Sic-Software/MoS2
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MoS2/App/Modules/SicModules/PMs/Routines
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hanqiangqiang 65606c742e 修改Routine
2026-08-24 14:03:35 +08:00
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Base Merge branch 'develop' of http://112.124.35.216:65000/Sic-Software/MoS2 into develop 2026-08-21 09:24:40 +08:00
Recipe 首次上传 2026-06-15 10:56:30 +08:00
PMButttomSectionMoveRoutine.cs 首次上传 2026-06-15 10:56:30 +08:00
PMChamberMoveBodyRoutine.cs 1临时屏蔽加热导致的无法开腔问题 2026-08-14 09:52:52 +08:00
PMCleanRoutine.cs 修改Routine 2026-08-24 14:03:35 +08:00
PMExchangeMoRoutine.cs 修改pmroutine 2026-08-21 09:24:18 +08:00
PMHomeRoutine.cs 首次上传 2026-06-15 10:56:30 +08:00
PMLeakCheckRoutine.cs 修改Routine 2026-08-24 14:03:35 +08:00
PMMfcRorRoutine.cs 首次上传 2026-06-15 10:56:30 +08:00
PMPcCalibrationRoutine.cs 首次上传 2026-06-15 10:56:30 +08:00
PMPostTransferRoutine.cs 修改Routine 2026-08-24 14:03:35 +08:00
PMPrepareTransferRoutine.cs 首次上传 2026-06-15 10:56:30 +08:00
PMProcessAbortRoutine.cs 修改Routine 2026-08-24 14:03:35 +08:00
PMProcessRoutine.cs 首次上传 2026-06-15 10:56:30 +08:00
PMPumpRoutine.cs 修改Routine 2026-08-24 14:03:35 +08:00
PMPurgeRoutine.cs 修改Routine 2026-08-24 14:03:35 +08:00
PMServoToPressure.cs 首次上传 2026-06-15 10:56:30 +08:00
PMStopHeatEnableRoutine.cs 首次上传 2026-06-15 10:56:30 +08:00
PMToAtmIdleRoutine.cs 修改Routine 2026-08-24 14:03:35 +08:00
PMToIsolationRoutine.cs 修改Routine 2026-08-24 14:03:35 +08:00
PMToProcessIdleRoutine.cs 修改Routine 2026-08-24 14:03:35 +08:00
PMVacIdleRoutine.cs 修改Routine 2026-08-24 14:03:35 +08:00
PMVentRoutine.cs 修改Routine 2026-08-24 14:03:35 +08:00