137 lines
34 KiB
XML
137 lines
34 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
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<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
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<IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoValve id="V18" display="V18" schematicId="V18" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_MoCO6CarrierOutlet(V18)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V18s" display="V18s" schematicId="V18s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_MoCO6CarrierOutlet(V18)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V19" display="V19" schematicId="V19" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoCO6BypassFB(V19)" doOpen="DO_MoCO6Bypass(V19)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V20" display="V20" schematicId="V20" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)" doOpen="DO_MoCO6InOutLeakTest(V20)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V20s" display="V20s" schematicId="V20s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)" doOpen="DO_MoCO6InOutLeakTest(V20)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V21" display="V21" schematicId="V21" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)" doOpen="DO_MoResrvCarrierOutlet(V21)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V21s" display="V21s" schematicId="V21s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)" doOpen="DO_MoResrvCarrierOutlet(V21)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V22" display="V22" schematicId="V22" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoResrvBypassFB(V22)" doOpen="DO_MoResrvBypass(V22)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V25" display="V25" schematicId="V25" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SideLeakIsolateFB(V25)" doOpen="DO_SideLeakIsolate(V25)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V27" display="V27" schematicId="V27" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PMLeakTestIsolateFB(V27)" doOpen="DO_PMLeakTestIsolate(V27)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V23" display="V23" schematicId="V23" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)" doOpen="DO_MoResrvInoutLeakTest(V23)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V23s" display="V23s" schematicId="V23s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)" doOpen="DO_MoResrvInoutLeakTest(V23)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V31" display="V31" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2InletCutOffFB(V31)" doOpen="DO_H2InletCutOff(V31)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V32" display="V32" schematicId="V32" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_N2InletCutOffFB(V32)" doOpen="DO_N2InletCutOff(V32)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V33" display="V33" schematicId="V33" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V33s" display="V33s" schematicId="V33s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V35" display="V35" schematicId="V35" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PushGasSupplyFB(V35)" doOpen="DO_PushGasSupply(V35)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V36" display="V36" schematicId="V36" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_RunVentGasSupplyFB(V36)" doOpen="DO_RunVentGasSupply(V36)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V37" display="V37" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V37s" display="V37s" schematicId="V37s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V39" display="V39" schematicId="V39" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V39s" display="V39s" schematicId="V39s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V40" display="V40" schematicId="V40" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V40s" display="V40s" schematicId="V40s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V41" display="V41" schematicId="V41" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6RunFB(V41)" doOpen="DO_WCO6Run(V41)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V42" display="V42" schematicId="V42" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6VentFB(V42)" doOpen="DO_WCO6Vent(V42)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V43" display="V43" schematicId="V43" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V43s" display="V43s" schematicId="V43s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V45" display="V45" schematicId="V45" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6BypassFB(V45)" doOpen="DO_WCO6Bypass(V45)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V46" display="V46" schematicId="V46" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V46s" display="V46s" schematicId="V46s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V47" display="V47" schematicId="V47" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V47s" display="V47s" schematicId="V47s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V48" display="V48" schematicId="V48" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V48s" display="V48s" schematicId="V48s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V49" display="V49" schematicId="V49" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2BypassFB(V49)" doOpen="DO_CS2Bypass(V49)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V50" display="V50" schematicId="V50" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V50s" display="V50s" schematicId="V50s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V51" display="V51" schematicId="V51" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V51s" display="V51s" schematicId="V51s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V52" display="V52" schematicId="V52" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V52s" display="V52s" schematicId="V52s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V53" display="V53" schematicId="V53" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2RunVentFB(V53)" doOpen="DO_CS2RunVent(V53)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V53s" display="V53s" schematicId="V53s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2RunVentFB(V53)" doOpen="DO_CS2RunVent(V53)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V54" display="V54" schematicId="V54" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V54s" display="V54s" schematicId="V54s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V55" display="V55" schematicId="V55" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeRunFB(V55)" doOpen="DO_H2SeRun(V55)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V56" display="V56" schematicId="V56" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeVentFB(V56)" doOpen="DO_H2SeVent(V56)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V58" display="V58" schematicId="V58" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V58s" display="V58s" schematicId="V58s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V59" display="V59" schematicId="V59" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V59s" display="V59s" schematicId="V59s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />
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<!--<IoValve id="V61" display="V61" schematicId="V61" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeH2FB(V61)" doOpen="DO_SHPurgeH2(V61)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V62" display="V62" schematicId="V62" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeH2FB(V62)" doOpen="DO_SHPurgeH2(V62)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V63" display="V63" schematicId="V63" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeH2FB(V63)" doOpen="DO_SHPurgeH2(V63)" diCloseSensor="" diOpenSensor="" />-->
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<IoValve id="V66" display="V66" schematicId="V66" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeH2FB(V66)" doOpen="DO_SHPurgeH2(V66)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V67" display="V67" schematicId="V67" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHPurgeN2FB(V67)" doOpen="DO_SHPurgeN2(V67)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V68" display="V68" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PMPurgeN2FB(V68)" doOpen="DO_PMPurgeN2(V68)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V69" display="V69" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SrcLeakTestPreFilterFB(V69)" doOpen="DO_SrcLeakTestPreFilter(V69)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V70" display="V70" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PMTMBalanceFB(V70)" doOpen="DO_PMTMBalance(V70)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V72" display="V72" schematicId="V72" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_VentGasDumpFB(V72)" doOpen="DO_VentGasDump(V72)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V73" display="V73" schematicId="V73" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SrcLeakTestPrePumpFB(V73)" doOpen="DO_SrcLeakTestPrePump(V73)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V74" display="V74" schematicId="V74" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasboxLeakTestFB(V74)" doOpen="DO_GasboxLeakTest(V74)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V75" display="V75" schematicId="V75" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DORVacuumFB(V75)" doOpen="DO_DORVacuum(V75)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V76" display="V76" schematicId="V76" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_DORPressureReliefFB(V76)" doOpen="DO_DORPressureRelief(V76)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V87" display="V87" schematicId="V87" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalSHPurgeFB(V87)" doOpen="DO_FinalSHPurge(V87)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V88" display="V88" schematicId="V88" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOuterGasFB(V88)" doOpen="DO_FinalOuterGas(V88)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V89" display="V89" schematicId="V89" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalInnerGasFB(V89)" doOpen="DO_FinalInnerGas(V89)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V90" display="V90" schematicId="V90" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalMiddleGasFB(V90)" doOpen="DO_FinalMiddleGas(V90)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V91" display="V91" schematicId="V91" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOpticPurgeFB(V91)" doOpen="DO_FinalOpticPurge(V91)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V92" display="V92" schematicId="V92" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalGasRingFB(V92)" doOpen="DO_FinalGasRing(V92)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V93" display="V93" schematicId="V93" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalChamberPurgeFB(V93)" doOpen="DO_FinalChamberPurge(V93)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V94" display="V94" schematicId="V94" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalRotationPurgeFB(V94)" doOpen="DO_FinalRotationPurge(V94)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V95" display="V95" schematicId="V95" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalShutterPurgeFB(V95)" doOpen="DO_FinalShutterPurge(V95)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V96" display="V96" schematicId="V96" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalHeaterWFPurgeFB(V96)" doOpen="DO_FinalHeaterWFPurge(V96)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V97" display="V97" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalCarryGasFB(V97)" doOpen="DO_FinalCarryGas(V97)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="EPV1" display="EPV1" schematicId="EPV1" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV1FB" doOpen="DO_EPV1" diCloseSensor="" diOpenSensor="" />
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<IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV2FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
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</IoValves>
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<IoMfcs classType="Aitex.Core.RT.Device.Devices.IoMFC" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoMfc id="Mfc1" display="Mfc1" schematicId="Mfc1" unit="sccm" aiActMode="AI_M1ActMode" aoSetMode="AO_M1CtrlMode" aiFlow="AI_M1" aoFlow="AO_M1" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC01Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm101 MFC01 Offline[DI-351]" />
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<IoMfc id="Mfc3" display="Mfc3" schematicId="Mfc3" unit="sccm" aiActMode="AI_M3ActMode" aoSetMode="AO_M3CtrlMode" aiFlow="AI_M3" aoFlow="AO_M3" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC03Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm103 MFC03 Offline[DI-353]" />
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<IoMfc id="Mfc4" display="Mfc4" schematicId="Mfc4" unit="sccm" aiActMode="AI_M4ActMode" aoSetMode="AO_M4CtrlMode" aiFlow="AI_M4" aoFlow="AO_M4" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC04Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm104 MFC04 Offline[DI-354]" />
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<IoMfc id="Mfc6" display="Mfc6" schematicId="Mfc6" unit="sccm" aiActMode="AI_M6ActMode" aoSetMode="AO_M6CtrlMode" aiFlow="AI_M6" aoFlow="AO_M6" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC06Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm106 MFC06 Offline[DI-356]" />
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<IoMfc id="Mfc7" display="Mfc7" schematicId="Mfc7" unit="sccm" aiActMode="AI_M7ActMode" aoSetMode="AO_M7CtrlMode" aiFlow="AI_M7" aoFlow="AO_M7" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC07Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm107 MFC07 Offline[DI-357]" />
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<IoMfc id="Mfc8" display="Mfc8" schematicId="Mfc8" unit="sccm" aiActMode="AI_M8ActMode" aoSetMode="AO_M8CtrlMode" aiFlow="AI_M8" aoFlow="AO_M8" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC08Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm108 MFC08 Offline[DI-358]" />
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<IoMfc id="Mfc9" display="Mfc9" schematicId="Mfc9" unit="sccm" aiActMode="AI_M9ActMode" aoSetMode="AO_M9CtrlMode" aiFlow="AI_M9" aoFlow="AO_M9" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC09Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm109 MFC09 Offline[DI-359]" />
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<IoMfc id="Mfc10" display="Mfc10" schematicId="Mfc10" unit="sccm" aiActMode="AI_M10ActMode" aoSetMode="AO_M10CtrlMode" aiFlow="AI_M10" aoFlow="AO_M10" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC10Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm110 MFC10 Offline[DI-360]" />
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<IoMfc id="Mfc11" display="Mfc11" schematicId="Mfc11" unit="sccm" aiActMode="AI_M11ActMode" aoSetMode="AO_M11CtrlMode" aiFlow="AI_M11" aoFlow="AO_M11" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC11Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm111 MFC11 Offline[DI-361]" />
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<IoMfc id="Mfc12" display="Mfc12" schematicId="Mfc12" unit="sccm" aiActMode="AI_M12ActMode" aoSetMode="AO_M12CtrlMode" aiFlow="AI_M12" aoFlow="AO_M12" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC12Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm112 MFC12 Offline[DI-362]" />
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<IoMfc id="Mfc13" display="Mfc13" schematicId="Mfc13" unit="sccm" aiActMode="AI_M13ActMode" aoSetMode="AO_M13CtrlMode" aiFlow="AI_M13" aoFlow="AO_M13" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC13Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm113 MFC13 Offline[DI-363]" />
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<IoMfc id="Mfc14" display="Mfc14" schematicId="Mfc14" unit="sccm" aiActMode="AI_M14ActMode" aoSetMode="AO_M14CtrlMode" aiFlow="AI_M14" aoFlow="AO_M14" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC14Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm114 MFC14 Offline[DI-364]" />
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<IoMfc id="Mfc15" display="Mfc15" schematicId="Mfc15" unit="sccm" aiActMode="AI_M15ActMode" aoSetMode="AO_M15CtrlMode" aiFlow="AI_M15" aoFlow="AO_M15" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC15Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm115 MFC15 Offline[DI-365]" />
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<IoMfc id="Mfc16" display="Mfc16" schematicId="Mfc16" unit="sccm" aiActMode="AI_M16ActMode" aoSetMode="AO_M16CtrlMode" aiFlow="AI_M16" aoFlow="AO_M16" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC16Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm116 MFC16 Offline[DI-366]" />
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<IoMfc id="Mfc17" display="Mfc17" schematicId="Mfc17" unit="sccm" aiActMode="AI_M17ActMode" aoSetMode="AO_M17CtrlMode" aiFlow="AI_M17" aoFlow="AO_M17" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC17Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm117 MFC17 Offline[DI-367]" />
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<IoMfc id="Mfc18" display="Mfc18" schematicId="Mfc18" unit="sccm" aiActMode="AI_M18ActMode" aoSetMode="AO_M18CtrlMode" aiFlow="AI_M18" aoFlow="AO_M18" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC18Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm118 MFC18 Offline[DI-368]" />
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<IoMfc id="Mfc19" display="Mfc19" schematicId="Mfc19" unit="sccm" aiActMode="AI_M19ActMode" aoSetMode="AO_M19CtrlMode" aiFlow="AI_M19" aoFlow="AO_M19" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC19Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm119 MFC19 Offline[DI-369]" />
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<IoMfc id="Mfc20" display="Mfc20" schematicId="Mfc20" unit="sccm" aiActMode="AI_M20ActMode" aoSetMode="AO_M20CtrlMode" aiFlow="AI_M20" aoFlow="AO_M20" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC20Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm120 MFC20 Offline[DI-370]" />
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<IoMfc id="Mfc21" display="Mfc21" schematicId="Mfc21" unit="sccm" aiActMode="AI_M21ActMode" aoSetMode="AO_M21CtrlMode" aiFlow="AI_M21" aoFlow="AO_M21" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC21Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm121 MFC21 Offline[DI-371]" />
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<IoMfc id="Mfc22" display="Mfc22" schematicId="Mfc22" unit="sccm" aiActMode="AI_M22ActMode" aoSetMode="AO_M22CtrlMode" aiFlow="AI_M22" aoFlow="AO_M22" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC22Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm122 MFC22 Offline[DI-372]" />
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<IoMfc id="Mfc23" display="Mfc23" schematicId="Mfc23" unit="sccm" aiActMode="AI_M23ActMode" aoSetMode="AO_M23CtrlMode" aiFlow="AI_M23" aoFlow="AO_M23" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC23Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm123 MFC23 Offline[DI-373]" />
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<IoMfc id="Mfc24" display="Mfc24" schematicId="Mfc24" unit="sccm" aiActMode="AI_M24ActMode" aoSetMode="AO_M24CtrlMode" aiFlow="AI_M24" aoFlow="AO_M24" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC24Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm124 MFC24 Offline[DI-374]" />
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<IoMfc id="Mfc25" display="Mfc25" schematicId="Mfc25" unit="sccm" aiActMode="AI_M25ActMode" aoSetMode="AO_M25CtrlMode" aiFlow="AI_M25" aoFlow="AO_M25" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC25Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm125 MFC25 Offline[DI-375]" />
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<IoMfc id="Mfc26" display="Mfc26" schematicId="Mfc26" unit="sccm" aiActMode="AI_M26ActMode" aoSetMode="AO_M26CtrlMode" aiFlow="AI_M26" aoFlow="AO_M26" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC26Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm126 MFC26 Offline[DI-376]" />
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<IoMfc id="Mfc27" display="Mfc27" schematicId="Mfc27" unit="sccm" aiActMode="AI_M27ActMode" aoSetMode="AO_M27CtrlMode" aiFlow="AI_M27" aoFlow="AO_M27" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC27Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm127 MFC27 Offline[DI-377]" />
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<IoMfc id="Mfc28" display="Mfc28" schematicId="Mfc28" unit="sccm" aiActMode="AI_M28ActMode" aoSetMode="AO_M28CtrlMode" aiFlow="AI_M28" aoFlow="AO_M28" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC28Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm128 MFC28 Offline[DI-378]" />
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<IoMfc id="Mfc29" display="Mfc29" schematicId="Mfc29" unit="sccm" aiActMode="AI_M29ActMode" aoSetMode="AO_M29CtrlMode" aiFlow="AI_M29" aoFlow="AO_M29" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC29Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm129 MFC29 Offline[DI-379]" />
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<IoMfc id="Mfc31" display="Mfc31" schematicId="Mfc31" unit="sccm" aiActMode="AI_M31ActMode" aoSetMode="AO_M31CtrlMode" aiFlow="AI_M31" aoFlow="AO_M31" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC31Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm131 MFC31 Offline[DI-381]" />
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<IoMfc id="Mfc32" display="Mfc32" schematicId="Mfc32" unit="sccm" aiActMode="AI_M32ActMode" aoSetMode="AO_M32CtrlMode" aiFlow="AI_M32" aoFlow="AO_M32" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC32Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm132 MFC32 Offline[DI-382]" />
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<IoMfc id="Mfc33" display="Mfc33" schematicId="Mfc33" unit="sccm" aiActMode="AI_M33ActMode" aoSetMode="AO_M33CtrlMode" aiFlow="AI_M33" aoFlow="AO_M33" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC33Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm133 MFC33 Offline[DI-383]" />
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<IoMfc id="Mfc35" display="Mfc35" schematicId="Mfc35" unit="sccm" aiActMode="AI_M35ActMode" aoSetMode="AO_M35CtrlMode" aiFlow="AI_M35" aoFlow="AO_M35" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC35Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm135 MFC35 Offline[DI-385]" />
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<IoMfc id="Mfc36" display="Mfc36" schematicId="Mfc36" unit="sccm" aiActMode="AI_M36ActMode" aoSetMode="AO_M36CtrlMode" aiFlow="AI_M36" aoFlow="AO_M36" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC36Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm136 MFC36 Offline[DI-386]" />
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<IoMfc id="Mfc37" display="Mfc37" schematicId="Mfc37" unit="sccm" aiActMode="AI_M37ActMode" aoSetMode="AO_M37CtrlMode" aiFlow="AI_M37" aoFlow="AO_M37" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC37Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm137 MFC37 Offline[DI-387]" />
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<IoMfc id="Mfc38" display="Mfc38" schematicId="Mfc38" unit="sccm" aiActMode="AI_M38ActMode" aoSetMode="AO_M38CtrlMode" aiFlow="AI_M38" aoFlow="AO_M38" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC38Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm138 MFC38 Offline[DI-388]" />
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<IoMfc id="Mfc40" display="Mfc40" schematicId="Mfc40" unit="sccm" aiActMode="AI_M40ActMode" aoSetMode="AO_M40CtrlMode" aiFlow="AI_M40" aoFlow="AO_M40" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC40Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm140 MFC40 Offline[DI-390]" />
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</IoMfcs>
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<IoPressures classType="Aitex.Core.RT.Device.Devices.IoPressure" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoPressure id="PC1" display="PC1" schematicId="PC1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC1Valve" aiActMode="AI_PC1ActMode" aoSetMode="AO_PC1CtrlMode" aiValue="AI_PressCtrl1" aoValue="AO_PressCtrl1" formatString="0.0" diAlarm="DI_PC1Offline" AlarmText="Alarm141 PC1 Offline[DI-391]" />
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<IoPressure id="PC2" display="PC2" schematicId="PC2" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC2Valve" aiActMode="AI_PC2ActMode" aoSetMode="AO_PC2CtrlMode" aiValue="AI_PressCtrl2" aoValue="AO_PressCtrl2" formatString="0.0" diAlarm="DI_PC2Offline" AlarmText="Alarm142 PC2 Offline[DI-392]" />
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<IoPressure id="PC3" display="PC3" schematicId="PC3" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC3Valve" aiActMode="AI_PC3ActMode" aoSetMode="AO_PC3CtrlMode" aiValue="AI_PressCtrl3" aoValue="AO_PressCtrl3" formatString="0.0" diAlarm="DI_PC3Offline" AlarmText="Alarm143 PC3 Offline[DI-393]" />
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<IoPressure id="PC4" display="PC4" schematicId="PC4" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC4Valve" aiActMode="AI_PC4ActMode" aoSetMode="AO_PC4CtrlMode" aiValue="AI_PressCtrl4" aoValue="AO_PressCtrl4" formatString="0.0" diAlarm="DI_PC4Offline" AlarmText="Alarm144 PC4 Offline[DI-394]" />
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<IoPressure id="PC5" display="PC5" schematicId="PC5" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC5Valve" aiActMode="AI_PC5ActMode" aoSetMode="AO_PC5CtrlMode" aiValue="AI_PressCtrl5" aoValue="AO_PressCtrl5" formatString="0.0" diAlarm="DI_PC5Offline" AlarmText="Alarm145 PC5 Offline[DI-395]" />
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<IoPressure id="PC6" display="PC6" schematicId="PC6" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC6Valve" aiActMode="AI_PC6ActMode" aoSetMode="AO_PC6CtrlMode" aiValue="AI_PressCtrl6" aoValue="AO_PressCtrl6" formatString="0.0" diAlarm="DI_PC6Offline" AlarmText="Alarm146 PC6 Offline[DI-396]" />
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<IoPressure id="PC7" display="PC7" schematicId="PC7" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC7Valve" aiActMode="AI_PC7ActMode" aoSetMode="AO_PC7CtrlMode" aiValue="AI_PressCtrl7" aoValue="AO_PressCtrl7" formatString="0.0" diAlarm="DI_PC7Offline" AlarmText="Alarm147 PC7 Offline[DI-397]" />
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<IoPressure id="PC8" display="PC8" schematicId="PC8" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC8Valve" aiActMode="AI_PC8ActMode" aoSetMode="AO_PC8CtrlMode" aiValue="AI_PressCtrl8" aoValue="AO_PressCtrl8" formatString="0.0" diAlarm="DI_PC8Offline" AlarmText="Alarm141 PC8 Offline[DI-391]" />
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<IoPressure id="PC9" display="PC9" schematicId="PC9" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC9Valve" aiActMode="AI_PC9ActMode" aoSetMode="AO_PC9CtrlMode" aiValue="AI_PressCtrl9" aoValue="AO_PressCtrl9" formatString="0.0" diAlarm="DI_PC9Offline" AlarmText="Alarm142 PC9 Offline[DI-392]" />
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</IoPressures>
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</DeviceModelDefine> |