using Aitex.Core.RT.IOCore; using Aitex.Core.RT.Log; using Aitex.Core.Util; using Aitex.Core.WCF; using System; using System.Collections.Generic; namespace SicSimulator.Instances { public class SimulatorSystem : Singleton { private PeriodicJob _thread; private readonly Random _rnd = new(); private const float WaterTempBase = 30.0f; public SimulatorSystem() { } public void Initialize() { SetDefaultValue("PM1"); //SetDefaultValue("PM2"); SetTMDefaultValue("TM"); //Singleton.Instance.Initialize(false); WcfServiceManager.Instance.Initialize(new Type[] { typeof(SimulatorAdsPlcService) }); _thread = new PeriodicJob(200, OnMonitor, nameof(SimulatorSystem), true); } private void SetTMDefaultValue(string mod) { IO.DI["DI_UnloadStationLifterCYDown"].Value = true; IO.DI["DI_LoadWafeCYOpened"].Value = true; IO.DI["DI_LoadTrayCYOpend"].Value = true; IO.DI["DI_UnloadStationWaferCYOpened"].Value = true; IO.DI["DI_LoadLeftGateINTK"].Value = false; IO.DI["DI_LoadRightGateINTK"].Value = false; IO.DI["DI_LdRotationMoveDone"].Value = true; IO.DI["DI_TMDryPump1Alarm"].Value = true; IO.DI["DI_TMDryPump1Warning"].Value = true; IO.DI["DI_TMDryPump1Running"].Value = true; //IO.DI["DI_TMDryPump2Alarm"].Value = true; //IO.DI["DI_TMDryPump2Warning"].Value = true; //IO.DI["DI_TMDryPump2Running"].Value = true; IO.DI["DI_LoadDoorClosed"].Value = true; IO.DI["DI_ReactorADoorClosed"].Value = true; IO.DI["DI_RobotOnBackPos"].Value = true; IO.AI["AI_TMPressure1"].Value = 300; IO.AI["AI_LoadPressure"].Value = 1020; IO.AI["AI_UnloadPressure"].Value = 300; IO.DI["DI_TMPressure1VAC"].Value = true; //SlitValve IO.DI["DI_LoadDoorClosed"].Value = true; IO.DI["DI_ReactorADoorClosed"].Value = true; IO.DI["DI_ReactorBDoorClosed"].Value = true; IO.DI["DI_UnloadStationDoorClosed"].Value = true; IO.DI["DI_BufferStationDoorClosed"].Value = true; IO.DI["DI_UnloadSubStationDoorClosed"].Value = true; IO.DI["DI_LoadLSideDoorClosed"].Value = true; IO.DI["DI_LoadRSideDoorClosed"].Value = true; IO.DI["DI_LoadDoorOpened"].Value = false; IO.DI["DI_ReactorADoorOpened"].Value = false; IO.DI["DI_ReactorBDoorOpened"].Value = false; IO.DI["DI_BufferStationDoorOpened"].Value = false; IO.DI["DI_UnloadStationDoorOpened"].Value = false; IO.DI["DI_UnloadSubStationDoorOpened"].Value = false; IO.DI["DI_LoadLSideDoorOpened"].Value = false; IO.DI["DI_LoadRSideDoorOpened"].Value = false; //Lid IO.DI["DI_TMLidClosed"].Value = true; IO.DI["DI_LoadLidClosed"].Value = true; IO.DI["DI_BufferStationLidClosed"].Value = true; IO.DI["DI_UnloadStationLidClosed"].Value = true; IO.DI["DI_WaferCassetLeftInch6"].Value = true; IO.DI["DI_WaferCassetRightInch6"].Value = true; IO.DI["DI_TrayCassetInch6"].Value = true; IO.DI["DI_LdRotationBusy"].Value = false; IO.DO["DO_LdRotationServoOn"].Value = true; } private void SetDefaultValue(string mod) { SetWaterTemp(mod); IO.DI[$"{mod}.DI_PMH2SDetector1SW"].Value = true; IO.DI[$"{mod}.DI_PMH2SeDetector1SW"].Value = true; IO.DI[$"{mod}.DI_PMH2SeDetector2SW"].Value = true; IO.DI[$"{mod}.DI_PMSO2Detector2SW"].Value = true; IO.DI[$"{mod}.DI_PMGasDetectorFault2SW"].Value = true; IO.DI[$"{mod}.DI_PMSO2Detector1SW"].Value = true; IO.DI[$"{mod}.DI_GBH2SDetectorSW"].Value = true; IO.DI[$"{mod}.DI_GBH2SeDetectorSW"].Value = true; IO.DI[$"{mod}.DI_PMSmokeDetectorSW"].Value = true; IO.DI[$"{mod}.DI_PMH2SDetector2SW"].Value = true; IO.DI[$"{mod}.DI_ConfinementRingDone"].Value = true; IO.DI[$"{mod}.DI_DryPumpAlarm"].Value = true; IO.DI[$"{mod}.DI_DryPump1Warning"].Value = true; IO.DI[$"{mod}.DI_DryPump1Running"].Value = true; IO.DI[$"{mod}.DI_ServoReady"].Value = true; IO.AI[$"{mod}.AI_ForelinePress"].Value = 300; IO.AI[$"{mod}.AI_ChamPress"].Value = 300; IO.AI[$"{mod}.AI_ActualPressure"].Value = 300; IO.DI[$"{mod}.DI_EPV2FB"].Value = true; IO.DI[$"{mod}.DI_ChamPressAboveATMSW"].Value = true; IO.DI[$"{mod}.DI_HeaterTempUpLimitSW"].Value = false; IO.DI[$"{mod}.DI_ChamTopFlowSW"].Value = true; IO.DI[$"{mod}.DI_DryPump1Running"].Value = true; IO.DI[$"{mod}.DI_ChamLidPushButtonLocal"].Value = true; IO.DI[$"{mod}.DI_ChamMoveBodyDown"].Value = true; IO.DI[$"{mod}.DI_ChamMoveBodyFront"].Value = true; IO.DI[$"{mod}.DI_ChamMoveBodyUpLatchFW"].Value = false; IO.DI[$"{mod}.DI_ChamMoveBodyEndLatchBW"].Value = true; IO.DI[$"{mod}.DI_SHLidClosed"].Value = true; IO.DI[$"{mod}.DI_MiddleLidClosed"].Value = true; IO.DI[$"{mod}.DI_SHLidTighten"].Value = true; IO.DI[$"{mod}.DI_MiddleLidTighten"].Value = true; IO.DI[$"{mod}.DI_SHLidSwingLock"].Value = true; IO.DI[$"{mod}.DI_MiddleLidSwingLock"].Value = true; IO.DI[$"{mod}.DI_SHGasConnectorLoosen"].Value = false; IO.DI[$"{mod}.DI_SHGasConnectorTighten"].Value = true; IO.DO[$"{mod}.DO_CleanRoutineSuscessed"].Value = true; IO.DI[$"{mod}.DI_PSUEnableFB"].Value = true; IO.AO[$"{mod}.AO_ValveModeSetpoint"].Value = (float)2; IO.DI[$"{mod}.DI_ChamLidClosed"].Value = true; IO.DI[$"{mod}.DI_ChamCabDoorClosed"].Value = true; IO.DI[$"{mod}.DI_ChamPressAboveATMSW"].Value = true; IO.DI[$"{mod}.DI_ChamAtSafeProcessPressSW"].Value = false; IO.DI[$"{mod}.DI_DORPressVacSW"].Value = true; IO.DI[$"{mod}.DI_DORPressATMSW"].Value = false; IO.DI[$"{mod}.DI_HeaterTempLowLimitSW"].Value = true; IO.DI[$"{mod}.DI_ConfinementRingUp"].Value = true; IO.DI[$"{mod}.DI_ConfinementRingDown"].Value = false; IO.DI[$"{mod}.DI_SHFlowSW"].Value = true; IO.DI[$"{mod}.DI_ChamTopFlowSW"].Value = true; IO.DI[$"{mod}.DI_ChamMiddleFlow1SW"].Value = true; IO.DI[$"{mod}.DI_ChamBottomFlowSW"].Value = true; IO.DI[$"{mod}.DI_PowerRod1FlowSW"].Value = true; IO.DI[$"{mod}.DI_PowerRod2FlowSW"].Value = true; IO.DI[$"{mod}.DI_Foreline2FlowSW"].Value = true; IO.DI[$"{mod}.DI_ElectrodeWFlowSW"].Value = true; IO.DI[$"{mod}.DI_TMPump1FlowSW"].Value = true; IO.DI[$"{mod}.DI_Foreline1FlowSW"].Value = true; IO.DI[$"{mod}.DI_Spare2FlowSW"].Value = true; IO.DI[$"{mod}.DI_Spare1FlowSW"].Value = true; IO.DI[$"{mod}.DI_TransformerFlowSW"].Value = true; IO.DI[$"{mod}.DI_GBH2DetectorSW"].Value = true; IO.DI[$"{mod}.DI_ArInletPressSW"].Value = true; IO.DI[$"{mod}.DI_GBDoorClosed"].Value = true; IO.DI[$"{mod}.DI_PumpExhaustPressSW"].Value = true; IO.DI[$"{mod}.DI_PMATMSW"].Value = true; IO.DI[$"{mod}.DI_ScrubberIntlkSW"].Value = true; IO.DI[$"{mod}.DI_FacilityIntlkSW"].Value = true; IO.DI[$"{mod}.DI_PowerRackWaterLeakSW"].Value = true; #region TC //IO.AI[$"{mod}.AI_L1WorkingOP"].Value = 10; //IO.AI[$"{mod}.AI_L2WorkingOP"].Value = 10; //IO.AI[$"{mod}.AI_L3WorkingOP"].Value = 10; //IO.AI[$"{mod}.AI_L1PV"].Value = 20; //IO.AI[$"{mod}.AI_L2PV"].Value = 20; //IO.AI[$"{mod}.AI_L3PV"].Value = 20; //IO.AI[$"{mod}.AI_L1TempHighAlarm"].Value = 30; //IO.AI[$"{mod}.AI_L2TempHighAlarm"].Value = 30; //IO.AI[$"{mod}.AI_L3TempHighAlarm"].Value = 30; //IO.AI[$"{mod}.AI_L1TempLowAlarm"].Value = 25; //IO.AI[$"{mod}.AI_L2TempLowAlarm"].Value = 25; //IO.AI[$"{mod}.AI_L3TempLowAlarm"].Value = 25; //IO.AO[$"{mod}.AO_L1LoopMode"].Value = 1; //IO.AO[$"{mod}.AO_L2LoopMode"].Value = 1; //IO.AO[$"{mod}.AO_L3LoopMode"].Value = 1; //IO.AO[$"{mod}.AO_L1TargetSP"].Value = 20; //IO.AO[$"{mod}.AO_L2TargetSP"].Value = 20; //IO.AO[$"{mod}.AO_L3TargetSP"].Value = 20; //IO.AO[$"{mod}.AO_L1TargetOP"].Value = 30; //IO.AO[$"{mod}.AO_L2TargetOP"].Value = 30; //IO.AO[$"{mod}.AO_L3TargetOP"].Value = 30; //IO.AO[$"{mod}.AO_L1IPCST"].Value = 40; //IO.AO[$"{mod}.AO_L2IPCST"].Value = 40; //IO.AO[$"{mod}.AO_L3IPCST"].Value = 40; //IO.AO[$"{mod}.AO_L1IPCST"].Value = 70; //IO.AO[$"{mod}.AO_L2IPCST"].Value = 70; //IO.AO[$"{mod}.AO_L3IPCST"].Value = 70; //IO.AO[$"{mod}.AO_TCPyroMode"].Value = 1; //IO.AO[$"{mod}.AO_L1TempHighLimit"].Value = 90; //IO.AO[$"{mod}.AO_L2TempHighLimit"].Value = 90; //IO.AO[$"{mod}.AO_L3TempHighLimit"].Value = 90; //IO.AO[$"{mod}.AO_L1TempLowLimit"].Value = 80; //IO.AO[$"{mod}.AO_L2TempLowLimit"].Value = 80; //IO.AO[$"{mod}.AO_L3TempLowLimit"].Value = 80; //IO.AI[$"{mod}.AI_L1WorkingOP2"].Value = 10; //IO.AI[$"{mod}.AI_L2WorkingOP2"].Value = 10; //IO.AI[$"{mod}.AI_L3WorkingOP2"].Value = 10; //IO.AI[$"{mod}.AI_L1PV2"].Value = 20; //IO.AI[$"{mod}.AI_L2PV2"].Value = 20; //IO.AI[$"{mod}.AI_L3PV2"].Value = 20; //IO.AI[$"{mod}.AI_L1TempHighAlarm2"].Value = 30; //IO.AI[$"{mod}.AI_L2TempHighAlarm2"].Value = 30; //IO.AI[$"{mod}.AI_L3TempHighAlarm2"].Value = 30; //IO.AI[$"{mod}.AI_L1TempLowAlarm2"].Value = 25; //IO.AI[$"{mod}.AI_L2TempLowAlarm2"].Value = 25; //IO.AI[$"{mod}.AI_L3TempLowAlarm2"].Value = 25; //IO.AO[$"{mod}.AO_L1LoopMode2"].Value = 1; //IO.AO[$"{mod}.AO_L2LoopMode2"].Value = 1; //IO.AO[$"{mod}.AO_L3LoopMode2"].Value = 1; //IO.AO[$"{mod}.AO_L1TargetSP2"].Value = 20; //IO.AO[$"{mod}.AO_L2TargetSP2"].Value = 20; //IO.AO[$"{mod}.AO_L3TargetSP2"].Value = 20; //IO.AO[$"{mod}.AO_L1TargetOP2"].Value = 30; //IO.AO[$"{mod}.AO_L2TargetOP2"].Value = 30; //IO.AO[$"{mod}.AO_L3TargetOP2"].Value = 30; //IO.AO[$"{mod}.AO_L1RecipeValue2"].Value = 40; //IO.AO[$"{mod}.AO_L2RecipeValue2"].Value = 40; //IO.AO[$"{mod}.AO_L3RecipeValue2"].Value = 40; //IO.AO[$"{mod}.AO_L1IPCST2"].Value = 70; //IO.AO[$"{mod}.AO_L2IPCST2"].Value = 70; //IO.AO[$"{mod}.AO_L3IPCST2"].Value = 70; //IO.AO[$"{mod}.AO_TCPyroMode2"].Value = 1; //IO.AO[$"{mod}.AO_L1TempHighLimit2"].Value = 90; //IO.AO[$"{mod}.AO_L2TempHighLimit2"].Value = 90; //IO.AO[$"{mod}.AO_L3TempHighLimit2"].Value = 90; //IO.AO[$"{mod}.AO_L1TempLowLimit2"].Value = 80; //IO.AO[$"{mod}.AO_L2TempLowLimit2"].Value = 80; //IO.AO[$"{mod}.AO_L3TempLowLimit2"].Value = 80; #endregion IO.DI[$"{mod}.DI_PMH2DetectorSW"].Value = true; IO.DI[$"{mod}.DI_ProcessStopSW"].Value = false; IO.DI[$"{mod}.DI_TransformerOTSW"].Value = false; IO.DI[$"{mod}.DI_GBWaterLeakSW"].Value = true; IO.DI[$"{mod}.DI_MainCBStatusSW"].Value = true; IO.DI[$"{mod}.DI_ReactorWaterLeakSW"].Value = true; IO.DI[$"{mod}.DI_ChamMiddleFlow1SW"].Value = true; IO.DI[$"{mod}.DI_ChamMiddleFlow2SW"].Value = true; IO.DI[$"{mod}.DI_PumpExhaustDPSW"].Value = true; IO.DI[$"{mod}.DI_H2PressureSW"].Value = true; IO.DI[$"{mod}.DI_GBSO2DetectorSW"].Value = true; IO.DI[$"{mod}.DI_PMAExhaustDPSW"].Value = true; IO.DI[$"{mod}.DI_ServoDriverFaultSW"].Value = true; IO.DI[$"{mod}.DI_GN2InletPressSW"].Value = false; IO.DI[$"{mod}.DI_ArInletPressSW"].Value = true; IO.DI[$"{mod}.DI_FacilityWarningSW"].Value = true; IO.DI[$"{mod}.DI_GBExhaustDPLowSW"].Value = true; IO.DI[$"{mod}.DI_GBSmokeDetectorSW"].Value = true; //IO.DI[$"{mod}.DI_InletTotalTempHighSW"].Value = true; //IO.DI[$"{mod}.DI_DryPumpFlowSW"].Value = true; IO.DI[$"{mod}.DI_EMOStatusSW"].Value = true; IO.DO[$"{mod}.DO_UPSEnable"].Value = true; IO.DO[$"{mod}.DO_UPSLowBattery"].Value = true; IO.DI[$"{mod}.DI_GasPipeTempCtrlAlarm"].Value = true; IO.DI[$"{mod}.DI_ConfinementRingServoOn"].Value = true; IO.DO[$"{mod}.DO_ConfinementRingServoOn"].Value = true; IO.DO[$"{mod}.DO_ReactorPressRisingRateFast"].Value = true; IO.DO[$"{mod}.DO_ChamMiddleFlow2Temp"].Value = true; IO.DO[$"{mod}.DO_SHFlowTemp"].Value = true; IO.DO[$"{mod}.DO_ChamTopFlowTemp"].Value = true; IO.DO[$"{mod}.DO_ChamMiddleFlow1Temp"].Value = true; IO.DO[$"{mod}.DO_ChamBottomFlowTemp"].Value = true; IO.DO[$"{mod}.DO_Foreline1FlowTemp"].Value = true; IO.DO[$"{mod}.DO_PowerRod1FlowTemp"].Value = true; IO.DO[$"{mod}.DO_PowerRod2FlowTemp"].Value = true; IO.DO[$"{mod}.DO_ElectrodeWFlowTemp"].Value = true; IO.DO[$"{mod}.DO_Foreline2FlowTemp"].Value = true; IO.DO[$"{mod}.DO_TransformerFlowTemp"].Value = true; IO.DO[$"{mod}.DO_HeaterEnable"].Value = true; IO.DO[$"{mod}.DO_EPV2"].Value = true; IO.DO[$"{mod}.DO_Foreline1FlowTemp"].Value = true; IO.DO[$"{mod}.DO_Foreline2FlowTemp"].Value = true; IO.DI[$"{mod}.DI_PMGasDetectorSW"].Value = true; IO.DI[$"{mod}.DI_GBGasDetectorSW"].Value = true; IO.DI[$"{mod}.DI_PMH2SDetector1SW"].Value = true; IO.DI[$"{mod}.DI_PMH2SeDetector1SW"].Value = true; IO.DI[$"{mod}.DI_PMH2SeDetector2SW"].Value = true; IO.DI[$"{mod}.DI_PMSO2Detector2SW"].Value = true; IO.DI[$"{mod}.DI_PMGasDetectorFault2SW"].Value = true; IO.DI[$"{mod}.DI_PMSO2Detector1SW"].Value = true; IO.DI[$"{mod}.DI_PMH2SDetector2SW"].Value = true; IO.DI[$"{mod}.DI_GN2InletPressSW"].Value = true; IO.DI[$"{mod}.DI_GBH2SDetectorSW"].Value = true; IO.DI[$"{mod}.DI_GBH2SeDetectorSW"].Value = true; IO.DI[$"{mod}.DI_PMSmokeDetectorSW"].Value = true; } private void SetWaterTemp(string mod) { #region Water Flow IO.AI[$"{mod}.AI_ChamMiddleFlow2Temp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_SHFlowTemp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_ChamTopFlowTemp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_ChamMiddleFlow1Temp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_ChamBottomFlowTemp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_Foreline2FlowTemp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_PowerRod1FlowTemp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_PowerRod2FlowTemp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_Foreline1FlowTemp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_ElectrodeWFlowTemp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_TMPump1FlowTemp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_TransformerFlowTemp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_Spare1Temp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; IO.AI[$"{mod}.AI_Spare2Temp"].Value = (float)(WaterTempBase + _rnd.NextDouble()); ; //IO.AI[$"{mod}.AI_SpareFlowTemp"].Value = (float)(WaterTempBase * _rnd.NextDouble()); ; #endregion Water Flow } private bool OnMonitor() { try { MonitorPressureTM(); MonitorPressureLoad(); //MonitorPressureUnLoad(); MonitorSlitValveFlow(); MonitorTMValve(); MonitorPm("PM1"); //MonitorPm("PM2"); MonitorValve("PM1"); //MonitorValve("PM2"); MonitorFlowRamp("PM1"); //MonitorFlowRamp("PM2"); MonitorGasConnector("PM1"); MonitorLid("PM1"); MonitorLidSwing("PM1"); MonitorConfinementRing("PM1"); //MonitorGasConnector("PM2"); //MonitorLid("PM2"); //MonitorLidSwing("PM2"); //MonitorConfinementRing("PM2"); MonitorChamberMoveBody("PM1"); MonitorChamberMoveBodyUp("PM1"); MonitorHeater("PM1"); MonitorRotation("PM1"); //MonitorChamberMoveBody("PM2"); //MonitorChamberMoveBodyUp("PM2"); //MonitorHeater("PM2"); //MonitorRotation("PM2"); } catch (Exception e) { LOG.Write(e); } return true; } private List> _mfc_pc = new List> { Tuple.Create("AI_M1", "AO_M1"), Tuple.Create("AI_M3", "AO_M3"), Tuple.Create("AI_M4", "AO_M4"), Tuple.Create("AI_M6", "AO_M6"), Tuple.Create("AI_M7", "AO_M7"), Tuple.Create("AI_M8", "AO_M8"), Tuple.Create("AI_M9", "AO_M9"), Tuple.Create("AI_M10", "AO_M10"), Tuple.Create("AI_M11", "AO_M11"), Tuple.Create("AI_M12", "AO_M12"), Tuple.Create("AI_M13", "AO_M13"), Tuple.Create("AI_M14", "AO_M14"), Tuple.Create("AI_M15", "AO_M15"), Tuple.Create("AI_M16", "AO_M16"), Tuple.Create("AI_M17", "AO_M17"), Tuple.Create("AI_M18", "AO_M18"), Tuple.Create("AI_M19", "AO_M19"), Tuple.Create("AI_M20", "AO_M20"), Tuple.Create("AI_M21", "AO_M21"), Tuple.Create("AI_M22", "AO_M22"), Tuple.Create("AI_M23", "AO_M23"), Tuple.Create("AI_M24", "AO_M24"), Tuple.Create("AI_M25", "AO_M25"), Tuple.Create("AI_M26", "AO_M26"), Tuple.Create("AI_M27", "AO_M27"), Tuple.Create("AI_M28", "AO_M28"), Tuple.Create("AI_M29", "AO_M29"), Tuple.Create("AI_M31", "AO_M31"), Tuple.Create("AI_M32", "AO_M32"), Tuple.Create("AI_M33", "AO_M33"), Tuple.Create("AI_M35", "AO_M35"), Tuple.Create("AI_M36", "AO_M36"), Tuple.Create("AI_M37", "AO_M37"), Tuple.Create("AI_M38", "AO_M38"), Tuple.Create("AI_M40", "AO_M40"), Tuple.Create("AI_PressCtrl1", "AO_PressCtrl1"), Tuple.Create("AI_PressCtrl2", "AO_PressCtrl2"), Tuple.Create("AI_PressCtrl3", "AO_PressCtrl3"), Tuple.Create("AI_PressCtrl4", "AO_PressCtrl4"), Tuple.Create("AI_PressCtrl5", "AO_PressCtrl5"), Tuple.Create("AI_PressCtrl6", "AO_PressCtrl6"), Tuple.Create("AI_PressCtrl7", "AO_PressCtrl7"), Tuple.Create("AI_PressCtrl8", "AO_PressCtrl8"), Tuple.Create("AI_PressCtrl9", "AO_PressCtrl9"), }; private void MonitorFlowRamp(string pm) { foreach (var item in _mfc_pc) { float setpoint = 0; float result = 0; float current = 0; if (IO.AI[$"{pm}.{item.Item1}"] != null) { current = IO.AI[$"{pm}.{item.Item1}"].Value; setpoint = IO.AO[$"{pm}.{item.Item2}"].Value; } if (current >= setpoint) { result = current - 50; if (result < setpoint) result = setpoint; } if (current < setpoint) { result = current + 50; if (result > setpoint) result = setpoint; } result = result + (float)_rnd.NextDouble(); IO.AI[$"{pm}.{item.Item1}"].Value = result; } } public object locker = new object(); private void MonitorPm(string pm) { IO.AI[$"{pm}.AI_ValveMode"].Value = IO.AO[$"{pm}.AO_ValveModeSetpoint"].Value; IO.AI[$"{pm}.AI_HeartBeat"].Value = IO.AO[$"{pm}.AO_HeartBeat"].Value; IO.AI[$"{pm}.AI_ActualPositon"].Value = IO.AO[$"{pm}.AO_SetpointPositon"].Value; //蝶阀开启,跟着蝶阀的设置值走 if (IO.DO[$"{pm}.DO_TVEnable"].Value) { if (IO.AI[$"{pm}.AI_ActualPressure"].Value > IO.AO[$"{pm}.AO_SetpointPressure"].Value) { if (IO.AI[$"{pm}.AI_ActualPressure"].Value - 10 < IO.AO[$"{pm}.AO_SetpointPressure"].Value) { IO.AI[$"{pm}.AI_ActualPressure"].Value -= 10; } else { IO.AI[$"{pm}.AI_ActualPressure"].Value = IO.AO[$"{pm}.AO_SetpointPressure"].Value; } } else if (IO.AI[$"{pm}.AI_ActualPressure"].Value < IO.AO[$"{pm}.AO_SetpointPressure"].Value) { if (IO.AI[$"{pm}.AI_ActualPressure"].Value + 10 < IO.AO[$"{pm}.AO_SetpointPressure"].Value) { IO.AI[$"{pm}.AI_ActualPressure"].Value += 10; } else { IO.AI[$"{pm}.AI_ActualPressure"].Value = IO.AO[$"{pm}.AO_SetpointPressure"].Value; } } } //else //{ // //判断是否有进气(V89到V97是否有开阀) // if (IO.DI[$"{pm}.DO_FinalInnerGas(V89)"].Value || IO.DI[$"{pm}.DI_MiddleGasFinalFB(V90)"].Value || IO.DI[$"{pm}.DI_OpticPurgeFinalFB(V91)"].Value || IO.DI[$"{pm}.DI_GasRingPurgeFinalFB(V92)"].Value // || IO.DI[$"{pm}.DI_ChamberPurgeFinalFB(V93)"].Value || IO.DI[$"{pm}.DI_RotationUpPurgeFinalFB(V94)"].Value || IO.DI[$"{pm}.DI_ConfinementRingFinalFB(V95)"].Value || IO.DI[$"{pm}.DI_HeaterWFFinalFB(V96)"].Value) // { // if (IO.AI[$"{pm}.AI_ActualPressure"].Value < 1200) // { // IO.AI[$"{pm}.AI_ActualPressure"].Value += 10; // } // } //} //蝶阀Ramp有Bug,设置AO值可以化解 if (IO.AI[$"{pm}.AI_ActualPressure"].Value >= 1100) { IO.AO[$"{pm}.AO_SetpointPressure"].Value = IO.AI[$"{pm}.AI_ActualPressure"].Value; } IO.AI[$"{pm}.AI_ChamPress"].Value = IO.AI[$"{pm}.AI_ActualPressure"].Value; //V27自动打开 //if (IO.AI[$"{pm}.AI_ChamPress"].Value > 1020 && IO.DO[$"{pm}.DO_PMLeakTestIsolate(V27)"].Value != true) //{ // IO.DO[$"{pm}.DO_PMLeakTestIsolate(V27)"].Value = true; //} //if (IO.AI[$"{pm}.AI_ChamPress"].Value < 900 && IO.DO[$"{pm}.DO_PMLeakTestIsolate(V27)"].Value) //{ // IO.DO[$"{pm}.DO_PMLeakTestIsolate(V27)"].Value = false; //} //设置PT2的压力比PT1的小20 IO.AI[$"{pm}.AI_ForelinePress"].Value = IO.AI[$"{pm}.AI_ChamPress"].Value - 20 > 0 ? IO.AI[$"{pm}.AI_ChamPress"].Value - 20 : 0; } private void MonitorPressureLoad() { //IO.DI["DI_LoadLidLocked"].Value = IO.DO["DO_LoadLidLock"].Value; //IO.DI["DI_LoadLidUnlocked"].Value = IO.DO["DO_LoadLidUnlock"].Value; IO.DI["DI_LoadPressureATM"].Value = IO.AI["AI_LoadPressure"].Value > 960; IO.DI["DI_LoadPressureVAC"].Value = IO.AI["AI_LoadPressure"].Value < 310; bool isSlowPum = IO.DI["DI_LoadSlowPumpFB"].Value; bool isFastPump = IO.DI["DI_LoadFastPumpFB"].Value; bool isSlowVent = IO.DI["DI_LoadVentFB"].Value; //200毫秒调用一次,10秒内实现从0到1020 double pressure = IO.AI["AI_LoadPressure"].Value; if (isFastPump || isSlowPum) { if (pressure > 350) { pressure -= 10; } else if (pressure >= 250 && pressure <= 350) { pressure -= 4; } else { pressure -= 10; } } else if (isSlowVent) { if (pressure > 320) { pressure += 10; } else if (pressure >= 290 && pressure <= 320) { pressure += 1; } else { pressure += 10; } } if (pressure < 0) pressure = 0; if (pressure > 1020) pressure = 1020; if (!isFastPump && pressure < 1) pressure = 0; IO.AI["AI_LoadPressure"].Value = Convert.ToInt16(pressure); } private void MonitorPressureUnLoad() { IO.DI["DI_UnloadSlowPumpFB"].Value = IO.DO["DO_UnloadSlowPump"].Value; IO.DI["DI_UnloadFastPumpFB"].Value = IO.DO["DO_UnloadFastPump"].Value; bool isSlowPum = IO.DI["DI_UnloadSlowPumpFB"].Value; bool isFastPump = IO.DI["DI_UnloadFastPumpFB"].Value; bool isSlowVent = IO.DI["DI_UnloadVentFB"].Value; //200毫秒调用一次,10秒内实现从0到1020 double pressure = IO.AI["AI_UnloadPressure"].Value; if (isFastPump || isSlowPum) { if (pressure > 400) { pressure -= 10; } else if (pressure >= 300 && pressure <= 400) { pressure -= 4; } else { pressure -= 10; } } else if (isSlowVent) { if (pressure > 320) { pressure += 10; } else if (pressure >= 290 && pressure <= 320) { pressure += 1; } else { pressure += 10; } } if (pressure < 0) pressure = 0; if (pressure > 1020) pressure = 1020; if (!isFastPump && pressure < 1) pressure = 0; IO.AI["AI_UnloadPressure"].Value = Convert.ToInt16(pressure); } private void MonitorPressureTM() { IO.DI["DI_TMPressure1VAC"].Value = IO.AI["AI_TMPressure1"].Value < 500; bool isSlowPum = IO.DI["DI_TMSlowPumpFB"].Value; bool isSlowVent = IO.DI["DI_TMVentFB"].Value; bool isFastPump = IO.DI["DI_TMFastPumpFB"].Value; if (IO.DI["DI_ReactorADoorOpened"].Value || IO.DI["PM1.DI_PMTMBalanceFB(V70)"].Value) { IO.AI["AI_TMPressure1"].Value = Convert.ToInt16(IO.AI[$"PM1.AI_ChamPress"].Value); return; } if (IO.DI["DI_ReactorBDoorOpened"].Value || IO.DI["PM2.DI_PMTMBalanceFB(V70)"].Value) { IO.AI["AI_TMPressure1"].Value = Convert.ToInt16(IO.AI[$"PM2.AI_ChamPress"].Value); return; } else if (IO.DI["DI_TMLoadBanlanceFB"].Value) { IO.AI["AI_LoadPressure"].Value = IO.AI["AI_TMPressure1"].Value; } else if (IO.DI["DI_TMToUnloadBanlanceFB"].Value) { IO.AI["AI_TMPressure1"].Value = IO.AI["AI_UnloadPressure"].Value; } else { //200毫秒调用一次,10秒内实现从0到1020 double pressure = IO.AI["AI_TMPressure1"].Value; double factor = pressure / (3 * 10); double pressureStep = factor < 1 ? 1 : factor; if (isFastPump) { pressure -= pressureStep; } else if (isSlowPum) { pressure -= 2; } if (isSlowVent) { if (pressure < 300) { pressure += 2; } else if (pressure < 400) { pressure += 10; } else { pressure += 100; } } if (pressure < 0) pressure = 0; if (pressure > 1020) pressure = 1020; if (!isFastPump && pressure < 1) { pressure = 0; } IO.AI["AI_TMPressure1"].Value = Convert.ToInt16(pressure); if (IO.AI["AI_LoadPressure"].Value > 960) { IO.DI["DI_LoadPressureATM"].Value = true; } else { IO.DI["DI_LoadPressureATM"].Value = false; } if (IO.AI["AI_TMPressure1"].Value > 960) { IO.DI["DI_TMPressure1ATM"].Value = true; } else { IO.DI["DI_TMPressure1ATM"].Value = false; } } } private void MonitorSlitValveFlow() { if (IO.DO["DO_LoadDoorClose"].Value != IO.DO["DO_LoadDoorOpen"].Value) { IO.DI["DI_LoadDoorOpened"].Value = IO.DO["DO_LoadDoorOpen"].Value; IO.DI["DI_LoadDoorClosed"].Value = IO.DO["DO_LoadDoorClose"].Value; } if (IO.DO["DO_RectorADoorClose"].Value != IO.DO["DO_RectorADoorOpen"].Value) { IO.DI["DI_ReactorADoorOpened"].Value = IO.DO["DO_RectorADoorOpen"].Value; IO.DI["DI_ReactorADoorClosed"].Value = IO.DO["DO_RectorADoorClose"].Value; } if (IO.DO["DO_RectorBDoorClose"].Value != IO.DO["DO_RectorBDoorOpen"].Value) { IO.DI["DI_ReactorBDoorOpened"].Value = IO.DO["DO_RectorBDoorOpen"].Value; IO.DI["DI_ReactorBDoorClosed"].Value = IO.DO["DO_RectorBDoorClose"].Value; } if (IO.DO["DO_BufferStationDoorOpen"].Value != IO.DO["DO_BufferStationDoorClose"].Value) { IO.DI["DI_BufferStationDoorOpened"].Value = IO.DO["DO_BufferStationDoorOpen"].Value; IO.DI["DI_BufferStationDoorClosed"].Value = IO.DO["DO_BufferStationDoorClose"].Value; } if (IO.DO["DO_LoadLSideDoorOpen"].Value != IO.DO["DO_LoadLSideDoorClose"].Value) { IO.DI["DI_LoadLSideDoorOpened"].Value = IO.DO["DO_LoadLSideDoorOpen"].Value; IO.DI["DI_LoadLSideDoorClosed"].Value = IO.DO["DO_LoadLSideDoorClose"].Value; } if (IO.DO["DO_LoadLidLock"].Value != IO.DO["DO_LoadLidUnlock"].Value) { IO.DI["DI_LoadLidLocked"].Value = IO.DO["DO_LoadLidLock"].Value; IO.DI["DI_LoadLidUnlocked"].Value = IO.DO["DO_LoadLidUnlock"].Value; } } private int time1 = 0; private int time2 = 0; private int time3 = 0; private int time4 = 0; private int time5 = 0; private void MonitorTMValve() { IO.DI["DI_VacRobotExtendBufferEnableFB"].Value = IO.DO["DO_VacRobotExtendBufferEnable"].Value; IO.DI["DI_VacRobotExtenLoadEnableFB"].Value = IO.DO["DO_VacRobotExtenLoadEnable"].Value; IO.DI["DI_VacRobotExtendPMAEnableFB"].Value = IO.DO["DO_VacRobotExtendPMAEnable"].Value; IO.DI["DI_VacRobotExtendPMBEnableFB"].Value = IO.DO["DO_VacRobotExtendPMBEnable"].Value; IO.DI["DI_VacRobotExtendUnloadEnableFB"].Value = IO.DO["DO_VacRobotExtendUnloadEnable"].Value; IO.DI["DI_ATMRobotExtendUnloadEnableFB"].Value = IO.DO["DO_ATMRobotExtendUnloadEnable"].Value; IO.DI["DI_ATMRobotExtendLoadLSideEnableFB"].Value = IO.DO["DO_ATMRobotExtendLoaLSideEnable"].Value; IO.DI["DI_ATMRobotExtendLoadRSideEnableFB"].Value = IO.DO["DO_ATMRobotExtendLoaRSideEnable"].Value; IO.DI["DI_LoadSlowPumpFB"].Value = IO.DO["DO_LoadSlowPump"].Value; IO.DI["DI_LoadFastPumpFB"].Value = IO.DO["DO_LoadFastPump"].Value; IO.DI["DI_TMSlowPumpFB"].Value = IO.DO["DO_TMSlowPump"].Value; IO.DI["DI_TMFastPumpFB"].Value = IO.DO["DO_TMFastPump"].Value; IO.DI["DI_BufferVentFB"].Value = IO.DO["DO_BufferVent"].Value; IO.DI["DI_LoadVentFB"].Value = IO.DO["DO_LoadVent"].Value; IO.DI["DI_TMVentFB"].Value = IO.DO["DO_TMVent"].Value; IO.DI["DI_UnloadVentFB"].Value = IO.DO["DO_UnloadVent"].Value; IO.DI["DI_TMLoadBanlanceFB"].Value = IO.DO["DO_TMLoadBanlance"].Value; IO.DI["DI_VacRobotExtenLoadEnableFB"].Value = IO.DO["DO_VacRobotExtenLoadEnable"].Value; IO.DI["DI_VacRobotExtendBufferEnableFB"].Value = IO.DO["DO_VacRobotExtendBufferEnable"].Value; IO.DI["DI_VacRobotExtendPMAEnableFB"].Value = IO.DO["DO_VacRobotExtendPMAEnable"].Value; IO.AI["AI_M60FlowRead"].Value = IO.AO[$"AO_M60FlowSetpoint"].Value; if (IO.DO["DO_LoadLockWaferCYUP"].Value != IO.DO["DO_LoadLockWaferCYDown"].Value) { time1++; if (time1 > 10) { time1 = 0; IO.DI["DI_LoadLockWaferCYUPFB"].Value = IO.DO["DO_LoadLockWaferCYUP"].Value; IO.DI["DI_LoadLockWaferCYDownFB"].Value = IO.DO["DO_LoadLockWaferCYDown"].Value; } } //if (IO.DO["DO_LoadLidLock"].Value != IO.DO["DO_LoadLidUnlock"].Value) //{ // time1++; // if (time1 > 10) // { // time1 = 0; // IO.DI["DI_LoadLidLocked"].Value = IO.DO["DO_LoadLidLock"].Value; // IO.DI["DI_LoadLidUnlocked"].Value = IO.DO["DO_LoadLidUnlock"].Value; // } //} //if (IO.DO["DO_LoadWaferCYClamp"].Value != IO.DO["DO_LoadWaferCYOpen"].Value) //{ // time2++; // if (time2 > 10) // { // time2 = 0; // IO.DI["DI_LoadWaferCYClamped"].Value = IO.DO["DO_LoadWaferCYClamp"].Value; // IO.DI["DI_LoadWafeCYOpened"].Value = IO.DO["DO_LoadWaferCYOpen"].Value; // } //} //if (IO.DO["DO_LoadTrayCYClamp"].Value != IO.DO["DO_LoadTrayCYOpen"].Value) //{ // time3++; // if (time3 > 10) // { // time3 = 0; // IO.DI["DI_LoadTrayCYClamped"].Value = IO.DO["DO_LoadTrayCYClamp"].Value; // IO.DI["DI_LoadTrayCYOpend"].Value = IO.DO["DO_LoadTrayCYOpen"].Value; // } //} //if (IO.DO["DO_UnloadStationWaferCYClamp"].Value != IO.DO["DO_UnloadStationWaferCYOpen"].Value) //{ // time4++; // if (time4 > 10) // { // time4 = 0; // IO.DI["DI_UnloadStationWaferCYClamped"].Value = IO.DO["DO_UnloadStationWaferCYClamp"].Value; // IO.DI["DI_UnloadStationWaferCYOpened"].Value = IO.DO["DO_UnloadStationWaferCYOpen"].Value; // } //} //if (IO.DO["DO_UnloadStationLifterCYUp"].Value != IO.DO["DO_UnloadStationLifterCYDown"].Value) //{ // time5++; // if (time5 > 10) // { // time5 = 0; // IO.DI["DI_UnloadStationLifterCYUp"].Value = IO.DO["DO_UnloadStationLifterCYUp"].Value; // IO.DI["DI_UnloadStationLifterCYDown"].Value = IO.DO["DO_UnloadStationLifterCYDown"].Value; // } //} IO.DI["DI_LdRotationServoOn"].Value = IO.DO["DO_LdRotationServoOn"].Value; } private void MonitorValve(string pm) { IO.DI[$"{pm}.DI_MoCO6CarrierOutletFB(V18)"].Value = IO.DO[$"{pm}.DO_MoCO6CarrierOutlet(V18)"].Value; IO.DI[$"{pm}.DI_MoCO6BypassFB(V19)"].Value = IO.DO[$"{pm}.DO_MoCO6Bypass(V19)"].Value; IO.DI[$"{pm}.DI_MoCO6InOutLeakTestFB(V20)"].Value = IO.DO[$"{pm}.DO_MoCO6InOutLeakTest(V20)"].Value; IO.DI[$"{pm}.DI_MoResrvCarrierOutletFB(V21)"].Value = IO.DO[$"{pm}.DO_MoResrvCarrierOutlet(V21)"].Value; IO.DI[$"{pm}.DI_MoResrvBypassFB(V22)"].Value = IO.DO[$"{pm}.DO_MoResrvBypass(V22)"].Value; IO.DI[$"{pm}.DI_MoResrvInoutLeakTestFB(V23)"].Value = IO.DO[$"{pm}.DO_MoResrvInoutLeakTest(V23)"].Value; IO.DI[$"{pm}.DI_SideLeakIsolateFB(V25)"].Value = IO.DO[$"{pm}.DO_SideLeakIsolate(V25)"].Value; IO.DI[$"{pm}.DI_PMLeakTestIsolateFB(V27)"].Value = IO.DO[$"{pm}.DO_PMLeakTestIsolate(V27)"].Value; IO.DI[$"{pm}.DI_H2InletCutOffFB(V31)"].Value = IO.DO[$"{pm}.DO_H2InletCutOff(V31)"].Value; IO.DI[$"{pm}.DI_N2InletCutOffFB(V32)"].Value = IO.DO[$"{pm}.DO_N2InletCutOff(V32)"].Value; IO.DI[$"{pm}.DI_SHH2ArSupplyFB(V33)"].Value = IO.DO[$"{pm}.DO_SHH2ArSupply(V33)"].Value; IO.DI[$"{pm}.DI_PushGasSupplyFB(V35)"].Value = IO.DO[$"{pm}.DO_PushGasSupply(V35)"].Value; IO.DI[$"{pm}.DI_RunVentGasSupplyFB(V36)"].Value = IO.DO[$"{pm}.DO_RunVentGasSupply(V36)"].Value; IO.DI[$"{pm}.DI_O2CarrierSourceFB(V37)"].Value = IO.DO[$"{pm}.DO_O2CarrierSource(V37)"].Value; IO.DI[$"{pm}.DI_MoCO6RunVentFB(V39)"].Value = IO.DO[$"{pm}.DO_MoCO6RunVent(V39)"].Value; IO.DI[$"{pm}.DI_MoResrvRunVentFB(V40)"].Value = IO.DO[$"{pm}.DO_MoResrvRunVent(V40)"].Value; IO.DI[$"{pm}.DI_WCO6RunFB(V41)"].Value = IO.DO[$"{pm}.DO_WCO6Run(V41)"].Value; IO.DI[$"{pm}.DI_WCO6VentFB(V42)"].Value = IO.DO[$"{pm}.DO_WCO6Vent(V42)"].Value; IO.DI[$"{pm}.DI_WCO6CarrierFB(V43)"].Value = IO.DO[$"{pm}.DO_WCO6Carrier(V43)"].Value; IO.DI[$"{pm}.DI_WCO6BypassFB(V45)"].Value = IO.DO[$"{pm}.DO_WCO6Bypass(V45)"].Value; IO.DI[$"{pm}.DI_WCO6InLeakTestFB(V46)"].Value = IO.DO[$"{pm}.DO_WCO6InLeakTest(V46)"].Value; IO.DI[$"{pm}.DI_O2RunVentFB(V47)"].Value = IO.DO[$"{pm}.DO_O2RunVent(V47)"].Value; IO.DI[$"{pm}.DI_CS2CarrierFB(V48)"].Value = IO.DO[$"{pm}.DO_CS2Carrier(V48)"].Value; IO.DI[$"{pm}.DI_CS2BypassFB(V49)"].Value = IO.DO[$"{pm}.DO_CS2Bypass(V49)"].Value; IO.DI[$"{pm}.DI_CS2InOutLeakTestFB(V50)"].Value = IO.DO[$"{pm}.DO_CS2InOutLeakTest(V50)"].Value; IO.DI[$"{pm}.DI_H2SSourceCarrierFB(V51)"].Value = IO.DO[$"{pm}.DO_H2SSourceCarrier(V51)"].Value; IO.DI[$"{pm}.DI_H2SeSourceCarrierFB(V52)"].Value = IO.DO[$"{pm}.DO_H2SeSourceCarrier(V52)"].Value; IO.DI[$"{pm}.DI_CS2RunVentFB(V53)"].Value = IO.DO[$"{pm}.DO_CS2RunVent(V53)"].Value; IO.DI[$"{pm}.DI_H2SRunVentFB(V54)"].Value = IO.DO[$"{pm}.DO_H2SRunVent(V54)"].Value; IO.DI[$"{pm}.DI_H2SeRunFB(V55)"].Value = IO.DO[$"{pm}.DO_H2SeRun(V55)"].Value; IO.DI[$"{pm}.DI_H2SeVentFB(V56)"].Value = IO.DO[$"{pm}.DO_H2SeVent(V56)"].Value; IO.DI[$"{pm}.DI_SO2SourceCarrierFB(V58)"].Value = IO.DO[$"{pm}.DO_SO2SourceCarrier(V58)"].Value; IO.DI[$"{pm}.DI_SO2RunVentFB(V59)"].Value = IO.DO[$"{pm}.DO_SO2RunVent(V59)"].Value; IO.DI[$"{pm}.DI_SO2VentFB(V60)"].Value = IO.DO[$"{pm}.DO_SO2Vent(V60)"].Value; IO.DI[$"{pm}.DI_Run1MoWFB(V61)"].Value = IO.DO[$"{pm}.DO_Run1MoW(V61)"].Value; IO.DI[$"{pm}.DI_Run2SSeFB(V62)"].Value = IO.DO[$"{pm}.DO_Run2SSe(V62)"].Value; IO.DI[$"{pm}.DI_Run3O2SO2FB(V63)"].Value = IO.DO[$"{pm}.DO_Run3O2SO2(V63)"].Value; IO.DI[$"{pm}.DI_SHPurgeH2FB(V66)"].Value = IO.DO[$"{pm}.DO_SHPurgeH2(V66)"].Value; IO.DI[$"{pm}.DI_SHPurgeN2FB(V67)"].Value = IO.DO[$"{pm}.DO_SHPurgeN2(V67)"].Value; IO.DI[$"{pm}.DI_PMPurgeN2FB(V68)"].Value = IO.DO[$"{pm}.DO_PMPurgeN2(V68)"].Value; IO.DI[$"{pm}.DI_SrcLeakTestPreFilterFB(V69)"].Value = IO.DO[$"{pm}.DO_SrcLeakTestPreFilter(V69)"].Value; IO.DI[$"{pm}.DI_PMTMBalanceFB(V70)"].Value = IO.DO[$"{pm}.DO_PMTMBalance(V70)"].Value; IO.DI[$"{pm}.DI_VentGasDumpFB(V72)"].Value = IO.DO[$"{pm}.DO_VentGasDump(V72)"].Value; IO.DI[$"{pm}.DI_SrcLeakTestPrePumpFB(V73)"].Value = IO.DO[$"{pm}.DO_SrcLeakTestPrePump(V73)"].Value; IO.DI[$"{pm}.DI_GasboxLeakTestFB(V74)"].Value = IO.DO[$"{pm}.DO_GasboxLeakTest(V74)"].Value; IO.DI[$"{pm}.DI_DORVacuumFB(V75)"].Value = IO.DO[$"{pm}.DO_DORVacuum(V75)"].Value; IO.DI[$"{pm}.DI_DORPressureReliefFB(V76)"].Value = IO.DO[$"{pm}.DO_DORPressureRelief(V76)"].Value; IO.DI[$"{pm}.DI_FinalSHPurgeFB(V87)"].Value = IO.DO[$"{pm}.DO_FinalSHPurge(V87)"].Value; IO.DI[$"{pm}.DI_FinalOuterGasFB(V88)"].Value = IO.DO[$"{pm}.DO_FinalOuterGas(V88)"].Value; IO.DI[$"{pm}.DI_FinalInnerGasFB(V89)"].Value = IO.DO[$"{pm}.DO_FinalInnerGas(V89)"].Value; IO.DI[$"{pm}.DI_FinalMiddleGasFB(V90)"].Value = IO.DO[$"{pm}.DO_FinalMiddleGas(V90)"].Value; IO.DI[$"{pm}.DI_FinalOpticPurgeFB(V91)"].Value = IO.DO[$"{pm}.DO_FinalOpticPurge(V91)"].Value; IO.DI[$"{pm}.DI_FinalGasRingFB(V92)"].Value = IO.DO[$"{pm}.DO_FinalGasRing(V92)"].Value; IO.DI[$"{pm}.DI_FinalChamberPurgeFB(V93)"].Value = IO.DO[$"{pm}.DO_FinalChamberPurge(V93)"].Value; IO.DI[$"{pm}.DI_FinalRotationPurgeFB(V94)"].Value = IO.DO[$"{pm}.DO_FinalRotationPurge(V94)"].Value; IO.DI[$"{pm}.DI_FinalShutterPurgeFB(V95)"].Value = IO.DO[$"{pm}.DO_FinalShutterPurge(V95)"].Value; IO.DI[$"{pm}.DI_FinalHeaterWFPurgeFB(V96)"].Value = IO.DO[$"{pm}.DO_FinalHeaterWFPurge(V96)"].Value; IO.DI[$"{pm}.DI_FinalCarryGasFB(V97)"].Value = IO.DO[$"{pm}.DO_FinalCarryGas(V97)"].Value; IO.DI[$"{pm}.DI_EPV1FB"].Value = IO.DO[$"{pm}.DO_EPV1"].Value; IO.DI[$"{pm}.DI_EPV2FB"].Value = IO.DO[$"{pm}.DO_EPV2"].Value; } private int timeMoveUp = 0; private int timeMove = 0; private R_TRIG _UpTrig = new R_TRIG(); private void MonitorChamberMoveBodyUp(string pm) { if (IO.DO[$"{pm}.DO_ChamMoveBodyUp"].Value != IO.DO[$"{pm}.DO_ChamMoveBodyDown"].Value) { timeMoveUp++; if (timeMoveUp > 20) { IO.DI[$"{pm}.DI_ChamMoveBodyUp"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyUp"].Value; IO.DI[$"{pm}.DI_ChamMoveBodyDown"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyDown"].Value; } } if (timeMoveUp > 20) { timeMoveUp = 0; } } private R_TRIG forwardLatch_R = new R_TRIG(); private R_TRIG backLatchLatch_R = new R_TRIG(); private void MonitorChamberMoveBody(string pm) { if (IO.DO[$"{pm}.DO_ChamMoveBodyForward"].Value != IO.DO[$"{pm}.DO_ChamMoveBodyBackward"].Value) { timeMove++; if (timeMove > 20) { IO.DI[$"{pm}.DI_ChamMoveBodyFront"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyForward"].Value; IO.DI[$"{pm}.DI_ChamMoveBodyEnd"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyBackward"].Value; } } forwardLatch_R.CLK = IO.DO[$"{pm}.DO_ChamMoveBodyBrakerForward"].Value; if (forwardLatch_R.Q) { IO.DI[$"{pm}.DI_ChamMoveBodyUpLatchFW"].Value = true; IO.DI[$"{pm}.DI_ChamMoveBodyEndLatchBW"].Value = false; backLatchLatch_R.RST = true; } backLatchLatch_R.CLK = IO.DO[$"{pm}.DO_ChamMoveBodyBrakerBackward"].Value; if (backLatchLatch_R.Q) { IO.DI[$"{pm}.DI_ChamMoveBodyEndLatchBW"].Value = true; IO.DI[$"{pm}.DI_ChamMoveBodyUpLatchFW"].Value = false; forwardLatch_R.RST = true; } if (timeMove > 20) { timeMove = 0; } } private void MonitorHeater(string pm) { IO.DI[$"{pm}.DI_PSU1Status"].Value = IO.DO[$"{pm}.DO_PSU1Enable"].Value; IO.DI[$"{pm}.DI_PSU2Status"].Value = IO.DO[$"{pm}.DO_PSU2Enable"].Value; IO.DI[$"{pm}.DI_PSU3Status"].Value = IO.DO[$"{pm}.DO_PSU3Enable"].Value; IO.DI[$"{pm}.DI_SCR1Status"].Value = IO.DO[$"{pm}.DO_SCR1Enable"].Value; IO.DI[$"{pm}.DI_SCR2Status"].Value = IO.DO[$"{pm}.DO_SCR2Enable"].Value; IO.DI[$"{pm}.DI_SCR3Status"].Value = IO.DO[$"{pm}.DO_SCR3Enable"].Value; IO.DI[$"{pm}.DI_PSUEnableFB"].Value = IO.DO[$"{pm}.DO_HeaterEnable"].Value; IO.DI[$"{pm}.DI_InnerHeaterEnableFB"].Value = IO.DO[$"{pm}.DO_PSU1Enable"].Value; IO.DI[$"{pm}.DI_MiddleHeaterEnableFB"].Value = IO.DO[$"{pm}.DO_PSU2Enable"].Value; IO.DI[$"{pm}.DI_OuterHeaterEnableFB"].Value = IO.DO[$"{pm}.DO_PSU3Enable"].Value; //IO.AI[$"{pm}.AI_PresentLoop1Temp"].Value = IO.AO[$"{pm}.AO_SetpointLoop1Temp"].Value; //IO.AI[$"{pm}.AI_Loop1ControlMode"].Value = IO.AO[$"{pm}.AO_Loop1ControlMode"].Value; //IO.AI[$"{pm}.AI_Loop1ActualPower"].Value = IO.AO[$"{pm}.AO_Loop1ManualOP"].Value; //IO.DI[$"{pm}.DI_InnerHeaterEnable"].Value = IO.DO[$"{pm}.DO_InnerHeaterEnable"].Value; //IO.AI[$"{pm}.AI_PresentLoop2Temp"].Value = IO.AO[$"{pm}.AO_SetpointLoop2Temp"].Value; //IO.AI[$"{pm}.AI_Loop2ControlMode"].Value = IO.AO[$"{pm}.AO_Loop2ControlMode"].Value; //IO.AI[$"{pm}.AI_Loop2ActualPower"].Value = IO.AO[$"{pm}.AO_Loop2ManualOP"].Value; //IO.DI[$"{pm}.DI_MiddleHeaterEnable"].Value = IO.DO[$"{pm}.DO_MiddleHeaterEnable"].Value; //IO.AI[$"{pm}.AI_PresentLoop3Temp"].Value = IO.AO[$"{pm}.AO_SetpointLoop3Temp"].Value; //IO.AI[$"{pm}.AI_Loop3ControlMode"].Value = IO.AO[$"{pm}.AO_Loop3ControlMode"].Value; //IO.AI[$"{pm}.AI_Loop3ActualPower"].Value = IO.AO[$"{pm}.AO_Loop3ManualOP"].Value; //IO.DI[$"{pm}.DI_OuterHeaterEnable"].Value = IO.DO[$"{pm}.DO_OuterHeaterEnable"].Value; } private void MonitorGasConnector(string pm) { if (IO.DO[$"{pm}.DO_SHGasConnectorLoosen"].Value != IO.DO[$"{pm}.DO_SHGasConnectorTighten"].Value) { IO.DI[$"{pm}.DI_SHGasConnectorLoosen"].Value = IO.DO[$"{pm}.DO_SHGasConnectorLoosen"].Value; IO.DI[$"{pm}.DI_SHGasConnectorTighten"].Value = IO.DO[$"{pm}.DO_SHGasConnectorTighten"].Value; } } private void MonitorLid(string pm) { if (IO.DO[$"{pm}.DO_SHLidLoosen"].Value != IO.DO[$"{pm}.DO_SHLidTighten"].Value) { timeMove++; if (timeMove > 20) { IO.DI[$"{pm}.DI_SHLidLoosen"].Value = IO.DO[$"{pm}.DO_SHLidLoosen"].Value; IO.DI[$"{pm}.DI_SHLidTighten"].Value = IO.DO[$"{pm}.DO_SHLidTighten"].Value; IO.DI[$"{pm}.DI_SHLidClosed"].Value = IO.DO[$"{pm}.DO_SHLidTighten"].Value; } return; } if (IO.DO[$"{pm}.DO_MiddleLidLoosen"].Value != IO.DO[$"{pm}.DO_MiddleLidTighten"].Value) { timeMove++; if (timeMove > 20) { IO.DI[$"{pm}.DI_MiddleLidLoosen"].Value = IO.DO[$"{pm}.DO_MiddleLidLoosen"].Value; IO.DI[$"{pm}.DI_MiddleLidTighten"].Value = IO.DO[$"{pm}.DO_MiddleLidTighten"].Value; IO.DI[$"{pm}.DI_MiddleLidClosed"].Value = IO.DO[$"{pm}.DO_MiddleLidTighten"].Value; } return; } if (timeMove > 20) { timeMove = 0; } } private void MonitorLidSwing(string pm) { if (IO.DO[$"{pm}.DO_SHLidSwingLock"].Value != IO.DO[$"{pm}.DO_SHLidSwingUnlock"].Value) { IO.DI[$"{pm}.DI_SHLidSwingLock"].Value = IO.DO[$"{pm}.DO_SHLidSwingLock"].Value; IO.DI[$"{pm}.DI_SHLidSwingUnlock"].Value = IO.DO[$"{pm}.DO_SHLidSwingUnlock"].Value; } if (IO.DO[$"{pm}.DO_MiddleLidSwingLock"].Value != IO.DO[$"{pm}.DO_MiddleLidSwingUnlock"].Value) { IO.DI[$"{pm}.DI_MiddleLidSwingLock"].Value = IO.DO[$"{pm}.DO_MiddleLidSwingLock"].Value; IO.DI[$"{pm}.DI_MiddleLidSwingUnlock"].Value = IO.DO[$"{pm}.DO_MiddleLidSwingUnlock"].Value; } } private void MonitorConfinementRing(string pm) { if (IO.DO[$"{pm}.DO_ConfinementRingMoveDown"].Value != IO.DO[$"{pm}.DO_ConfinementRingMoveUp"].Value) { IO.DI[$"{pm}.DI_ConfinementRingDone"].Value = true; IO.DI[$"{pm}.DI_ConfinementRingDown"].Value = IO.DO[$"{pm}.DO_ConfinementRingMoveDown"].Value; IO.DI[$"{pm}.DI_ConfinementRingUp"].Value = IO.DO[$"{pm}.DO_ConfinementRingMoveUp"].Value; } if (IO.DI[$"{pm}.DI_ConfinementRingUp"].Value) { IO.AI[$"{pm}.AI_ConfinementRingCurPos"].Value = IO.AO[$"{pm}.AO_ConfinementRingUpPos"].Value; } if (IO.DI[$"{pm}.DI_ConfinementRingDown"].Value) { IO.AI[$"{pm}.AI_ConfinementRingCurPos"].Value = IO.AO[$"{pm}.AO_ConfinementRingDownPos"].Value; } IO.AI[$"{pm}.AI_ConfinementRingUpPos"].Value = IO.AO[$"{pm}.AO_ConfinementRingUpPos"].Value; IO.AI[$"{pm}.AI_ConfinementRingDownPos"].Value = IO.AO[$"{pm}.AO_ConfinementRingDownPos"].Value; } private void MonitorRotation(string pm) { IO.AI[$"{pm}.AI_ActualSpeed"].Value = IO.AO[$"{pm}.AO_SpindleSpeed"].Value; IO.DI[$"{pm}.DI_ConfinementRingServoOn"].Value = IO.DO[$"{pm}.DO_ConfinementRingServoOn"].Value; } public void Terminate() { _thread.Stop(); } } }