296 lines
25 KiB
XML
296 lines
25 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
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<Aitex>
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<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
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<!--###########################################-->
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="Step Information">
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<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
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<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
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<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="SH Flow->SH Total Flow">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1.N2/H2 Switch" UnitName="" ControlName="SHN2H2Switch.SetValve" Description="">
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<Item DisplayName="N2" ControlName="N2" />
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<Item DisplayName="H2" ControlName="H2" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
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<Item DisplayName="Ramp" ControlName="Ramp" />
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<Item DisplayName="Jump" ControlName="Jump" />
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</Step>
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</Group>
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<Group DisplayName="Pressure -> Rotation">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="Temperature -> Control Mode">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
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<Item DisplayName="Power" ControlName="Power" />
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<Item DisplayName="Follow" ControlName="PyroFollow" />
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<Item DisplayName="Auto" ControlName="PyroAuto" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
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<Item DisplayName="Ramp" ControlName="Ramp" />
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<Item DisplayName="Jump" ControlName="Jump" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
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<Item DisplayName="Power" ControlName="Power" />
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<Item DisplayName="Follow" ControlName="PyroFollow" />
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<Item DisplayName="Auto" ControlName="PyroAuto" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
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<Item DisplayName="Ramp" ControlName="Ramp" />
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<Item DisplayName="Jump" ControlName="Jump" />
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</Step>
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</Group>
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<Group DisplayName="Temperature -> Temp Setting">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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</Group>
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<Group DisplayName="Temperature -> Heater Output">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
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<!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU2 Output Limit High" UnitName="%" ControlName="PSU2.SetOutputLimitHighByRecipe" InputMode="" Min="0" Max="100" Description="" />-->
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="SH Flow->Source1->Source1 Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. Source1 Total Flow" UnitName="sccm" ControlName="Source1TotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Source1->Mo(CO)6 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="23. Mo(CO)6 Flow Mode" UnitName="" ControlName="MoCO6Flow.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="24. Mo(CO)6 Carrier Flow(M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="100" Description="M16Flow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. Mo(CO)6 Push Flow(M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="1000" Description="M10Flow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. Mo(CO)6 Pressure(PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="3000" Description="PC8"/>
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</Group>
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<Group DisplayName="SH Flow->Source1->Mo(Reserve) Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="27. Mo Flow Mode" UnitName="" ControlName="MoFlow.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. Mo Carrier Flow(M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="100" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. Mo Push Flow(M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. Mo Pressure(PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="3000" Description="PC9"/>
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</Group>
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<Group DisplayName="SH Flow->Source1->W(CO)6 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="31. W(CO)6 Flow Mode" UnitName="" ControlName="WCO6Flow.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. W(CO)6 Carrier Flow(M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="100" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. W(CO)6 Push Flow(M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. W(CO)6 Pressure(PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="3000" Description="PC2"/>
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</Group>
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<Group DisplayName="SH Flow->Source1->Source1 Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="35. Source Split Ratio" UnitName="" ControlName="Source1SplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. Source1 Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="3000" Description="PC5"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. Source1 Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="5000" IsColumnEditable="false" Description="M20"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. Source1 Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="39. Source1 Outer Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M18"/>
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</Group>
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<Group DisplayName="SH Flow->Source2->Source2 Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. Source2 Total Flow" UnitName="sccm" ControlName="Source2TotalFlow" InputMode="" Min="0" Max="200000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Source2->CS2 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="41. CS2 Flow Mode" UnitName="" ControlName="CS2Flow.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. CS2 Carrier Flow(M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="500" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. CS2 Push Flow(M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. CS2 Pressure(PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="3000" Description="PC3"/>
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</Group>
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<Group DisplayName="SH Flow->Source2->H2S Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. H2S Flow Mode" UnitName="" ControlName="H2SFlow.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. H2S Flow(M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="200" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Source2->H2Se Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="47. H2Se Flow Mode" UnitName="" ControlName="H2SeFlow.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. H2Se Flow(M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="200" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Source2->Source2 Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="49. Source2 Split Ratio" UnitName="" ControlName="Source2SplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. Source2 Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="3000" Description="PC6"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. Source2 Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="5000" IsColumnEditable="false" Description="M23"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. Source2 Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="53. Source2 Outer Flow (M21)" UnitName="sccm" ControlName="Mfc21.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M21"/>
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</Group>
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<Group DisplayName="SH Flow->Source3->Source3 Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. Source3 Total Flow" UnitName="sccm" ControlName="Source3TotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Source3->O2 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. O2 Flow Mode" UnitName="" ControlName="O2Flow.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. O2 Acutal Flow" UnitName="sccm" ControlName="O2ActualFlow" InputMode="" Min="0" Max="1000000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. O2 Flow(M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="100" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. Dilut Flow For Doping(M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. Diluted O2 Flow(M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="1000" IsColumnEditable="false" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. O2 Dilut Pressure(PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="3000" Description="PC1"/>
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</Group>
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<Group DisplayName="SH Flow->Source3->SO2 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="61. SO2 Flow Mode" UnitName="" ControlName="SO2Flow.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. SO2 Flow(M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="500" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Source3->Source3 Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="63. Source3 Split Ratio" UnitName="" ControlName="Source3SplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Source3 Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="3000" Description="PC7"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. Source3 Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="5000" IsColumnEditable="false" Description="M26"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Source3 Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Source3 Outer Flow (M24)" UnitName="sccm" ControlName="Mfc24.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M24"/>
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</Group>
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<Group DisplayName="SH Flow->SH Push Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="1000000" IsColumnEditable="false" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="1000000" IsColumnEditable="false" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="1000000" IsColumnEditable="false" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="1000000" DIsColumnEditable="false" escription=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="15000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="20000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="30000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="Purge->SH Periphery Purge">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="50000" Description="M27.SHPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="5000" Description="M33.OpticPurgeFlow"/>
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</Group>
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<Group DisplayName="Purge->Chamber Periphery Purge">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="15000" Description="M36.Rotation-upPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="20000" Description="M37.ShutterPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="30000" Description="M38.Heater-WFPurgeFlow"/>
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</Group>
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<Group DisplayName="Purge->Vent Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="1000000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="3000" Description="PC4.VentPre-ExhaustPres"/>
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</Group>
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</Catalog>
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<!--*************************************************************-->
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<ProcessConfig DisplayName="ProcessConfig">
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<Configs DisplayName="Process Config">
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</Configs>
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</ProcessConfig>
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</TableRecipeFormat>
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<TableRecipeSchema>
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<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
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<xs:simpleType name="processType">
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<xs:restriction base="xs:string">
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<xs:enumeration value="Process" />
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<xs:enumeration value="Clean" />
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</xs:restriction>
|
|
</xs:simpleType>
|
|
<xs:simpleType name="booleanType">
|
|
<xs:restriction base="xs:string">
|
|
<xs:enumeration value="0" />
|
|
<xs:enumeration value="1" />
|
|
<xs:enumeration value="False" />
|
|
<xs:enumeration value="True" />
|
|
<xs:enumeration value="false" />
|
|
<xs:enumeration value="true" />
|
|
</xs:restriction>
|
|
</xs:simpleType>
|
|
<xs:element name="TableRecipeData">
|
|
<xs:complexType>
|
|
<xs:sequence>
|
|
<xs:element maxOccurs="unbounded" name="Step">
|
|
<xs:complexType>
|
|
<xs:sequence>
|
|
|
|
<xs:element name="Mfc">
|
|
<xs:complexType>
|
|
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
|
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
|
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
|
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
|
</xs:complexType>
|
|
</xs:element>
|
|
|
|
</xs:sequence>
|
|
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
|
<xs:attribute name="Name" type="xs:string" use="required" />
|
|
<xs:attribute name="Loop" type="xs:string" use="required" />
|
|
<xs:attribute name="Type" type="xs:string" use="required" />
|
|
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
|
</xs:complexType>
|
|
</xs:element>
|
|
</xs:sequence>
|
|
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
|
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
|
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
|
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
|
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
|
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
|
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
|
<xs:attribute name="Description" type="xs:string" use="required" />
|
|
</xs:complexType>
|
|
</xs:element>
|
|
</xs:schema>
|
|
</TableRecipeSchema>
|
|
</Aitex> |