using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs; using SicModules.PMs.Routines.Base; using System.Collections.Generic; using System.Diagnostics; namespace SicModules.PMs.Routines { public class PMCleanRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, VentPumpClose_1, VentPumpOpen, ArSupply, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetM1toM17, SetM17M18, SetPC, SetGroupJ, SetGroupJ_1, SetM291519to38, SetGasOut, SetTv, SetGasIn1, //V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetMfc19to26, SetTVCloseMode, SetTvPositionToZero, SetGasIn2, SetGroupJOpen, SetM18toM40, OpenFinal2, SetMfcFinal2, SetEPV1, SetEPV2, SetEPV2_1, SetEPV2_2, SetEPV2_3, SetTvMode, RoutinePre, V27Open, V27Close, PressureTo1050, SetPressureUp, SetPressureUp1, SetPressureUp2, SetPressureDown, PressureToMax, PressureToMin, SetPressUpOrDown1, SetPressUpOrDown2, WaitPressureDown, WaitPressureUp, SetMFCMode, SetPCMode, WaitPmTo1050, SetTvOpen, SetTvModeToPress, SetEPV22, SetV76, SetV75, SetTVto300, SetMfcFinal2gongyi, CheckPM1000, SetMfc28to40Special, WaitPressUpTo1000, SetMfc28to40Default, SetPC567Close, SetPC567Mode, SetPC567Default, OpenEPV2, WaitV27Open, SetTvTo1150, WaitPressUpTo20, SetMfc28to31To0, WaitPressUpTo0, SetMfc28to31ToDefault, WaitPressDownTo20, CheckPMPt21000, SetPressureDown1, SetMfc28to31Default1, CheckFinal1Open, SetGroupV25, CloseGroupV25, SetM39, CheckEPV1Open1, CheckEPV2Open1, CheckTVOpen1, CheckEPV1Open2, SetTVEnable_1, SetTVEnable_2, SetTVPressMode, SetTv1, Set0M18toM40, SetM18, SetV31, SetV32, SetV35V36, SetV65, WaitTv1, SetTVPositionMode, SetTVPositionMode_1, SetTVPositionMax, SetTVPositionMax_1, SetTVPressMode1, SetTVPressMode2, SetM2TOM40Default, SetM2toM40_1, SetMfc2to40Default, SetM18Default, SetM18_1, SetM18_2, SetV92V93V95, SetV94, SetV96, SetV103, SetV105, SetV68, SetM32M35M37, SetM36, SetM38, WaitPmPressureUp1, SetTVCloseMode1, CLoseTV1, StartLoop, EndLoop, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay18, TimeDelay20, TimeDelay21, TimeDelay22, Notify1, Notify2, Notify3, Notify4, WaitPressUpTo950, FirstWaitPressureUp, FirstSetDefault_M18toM40, FirstSetTvPositionToZero, FirstSetEPV2, FirstSetTVEnable_1, FirstSetTVPressMode, FirstSetTVCloseMode, FirstSet0_M18toM40, FirstSetEPV2_1, FirstSetEPV2_2, FirstSetTv1, FirstWaitTv1, LoopSetDefault_M18toM40, LoopSetTVCloseMode, LoopSetTvPositionToZero, LoopSetEPV2, LoopWaitPressureUp, LoopSetEPV2_2, LoopSetTv1, LoopSet0_M18toM40, Loop2Set0_M18toM40, LoopSetTVEnable_1, LoopSetTVPressMode, LoopWaitTv1, FinishSetM1toM17, FinishSetM18toM40, FinishVentPumpClose_1, FinishCloseGroupV25, FinishSetPressureUp2, FinishSetTVto300 } private ModuleName moduleName; private PMModule _pmModule; private IoThrottleValve2 _IoThrottle; //private IoInterLock _pmIoInterLock; private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout = 20; //旋转停止超时 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private int _pressureMaxDelay = 10; //到低压保持时间(采用固定值10s) private int _pressureMinDelay = 10; //到高压保持时间(采用固定值10s) private double _pressureMax; //Loop压力上限可设置600-800) private double _pressureMin; //Loop压力下限可设置 0-400) private int _pressureMinTimeout; private int _pressureMaxTimeout; private int _pressureLoopCount; //Loop次数 private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private int _ventTimeout; private int _pumpTimeout; private double _throttleFinalPressure = 300;//蝶阀最终调整对的压力 private int _pmCleanTime = 20; private Stopwatch _swTimer = new Stopwatch(); public PMCleanRoutine(ModuleName module, PMModule pm) : base(module, pm) { moduleName = module; _pmModule = pm; Name = "Clean"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); //_pmIoInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); } public override Result Start(params object[] objs) { Reset(); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _ventTimeout = SC.GetValue($"PM.{Module}.Clean.VentTimeout"); _pumpTimeout = SC.GetValue($"PM.{Module}.Clean.PumpTimeout"); _pressureLoopCount = SC.GetValue($"PM.{Module}.Clean.CycleCleanCount"); _pressureMin = SC.GetValue($"PM.{Module}.Clean.PumpBasePressure"); _pressureMinDelay = SC.GetValue($"PM.{Module}.Clean.PumpDelayTime"); _pressureMinTimeout = SC.GetValue($"PM.{Module}.Clean.PumpTimeout"); _pressureMax = SC.GetValue($"PM.{Module}.Clean.VentBasePressure"); _pressureMaxDelay = SC.GetValue($"PM.{Module}.Clean.VentDelayTime"); _pressureMaxTimeout = SC.GetValue($"PM.{Module}.Clean.VentTimeout"); _pmCleanTime = SC.GetValue($"PM.{Module}.Clean.CleanTime"); _throttleFinalPressure = SC.GetValue($"PM.{Module}.Clean.FinalPressure"); //Purge Succeed 清掉 //_pmIoInterLock.DoLidOpenRoutineSucceed = false; //_pmIoInterLock.DoLidCloseRoutineSucceed = false; //if (!_pmIoInterLock.SetPMCleanRoutineRunning(true, out string reason)) //{ // EV.PostAlarmLog(Module, $"can not Clean,{reason}"); // return Result.FAIL; //} _checkPMPt2Over1000 = false; _checkPMPressureOver1000 = false; _finalOpen = false; currentPressureUpOrDown = PressureUpOrDown.None; _swTimer.Restart(); Notify($"Start LoopCount:{_pressureLoopCount}"); return Result.RUN; } public override Result Monitor() { try { //CheckRoutineTimeOut(); //关闭V76,打开V75 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); //旋转停止,加热停止 SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); //3、 关闭 V72(GasBox.Vent.Pump) 打开 V25(GasBox.Vent.Bypass)。 SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); //4、 打开 V31(H2.Supply)、 V32(Ar.Supply) 。 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); //5、 打开 V35(H2N2.Line1)、 V36(H2N2.Line2),关闭 B/C/E/F/H/KValves,打开 D/G Valves; 打开 J valve。 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout); //设置MFC和PC的模式 SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); //6、 M1-M17 设定为 default 值,所有 PC 设定为 default 值(PC1-PC9), M18-M40(除M30\M34\M39)) MFC 3s ramp 到 default 值。 SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 0); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 3); //7、打开 EPV2,等待 3s, 打开 TV enable, 压力模式,伺服压力默认设定为 0mbar; SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay1, 3); SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable_1, _IoThrottle, 5); SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5); SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin); //8、当蝶阀设定值 ramp 到 0 后,将 M18-M40(除 M30\M34\M39)) MFC 3s ramp 到 0; SetMfcByGroup((int)RoutineStep.Set0M18toM40, MfcGroupName.M18toM40No303439, 0, 3); //9、等待腔体压力到 Pump Base Pressure(可配置),蝶阀改为位置模式,开度设定 100% WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pressureMin, _pumpTimeout); TimeDelay((int)RoutineStep.TimeDelay2, 3); SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout); TimeDelay((int)RoutineStep.TimeDelay11, 3); SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout); //10、 M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ; SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3); SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2gongyi, MfcGroupName.M18toM26, 3); //11、打开 V87( SHPurge.Final)、 V88( OuterGas.Final)、 V89( InnerGas.Final)、 V90(MiddleGas.Final)、 V91(OpticPurge.Final)、 V97(CarryGas.Final); SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); //12、 打开 V68(ChamBody.N2.Purge) SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay3, 1); //13、 M32、 M35、 M36、 M37、 M38 依次设定 3S ramp 到 default 值 ; SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 1); SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 1); SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 1); TimeDelay((int)RoutineStep.TimeDelay4, 3); //14、打开 V92(GasRingPurge.Final)、 V93(ChamberPurge.Final)、 V95(ConfinementRing.Final); //关闭蝶阀, 再关闭 EPV2,等待 950,打开 V94(RotationUpPurge.Final)、 等待 3S,打开 V96(HeaterWF.Final) ; //打开蝶阀,打开EPV2,蝶阀改为压力模式 SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout); SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8); SetIoValueByGroup((int)RoutineStep.SetEPV2_1, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 950, 600); SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay4, 3); SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout); //SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5); //M18 - M40(除 M30\M34\M39)) MFC 3s ramp 到 default 值。 //关闭蝶阀, 再关闭 EPV2,等待压力达到设定值,压力达到后,打开 EPV2,打开 TV enable, 压力模式,伺服压力默认设定为 0mbar; //M18 - M40(除 M30\M34\M39)) MFC 5s ramp 到 0。 //伺服压力到设定值 0(可配置) SetMfcToDefaultByGroup((int)RoutineStep.FirstSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3); SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping); SetThrottleToCloseMode((int)RoutineStep.FirstSetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.FirstSetTvPositionToZero, _IoThrottle, 8); SetIoValueByGroup((int)RoutineStep.FirstSetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.FirstWaitPressureUp, _IoThrottle, _pressureMax, _ventTimeout); SetIoValueByGroup((int)RoutineStep.FirstSetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); SetThrottleEnableAndWait((int)RoutineStep.FirstSetTVEnable_1, _IoThrottle, 5); SetThrottleToPressModeAndWait((int)RoutineStep.FirstSetTVPressMode, _IoThrottle, 5); SetThrottleToTargetAndNoWait((int)RoutineStep.FirstSetTv1, _IoThrottle, _pressureMin); SetMfcByGroup((int)RoutineStep.FirstSet0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5); WaitChamberPressDownTo((int)RoutineStep.FirstWaitTv1, _pressureMin, _pumpTimeout); //循环开始 Loop((int)RoutineStep.StartLoop, _pressureLoopCount); //M18 - M40(除 M30\M34\M39)) MFC 3s ramp 到 default 值。 //关闭蝶阀, 再关闭 EPV2,等待压力达到设定值,压力达到后,打开 EPV2 //M18 - M40(除 M30\M34\M39)) MFC 5s ramp 到 0。 //打开 TV enable, 压力模式,伺服压力默认设定为 0mbar; //等待压力到达 0(可配置) SetMfcToDefaultByGroup((int)RoutineStep.LoopSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3); SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping); SetThrottleToCloseMode((int)RoutineStep.LoopSetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.LoopSetTvPositionToZero, _IoThrottle, 8); SetIoValueByGroup((int)RoutineStep.LoopSetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.LoopWaitPressureUp, _IoThrottle, _pressureMax, _ventTimeout); SetIoValueByGroup((int)RoutineStep.LoopSetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); SetMfcByGroup((int)RoutineStep.LoopSet0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5); SetThrottleEnableAndWait((int)RoutineStep.LoopSetTVEnable_1, _IoThrottle, 5); SetThrottleToPressModeAndWait((int)RoutineStep.LoopSetTVPressMode, _IoThrottle, 5); SetThrottleToTargetAndNoWait((int)RoutineStep.LoopSetTv1, _IoThrottle, _pressureMin); WaitChamberPressDownTo((int)RoutineStep.LoopWaitTv1, _pressureMin, _pumpTimeout); EndLoop((int)RoutineStep.EndLoop); //设置 M1-M17 3s ramp 到 default; M18 - M40(除 M30\M34\M39)) MFC 3s ramp 到default 值。 //打开 V72(GasBox.Vent.Pump) 关闭 V25(GasBox.Vent.Bypass), 反应腔压力伺服到300mbar(可配置) SetMfcToDefaultByGroup((int)RoutineStep.FinishSetM1toM17, MfcGroupName.M1toM17, 3); SetMfcToDefaultByGroup((int)RoutineStep.FinishSetM18toM40, MfcGroupName.M18toM40No303439, 3); SetIoValueByGroup((int)RoutineStep.FinishVentPumpClose_1, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.FinishCloseGroupV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout); SetThrottleToTargetAndNoWait((int)RoutineStep.FinishSetPressureUp2, _IoThrottle, _throttleFinalPressure); WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.FinishSetTVto300, _IoThrottle, _throttleFinalPressure, _pmPressureMaxDiff, _throttleTimeout); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); SetRoutineRuningDo(); SetRoutineSuccessedDo(); return Result.DONE; } public override void Abort() { SetRoutineRuningDo(); PmDevice._ioThrottleValve.StopRamp(); PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All)); PmDevice.SetRotationServo(0, 0); base.Abort(); } private void SetRoutineRuningDo() { //_pmIoInterLock.DoLidCloseRoutineRunning = false; } private void SetRoutineSuccessedDo() { //_pmIoInterLock.SetLidClosedRoutineSucceed(true, out string reason); //_pmIoInterLock.DoLidOpenRoutineSucceed = false; } //private void CheckRoutineTimeOut() //{ // if (_routineTimeOut > 10) // { // if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) // { // EV.PostAlarmLog(Module,$"Routine TimeOut! over {_routineTimeOut} s"); // throw (new RoutineFaildException()); // } // } //} } }