc20" display= "Mfc20" schematicId= "Mfc20" unit= "sccm" aiActMode= "AI_M20ActMode" aoSetMode= "AO_M20CtrlMode" aiFlow= "AI_M20" aoFlow= "AO_M20" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC20CommunicationAlarm" AlarmText= "Alarm120 MFC20 CommunicationAlarm[DI-370]" />
<IoMfc id= "Mfc21" display= "Mfc21" schematicId= "Mfc21" unit= "sccm" aiActMode= "AI_M21ActMode" aoSetMode= "AO_M21CtrlMode" aiFlow= "AI_M21" aoFlow= "AO_M21" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC21CommunicationAlarm" AlarmText= "Alarm121 MFC21 CommunicationAlarm[DI-372]" />
<IoMfc id= "Mfc22" display= "Mfc22" schematicId= "Mfc22" unit= "sccm" aiActMode= "AI_M22ActMode" aoSetMode= "AO_M22CtrlMode" aiFlow= "AI_M22" aoFlow= "AO_M22" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC22CommunicationAlarm" AlarmText= "Alarm122 MFC22 CommunicationAlarm[DI-372]" />
<IoMfc id= "Mfc25" display= "Mfc25" schematicId= "Mfc25" unit= "sccm" aiActMode= "AI_M25ActMode" aoSetMode= "AO_M25CtrlMode" aiFlow= "AI_M25" aoFlow= "AO_M25" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC25CommunicationAlarm" AlarmText= "Alarm125 MFC25 CommunicationAlarm[DI-375]" />
<IoMfc id= "Mfc26" display= "Mfc26" schematicId= "Mfc26" unit= "sccm" aiActMode= "AI_M26ActMode" aoSetMode= "AO_M26CtrlMode" aiFlow= "AI_M26" aoFlow= "AO_M26" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC26CommunicationAlarm" AlarmText= "Alarm126 MFC26 CommunicationAlarm[DI-376]" />
<IoMfc id= "Mfc27" display= "Mfc27" schematicId= "Mfc27" unit= "sccm" aiActMode= "AI_M27ActMode" aoSetMode= "AO_M27CtrlMode" aiFlow= "AI_M27" aoFlow= "AO_M27" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC27CommunicationAlarm" AlarmText= "Alarm127 MFC27 CommunicationAlarm[DI-377]" />
<IoMfc id= "Mfc31" display= "Mfc31" schematicId= "Mfc31" unit= "sccm" aiActMode= "AI_M31ActMode" aoSetMode= "AO_M31CtrlMode" aiFlow= "AI_M31" aoFlow= "AO_M31" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC31CommunicationAlarm" AlarmText= "Alarm131 MFC31 CommunicationAlarm[DI-381]" />
<IoMfc id= "Mfc32" display= "Mfc32" schematicId= "Mfc32" unit= "sccm" aiActMode= "AI_M32ActMode" aoSetMode= "AO_M32CtrlMode" aiFlow= "AI_M32" aoFlow= "AO_M32" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC32CommunicationAlarm" AlarmText= "Alarm132 MFC32 CommunicationAlarm[DI-382]" />
<IoMfc id= "Mfc33" display= "Mfc33" schematicId= "Mfc33" unit= "sccm" aiActMode= "AI_M33ActMode" aoSetMode= "AO_M33CtrlMode" aiFlow= "AI_M33" aoFlow= "AO_M33" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC33CommunicationAlarm" AlarmText= "Alarm133 MFC33 CommunicationAlarm[DI-383]" />
<IoMfc id= "Mfc34" display= "Mfc34" schematicId= "Mfc34" unit= "sccm" aiActMode= "AI_M34ActMode" aoSetMode= "AO_M34CtrlMode" aiFlow= "AI_M34" aoFlow= "AO_M34" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC34CommunicationAlarm" AlarmText= "Alarm134 MFC34 CommunicationAlarm[DI-383]" />
<IoMfc id= "Mfc35" display= "Mfc35" schematicId= "Mfc35" unit= "sccm" aiActMode= "AI_M35ActMode" aoSetMode= "AO_M35CtrlMode" aiFlow= "AI_M35" aoFlow= "AO_M35" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC35CommunicationAlarm" AlarmText= "Alarm135 MFC35 CommunicationAlarm[DI-385]" />
<IoMfc id= "Mfc36" display= "Mfc36" schematicId= "Mfc36" unit= "sccm" aiActMode= "AI_M36ActMode" aoSetMode= "AO_M36CtrlMode" aiFlow= "AI_M36" aoFlow= "AO_M36" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC36CommunicationAlarm" AlarmText= "Alarm136 MFC36 CommunicationAlarm[DI-386]" />
<IoMfc id= "Mfc37" display= "Mfc37" schematicId= "Mfc37" unit= "sccm" aiActMode= "AI_M37ActMode" aoSetMode= "AO_M37CtrlMode" aiFlow= "AI_M37" aoFlow= "AO_M37" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC37CommunicationAlarm" AlarmText= "Alarm137 MFC37 CommunicationAlarm[DI-387]" />
<IoMfc id= "Mfc38" display= "Mfc38" schematicId= "Mfc38" unit= "sccm" aiActMode= "AI_M38ActMode" aoSetMode= "AO_M38CtrlMode" aiFlow= "AI_M38" aoFlow= "AO_M38" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC38CommunicationAlarm" AlarmText= "Alarm138 MFC38 CommunicationAlarm[DI-388]" />
<IoMfc id= "Mfc39" display= "Mfc39" schematicId= "Mfc39" unit= "sccm" aiActMode= "AI_M39ActMode" aoSetMode= "AO_M39CtrlMode" aiFlow= "AI_M39" aoFlow= "AO_M39" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC39CommunicationAlarm" AlarmText= "Alarm139 MFC39 CommunicationAlarm[DI-388]" />
<IoMfc id= "Mfc40" display= "Mfc40" schematicId= "Mfc40" unit= "sccm" aiActMode= "AI_M40ActMode" aoSetMode= "AO_M40CtrlMode" aiFlow= "AI_M40" aoFlow= "AO_M40" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC40CommunicationAlarm" AlarmText= "Alarm140 MFC40 CommunicationAlarm[DI-390]" />
<IoMfc id= "Mfc41" display= "Mfc41" schematicId= "Mfc41" unit= "sccm" aiActMode= "AI_M41ActMode" aoSetMode= "AO_M41CtrlMode" aiFlow= "AI_M41" aoFlow= "AO_M41" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC41CommunicationAlarm" AlarmText= "Alarm141 MFC41 CommunicationAlarm[DI-391]" />
<IoMfc id= "Mfc42" display= "Mfc42" schematicId= "Mfc42" unit= "sccm" aiActMode= "AI_M42ActMode" aoSetMode= "AO_M42CtrlMode" aiFlow= "AI_M42" aoFlow= "AO_M42" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC42CommunicationAlarm" AlarmText= "Alarm142 MFC42 CommunicationAlarm[DI-392]" />
<IoMfc id= "Mfc43" display= "Mfc43" schematicId= "Mfc43" unit= "sccm" aiActMode= "AI_M43ActMode" aoSetMode= "AO_M43CtrlMode" aiFlow= "AI_M43" aoFlow= "AO_M43" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC43CommunicationAlarm" AlarmText= "Alarm143 MFC43 CommunicationAlarm[DI-393]" />
<IoMfc id= "Mfc44" display= "Mfc44" schematicId= "Mfc44" unit= "sccm" aiActMode= "AI_M44ActMode" aoSetMode= "AO_M44CtrlMode" aiFlow= "AI_M44" aoFlow= "AO_M44" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC44CommunicationAlarm" AlarmText= "Alarm144 MFC44 CommunicationAlarm[DI-394]" />
<IoMfc id= "Mfc45" display= "Mfc45" schematicId= "Mfc45" unit= "sccm" aiActMode= "AI_M45ActMode" aoSetMode= "AO_M45CtrlMode" aiFlow= "AI_M45" aoFlow= "AO_M45" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC45CommunicationAlarm" AlarmText= "Alarm145 MFC45 CommunicationAlarm[DI-395]" />
<IoMfc id= "Mfc50" display= "Mfc50" schematicId= "Mfc50" unit= "sccm" aiActMode= "AI_M50ActMode" aoSetMode= "AO_M50CtrlMode" aiFlow= "AI_M50" aoFlow= "AO_M50" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC50CommunicationAlarm" AlarmText= "Alarm150 MFC50 CommunicationAlarm[DI-360]" />
<IoMfc id= "Mfc51" display= "Mfc51" schematicId= "Mfc51" unit= "sccm" aiActMode= "AI_M51ActMode" aoSetMode= "AO_M51CtrlMode" aiFlow= "AI_M51" aoFlow= "AO_M51" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC51CommunicationAlarm" AlarmText= "Alarm151 MFC51 CommunicationAlarm[DI-361]" />
<IoMfc id= "Mfc52" display= "Mfc52" schematicId= "Mfc52" unit= "sccm" aiActMode= "AI_M52ActMode" aoSetMode= "AO_M52CtrlMode" aiFlow= "AI_M52" aoFlow= "AO_M52" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC52CommunicationAlarm" AlarmText= "Alarm152 MFC52 CommunicationAlarm[DI-362]" />
<IoMfc id= "Mfc53" display= "Mfc53" schematicId= "Mfc53" unit= "sccm" aiActMode= "AI_M53ActMode" aoSetMode= "AO_M53CtrlMode" aiFlow= "AI_M53" aoFlow= "AO_M53" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC53CommunicationAlarm" AlarmText= "Alarm153 MFC53 CommunicationAlarm[DI-363]" />
<IoMfc id= "Mfc54" display= "Mfc54" schematicId= "Mfc54" unit= "sccm" aiActMode= "AI_M54ActMode" aoSetMode= "AO_M54CtrlMode" aiFlow= "AI_M54" aoFlow= "AO_M54" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC54CommunicationAlarm" AlarmText= "Alarm154 MFC54 CommunicationAlarm[DI-364]" />
<IoMfc id= "Mfc55" display= "Mfc55" schematicId= "Mfc55" unit= "sccm" aiActMode= "AI_M55ActMode" aoSetMode= "AO_M55CtrlMode" aiFlow= "AI_M55" aoFlow= "AO_M55" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC55CommunicationAlarm" AlarmText= "Alarm155 MFC55 CommunicationAlarm[DI-365]" />
<IoMfc id= "Mfc56" display= "Mfc56" schematicId= "Mfc56" unit= "sccm" aiActMode= "AI_M56ActMode" aoSetMode= "AO_M56CtrlMode" aiFlow= "AI_M56" aoFlow= "AO_M56" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC56CommunicationAlarm" AlarmText= "Alarm156 MFC56 CommunicationAlarm[DI-366]" />
<IoMfc id= "Mfc57" display= "Mfc57" schematicId= "Mfc57" unit= "sccm" aiActMode= "AI_M57ActMode" aoSetMode= "AO_M57CtrlMode" aiFlow= "AI_M57" aoFlow= "AO_M57" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC57CommunicationAlarm" AlarmText= "Alarm157 MFC57 CommunicationAlarm[DI-367]" />
<IoMfc id= "Mfc58" display= "Mfc58" schematicId= "Mfc58" unit= "sccm" aiActMode= "AI_M58ActMode" aoSetMode= "AO_M58CtrlMode" aiFlow= "AI_M58" aoFlow= "AO_M58" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC58CommunicationAlarm" AlarmText= "Alarm158 MFC58 CommunicationAlarm[DI-369]" />
<IoMfc id= "Mfc59" display= "Mfc59" schematicId= "Mfc59" unit= "sccm" aiActMode= "AI_M59ActMode" aoSetMode= "AO_M59CtrlMode" aiFlow= "AI_M59" aoFlow= "AO_M59" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC59CommunicationAlarm" AlarmText= "Alarm159 MFC59 CommunicationAlarm[DI-369]" />
<IoMfc id= "Mfc60" display= "Mfc60" schematicId= "Mfc60" unit= "sccm" aiActMode= "AI_M60ActMode" aoSetMode= "AO_M60CtrlMode" aiFlow= "AI_M60" aoFlow= "AO_M60" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC10CommunicationAlarm" AlarmText= "Alarm160 MFC60 CommunicationAlarm[DI-360]" />
<IoMfc id= "Mfc61" display= "Mfc61" schematicId= "Mfc61" unit= "sccm" aiActMode= "AI_M61ActMode" aoSetMode= "AO_M61CtrlMode" aiFlow= "AI_M61" aoFlow= "AO_M61" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC11CommunicationAlarm" AlarmText= "Alarm161 MFC61 CommunicationAlarm[DI-361]" />
<IoMfc id= "Mfc62" display= "Mfc62" schematicId= "Mfc62" unit= "sccm" aiActMode= "AI_M62ActMode" aoSetMode= "AO_M62CtrlMode" aiFlow= "AI_M62" aoFlow= "AO_M62" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC12CommunicationAlarm" AlarmText= "Alarm162 MFC62 CommunicationAlarm[DI-362]" />
<IoMfc id= "Mfc63" display= "Mfc63" schematicId= "Mfc63" unit= "sccm" aiActMode= "AI_M63ActMode" aoSetMode= "AO_M63CtrlMode" aiFlow= "AI_M63" aoFlow= "AO_M63" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC13CommunicationAlarm" AlarmText= "Alarm163 MFC63 CommunicationAlarm[DI-363]" />
<IoMfc id= "Mfc64" display= "Mfc64" schematicId= "Mfc64" unit= "sccm" aiActMode= "AI_M64ActMode" aoSetMode= "AO_M64CtrlMode" aiFlow= "AI_M64" aoFlow= "AO_M64" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC14CommunicationAlarm" AlarmText= "Alarm164 MFC64 CommunicationAlarm[DI-364]" />
<IoMfc id= "Mfc65" display= "Mfc65" schematicId= "Mfc65" unit= "sccm" aiActMode= "AI_M65ActMode" aoSetMode= "AO_M65CtrlMode" aiFlow= "AI_M65" aoFlow= "AO_M65" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC15CommunicationAlarm" AlarmText= "Alarm165 MFC65 CommunicationAlarm[DI-365]" />
<IoMfc id= "Mfc66" display= "Mfc66" schematicId= "Mfc66" unit= "sccm" aiActMode= "AI_M66ActMode" aoSetMode= "AO_M66CtrlMode" aiFlow= "AI_M66" aoFlow= "AO_M66" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC16CommunicationAlarm" AlarmText= "Alarm166 MFC66 CommunicationAlarm[DI-366]" />
<IoMfc id= "Mfc67" display= "Mfc67" schematicId= "Mfc67" unit= "sccm" aiActMode= "AI_M67ActMode" aoSetMode= "AO_M67CtrlMode" aiFlow= "AI_M67" aoFlow= "AO_M67" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC17CommunicationAlarm" AlarmText= "Alarm167 MFC67 CommunicationAlarm[DI-367]" />
<IoMfc id= "Mfc68" display= "Mfc68" schematicId= "Mfc68" unit= "sccm" aiActMode= "AI_M68ActMode" aoSetMode= "AO_M68CtrlMode" aiFlow= "AI_M68" aoFlow= "AO_M68" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC18CommunicationAlarm" AlarmText= "Alarm168 MFC68 CommunicationAlarm[DI-369]" />
<IoMfc id= "Mfc70" display= "Mfc70" schematicId= "Mfc70" unit= "sccm" aiActMode= "AI_M70ActMode" aoSetMode= "AO_M70CtrlMode" aiFlow= "AI_M70" aoFlow= "AO_M70" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC70CommunicationAlarm" AlarmText= "Alarm170 MFC70 CommunicationAlarm[DI-360]" />
<IoMfc id= "Mfc71" display= "Mfc71" schematicId= "Mfc71" unit= "sccm" aiActMode= "AI_M71ActMode" aoSetMode= "AO_M71CtrlMode" aiFlow= "AI_M71" aoFlow= "AO_M71" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC71CommunicationAlarm" AlarmText= "Alarm171 MFC71 CommunicationAlarm[DI-361]" />
<IoMfc id= "Mfc72" display= "Mfc72" schematicId= "Mfc72" unit= "sccm" aiActMode= "AI_M72ActMode" aoSetMode= "AO_M72CtrlMode" aiFlow= "AI_M72" aoFlow= "AO_M72" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC72CommunicationAlarm" AlarmText= "Alarm172 MFC72 CommunicationAlarm[DI-362]" />
<IoMfc id= "Mfc73" display= "Mfc73" schematicId= "Mfc73" unit= "sccm" aiActMode= "AI_M73ActMode" aoSetMode= "AO_M73CtrlMode" aiFlow= "AI_M73" aoFlow= "AO_M73" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC73CommunicationAlarm" AlarmText= "Alarm173 MFC73 CommunicationAlarm[DI-363]" />
<IoMfc id= "Mfc74" display= "Mfc74" schematicId= "Mfc74" unit= "sccm" aiActMode= "AI_M74ActMode" aoSetMode= "AO_M74CtrlMode" aiFlow= "AI_M74" aoFlow= "AO_M74" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC74CommunicationAlarm" AlarmText= "Alarm174 MFC74 CommunicationAlarm[DI-364]" />
<IoMfc id= "Mfc75" display= "Mfc75" schematicId= "Mfc75" unit= "sccm" aiActMode= "AI_M75ActMode" aoSetMode= "AO_M75CtrlMode" aiFlow= "AI_M75" aoFlow= "AO_M75" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC75CommunicationAlarm" AlarmText= "Alarm175 MFC75 CommunicationAlarm[DI-365]" />
<IoMfc id= "Mfc76" display= "Mfc76" schematicId= "Mfc76" unit= "sccm" aiActMode= "AI_M76ActMode" aoSetMode= "AO_M76CtrlMode" aiFlow= "AI_M76" aoFlow= "AO_M76" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC76CommunicationAlarm" AlarmText= "Alarm176 MFC76 CommunicationAlarm[DI-366]" />
<IoMfc id= "Mfc77" display= "Mfc77" schematicId= "Mfc77" unit= "sccm" aiActMode= "AI_M77ActMode" aoSetMode= "AO_M77CtrlMode" aiFlow= "AI_M77" aoFlow= "AO_M77" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC77CommunicationAlarm" AlarmText= "Alarm177 MFC77 CommunicationAlarm[DI-367]" />
<IoMfc id= "Mfc78" display= "Mfc78" schematicId= "Mfc78" unit= "sccm" aiActMode= "AI_M78ActMode" aoSetMode= "AO_M78CtrlMode" aiFlow= "AI_M78" aoFlow= "AO_M78" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC78CommunicationAlarm" AlarmText= "Alarm178 MFC78 CommunicationAlarm[DI-369]" />
<IoMfc id= "Mfc79" display= "Mfc79" schematicId= "Mfc79" unit= "sccm" aiActMode= "AI_M79ActMode" aoSetMode= "AO_M79CtrlMode" aiFlow= "AI_M79" aoFlow= "AO_M79" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC79CommunicationAlarm" AlarmText= "Alarm179 MFC79 CommunicationAlarm[DI-369]" />
<IoMfc id= "Mfc80" display= "Mfc80" schematicId= "Mfc80" unit= "sccm" aiActMode= "AI_M80ActMode" aoSetMode= "AO_M80CtrlMode" aiFlow= "AI_M80" aoFlow= "AO_M80" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC80CommunicationAlarm" AlarmText= "Alarm180 MFC80 CommunicationAlarm[DI-360]" />
<IoMfc id= "Mfc81" display= "Mfc81" schematicId= "Mfc81" unit= "sccm" aiActMode= "AI_M81ActMode" aoSetMode= "AO_M81CtrlMode" aiFlow= "AI_M81" aoFlow= "AO_M81" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC81CommunicationAlarm" AlarmText= "Alarm181 MFC81 CommunicationAlarm[DI-361]" />
<IoMfc id= "Mfc82" display= "Mfc82" schematicId= "Mfc82" unit= "sccm" aiActMode= "AI_M82ActMode" aoSetMode= "AO_M82CtrlMode" aiFlow= "AI_M82" aoFlow= "AO_M82" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC82CommunicationAlarm" AlarmText= "Alarm182 MFC82 CommunicationAlarm[DI-362]" />
<IoMfc id= "Mfc83" display= "Mfc83" schematicId= "Mfc83" unit= "sccm" aiActMode= "AI_M83ActMode" aoSetMode= "AO_M83CtrlMode" aiFlow= "AI_M83" aoFlow= "AO_M83" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC83CommunicationAlarm" AlarmText= "Alarm183 MFC83 CommunicationAlarm[DI-363]" />
<IoMfc id= "Mfc84" display= "Mfc84" schematicId= "Mfc84" unit= "sccm" aiActMode= "AI_M84ActMode" aoSetMode= "AO_M84CtrlMode" aiFlow= "AI_M84" aoFlow= "AO_M84" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC84CommunicationAlarm" AlarmText= "Alarm184 MFC84 CommunicationAlarm[DI-364]" />
<IoMfc id= "Mfc85" display= "Mfc85" schematicId= "Mfc85" unit= "sccm" aiActMode= "AI_M85ActMode" aoSetMode= "AO_M85CtrlMode" aiFlow= "AI_M85" aoFlow= "AO_M85" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC85CommunicationAlarm" AlarmText= "Alarm185 MFC85 CommunicationAlarm[DI-365]" />
<IoMfc id= "Mfc86" display= "Mfc86" schematicId= "Mfc86" unit= "sccm" aiActMode= "AI_M86ActMode" aoSetMode= "AO_M86CtrlMode" aiFlow= "AI_M86" aoFlow= "AO_M86" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC86CommunicationAlarm" AlarmText= "Alarm186 MFC86 CommunicationAlarm[DI-366]" />
<IoMfc id= "Mfc87" display= "Mfc87" schematicId= "Mfc87" unit= "sccm" aiActMode= "AI_M87ActMode" aoSetMode= "AO_M87CtrlMode" aiFlow= "AI_M87" aoFlow= "AO_M87" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC87CommunicationAlarm" AlarmText= "Alarm187 MFC87 CommunicationAlarm[DI-367]" />
<IoMfc id= "Mfc88" display= "Mfc88" schematicId= "Mfc88" unit= "sccm" aiActMode= "AI_M88ActMode" aoSetMode= "AO_M88CtrlMode" aiFlow= "AI_M88" aoFlow= "AO_M88" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC88CommunicationAlarm" AlarmText= "Alarm188 MFC88 CommunicationAlarm[DI-369]" />
<IoMfc id= "Mfc89" display= "Mfc89" schematicId= "Mfc89" unit= "sccm" aiActMode= "AI_M89ActMode" aoSetMode= "AO_M89CtrlMode" aiFlow= "AI_M89" aoFlow= "AO_M89" scBasePath= "PM.PM1.MFC" aioType= "float" formatString= "F1" diAlarm= "DI_MFC89CommunicationAlarm" AlarmText= "Alarm189 MFC89 CommunicationAlarm[DI-369]" />
</IoMFCs> -->
</IoMfcGroup>
<IoPressureMeterGroup classType= "MECF.Framework.Simulator.Core.SimulatorPressure" assembly= "MECF.Framework.Simulator.Core" >
<!-- 这里是包了一层, 复制PM配置的PC时需要注意 -->
<!-- <IoPressureMeters id="IoPressures" display="" schematicId="" unit="">
<IoPressureMeter id= "PC1" display= "PC1" schematicId= "PC1" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC1Valve" aiActMode= "AI_PC1ActMode" aoSetMode= "AO_PC1CtrlMode" aiValue= "AI_PressCtrl1" aoValue= "AO_PressCtrl1" formatString= "0.0" diAlarm= "DI_PC1CommunicationAlarm" AlarmText= "Alarm141 PC1 Offline[DI-391]" />
<IoPressureMeter id= "PC2" display= "PC2" schematicId= "PC2" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC2Valve" aiActMode= "AI_PC2ActMode" aoSetMode= "AO_PC2CtrlMode" aiValue= "AI_PressCtrl2" aoValue= "AO_PressCtrl2" formatString= "0.0" diAlarm= "DI_PC2CommunicationAlarm" AlarmText= "Alarm142 PC2 Offline[DI-392]" />
<IoPressureMeter id= "PC3" display= "PC3" schematicId= "PC3" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC3Valve" aiActMode= "AI_PC3ActMode" aoSetMode= "AO_PC3CtrlMode" aiValue= "AI_PressCtrl3" aoValue= "AO_PressCtrl3" formatString= "0.0" diAlarm= "DI_PC3CommunicationAlarm" AlarmText= "Alarm143 PC3 Offline[DI-393]" />
<IoPressureMeter id= "PC4" display= "PC4" schematicId= "PC4" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC4Valve" aiActMode= "AI_PC4ActMode" aoSetMode= "AO_PC4CtrlMode" aiValue= "AI_PressCtrl4" aoValue= "AO_PressCtrl4" formatString= "0.0" diAlarm= "DI_PC4CommunicationAlarm" AlarmText= "Alarm144 PC4 Offline[DI-394]" />
<IoPressureMeter id= "PC5" display= "PC5" schematicId= "PC5" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC5Valve" aiActMode= "AI_PC5ActMode" aoSetMode= "AO_PC5CtrlMode" aiValue= "AI_PressCtrl5" aoValue= "AO_PressCtrl5" formatString= "0.0" diAlarm= "DI_PC5CommunicationAlarm" AlarmText= "Alarm145 PC5 Offline[DI-395]" />
<IoPressureMeter id= "PC6" display= "PC6" schematicId= "PC6" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC6Valve" aiActMode= "AI_PC6ActMode" aoSetMode= "AO_PC6CtrlMode" aiValue= "AI_PressCtrl6" aoValue= "AO_PressCtrl6" formatString= "0.0" diAlarm= "DI_PC6CommunicationAlarm" AlarmText= "Alarm146 PC6 Offline[DI-396]" />
<IoPressureMeter id= "PC7" display= "PC7" schematicId= "PC7" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC7Valve" aiActMode= "AI_PC7ActMode" aoSetMode= "AO_PC7CtrlMode" aiValue= "AI_PressCtrl7" aoValue= "AO_PressCtrl7" formatString= "0.0" diAlarm= "DI_PC7CommunicationAlarm" AlarmText= "Alarm147 PC7 Offline[DI-397]" />
<IoPressureMeter id= "PC8" display= "PC8" schematicId= "PC8" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC8Valve" aiActMode= "AI_PC8ActMode" aoSetMode= "AO_PC8CtrlMode" aiValue= "AI_PressCtrl8" aoValue= "AO_PressCtrl8" formatString= "0.0" diAlarm= "DI_PC8CommunicationAlarm" AlarmText= "Alarm141 PC8 Offline[DI-391]" />
<IoPressureMeter id= "PC9" display= "PC9" schematicId= "PC9" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC9Valve" aiActMode= "AI_PC9ActMode" aoSetMode= "AO_PC9CtrlMode" aiValue= "AI_PressCtrl9" aoValue= "AO_PressCtrl9" formatString= "0.0" diAlarm= "DI_PC9CommunicationAlarm" AlarmText= "Alarm142 PC9 Offline[DI-392]" />
<IoPressureMeter id= "PC10" display= "PC10" schematicId= "PC10" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC10Valve" aiActMode= "AI_PC10ActMode" aoSetMode= "AO_PC10CtrlMode" aiValue= "AI_PressCtrl10" aoValue= "AO_PressCtrl10" formatString= "0.0" diAlarm= "DI_PC10CommunicationAlarm" AlarmText= "Alarm143 PC10 Offline[DI-393]" />
<IoPressureMeter id= "PC11" display= "PC11" schematicId= "PC11" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC11Valve" aiActMode= "AI_PC11ActMode" aoSetMode= "AO_PC11CtrlMode" aiValue= "AI_PressCtrl11" aoValue= "AO_PressCtrl11" formatString= "0.0" diAlarm= "DI_PC11CommunicationAlarm" AlarmText= "Alarm144 PC11 Offline[DI-394]" />
<IoPressureMeter id= "PC12" display= "PC12" schematicId= "PC12" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC12Valve" aiActMode= "AI_PC12ActMode" aoSetMode= "AO_PC12CtrlMode" aiValue= "AI_PressCtrl12" aoValue= "AO_PressCtrl12" formatString= "0.0" diAlarm= "DI_PC12CommunicationAlarm" AlarmText= "Alarm145 PC12 Offline[DI-395]" />
<IoPressureMeter id= "PC13" display= "PC13" schematicId= "PC13" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC13Valve" aiActMode= "AI_PC13ActMode" aoSetMode= "AO_PC13CtrlMode" aiValue= "AI_PressCtrl13" aoValue= "AO_PressCtrl13" formatString= "0.0" diAlarm= "DI_PC13CommunicationAlarm" AlarmText= "Alarm146 PC13 Offline[DI-396]" />
<IoPressureMeter id= "PC14" display= "PC14" schematicId= "PC14" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC14Valve" aiActMode= "AI_PC14ActMode" aoSetMode= "AO_PC14CtrlMode" aiValue= "AI_PressCtrl14" aoValue= "AO_PressCtrl14" formatString= "0.0" diAlarm= "DI_PC14CommunicationAlarm" AlarmText= "Alarm147 PC14 Offline[DI-397]" />
<IoPressureMeter id= "PC15" display= "PC15" schematicId= "PC15" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC15Valve" aiActMode= "AI_PC15ActMode" aoSetMode= "AO_PC15CtrlMode" aiValue= "AI_PressCtrl15" aoValue= "AO_PressCtrl15" formatString= "0.0" diAlarm= "DI_PC15CommunicationAlarm" AlarmText= "Alarm141 PC15 Offline[DI-391]" />
<IoPressureMeter id= "PC16" display= "PC16" schematicId= "PC16" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC16Valve" aiActMode= "AI_PC16ActMode" aoSetMode= "AO_PC16CtrlMode" aiValue= "AI_PressCtrl16" aoValue= "AO_PressCtrl16" formatString= "0.0" diAlarm= "DI_PC16CommunicationAlarm" AlarmText= "Alarm142 PC16 Offline[DI-392]" />
<IoPressureMeter id= "PC17" display= "PC17" schematicId= "PC17" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC17Valve" aiActMode= "AI_PC17ActMode" aoSetMode= "AO_PC17CtrlMode" aiValue= "AI_PressCtrl17" aoValue= "AO_PressCtrl17" formatString= "0.0" diAlarm= "DI_PC17CommunicationAlarm" AlarmText= "Alarm143 PC17 Offline[DI-393]" />
<IoPressureMeter id= "PC18" display= "PC18" schematicId= "PC18" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC18Valve" aiActMode= "AI_PC18ActMode" aoSetMode= "AO_PC18CtrlMode" aiValue= "AI_PressCtrl18" aoValue= "AO_PressCtrl18" formatString= "0.0" diAlarm= "DI_PC18CommunicationAlarm" AlarmText= "Alarm144 PC18 Offline[DI-394]" />
<IoPressureMeter id= "PC19" display= "PC19" schematicId= "PC19" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC19Valve" aiActMode= "AI_PC19ActMode" aoSetMode= "AO_PC19CtrlMode" aiValue= "AI_PressCtrl19" aoValue= "AO_PressCtrl19" formatString= "0.0" diAlarm= "DI_PC19CommunicationAlarm" AlarmText= "Alarm145 PC19 Offline[DI-395]" />
<IoPressureMeter id= "PC20" display= "PC20" schematicId= "PC20" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "AI_PC20Valve" aiActMode= "AI_PC20ActMode" aoSetMode= "AO_PC20CtrlMode" aiValue= "AI_PressCtrl20" aoValue= "AO_PressCtrl20" formatString= "0.0" diAlarm= "DI_PC20CommunicationAlarm" AlarmText= "Alarm146 PC20 Offline[DI-396]" />
<IoPressureMeter id= "PT1" display= "PT1" schematicId= "PT1" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_PMChamberPressure" aoValue= "" formatString= "0.0" />
<IoPressureMeter id= "PT2" display= "PT2" schematicId= "PT2" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_ColdtrapExitPressure" aoValue= "" formatString= "0.0" />
<IoPressureMeter id= "PT3" display= "PT3" schematicId= "PT3" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_FilterExitPressure" aoValue= "" formatString= "0.0" />
<IoPressureMeter id= "PT5" display= "PT5" schematicId= "PT5" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_MoVacPressure" aoValue= "" formatString= "0.0" />
<IoPressureMeter id= "PT6" display= "PT6" schematicId= "PT6" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_Mo1RunPressure" aoValue= "" formatString= "0.0" />
<IoPressureMeter id= "PT7" display= "PT7" schematicId= "PT7" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_Mo1VentPressure" aoValue= "" formatString= "0.0" />
<IoPressureMeter id= "PT8" display= "PT8" schematicId= "PT8" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_Mo2RunPressure" aoValue= "" formatString= "0.0" />
<IoPressureMeter id= "PT9" display= "PT9" schematicId= "PT9" scBasePath= "PM.{module}.PC" unit= "mbar" aioType= "float" aiOpenDegree= "" aiActMode= "" aoSetMode= "" aiValue= "AI_Mo2VentPressure" aoValue= "" formatString= "0.0" />
</IoPressureMeters> -->
</IoPressureMeterGroup>
<!-- <DoSensors classType="Aitex.Core.RT.Device.Devices.DoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
</DoSensors> -->
<!-- <SicMultipleServos classType="Aitex.Core.RT.Device.Devices.SicMultipleServo" assembly="MECF.Framework.RT.EquipmentLibrary">
<SicMultipleServo id= "PMServo" module= "" display= "PMServo" schematicId= "PMServo" unit= "" aioType= "float"
aiActualSpeed="AI_SpindleActualSpeed" aiActualCurrent="AI_ActualCurrent" aiAccSpeed="AI_ActualspeedACC" aiDecSpeed="AI_ActualspeedDEC" aiServoCurrentPosition="AI_SpindleCurrentPosition"
aoAccSpeedSetPoint="AO_SpindleAcc" aoDecSpeedSetPoint="AO_SpindleDec" aoSpindleJogSpeed="AO_SpindleJogSpeed"
aoSpindleSpeedSet="AO_SpindleSpeedSet" aoSpindleLoadAngle="AO_SpindleLoadAngle" aoSpindleUnloadAngle="AO_SpindleUnloadAngle"
diServoReady="DI_SpindleHome" diServoEnable="DI_SpindleEnable" diServoHome="DI_SpindleHome" diServoPositionComplete="DI_SpindlePositionComplete" diServoError="DI_ServoDriverFaultSW" diSpindleMoveComplete="DI_SpindleMoveComplete"
diSpindleJogAcc="DI_SpindleJogAcc" diSpindleJogDec="DI_SpindleJogDec"
doSpindleJogAcc="DO_SpindleJogAcc" doSpindleJogDec="DO_SpindleJogDec" doSpindleJogHighLowSpeed="DO_SpindleJogHighLowSpeed"
doServoEnable="DO_SpindleEnable" doServoInital="DO_SpindleHome" doServoReset="DO_SpindleRest" doSpindleLoadAngleRun="DO_SpindleLoadAngleRun" doSpindleUnloadAngleRun="DO_SpindleUnloadAngleRun" doSpindleSpeedRun="DO_SpindleSpeedRun"/>
</SicMultipleServos> -->
<!-- <IoSignalTowers classType="MECF.Framework.RT.EquipmentLibrary.Devices.IoSignalTower" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSignalTower id= "SignalTower" module= "PM1" display= "SignalTower" schematicId= "PMSignalTower" eventFile= "STEvents.xml"
doGreen="DO_TowerGreen" doYellow="DO_TowerYellow" doRed="DO_TowerRed" doBuzzer="DO_Buzzer"
aoBuzzerBlinkFreq="AO_BuzzerBlinkFreqHz"/>
</IoSignalTowers> -->
</DeviceModelDefine>