using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Routine; using MECF.Framework.Common.Equipment; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs; using SicModules.PMs.Routines.Base; using System.Collections.Generic; namespace SicModules.PMs.Routines { public class PMToIsolationRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetM1to17, SetM18toM40, SetM17M18, SetPC, SetGroupI, //V87-96 SetM19to38, CloseFinal1, CloseFinal2, CloseEPV2, SetGasOut, SetTv, SetGasIn1, //V65,V67,V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetM19to26, SetGasIn2, SetGroupJOpen, OpenFinal2, SetMfcFinal2, SetEPV1, SetEPV2, SetTVCloseMode, SetTvPositionToZero, SetMFCMode, SetPCMode, SetV76, SetV75, SetV31, SetV32, SetV35V36, SetGroupV25, SetV65, CloseV68, SetV103, SetV105, CloseM32M35M37, CloseM36, CloseM38, CloseGasIn1, CloseFinanl1, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay12, TimeDelay14, TimeDelay18, TimeDelayForEPV1, } private PMModule _pm1Module; private IoThrottleValve2 _IoThrottle; private int _rotationCloseTimeout = 20; //旋转停止超时 private int _IoValueOpenCloseTimeout = 10; //开关超时时间 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 public PMToIsolationRoutine(ModuleName module, PMModule pm1) : base(module, pm1) { Module = module.ToString(); _pm1Module = pm1; Name = "Isolation"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); } public override Result Start(params object[] objs) { Reset(); Notify("Start"); return Result.RUN; } public override Result Monitor() { try { //CheckRoutineTimeOut(); //关闭V76,打开V75 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); //2、 旋转停止,加热停止 SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, 0, false, _rotationCloseTimeout); //3、 关闭 V72(GasBox.Vent.Pump) 。 SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); //4、 打开 V31(H2.Supply)、 V32(N2Supply)。 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); //5、 打开 V35(H2N2.Line1)、V36(H2N2.Line2),关闭 B/ C / E / F / H / KValves,打开D / G Valves。关闭 V68(ChamBody.Ar.Purge) SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.CloseV68, IoGroupName.V68, false, _IoValueOpenCloseTimeout); //6、 1 - M17 设定为 default 值,所有 PC 设定为 default 值(PC1 - PC9), SetMfcToDefaultByGroup((int)RoutineStep.SetM1to17, MfcGroupName.M1toM17, 0); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); //7、 M18 - M40(除 M30\M34\M39)) MFC 5s ramp 到 0。 SetMfcByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 0, 5); //8、 依次关闭 Final valves; //先关闭 V93(ChamberPurge.Final)、 V94(RotationUpPurge.Final)、 V95(ConfinementRing.Final)、 V96(HeaterWF.Final); //再关闭 V87(SHPurge.Final)、 V88(OuterGas.Final)、 V89(InnerGas.Final)、 V90(MiddleGas.Final)、 V91(OpticPurge.Final)、 V92(GasRingPurge.Final)、 V97(CarryGas.Final); SetIoValueByGroup((int)RoutineStep.CloseFinal1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.CloseFinal2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout); //9、 关闭蝶阀,再关闭 EPV2 SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay1, 1); SetIoValueByGroup((int)RoutineStep.CloseEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify("Isolation Finished"); return Result.DONE; } public override void Abort() { PmDevice.SetRotationServo(0, 0); base.Abort(); } } }