422 lines
16 KiB
C#
422 lines
16 KiB
C#
using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs;
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using SicModules.PMs.Routines.Base;
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namespace SicModules.PMs.Routines
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{
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class PMPostTransferRoutine : PMBaseRoutine
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{
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enum RoutineStep
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{
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SetUpLimit,
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SetBlockOn,
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Delay,
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WaitStatusCorrect,
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SetBlockOff,
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EnableRotation,
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EnableHeater,
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SetRotation1,
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WaitRotation1,
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SetTC1Mode,
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SetTC1Ratio,
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SetTC1Ref,
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SetTC2Mode,
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SetTC2Ratio,
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SetTC2Ref,
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SetChamberPressure,
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EnableTC1,
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EnableTC2,
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SetServoUp,
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SetScrReset,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay12,
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TimeDelay13,
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TimeDelay14,
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TimeDelay15,
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SetV31,
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SetV32,
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SetV35V36,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupK,
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SetGroupD,
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SetGroupG,
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SetM1toM17,
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SetPC,
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SetM18toM40,
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SetEPV2,
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SetGroupJ,
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SetV72,
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SetV25,
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SetPressureDown,
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SetTVto300
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}
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bool hasWafer;
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private IoThrottleValve2 _IoThrottle;
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private double _throttleFinalPressure = 300;//蝶阀最终调整对的压力
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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//private int _timeout;
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private int _rotationSpeed = 60;
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private bool _psuHeatEnable = false; //是否启用PSU 加热
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private int _psuHeatMode = 0;
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//private float _psuPowerRef = 0;
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private float _psuL1Ratio = 0;
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private float _psuL2Ratio = 0;
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private float _psuL3Ratio = 0;
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private bool _scrHeatEnable = false; //是否启用SCR 加热
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private int _scrHeatMode = 0;
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//private float _scrPowerRef = 0;
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private float _scrL1Ratio = 0;
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private float _scrL2Ratio = 0;
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private float _scrL3Ratio = 0;
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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private double _targetPressure;
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private PMServoToPressure _pmServoToPressure;
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private bool _needEnableHeat = true;
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private int _servoUpDelay;
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//private NAISServo servo;
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public PMPostTransferRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
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{
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Module = module.ToString();
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Name = "Post Transfer Routine";
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_pmServoToPressure = new PMServoToPressure(module, pm1);
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}
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public void Init(bool needEnableHeat)
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{
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_needEnableHeat = needEnableHeat;
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}
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public void Init(float basePressure, int ventDelayTime)
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{
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}
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public override Result Start(params object[] objs)
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{
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_rotationSpeed = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RotationSpeed");
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleFinalPressure = SC.GetValue<double>($"PM.{Module}.ProcessIdle.FinalPressure");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_psuHeatEnable = SC.GetValue<bool>($"PM.{Module}.ProcessIdle.PSUHeaterEnable");
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_psuHeatMode = SC.GetValue<int>($"PM.{Module}.ProcessIdle.PSUHeaterMode");
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//_psuPowerRef = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUPowerRef");
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_psuL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUInnerRatio");
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_psuL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUMiddleRatio");
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_psuL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUOuterRatio");
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_scrHeatEnable = SC.GetValue<bool>($"PM.{Module}.ProcessIdle.SCRHeaterEnable");
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_scrHeatMode = SC.GetValue<int>($"PM.{Module}.ProcessIdle.SCRHeaterMode");
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//_scrPowerRef = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRPowerRef");
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_scrL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRUpperRatio");
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_scrL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRMiddleRatio");
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_scrL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRLowerRatio");
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_targetPressure = SC.GetValue<double>($"PM.{Module}.ProcessIdle.FinalPressure");
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_servoUpDelay = SC.GetValue<int>($"PM.{Module}.PreProcess.ServoBeforeUpDelay");
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_pmServoToPressure.Init(_targetPressure);
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hasWafer = WaferManager.Instance.CheckHasWafer(Module, 0);
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Reset();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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//1、 打开 V31(H2.Supply)、 V32(Ar.Supply)。
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//2、 打开 V35(H2N2.Line1)、 V36(H2N2.Line2)，关闭 B/ C / E / F / H / KValves,打开 D/ G Valves。
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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//3、 M1 - M17 设定为 default 值，所有 PC 设定为 default 值(PC1 - PC9)。
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 0);
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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//4、 M18 - M40（除 M30\M34\M39)） MFC 3s ramp 到 default 值。
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SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 3);
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//5、 打开 EPV2。
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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//6、打开 J Valves
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SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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//7、打开 V72(GasBox.Vent.Pump） 关闭 V25(GasBox.Vent.Bypass)， 反应腔压力伺服到300mbar（可配置）
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SetIoValueByGroup((int)RoutineStep.SetV72, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay5, 1);
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SetIoValueByGroup((int)RoutineStep.SetV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _throttleFinalPressure);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.SetTVto300, _IoThrottle, _throttleFinalPressure, _pmPressureMaxDiff, _throttleTimeout);
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//8、设定转速（可配置）
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EnableRotation((int)RoutineStep.EnableRotation, 5);
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SetRotationValveAndNoWait((int)RoutineStep.SetRotation1, _rotationSpeed);
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//9、加热使能（PSU 和 SCR）（可配置）
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if (_psuHeatEnable && _needEnableHeat)
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{
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SetPSUEnable((int)RoutineStep.EnableTC1, true, 5);
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SetPSUHeatMode((int)RoutineStep.SetTC1Mode, _psuHeatMode);
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TimeDelay((int)RoutineStep.TimeDelay9, 1);
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SetPSUHeatRatio((int)RoutineStep.SetTC1Ratio, _psuL1Ratio, _psuL2Ratio, _psuL3Ratio);
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}
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if (_scrHeatEnable && _needEnableHeat)
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{
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SetSCRReset((int)RoutineStep.SetScrReset);
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TimeDelay((int)RoutineStep.TimeDelay10, 1);
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SetSCREnable((int)RoutineStep.EnableTC2, true, 5);
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SetSCRHeatMode((int)RoutineStep.SetTC2Mode, _scrHeatMode);
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TimeDelay((int)RoutineStep.TimeDelay11, 1);
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SetSCRHeatRatio((int)RoutineStep.SetTC2Ratio, _scrL1Ratio, _scrL2Ratio, _scrL3Ratio);
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}
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TimeDelay((int)RoutineStep.TimeDelay8, 1);
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WaitRotationValve((int)RoutineStep.WaitRotation1, _rotationSpeed, true, _rotationSpeed / 2);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify("Finished");
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return Result.DONE;
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}
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//private void ServoUpLimit(int id, PMModuleBase pm, int timeout)
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//{
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// Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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// {
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// Notify($"Run {pm.Name} set Block No High.");
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// //if (!servo.SetBlockNoHigh())
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// //{
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// // Stop(reason);
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// // return false;
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// //}
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// servo.SetBlockNoHigh();
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// return true;
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// }, () =>
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// {
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// if (servo.AlarmStatus)
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// {
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// Stop($"{pm.Name} Servo in error State.");
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// return null;
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// }
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// if (!servo.IsBusy)
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// return true;
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// return false;
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// }, timeout * 1000);
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// if (ret.Item1)
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// {
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// if (ret.Item2 == Result.FAIL)
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// {
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// throw (new RoutineFaildException());
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// }
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// else if (ret.Item2 == Result.TIMEOUT) //timeout
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// {
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// Stop($"{pm.Name} prepare vent timeout, over {timeout} seconds");
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// throw (new RoutineFaildException());
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// }
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// else
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// throw (new RoutineBreakException());
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// }
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//}
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//private void ServoBlockOn(int id, PMModuleBase pm, int timeout)
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//{
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// Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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// {
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// Notify($"Run {pm.Name} set Stb On.");
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// //if (!servo.SetBlockNoHigh())
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// //{
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// // Stop(reason);
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// // return false;
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// //}
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// servo.SetStbOn();
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// return true;
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// }, () =>
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// {
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// if (servo.AlarmStatus)
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// {
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// Stop($"{pm.Name} Servo in error State.");
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// return null;
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// }
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// if (!servo.IsBusy)
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// {
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// PMDevice.ServoStatus = ServoStatus.Uping;
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// return true;
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// }
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// return false;
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// }, timeout * 1000);
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// if (ret.Item1)
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// {
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// if (ret.Item2 == Result.FAIL)
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// {
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// throw (new RoutineFaildException());
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// }
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// else if (ret.Item2 == Result.TIMEOUT) //timeout
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// {
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// Stop($"{pm.Name} prepare vent timeout, over {timeout} seconds");
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// throw (new RoutineFaildException());
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// }
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// else
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// throw (new RoutineBreakException());
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// }
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//}
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//private void ServoBlockOff(int id, PMModuleBase pm, int timeout)
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//{
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// Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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// {
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// Notify($"Run {pm.Name} set Stb Off.");
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// //if (!servo.SetBlockNoHigh())
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// //{
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// // Stop(reason);
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// // return false;
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// //}
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// servo.SetStbOff();
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// return true;
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// }, () =>
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// {
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// if (servo.AlarmStatus)
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// {
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// Stop($"{pm.Name} Servo in error State.");
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// return null;
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// }
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// if (!servo.IsBusy)
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// return true;
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// return false;
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// }, timeout * 1000);
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// if (ret.Item1)
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// {
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// if (ret.Item2 == Result.FAIL)
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// {
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// throw (new RoutineFaildException());
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// }
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// else if (ret.Item2 == Result.TIMEOUT) //timeout
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// {
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// Stop($"{pm.Name} prepare vent timeout, over {timeout} seconds");
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// throw (new RoutineFaildException());
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// }
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// else
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// throw (new RoutineBreakException());
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// }
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//}
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//private void WaitStatusCorrect(int id, PMModule pm, int timeout)
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//{
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// Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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// {
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// Notify($"Run {pm.Name} Wait, Wait Status Correct");
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// return true;
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// }, () =>
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// {
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// if (servo.AlarmStatus)
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// {
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// Stop($"{pm.Name} Servo in error State error");
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// return null;
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// }
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// if ((!servo.MotorBusy && servo.PositionComplete) && pm.ConfinementRing.IsUp)
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// {
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// PMDevice.ServoStatus = ServoStatus.Up;
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// return true;
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// }
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// return false;
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// }, timeout * 1000);
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// if (ret.Item1)
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// {
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// if (ret.Item2 == Result.FAIL)
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// {
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// throw (new RoutineFaildException());
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// }
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// else if (ret.Item2 == Result.TIMEOUT) //timeout
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// {
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// Stop($"{pm.Name} vent timeout, over {timeout} seconds");
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// throw (new RoutineFaildException());
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// }
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// else
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// throw (new RoutineBreakException());
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// }
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//}
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public override void Abort()
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{
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if (!PmDevice.StopVent(out string reason))
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{
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EV.PostWarningLog(Module, reason);
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}
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Stop("aborted");
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}
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}
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}
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