using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs; using SicModules.PMs.Routines.Base; using System.Collections.Generic; using System.Diagnostics; namespace SicModules.PMs.Routines { public class PMPurgeRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupA, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetMFCMode, SetPCMode, SetM1toM17, SetM17M18, SetPC, SetGroupJ, CloseGroupJ, SetM291519to38, SetGasOut, SetTv, SetGasIn1, //V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetMfc19to26, SetTVCloseMode, SetTvPositionToZero, WaitPressUpTo950, SetGasIn2, SetGroupJOpen, SetM18toM40, SetM291519to26_1, OpenFinal2, IsOpenFinal1, IsOpenFinal2, IsCloseFinal1, IsCloseFinal2, SetMfcFinal2, SetEPV1, SetEPV2, SetTvMode, SetTVEnable_1, SetTVEnable_2, SetTVPressMode, SetTVPressMode2, SetTVPressMode1, SetTv1, WaitTv1, SetTVPositionMode, SetTVPositionMode_1, SetTVPositionMax, SetTVPositionMax_1, SetTvOpen, SetTvModeToPress, SetTVtoCurrent, RoutinePre, SetPressureUp, SetPressureDown, WaitPressureDown, VentPumpOpen, PressureToMax, PressureToMin, StartLoop, EndLoop, SetMfc28to31, SetReactorPress, CloseFinanl1, CloseFinanl2, CloseEPV2, SetTVCloseMode1, SetTVCloseMode2, CLoseTvvvv, CLoseTV1, CLoseTV2, FirstWaitPressureUp, FirstSetDefault_M18toM40, FirstSet0_M18toM40, FirstSetEPV2_1, FirstSetEPV2_2, FirstSetTv1, SetEPV2_3, CLoseEPV1, CheckPM1000, WaitPressUpTo1000, WaitPressUpTo1020, LoopSetDefault_M18toM40, LoopSetEPV2_1, LoopWaitPressureUp, LoopSetEPV2_2, LoopSetTv1, LoopSet0_M18toM40, Loop2Set0_M18toM40, LoopWaitTv1, SetPressUpOrDown1, SetPressUpOrDown2, SetMfc28to40Special, WaitPmPressureUp, SetMfc27to40Default, SetV75, SetV76, SetV31, SetV32, SetV35V36, SetV65, SetV751, SetV761, SetV103, SetV105, Set0_M18toM40, SetM2toM40_1, SetM2TOM40Default, SetM18, SetM18_1, SetM18_2, SetM18Default, SetV92V93V95, SetV94, SetV96, SetV68, SetM32M35M37, SetM36, SetM38, SetM36_1, SetM38_1, SetV111_1, SetV111_2, SetPC567Close, SetPC567Mode, SetPC567Default, OpenEPV2, WaitPressUpTo20, SetMfc291519to38, WaitPressUpTo0, SetMfc291519to38ToDefault, WaitPressDownTo20, SetPmPressureTo20, CloseMfcFinal1, CloseMfcFinal2, CloseMfc2915, CheckFinal1Open, SetGroupV25, Mfc36, SetM39, CloseMfc1to16, CloseMfc2to26, CloseJ, CheckTVOpen1, CheckTVOpen2, CheckEPV1Open1, CheckEPV2Open1, CheckEPV2Open2, CloseM32M35M37, CloseM36, CloseM38, CloseGasIn1, WaitPmPressureUp1, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay12, TimeDelay14, TimeDelay18, TimeDelay19, TimeDelay20, TimeDelay21, TimeDelay22, Notify1, Notify2 ,FinishSetM1toM17, FinishSetDefault_M18toM40, FinishSetTVCloseMode2, FinishCLoseTV2, FinishSetEPV2_3, FinishWaitPressUpTo1020, FinishSet0_M2M9M15M19_M26 } private ModuleName moduleName; private PMModule _pmModule; private IoThrottleValve2 _IoThrottle; private IoInterLock _pmIoInterLock; private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout; //旋转停止超时 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private int _EPV2OpenTimeDelay = 10; private double _ventBasePressure; private double _pumpBasePressure; private int _pressureLoopCount; //Loop次数 private int _pressureMinDelay; private int _pressureMaxDelay; private int _pressureMinTimeout; private int _pressureMaxTimeout; private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private int _ventTimeout; private int _pumpTimeout; private int _EPV12TimeSapn = 10; private int _waitPressureTimeout = 600; //等待腔体压力上升到950的超时时间 private bool _needFinalValveOpen = false; private Stopwatch _swTimer = new Stopwatch(); public PMPurgeRoutine(ModuleName module, PMModule pm) : base(module, pm) { moduleName = module; _pmModule = pm; Name = "Purge"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); _pmIoInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); } public override Result Start(params object[] objs) { Reset(); _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _ventTimeout = SC.GetValue($"PM.{Module}.Purge.VentTimeout"); _pumpTimeout = SC.GetValue($"PM.{Module}.Purge.PumpTimeout"); _pressureLoopCount = SC.GetValue($"PM.{Module}.Purge.CyclePurgeCount"); _pumpBasePressure = SC.GetValue($"PM.{Module}.Purge.PumpBasePressure"); _pressureMinDelay = SC.GetValue($"PM.{Module}.Purge.PumpDelayTime"); _pressureMinTimeout = SC.GetValue($"PM.{Module}.Purge.PumpTimeout"); _ventBasePressure = SC.GetValue($"PM.{Module}.Purge.VentBasePressure"); _pressureMaxDelay = SC.GetValue($"PM.{Module}.Purge.VentDelayTime"); _pressureMaxTimeout = SC.GetValue($"PM.{Module}.Purge.VentTimeout"); _waitPressureTimeout = SC.GetValue($"PM.{Module}.Purge.WaitPressureTimeout"); _needFinalValveOpen = SC.GetValue($"PM.{Module}.Purge.NeedFinalValveOpen"); //Clean succeed 清掉 _pmIoInterLock.DoLidCloseRoutineSucceed = false; _pmIoInterLock.DoLidOpenRoutineSucceed = false; if (!_pmIoInterLock.SetPMPurgeRoutineRunning(true, out string reason)) { EV.PostAlarmLog(Module, $"can not Purge,{reason}"); return Result.FAIL; } currentPressureUpOrDown = PressureUpOrDown.None; _finalOpen = false; _swTimer.Restart(); Notify($"Start LoopCount:{_pressureLoopCount}"); return Result.RUN; } public override Result Monitor() { try { //CheckRoutineTimeOut(); //关闭V76,打开V75 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); //2、 旋转停止，加热停止 SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); //3、 关闭 V72(GasBox.Vent.Pump） 打开 V25(GasBox.Vent.Bypass)。 SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); //4、 打开 V31（H2.Supply）、 V32(Ar.Supply） 。 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); //5、 打开 V35(H2N2.Line1)、 V36(H2N2.Line2)，关闭 B/C/E/F/H/KValves,打开 D/G Valves； 打开 J valve。 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout); //6、 M1-M17 设定为 default 值，所有 PC 设定为 default 值(PC1-PC9)， M18-M40（除M30\M34\M39）） MFC 3s ramp 到 default 值。 SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 0); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 3); //7、打开 EPV2，等待 3s, 打开 TV enable, 压力模式，伺服压力默认设定为 0mbar； SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay1, 3); SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable_1, _IoThrottle, 5); SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5); SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure); //8、当蝶阀设定值 ramp 到 0 后，将 M18-M40（除 M30\M34\M39）） MFC 3s ramp 到 0； SetMfcByGroup((int)RoutineStep.Set0_M18toM40, MfcGroupName.M18toM40No303439, 0, 3); //9、等待腔体压力到 Pump Base Pressure（可配置），蝶阀改为位置模式，开度设定 100 % WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pumpBasePressure, _throttleTimeout); TimeDelay((int)RoutineStep.TimeDelay2, 3); SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout); TimeDelay((int)RoutineStep.TimeDelay11, 3); SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout); //10、 M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ； SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3); //11、 打 开 V87（ SHPurge.Final）、 V88（ OuterGas.Final）、 V89（ InnerGas.Final ）、 V90（MiddleGas.Final）、 V91（OpticPurge.Final）、 V97（CarryGas.Final）； SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); //12、 打开 V68（ChamBody.N2.Purge） SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay3, 1); //13、 M32、 M35、 M36、 M37、 M38 依次设定 3S ramp 到 default 值 ； SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 1); SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 1); SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 1); //14、打开 V92（GasRingPurge.Final）、 V93（ChamberPurge.Final）、 V95（ConfinementRing.Final）； //等待 950，打开 V94（RotationUpPurge.Final）、 等待 3S，打开 V96（HeaterWF.Final） ； //蝶阀改为压力模式 SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout); WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo950, 950, _waitPressureTimeout); SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay4, 3); SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout); SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5); //M18-M40（除 M30\M34\M39）） MFC 3s ramp 到 default 值。 //关闭 EPV2，等待压力达到设定值，压力达到后， 打开 EPV2； M18 - M40（除 M30\M34\M39）） MFC 5s ramp 到 0。 //伺服压力到设定值 0（可配置） SetMfcToDefaultByGroup((int)RoutineStep.FirstSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3); SetIoValueByGroup((int)RoutineStep.FirstSetEPV2_1, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.FirstWaitPressureUp, _IoThrottle, _ventBasePressure, _ventTimeout); SetIoValueByGroup((int)RoutineStep.FirstSetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); SetMfcByGroup((int)RoutineStep.FirstSet0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5); SetThrottleToTargetAndNoWait((int)RoutineStep.FirstSetTv1, _IoThrottle, _pumpBasePressure); //循环开始 Loop((int)RoutineStep.StartLoop, _pressureLoopCount); //M18 - M40（除 M30\M34\M39）） MFC 3s ramp 到 default 值。 //关闭 EPV2，等待压力达到设定值，压力达到后，打开 EPV2； //M18 - M40（除 M30\M34\M39）） MFC 5s ramp 到 0。 //伺服压力到设定值 0（可配置） //M18 - M40（除 M30\M34\M39）） MFC5s ramp 到 0。 //等待压力到达 0（可配置） SetMfcToDefaultByGroup((int)RoutineStep.LoopSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3); SetIoValueByGroup((int)RoutineStep.LoopSetEPV2_1, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.LoopWaitPressureUp, _IoThrottle, _ventBasePressure, _ventTimeout); SetIoValueByGroup((int)RoutineStep.LoopSetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); SetMfcByGroup((int)RoutineStep.LoopSet0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5); SetThrottleToTargetAndNoWait((int)RoutineStep.LoopSetTv1, _IoThrottle, _pumpBasePressure); SetMfcByGroup((int)RoutineStep.Loop2Set0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5); WaitChamberPressDownTo((int)RoutineStep.LoopWaitTv1, _pumpBasePressure, _pumpTimeout); EndLoop((int)RoutineStep.EndLoop); //设置 M1-M17 3s ramp 到 default； M18 - M40（除 M30\M34\M39）） MFC 3s ramp到 default 值。 //关闭蝶阀，再关闭 EPV2； 等待压力到达 1020。 //M2,M9,M15,M19-M26 3s ramp 到0 SetMfcToDefaultByGroup((int)RoutineStep.FinishSetM1toM17, MfcGroupName.M1toM17, 3); SetMfcToDefaultByGroup((int)RoutineStep.FinishSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3); SetThrottleToCloseMode((int)RoutineStep.FinishSetTVCloseMode2, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.FinishCLoseTV2, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay10, 1); SetIoValueByGroup((int)RoutineStep.FinishSetEPV2_3, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to 1020 mbar!"); WaitChamberPressUpTo((int)RoutineStep.FinishWaitPressUpTo1020, 1020, _waitPressureTimeout); SetMfcByGroup((int)RoutineStep.FinishSet0_M2M9M15M19_M26, MfcGroupName.M2M9M15M19_M26, 0, 3); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); SetRoutineSuccessedDo(); return Result.DONE; } public override void Abort() { _pmIoInterLock.DoLidOpenRoutineRunning = false; PmDevice._ioThrottleValve.StopRamp(); PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All)); PmDevice.SetRotationServo(0, 0); base.Abort(); } private void SetRoutineSuccessedDo() { _pmIoInterLock.DoLidOpenRoutineRunning = false; _pmIoInterLock.SetLidOpenRoutineSucceed(true, out string reason); _pmIoInterLock.DoLidCloseRoutineSucceed = false; } //private void CheckRoutineTimeOut() //{ // if (_routineTimeOut > 10) // { // if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) // { // EV.PostAlarmLog(Module,$"Routine TimeOut! over {_routineTimeOut} s"); // throw (new RoutineFaildException()); // } // } //} } }