465 lines
20 KiB
C#
465 lines
20 KiB
C#
using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs;
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using SicModules.PMs.Routines.Base;
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using System.Collections.Generic;
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using System.Diagnostics;
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namespace SicModules.PMs.Routines
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{
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public class PMCleanRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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VentPumpClose_1,
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VentPumpOpen,
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ArSupply,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetM1toM17,
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SetM17M18,
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SetPC,
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SetGroupJ,
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SetGroupJ_1,
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SetM291519to38,
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SetGasOut,
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SetTv,
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SetGasIn1, //V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetMfc19to26,
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SetTVCloseMode,
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SetTvPositionToZero,
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SetGasIn2,
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SetGroupJOpen,
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SetM18toM40,
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OpenFinal2,
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SetMfcFinal2,
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SetEPV1,
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SetEPV2,
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SetEPV2_1,
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SetEPV2_2,
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SetEPV2_3,
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SetTvMode,
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RoutinePre,
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V27Open,
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V27Close,
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PressureTo1050,
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SetPressureUp,
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SetPressureUp1,
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SetPressureUp2,
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SetPressureDown,
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PressureToMax,
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PressureToMin,
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SetPressUpOrDown1,
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SetPressUpOrDown2,
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WaitPressureDown,
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WaitPressureUp,
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SetMFCMode,
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SetPCMode,
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WaitPmTo1050,
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SetTvOpen,
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SetTvModeToPress,
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SetEPV22,
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SetV76,
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SetV75,
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SetTVto300,
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CheckPM1000,
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SetMfc28to40Special,
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WaitPressUpTo1000,
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SetMfc28to40Default,
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SetPC567Close,
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SetPC567Mode,
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SetPC567Default,
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OpenEPV2,
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WaitV27Open,
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SetTvTo1150,
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WaitPressUpTo20,
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SetMfc28to31To0,
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WaitPressUpTo0,
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SetMfc28to31ToDefault,
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WaitPressDownTo20,
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CheckPMPt21000,
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SetPressureDown1,
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SetMfc28to31Default1,
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CheckFinal1Open,
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SetGroupV25,
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CloseGroupV25,
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SetM39,
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CheckEPV1Open1,
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CheckEPV2Open1,
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CheckTVOpen1,
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CheckEPV1Open2,
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SetTVEnable_1,
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SetTVEnable_2,
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SetTVPressMode,
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SetTv1,
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Set0M18toM40,
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SetM18,
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SetV31,
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SetV32,
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SetV35V36,
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SetV65,
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WaitTv1,
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SetTVPositionMode,
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SetTVPositionMode_1,
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SetTVPositionMax,
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SetTVPositionMax_1,
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SetTVPressMode1,
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SetTVPressMode2,
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SetM2TOM40Default,
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SetM2toM40_1,
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SetMfc2to40Default,
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SetM18Default,
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SetM18_1,
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SetM18_2,
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SetV92V93V95,
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SetV94,
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SetV96,
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SetV103,
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SetV105,
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SetV68,
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SetM32M35M37,
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SetM36,
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SetM38,
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WaitPmPressureUp1,
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SetTVCloseMode1,
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CLoseTV1,
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StartLoop,
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EndLoop,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay18,
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TimeDelay20,
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TimeDelay21,
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TimeDelay22,
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Notify1,
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Notify2,
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Notify3,
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Notify4,
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WaitPressUpTo950,
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FirstWaitPressureUp,
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FirstSetDefault_M18toM40,
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FirstSet0_M18toM40,
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FirstSetEPV2_1,
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FirstSetEPV2_2,
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FirstSetTv1,
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LoopSetDefault_M18toM40,
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LoopSetEPV2_1,
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LoopWaitPressureUp,
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LoopSetEPV2_2,
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LoopSetTv1,
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LoopSet0_M18toM40,
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Loop2Set0_M18toM40,
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LoopWaitTv1,
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FinishSetM1toM17,
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FinishSetM18toM40,
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FinishVentPumpClose_1,
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FinishCloseGroupV25,
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FinishSetPressureUp2,
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FinishSetTVto300
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}
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private ModuleName moduleName;
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private PMModule _pmModule;
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private IoThrottleValve2 _IoThrottle;
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//private IoInterLock _pmIoInterLock;
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private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout = 20; //旋转停止超时
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private int _pressureMaxDelay = 10; //到低压保持时间（采用固定值10s）
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private int _pressureMinDelay = 10; //到高压保持时间（采用固定值10s）
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private double _pressureMax; //Loop压力上限可设置600-800）
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private double _pressureMin; //Loop压力下限可设置 0-400）
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private int _pressureMinTimeout;
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private int _pressureMaxTimeout;
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private int _pressureLoopCount; //Loop次数
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private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private int _ventTimeout;
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private int _pumpTimeout;
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private double _throttleFinalPressure = 300;//蝶阀最终调整对的压力
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private int _pmCleanTime = 20;
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private Stopwatch _swTimer = new Stopwatch();
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public PMCleanRoutine(ModuleName module, PMModule pm) : base(module, pm)
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{
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moduleName = module;
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_pmModule = pm;
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Name = "Clean";
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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//_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_ventTimeout = SC.GetValue<int>($"PM.{Module}.Clean.VentTimeout");
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_pumpTimeout = SC.GetValue<int>($"PM.{Module}.Clean.PumpTimeout");
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_pressureLoopCount = SC.GetValue<int>($"PM.{Module}.Clean.CycleCleanCount");
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_pressureMin = SC.GetValue<double>($"PM.{Module}.Clean.PumpBasePressure");
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_pressureMinDelay = SC.GetValue<int>($"PM.{Module}.Clean.PumpDelayTime");
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_pressureMinTimeout = SC.GetValue<int>($"PM.{Module}.Clean.PumpTimeout");
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_pressureMax = SC.GetValue<double>($"PM.{Module}.Clean.VentBasePressure");
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_pressureMaxDelay = SC.GetValue<int>($"PM.{Module}.Clean.VentDelayTime");
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_pressureMaxTimeout = SC.GetValue<int>($"PM.{Module}.Clean.VentTimeout");
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_pmCleanTime = SC.GetValue<int>($"PM.{Module}.Clean.CleanTime");
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_throttleFinalPressure = SC.GetValue<double>($"PM.{Module}.Clean.FinalPressure");
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//Purge Succeed 清掉
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//_pmIoInterLock.DoLidOpenRoutineSucceed = false;
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//_pmIoInterLock.DoLidCloseRoutineSucceed = false;
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//if (!_pmIoInterLock.SetPMCleanRoutineRunning(true, out string reason))
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//{
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// EV.PostAlarmLog(Module, $"can not Clean,{reason}");
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// return Result.FAIL;
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//}
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_checkPMPt2Over1000 = false;
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_checkPMPressureOver1000 = false;
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_finalOpen = false;
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currentPressureUpOrDown = PressureUpOrDown.None;
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_swTimer.Restart();
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Notify($"Start LoopCount:{_pressureLoopCount}");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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//CheckRoutineTimeOut();
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//关闭V76,打开V75
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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//旋转停止,加热停止
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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//3、 关闭 V72(GasBox.Vent.Pump） 打开 V25(GasBox.Vent.Bypass)。
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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//4、 打开 V31（H2.Supply）、 V32(Ar.Supply） 。
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//5、 打开 V35(H2N2.Line1)、 V36(H2N2.Line2)，关闭 B/C/E/F/H/KValves,打开 D/G Valves； 打开 J valve。
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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//设置MFC和PC的模式
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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//6、 M1-M17 设定为 default 值，所有 PC 设定为 default 值(PC1-PC9)， M18-M40（除M30\M34\M39）） MFC 3s ramp 到 default 值。
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 0);
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 3);
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//7、打开 EPV2，等待 3s, 打开 TV enable, 压力模式，伺服压力默认设定为 0mbar；
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay1, 3);
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SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable_1, _IoThrottle, 5);
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin);
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//8、当蝶阀设定值 ramp 到 0 后，将 M18-M40（除 M30\M34\M39）） MFC 3s ramp 到 0；
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SetMfcByGroup((int)RoutineStep.Set0M18toM40, MfcGroupName.M18toM40No303439, 0, 3);
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//9、等待腔体压力到 Pump Base Pressure（可配置），蝶阀改为位置模式，开度设定 100%
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WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pressureMin, _pumpTimeout);
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TimeDelay((int)RoutineStep.TimeDelay2, 3);
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SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
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TimeDelay((int)RoutineStep.TimeDelay11, 3);
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SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);
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//10、 M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ；
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
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//11、打开 V87（ SHPurge.Final）、 V88（ OuterGas.Final）、 V89（ InnerGas.Final）、 V90（MiddleGas.Final）、 V91（OpticPurge.Final）、 V97（CarryGas.Final）；
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SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
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//12、 打开 V68（ChamBody.N2.Purge）
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SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay3, 1);
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//13、 M32、 M35、 M36、 M37、 M38 依次设定 3S ramp 到 default 值 ；
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SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 1);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 1);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 1);
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TimeDelay((int)RoutineStep.TimeDelay4, 3);
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//14、打开 V92（GasRingPurge.Final）、 V93（ChamberPurge.Final）、 V95（ConfinementRing.Final）；
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//等待 950，，打开 V94（RotationUpPurge.Final）、 等待 3S，打开 V96（HeaterWF.Final） ；
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//蝶阀改为压力模式
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SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout);
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WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo950, 950, 600);
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SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay4, 3);
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SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout);
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5);
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//M18 - M40（除 M30\M34\M39）） MFC 3s ramp 到 default 值。
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//关闭 EPV2，等待压力达到设定值，压力达到后，打开 EPV2；
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//M18 - M40（除 M30\M34\M39）） MFC 5s ramp 到 0。
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//伺服压力到设定值 0（可配置）
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SetMfcToDefaultByGroup((int)RoutineStep.FirstSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3);
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SetIoValueByGroup((int)RoutineStep.FirstSetEPV2_1, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.FirstWaitPressureUp, _IoThrottle, _pressureMax, _ventTimeout);
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SetIoValueByGroup((int)RoutineStep.FirstSetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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SetMfcByGroup((int)RoutineStep.FirstSet0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5);
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SetThrottleToTargetAndNoWait((int)RoutineStep.FirstSetTv1, _IoThrottle, _pressureMin);
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//循环开始
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Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
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//M18 - M40（除 M30\M34\M39）） MFC 3s ramp 到 default 值。
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//关闭 EPV2，等待压力达到设定值，压力达到后，打开 EPV2；
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//M18 - M40（除 M30\M34\M39）） MFC 5s ramp 到 0。
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//伺服压力到设定值 0（可配置）
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//M18 - M40（除 M30\M34\M39）） MFC5s ramp 到 0。
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//等待压力到达 0（可配置）
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SetMfcToDefaultByGroup((int)RoutineStep.LoopSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3);
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SetIoValueByGroup((int)RoutineStep.LoopSetEPV2_1, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.LoopWaitPressureUp, _IoThrottle, _pressureMax, _ventTimeout);
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SetIoValueByGroup((int)RoutineStep.LoopSetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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SetMfcByGroup((int)RoutineStep.LoopSet0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5);
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SetThrottleToTargetAndNoWait((int)RoutineStep.LoopSetTv1, _IoThrottle, _pressureMin);
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SetMfcByGroup((int)RoutineStep.Loop2Set0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5);
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WaitChamberPressDownTo((int)RoutineStep.LoopWaitTv1, _pressureMin, _pumpTimeout);
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EndLoop((int)RoutineStep.EndLoop);
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//设置 M1-M17 3s ramp 到 default； M18 - M40（除 M30\M34\M39）） MFC 3s ramp 到default 值。
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//打开 V72(GasBox.Vent.Pump） 关闭 V25(GasBox.Vent.Bypass)， 反应腔压力伺服到300mbar（可配置）
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SetMfcToDefaultByGroup((int)RoutineStep.FinishSetM1toM17, MfcGroupName.M1toM17, 3);
|
||
SetMfcToDefaultByGroup((int)RoutineStep.FinishSetM18toM40, MfcGroupName.M18toM40No303439, 3);
|
||
SetIoValueByGroup((int)RoutineStep.FinishVentPumpClose_1, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.FinishCloseGroupV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout);
|
||
SetThrottleToTargetAndNoWait((int)RoutineStep.FinishSetPressureUp2, _IoThrottle, _throttleFinalPressure);
|
||
WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.FinishSetTVto300, _IoThrottle, _throttleFinalPressure, _pmPressureMaxDiff, _throttleTimeout);
|
||
}
|
||
catch (RoutineBreakException)
|
||
{
|
||
return Result.RUN;
|
||
}
|
||
catch (RoutineFaildException)
|
||
{
|
||
return Result.FAIL;
|
||
}
|
||
|
||
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
|
||
_swTimer.Stop();
|
||
SetRoutineRuningDo();
|
||
SetRoutineSuccessedDo();
|
||
return Result.DONE;
|
||
}
|
||
|
||
public override void Abort()
|
||
{
|
||
SetRoutineRuningDo();
|
||
PmDevice._ioThrottleValve.StopRamp();
|
||
PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
|
||
PmDevice.SetRotationServo(0, 0);
|
||
|
||
base.Abort();
|
||
}
|
||
|
||
private void SetRoutineRuningDo()
|
||
{
|
||
//_pmIoInterLock.DoLidCloseRoutineRunning = false;
|
||
}
|
||
|
||
private void SetRoutineSuccessedDo()
|
||
{
|
||
//_pmIoInterLock.SetLidClosedRoutineSucceed(true, out string reason);
|
||
//_pmIoInterLock.DoLidOpenRoutineSucceed = false;
|
||
}
|
||
|
||
|
||
//private void CheckRoutineTimeOut()
|
||
//{
|
||
// if (_routineTimeOut > 10)
|
||
// {
|
||
// if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
|
||
// {
|
||
// EV.PostAlarmLog(Module,$"Routine TimeOut! over {_routineTimeOut} s");
|
||
// throw (new RoutineFaildException());
|
||
// }
|
||
// }
|
||
//}
|
||
|
||
}
|
||
}
|