MoS2/App/Modules/SicModules/LLs/Routines/LoadHomeRoutine.cs
SIC1016\caipeilun c6bcd06b61 load伺服配置不隐藏
删除tm控制v124代码
2026-08-18 19:18:07 +08:00

71 lines
1.5 KiB
C#

using System;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
namespace SicModules.LLs.Routines
{
public class LoadHomeRoutine : LoadLockBaseRoutine
{
enum RoutineStep
{
CloseV79,
CloseV83,
CloseV84,
CloseV85
}
private int _homeTimeout;
public LoadHomeRoutine(ModuleName module)
{
Module = module.ToString();
Name = "Home";
}
public override Result Start(params object[] objs)
{
Reset();
_homeTimeout = SC.GetValue<int>("LoadLock.HomeTimeout");
Notify("Start");
return Result.RUN;
}
public override Result Monitor()
{
try
{
CloseLoadVent((int)RoutineStep.CloseV79);
CloseFastPump((int)RoutineStep.CloseV83);
CloseSlowPump((int)RoutineStep.CloseV84);
CloseBalanceValve((int)RoutineStep.CloseV85);
LoadLockDevice.AutoCreatWafer();
}
catch (RoutineBreakException)
{
return Result.RUN;
}
catch (RoutineFaildException ex)
{
LOG.Error(ex.ToString());
return Result.FAIL;
}
Notify("Finished");
return Result.DONE;
}
public override void Abort()
{
base.Abort();
}
}
}