287 lines
11 KiB
C#
287 lines
11 KiB
C#
using System.Collections.Generic;
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using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using SicModules.PMs.Routines.Base;
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namespace SicModules.PMs.RecipeExecutions
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{
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public class PostProcess : PMBaseRoutine
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{
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private enum RoutineStep
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{
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SetV31,
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SetV32,
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SetV35V36,
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SetGroupA,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupK,
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SetGroupD,
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SetGroupG,
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SetV65,
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SetV68,
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SetM1to17,
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SetM17M18,
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SetM2toM40,
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SetM18toM40,
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SetPC,
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SetEPV2,
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VentPumpClose,
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SetGroupV25,
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SetGroupJOpen,
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SetTVEnable,
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SetTVPressMode,
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SetPressUpOrDown,
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SetPressureUp,
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WaitPressureUp,
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EnableRotation,
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SetRotation1,
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SetRotation2,
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EnableTC1,
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SetTC1Mode,
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SetTC1Ratio,
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SetTC1Ratio1,
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CloseTC1,
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SetScrReset,
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EnableTC2,
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SetTC2Mode,
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SetTC2Ratio,
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SetTC2Ratio1,
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CloseTC2,
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WaitRotation1,
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SetV103,
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SetV105,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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}
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private int _IoValueOpenCloseTimeout = 10;
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private int _routineTimeOut = 10;
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private IoThrottleValve2 _IoThrottle;
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private double _pmPressureMaxDiff;
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private int _throttleTimeout;
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private double _pressureMax;
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private int _rotationSpeed = 60;
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private bool _psuHeatEnable = false;
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private int _psuHeatMode = 0;
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private float _psuL1Ratio = 0;
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private float _psuL2Ratio = 0;
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private float _psuL3Ratio = 0;
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private bool _scrHeatEnable = false;
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private int _scrHeatMode = 0;
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private float _scrL1Ratio = 0;
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private float _scrL2Ratio = 0;
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private float _scrL3Ratio = 0;
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private IoInterLock _pmInterLock;
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private Stopwatch _swTimer = new Stopwatch();
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public PostProcess(ModuleName module, PMModule pm1) : base(module, pm1)
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{
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Module = module.ToString();
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Name = "PostProcess";
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_pmInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (SC.GetValue<bool>("System.IsATMMode"))
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{
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return Result.DONE;
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}
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_routineTimeOut = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RoutineTimeOut");
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_pressureMax = SC.GetValue<double>($"PM.{Module}.ProcessIdle.FinalPressure");
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_rotationSpeed = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RotationSpeed");
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_psuHeatEnable = SC.GetValue<bool>($"PM.{Module}.ProcessIdle.PSUHeaterEnable");
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_psuHeatMode = SC.GetValue<int>($"PM.{Module}.ProcessIdle.PSUHeaterMode");
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_psuL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUInnerRatio");
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_psuL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUMiddleRatio");
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_psuL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUOuterRatio");
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_scrHeatEnable = SC.GetValue<bool>($"PM.{Module}.ProcessIdle.SCRHeaterEnable");
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_scrHeatMode = SC.GetValue<int>($"PM.{Module}.ProcessIdle.SCRHeaterMode");
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_scrL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRUpperRatio");
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_scrL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRMiddleRatio");
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_scrL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRLowerRatio");
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if (!_pmInterLock.SetPMPostProcessRunning(true, out string reason))
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{
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EV.PostAlarmLog(Module, $"can not run PostProcess, {reason}");
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return Result.FAIL;
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}
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_swTimer.Restart();
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AKunTriggerTempStop();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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//打开V31,打开V32
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//打开V35,打开V36
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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//关闭B/C/E/F/H/K 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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//打开D/G 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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// 1 - M17 设定为 default 值，所有 PC 设定为 default 值(PC1 - PC9)，
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1to17, MfcGroupName.M1toM17, 0);
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//所有PC设定为默认值
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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// M18 - M40（除 M30\M34\M39）） MFC 5s ramp 到 0。
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SetMfcByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 0, 5);
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//打开EPV2
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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//打开J Valves
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SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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//打开V72,关闭V25
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout);
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//设置蝶阀Enable
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SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5);
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//设置蝶阀为压力模式
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
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//使用动态流量伺服到300mbar
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SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown, PressureUpOrDown.Uping);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _throttleTimeout);
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//转速Enable,加热Enable, 电流功率可配置
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EnableRotation((int)RoutineStep.EnableRotation, 5);
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SetRotationValveAndNoWait((int)RoutineStep.SetRotation1, _rotationSpeed);
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if (_psuHeatEnable)
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{
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//打开PSU加热
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SetPSUEnable((int)RoutineStep.EnableTC1, true, 5);
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SetPSUHeatMode((int)RoutineStep.SetTC1Mode, _psuHeatMode);
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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SetPSUHeatRatio((int)RoutineStep.SetTC1Ratio, _psuL1Ratio, _psuL2Ratio, _psuL3Ratio);
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}
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else
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{
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//关闭PSU加热
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SetPSUHeatRatio((int)RoutineStep.SetTC1Ratio1, 0, 0, 0);
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SetPSUEnable((int)RoutineStep.CloseTC1, false, 5);
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}
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if (_scrHeatEnable)
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{
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//打开SCR加热
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SetSCRReset((int)RoutineStep.SetScrReset);
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TimeDelay((int)RoutineStep.TimeDelay2, 1);
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SetSCREnable((int)RoutineStep.EnableTC2, true, 5);
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SetSCRHeatMode((int)RoutineStep.SetTC2Mode, _scrHeatMode);
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TimeDelay((int)RoutineStep.TimeDelay3, 1);
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SetSCRHeatRatio((int)RoutineStep.SetTC2Ratio, _scrL1Ratio, _scrL2Ratio, _scrL3Ratio);
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}
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else
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{
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//关闭SCR加热
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SetSCRHeatRatio((int)RoutineStep.SetTC1Ratio1, 0, 0, 0);
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SetSCREnable((int)RoutineStep.CloseTC2, false, 5);
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}
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WaitRotationValve((int)RoutineStep.WaitRotation1, _rotationSpeed, true, _rotationSpeed / 2);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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_pmInterLock.SetPMPostProcessRunning(false, out _);
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_swTimer.Stop();
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return Result.DONE;
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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public override void Abort()
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{
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PmDevice._ioThrottleValve.StopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetHeaterStopRamp();
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PmDevice.SetRotationStopRamp();
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_pmInterLock.SetPMPostProcessRunning(false, out _);
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base.Abort();
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}
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}
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}
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