using System.Collections.Generic; using System.Diagnostics; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Event; using Aitex.Core.RT.Log; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using SicModules.PMs.Routines.Base; namespace SicModules.PMs.Routines { public class PMToProcessIdleRoutine : PMBaseRoutine { private enum RoutineStep { ConfinementServoOn, RotationServoOn, RotationEnable, HeatEnable, VentPumpClose, ArSupply, OpenH2Valve, SetGroupA, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetMFCMode, SetPCMode, SetM1to16, SetM17M18, SetPC, SetGroupJ, SetM18toM40, SetPC567Close, SetPC567Default, SetPC567Mode, SetGasOut, SetTv, SetM291519to38, SetGasIn1, //V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetM18toM26, SetTVCloseMode, SetTvPositionToZero, CheckPM1000, SetGasIn2, SetGroupJOpen, CloseFinal2, OpenFinal2, SetMfcFinal2, WaitPmPressureUp, WaitPmPressureUp1020, SetTvOpen, SetTVEnable, SetTVPressMode, SetTV, SetTvMode, SetTVto1050, SetTVto300, WaitTvTo300, CheckPmVac, CheckPmAtm, CheckV72Open, SetV72, SetV25, SetV76, SetV75, SetV31, SetV32, SetV35V36, SetV65, SetV103, SetV105, SetEPV1, SetEPV2, SetEPV11, SetEPV22, SetTvModeToPress, SetMfc28to40Special, SetMfc28to40Default, SetPressUpOrDown1, SetPressureDown, EnableRotation, EnableHeater, SetRotation1, WaitRotation1, SetTC1Mode, SetTC1Ratio, SetTC1RatioTo0, SetTC1Ref, SetTC2Mode, SetTC2Ratio, SetTC2RatioTo0, SetTC2Ref, EnableTC1, EnableTC2, CloseTC1, CloseTC2, SetFinal1ToDefault, SetFinal1To0, SetFinal2ToDefault, SetFinal2To0, CheckFinal1Open, CheckFinal2Open, CheckTvOpen, SetRotation2, SetGroupV25, SetScrReset, CheckEpv2Open, CheckEpv1Open, SetV92V93V95, SetV94, SetV96, SetV68, SetM32M35M37, SetM36, SetM38, WaitPmPressureUp1, DelayV25, TimeDelay0, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay12, TimeDelay13, TimeDelay14, TimeDelay15, TimeDelay16, TimeDelay20, TimeDelay21, TimeDelay22, Notify1, Notify2 } private IoThrottleValve2 _IoThrottle; private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout; //旋转停止超时 private int _IoValueOpenCloseTimeout = 10; //开关超时时间 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private double _throttleFinalPressure = 300;//蝶阀最终调整对的压力 private bool _psuHeatEnable = false; //是否启用PSU 加热 private int _psuHeatMode = 0; //private float _psuPowerRef = 0; private float _psuL1Ratio = 0; private float _psuL2Ratio = 0; private float _psuL3Ratio = 0; private bool _scrHeatEnable = false; //是否启用SCR 加热 private int _scrHeatMode = 0; //private float _scrPowerRef = 0; private float _scrL1Ratio = 0; private float _scrL2Ratio = 0; private float _scrL3Ratio = 0; private int _rotationSpeed = 60; private int _routineTimeOut; private Stopwatch _swTimer = new Stopwatch(); private IoInterLock _pmInterLock; public PMToProcessIdleRoutine(ModuleName module, PMModule pm) : base(module, pm) { Module = module.ToString(); Name = "ProcessIdle"; } public override Result Start(params object[] objs) { Reset(); _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); _pmInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); //if (!_pmInterLock.SetPMProcessIdleRunning(true, out string reason)) //{ // EV.PostAlarmLog(Module, $"can not run ProcessIdle, {reason}"); // return Result.FAIL; //} /* * 2025-07-16 * 执行ProcessIdle Routine需禁用MFC报警；报警只在保持ProcessIdle状态时生效。 * 这个DO原本用来指示正在执行Routine，现在改为指示PM维持在ProcessIdle状态。 * 只有维持在ProcessIdle状态时，才会启用MFC报警监测。 * * PM状态机ProcessIdle状态进入和退出时分别设置DOProcessIdleRunning为true和false，因此进入当前Routine时， * DOProcessIdleRunning有可能为1，需要强制设置为0；当前Routine执行完毕后再将这个DO设置为1，表示已进入ProcessIdle状态。 */ if (!_pmInterLock.SetPMProcessIdleRunning(false, out var reason)) { LOG.Error($"Failed to set DOProcessIdle to false due to {reason}"); } if (!PmDevice.CheckHeadHeaterEnable(true)) { EV.PostAlarmLog(Module, $"Should set HeatEnable on first!"); return Result.FAIL; } //检查隔热罩状态 if (PmDevice.ConfinementRing.RingServoError || PmDevice.ConfinementRing.RingIsBusy || !PmDevice.ConfinementRing.RingServoOn) { EV.PostAlarmLog(Module, $"ConfinementRing State abnormal,please check"); return Result.FAIL; } ////检查磁流体状态 //if(!PmDevice._sicServo.ServoReady) //{ // EV.PostAlarmLog(Module, $"NAIS Servo State abnormal,please check"); // return Result.FAIL; //} _v72IsOpen = false; _checkPMPressureOver1000 = false; _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _rotationSpeed = SC.GetValue($"PM.{Module}.ProcessIdle.RotationSpeed"); _throttleFinalPressure = SC.GetValue($"PM.{Module}.ProcessIdle.FinalPressure"); _psuHeatEnable = SC.GetValue($"PM.{Module}.ProcessIdle.PSUHeaterEnable"); _psuHeatMode = SC.GetValue($"PM.{Module}.ProcessIdle.PSUHeaterMode"); _psuL1Ratio = (float)SC.GetValue($"PM.{Module}.ProcessIdle.PSUInnerRatio"); _psuL2Ratio = (float)SC.GetValue($"PM.{Module}.ProcessIdle.PSUMiddleRatio"); _psuL3Ratio = (float)SC.GetValue($"PM.{Module}.ProcessIdle.PSUOuterRatio"); _scrHeatEnable = SC.GetValue($"PM.{Module}.ProcessIdle.SCRHeaterEnable"); _scrHeatMode = SC.GetValue($"PM.{Module}.ProcessIdle.SCRHeaterMode"); _scrL1Ratio = (float)SC.GetValue($"PM.{Module}.ProcessIdle.SCRUpperRatio"); _scrL2Ratio = (float)SC.GetValue($"PM.{Module}.ProcessIdle.SCRMiddleRatio"); _scrL3Ratio = (float)SC.GetValue($"PM.{Module}.ProcessIdle.SCRLowerRatio"); _routineTimeOut = SC.GetValue($"PM.{Module}.ProcessIdle.RoutineTimeOut"); _finalOpen = false; _isTvOpen = false; currentPressureUpOrDown = PressureUpOrDown.None; _swTimer.Restart(); Notify("Start"); return Result.RUN; } public override Result Monitor() { try { CheckRoutineTimeOut(); //关闭V76,打开V75 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); //2、 旋转停止，加热停止（根据配置，配置加热就不需要停止加热，没有配置加热时停止加热） 。 //SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); //3、 打开 V31（H2.Supply）、 V32(Ar.Supply） 。 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); //4、 打开 V35(H2N2.Line1)、 V36(H2N2.Line2)，关闭 B/C/E/F/H/KValves,打开 D/G Valves。 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); //5、 M1-M17 设定为 default 值，所有 PC 设定为 default 值(PC1-PC9)。 SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); //M1-M16设定为default值(M2、M9、M15除外) SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0); SetMfcToDefaultByGroup((int)RoutineStep.SetM17M18, MfcGroupName.M17M18, 0); //6、 M18-M40（除 M30\M34\M39） MFC 5s ramp 到 0。 SetMfcByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 0, 5); //7、 打开 EPV2。 SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay1, 3); //8 、打 开 V87（ SHPurge.Final ）、 V88（ OuterGas.Final）、 V89（ InnerGas.Final ）、 V90（MiddleGas.Final）、 V91（OpticPurge.Final）、 V97（CarryGas.Final）； SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); //9、 M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ； SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3); //10、打开 V92（GasRingPurge.Final）、 V93（ChamberPurge.Final）、 V95（ConfinementRing.Final）；等待 3S SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay2, 3); //11、 M32、 M35、 M37 依次设定 3S ramp 到 default 值 ； 等待 3S，打开 V68（ChamBody.N2.Purge） SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 3); SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); //12、打开 V94（RotationUpPurge.Final）、 M36 设定 5S ramp 到 default 值；等待 3S，打开V96（HeaterWF.Final）； M38 依次设定 5S ramp 到 default 值 ； SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 5); TimeDelay((int)RoutineStep.TimeDelay3, 3); SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 5); TimeDelay((int)RoutineStep.TimeDelay4, 3); //13、打开 J Valves ； 设置 M18-M26 3s ramp 到 default 值。 SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM26, MfcGroupName.M18toM26, 3); //14、 打开 TV enable, 压力模式，伺服压力默认设定为 1050mbar； SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5); SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5); SetThrottleToTargetAndNoWait((int)RoutineStep.SetTV, _IoThrottle, 1050); //15、打开 V72(GasBox.Vent.Pump） 关闭 V25(GasBox.Vent.Bypass)， 反应腔压力伺服到300mbar（可配置） SetIoValueByGroup((int)RoutineStep.SetV72, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay5, 1); SetIoValueByGroup((int)RoutineStep.SetV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout); SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _throttleFinalPressure); WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.SetTVto300, _IoThrottle, _throttleFinalPressure, _pmPressureMaxDiff, _throttleTimeout); //16、设定转速（可配置） EnableRotation((int)RoutineStep.EnableRotation, 5); SetRotationValveAndNoWait((int)RoutineStep.SetRotation1, _rotationSpeed); //17、加热使能（PSU 和 SCR）（可配置） if (_psuHeatEnable) { //打开PSU加热 SetPSUEnable((int)RoutineStep.EnableTC1, true, 5); SetPSUHeatMode((int)RoutineStep.SetTC1Mode, _psuHeatMode); TimeDelay((int)RoutineStep.TimeDelay6, 1); SetPSUHeatRatio((int)RoutineStep.SetTC1Ratio, _psuL1Ratio, _psuL2Ratio, _psuL3Ratio); } else { //关闭PSU加热 SetPSUHeatRatio((int)RoutineStep.SetTC1RatioTo0, 0, 0, 0); SetPSUEnable((int)RoutineStep.CloseTC1, false, 5); } if (_scrHeatEnable) { //打开SCR加热 SetSCRReset((int)RoutineStep.SetScrReset); TimeDelay((int)RoutineStep.TimeDelay7, 1); SetSCREnable((int)RoutineStep.EnableTC2, true, 5); SetSCRHeatMode((int)RoutineStep.SetTC2Mode, _scrHeatMode); TimeDelay((int)RoutineStep.TimeDelay8, 1); SetSCRHeatRatio((int)RoutineStep.SetTC2Ratio, _scrL1Ratio, _scrL2Ratio, _scrL3Ratio); } else { //关闭SCR加热 SetSCRHeatRatio((int)RoutineStep.SetTC2RatioTo0, 0, 0, 0); SetSCREnable((int)RoutineStep.CloseTC2, false, 5); } WaitRotationValve((int)RoutineStep.WaitRotation1, _rotationSpeed, true, _rotationSpeed / 2); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } // _pmInterLock.SetPMProcessIdleRunning(false, out string reason); if (!_pmInterLock.SetPMProcessIdleRunning(true, out string reason)) { LOG.Error($"Failed to set DOProcessIdle to true due to {reason}"); } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); return Result.DONE; } private void CheckRoutineTimeOut() { if (_routineTimeOut > 10) { if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) { Notify($"Routine TimeOut! over {_routineTimeOut} s"); throw (new RoutineFaildException()); } } } public override void Abort() { _pmInterLock.SetPMProcessIdleRunning(false, out string reason); PmDevice._ioThrottleValve.StopRamp(); PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All)); PmDevice.SetHeaterStopRamp(); PmDevice.SetRotationStopRamp(); PmDevice.SetRotationServo(0, 0); base.Abort(); } } }