161 lines
19 KiB
XML
161 lines
19 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
|
||
<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
|
||
|
||
<!--给IO数值初始值仿真--><!--
|
||
<IoValveGroup classType="MECF.Framework.Simulator.Core.SimulatorIoDefault" assembly="MECF.Framework.Simulator.Core">
|
||
<IoDefaults id="IoDefault" display="" schematicId="" unit="">
|
||
--><!--测试仿真功能配置用法示例，后期删除 --><!--
|
||
--><!--<IODefault type="AI" ioName="AI_ButterflyValveActualPressure" default="330"/>--><!--
|
||
--><!--<IODefault type="AO" ioName="AO_M2" default="2000"/>--><!--
|
||
--><!--测试仿真功能配置用法示例，后期删除--><!--
|
||
--><!--<IODefault type="AI" ioName="AI_ButterflyValveActualPressure" default="1030"/>--><!--
|
||
|
||
|
||
|
||
|
||
--><!--interlock默认值--><!--
|
||
|
||
--><!--Interlock默认值--><!--
|
||
--><!--Alarm默认值--><!--
|
||
|
||
--><!--Alarm默认值--><!--
|
||
</IoDefaults>
|
||
</IoValveGroup>
|
||
|
||
--><!--给AI或AO在基准值上写入随机数，baseValue是基准数值配置--><!--
|
||
<AI_AORandomGroup classType="MECF.Framework.Simulator.Core.SimulatorAI_AORandom" assembly="MECF.Framework.Simulator.Core">
|
||
<AI_AORandoms id="AI_AORandom" display="" schematicId="" unit="" >
|
||
--><!--测试仿真功能配置用法示例，后期删除--><!--
|
||
--><!--<Random type="AO" ioName="AO_PressCtrl1" baseValue="30" />--><!--
|
||
--><!--测试仿真功能配置用法示例，后期删除--><!--
|
||
|
||
|
||
--><!--水路温度仿真--><!--
|
||
|
||
--><!--<Random type="AI" ioName="AI_MoSourceFlowTemp" baseValue="21" />
|
||
<Random type="AI" ioName="AI_PMPumpFlowTemp" baseValue="22" />
|
||
<Random type="AI" ioName="AI_TMpumpFlowTemp" baseValue="23" />
|
||
<Random type="AI" ioName="AI_HeatingCoilFlowTemp" baseValue="24" />
|
||
<Random type="AI" ioName="AI_HeaterFlowTemp" baseValue="25" />
|
||
<Random type="AI" ioName="AI_ChillerFlowTemp" baseValue="26" />
|
||
<Random type="AI" ioName="AI_OscillatorFlowTemp" baseValue="27" />
|
||
<Random type="AI" ioName="AI_CoilFlangeFlowTemp" baseValue="28" />
|
||
<Random type="AI" ioName="AI_Top1FlowTemp" baseValue="29" />
|
||
<Random type="AI" ioName="AI_Top2FlowTemp" baseValue="30" />
|
||
<Random type="AI" ioName="AI_ReactorRingFlowTemp" baseValue="31" />
|
||
<Random type="AI" ioName="AI_BottomFlowTemp" baseValue="32" />
|
||
<Random type="AI" ioName="AI_GasInletBottomFlowTemp" baseValue="33" />
|
||
<Random type="AI" ioName="AI_TemChillerFlowTemp" baseValue="34" />--><!--
|
||
|
||
|
||
|
||
</AI_AORandoms>
|
||
</AI_AORandomGroup>
|
||
|
||
--><!--DO数值实时刷到DI，DO设置初始值，初始值可以不设置--><!--
|
||
<IoDO_DIGroup classType="MECF.Framework.Simulator.Core.SimulatorIoDO_DI" assembly="MECF.Framework.Simulator.Core">
|
||
<IoDO_DIs id="IoDO_DI" display="" schematicId="" unit="">
|
||
|
||
--><!--<DO_DI doDefault="" do="DO_PID01StartRunning" di="DI_PID01RunningState" />--><!--
|
||
|
||
|
||
</IoDO_DIs>
|
||
</IoDO_DIGroup>
|
||
|
||
--><!--AO数值实时刷到AI，AO设置初始值，初始值可以不设置--><!--
|
||
<IoAO_AIGroup classType="MECF.Framework.Simulator.Core.SimulatorIoAO_AI" assembly="MECF.Framework.Simulator.Core">
|
||
<IoAO_AIs id="IoAO_AI" display="" schematicId="" unit="">
|
||
|
||
</IoAO_AIs>
|
||
</IoAO_AIGroup>-->
|
||
|
||
<IoValveGroup classType="MECF.Framework.Simulator.Core.SimulatorIoValve" assembly="MECF.Framework.Simulator.Core">
|
||
<!--这里是包了一层，复制PM配置的气阀时需要注意-->
|
||
<IoValves id="IoValves" display="" schematicId="" unit="">
|
||
<IoValve id="V18" display="V18" schematicId="V18" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_MoCO6CarrierOutlet(V18)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V18s" display="V18s" schematicId="V18s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_MoCO6CarrierOutlet(V18)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V19" display="V19" schematicId="V19" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoCO6BypassFB(V19)" doOpen="DO_MoCO6Bypass(V19)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V20" display="V20" schematicId="V20" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)" doOpen="DO_MoCO6InOutLeakTest(V20)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V20s" display="V20s" schematicId="V20s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)" doOpen="DO_MoCO6InOutLeakTest(V20)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V21" display="V21" schematicId="V21" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)" doOpen="DO_MoResrvCarrierOutlet(V21)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V21s" display="V21s" schematicId="V21s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)" doOpen="DO_MoResrvCarrierOutlet(V21)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V22" display="V22" schematicId="V22" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoResrvBypassFB(V22)" doOpen="DO_MoResrvBypass(V22)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V25" display="V25" schematicId="V25" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SideLeakIsolateFB(V25)" doOpen="DO_SideLeakIsolate(V25)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V27" display="V27" schematicId="V27" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PMLeakTestIsolateFB(V27)" doOpen="DO_PMLeakTestIsolate(V27)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V23" display="V23" schematicId="V23" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)" doOpen="DO_MoResrvInoutLeakTest(V23)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V23s" display="V23s" schematicId="V23s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)" doOpen="DO_MoResrvInoutLeakTest(V23)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V31" display="V31" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2InletCutOffFB(V31)" doOpen="DO_H2InletCutOff(V31)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V32" display="V32" schematicId="V32" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_N2InletCutOffFB(V32)" doOpen="DO_N2InletCutOff(V32)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V33" display="V33" schematicId="V33" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V33s" display="V33s" schematicId="V33s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V35" display="V35" schematicId="V35" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PushGasSupplyFB(V35)" doOpen="DO_PushGasSupply(V35)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V36" display="V36" schematicId="V36" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_RunVentGasSupplyFB(V36)" doOpen="DO_RunVentGasSupply(V36)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V37" display="V37" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V37s" display="V37s" schematicId="V37s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V39" display="V39" schematicId="V39" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V39s" display="V39s" schematicId="V39s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V40" display="V40" schematicId="V40" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V40s" display="V40s" schematicId="V40s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V41" display="V41" schematicId="V41" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6RunFB(V41)" doOpen="DO_WCO6Run(V41)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V42" display="V42" schematicId="V42" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6VentFB(V42)" doOpen="DO_WCO6Vent(V42)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V43" display="V43" schematicId="V43" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V43s" display="V43s" schematicId="V43s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V45" display="V45" schematicId="V45" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6BypassFB(V45)" doOpen="DO_WCO6Bypass(V45)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V46" display="V46" schematicId="V46" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V46s" display="V46s" schematicId="V46s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V47" display="V47" schematicId="V47" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V47s" display="V47s" schematicId="V47s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V48" display="V48" schematicId="V48" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V48s" display="V48s" schematicId="V48s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V49" display="V49" schematicId="V49" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2BypassFB(V49)" doOpen="DO_CS2Bypass(V49)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V50" display="V50" schematicId="V50" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V50s" display="V50s" schematicId="V50s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V51" display="V51" schematicId="V51" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V51s" display="V51s" schematicId="V51s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V52" display="V52" schematicId="V52" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V52s" display="V52s" schematicId="V52s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V53" display="V53" schematicId="V53" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2RunVentFB(V53)" doOpen="DO_CS2RunVent(V53)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V53s" display="V53s" schematicId="V53s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2RunVentFB(V53)" doOpen="DO_CS2RunVent(V53)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V54" display="V54" schematicId="V54" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V54s" display="V54s" schematicId="V54s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V55" display="V55" schematicId="V55" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeRunFB(V55)" doOpen="DO_H2SeRun(V55)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V56" display="V56" schematicId="V56" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeVentFB(V56)" doOpen="DO_H2SeVent(V56)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V58" display="V58" schematicId="V58" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V58s" display="V58s" schematicId="V58s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V59" display="V59" schematicId="V59" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V59s" display="V59s" schematicId="V59s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />
|
||
|
||
<!--<IoValve id="V61" display="V61" schematicId="V61" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeH2FB(V61)" doOpen="DO_SHPurgeH2(V61)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V62" display="V62" schematicId="V62" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeH2FB(V62)" doOpen="DO_SHPurgeH2(V62)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V63" display="V63" schematicId="V63" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeH2FB(V63)" doOpen="DO_SHPurgeH2(V63)" diCloseSensor="" diOpenSensor="" />-->
|
||
|
||
<IoValve id="V66" display="V66" schematicId="V66" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeH2FB(V66)" doOpen="DO_SHPurgeH2(V66)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V67" display="V67" schematicId="V67" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHPurgeN2FB(V67)" doOpen="DO_SHPurgeN2(V67)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V68" display="V68" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PMPurgeN2FB(V68)" doOpen="DO_PMPurgeN2(V68)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V69" display="V69" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SrcLeakTestPreFilterFB(V69)" doOpen="DO_SrcLeakTestPreFilter(V69)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V70" display="V70" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PMTMBalanceFB(V70)" doOpen="DO_PMTMBalance(V70)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V72" display="V72" schematicId="V72" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_VentGasDumpFB(V72)" doOpen="DO_VentGasDump(V72)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V73" display="V73" schematicId="V73" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SrcLeakTestPrePumpFB(V73)" doOpen="DO_SrcLeakTestPrePump(V73)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V74" display="V74" schematicId="V74" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasboxLeakTestFB(V74)" doOpen="DO_GasboxLeakTest(V74)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V75" display="V75" schematicId="V75" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DORVacuumFB(V75)" doOpen="DO_DORVacuum(V75)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V76" display="V76" schematicId="V76" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_DORPressureReliefFB(V76)" doOpen="DO_DORPressureRelief(V76)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V87" display="V87" schematicId="V87" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalSHPurgeFB(V87)" doOpen="DO_FinalSHPurge(V87)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V88" display="V88" schematicId="V88" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOuterGasFB(V88)" doOpen="DO_FinalOuterGas(V88)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V89" display="V89" schematicId="V89" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalInnerGasFB(V89)" doOpen="DO_FinalInnerGas(V89)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V90" display="V90" schematicId="V90" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalMiddleGasFB(V90)" doOpen="DO_FinalMiddleGas(V90)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V91" display="V91" schematicId="V91" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOpticPurgeFB(V91)" doOpen="DO_FinalOpticPurge(V91)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V92" display="V92" schematicId="V92" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalGasRingFB(V92)" doOpen="DO_FinalGasRing(V92)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V93" display="V93" schematicId="V93" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalChamberPurgeFB(V93)" doOpen="DO_FinalChamberPurge(V93)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V94" display="V94" schematicId="V94" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalRotationPurgeFB(V94)" doOpen="DO_FinalRotationPurge(V94)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V95" display="V95" schematicId="V95" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalShutterPurgeFB(V95)" doOpen="DO_FinalShutterPurge(V95)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V96" display="V96" schematicId="V96" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalHeaterWFPurgeFB(V96)" doOpen="DO_FinalHeaterWFPurge(V96)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="V97" display="V97" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalCarryGasFB(V97)" doOpen="DO_FinalCarryGas(V97)" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="EPV1" display="EPV1" schematicId="EPV1" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV1FB" doOpen="DO_EPV1" diCloseSensor="" diOpenSensor="" />
|
||
<IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV2FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
|
||
</IoValves>
|
||
</IoValveGroup>
|
||
|
||
|
||
|
||
|
||
</DeviceModelDefine> |