using System.Collections.Generic; using System.Diagnostics; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using SicModules.PMs.Routines.Base; namespace SicModules.PMs.Routines { public class PMVacIdleRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetGroupJ, SetM1toM17, SetM17M18, SetPC, SetGroupI, //V87-96 SetM18, SetM18to40_1, SetM18to40, MfcAll, SetGasOut, SetTv, SetTv1, WaitTv1, SetGasIn1, //V65,V67,V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetGasIn2, SetGroupJOpen, OpenFinal2, SetMfcFinal2, PumpDownTimeout, SetTvMode, SetEPV1, SetEPV2, SetTVEnable, SetTVPressMode, SetTvPositionToZero, SetMFCMode, SetPCMode, SetTvOpen, SetTvModeToPress, SetTVto1050, OpenGasIn1, CloseGasIn1, CloseFinanl1, CloseFinanl2, SetGroupV38, SetV76, SetV75, SetGroupV25, SetV31, SetV32, SetV35V36, SetV87V97, SetV65, SetV103, SetV105, SetTVPositionMode, SetTVPositionMax, CloseM32M35M37, CloseM36, CloseM38, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay12, TimeDelay13, TimeDelay14, } private PMModule _pm1Module; private IoThrottleValve2 _IoThrottle; private IoInterLock _pmIoInterLock; private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout; //旋转停止超时 private int _IoValueOpenCloseTimeout = 10; //开关超时时间 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private double _vacPumpBasePressure; private int _routineTimeOut; private int _pumpTimeOut; private Stopwatch _swTimer = new Stopwatch(); public PMVacIdleRoutine(ModuleName module, PMModule pm1) : base(module, pm1) { Module = module.ToString(); _pm1Module = pm1; Name = "VacIdle"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); _pmIoInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); } public override Result Start(params object[] objs) { Reset(); _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _vacPumpBasePressure = SC.GetValue($"PM.{Module}.Pump.PumpBasePressure"); _routineTimeOut = SC.GetValue($"PM.{Module}.Pump.RoutineTimeOut"); _pumpTimeOut = SC.GetValue($"PM.{Module}.Pump.PumpTimeOut"); if (!_pmIoInterLock.SetPMVacIdleRountingRunning(true, out var reason)) { EV.PostAlarmLog(Module, $"can not run VACIdle, {reason}"); return Result.FAIL; } _swTimer.Restart(); Notify("Start"); return Result.RUN; } public override Result Monitor() { try { CheckRoutineTimeOut(); //关闭V76,打开V75 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); //旋转停止,加热停止 SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); //关闭V72,打开V25 SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); //打开V31,打开V32 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); //打开V35,打开V36 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); //关闭B/C/E/F/H/K 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); //打开D/G 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); //6、 M1-M17 设定为 default 值，所有 PC 设定为 default 值(PC1-PC9) SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 0); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); //7、 M18-M40（除 M30\M34\M39）） 3s ramp 到 default 值。。 SetMfcToDefaultByGroup((int)RoutineStep.SetM18to40, MfcGroupName.M18toM40No303439, 3); //9、 打开 A Valves，打开 J valve。 SetIoValueByGroup((int)RoutineStep.OpenGasIn1, IoGroupName.A, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout); //10、 打开 EPV2，等待 3s, 打开 TV enable, 压力模式，伺服压力默认设定为 0mbar； SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay5, 3); SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5); SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5); SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _vacPumpBasePressure); //11、当蝶阀设定值 ramp 到 0 后，将 M18-M40（除 M30\M34\M39）） MFC 5s ramp 到0； 关闭 V87、 V97。 SetMfcByGroup((int)RoutineStep.SetM18to40_1, MfcGroupName.M18toM40No303439, 0, 3); SetIoValueByGroup((int)RoutineStep.SetV87V97, IoGroupName.V87V97, false, _IoValueOpenCloseTimeout); //12、等待腔体压力到 Pump Base Pressure（可配置）， 蝶阀改为位置模式，开度设定 100% WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _vacPumpBasePressure, _pumpTimeOut); SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout); SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } _pmIoInterLock.SetPMVacIdleRountingRunning(false, out string reason); Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); return Result.DONE; } public override void Abort() { _pmIoInterLock.SetPMVacIdleRountingRunning(false, out string reason); _pmIoInterLock.SetPMPumpRoutineRunning(false, out _); PmDevice.SetRotationServo(0, 0); base.Abort(); } private void CheckRoutineTimeOut() { if (_routineTimeOut > 10) { if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) { EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s"); throw (new RoutineFaildException()); } } } } }