using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs; using SicModules.PMs.Routines.Base; using System.Collections.Generic; using System.Diagnostics; namespace SicModules.PMs.Routines { public class PMVentRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupA, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetMFCMode, SetPCMode, SetM1to16, SetM17M18, SetM18toM40, SetPC, SetM291519to38, SetGroupJ, SetM19to38, SetGasOut, SetTv, SetGasIn1, //V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetMfc19to26, SetTVCloseMode, SetTvPositionToZero, CheckPM1000, SetGasIn2, SetGroupJOpen, SetM291519to26, OpenFinal2, SetMfcFinal2, WaitPmPressureUp, WaitPmPressureUp1, SetEPV1, SetEPV2, SetTvMode, SetEPVV1, SetMfc28to40Special, SetMfc28to40Default, SetPC567Close, SetPC567Mode, SetPC567Default, CheckFinal1Open, SetV76, SetV75, SetV31, SetV32, SetV35V36, SetV103, SetV105, SetGroupV25, SetV92V93V95, SetV94, SetV96, SetV68, SetM32M35M37, SetM36, SetM38, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay18, TimeDelay20, TimeDelay21, TimeDelay22, Notify1, SetM1toM17 } private IoThrottleValve2 _IoThrottle; private IoInterLock _pmIoInterLock; private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout; //旋转停止超时 private int _IoValueOpenCloseTimeout = 10; //开关超时时间 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private int _waitPMPressureUpTimeout = 300; //等待反应腔压力到达1000的超时时间 private int _routineTimeOut; private double _ventBasePressure; private Stopwatch _swTimer = new Stopwatch(); public PMVentRoutine(ModuleName module, PMModule pm) : base(module, pm) { Module = module.ToString(); Name = "Vent"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); _pmIoInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); } public override Result Start(params object[] objs) { Reset(); _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _routineTimeOut = SC.GetValue($"PM.{Module}.Vent.RoutineTimeOut"); _ventBasePressure = SC.GetValue($"PM.{Module}.Vent.VentBasePressure"); _waitPMPressureUpTimeout = SC.GetValue($"PM.{Module}.Vent.VentTimeout"); currentPressureUpOrDown = PressureUpOrDown.None; _swTimer.Restart(); _finalOpen = false; if (!_pmIoInterLock.SetPMVentRoutineRunning(true, out string reason)) { EV.PostAlarmLog(Module, $"can not Vent,{reason}"); return Result.FAIL; } Notify("Start"); return Result.RUN; } public override Result Monitor() { try { CheckRoutineTimeOut(); //DOR Pump 抽真空。关闭V76,打开V75 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); //旋转停止,加热停止 SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); //关闭V72,打开V25 SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); //打开V31,打开V32 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); //5、 打开 V35(H2N2.Line1)、 V36(H2N2.Line2) , 关闭 B/ C / E / F / H / K Valves,打开 D/ G Valves 。 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); //6、 M1-M17 设定为 default 值, 所有 PC 设定为 default 值(PC1-PC9) ,M18 - M40(除 M30\M34\M39) MFC 5s ramp 到 0。 SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 5); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 5); //7、 关闭蝶阀, 再关闭 EPV2 SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay1, 1); SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); //8、 打开 A Valves(V33S(SH.H2/N2 Switch); V67、 V68(N2.Supply) ). SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout); //9 、 打 开 V87 ( SHPurge.Final )、 V88 ( OuterGas.Final )、 V89 ( InnerGas.Final )、 V90(MiddleGas.Final) 、 V91(OpticPurge.Final)、 V97(CarryGas.Final) ; //M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ; SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3); //10、 打开 V92(GasRingPurge.Final)、 V93(ChamberPurge.Final)、 V95(ConfinementRing.Final);等待 3S SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay2, 3); //11、 M32、 M35、 M37 依次设定 3S ramp 到 default 值 ; 等待 3S, SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 3); //12、 打开 J Valves ;设置 M18-M26 3s ramp 到 default 值。 //等到腔体压力达到 900 mbar打开 V94(RotationUpPurge.Final)、 M36 设定 5S ramp 到 default 值; //等待 3S,打开 V96(HeaterWF.Final); M38 设定 5S ramp 到 default 值; SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout); WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 900, _waitPMPressureUpTimeout); SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 5); TimeDelay((int)RoutineStep.TimeDelay3, 3); SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 5); //13、 压力达到 1020,结束 NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to {_ventBasePressure} mbar!"); WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout); //等待反应腔压力大于1000 } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } _pmIoInterLock.SetPMVentRoutineRunning(false, out _); Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); return Result.DONE; } public override void Abort() { _pmIoInterLock.SetPMVentRoutineRunning(false, out _); PmDevice._ioThrottleValve.StopRamp(); PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All)); PmDevice.SetRotationServo(0, 0); base.Abort(); } private void CheckRoutineTimeOut() { if (_routineTimeOut > 10) { if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) { EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s"); throw (new RoutineFaildException()); } } } } }